Patents by Inventor Zohreh Razavi Hesabi

Zohreh Razavi Hesabi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHODS TO REDUCE PARTICLES IN A FILM DEPOSITION CHAMBER
    Publication number: 20230096772
    Abstract: Apparatus and methods for supplying a vapor to a processing chamber such as a film deposition chamber are described. The vapor delivery apparatus comprises an inlet conduit and an outlet conduit, in fluid communication with an ampoule. A needle valve device restricts flow through the outlet conduit.
    Type: Application
    Filed: December 5, 2022
    Publication date: March 30, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Maribel Maldonado-Garcia, Cong Trinh, Mihaela A. Balseanu, Kevin Griffin, Ning Li, Zohreh Razavi Hesabi
  • CONTROL OF LIQUID DELIVERY IN AUTO-REFILL SYSTEMS
    Publication number: 20220282379
    Abstract: An system, method and software for controlling processes of an auto-refill system of an ampoule including one or more sensors configured to determine one or more liquid level heights within the ampoule. The auto-refill system having a state machine configured to control the auto-refill system, the state machine having one or more states for refilling the ampoule.
    Type: Application
    Filed: March 2, 2021
    Publication date: September 8, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Zohreh Razavi Hesabi, Cong Trinh, Kevin Griffin, Alexander V. Garachtchenko, Kenric Choi, Vipin Jose, Saloni Sawalkar, Maribel Maldonado-Garcia, Kendrick H. Chaney
  • APPARATUS AND METHODS TO REDUCE PARTICLES IN A FILM DEPOSITION CHAMBER
    Publication number: 20210404058
    Abstract: Apparatus and methods for supplying a vapor to a processing chamber such as a film deposition chamber are described. The vapor delivery apparatus comprises an inlet conduit and an outlet conduit, in fluid communication with an ampoule. A needle valve device restricts flow through the outlet conduit.
    Type: Application
    Filed: June 24, 2020
    Publication date: December 30, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Maribel Maldonado-Garcia, Cong Trinh, Mihaela A. Balseanu, Kevin Griffin, Ning Li, Zohreh Razavi Hesabi