Cap structure of a raw material bottle

Abstract

A cap structure of a raw material bottle is provided with a pneumatic joint, a raw material output joint, and a raw material reflux joint, such that by linking the pneumatic joint with an inert gas supplying source, and by linking the raw material output joint and the raw material reflux joint with a pump, a chemical raw material can be pushed to a production and processing facility by the pump or the inert gas. When a raw material supply system has reached to a configuration state that stops supplying the raw material, the chemical raw material can be transmitted back to the raw material bottle through the raw material reflux joint, thereby recycling in real time the chemical raw material into the raw material bottle.

Description

BACKGROUND OF THE INVENTION

(a) Field of the Invention

The present invention relates to a cap structure of a raw material bottle, and more particularly to a cap structure which enables the raw material to be refluxed for use in real time.

(b) Description of the Prior Art

In a process of making a semi-conductor integrated circuit or a TFT-LCD (Thin-Film Transistor Liquid-Crystal Display), construction of a related circuit will be mostly proceeded through procedures of exposure and developing, as well as etching, wherein a photoresist is a primary raw material for the exposure and developing, with a primary principle that a photoresist (photoresistant composition), which is composed of a polymer resin, a light sensitive compound and a solvent, is uniformly covered or coated on a layer of insulator or a conductive metal layer on a wafer or a glass substrate.

After the wafer or glass substrate which has been covered or coated by the photoresist is heated and baked to vaporize the solvent, it is selectively exposed to some kind of radiation, such as an ultraviolet ray, an electron or X-ray. The exposed wafer or glass substrate is baked again, and an expected pattern will be resulted after developing the baked wafer or glass substrate. The developed wafer or glass substrate is then etched to remove the layer of insulator or conductive metal layer, and to remove the residual photoresist for accomplishing transfer of the miniature pattern onto a surface of the wafer or glass substrate.

In order to satisfy a requirement of automatic operation for coating with the photoresist by a production and processing facility, as shown in FIG. 1, a conventional photoresist transmission loop includes primarily a first pipe 61 and a second pipe 62 which are located at a raw material bottle 10 for containing the photoresist (or other chemical raw material for removing air bubbles in the photoresist). The first pipe 61 is linked with an inert gas (such as nitrogen) supplying source, whereas the second pipe 62 is linked with a storage device 20, a pump 30, and a production and processing facility 40.

In a pre-processing operation that the chemical raw material starts to be supplied, the chemical raw material in the raw material bottle 10 is pushed into the second pipe 62 by the inert gas, and under actions of the storage device 20 and a vent line 21, air inside the second pipe 62 is vented. When the second pipe 62 is completely filled with the photoresist, the photoresist will be pushed to the production and processing facility 40 under an action of the pump 30 or the inert gas, wherein the pump 30 is configured to automatically discharge a certain amount of photoresist at a specified time or some processing step, according to a requirement of practical processing operation.

Moreover, to enable the raw material bottle 10 to be in a closed shape for facilitating the inert gas to push the chemical raw material into the first pipe 61, as shown in FIG. 2, the conventional raw material bottle 10 is provided, at its cap 11, with a pneumatic joint 111 for connecting with the first pipe 61, and a raw material output joint 112 for connecting with the second pipe 62. Other than these two joints, there is no other structure for feeding in the chemical raw material. Therefore, the discharged photoresist is directly drained to a waste liquid tank 50 to be processed as the waste, only through a discharge opening at a front end of the pump 30, which will cause a waste of the photoresist, and increase cost for processing the waste liquid.

SUMMARY OF THE INVENTION

Accordingly, the primary object of present invention is to provide a cap structure of a raw material bottle, wherein the entire cap structure includes principally a pneumatic joint, a raw material output joint, and a raw material reflux joint. In addition, the raw material output joint is provided with a suction pile which is extended into the raw material bottle that is linked with an inert gas supplying source through the pneumatic joint, and is connected to a storage device, a pump, and a production and processing facility, through the raw material output joint.

The cap of raw material bottle is provided additionally with the raw material reflux joint, such that the cap can be linked to a discharge opening of the pump through the raw material reflux joint. Under a normal operation, chemical raw material is pushed to the production and processing facility through the pump or the inert gas. When a raw material supply system has reached to a configuration state that stops supplying the chemical raw material, the chemical raw material will be transmitted back to the raw material bottle through the pump in real time to be recycled in real time, thereby achieving objects of reducing cost of the chemical raw material and cost of waste recycling, as well as mitigating jeopardy to environment.

