Patents by Inventor Zufa ZHANG

Zufa ZHANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20160190146
    Abstract: Integrated circuits and methods fabricating memory cells and integrated circuits are provided. In one embodiment, a method for fabricating a memory cell includes doping a semiconductor substrate to define a conductive region. The method includes forming a stacked structure over the semiconductor substrate. The stacked structure lies over the conductive region and includes a control gate overlying a floating gate. A source line region is formed adjacent a first side of the stacked structure. The method includes forming a contact over the semiconductor substrate and adjacent a second side of the stacked structure to define an electrical current path from the source line region through the conductive region under the stacked structure to the contact.
    Type: Application
    Filed: December 29, 2014
    Publication date: June 30, 2016
    Inventors: Zufa Zhang, Khee Yong Lim, Xinshu Cai
  • Patent number: 9379255
    Abstract: A non-volatile memory cell having a split gate, wherein the floating gate and the coupling/control gate have complimentary non-planar shapes. The shape may be a step shape. An array of such cells and a method of manufacturing the cells are also disclosed.
    Type: Grant
    Filed: July 16, 2012
    Date of Patent: June 28, 2016
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Baowei Qiao, Zufa Zhang, Yi Zhang, Shiuh Luen Wang, Wen-Juei Lu
  • Patent number: 9343466
    Abstract: Methods for fabricating memory cells, methods for fabricating integrated circuits having memory cells, and integrated circuits having memory cells are provided. In one example, a method for fabricating a memory cell includes depositing a first tunnel dielectric layer over a semiconductor substrate. The method includes depositing a floating gate material over the first tunnel dielectric layer. The method forms two control gate stacks over the floating gate material, defines a source line area between the two control gate stacks, and defines select gate areas adjacent the two control gate stacks. The method includes depositing a second tunnel dielectric layer over the select gate areas of the semiconductor substrate. Further, the method includes forming select gates over the second tunnel dielectric layer over the select gate areas of the semiconductor substrate. The second tunnel dielectric layer forms a gate dielectric layer for each select gate.
    Type: Grant
    Filed: December 29, 2014
    Date of Patent: May 17, 2016
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Zufa Zhang, Khee Yong Lim
  • Patent number: 9196830
    Abstract: A device is disclosed. The device includes a top electrode, a bottom electrode and a storage element between the top and bottom electrodes. The storage element includes a heat generating element disposed on the bottom electrode, a phase change element wrapping around an upper portion of the heat generating element, and a dielectric liner sandwiched between the phase change element and the heat generating element.
    Type: Grant
    Filed: February 18, 2015
    Date of Patent: November 24, 2015
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Khee Yong Lim, Zufa Zhang
  • Patent number: 9190532
    Abstract: A non-volatile memory cell has a single crystalline substrate of a first conductivity type with a top surface. A first region of a second conductivity type is in the substrate along the top surface. A second region of the second conductivity type is in the substrate along the top surface, spaced apart from the first region. A channel region is the first region and the second region. A word line gate is positioned over a first portion of the channel region, immediately adjacent to the first region. The word line gate is spaced apart from the channel region by a first insulating layer. A floating gate is positioned over another portion of the channel region. The floating gate has a lower surface separated from the channel region by a second insulating layer, and an upper surface opposite the lower surface. The floating gate has a first side wall adjacent to but separated from the word line gate; and a second side wall opposite the first side wall.
    Type: Grant
    Filed: August 8, 2012
    Date of Patent: November 17, 2015
    Assignee: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Baowei Qiao, Zufa Zhang, Yi Zhang, Shiuh Luen Wang, Wen-Juei Lu
  • Publication number: 20150162532
    Abstract: A device is disclosed. The device includes a top electrode, a bottom electrode and a storage element between the top and bottom electrodes. The storage element includes a heat generating element disposed on the bottom electrode, a phase change element wrapping around an upper portion of the heat generating element, and a dielectric liner sandwiched between the phase change element and the heat generating element.
