Alignment of semiconductor wafers and other articles
A wafer or some other article is aligned while being held by an end-effector.
The present invention relates to alignment of semiconductor wafers and other articles.
Fabrication of integrated circuits from a semiconductor wafer involves many processing steps, and the wafer may have to be aligned as it goes from one step to the next. For example, before a wafer is diced, it has to be attached to an adhesive film stretched over a frame, which requires accurate alignment of the wafer to the frame. Alignment is performed using a piece of equipment called aligner. A robot picks up the wafer and places it on the aligner. The aligner adjusts the position of the wafer in the horizontal plane to cause the center of the wafer to occupy a predetermined position. Then the aligner rotates the wafer to place the wafer into some predetermined rotational orientation, i.e. with some feature (a notch or a flat) on the wafer's circumference in a predetermined position. Then the robot picks up the wafer again and carries the wafer to a target station for the next processing step.
SUMMARYSome embodiments of the present invention eliminate the need to use an aligner. The wafer is aligned while held by the robot. The wafer processing becomes faster and more economical, and throughput is increased. Also, the wafer damage is reduced due to elimination of the wafer transfer to and from the aligner. In addition, the wafer position is more precise at the target station because the positioning errors involved in the robot picking up the wafer from the aligner are eliminated.
The invention is not limited by the embodiments and advantages described above, but is defined by the appended claims.
BRIEF DESCRIPTION OF THE DRAWINGS
In
Stations 121, 122 can be any stations involved in wafer storage or processing. Examples include wafer storage cassettes, horizontal wafer shipment containers (“pods”), etch and deposition equipment, film frame machines that attach adhesive film frames to wafers, dicing equipment. Before the wafer is placed on station 122, it is aligned at station 170. Alignment involves adjusting the XY position and the rotational orientation of the wafer relative to end effector 130. See e.g. the following U.S. Pat. Nos. 6,164,894; 5,456,179; 5,452,078. The wafer is aligned in end effector 130. Alignment station 170 does not need a wafer holder or a platform to hold the wafer. The end effector does not need to release the wafer to perform the alignment.
In the embodiment of
Top plate 220T has a central portion 250 (
Peripheral portion 260 extends sidewise from the bottom of central portion 250 and forms a horizontal shelf surrounding the central portion 250. A ring 270 rotates around the end effector's body 220. Ring 270 has a horizontal portion 270H which slides over the shelf 260. Teflon strip or strips 280 (
Spring steel plates 310 are attached to the top surface of central portion 250 with bolts 320 (
Ring 270 has outward protrusions 330. A pad 340 (
At station 170, the wafer is moved in the end effector to cause the center of the wafer to coincide with the center of the end effector (we will refer to this stage as “XY positioning”). Then the wafer is rotated in the end effector to align the wafer rotationally. The XY positioning involves techniques similar to those described in U.S. patent application attorney docket no. M-11881 US, entitled “Article Holders and Article Positioning Methods”, filed by A. J. Berger and F. E. Kretz on the same day as the present application and incorporated herein by reference. The XY positioning involves the robot pushing the wafer against an object or objects. The wafer slides on pads 340 without the end effector losing hold of the wafer. One embodiment is illustrated in
If wafers may have notches or flats, the pins are positioned so that any two of the pins are farther apart than the maximum lateral dimension of the notch or flat. (This is just an exemplary implementation which does not limit the invention. In other embodiments, the pins may be positioned closer to each other than the length of a flat for example.) As shown in
As shown in
As shown in
As shown in
When the alignment has been completed, the end effector places the wafer on destination station 122 (
The invention is not limited to any particular number of pins 510, 520, or their positioning. The pins do not have to be positioned symmetrically with respect to any axis. Also, article 120 and end effector 130 do not have to be round or symmetric. The pins can be replaced by other objects, vertical or otherwise, as described in the aforementioned U.S. patent application attorney docket no. M-11881. Either pins 510 or pins 520 can be omitted in some embodiments. The invention is not limited to any particular positioning of pins 510, 520, motor 610 or sensor 630 relative to each other. The sensor may be positioned close to the motor, below the motor for example.
In some embodiments, the XY positioning operations of
The invention is not limited to any particular alignment mechanism at station 170. For example, motor 610 can be coupled to end effector 130 using some other coupling means than wheel 620. Sensor 630 may be a through-beam type, a retroreflective type, a CCD camera, or some other type, known or to be invented.
In some embodiments, station 170 is part of robot 124 or destination station 122. For example, sensor 630, motor 610, and/or wheel 620 can be attached to the end effector or some other part of the robot.
Spring steel plates 310 allow ring 270 and wafer 120 to move up relative to end effector body 220 if the end effector presses the wafer against some surface at station 122. The surface may be that of a sticky tape, e.g. a dicing tape. See the aforementioned U.S. patent application Ser. No. 09/632,236 filed Aug. 4, 2000 by S. Casarotti et al., entitled “Detection and Handling of Semiconductor Wafers and Wafer-Like Objects”, incorporated herein by reference. Spring steel plates 310 allow the ring and the wafer to yield when the wafer is pressed against the surface, so wafer damage is avoided. The invention is not limited to any particular number or position of plates 310. Plates 310 can be made of a material other than spring steel, or can be omitted.
