Ejecting method and ejecting apparatus
In an ink jet apparatus for manufacturing a color filter 1, ink jet heads 22 having a plurality of nozzle 27 are disposed in a linear manner. Filter element member is ejected to a motherboard 12 from a plurality of nozzles 27 four times so as to form the filter element 3 in a predetermined thickness. By doing this, it is possible to prevent difference in the thickness in a plurality of the filter elements 3 and to equalize light transparency in planar manner. Thus, in an ejecting apparatus, a color filter can be formed in more common way at low cost and more efficiently. Also, it is possible to provide an ejecting apparatus which can equalize factors such as electrooptical characteristics of the electrooptical members, color displaying characteristics by the liquid crystal apparatuses, and illuminating characteristics by an EL surface.
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This is a Division of application Ser. No. 10/301,917 filed Nov. 22, 2002. The disclosure of the prior application is hereby incorporated by reference herein in its entirety.
BACKGROUND1. Field of the Invention
The present invention relates to an ejecting method for ejecting a fluid liquid material and relates to an apparatus therefor. Also, the present invention relates to an electrooptical apparatus such as a liquid crystal apparatus, an electroluminescent apparatus (hereinafter called an EL apparatus), an electrophoretic apparatus, and a plasma display panel apparatus (hereinafter called a PDP apparatus). Also, the present invention relates to a manufacturing method for an electron emission apparatus for manufacturing electrooptical apparatuses and relates to a manufacturing apparatus therefor. Also, the present invention relates to a color filter, which is used in electrooptical apparatus, and to a manufacturing method for the color filter, and to a manufacturing apparatus therefor. Furthermore, the present invention relates to an electrooptical member, a semiconductor apparatus, an optical member, a device having a base member such as a reagent inspection member, a manufacturing apparatus for the device having the base member, and the manufacturing apparatus therefor.
2. Description of Related Art
Recently, display apparatuses which are electrooptical apparatuses such as liquid display apparatuses, and an EL apparatuses are commonly used for display sections in electronic devices such as mobile phones, a mobile computers, etc. Also, recently, it is more common for full color display operation to be performed by the display apparatuses. For example, full color display operation by a liquid crystal apparatus is performed by passing a light, which is modulated by a liquid crystal layer through a color filter. The color filter is formed by disposing color filter elements in a dot form, such as those of R (red), G (green), and B (blue), on a surface of a base board which is made from a glass member or a plastic member in a predetermined disposition method such as stripe-disposition, delta-disposition, and mosaic disposition.
Also, in full color display operation by an EL apparatus, EL luminescent layers such as those of R (red), G (green), and B (blue) in dot form are disposed on a surface of the base board made of a glass member or a plastic member in a predetermined disposition such as stripe-disposition, delta-disposition, and mosaic disposition. Consequently, these EL luminescent layers are sandwiched by a pair of electrodes; thus a picture element pixel is formed. By controlling voltage, which is applied to these electrodes for each picture element pixel, these picture element pixels are illuminated in an intended color; thus, full color display operation is realized.
Conventionally, it has been known that photolithography methods may be used for performing a patterning operation on color filter elements such as those of R (red), G (green), and B (blue) of the color filter and a patterning operation for color picture element pixels such as those of R (red), G (green), and B (blue) of the EL apparatus. However, there were problems in that manufacturing processes of the photolithography method were complicated and large quantities of coloring materials and photoresist were consumed; thus, manufacturing cost increased.
In order to solve this problem, a method was proposed for forming a filament which is disposed in a dot array form and an EL luminescent layer by ejecting a filter element member and EL luminescent member in a dot form by an ink jet method.
Here, a method for forming a filament and an EL luminescent layer in dot form by an ink jet method is explained. Here, a plurality of filter elements 303 which are disposed in dot form as shown in
The filter element 303 is formed by disposing colors such as those of R, G, and B in a preferred disposition such as stripe-disposition, delta-disposition, and mosaic disposition as explained above. By doing this, in an ink ejecting process by an ink jet head 306 as shown in
However, generally, the amount of ink which is ejected by a plurality of nozzles 304 contained in a nozzle array 305 of the ink jet head 306 varies among a plurality of nozzles. This is caused by ink ejection characteristics shown in
Therefore, as shown in
On the other hand, a plurality of panel areas 302 is formed on the motherboard 301, and it is proposed that a filter element 303 can be formed efficiently when the ink jet head is disposed in an overall area in width dimension of the motherboard 301 crossing a main scanning direction of the ink jet head by using a longitudinal ink jet head. However, when a different size of motherboard 301 is used according to the panel area 302, an ink jet head having a different size is necessary for each of the cases; thus, the cost increases.
SUMMARYThe present invention was made in consideration of the above-mentioned problems. An object of the present invention is to provide an ejecting method for forming filter elements efficiently with low manufacturing cost in a more common way by using a liquid drop ejecting head such as an ink jet, and an apparatus therefor, an electrooptical apparatus and manufacturing method therefor and a manufacturing apparatus therefor, a color filter and manufacturing method therefor and a manufacturing apparatus therefor, a device having a base member, and controlling method therefor and a manufacturing apparatus therefor.
(1) The ejecting apparatus is characterized in comprising:
-
- a liquid drop ejecting head having a plurality of nozzles aligned for ejecting a fluid liquid material onto a substance to receive the ejection;
- a holding member for holding a surface on which a plurality of the nozzles of the liquid drop ejecting head for ejecting the liquid material are disposed in line so as to face a surface of the substance to receive the ejection having a space between the surface which has the nozzles and the surface of the substance to receive the ejection; and
- a moving member which moves at least one of the holding member or the substance to receive the ejection relatively such that the liquid drop ejecting head is along the surface of the substance to receive the ejection, wherein
- an array of the nozzles which are disposed on each of the liquid drop ejecting heads are disposed in a direction which crosses the substance to receive the ejection diagonally to a direction of relative movement to the substance to receive the ejection.
In the present invention, a liquid drop ejecting head having a plurality of nozzles aligned for ejecting a fluid liquid material is moved relatively along a surface of a substance to receive the ejection such that a surface on which these liquid drop ejecting heads are disposed face a surface of the substance to receive the ejection having a space therebetween. The same liquid material is ejected to the substance to receive the ejection from each nozzle of a plurality of the liquid drop ejecting heads. The nozzle array which is disposed on each of the liquid drop ejecting head is disposed in a first direction which crosses a direction diagonally in which the nozzle array is moved relatively to the substance to receive the ejection By doing this, the same liquid material is ejected from nozzles of a plurality of the liquid drop ejecting head which are disposed in line. Therefore, it is possible to eject a liquid material in a wide range by using an ordinary and common specification liquid drop ejecting head. Therefore, it is possible to reduce costs by using conventional common specification liquid drop ejecting heads instead of a special design liquid drop ejecting head. In addition, by adjusting the number of the liquid drop ejecting heads which are supposed to be disposed in line, it is possible to set the liquid drop ejecting head according to the positions to which the liquid material is ejected. Thus, the liquid drop ejecting head can be used more commonly.
Also, in the present invention, it is preferable that a plurality of the liquid drop ejecting heads be disposed in a second direction which crosses the substance to receive the ejection diagonally to a direction of relative movement to the substance to receive the ejection. By doing this, a plurality of the liquid drop ejecting heads are disposed so as to be diagonal to a main scanning direction in which the liquid drop ejecting head is moved along a surface of the substance to receive the ejection. For example, when nozzles are disposed on a line, a pitch such as an interval at which the liquid material is ejected becomes narrower than a pitch between the nozzles. For example, the substance to receive the ejection to which a liquid material is ejected is used for a display apparatus, and the displaying condition becomes finer. Furthermore, an interference caused between neighboring liquid drop ejecting heads can be prevented; thus, it is possible to make the apparatus smaller.
Also, in the present invention, it is preferable that the shape of a plurality of the liquid drop ejecting heads be substantially the same as each other. By doing this, it is possible to make the liquid drop ejecting heads correspond to the area to which the liquid material is ejected. Thus, the structure of the apparatus becomes simpler, and the productivity increases, and the cost can be reduced.
In the present invention, it is preferable that each one of a plurality of the liquid drop ejecting heads have the same number of nozzles. By doing this, each of a plurality of the liquid drop ejecting heads has the same number of nozzles, ant it is therefore easy to delineate a predetermined pattern such as a stripe, a mosaic, and delta for a disposition pattern for a plurality of liquid drop ejecting heads.
In the present invention, it is preferred that each one of a plurality of the liquid drop ejecting heads have nozzles which are located at the same corresponding position. By doing this, it is preferable that a position in which nozzles of a plurality of the liquid drop ejecting head are formed in the same positions among the liquid drop ejecting heads. By doing this, it is easy to delineate a predetermined pattern such as a stripe, a mosaic, and delta for a disposition pattern for a plurality of liquid drop ejecting heads.
Furthermore, it is preferable that each of a plurality of the liquid drop ejecting heads have the nozzles aligned in an array in nearly and equal interval. By doing this, the nozzles of a plurality of the liquid drop ejecting head are aligned in an array in nearly equal interval. Therefore, it is easy to delineate a predetermined pattern such as a stripe, a mosaic, and a delta for a disposition pattern for a plurality of liquid drop ejecting heads.
Also, it is preferable that the liquid drop ejecting heads be formed in nearly a rectangular shape along a direction of the nozzles which are disposed. By doing this, the liquid drop ejecting head is formed in nearly a rectangular shape along a direction of the nozzles which are disposed; therefore, it is possible to realize a smaller liquid drop ejecting head, and reduce interference of the liquid drop ejecting head by other structures. Therefore, it is possible to realize a smaller liquid drop ejecting head more easily.
Also, in the present invention, it is preferable that a plurality of the liquid drop ejecting heads be disposed in the second direction which diagonally crosses a direction in which the substance to receive the ejection moves relatively such that the nozzles are disposed nearly parallel with each other. By doing this, a plurality of the liquid drop ejecting heads are moved relatively along a surface of the substance to receive the ejection so as to move along a direction in which the liquid drop ejecting head moves relatively along a surface of the substance to receive the ejection crosses diagonally a direction in which the nozzles are disposed nearly linearly. Therefore, the nozzles are disposed diagonally to a main scanning direction in which a plurality of the liquid drop ejecting heads moves along a surface of the substance to receive the ejection. Thus, a pitch with such an interval at which the liquid material is ejected becomes narrower than a pitch between the nozzles. For example, the substance to receive the ejection to which the liquid material is ejected is used for a display apparatus, and displaying condition becomes finer. Furthermore, an interference caused between neighboring liquid drop ejecting heads can be prevented; thus, it is possible to minimize the size of the apparatus.
