FLOW CONTROL DEVICE WITH VARIANT ORIFICE
A flow control device includes a seal element and a flow element that in a first position presents a first flow area and in a second position presents a second flow area. Also presented is a flow element with a variant orifice for a flow control device. The flow element may have a hollow body and at least one flow opening in a wall of the hollow body. In another embodiment, the at least one flow opening may have a first flow area at a first position relative to a reference axis and a second flow area at a second position relative to the reference axis. An embodiment of a seal element is presented in which the seal element includes a first portion, a second portion, and a transition portion that joins the first portion and the second portion. The transition portion isolates the second portion from stresses applied to the first portion.
This application claims the benefit of pending U.S. Provisional patent application Ser. No. 61/949,448 filed on Mar. 7, 2014, for FLOW CONTROL DEVICE WITH VARIANT ORIFICE, the entire disclosure of which is fully incorporated herein by reference.
BACKGROUND OF THE DISCLOSUREThe inventions relate to fluid delivery arrangements, and more particularly to flow control devices such as valves that may be used to control or regulate or meter fluid flow. Valves are well known for use as flow control devices for gas and liquid fluid delivery and control. In the semiconductor industry as well as others, delivery of process chemicals during various processing operations is controlled using valves, for example, high purity valves. Some of the more common applications for valves are chemical vapor deposition (CVD) and atomic layer deposition (ALD). Some valves are used as metering valves in which an actuator or other control device is used to adjust, change or control fluid flow rate through an orifice. Needle valves are traditionally used to provide a metering operation, with a tapered stem tip being used to change the effective flow area of a fixed orifice. But, flow control through needle valves can be susceptible to instability due to flow influences on the stem tip. Additionally, needle valves can exhibit difficulties with repeatable flow rate after changing the position of the needle.
A first inventive concept presented herein provides a flow control device with a variant orifice or flow opening to allow an adjustable flow rate. In an embodiment, the flow control device includes a seal element and a flow element that in a first position presents a first flow area and in a second position presents a second flow area. Additional embodiments of this concept are presented herein.
A second concept presented herein provides a flow element with a variant orifice for a flow control device. In an embodiment, the flow element may have a hollow body and at least one flow opening in a wall of the hollow body. In another embodiment, the at least one flow opening may have a first flow area at a first position relative to a reference axis and a second flow area at a second position relative to the reference axis. Additional embodiments of this concept are presented herein.
A third concept presented herein provides a seal element with a segmented geometry. In an embodiment, the seal element includes a first portion, a second portion, and a transition portion that joins the first portion and the second portion. The transition portion isolates the second portion from stresses applied to the first portion. In another embodiment, the first portion has an outside diameter, the second portion has an outside diameter, with the first portion outside diameter being greater than the second portion outside diameter. The seal element may, in an embodiment, be part of a flow control device as set forth herein.
The concepts may be used for liquid or gas delivery, although the concepts are well suited for fluid metering applications.
DESCRIPTION OF THE EXEMPLARY EMBODIMENTSWith reference to the drawings, in an exemplary embodiment, a flow control device 10 may be realized in the form of a valve and actuator assembly 10. The valve and actuator assembly 10 may include an actuator assembly 12 and a valve assembly 14. The actuator assembly 12 may be stacked on top of the valve assembly 14 or otherwise operably coupled therewith. The actuator assembly 12 preferably is of the type that imparts or causes linear movement with respect to a reference axis. Although this exemplary embodiment illustrates use of a manual actuator, alternative embodiments may use other types of actuators, for example, an automatic actuator such as an electromagnetic actuator to name one example. By automatic actuator is meant an actuator that is operable other than by force being applied manually to a handle or other manually driven device. The use of an automatic actuator also facilitates the ability to utilize remote actuation over a wired or wireless network.
The valve assembly 14 is an embodiment of a flow control device 10 as set forth herein; but the teachings herein may alternatively be used with other flow control device designs and configurations other than a bellows-type valve as disclosed herein. For example, alternatively the valve assembly may be a diaphragm valve or other valve design that operates in response to linear actuation.
A reference axis X is noted on the figures. All references herein to axial or radial positions and movement are with respect to the reference axis X unless otherwise noted. The reference axis X, also referred to herein as the axis X, may be but need not be coaxial with the central longitudinal axis of the bellows stem (34.)