The invention is not limited to any particular structures or materials. For example, strips 280 (
The invention is not limited to semiconductor wafers. Article 120 may be include a stack of wafers bonded together to provide vertical integrated circuits. See U.S. Pat. No. 6,184,060 issued Feb. 6, 2001 to 0. Siniaguine and incorporated herein by reference. The article may include a combination of semiconductor and non-semiconductor wafers. See U.S. patent application Ser. No. 09/791,977 filed on Feb. 22, 2001 by O. Siniaguine and incorporated herein by reference. In other embodiments, the article is a flat-panel display or some other type extending generally along a plane.
The invention is not limited to end effector article holders. Holder 130 may be a hand-held article holder. A human operator may align the wafer in the end effector by pushing and rotating the wafer with the operator's hand. The operator's hand may push the wafer or the ring 270 or both. Holder 130 may also be part of non-electronically-controlled equipment. Other embodiments and variations are within the scope of the invention, as defined by the appended claims.
Claims
1. An article alignment method comprising:
- holding an article with an article holder; and
- rotating at least a portion of the article holder around an axis passing through the article to rotate the article relative to the article holder while the holder is holding the article.
2. The method of claim 1 wherein holding the article comprises pressing the article against the holder; and
- rotating at least a portion of the article holder comprises rotating at least a portion against which the article is pressed.
3. The method of claim 2 wherein the article holder comprises one or more openings through which one or more gas flows are emitted towards the article to attract the article to the holder; and
- the article is pressed against one or more protrusions on the holder.
4. The method of claim 2 wherein the article is pressed against one or more protrusions on the holder; and
- the method further comprises pushing the article against one or more objects to cause the article to slide on the one or more protrusions while the holder is holding the article.
5. The method of claim 1 further comprising transporting the article holder, with the article in the holder, to a rotary drive;
- wherein the rotating operation comprises coupling the drive to the article holder to transfer a rotary motion of the drive to the article.
6. The method of claim 5 wherein coupling the drive to the article holder comprises coupling the drive to a rotational member of the article holder, the rotational member physically contacting the article and coupling the rotary motion of the drive to the article.
7. A method for article handling, the method comprising:
- picking up an article with an article holder;
- sensing, with a sensor, the article's rotational orientation relative to an axis passing through the article, and if the rotational orientation is different from a predetermined orientation, then rotating the article to place the article into the predetermined orientation, wherein the sensing and rotating operations are performed while the article is held by the holder.
8. The method of claim 7 wherein holding the article comprises pressing the article against the holder; and
- rotating the article comprises rotating at least a portion of the article holder against which portion the article is pressed.
9. The method of claim 8 wherein the article holder comprises one or more openings through which one or more gas vortices are emitted towards the article to develop an attraction force attracting the article to the holder; and
- the article is pressed by the attraction force against one or more protrusions on the holder.
10. The method of claim 8 wherein the article is pressed against one or more protrusions on the holder; and
- the method further comprises pushing the article against one or more objects to cause the article to slide on the one or more protrusions while the holder is holding the article.
11. The method of claim 7 further comprising transporting the article holder, with the article in the holder, to a rotary drive;
- wherein the rotating operation comprises coupling the drive to the article holder to transfer a rotary motion of the drive to the article.
12. The method of claim 11 wherein coupling the drive to the article holder comprises coupling the drive to a rotational member of the article holder, the rotational member physically contacting the article and coupling the rotary motion of the drive to the article.
13. A robot end effector comprising a member rotational relative to the end effector, to allow an article held in the end effector to rotate around an axis passing through the article.
14. The end effector of claim 13 wherein the end effector further comprises:
- a body to which the member is coupled and around which the member is rotational; and
- a device for pressing the article against the member when the end effector is holding the article.
15. The end effector of claim 14 wherein the device comprises a vortex chuck to emit a gas vortex towards the article.
16. The end effector of claim 15 wherein the vortex chuck is mounted in the body.
17. A robot end effector comprising a mechanism for holding an article and rotating the article around an axis passing through the end effector.
18. The end effector of claim 17 wherein the end effector further comprises:
- a body to which the member is coupled and around which the member is rotational; and
- a device for pressing the article against the member when the end effector is holding the article.
19. The end effector of claim 17 wherein the device comprises a vortex chuck to emit a gas vortex towards the article.
20. The end effector of claim 19 wherein the vortex chuck is mounted in the body.
21. A computer system programmed to control an article holder and a motor for rotating at least a portion of the article holder to perform the operations of claim 1.
22. A computer readable medium comprising computer instructions to control an article holder and a motor for rotating at least a portion of the article holder to perform the operations of claim 1.
23. A computer system programmed to control an article holder and a motor for rotating at least a portion of the article holder to perform the operations of claim 8.
24. A computer readable medium comprising computer instructions to control an article holder and a motor for rotating at least a portion of the article holder to perform the operations of claim 8.
Type: Application
Filed: Jun 9, 2004
Publication Date: Jan 6, 2005
Patent Grant number: 7052229
Inventors: Alexander Berger (Palo Alto, CA), Frank Kretz (Santa Clara, CA)
Application Number: 10/865,328