Also, in the present invention, it is preferable that the array of the nozzles of a plurality of the liquid drop ejecting head be disposed in a direction which diagonally crosses a direction in which the nozzles move relatively to the substance to receive the ejection, and the array of the nozzles of a plurality of the liquid drop ejecting head are disposed so as to be parallel with each other. By doing this, a plurality of the liquid drop ejecting heads and the nozzles are disposed in a direction which crosses diagonally a direction in which the liquid drop ejecting heads are moved relatively along a surface of the substance to receive the ejection. Thus, a pitch at such an interval at which the liquid material is ejected becomes narrower than a pitch between the nozzles. For example, the substance to receive the ejection to which the liquid material is ejected is used for a display apparatus, and displaying condition becomes finer. Furthermore, an interference caused between neighboring liquid drop ejecting heads can be prevented; thus, it is possible to minimize the size of the apparatus. Also, a plurality of ejection areas to which the liquid material is ejected are formed easily in one region; therefore, liquid material ejecting efficiency is improved. Also, it is possible to eject the liquid material to one region in a multiple manner from the liquid drop ejecting head; thus, ejection amount can be equalized in the ejection area easily.
Also, in the present invention, it is preferable that a plurality of the liquid drop ejecting heads neighboring each other disposed in a direction of a relative movement to the substance to receive the ejection so that portions of the liquid drop ejecting heads overlaps each other. By doing this, the neighboring liquid drop ejecting head are disposed such that a portion of the liquid drop ejecting heads overlap each other to a main scanning direction in which the liquid drop ejecting heads are moved along a surface of the substance to receive the ejection. Therefore, interference caused between neighboring liquid drop ejecting heads can be reliably prevented; thus, it is possible to minimize the size of the apparatus.
Also, in the present invention, it is preferable that a plurality of the liquid drop ejecting heads be disposed in a staggered manner in a plurality of arrays. By doing this, the liquid drop ejecting heads neighboring each other do not interfere with each other; thus, there is no area to which the liquid material is not ejected between the liquid drop ejecting heads. Thus, it is possible to obtain desirable ejection of the liquid material in a continuous manner.
Also, in the present invention, it is preferable that the ejecting apparatus have an ejection detecting device for detecting the liquid material which is ejected from the nozzle. By doing this, by detecting the ejection of the liquid material from the nozzle by the ejection detecting device, it is possible to prevent uneven ejection of the liquid material so as to obtain desirable ejection of the liquid material stably.
Also, in the present invention, it is preferable that the ejection detecting device detect the ejection of the liquid material in at least one of the steps including a step for ejecting the liquid material from the nozzle to the substance to receive the ejection and a previous step, and a consecutive step. By doing this, by detecting the ejection of the liquid material in at least one of the steps including a step for ejecting the liquid material from the nozzle to the substance to receive the ejection and a previous step, and a consecutive step, it is possible to detect the ejection condition of the liquid material in at least one of the steps including a step for ejecting the liquid material from the nozzle to the substance to receive the ejection and a previous step, and a consecutive step. Therefore, it is possible to detect the ejection condition of the liquid material just before the ejection or immediately after the ejection. Therefore, it is possible to acknowledge the ejection condition of the liquid material.
(2) The present invention is preferable for manufacturing an electrooptical apparatus by using a liquid material containing an EL luminescent member as a liquid material to be ejected and ejecting the liquid material to a substance to receive the ejection such as a base board so as to form the EL luminescent layer.
(3) The present invention is preferable for manufacturing an electrooptical apparatus by using a liquid material such as a color filter member as a liquid material to be ejected and ejecting the liquid material to one of a pair of the base boards for sandwiching the liquid crystal as a substance to receive the ejection so as to form the color filter.
(4) The present invention is preferable for manufacturing a device having a base member by ejecting a fluid liquid material as the substance to receive the ejection.
According to the present invention, a plurality of liquid drop ejecting heads having a plurality of nozzles aligned for ejecting a liquid material is moved relatively along a surface of a substance to receive the ejection such that a surface on which these nozzles are disposed face a surface of the substance to receive the ejection having a space therebetween. The same liquid material is ejected to the substance to receive the ejection from each nozzle of a plurality of the liquid drop ejecting head. Therefore, it is possible to eject a liquid material in a wide range by using an ordinary and common specification liquid drop ejecting head. Therefore, it is possible to reduce cost by using a conventional common specification liquid drop ejecting head instead of a special design liquid drop ejecting head. In addition, by adjusting the number of the liquid drop ejecting heads which are supposed to be disposed in line, it is possible to set the liquid drop ejecting heads according to the positions at which the liquid material to be ejected. Thus, the liquid drop ejecting head can be used more commonly.
BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 34S1 to 34S7 are cross sections for explaining the manufacturing processes for manufacturing the color filter.
(Explanation 1 for a Manufacturing Method for a Color Filter and Apparatus Therefor).
Hereinafter, a basic manufacturing method for a color filter of the present invention and a manufacturing apparatus therefor are explained. Firstly, before explaining the manufacturing method and a manufacturing apparatus using thereof, a color filter which is manufactured by using the above-mentioned manufacturing method is explained.
In a color filter 1 according to the present embodiment, a plurality of filter elements 3 are formed on a surface of a square base board 2 (which can be called a “base member” in the present invention) which is made from a glass member or a plastic member in a dot pattern such as dot matrix condition in the present embodiment. Furthermore, as shown in
The filter element 3 is separated by a bulkhead 6 which has a grid pattern which is formed by a non-translucent resin member so as to bury a plurality of square regions which are disposed in a dot matrix manner by a color member. These filter elements 3 are one of the color members such as those of R (red), G (green), or B (blue), and filter elements 3 having each colors are disposed in a predetermined array arrangement. For such disposition, for example, stripe-disposition (shown in
The stripe disposition is defined as a disposition in which color is the same in the vertical array of the matrix. The mosaic disposition is defined as a disposition in which three filter elements which are disposed on horizontal and vertical lines are three colors such as those of R, G, and B. Furthermore, the delta disposition is defined as a disposition in which the filter elements 3 are disposed in a staggered manner and any combination of the three filter elements which are randomly selected becomes a three color combination of R, G, and B.
Size of the color filter 1 is, for example, 4.57 cm (1.8 inch). Also the size of a piece of a filter element 3 is, for example, 30 μm×100 μm. Also, an element pitch such as an interval between each filter elements 3 is, for example, 75 μm.
When a color filter 1 according to the present embodiment is used for an optical element for performing full-color display operation, three filter elements containing colors such as those of R, G, and B forms a unit as one color pixel. By passing a beam through one of the filter elements such as those of R, G, and B contained in one color pixel or through combined filter elements selectively, the full-color display operation can be performed. In this time, the bulkhead 6 which is made from a not-translucent resin member acts as a black matrix.
The above-mentioned color filter 1 is obtained by cutting a large area motherboard 12 shown in
-
- Hereinafter, a manufacturing method for a color filter shown in 5A and a manufacturing apparatus therefor are explained.
The bulkheads 6 act to prevent the liquid material such as the filter element member 13 which is supplied to the filter element forming areas 7 from flowing and for performing as a black mask. Also, the bulkheads 6 are formed by any kinds of patterning method such as a photolithography method. If necessary, the bulkheads 6 are formed by performing a heating processing so as to sinter it.
After the bulkheads 6 are formed, as shown in
When a predetermined amount of the filter element member 13 is filled in each filter element forming areas 7, a solvent contained in the filter element member 13 is evaporated by heating the motherboard 12 to nearly 70□ by a heater. By this evaporation, as shown in
After the filter element 3 is formed by the above-explained operations, a predetermined period of heating operation is performed in a predetermined temperature so as to desiccate the filter elements 3 completely. After that, a protecting layer 4 is formed by preferable methods such as spin-coat method, roll-coat method, or ink-jet method. The protecting layer 4 is formed for protecting the filter element 3 and flattening a surface of the color filter 1. Here, in embodiments according to the present invention, a non-translucent resin member for the bulkhead 6 is used for a black matrix. However, translucent resin member for the bulkhead 6 having a shading layer made of a metal such as chrome (Cr) beneath the translucent resin which is larger than the translucent resin is acceptable.
In
The main scanning driving apparatus 19 for performing the main scanning operation of the head position controlling apparatus 17, a base board position controlling apparatus 18 and an ink jet head 22 to the motherboard 12 and a sub-scanning driving apparatus 21 are disposed on a base 9. Also, these apparatuses are covered by a cover 14 according to the necessity.
For example, as shown in
Position of the ink jet head 22 is set such that the nozzle array 28 extends in a direction which crosses the main scanning direction X. The filter element member 13 is applied and is fixed onto the predetermined position in the motherboard 12 (see
The internal structure of the ink jet head 22 is shown, for example, in
An ink supplying hole 36 is formed in an appropriate position of the vibrating plate 31. An ink supplying apparatus 37 is connected to the ink supplying hole 36. The ink supplying apparatus 37 supplies one color of filter element member M, for example R among R, G, and B to the ink supplying hole 36. The filter element member M which is supplied there fills the liquid pool 34, and then fills the ink chamber 33 by passing through the path 38.
A nozzle 27 which ejects the filter element member M from the ink chamber 33 in a jet manner is provided to the nozzle plate 29. An ink compressing member 39 is disposed on a surface the vibrating plate 31. On the opposite surface of the vibrating plate 31, the ink chambers 33 are formed. The ink compressing members 39 are formed so as to correspond to the ink chambers 33. As shown in
Next, when the electric connection to the piezoelectric element 41 is disconnected, the shape of the piezoelectric element 41 and the vibrating plate 31 recovers to an initial shape. By doing this, the cubic capacity of the ink chamber 33 is reset to the initial capacity. Thus, pressure of the filter element member M inside the ink chamber 33 increases and the filter element member M is ejected from the nozzle 27 to the motherboard 12 (see
In
As shown in
Also, as shown in
A linear motor which is driven in pulsed manner in the X slider 53 and the Y slider 56 can control rotating angle of the output axis precisely by a pulse signal which is supplied to the motors. Therefore, it is possible to control a position of the ink jet head 22 which is supported by the X slider 53 in the main scanning direction X and a position of the table 49 in the sub-scanning direction Y very precisely. Here, the position of the ink jet head 22 and the table 49 can be controlled not only by a controlling method which uses a pulse motor but also by a feed-back controlling method which uses a servo-motor or any kind of controlling method.
