Abstract: This invention discloses a method for fabricating a holographic grating with low diffractive wave aberrations on a substrate with aberrations. Forming a interference recording field from two coherent beams, where one is a parallel beam and the other is a beam whose wave-front can be controlled, recording the holographic field on the substrate with aberrations, fabricating the holographic grating with low diffractive wave aberrations, setting a deformable minor into one of the coherent recording beams, and controlling the shape of said deformable minor so as to obtain a compensated interference recording field. Expose the recoding plate under the holographic interference recording field which has been adjusted by the deformable minor to record the grating. After developing, the fabrication of holographic grating with low diffractive wave aberration is finished.