Method for producing a dynamic fluid bearing with high rotation precision and high hardness
A method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure comprises the steps of: (1) selecting at least one rotary component provided with a predetermined surface pattern for supporting a distribution of fluid dynamic-pressure; (2) forming an opaque and hard amorphous diamond (DLC, a-D) film (or nano-crystalline diamond film) on the pivotal surface of the component by physical vapor deposition (PVD). Thereby the pivotal surfaces of the rotary component and the pattern thereon can have excellent hardness, wearing resistance, rotational stailbity and durability under repeated urging of dynamic fluid pressure.
The present invention relates to methods for manufacturing bearing components supporting fluid dynamic-pressure, more particularly to a method for manufacturing bearing components of high precision and hardness for dynamic pressure fluids, in which physical vapor deposition is utilized to coated an amorphous diamond film of hardness approaching 80-100 GPa over a pivotal interface or a patterned surface on which a fluid pressure is distributed of a bearing component.
BACKGROUND OF THE INVENTIONDynamic-pressure fluid bearings are used in high-speed driving units of hard disk drives and CD-ROM, which mainly comprise a sleeve, a spindle and a fluid, such as air and lubricating oil, injected therebetween. The dynamic-pressure fluid bearings of the prior art are categorized into dynamic-pressure fluid radial bearings and dynamic-pressure fluid thrust bearings. According to various necessities, the pivotal interface between the sleeve and the spindle of the bearings is provided with grooved or protrudent patterns of various contours, such as herring bone, tilting pad, foil, step and spiral groove. The grooved or protrudent patterns contribute to respective pressure distributions on the interface between the sleeve and the spindle after a fluid is injected thereon. For example, a radial pattern of herring bone, either on a spindle or on a sleeve, results in the levitation of the spindle by the dynamic pressure produced by the fluid as the sleeve and the spindle undergo a high-speed rotation with respect to each other. To eliminate the vibration of the spindle in ether high-speed rotation or deceleration, the spindle has to be made highly circular, and the spacing between the spindle and the sleeve has to be precisely uniform.
In the dynamic-pressure fluid bearings of the prior art, the spindle and the sleeve are completely separated in high-speed rotation. However, in the start-up period and in low-speed rotation, the spindle and the sleeve may contact and produce metal powder in the fluid, causing a change in fluid viscosity and therefore degrading the lubricating fluid. The durability and precision of the bearing components may also degrade.
To overcome the above-mentioned problems, the spindle and the sleeve of the bearings are made of hard metallic materials, such as high-speed steel, tungsten steel, beryllium copper alloy and phosphor bronze. However, the protective effect is not substantial.
As an alternative, the spindles and sleeves of the prior art are coated with hard films such as hard chromium and Electroless nickel. But, the films have yet to match the industrial requirements of precision, hardness and low cost.
It is another innovation that diamond like carbon (DLC) films coated via methods of physical vapor deposition (PVD) or chemical vapor deposition (CVD) over the spindle and the sleeve can provide higher hardness. However, the coating methods have a hydrogen problem that enhances water absorptivity of the films, increasing the frictional coefficient and thus decreasing the adhesive force of the films. It is a further defect that, since the diamond-like carbon film containing hydrogen (DLC, a-C:H) has a hydrogen content between 30-60%, as shown in Table 1, and the hardness thereof is below 50 GPa, as shown in
Accordingly, the primary objective of the present invention is to provide a method for manufacturing bearing components, such as sleeve and spindle, of high precision and hardness supporting fluid dynamic-pressure, which components are hard-wearing and durable so that the space between the spindle and the sleeve can maintain perfectly round after high speed rotation for a long time. And, further, it is convenient to produce such components.
The method disclosed by the present invention is coating a layer of amorphous diamond over bearing components by physical vapor deposition, whereby the connecting surfaces or the carved pattern of those components may have hardness of 80-100 GPa, density of 3.0-3.2 g/cm3 and coefficient of friction of 0.1. The hardness of the film can be twice more than that of the diamond like carbon film containing hydrogen (DLC, a-C:H) of the prior art, which is 10-50 GPa as shown in Table 2. Therefore, the film made by the present invention is highly wear-resisting, durable and adhesive, capable of protecting a trough against the dynamic pressure produced by high-speed fluid passing through. And, therefore, the components coated with the film can maintain low vibration, low wiggling, low noise, high durability and perfect roundness even after high-speed rotation for an extended period of time, especially when the components undergo an initial startup or a stall.