A base board supplying apparatus 23 which is shown in
In
A head camera 81 is disposed near the ink jet head 22 so as to move uniformly with the ink jet head 22. Also, a base stand camera 28 which is supported by a supporting device (not shown in the drawing) which is disposed on the base 9 is disposed in a position from which the picture of the motherboard 12 can be taken.
A controlling apparatus 24 which is shown in
The head position controlling apparatus 17, the base board position controlling apparatus 18, the main scanning driving apparatus 19, the sub-scanning driving apparatus 21, and a head driving circuit 72 for driving the piezoelectric element 41 (see
Memory such as an information storing medium 71 includes a semiconductor memory such as those of RAM (random access memory) and ROM (read only memory) and an external storing apparatus such as a hard disk drive, CD-ROM (compact disk read only memory) reading apparatus, and a disk storing medium. In these memories, from a functional point of view, a memory area for storing a program which contains a controlling process of the movement of the liquid drop ejecting apparatus 16, a memory area for storing a coordinate data for ejecting position of a color element among R, G, and B to the motherboard 12 (see
The CPU 69 controls the ejection of the filter element member 13 such as ink onto a predetermined position of a surface of the motherboard 12 according to the program software which is stored in a memory as the information storing medium 71. More specifically, the CPU 69 has a cleaning calculation section for performing calculations for realizing the cleaning processing, a capping calculation section for realizing the capping processing, a weight measurement calculating section for performing calculations for realizing the weight measurement by using the electronic balance 78 (see
In detail, the delineating calculating section has various functional calculating sections such as a delineation starting position calculating section for setting the ink jet head 22 to an initial position for delineation, a main scanning controlling calculating section for performing calculation so as to control such that the ink jet head 22 makes a scanning movement in the main scanning direction X at a predetermined speed, a sub-scanning control calculating section for performing calculation so as to control the shift of the motherboard 12 by a predetermined sub-scanning amount in the sub-scanning direction Y, and a nozzle ejection control calculating section for performing calculation so as to control the ejection of the filter element member such as ink by determining which nozzle to operate among a plurality of nozzles in the ink jet head 22.
Here, in embodiments of the present invention, the above-mentioned functions are realized by using the software program which is contained in the CPU 69. If such functions can be realized by a single electric circuit which does not use the CPU 69, such an electric circuit can be used.
Hereinafter, operation of the liquid drop ejecting apparatus 16 having the above-mentioned structures is explained according to a flow chart shown in
When the liquid drop ejecting apparatus 16 is started by turning power on by an operator, an initial setting is executed in a step S1. More specifically, devices such as a head unit 26, a base board supplying apparatus 23, and a control apparatus 24 are set to be in a predetermined initial setting condition.
Next, when the weight measurement timing comes (YES in step S2), the head unit 26 in the
After that, when the cleaning timing comes (YES in step S6), the head unit 26 is moved to the cleaning apparatus 77 by the main scanning driving apparatus 19 (step S7). The ink jet head 22 is cleaned by the cleaning apparatus 77 (step S8).
If the weight measuring timing and the cleaning timing do not come (No in steps S2 and S6), or when these processings are completed, the base board supplying apparatus 23 is operated so as to supply the motherboard 12 to the table 49. More specifically, the motherboard 12 inside the base board containing section 57 is held by the adhesion pad 64 so as to be retained. Next, an raising/lowering axis 61, the first arm 61, and the second arm 63 move so as to transport the motherboard 12 to the table 49. Furthermore, the table 49 is pushed to a positioning pin 50 (see
Next, the motherboard 12 is observed by the base board camera 82 which is shown in
At this time, the nozzle array 28 of the ink jet head 22 is disposed so as to be diagonal to the sub-scanning direction Y of the ink jet head 22 by an angle θ. In the case in which an ordinary liquid drop ejecting apparatus 16 is used, it is common for the pitch between the nozzles as an interval between the neighboring nozzles 27 and the element pitch which is an interval between the filter element forming areas 7 such as neighboring filter elements 3 to be different. This disposition is made so as to equalize a dimensional component of the sub-scanning direction Y between the pitch between nozzles and the element pitch geometrically when the ink jet head 22 is moved in the main scanning direction X.
In the step S12 shown in
Here, the ink ejection amount at this time is not an amount which fulfills the overall cubic volume of the filter element forming areas 7. The ink ejection amount at this time is an amount which fulfills a fraction of the cubic volume thereof. In the present embodiment, the amount is one-fourth of the overall cubic volume thereof. The each of the filter element forming areas 7 are not buried in one time of ink ejection from the nozzle 27 as explained later. This is because the overall cubic volume is buried by a plurality of multiple ejections. In the present embodiment, the overall cubic volume is buried by a four ejections.
When the main scanning for one line of the mother board 12 is finished (YES in step S14), the ink jet head 22 makes a reverse movement back to the initial position (a) (step S15). Furthermore, the ink jet head 22 is driven by the sub-scanning driving apparatus 21 so as to move in the sub-scanning direction Y by a predetermined sub-scanning amount δ (step S16).
In embodiments according to the present invention, the CPU 69 divides a plurality of nozzle 27 which form the nozzle array 28 of the ink jet head 22 into a plurality of groups n in
Therefore, after finishing the main scanning for one line and returns to the initial position (a), the ink jet head 22 makes a parallel movement in the sub-scanning direction Y shown in
The ink jet head 22 which made the sub-scanning movement to the position (b) performs the main scanning movement and the ink ejection repetitively in step S13. In this main scanning movement, a line in a second row in the color filter forming area 11 on the motherboard 12 receives the ink ejection by the top nozzle group. A first line receives a second ink ejection by a second nozzle group.
After that, while the ink jet head 22 repeats the sub-scanning movement from a position (c) to a position (k), the ink jet head 22 repeats the main scanning movement and the ink ejection (steps S13 to S16). By doing this, an ink fixing process for one array of the color filter forming area 11 of the motherboard 12 is completed. In embodiments according to the present invention, the sub-scanning amount δ is determined by dividing the nozzle array 28 into 4 groups. Therefore, when the main scanning and the sub-scanning for one array of the above-mentioned color filter element forming area 11 are completed, each filter element forming area 7 receives one ink ejection by a nozzle group. In total each filter element forming area 7 receives ink ejection four times. A predetermined amount of the filter element member such as ink is supplied to fulfill the overall cubic volume of the filter element forming area.
By doing this, the ink ejection for one array of the color filter forming area 11 is completed, the ink jet head 22 is driven by the sub-scanning driving apparatus 21 so as to be transported to the initial position in the next array of the color filter forming area 11 (step S19). Consequently, the main scanning operation, the sub-scanning operation, and the ink ejection are performed repeatedly to the color filter forming area 111 which is disposed in the present array so as to form the filter element in the filter element forming area 7 (steps S13 to S16).
After that, when a filter element 3 having one color such as those of R among three colors or R, G, and B is formed in all of the color filter forming area 11 in the motherboard 12 (YES in step S18), the motherboard 12 which is processed is extracted to the outside by the base board supplying apparatus 23 or other transporting apparatuses in step S20. Consequently, unless the operator gives a command for finishing the processes (NO in step S21), the process returns to the step S2 and ink absorbing operation for a color such as those of R is repeated to the motherboard 12.
When the operator gives a command for finishing the processes (YES in step S21), the CPU 69 transports the ink jet head 22 to the capping apparatus 76 as shown in
By doing this, the patterning process for one color such as those of R among three colors such as those of R, G, and B which are contained in the color filter 1 is completed. After that, the motherboard 12 is transported to the liquid drop ejecting apparatus 16 which uses the filter element member such as G as a second color among two colors such as G and B so as to perform the patterning process for G color. Furthermore, the motherboard 12 is transported to the liquid drop ejecting apparatus 16 which uses the filter element member such as B as a third color among three colors such as those of R, G, and B finally so as to perform the patterning process for B color. By doing this, the motherboard 12 having a plurality of color filters 1 which has desirable dot disposition of R, G, and B such as the stripe disposition shown in
Here, if the color filter 1 is used for a purpose of performing the color-display operation in the liquid crystal apparatus, more structures such as electrodes and oriented films are layered on a surface of the color filter 1. In such a case, if the motherboard 12 is cut into a plurality of the color filters 1 before forming the electrodes and the oriented films, it is difficult to form the electrodes and the like. Therefore, the motherboard 12 should not be cut before forming the electrodes and the oriented films and the motherboard 12 should be cut after finishing necessary processes such as forming the electrodes and the oriented films.
As explained above, according to manufacturing method for a color filter and a manufacturing apparatus in embodiments of the present invention, it is not that each of filter elements 3 in the color filter shown in
In the present embodiment of the manufacturing method according to the present invention, the filter element 3 is formed by ejecting the ink using the ink jet head 22. Therefore, certainly, it is not necessary to arrange a complicated manufacturing process such as photolithography method. Therefore, members and materials for manufacturing the filter element can be reduced.
In the explanation of the
Therefore, as shown in
In the present embodiment, a non-translucent resin member is used for a bulkhead 6. It is certain that a translucent resin member can be used for a translucent bulkhead 6. In such a case, extra members such as translucent metal films or resin members are disposed in positions corresponding to the filter element 3 such as on the bulkhead 6 or under the bulkhead 6 so as to dispose them as a black mask. Also, it is acceptable that the bulkhead 6 is formed by the translucent resin member so as not to make it as a black mask.
Also, in the present embodiment, R, G, and B are used for the filter element 3. It is certain that the filter element 3 is not limited to R, G, and B. For example, C (cyan), magenta (M), and yellow (Y) can be used. In such a case, the filter element member containing C, M, and Y can be used instead of the filter element member containing R, G, and B.
Furthermore, in the present embodiment, the bulkhead 6 is formed by the photolithography method. The bulkhead 6 can be formed by the ink jet method as well as the color filter 1.
(Explanation 2 for a Manufacturing Method for a Color Filter and Apparatus Therefor).
Processes which are performed in the present embodiment are generally the same as the processes which are shown in
The present embodiment is different from the previous embodiment which is shown in
More specifically, in
That is, in the present embodiment, the main scanning operation and the sub-scanning operation of the ink jet head 22 are performed alternately and continuously without the returning operation. By doing this, a time necessary for the returning operation can be omitted so as to shorten the operating time.
(Explanation 3 for a Manufacturing Method for a Color Filter and Apparatus Therefor).
Processes which are performed in the present embodiment are generally the same as the processes which are shown in
The present embodiment is different from the previous embodiment shown in
In the present embodiment, too, while the ink jet head 22 repeats the scanning movement in the main scanning direction X, the returning movement to the initial position, and the sub-scanning movement in the sub-scanning direction Y over the moving amount from the initial position (a) to the end position (k), the ink jet head 22 ejects the filter element member such as ink from a plurality of nozzles 27 selectively during a period of the main scanning movement. By doing this, the filter element member is fixed in the filter element forming area 7 in the color filter element forming area 11 of the motherboard 12.
