Abstract: According to certain embodiments, a micro-electromechanical system (MEMS) apparatus has a MEMS mirror structure with a rotatable mirror. Rotation of the mirror produces a change in a measured capacitance corresponding to an angle of rotation. The MEMS structure sits on an oxide layer deposited on a substrate. There is a parasitic capacitance between the MEMS mirror structure and the substrate. An added capacitance is provided between the substrate and a DC voltage source. The added capacitance is much larger than the parasitic capacitance, and shunts the parasitic capacitance to ground to minimize its effect on the measured capacitance.

Abstract: Apparatuses and methods for controlling a micro-mirror are provided. In one example, a controller is coupled with a micro-mirror assembly comprising a micro-mirror, an actuator, and a sensor. The controller is configured to: receive a reference signal including information of a target oscillatory rotation of the micro-mirror; receive, from the sensor, the measurement signal of an oscillatory rotation of the micro-mirror; determine, based on the measurement signal and the information included in the reference signal, a difference between the oscillatory rotation of the micro-mirror and the target oscillatory rotation; receive an input control signal; generate, based on the difference and the input control signal, an output control signal to control at least one of a phase or an amplitude of the oscillatory rotation of the micro-mirror; and transmit the output control signal to the actuator.

Abstract: Embodiments of the disclosure provide systems and methods for incorporating an optical sensing system in a MEMS package for real-time sensing of angular position of a MEMS mirror. The system may include an optical source configured to emit an optical signal to a backside of the MEMS mirror. The system may also include an optical detector configured to receive a returning optical signal reflected by the backside of the MEMS mirror. The system may further include at least one controller. The at least one controller may be configured to determine a scanning angle of the MEMS mirror based on a position on the optical detector where the returning optical signal is received.

Abstract: Embodiments of the disclosure provide a mirror assembly for controlling optical directions in an optical sensing system. The mirror assembly may include a substrate and a micro mirror suspended over the substrate by at least one beam. The at least one beam may be mechanically coupled to the substrate. The mirror assembly may also include an actuator configured to tilt the micro mirror with respect to the substrate. The mirror assembly may further include a position sensor configured to detect a position of the micro mirror. Moreover, the mirror assembly may include a bias voltage source electrically coupled to the substrate to bias the substrate with a bias voltage.

Abstract: Embodiments of the disclosure provide control systems and methods for controlling a pulsed laser diode and a sensing device including a pulsed laser diode. An exemplary control system includes a distance detector configured to generate a distance signal indicating a distance between the pulsed laser diode and an object reflecting pulsed laser beams emitted by the pulsed laser diode. The control system may also include a controller configured to dynamically control power supplied to the pulse laser diode based on the distance signal.

Abstract: According to certain embodiments, a micro-electromechanical system (MEMS) apparatus has a MEMS mirror structure with a rotatable mirror. Rotation of the mirror produces a change in a measured capacitance corresponding to an angle of rotation. The MEMS structure sits on an oxide layer deposited on a substrate. There is a parasitic capacitance between the MEMS mirror structure and the substrate. An added capacitance is provided between the substrate and a DC voltage source. The added capacitance is much larger than the parasitic capacitance, and shunts the parasitic capacitance to ground to minimize its effect on the measured capacitance.

Abstract: Embodiments of the disclosure provide systems and methods for incorporating an optical sensing system in a MEMS package for real-time sensing of angular position of a MEMS mirror. The system may include an optical source configured to emit an optical signal to a backside of the MEMS mirror. The system may also include an optical detector configured to receive a returning optical signal reflected by the backside of the MEMS mirror. The system may further include at least one controller. The at least one controller may be configured to determine a scanning angle of the MEMS mirror based on a position on the optical detector where the returning optical signal is received.

Abstract: Embodiments of the disclosure provide a mirror assembly for controlling optical directions in an optical sensing system. The mirror assembly may include a substrate and a micro mirror suspended over the substrate by at least one beam. The at least one beam may be mechanically coupled to the substrate. The mirror assembly may also include an actuator configured to tilt the micro mirror with respect to the substrate. The mirror assembly may further include a position sensor configured to detect a position of the micro mirror. Moreover, the mirror assembly may include a bias voltage source electrically coupled to the substrate to bias the substrate with a bias voltage.

Abstract: Apparatuses and methods for controlling a micro-mirror are provided. In one example, a controller is coupled with a micro-mirror assembly comprising a micro-mirror, an actuator, and a sensor. The controller is configured to: receive a reference signal including information of a target oscillatory rotation of the micro-mirror; receive, from the sensor, the measurement signal of an oscillatory rotation of the micro-mirror; determine, based on the measurement signal and the information included in the reference signal, a difference between the oscillatory rotation of the micro-mirror and the target oscillatory rotation; receive an input control signal; generate, based on the difference and the input control signal, an output control signal to control at least one of a phase or an amplitude of the oscillatory rotation of the micro-mirror; and transmit the output control signal to the actuator.

Abstract: Embodiments of the disclosure provide control systems and methods for controlling a pulsed laser diode and a sensing device including a pulsed laser diode. An exemplary control system includes a distance detector configured to generate a distance signal indicating a distance between the pulsed laser diode and an object reflecting pulsed laser beams emitted by the pulsed laser diode. The control system may also include a controller configured to dynamically control power supplied to the pulse laser diode based on the distance signal.

Abstract: An open-loop feed-forward cross-correlator noise cancellation device includes a synthesizer to generate a synthesized output clock signal based on a reference clock signal. The open-loop feed-forward cross-correlator noise cancellation device also includes a cross-correlator device coupled to the synthesizer to receive the reference clock signal and the synthesized output clock signal and to cross-correlate the reference clock signal and the synthesized output clock signal to generate a cross-correlated output signal. The open-loop feed-forward cross-correlator noise cancellation device further includes a signal control delay line coupled to the cross-correlator device to generate an anti-phase noise signal based on the cross-correlated output signal to counter uncorrelated phase noise from additional circuitry of the synthesizer.

Abstract: An open-loop feed-forward auto-correlator phase noise and spur cancellation device includes a clock source to generate a clock signal with noise and/or spurs. The device also includes a phase auto-correlator coupled to an output of the clock source to generate a delayed clock signal and to auto-correlate the clock signal and the delayed clock signal to generate an auto-correlated control signal at an output of the phase auto-correlator. The device further includes a signal control delay line coupled to the output of the phase auto-correlator to modulate a phase of the clock signal based on the auto-correlated control signal to cancel the noise and/or spurs generated by the clock source. The signal control delay line includes a supply voltage regulator and a clock distribution network.

Abstract: An open-loop feed-forward cross-correlator noise cancellation device includes a synthesizer to generate a synthesized output clock signal based on a reference clock signal. The open-loop feed-forward cross-correlator noise cancellation device also includes a cross-correlator device coupled to the synthesizer to receive the reference clock signal and the synthesized output clock signal and to cross-correlate the reference clock signal and the synthesized output clock signal to generate a cross-correlated output signal. The open-loop feed-forward cross-correlator noise cancellation device further includes a signal control delay line coupled to the cross-correlator device to generate an anti-phase noise signal based on the cross-correlated output signal to counter uncorrelated phase noise from additional circuitry of the synthesizer.