It is a further objective of the present invention that chemical vapor deposition is used to form a film of crystallize diamond of diamond-level hardness, attaining 80-100 GPa (as shown in Table 2). However, the coating temperature of this method should be higher (<600° C.) and therefore is more expansive; this method is suitable for producing thicker films.
The methods described above are for making bearing components of high precision and hardness supporting fluid dynamic-pressure and therefore suitable for making the sleeves and spindles of the motors used in personal computers, notebook computers, servers, printers, hard disk drive and CO-ROM. The method disclosed by the present invention can be applied in mass production and therefore of low production cost.
The present invention provides a method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure, comprising the steps of: selecting at least a first component of a plurality of pivotally connected bearing components supporting fluid dynamic-pressure, said first component having a predetermined surface pattern; forming an opaque and hard amorphous diamond (DLC, a-D) film on the pivotal surface of said first component by physical vapor deposition (PVD) using ion plating, said amorphous diamond film covering said pattern of said first component and/or the corresponding pivotal surface of a second component; and combining said first component coated with an amorphous diamond (DLC, a-D) film and said second component so that the space between said first and second components form a trough for filling a fluid, whereby said pivotal surfaces of said first and second components can be urged with a pressure distribution as a fluid is filled in said trough. The various objects and advantages of the present invention will be more readily understood from the following detailed description when read in conjunction with the appended drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
The components referred in a method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure according to the present invention are a plurality of pivotally connected rotary units. In the first preferred embodiment they are a sleeve 2 and a spindle 1; the spindle 1 is pivotally inserted into an axial hole 21 of the sleeve 2, as shown in
The spindle 1 comprises a shaft 11 and a bulged ring 12, which bulged ring 12 further includes an inclined end surface 121. The inclined end surface 121 and the lateral surface 111 of the shaft 11 form a smooth pivotal interface, as shown in
For stabilizing the rotary spindle 1, the central portion of the sleeve 2 is provided with an axial hole 21 and a ring receptacle 22, as shown in
As the lateral surface 111 of the shaft 11 and the inclined end surface 121 of the bulged ring 12 are smooth, as shown in
As the lateral surface 111 of the shaft 11 and the inclined end surface 121 of the bulged ring 12 have a predetermined bulged or carved pattern, as shown in
Except for the above two options, wherein one of the bearing components is selected to be provided with a predetermined bulged or carved pattern, both of the spindle 1 (including the lateral surface 111 of the shaft 11 and the inclined end surface 121 of the bulged ring 12) and the sleeve 2 (including inner wall 211 of the axial hole 21 and the inclined surface 221 of the ring receptacle 22) can be provided with a predetermined bulged or carved pattern simultaneously.
To enhance the wearing resistance and the durability of the spindle 1 and the sleeve 2, at least the lateral surface 111 of the shaft 11 and the inclined end surface 121 of the bulged ring 12 are coated with a film 10 (as shown in
Thereby, one rotary component, such as a spindle 1, coated with a film of amorphous diamond (a-D) or crystalline diamond (c-D) can pivotally couple with another rotary component, such as a sleeve 2, forming a fluid trough 30 therebetween, as shown in
The amorphous diamond film (a-D) used in the present invention and the diamond-like carbon film containing hydrogen (DLC, a-C:H) of the prior art have different properties. As shown in
Further, as shown in Table 1 and 2, the amorphous diamond film (DLC, a-D) of the present invention hardly contains hydrogen (H %<5) but has sp3 binding above 85%. Therefore, the hardness and the adhesive force are superior to the diamond-like carbon film containing hydrogen (DLC, a-C: H) of the prior art. In other words, the amorphous diamond film (a-D) is close to diamond, and suitable for being coated on a bearing component to enhance its wearing resistance, durability and motion rotational stability.
Further, the formation of the amorphous diamond (a-D) and the crystalline diamond (c-D) are described as follows.
Diamond is the high-pressure phase of carbon, and therefore it is formed under a high pressure, as shown in
In higher vacuum (ambient pressure 10−3 torr or lower), physical vapor deposition (PVD) can be used, by which pure carbon materials of molecules containing carbon atoms, such as methane, are bombarded to form diamond-like carbon films (DLC). A diamond-like carbon film (DLC) can be coated over complex contour of a component, the thickness of which film can be less than <1 μm, as shown in
The above-mentioned physical vapor deposition seems to be performed in vacuum, but the diamond structure therein is still formed by a high-pressure means; only a tiny number of carbon atoms experience a high pressure in a short period of time. Therefore, physical vapor deposition can be interpreted as a principle of leverage, namely, exerting high pressure to carbon atoms a small number at a time. On the other hand, the high-pressure synthesis of the prior art exerts pressure all atoms at a time.