Here, in embodiments of the present invention, the nozzle array 28 is disposed in parallel with the sub-scanning direction Y. By doing this, the sub-scanning movement amount is set to be equal to the length of the divided nozzle group such as L/n, that is, L/4.
(Explanation 4 for a Manufacturing Method for a Color Filter and Apparatus Therefor).
Processes which are performed in the present embodiment are generally the same as the processes which are shown in
The present embodiment is different from the previous embodiment shown in
Here, in the present embodiment shown in
(Explanation 5 for a Manufacturing Method for a Color Filter and Apparatus Therefor)
Processes which are performed in the present embodiment are generally the same as the processes which are shown in
In the embodiment shown in
(Explanation for Manufacturing Method for an Electrooptical Apparatus Using Color Filter and a Manufacturing Apparatus Therefor)
In
The liquid crystal panel 102 is formed by attaching a first base board 107a and a second base board 107b by a sealing member 108. The sealing member 108 is formed by fixing an epoxy resin on an inner surface of the first base board 107a or the second base member 107b in a circular manner, for example, by screen printing method. Also, a conducting member 109 which is made from a conductive member formed spherically or cylindrically is contained in the sealing member 108 in a dispersed manner as shown in
In
In
In
In
In
The first electrode 114a and the second electrode 114b are disposed in an orthogonal manner. The crossing point of the above-mentioned electrodes is disposed in a dot-matrix manner viewed in an arrow direction D shown in
By illuminating a plurality of picture element pixel such as pixels which are disposed in dot matrix manner selectively, images such as a letter and numerals are displayed on outside of the second base board 107b of the liquid crystal panel 102. Such an area in which the images are displayed is an effective pixel area. A planar rectangle area which is indicated by an arrow V in
In
The first electrode 114a and the second electrode 1114b are formed by, for example, a translucent conductive member such as an ITO (Indium-Tin Oxide). Also, the oriented film 116a and 116b are formed by applying a polyimide group resin in a uniform thickness film. By rubbing the oriented films 116a and 116b, an initial disposition of the liquid crystal molecules on a surfaces of the first base board 107a and the second base board 107b are determined.
In
In embodiments according to the present invention, the extended wiring 114c which extends from the first electrode 114a and the extended wiring 114d which leads to the second electrode 114b are formed by an ITO which is made from the same member as the electrodes such as a conducting oxide. Also, the metal wirings 114e and 114f which are wirings for inputting ends of the liquid crystal ICs 103a and 103b are made from a low electric resistance metal member such as an APC alloy. The APC alloy contains mainly Ag in addition to alloy containing Pd and Cu such as an alloy containing 98% of Ag, 1% of Pd, and 1% of Cu.
The liquid crystal driving ICs 103a and 103b are adhered on a surface of the extended base board section 107c by an ACF (Anisotropic Conductive Film) 122 so as to be mounted thereon. That is, in the present embodiment, the liquid crystal panel is formed as a COG (chip on glass) liquid crystal display in which semiconductor chips are mounted on the base board directly. In the mounting structure of the COG method, the inputting bumps of the liquid crystal driving ICs 103a and 103b and the metal wirings 114e and 114f are connected conductively by conductive grains which are contained inside the ACF 122. Also, the outputting bumps of the liquid crystal driving ICs 103a and 103b and the extended wirings 114c and 114d are conductively connected.
In
In a peripheral area which is opposite to the FPC 104, an external connecting terminal 131 is formed. The external connecting terminal 131 is connected to an external circuit which is not shown in the drawing. The liquid crystal driving ICs 103a and 103b are driven by signals which are transmitted from the external circuit. The scanning signal is supplied to either one of the first electrode 114a or the second electrode 114b, and the data signal is supplied to the other one of the above-mentioned electrodes. By doing this, voltage of each of the picture element pixels in dot matrix manner which are disposed inside the effective displaying area V are controlled. As a result, the orientation of the liquid crystal L is controlled according to each picture element pixel.
In
The LED 136 is supported by an LED base board 137. The LED base board 137 is mounted on the supporting member (not shown in the drawing) which is formed integrally with, for example, the light introducing member 132. By disposing the LED base board 137 in a predetermined position in the supporting member, the LED 136 is disposed in a position which faces a light collecting surface 132a which is a vertical surface of the light introducing member 132. Here, reference numeral 138 indicates a buffering member for buffering impacts which are given to the liquid crystal panel 102.
When the LED 136 illuminates, the light is collected by the light collecting surface 132a so as to be introduced inside the light introducing member 132. Consequently, the light is emitted to the outside from the light emitting surface 132b via the dispersing sheet 133 while the light is reflected by a wall surface of the reflecting sheet 134 and the light introducing member 132.
The liquid crystal apparatus 101 according to the present embodiment is made as explained above. When external light such as sunlight or room light is sufficiently bright, in
On the other hand, when the external light is not collected sufficiently, the LED 136 illuminates so as to emit a plane light from the light emitting surface 132b of the light introducing member 132. The light is supplied to the liquid crystal L via the opening section 121 which is formed on the reflecting film 112. At this time, similarly to the a case of the display operation according to the reflecting method, the supplied light is modulated by the liquid crystal L in which the orientation is controlled according to the picture element pixel. By doing this, the images are displayed toward the outside; thus, the display operation according to the transmitting method is performed.
The liquid crystal apparatus 101 having the above-explained structure is manufactured according to manufacturing method shown in, for example,
The processes for manufacturing the first base board is explained as follows. The reflecting film which corresponds to a plurality of liquid panel 102 is formed on a surface of a large area motherboard material which is made from the translucent glass member or translucent plastic member according to photolithography methods or the like. Furthermore, the insulating layer 113 is formed thereon by using common film forming method (process P1). Next, the first electrode 114a, the extended wirings 114c and 114d, the metal wirings 114e and 114f are formed by using the photolithography method or the like (process P2).
After that, the oriented film 116a is formed on the first electrode 114a by an applying method or a printing method (process P3). Furthermore, an initial orientation of the liquid crystal is determined by performing a rubbing operation on the oriented film 116a (process P4). Next, the sealing member 108 is formed in a circular manner by a screen printing method or the like (process P5). Furthermore, a spherical spacer 119 is dispersed thereon (process P6). By doing this, a large area first motherboard having a plurality of panel patterns of the first base board 107a of the liquid panel 102 is formed.
Apart from the above-explained processes for manufacturing the first base board, the processes for manufacturing the second base board are performed (processes P11 to P14 in
As shown in
As explained above, after a large area first motherboard and a large area second motherboard are formed, these motherboards are sandwiched between the sealing members 108. Furthermore, after the positions of these boards are aligned, these motherboards are attached (process P21). By doing this, an empty panel containing a panel member in which the liquid crystal which is equal to a plurality of the liquid crystals is contained and no liquid crystal is poured thereinto is formed.
Next, a scribed groove as a cutting groove is formed in a predetermined position on the finished empty panel structure member. Furthermore, the panel structure member is cut by the scribed groove as a cutting reference (process P22). By doing this, an empty panel structure member with a slit in which the liquid crystal pouring mouth 110 (see
After that, the liquid crystal L is poured inside each of the liquid crystal panel via the exposed liquid crystal pouring mouth 110. Furthermore, each liquid crystal pouring mouth 110 is sealed by resin or the like (process P23). In an ordinary liquid crystal pouring process, for example, a liquid crystal is stored in a storing container. The storing container in which the liquid crystal is stored and the empty panel with a slit condition are contained in a chamber or the like. Air is evacuated from the chamber, and the empty panel with a slit is dipped into the liquid crystal in the chamber. After that, the liquid crystal is poured when the chamber is opened to an atmospheric pressure. At this time, the inside of the empty panel is under a vacuum condition. Therefore, the liquid crystal is compressed by the atmospheric pressure, and the liquid crystal is introduced into the panel through the liquid crystal pouring mouth. After pouring the liquid crystal, the liquid crystal sticks around the liquid crystal structure member. Therefore, the panel with a slit is cleaned in a process P24 after the liquid crystal pouring process.
After the liquid crystal pouring process and the cleaning process, the scribed groove is formed in a predetermined position of the mother panel with a slit. Furthermore, the panel with a slit is cut by the scribed groove as a cutting reference point. By doing this, a plurality of independent liquid crystal panels 102 are cut into pieces (process P25). As shown in
Manufacturing method for the liquid crystal apparatus explained above and the manufacturing apparatus therefor have the following characteristics, particularly in the manufacturing steps for the color filter 1. That is, the color filter 1 shown in
Also, in a manufacturing method for the liquid crystal apparatus explained above and the manufacturing apparatus therefor according to the present embodiment, the filter element 3 is formed by ejecting the ink by using the ink jet head 22 by using the liquid drop ejecting apparatus 16 as shown in
(Explanation for Manufacturing Method for an Electrooptical Apparatus Using an El Element and a Manufacturing Apparatus Therefor)
A positive hole ejection layer 220 is formed in a grid concave section. An R color illuminating layer 203R, a G color illuminating layer 203G, and a B color illuminating layer 203B are formed in each of the grid concave sections in a predetermined array disposition such as stripe dispositions viewed in an arrow direction G in the drawing. Furthermore, by forming a facing electrode 213 thereon, an EL apparatus 201 is formed.
When the pixel electrode 202 is driven by an active element having two terminals such as TFD (Thin Film Diode), the above-mentioned facing electrode 213 is formed in a stripe manner viewed in an arrow direction G. Also, the pixel electrode 202 is driven by an active element having three terminals such as TFT (Thin Film Transistor), the above-mentioned facing electrode 213 is formed in a simple surface form.
A region which is sandwiched between the pixel electrode 202 and the facing electrode 213 becomes one picture element pixel. The three color picture element pixels forms one unit so as to form one pixel. By controlling an electric current which flows in the picture pixel, a desirable one of a plurality of picture element pixel is illuminated selectively. By doing this, it is possible to display a desirable full-color image viewed in an arrow direction H.
The above-mentioned EL apparatus 201 is manufactured by a manufacturing method shown in, for example,
Next, as shown in a process P 52 and
Next, just before applying a positive hole pouring ink as a functional liquid material, a continuous plasma processing of the oxygen gas and the fluorocarbon plasma is performed to the transparent base board 204 (process P53). By doing this, a surface of polyimide becomes water-repellant. A surface of the ITO becomes hydrophilic. Thus, wettablity of a base board for performing a patterning of the liquid drop can be finely controlled. For a plasma generating apparatus, an apparatus which can generate plasma under vacuum conditions, and an apparatus which can generate plasma under atmospheric pressure conditions can be used similarly.
