Abstract: A method is provided to improve the alignment process in fabricating an integrated circuit with buried layers. The buried layers are implanted in a substrate and driven in, but without the usual step at their perimeter. A target pattern is etched into the substrate surface by means of plasma-assisted etching. An isotropic epitaxial layer is then grown at reduced pressure over the substrate surface so that the target is replicated on the epitaxial layer surface. The target as replicated is thus suitable for optical alignment, either manually or by automatic alignment equipment.