In other words, the low-pressure method needs a long time to form diamond; the growth rate of diamond for CVD is 1-100 μm/hr and for PVD is 0.1-10 μm/hr. While the high-pressure method has a faster growth rate, exceeding 1000 μm/hr or 1 mm/hr.
-
- PVDD=physical vapor deposited diamond (PVD Diamond);
- CVDD=chemical vapor deposited diamond (CVD Diamond);
- PCD=Poly-crystallize Diamond;
- arrows=representing the tendencies of diamond film properties (including deposition temperature, growth rate, sp3/sp2π, crystal granule roughness, density, hardness, wearing resistance, heat conduction, electric resistance).
Further, when the chemical vapor deposition (CVD) is used to synthesize diamond, four hydrogen atoms will circle around a carbon atom to form a structure similar to that of methane. For a methane molecule, the hydrocarbon binding energy per atom is about 4.6 eV. Table 3 shows the relation between energy density (i.e., pressure) and the temperature,
-
- E(temperature)=k(Boltzmann constant)×T(absolute temperature).
The 4.6 eV per atom energy density of the hydrocarbon bond is
equivalent to 2 million ATM, which is greater than the pressure attainable in the traditional high-pressure methods (50,000 ATM for static pressurization, 400,000 ATM for explosion pressurization). Therefore, although chemical vapor deposition (CVD) is named low-pressure method, the actual pressure attained is 40 times than that of the high-pressure synthesis methods.
If the methane ions mentioned above that bombard a component surface have an excessively high kinetic energy, the carbon atoms thereof will penetrate the surface and implant into the component, as shown in
Further, when using physical vapor deposition (PVD) to synthesize a diamond-like carbon film (DLC), respective carbon atoms are boosted to a kinetic energy of 10-100 eV. The high-speed carbon atoms, when bombarding a component surface, will produce extremely high temperature and pressure instantaneously at the striking point, as shown in
In summary, the synthesis of diamond must be done under hing pressure and at high temperature. The traditional high-pressure methods can continuously heat and pressurize carbon atoms. The chemical vapor deposition (CVD) is a microscopic high-pressure method that can convert carbon atoms into diamond a small group at a time. Take the formation of an image as an analogy, the high-pressure methods are like taking a picture, which builds up a whole image at once, whereas chemical vapor deposition (CVD) is like painting an image, which is gradually formed by local painting.
The microscopic and macroscopic versions of the static pressurization have analogies in the explosive pressurization. The traditional explosion method heats up and exerts pressure on whole carbon atoms and transforms them into diamond structure in a moment. PVD is the microscopic version of the explosion method, which uses electric energy to collide a small number of carbon atoms into diamond at a time. The macroscopic version is like bomb explosion, whereas the microscopic version is like machine gun shooting. The comparison of the four diamond synthesis methods is specified in Table 4.
The four covalent electrons of a carbon atom usually hybridize into sp2π or sp3 molecular orbits. The sp2π molecular orbit form three covalent bonds (sp2) and a metallic bond (π); examples are the atomic arrangement of graphite in
The sp2π bond and the sp3 bond can be mixed to form a intermediate state having a non-integer dimensionality, such as the
structure of carbon 60 (bucky ball) comprises 72% sp2π graphite bonds and 28% sp3 diamond bonds, as shown in
A diamond-like carbon (DLC, a-C:H) film may contain a large amount of hydrogen atoms, about ⅓. If the hydrogen content increases to ⅔, the carbon material will approach a polymer substance, as shown in
As shown in
To grow the diamond granules, a process of core formation and expansion must be activated. An instrument of pressurization is therefore needed. However, direct diamond conversion needs very high temperature and pressure, and an ordinary instrument of pressurization can only make diamonds of small volume, not practical for industrial production. Therefore, it is necessary to use catalytic agents to lower the activation energy of diamond, so that diamond can be grown at lower temperature and pressure.
A catalytic agent must react with graphite, whereby the structure of the graphite becomes loose. However, the catalytic agent should not over-react with graphite, or it will form chemical compounds. Therefore, a suitable catalytic agent must effectively loosen the graphite structure but not react with the graphite.