The actuator assembly 12 and most of the valve assembly 14 may conveniently be designed to form a modified BM series bellows-sealed metering valve which is available commercially from Swagelok® Company, Solon, Ohio. The BM Series is also shown in the product catalog titled BELLOWS-SEALED METERING VALVES which is available on-line at Swagelok.com and is fully incorporated herein by reference. However, many other actuator designs and valve designs may alternatively be used. The teachings herein are not limited to use with a bellows-sealed valve assembly, but may alternatively be used with many other valve designs, including but not limited to a tied diaphragm valve or a valve having a stem sealed by o-rings or packings such as may be used in traditional needle valves or plug valves and so on.
The actuator assembly 12 for convenience may be but need not be the same as a manual actuator assembly that is sold commercially with the BM Series bellows-sealed valves. Therefore, a detailed explanation of the actuator assembly 12 is not necessary to understand and practice the present teachings. However, alternatively many different types of actuators may be used as needed for particular applications and requirements.
The actuator assembly 12 embodiment includes a bonnet 16 with an actuator stem 18 slideably disposed therein. The actuator stem 18 is operably coupled to a manually actuated handle 20 at a first or proximal end 18a of the actuator stem 18. A first set screw 22 may be used mechanically to couple a barrel 24 to an upper end 16a of the bonnet 16; a second set screw 26 may be used mechanically to couple an upper end 18a of the actuator stem 18 to a bushing 28; and a third set screw 30 may be used mechanically to couple the handle 20 to the bushing 28. A threaded connection 32 is used between the actuator stem 18 and the bonnet 16. As such, clockwise and counter-clockwise rotation of the handle 20 about the axis X translates or axially moves the actuator stem 18 down and up as viewed in
At a second or distal end 18b of the actuator stem, the actuator stem 18 is operably coupled to a bellows stem 34 at a first or proximal end 34a thereof such as with a snap ring 36, for example, and a bearing 38. The bearing 38 allows for free and low friction rotation between the actuator stem 18 and the bellows stem 34 while at the same time mechanically coupling these parts together so that axial translation of the actuator stem 18 produces corresponding axial translation of the bellows stem 34. A bellows 40 is welded at a first end 40a to a shoulder 42 on the bellows stem 34. A second or opposite end 40b of the bellows 40 is welded to a weld ring 44. The weld ring 44 may be welded to the valve body to form a fluid tight body seal, or alternatively a gasket 46 may be used to form a fluid tight compression body seal. A bonnet nut 48 is used mechanically to couple the bonnet 16 to the valve assembly 14, for example, with a threaded connection.
The valve assembly 14 embodiment for convenience may be but need not be a modified version of a valve assembly that is sold commercially as part of the BM Series bellows-sealed valves. The BM series valve includes a flow control device body 50 (also referred to herein as a valve body) that has a flow chamber 52 that receives a lower or distal end 34b of the bellows stem. An inlet 54 and an outlet 56 communicate with the flow chamber 52 as further described below. This portion of the valve assembly 14 may be but need not be the same as the BM Series valve. Note that the valve body configuration illustrated in the drawings is for a surface mount configuration in which a first or inlet valve port 58 and a second or outlet valve port 60 are formed in a lower surface 50a of the valve body 50. Flow may be reversed through the valve assembly 14, however, in which case the inlet to the flow chamber 52 would be at 56 and the outlet from the valve chamber would be at 54. Other valve body configurations and valve porting configurations besides surface mount may be used, for example, with traditional end connections for flow through valves, right angle valves, three way ported valves and so on.
Although reference is made herein to an inlet 54 and an outlet 56 and a flow chamber 52, this is simply for convenience in describing the apparatus in valve related terminology. The inlet and outlet are in a broader sense portions of a flow path (FP) that in part includes a first portion 54 and a second portion 56. Flow along the flow path may be in either direction so that either the first portion 54 or the second portion 56 may serve as an inlet or upstream flow portion, while the other portion may serve as the outlet or downstream flow portion. For flow control, a flow control arrangement, for example, a valve mechanism or a metering mechanism may be disposed between the first portion 54 and the second portion 56 as described further below.
In an embodiment of the present teachings, disposed between the inlet 54 and the outlet 56 is a flow control arrangement 70. The flow control arrangement 70 may include a seal element 72 and a flow element 74 (see
In a further embodiment, the relative position between the flow element 74 and the seal element 72 may be a relative axial position with respect to the reference axis X, as an example. The seal element 72 in an embodiment may be fixed in position relative to the flow element 74. For example, the seal element 72 may be press fit or otherwise secured in position in a valve body bore 78 that in part defines the outlet 56 from the flow chamber 52. Many alternative techniques may be used to fix the seal element 72 in position relative to the flow element 74.