Next, as shown in process P54 and
Next, as shown in a process P57 and
After applying the illuminating layer ink, the solvent is removed under condition of, for example, a vacuum (1 torr), at room temperature, for 20 minutes (process P58). Consequently, by performing a conjugating operation by the heating process under condition of, for example, a nitrogen atmosphere, at 1500, for 4 hours, the R color illuminating layer 203R and the G color illuminating layer 203G are formed (process P59). Under the above-mentioned conditions, the thickness of the layer was 50 nm. The illuminating layer which was conjugated by the heating process is not soluble in the solvent.
Here, it is acceptable that a continuous plasma processing of the oxygen gas and the fluorocarbon gas plasma be performed to the positive hole pouring layer 220 before forming the illuminating layer. By doing this, a fluorocarbon polymer coating can be formed on the positive hole pouring layer 220. Therefore, an ionizing potential increases. Because of this, the positive hole pouring efficiency increases. Thus, it is possible to provide an organic EL apparatus having high illuminating efficiency.
Next, as shown in a process P60 and
For a forming method for the B color illuminating layer 203B as explained above, for example, a common spin-coating method can be used as a wet method. Otherwise, an ink jet method which is equivalent to a forming method for the R color illuminating layer 203R and the G color illuminating layer 203G can be used.
After that, as shown in a process P61 and
In the manufacturing method for the EL apparatus 201 and the manufacturing apparatus therefor as explained above, any one of the controlling methods shown in FIGS. 1 to 4 is used as the controlling method for the ink jet head. Therefore, the positive hole pouring layer 220, the R color illuminating layer 203R, the G color illuminating layer 203G, and the B color illuminating layer 203B in each picture element pixel in
Also, in the manufacturing method for the EL apparatus and the manufacturing apparatus according to the present embodiment, by using the liquid drop ejecting apparatus 16 as shown in
(An Embodiment of a Manufacturing Method for a Color Filter and a Manufacturing Apparatus Therefor)
Next, an embodiment of a manufacturing apparatus for a color filter according to the present invention is explained with reference to the drawings as follows. First, before explaining the manufacturing apparatus for a color filter, the color filter which is supposed to be manufactured is explained.
(Structure of the Color Filter)
In
The color filter 1 is provided with a translucent base board 12 and a translucent bulkhead 6 as shown in
(Structure of a Manufacturing Apparatus for Color Filter)
Next, a structure for a manufacturing apparatus for the above-mentioned color filter is explained with reference to the drawings as follows.
The manufacturing apparatus for color filters manufactures a color filter which is contained in the color liquid crystal panel as an electrooptical apparatus. The manufacturing apparatus for color filters is provided with a liquid drop ejecting apparatus which is not shown in the drawing.
(Structure of Liquid Drop Ejecting Apparatus)
The liquid drop ejecting apparatus has 3 sets of liquid drop ejecting processing apparatuses 405R. 405G, and 405B as shown in
Here, to the liquid drop ejecting processing apparatus 405R, 405G, and 405B, transporting robots, which are not shown in the drawings, for bringing in and out a piece of motherboard 12 to the liquid drop ejecting processing apparatus 405R, 405G, and 405B are connected respectively. Also, to the liquid drop ejecting processing apparatus 405R, 405G, and 405B, for example, 6 pieces of motherboard 12 can be contained. Also, to the liquid drop ejecting processing apparatus 405R, 405G, and 405B, a multi-stage baking furnace, which is not shown in the drawings, is connected for desiccating the filter element member 13 which is ejected after the motherboard 12 is heated under conditions of, for example, 120□, for 5 minutes.
In addition, each of the liquid drop ejecting processing apparatuses 405R, 405G, and 405B has a thermal clean chamber 422 as a hollow casing as shown in
The liquid drop ejecting processing apparatus 423 has an X-axis air slide table 424 as shown in
In the liquid drop ejecting processing apparatus 423, as shown in
Also, in the liquid drop ejecting processing apparatus 423, various cameras not shown in the drawing as a position acknowledging member for acknowledging the position of the ink jet head 421 and the motherboard 12 so as to control them are disposed. Here, the position of the head unit 420 and the base stand section can be controlled not only by a position controlling method using a pulse motor but also by a feedback controlling method using a servo-motor and any desirable controlling methods.
Also, in the liquid drop ejecting processing apparatus 423, as shown in
Furthermore, in the liquid drop ejecting processing apparatus 423, as shown in
Also, in the liquid drop ejecting processing apparatus 423, a weight measuring unit 485 for measuring the ejection amount of the filter element member 13 which is ejected from the head unit 420 is provided.
Furthermore, in the liquid drop ejecting processing apparatus 423, a pair of missing-dot detecting units 487 having, for example, a light sensors, not shown in the drawings, for monitoring ejecting condition of the filter element member 13 which is ejected from the head unit 420 is disposed. In the missing-dot detecting units 487, a light source of the light sensor, not shown in the drawings, and a light receiving section are disposed so as to face each other having a space through which the ejected liquid drop 8 which is ejected from the head unit 420 passes in an X-axis direction which crosses diagonally a direction in which the liquid material is ejected from the head unit 420. Also, the missing-dot detecting units 487 are disposed in a Y-axis direction in a direction in which the head unit 420 is transported. The missing-dot detecting unit 487 detects a missing-dot by monitoring the ejection condition each time the head unit 420 performs the sub-scanning movement so as to eject the filter element member 13.
Although detail explanation is made later, in the head unit 420, head apparatuses 433 for ejecting the filter element member 13 are disposed in 2 arrays. By doing this, a pair of missing-dot detecting units 487 are disposed so as to monitor the ejection condition for each head apparatus in each of the arrays.
(Structure of Head Unit)
Next, a structure of a head unit 420 is explained.
The head unit 420 has a head unit section 430 and an ink supply section 431 as shown in FIGS. 23 to 26. Also, the head unit section 430 has a planar carriage 426 and a plurality of head units 433 having shapes which are substantially the same as each other attached on the carriage 426.
(Structure of Head Apparatus)
The head apparatus 433 has a printed base board 435 as shown in
On the printed base board 435, various electric parts 436 are mounted and electric wirings are made. Also, on an end in the longitudinal direction of the printed base board 435 (right-hand side in
Furthermore, at nearly one end (right-hand side in
Also, at nearly the other end (left-hand side in
Furthermore, on nearly one end (right-hand side in
Also, on the ink introducing section 443, a pair of connecting section 448 having nearly a cylindrical shape with a narrowing tip are disposed. These connecting sections 448 have openings, not shown in the drawings, which connect the flow path 438 of the printed base board 435 in a water-tight manner on a base end section near the printed base board 435. On a tip of the connecting section 448, a hole through which the filter element member 13 can pass is disposed.
Furthermore, to these connecting sections 448, as shown in FIGS. 24 to 27, a seal connecting sections 450 are attached in the tip position respectively. These seal connecting sections 450 are formed in nearly a cylindrical shape so as to fit the connecting member 448 in a water-tight manner with its inner circumference. Also, on a tip of the connecting section 448, a sealing member 449 is disposed.
(Structure of Ink Jet Head)
The ink jet head 421 has a holder 451 having an approximately rectangular shape as shown in
Also, on a surface on which the piezoelectric vibrating element 452 of the holder 451 is disposed, as shown in
Furthermore, on the flexible plate 455, a planar flow path forming plate 460 is provided. On the flow path forming plate 460, nozzle grooves 461 which are disposed serially in 2 arrays corresponding to 180 pieces of piezoelectric vibrating elements which are disposed in the longitudinal direction of the holder 451, opening sections 462 which are formed in the longitudinal direction and in one side of the holder 451, and communicating holes 463 which continue to the fitting holes 456 on the flexible plate 455 are provided. On the flexible plate 455, fitting holes 458 which fit the positioning nail sections 457 which are disposed on four corner portions of the holder 451 so as to protrude thereat are disposed. The fitting holes 458 are positioned on the top surface of the holder 451 with the flexible plate 455 so as to be attached thereat integrally.
Also, on a top surface of the flow path forming plate 460, a nozzle plate 465 having approximately a planar shape is provided. On the nozzle plate 465, 180 pieces of nozzles 466 having approximately a circular shape in a longitudinal direction of the holder 451 over 25.4 mm of longitudinal range are disposed serially in two arrays so as to correspond to the nozzle grooves formed on the flow path forming plate 460. On the flexible plate 455, fitting holes 458 which fit the positioning nails 457 which are disposed so as to protrude on four corner portions of the holder 451 are provided. The fitting holes 458 are positioned on a top surface of the holder 451 together with the flexible plate 455 and the flow path forming plate 460 so as to be attached thereat integrally.
In addition, by the flexible plate 455 which is layered, a flow path forming plate 460, and a nozzle plate 465, as graphically shown in
Also, in the ink jet head 421, it is observed that ejection amount is larger at both ends in the disposition direction than in the rest of the disposition direction as explained in the above-mentioned embodiment with reference to
In addition, in the head unit section 430 contained in the head unit 420, as shown in FIGS. 22 to 26, a plurality of head apparatuses 433 having the ink jet head 421 are disposed in an array manner. As shown in
Furthermore, in the head unit section 430, as shown in
Also, the head apparatuses 433 are disposed in a staggered manner so as not to be disposed in rows against the disposition direction. That is, as shown in
More specifically, detailed explanation is made with reference to
Therefore, as shown in
(Structure of Ink Supply Section)
As shown in FIGS. 23 to 26, the ink supply section 431 comprises a pair of attaching plates 471 which are provided corresponding to two arrays of the head unit sections 430 and a plurality of supplying unit sections 472 which are attached to the attaching plates 471. The supplying unit section 472 has movable members 474 having approximately a cylindrical shape. The movable members 474 are attached by the attaching fixtures 473 so as to penetrate through the attaching plates 471 movably in an axial direction. The movable members 474 of the supplying unit section 472 are attached by, for example, coil springs 475 or the like so as to be pushed in a direction toward the head apparatus 433 from the attaching plate 471. Here, in
On an end section of the movable member 474 which is facing the head apparatus 433, flange sections 476 are provided. The flange section 476 protrudes like a sword-guard around the outer periphery of the movable section 474. The end of the flange section 476 contacts a sealing member 449 of the ink introducing section 443 in the head apparatus 433 in approximately water-tight manner so as to resist the pushing force by the coil spring 475. Also, on an end of the movable member which is opposite to the flange section 476, a joint section 477 is provided. As shown graphically in
As explained above and graphically shown in
In addition, the ink supplying section 431 supplies the filter element member 13 which flows through the supply pipe to the ink introducing section 443 in the head apparatus 433. Also, the filter element member 13 which is supplied to the ink introducing section 443 is supplied to the ink jet head 421 and ejected from nozzles 466 of the ink jet head 421 which is controlled electrically appropriately in a form of liquid drop 8.