The catalytic agents commonly used in the synthesis of diamond are transitional elements in a molten state. The d-electron of the transitional elements has a kinetic energy between s- and p-electron, and therefore they can interact with many other elements. If the d-orbit lacks electrons, the element thereof would attract the s- or p-electrons of other elements to form compounds. Therefore, the transitional elements close to the left side of the periodic table, such as Sc, Ti, V, are easy to form hydrides, carbides and oxides. If the d-orbit is filled, such as Cu and Zn, the elements thereof will not interact with hydrogen, carbon, nitrogen and oxygen.
Between these two extremes, the transitional elements such as Cr, Mn, Fe, Co, Ni will interact properly with carbon, resulting in making carbon in a molten state without forming compounds. This is exactly what we want for a suitable catalytic agent.
Further, carbon matter of a single element can be produced by physical vapor deposition (PVD), which is classified into two types as follows.
An arc plating method uses electric arc to gasify graphite, the carbon atoms of which become positive ions. The ions are accelerated by an electric field to shoot on a negatively biased workpiece, forming amorphous diamond or nano-crystalline diamond by mutual collisions.
Another means is a low current, high voltage sputtering method, whereby argon ions bombard a graphite target and eject carbon atoms onto a workpiece 4 to form a diamond-like carbon (DLC, a-C:H) film.
By the straight path of atoms, when arc plating (or called as ion plating) with high current and lower voltage is used, a higher energy is acquired and the current is larger. Meanwhile, since the atoms suffer from larger pressure and higher temperature, the ratio for forming amorphous diamond film of sp3 or nano-crystallize diamond film is higher to a value of 85%. Moreover the hardness can achieve a value of 80 to 100 GPa which has superior wearing tolerance than the hardness of the DLC, a-C:H which has a hardness below 50 GPa.
On the other hand, when the above-mentioned sputtering method is adopted, the trajectory of the ejected atoms follows a scattering pattern, and the energy and the current are small. Therefore, the carbon atoms on the surface of the workpiece 4 cannot experience sufficient temperature and pressure. The diamond-like carbon (DLC, a-C:H) film thereby formed has a sp3 ratio less than 50%.
For enhancing the solidity of the amorphous diamond (DLC, a-D) film, an argon ion gun 52 and a methane ion gun 53 are used together in a high-vacuum chamber 71 to arc-plate the surface of a workpiece 4 at lower temperature (20-50° C.), as shown in
Further,
When sputtering is being performed, a plurality of targets of different contents can be used at the same time, and then an ion gun is used to bombard a workpiece. A film thus plated may have a complex content.
When making an amorphous diamond (DLC, a-D) film, the kinetic energy of carbon ions has to be kept in a suitable range. If it is less than 100 eV, the carbon ions cannot form polymer substance with high hydrogen content, instead of diamond. If it exceeds 400 eV, the ions are easy to get reflected from the target, and pits will be formed at the striking points. And it is a further effect than the heat produced by excessively high energy ions would transform the amorphous diamond (DLC, a-D) layer already formed into graphite. Therefore, a suitable range of ion kinetic energy is from 100 to 300 eV, preferably close to 150 eV. As the ion kinetic energy is increased from low to high, the hydrogen content of the film becomes lower, and the film structure will transform from transparent soft polymer to opaque hard amorphous diamond (DLC, a-D). However, if the energy is too high, the amorphous diamond (DLC, a-D) will transform into opaque soft graphite.
Therefore, besides the ion kinetic energy, gas pressure, temperature and the workpiece material also affect the property of the amorphous diamond (DLC, a-D) film; however, their influences are secondary. For example, as the gas pressure is increased, the kinetic energy of the ions becomes lower, and, as the temperature is increased, the kinetic energy becomes higher. Adopting heavier gaseous carbon source (such as benzene) can accelerate the plating rate. However, since pure carbon ions are smaller than hydrocarbon ions, the ion kinetic energy required for forming diamond is lower, which is 30-80 eV. Because carbon ions do not contain hydrogen atoms, the amorphous diamond (DLC, a-D) thereby formed is of higher density and greater hardness. The amorphous diamond (DLC, a-D) without hydrogen atoms can have an sp3 bonds ratio as high as 85%. Therefore, it is rather close to natural diamond. Compared with other methods such as sputtering and evaporation plating that produce ions having too low a kinetic energy, the arc plating is the most effective method to form amorphous diamond (DLC, a-D) films.