    Type: Application
    Filed: February 18, 2015
    Publication date: June 11, 2015
    Inventors: Khee Yong LIM, Zufa ZHANG
  • Patent number: 8963116
    Abstract: A device is disclosed. The device includes a top electrode, a bottom electrode and a storage element between the top and bottom electrodes. The storage element includes a heat generating element disposed on the bottom electrode, a phase change element wrapping around an upper portion of the heat generating element, and a dielectric liner sandwiched between the phase change element and the heat generating element.
    Type: Grant
    Filed: October 30, 2012
    Date of Patent: February 24, 2015
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Khee Yong Lim, Zufa Zhang
  • Patent number: 8945997
    Abstract: Integrated circuits and methods for fabricating integrated circuits are provided. An exemplary method for fabricating an integrated circuit having a split-gate nonvolatile memory device includes forming a charge storage structure overlying a semiconductor substrate and having a first sidewall and a second sidewall and forming an interior cavity. The method forms a control gate in the interior cavity. Further, the method forms a first select gate overlying the semiconductor substrate and adjacent the first sidewall. A first memory cell is formed by the control gate and the first select gate. The method also forms a second select gate overlying the semiconductor substrate and adjacent the second sidewall. A second memory cell is formed by the control gate and the second select gate.
    Type: Grant
    Filed: June 27, 2013
    Date of Patent: February 3, 2015
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Zufa Zhang, Khee Yong Lim, Elgin Quek
  • Publication number: 20150001610
    Abstract: Integrated circuits and methods for fabricating integrated circuits are provided. An exemplary method for fabricating an integrated circuit having a split-gate nonvolatile memory device includes forming a charge storage structure overlying a semiconductor substrate and having a first sidewall and a second sidewall and forming an interior cavity. The method forms a control gate in the interior cavity. Further, the method forms a first select gate overlying the semiconductor substrate and adjacent the first sidewall. A first memory cell is formed by the control gate and the first select gate. The method also forms a second select gate overlying the semiconductor substrate and adjacent the second sidewall. A second memory cell is formed by the control gate and the second select gate.
    Type: Application
    Filed: June 27, 2013
    Publication date: January 1, 2015
    Inventors: Zufa Zhang, Khee Yong Lim, Elgin Quek
  • Publication number: 20140217489
    Abstract: A non-volatile memory cell has a single crystalline substrate of a first conductivity type with a top surface. A first region of a second conductivity type is in the substrate along the top surface. A second region of the second conductivity type is in the substrate along the top surface, spaced apart from the first region. A channel region is the first region and the second region. A word line gate is positioned over a first portion of the channel region, immediately adjacent to the first region. The word line gate is spaced apart from the channel region by a first insulating layer. A floating gate is positioned over another portion of the channel region. The floating gate has a lower surface separated from the channel region by a second insulating layer, and an upper surface opposite the lower surface. The floating gate has a first side wall adjacent to but separated from the word line gate; and a second side wall opposite the first side wall.
    Type: Application
    Filed: August 8, 2012
    Publication date: August 7, 2014
    Applicant: SILICON STORAGE TECHNOLOGY. Inc.
    Inventors: Chunming Wang, Baowei Qiao, Zufa Zhang, Yi Zhang, Shiuh luen Wang, Wen-Juei Lu
  • Publication number: 20140203343
    Abstract: A non-volatile memory cell having a split gate, wherein the floating gate and the coupling/control gate have complimentary non-planar shapes. The shape may be a step shape. An array of such cells and a method of manufacturing the cells are also disclosed.
    Type: Application
    Filed: July 16, 2012
    Publication date: July 24, 2014
    Applicant: Silicon Storage Technology, Inc.
    Inventors: Chunming Wang, Baowei Qiao, Zufa Zhang, Yi Zhang, Shiuh Luen Wang, Wen-Juei Lu
  • Publication number: 20140117301
    Abstract: A device is disclosed. The device includes a top electrode, a bottom electrode and a storage element between the top and bottom electrodes. The storage element includes a heat generating element disposed on the bottom electrode, a phase change element wrapping around an upper portion of the heat generating element, and a dielectric liner sandwiched between the phase change element and the heat generating element.
    Type: Application
    Filed: October 30, 2012
    Publication date: May 1, 2014
    Applicant: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Khee Yong LIM, Zufa ZHANG