(Manufacturing Operation of Color Filter)
(Preparatory Process)
Next, a forming process for a color filter 1 by using a manufacturing apparatus for a color filter according to the above-explained embodiment is explained with reference to drawings.
First, surface of the motherboard 12 as a transparent base board made of non-alkali-glass having a thickness of 0.7 mm, a length of 38 cm, and a width of 30 cm, is cleaned by a cleaning liquid which is made of a concentrated sulfuric acid to which 1 mass % of hydrogen peroxide solution is added. After the cleaning operation, the motherboard 12 is rinsed with pure water and dried by air so as to obtain a clean surface. A chrome coating having 0.2 μm of thickness on average is formed on the surface of the motherboard 12 by a coating method such as, for example, sputtering method, so as to obtain a metal layer 6a (step S1 in the
After the motherboard 12 is dried on a hot plate under conditions of 80□, for five minutes, a photoresist layer which is not shown in the drawing is formed on the surface of the metal layer 6a by, for example, a spin coating method. A mask film which is not shown in the drawing on which, for example, a predetermined matrix pattern shape is formed is contacted on the surface of the motherboard 12 so as to be exposed to ultraviolet light. Next, the exposed motherboard 12 is dipped into an alkali-developer liquid which contains 8 mass % of potassium hydroxide, and non-exposed portion of photoresist is removed, and a patterning operation is performed on a resist layer. Consequently, etching removal operation is performed on the exposed metal layer 6a by an etching liquid containing, for example, hydrochloric acid as a main ingredient. By doing this, a shielding layer 6b as a black matrix having a predetermined matrix pattern is obtained (step S2 in
Furthermore, a negative transparent acrylic photosensitive resin formation 6c is applied on the motherboard 12 on which the shielding layer 6b is formed by, for example, a spin coating method (step S3 in
Dry etching operation and plasma processing are performed so as to improve ink wettability of the filter element forming area 7 (in particular, exposed surface of the motherboard 12) as a color layer forming area which is separated by the above-obtained shielding layer 6b and the bank layer 6d. More specifically, for example, high voltage current is charged to a mixed gas of helium and 20% of oxygen, and an etching spot is formed by performing the plasma processing. The motherboard 12 is transported under the above-formed etching spot so as to be etched; thus, pre-processing of the motherboard 12 is performed.
(Ejection of Filter Element Member)
Next, each of filter element members such as those of Red (R), green (G), and blue (B) is introduced (that is, ejected) to the inside the filter element forming area 7 which is separated by the bulkhead 6 of the motherboard 12 to which the above-mentioned pre-processing is performed by an ink jet method (step S5 in
When the filter element member is ejected by the ink jet method, a head unit 420 is assemble in advance. In addition, in each of the liquid drop ejection processing apparatuses 405R, 405G, and 405B in the liquid drop ejecting apparatus, ejection amount of the filter element member 13 which is ejected from a nozzle 466 of each ink jet head 421 is adjusted to be a predetermined amount, such as nearly 10 pl. On the other hand, on one surface of the motherboard 12, the bulkhead 6 is formed in a grid pattern in advance.
In addition, at first, the motherboard 12 to which the pre-processing was performed as explained above is transported into the liquid drop ejection processing apparatus 405R for R color by a transporting robot, which is not shown in the drawing, so as to put the motherboard 12 on the base stand section in the liquid drop ejection processing apparatus 405R. The motherboard 12 which is put on the base stand section is positioned so as to be fixed thereon by a placing method, for example, an absorption method. Position of the motherboard 12 is monitored by various cameras, and the movement of the base stand section on which the motherboard 12 is supported is controlled so as to be in a predetermined appropriate position by controlling the main scanning driving apparatus 425. Also, the head unit 420 is moved appropriately by the sub-scanning driving apparatus 427 so as to acknowledge the position thereof. After that, the head unit 420 is moved in the sub-scanning direction, and the ejection conditions of the nozzle 466 is monitored by the missing-dot detecting unit 487 so as to confirm no occurrence of defective ejection; thus, the head unit 420 is transported to the initial position.
After that, the motherboard 12 which is supported on the base stand section which movable by the main scanning driving unit 425 is scanned in the X-axis direction. While the head unit 420 is moved relatively to the motherboard 12, the filter element member 13 is ejected from the predetermined nozzle 466 of the ink jet head 421 appropriately. The filter element member 13 is filled in the concave section which is separated by the bulkhead 6 on the motherboard 12. It is controlled by a controlling apparatus which is not shown in the drawing such that the filter element member 13 is not ejected from a predetermined area X, for example, 10 nozzles located on both ends in the disposition direction of the nozzle 466 as shown in
Also, because 2 nozzles 466 are located on the scanning line such as on a line which is on the scanning direction, 2 dots are ejected from one nozzle 466 to one concave section during the movement. More specifically, 2 liquid drops 8 are ejected as one dot from one nozzle 466. Therefore, in total, 8 liquid drops 8 are ejected from the nozzle 466. The ejection condition is monitored in every scanning movement by the missing-dot detecting unit 487 whether or not a missing-dot exists.
When the missing-dot is determined not to exist, the head unit 420 is moved in the sub-scanning direction by a predetermined distance. While the base stand section which supports the motherboard 12 is moved again in the main scanning direction, the ejection for the filter element member 13 is repeated. Thus, the filter element 3 is formed in a predetermined filter element forming area 7 in the predetermined color filter forming area 11.
(Drying and Hardening)
Consequently, the motherboard 12 to which the R color filter element member 13 is ejected are taken out by the liquid drop ejection processing apparatus 405R by a transporting robot, which is not shown in the drawing. The filter element member 13 is dried by a multi-stage baking furnace, which is not shown in the drawing, under condition of, for example, 120□ for five minutes. After the drying operation, the motherboard 12 is taken out from the multi-stage baking furnace by the transporting robot, and then the motherboard 12 is cooled during the transportation. After that, the motherboard 12 is transported into the liquid drop ejection processing apparatus 405R, the liquid drop ejection processing apparatus 405G for G color, and the liquid drop ejection processing apparatus 405B for B color successively. The filter element members 13 for G color and the B color are ejected successively to the predetermined filter element forming area 7. In addition, the motherboard 12 of which ejected filter element members 13 for three colors are dried are collected. Furthermore, the filter element members 13 are fixed and settled on the motherboard 12 by performing a heating processing (step S6 in
(Formation of Color Filter)
A protecting coating 4 is formed on nearly the entire surface of the motherboard 12 on which the filter element 3 is formed. Furthermore, an electrode layer 5 which is made from, for example, ITO (Indium-Tin Oxide) is formed on a surface of the protecting coating 4 by the required pattern. After that, a plurality of color filters 1 is obtained by cutting the motherboard 12 in accordance with the color filter forming area 11 (step S7 in
(Effect of Manufacturing Apparatus for Color Filter)
According to the embodiment as shown in FIGS. 22 to 34, there are the following effects in addition to the operational effects in each embodiment explained previously.
That is, a plurality of ink jet heads 421 in which a plurality of nozzle heads 466 for ejecting the filter element member 13 as a fluid liquid material such as an ink as a liquid drop 8 are disposed in arrays on a surface of the ink jet heads 421 and are moved along a surface of the motherboard 12 relatively under conditions that a surface on which the nozzles 466 of the ink jet heads 421 is facing a surface of the motherboard 12 as a member to receive ejection while having a predetermined space therebetween. One filter element member 13 is ejected on a surface of the motherboard 12 from each nozzle 466 of a plurality of the ink jet heads 421. Because of this, it is possible to eject the filter element member 13 over a wide range of the motherboard 12 by using substantially the common ink jet head 421 based on the same industrial standard. Also, it is possible to use a plurality of conventional standardized parts without using a long-range ink jet head; thus, it is possible to reduce manufacturing cost. The product yield of the long-range ink jet head is quite low; thus it becomes expensive. However, the product-yield of a short-range ink jet head 421 is high; therefore, a plurality of short-range ink jet head is disposed in the present invention so as to obtain substantially the same effect as the case in which the long-range ink jet head is used; thus, it is possible to reduce manufacturing cost.
Furthermore, for example, by appropriately setting the disposition direction and the number of the ink jet head 421 and the number and the interval (nozzles 466 can be used by every piece or by every several pieces so as to correspond to the pitch of the pixel) of the nozzles 466 which are used for ejecting operation, it is possible to make the area to which the filter element member 13 is ejected correspond to the color filter 1 having different size, pixel pitch, and disposition. Therefore, common utility can be increased.
In addition, because the shape of a plurality of the liquid drop ejecting heads 421 is substantially the same, it is possible to make one kind of ink jet head 421 correspond to the area to which the liquid material is ejected by setting the array appropriately. Therefore, the structure becomes simple, and the production yield improves, and the manufacturing cost can be reduced.
Also, because the nozzle 466 uses a plurality of the liquid drop ejecting heads 421 which are aligned in an array in nearly and equal interval, it is possible to dot a pattern following a predetermined rule such as a striped pattern, mosaic pattern, or delta pattern easily.
In addition, a plurality of ink jet heads 421 are moved along a surface of the motherboard 12 relatively such that a plurality of ink jet heads 421 are along with a slanted direction which crosses the disposition direction of the nozzles 466 which are disposed in approximately a linear form against the main scanning direction along a surface of the motherboard 12 relatively. Therefore, the disposition direction of the nozzles 466 of a plurality of the ink jet heads 421 becomes slanted to the main scanning direction as a moving direction along a surface of the motherboard 12. By doing this, the pitch which is an ejection interval of the filter element member 13 becomes narrower than the pitch between the nozzles. When, for example, the motherboard 12 to which the filter element member 13 is ejected is used for a display apparatus such as an electrooptical apparatus such as a liquid crystal panel, clearer display is obtained. Thus, it is possible to obtain a desirable display apparatus. Furthermore, it is possible to prevent an interference of the neighboring ink jet heads 421; thus, it is possible to realize small size apparatus. In addition, by setting the slanting angle appropriately, the dot pitch is set appropriately; thus, the common utility can be improved.