The property of the amorphous diamond (DLC, a-D) film can be controlled by carbon sources, gas and workpiece parameters.
The physical vapor deposition (PVD) adopting cathode arcs is a mature technology and can produce a variety of films, as shown in Table 5.
The most effective means for making an amorphous diamond film (DLC, a-D) is graphite cathode arc plating.
The ionization percentage of cathode-arc carbon is as high as 50-100%, and the kinetic energy thereof reaches 10-100 eV. Therefore, the hardness of the amorphous diamond film (a-D) thus formed is close to that of diamond. It is further advantageous that the growth rate of the amorphous diamond film (a-D) plated by cathode arc is fast, attaining 30 μm/hr. If carbon ions are implanted into the surface layer of the component before the arc plating, the adhesive force of the amorphous diamond film (DLC, a-D) with the component surface can be significantly enhanced.
Cathode arc can plate amorphous diamond films (DLC, a-D) on most of conductors (such as Al, Cu, Fe), and the component temperature can be maintained below 150° C. However, when the graphite electrode turns into gas, many micro-particles, lumped groups of carbon atoms, are ejected and may be attached to the component. To prevent such attachments, mass spectrometer is used to form a magnetically controlled passage for turning the positive carbon ions toward the target, leaving micro-particles being collected due to their greater mass. The mass-spectrometer curved magnetic tube assures that the amorphous diamond film (DLC, a-D) contains no micro-particles.
In summary, the method according to the present invention, especially the physical vapor deposition, may plate an amorphous diamond film (a-D) on a bearing component so that the hardness of the film thereof can attain 80-100 GPa, which is twice of the diamond-like carbon film produced by traditional methods. Therefore, the components thus produced are much enhanced in rotational stability and precision, wearing resistance and durability.
The present invention is thus described, and it will be obvious that the same may be varied in many ways. Such variations are not to be regarded as a departure from the spirit and scope of the present invention, and all such modifications as would be obvious to one skilled in the art are intended to be included within the scope of the following claims.
Claims
1. A method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure, comprising the steps of:
- selecting at least a first component of a plurality of pivotally connected bearing components supporting fluid dynamic-pressure, said first component having a predetermined surface pattern;
- forming an opaque and hard amorphous diamond (DLC, a-D) film on the pivotal surface of said first component by physical vapor deposition (PVD) using ion plating, said amorphous diamond film covering said pattern of said first component and/or the corresponding pivotal surface of a second component; and
- combining said first component coated with an amorphous diamond (DLC, a-D) film and said second component so that the space between said first and second components form a trough for filling a fluid, whereby said pivotal surfaces of said first and second components can be urged with a pressure distribution as a fluid is filled in said trough.
2. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein said first component is a spindle and said pivotal surface thereof consists of a rod surface portion and an inclined surface portion of a bulged round terminal.
3. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein said first component is a sleeve and said pivotal surface thereof consists of the inner wall portion of a spindle hole and an inclined inner surface portion of a round terminal indentation.
3. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein said surface pattern is selected from a bulged pattern and a notched pattern.
5. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein the kinetic energy of said ion plating is gradually increased in a ranged of 150-250 eV.
6. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein the sp3 binding of said amorphous diamond (DLC, a-D) film exceeds 85%.
7. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein the hardness of said amorphous diamond (DLC, a-D) film is 80-100 GPa.
8. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein said ion plating is directly injecting cathode arc on said components.
9. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 8 wherein said cathode arc is graphite cathode arc.
10. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 8 wherein the temperature of said components are maintained under 150° C.
11. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 8 wherein a catalytic agent is added to react with said graphite in said process of ion plating.
12. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 11 wherein said catalytic agent is selected from the group of molten Cr, Mn, Fe, Co and Ni elements.
13. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 8 wherein said components are selected from metal, ceramic and plastic.
14. The method for manufacturing bearing components of high precision and hardness supporting fluid dynamic-pressure of claim 1 wherein said fluid is selected from air and lubricating oil.
Type: Application
Filed: Sep 22, 2004
Publication Date: Mar 23, 2006
Inventors: Shao Tseng (Tau Yuan Hsien), Hsin Tseng (Tau Yuan Hsien), Te Yuan (Tau Yuan Hsien), Ching Lee (Tau Yuan Hsien)
Application Number: 10/946,091
International Classification: B21K 1/10 (20060101);