Abstract: A method of processing a substrate is disclosed which includes depositing a layer in a processing chamber on a field region, a sidewall region, and a fill region of a feature of the substrate, wherein a hardness of a portion of the layer deposited on the sidewall region is lower than a hardness of a portion of the layer deposited on the field region, and lower than a hardness of a portion of the layer deposited on the fill region.

Abstract: The present disclosure relates to an integrated chip, which includes a cell enrichment region, a cell separation region and a cell capture region, wherein one end of the cell enrichment region is provided with an inlet, and the other end of the cell enrichment region is provided with a waste liquid outlet and an enriched liquid outlet; one end of the cell separation region is provided with a buffer solution inlet and an enriched liquid inlet , and the other end of the cell separation region is provided with an outlet; one end of the cell capture region is provided with an inlet, and the other end of the cell capture region is provided with a separated liquid outlet. Compared with the traditional technology, the chip can separate a target cell from a to-be-treated cell solution with a high efficiency, and capture the target cell in situ in a chip.

Abstract: The disclosure provides a laterally-displaced micropost array chip and the use thereof. The laterally-displaced micropost array chip includes laterally-displaced micro-pillar arrays arranged in columns or in rows. Micropost units in each subsequent column or subsequent row are displaced relative to a previous column or previous row according to a certain angle. Each of the micropost units is internally provided with one or more channels. In the one or more channels, the opening direction of at least one channel is different from the displacement directions of the laterally-displaced micropost arrays. The laterally-displaced micropost array chip of the invention more accurately separates particles of various sizes in fluids, has the function of filtering particles of small sizes, thereby enabling particles of large sizes to have an enrichment effect before entering the next array, reduces the critical separation sizes of micropost arrays, and is higher in throughput and larger in separation volume.

Abstract: The present disclosure relates to an integrated chip, which includes a cell enrichment region, a cell separation region and a cell capture region, wherein one end of the cell enrichment region is provided with an inlet, and the other end of the cell enrichment region is provided with a waste liquid outlet and an enriched liquid outlet; one end of the cell separation region is provided with a buffer solution inlet and an enriched liquid inlet , and the other end of the cell separation region is provided with an outlet; one end of the cell capture region is provided with an inlet, and the other end of the cell capture region is provided with a separated liquid outlet. Compared with the traditional technology, the chip can separate a target cell from a to-be-treated cell solution with a high efficiency, and capture the target cell in situ in a chip.

Abstract: The CRISPR-Cas nuclease system represents an efficient tool for genome editing and gene function analysis. It consists of two components: single-guide RNA (sgRNA) and the enzyme Cas9. The present invention introduces and optimizes a microfluidic membrane deformation method to deliver sgRNA and Cas9 into different cell types and achieve successful genome editing. This approach uses rapid cell mechanical deformation to generate transient membrane holes to enable delivery of biomaterials in the medium. The present invention has achieved high delivery efficiency of different macromolecules into different cell types, including hard-to-transfect lymphoma cells and embryonic stem cells, while maintaining high cell viability.