Furthermore, in the ink jet head 421 in which the nozzles 466 are disposed on nearly a linear form with nearly equal interval, the nozzles 466 are disposed on nearly a linear form with nearly equal intervals in a longitudinal direction of the rectangle ink jet head 421. Therefore, the ink jet head 421 be made smaller. Thus, for example, it is possible to prevent the interference between the neighboring ink jet heads 421 or between the ink jet head 421 and other structural members; thus, a small apparatus can be realized easily.
Also, the head unit 420 is disposed such that a plurality of ink jet head 421 are disposed on a carriage 426 under condition that the disposition directions of the nozzles 466 are nearly in parallel. Therefore, it is possible to form a plurality of ejection areas of one liquid material in one area without using a long-range ink jet head. Furthermore, it becomes possible to eject the filter element member 13 in duplicated condition from the ink jet heads 421 which are duplicated in one position. Therefore, it is possible to equalize the ejection amount in the ejection area easily; thus, it is possible to obtain stable and desirable dot formation.
In addition, a plurality of the ink jet heads 421 are slanted in a direction which crosses the main scanning direction and the nozzles 466 are disposed in a different direction from a longitudinal direction of the ink jet head 421 such that the disposition directions of all of the nozzles 466 are in parallel. Therefore, it is possible to enlarge an area for ejection easily without manufacturing a special long-range ink jet head. Furthermore, the disposition directions of the nozzles 466 are slanted to a direction which crosses the scanning direction, as explained above, the neighboring ink jet heads 421 do not interfere, and the pitch which is ejection interval of the filter element member 13 becomes narrower than the pitch between the nozzles 466. For example, when the motherboard 12 to which the filter element member 13 is ejected is used for a display apparatus or the like, cleaner display condition can be obtained. Also, by setting the slanting angle appropriately, the dot pitch of the dot description are set appropriately; thus, the common utility improves.
Also, a plurality of ink jet heads 421 are disposed in a plurality of arrays, for example, 2 arrays in a staggered manner; therefore, special long-range ink jet heads 421 need not be used. Even if the commonly obtainable ink jet heads 421 is used, the neighboring ink jet heads do not interfere therewith. Also, an area in which the filter element member 13 is not ejected between the ink jet heads 421 does not occur. Therefore, it is possible to eject the filter element member 13 desirably, in other words, continuously.
In addition, a plurality of ink jet heads 421 on surface of which nozzles 466 which eject the filter element member 13 as a fluid liquid material such as an ink are provided are moved along a surface of the motherboard 12 relatively such that a surface of the ink jet head 421 on which the nozzles 466 are provided faces a surface of the motherboard 12 as a substance to receive the ejection with a predetermined space therebetween. The filter element member 13 is ejected from a plurality, for example, two nozzles 466 which are located on a line along the relative moving direction. By doing this, a feature in which the filter element member 13 is ejected form two different nozzles 466 in duplicating manner is obtained. Therefore, even if the ejection amount differs among a plurality of nozzles 466, the ejection amount of the filter element member 13 is equalized; thus, it is possible to prevent unequal ejection amounts. Also, it is possible to obtain a uniform ejection on a plane, and it is possible to provide an electrooptical apparatus having desirable characteristics in planar quality.
Also, a plurality of ink jet heads 421 on surface of which nozzles 466 which eject the filter element member 13 are provided are moved along a surface of the motherboard 12 relatively such that a surface of the ink jet head 421 on which the nozzles 466 are provided faces a surface of the motherboard 12 as a substance to receive the ejection with a predetermined space therebetween. Among the nozzles 466 of the ink jet head 421, the filter element member 13 is not ejected from a plurality, for example, 10 nozzles 466, in a predetermined area X which are on both ends of the linearly-disposed line of the nozzles 466. The filter element member 13 is ejected from the nozzles 466 which are provided not in the predetermined area X but in the center of the rest of the area. By doing this, the filter element member 13 is not ejected from 10 nozzles 466 which are provided in the predetermined area which are on both ends of the linearly-disposed line of the nozzles 466 where ejection amount is larger. The filter element member 13 is ejected from the nozzles 466 in the middle of the linearly-disposed line of the nozzles 466 where ejection amount is relatively uniform. Therefore, it is possible to eject the filter element member 13 on the motherboard 13 uniformly in plane. Thus, a color filter 1 having uniform plane quality can be obtained. Also, in an electrical optical apparatus using the color filter 1, desirable display characteristics can be realized.
Furthermore, the filter element member 13 is not ejected from nozzles 466 of which the ejection amount is larger than the average ejection amount by more than 10%. Therefore, in particular, even if filter element member 13 of the color filter 1, EL illuminating member, and functional liquid material containing charged grain for an electrophoretic apparatus are used as a liquid material, there is no difference in the ejection amount characteristics. Therefore, desirable ejection amount characteristics for an electrooptical apparatus such as a liquid crystal apparatus and an EL apparatus can be obtained securely.
Also, the filter element member 13 is ejected within tolerance of +10% of average ejection amount from each of the nozzles 466. Therefore, the ejection amount becomes relatively uniform; thus, the filter element member 13 is ejected on a surface of the motherboard 12 uniformly in a planar manner. Therefore, an electrooptical apparatus having desirable characteristics can be provided.
Furthermore, a missing-dot detecting unit 487 is provided so as to monitor the ejection condition of the filter element member 13 which is ejected from the nozzles 466. Therefore, it is possible to prevent non-uniform ejection of the filter element member 13; thus, liquid material ejection for desirable and reliable dotting can be realized.
In addition, an optical sensor is provided on the missing-dot detecting unit 487 so as to detect whether or not the filter element member 13 passes through in a direction which crosses orthogonally an ejection direction of the filter element member 13. Therefore, even during the ejection process of the filter element member 13, it is possible to acknowledge the ejection condition of the filter element member 13 securely by an easy structure. Also, it is possible to prevent non-uniform ejection of the filter element member 13; thus, ejection of the filter element member for desirable and reliable dot description can be realized.
The ejection condition of the filter element member 13 is monitored by the missing-dot detecting unit 487 before and after the ejecting process of the filter element member 13 on the motherboard 13 from the nozzles 466. Therefore, it is possible to monitor the ejection condition of the filter element member 13 just before the ejection of the filter element member 13 and immediately after the ejection thereof. Also, it is possible to confirm the ejection condition of the filter element member 13 reliably; thus, it is possible to obtain desirable dotting operation by reliably preventing the missing of dots. Here, it is acceptable that the detecting operation of whether or not there is a dot which is missing is performed before or after the ejecting process.
Also, the missing-dot detecting unit 487 is disposed in an area in which the main scanning direction of the head unit 420 is directed. Therefore, it is acceptable that the movement distance of the head unit 420 be short so as to monitor the ejection condition of the filter element member 13. Also, a movement for ejection in the main scanning direction can be realized by a simple structure. Thus, it is possible to detect the missing-dot by a simple structure.
In addition, the ink jet heads 421 are disposed in 2 arrays in a point-symmetry manner. Therefore, supply pipes 478 for supplying the filter element member 13 can be assembled near the head unit 420. Therefore, it is possible to assemble the apparatus and maintain thereof easily. Furthermore, electric wirings 442 which are used for controlling the ink jet head 421 are connected from both sides of the head unit 420. Therefore, it is possible to prevent the influence of electric noise caused by the electric wirings; thus, it is possible to realize desirable superior dotting operation.
Furthermore, a plurality of ink jet heads 421 on an end of the printed base board 435 which is in a slit form, and a connector 441 be provided on the other end. Therefore, even if the connectors 441 are disposed in a plurality of lines, the connectors 441 do not interfere with each other; thus, it is possible to reduce the size of the apparatus. Also, an area is not formed in which the nozzles 466 in the main scanning direction do not exist. Therefore, it is possible to provide nozzles 466 in continuous array; thus, it is not necessary to use a special long-range ink jet head.
Additionally, the connectors 441 are disposed in a point-symmetry manner so as to be opposite to each other; therefore, it is possible to prevent an influence of electric noise caused in the connector 441. Therefore, it is possible to provide desirable and stable dotting operation.
Here, it is understood that, in the above-explained embodiments, the same effect can be obtained by the same structure.
(Embodiment of a Manufacturing Method for an Electrooptical Apparatus Using EL Element)
Next, a manufacturing method for an electrooptical apparatus according to the present invention is explained with reference to drawings. Here, an active-matrix display apparatus using EL element is explained as the electrooptical apparatus. Before explaining the manufacturing method for the display apparatus, the structure of a display apparatus which is supposed to be manufactured is explained.
(Structure of Display Apparatus)
That is, in
To the signal lines 504, a shift register, a level shifter, video lines, and a data side driving circuit 507 having an analogue switch are connected. Also, to the scan lines 503, a scan side driving circuit 508 having the shift register and a level shifter are connected. Additionally, to each of the pixel areas 501A, a switching thin film transistor 509 to a gate electrode of which the scan signal is supplied via the scan lines 503, an accumulating capacity cap for storing and retaining an image signal which is supplied from the signal line 504 via the switching thin film transistor 509, a current thin film transistor 510 to the gate electrode of which the image signal which is stored in the accumulating capacity cap is supplied, a picture element electrode 511 to which the driving current flows in from the common electricity supplying line 505 when the pixel electrode 511 is connected to the common electricity supplying line 505 electrically via the current thin film transistor 510, and an illuminating element 513 which are sandwiched by the pixel electrode 511 and a reflecting electrode 512 are provided.
By doing this, when the scan line 503 is driven and the switching thin film transistor 509 is turned on, a potential of the signal line 504 at the time is retained in the accumulating capacity cap. On/off condition of the current thin film transistor 510 is determined according to the condition of the accumulating capacity cap. In addition, via channels of the current thin film transistor 510, electric current flows from the common electricity supplying line 505 to the pixel electrode 511 Furthermore, electric current flows to the reflecting electrode 512 via the illuminating element 513. By doing this, the illuminating element 513 is illuminated according to the amount of the electric current which flows therethrough.
Here, in the pixel area 501A, as shown in
(Manufacturing Process for Display Apparatus)
Next, manufacturing process for manufacturing an active-matrix display apparatus which uses the above-explained EL displaying element is explained.
(Preparatory Processing)
First, as shown in
In addition, as shown in
After that, as shown in
Next, as shown in
Furthermore, as shown in
In addition, the inter-layer insulating layer 530 is formed so as to cover a top surface of each wiring, and a contact hole 532 is formed in a corresponding position to the relay electrode 526. An ITO layer is formed so as to bury the contact hole 532. By performing a patterning operation on the ITO layer, a pixel electrode 511 which is connected to the source drain area 510a electrically at a predetermined position which is surrounded by the signal line 504, the common electricity supplying line 505, and the scan line 503 is formed.