To enable a further understanding of the said objectives and the technological methods of the invention herein, the brief description of the drawings below is followed by the detailed description of the preferred embodiments.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a schematic view of a conventional loop for supplying a chemical raw material.

FIG. 2 shows a perspective view of a conventional cap of a raw material bottle.

FIG. 3 shows a perspective view of a cap of the present invention.

FIG. 4 shows a schematic view of a loop for supplying a chemical raw material, according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The present invention is to improve a cap structure of a raw material bottle in a chemical raw material supply system, to facilitate the entire raw material supply system to recycle in real time the chemical raw material which was to be discharged directly as waste liquid, thereby achieving objects of reducing cost of the chemical raw material and cost of waste recycling, and mitigating jeopardy to environment.

Referring to FIG. 3 and FIG. 4 an entire chemical raw material supply system comprises basically a first pipe 61 and a second pipe 62, at a raw material bottle 10 for containing the chemical raw material. The raw material bottle 10 is linked with an inert gas (such as nitrogen) supplying source by the first pipe 61, and is linked with a storage device 20, a pump 30, and a production and processing facility 40, by the second pipe 62.

A cap 11 of the raw material bottle 10 is provided with a pneumatic joint 111 for connecting with the first pipe 61, a raw material output joint 112 for connecting with the second pipe 62, and a raw material reflux joint 113 for connecting with a third pipe 63 through which the raw material bottle 10 can be linked to a discharge opening of the pump 30. Upon implementing, the pneumatic joint 111, the raw material output joint 112, and the raw material reflux joint 113 are high pressure pipe joints, so as to be sustained with working pressure that is exerted to the raw material bottle 10 by the raw material supply system. In addition, the raw material output joint 112 is provided with a suction pipe which is extended to a bottom of the raw material bottle 10.

Accordingly, in a pre-processing operation that the chemical raw material starts to be supplied, the chemical raw material in the raw material bottle 10 is pushed into the second pipe 62 by the inert gas, and under actions of the storage device 20 and a vent line 21, air inside the second pipe 62 is vented. When the second pipe 62 is completely filled with the chemical raw material, the chemical raw material will be pushed to the production and processing facility 40 under an action of the pump 30 or the inert gas.

In particular, when the pump 30 automatically discharges the chemical raw material, at a specified time or some processing step, to remove air bubbles inside the chemical raw material, the chemical raw material can be transmitted back in real time to the raw material bottle 10 by the pump 30 through the third pipe 63 and the raw material reflux joint 113, for recycling in real time, thereby achieving objects of reducing cost of the chemical raw material and cost of waste recycling, as well as mitigating jeopardy to environment.

Upon practically implementing, the raw material reflux joint 113 can be further provided with a valve (not shown in the drawings) which can be a manual valve for allowing a user to control a time for transmitting back the chemical raw material, or an electric valve which controls the time for transmitting back the chemical raw material by a related control circuit. In addition, the valve may not be installed at all, but by configuring a time difference between activating the pump and the inert gas to achieve an object of controlling the time for transmitting back the chemical raw material.

It is of course to be understood that the embodiments described herein is merely illustrative of the principles of the invention and that a wide variety of modifications thereto may be effected by persons skilled in the art without departing from the spirit and scope of the invention as set forth in the following claims.

Claims

1. A cap structure of a raw material bottle being installed at an opening of a raw material bottle for enabling the raw material to be in a closed shape, wherein the cap is provided with a pneumatic joint, a raw material output joint, and a raw material reflux joint.

2. The cap structure of a raw material bottle according to claim 1, wherein the raw material output joint is provided with a suction pipe which is extended into the raw material bottle.

3. The cap structure of a raw material bottle according to claim 1, wherein the pneumatic joint is a high pressure pipe joint.

4. The cap structure of a raw material bottle according to claim 1, wherein the raw material output joint is a high pressure pipe joint.

5. The cap structure of a raw material bottle according to claim 1, wherein the raw material reflux joint is a high pressure pipe joint.

6. The cap structure of a raw material bottle according to claim 1, wherein the raw material reflux joint is provided with a valve.

7. The cap structure of a raw material bottle according to claim 6, wherein the valve is a manual valve.

8. The cap structure of a raw material bottle according to claim 6, wherein the valve is an electric valve.