Here, in
(Ejection of EL Illuminating Member)
Next, an EL illuminating member as a functional liquid material is ejected to the displaying base board 502 to which the preparatory processing was performed by an ink jet method. That is, as shown in
For an optical member 540A for forming the positive hole ejection layer 513A, polyphenylene vinylene (the polymer precursor for which is polytetrahydrothiophenyl phenylene), 1,1-bis(4-N,N-ditolylaminophenyl)cyclohexane, tris(8-hydroxyquinolinol) aluminum.
Here, at the time of ejection, because the fluidity of the fluid optical member 540A is high, the optical member 540A expands in planar directions as similar to the case in which the filter element member 13 is ejected to the bulkhead according to each embodiment. However, the gap 535 is formed so as to surround the area on which the optical member 540A is applied; therefore, unless ejection amount of the optical member 540A in one time is extremely large, it is possible to prevent the optical member 540A from expanding over the gap 535 outside the predetermined position.
Furthermore, as shown in
Next, as shown in
For an optical member 540B for forming the organic semiconductor layer 513B, a cyano-substituted polyphenylene vinylene, a polyphenylene vinylene, a polyalkyl phenylene, 2,3,6,7-tetrahydro-11-oxo-1H,5H,11H-[1]benzopyrano[6,7,8-ij]-quinolizin-10-carboxylic acid, 1,1-bis-(4-N,N-ditolylaminophenyl)cyclohexane, 2-(3,4′-dihydroxyphenyl)-3,5,7-trihydroxy-1-benzopyrylium perchlorate, tris(8-hydroxyxylenol)aluminum, 2,3,6,7-tetrahydro-9-methyl-11-oxo-1H,5H,11H-[1]benzopyrano[6,7,8-ij]-quinolizin, an aromatic diamine derivative (TDP), an oxadiazole dimer (OXD), an oxadiazole derivative (PBD), a distyrylarylene derivative (DSA), a quinolinol metal complex, a beryllium-benzoquinolinol complex (Bebq), a triphenylamine derivative (MTDATA), a distyryl derivative, a pyrazoline dimer, rubrene, quinacridone, a triazole derivative, a polyphenylene, a polyalkylfluorene, a polyalkylthiophene, an azomethine zinc complex, a porphyrin zinc complex, a benzoxazole zinc complex, a phenanthroline europium complex, and the like are used.
Next, as shown in
In each of the embodiments shown in FIGS. 35 to 39D, by performing the same ink jet method as in the each of the above-explained embodiments, it is possible to provide similar operational effects. Furthermore, when the functional liquid material is applied selectively, it is possible to prevent the functional liquid material from flowing therearound; thus, it is possible to perform the patterning operation in high accuracy.
Here, in embodiments shown in FIGS. 35 to 39D, an active-matrix display apparatus using an EL displaying element for color display operation is explained. In addition, as shown in
That is, it is acceptable for the organic semiconductor layer 513B to be formed uniformly on an entire surface of the displaying base board 502. However, in this case, the positive hole ejection layer 513A must be disposed selectively according to each of the predetermined positions so as to prevent cross-talk. Therefore, it is quite effective to apply using the gap 111. Hereinafter, in
Also, a display apparatus using the EL illuminating element can be provided not only in a form of an active-matrix display apparatus, but also in a form of a passive-matrix display apparatus as shown in
In a display apparatus according to the embodiment shown in
Furthermore, an active-matrix display apparatus is not limited to embodiments shown in FIGS. 35 to 39D. That is, an active-matrix display apparatus can be provided according to any one of embodiments such as shown in, for example,
In a display apparatus shown in
In the display apparatus shown in
However, the conditions are different from the embodiments shown in FIGS. 35 to 39D in that the optical member 540A is ejected by the displaying base board which is disposed vertically reversed, that is, under conditions that the top surface of the pixel electrode 511 to which the optical member 540A is applied is directed downward. By doing this, the optical member 540A remains on a top surface of the pixel electrode 511 (on a downwarded surface in
A display apparatus shown in
In the display apparatus shown in
In addition, similarly to the cases of the embodiments shown in FIGS. 35 to 39D, the illuminating element 513 is formed by ejecting and applying the optical members 540A and 540B as a functional liquid material in the area which is surrounded by the gap 535 by ink jet method.
On the other hand, on the removal base board 580, the scan line 503, the signal line 504, the pixel electrode 511, the switching thin film transistor 509, the current thin film transistor 510, and the inter-layer insulating layer 530 are formed via a removal layer 581. Finally, a structure which is removed from the removal layer 581 on the removal base board 580 is printed on the displaying base board 502.
In the embodiment shown in
A display apparatus shown in
In the display apparatus shown in
In a display apparatus shown in
In a display apparatus shown in
Here, the embodiment shown in
Also, it is acceptable that the distribution of volatility and hydrophilicity be formed by metal or insulating layers such as anode oxide layer, polyimide, or silicon oxide, or other material member. Here, the passive-matrix displaying element can be formed by the first bus wiring 550. The active-matrix displaying element can be formed by the scan line 503, the signal line 504, the pixel electrode 511, the insulating layer 530, or the shielding layer 6b.
In a display apparatus shown in
In a display apparatus shown in
Here, the embodiment shown in
Also, in the embodiment shown in
The preferable embodiments of the present invention were explained above. However, the present invention is not limited to the embodiments which are explained above. The present invention includes modified embodiments as follows. The invention disclosed herein may be variously modified and have alternative forms as long as they fall within the scope of the present invention as defined by the claims.
That is, for example, in the manufacturing apparatus for the color filter shown in
Also, in the above-mentioned embodiment, the ink jet head 421 which ejects the ink by using the deflective transformation of the piezoelectric element was used. It is possible to use ink jet heads having any structure such as an ink jet head which ejects the ink by using bubbles which are generated by heating operation.
Furthermore, in the embodiments shown in FIGS. 22 to 32, it was explained that nozzles 466 were disposed at equal interval on nearly a line in two arrays in the ink jet head 421. However, it is acceptable that the nozzles are disposed not only in two arrays but also in a plurality of arrays, for example, more than 3 arrays. Also, it is accepted that the disposition of the nozzles 466 are not in an equal interval nor on a line in an array manner.
In addition, the liquid drop ejecting apparatuses 16 and 401 are not limited to be used in the color filter 1, the liquid crystal apparatus 101, and the EL apparatus 210. The liquid drop ejecting apparatuses 16 and 401 can be used for various electrooptical apparatuses which have a base board (base member) and a process for forming a predetermined layer thereon such as an electron emission apparatus such as an FED (Field Emission Display), a PDP (Plasma Display Panel), an electrophoretic apparatus which ejects the ink as a functional liquid material containing a charged particle to a concave section between the bulkhead of each pixel and charges a voltage between the electrodes which are disposed so as to sandwich each of the pixels vertically and brings the charged particle to either one of the electrodes so as to perform display operation in each of the pixels, thin Braun tube, and a CRT (Cathode-Ray tube) display.
The apparatuses and methods according to the present invention can be used for in manufacturing processes for various devices having a process for ejecting the liquid drop 8 to the base board (base member) of the device such as an electrooptical apparatus having the base board (base member). The apparatuses and methods according to the present invention can be used for, for example, structures in which a liquid metal, a conductive member, and a metal-contained painting member are ejected by an ink jet method so as to form a metal wiring, optical members such as fine micro-lenses which are formed on the base member by ink jet method, only necessary amount of resist is applied on the base board by ink jet method, concave sections or fine-white patterns for dispersing a light are formed on a transparent base board such as a plastic member by ink jet method so as to form a light dispersing board, samples, antibodies, and DNA (deoxylibonucleic acid) are ejected to a position in a dot manner which are separated on the base member by ink jet method so as to form a bio-tip; that is, RNA (ribonucleic acid) is ejected to a spike spot which is disposed in a matrix manner on a DNA chip by ink jet method so as to form a fluorescent probe such that the DNA chip can hybridize.
The apparatuses and methods according to the present invention can be used for a liquid crystal apparatus 101 such as an active-matrix liquid crystal panel which is provided with a pixel such as a transistor such as a TFT or an active element such as TFD. That is, the apparatuses and methods according to the present invention can be used for a structure for forming the electrooptical system for the liquid crystal apparatus 101, for example, structures in which an ink is ejected by an ink jet method to a bulkhead 6 which is formed so as to surround the pixel electrode so as to form a color filter 1, an ink containing a mixture of color members and conductive member is ejected to the pixel electrode by ink jet method so as to form a color filter 1 as a conductive color filter, a grain for a spacer for holding the gap between the base boards is ejected by ink jet method.
Furthermore, the apparatuses and methods according to the present invention can be used not only for the color filter 1 but also for any kind of electrooptical apparatus such as an EL apparatus 201. Also, the EL apparatus 201 can be realized in various ways such as a stripe displaying apparatus in which the ELs corresponding to three colors such as those of R, G, and B are formed in a strip manner, an active-matrix display apparatus which is provided with transistors for controlling the electric current which flows in the illuminating layers with respect to each pixel, and a passive-matrix display apparatus.
Here, the electronic devices to which an electrooptical apparatus according to the above-explained embodiments is assembled is not limited to a personal computer 490 which is shown in
Additionally, specific structures and process for performing the present invention can be replaced by other structures and processes as long as the objects for the present invention can be achieved. For example, in embodiments shown in
Claims
1. An electrooptical apparatus comprising:
- a base board on which a plurality of electrodes are disposed;
- a plurality of EL layers which are disposed on the base board corresponding to the electrodes, wherein:
- the EL layer has a plurality of nozzles for ejecting a liquid material containing the EL member;
- a plurality of liquid drop ejecting heads, which are disposed in a direction which diagonally crosses a direction in which an array of a plurality of the nozzles relatively move to the base board, move along a surface of the base board relatively such that a surface having the nozzles face a surface of the base board with a space therebetween; and
- the liquid material is ejected from the nozzles to a predetermined position of the base board preferably.
2. The electrooptical apparatus of claim 1, the plurality of nozzles being configured to eject the liquid material to a predetermined position of the base board.
Type: Application
Filed: Jul 12, 2006
Publication Date: Nov 9, 2006
Applicant: Seiko Epson Corporation (Tokyo)
Inventors: Shinichi Nakamura (Suwa-shi), Yoshiaki Yamada (Suwa-shi), Tsuyoshi Kitahara (Suwa-shi), Satoru Katagami (Suwa-shi)
Application Number: 11/484,694
International Classification: H01J 1/62 (20060101); B05B 7/06 (20060101);