A proximal end 74a of the flow element 74 may be attached to the distal end 34b of the bellows stem 34. For example, a press fit, weld, adhesive or any other convenient mechanical coupling or attachment means may be used to connect the bellows stem 34 and the flow element 74. Accordingly, axial translation of the bellows stem 34 by operation of the actuator assembly 12 will produce axial translation of the flow element 74 relative to the seal element 72. Although axial linear translation of the flow element 74 is preferred, this does not restrict the many different ways that axial linear translation can be effected, including but not limited to the use of actuation mechanisms and mechanical couplings that convert rotary or other motion into linear displacement.
It will be noted that in an embodiment with a bellows, the maximum stroke of the bellows stem 34 determines the maximum stroke of the flow element 74; and the sensitivity or control of the stroke of the bellows stem 34 and the flow element 74 is determined by the mechanical coupling between the actuator assembly 12 and the bellows stem 34. For example, fine control may be realized with fine thread pitch at the mechanical threaded connection 32 to produce a fine axial stroke of the flow element 74 relative to degrees of rotation of the handle 20, whereas a course thread pitch will produce a course axial stroke of the flow element 74 relative to degrees of rotation of the handle 20.
In alternative embodiments, the flow element 74 may be the fixed member and the seal element 72 may be the movable member that translates axially by operation of the actuator assembly 12.
The flow element 74 may take on many different shapes and configurations depending on the flow profile that is desired. By flow profile is meant the flow rate versus axial stroke or displacement of the movable member, such as for example, the flow element 74. The desired flow profile will depend on the particular application or end use for the valve assembly 14 and can easily be implemented by appropriate selection and location and geometry of the flow openings 76. A distinct advantage realized with the present teachings is that the flow profile can be changed by simply replacing the flow element 74 having the desired pattern of flow openings 76, so that the same valve body 50, seal element 72 and even the same actuator assembly 72 if so desired can be used. This can greatly reduce inventory and changeover time by not having to replace the entire assembly 10 just to change the flow profile.
The seal element 72 may also take on many different shapes, sizes, material, geometry and so on. In
The seal element 72 may be an embodiment of a hard seal, such as being composed of a metal, to form a metal to metal seal with the tubular body 80, or the seal element 72 alternatively may be a hard non-metal such as ruby; further still the seal element 72 alternatively may be a soft seal such as a polymer or rubber that provides a snug fit with the tubular body 80. Exemplary materials for the seal element 72 include but are not limited to plastics such as PFA (perfluoalkoxy), PTFE, (polytetrafluoroethylene), PCTFE (polychlorotrifluoroethylene), PEEK (polyetheretherkeytone), PI (polyimide), elastomers, rubber and metals such as 316 stainless steel, ceramics and so on to name a few. In addition, the use of coatings or surface treatments on the seal element 72 portion that contacts the flow element 74 and/or the outer surface of the flow element 74 itself may be included as a means to enhance durability and seal performance. For example, stainless steel surfaces may be surface treated with low temperature carburization processes. Surface coatings may alternatively be used, for example, titanium nitride, ceramic coatings, lubricious coatings for example PTFE, diamond like carbon coating, and so on to name a few examples. The seal element 72 may alternatively be a composite structure, for example, a metal ring with a polymer or other soft material at the seal surface, or a hard non-metal insert such as ruby or a ceramic and so on. Although the exemplary embodiments include all metal parts, for example, stainless steel such as 316 stainless steel for the tubular body 80 and metal for the seal element 72, non-metal flow control devices 10 may be used, for example, made of polymers or other non-metal materials. Metal materials may be preferred in various applications for temperature related stability of the flow profile.
Although the element 72 is referred to as a seal element, those skilled in the art will understand that the seal element 72 cooperates with the flow element 74 to control fluid flow along the flow path FP. As with any dynamic seal and some static seals, there may be but need not be in all situations some fluid leakage or by-pass flow between the seal element 72 and the flow element 74. The seal interface between the seal element 72 and the flow element 74 in the exemplary embodiments herein is a dynamic seal meaning that the seal is maintained in the annulus between the tubular body 80 and the inside surface of the seal element 72 which move or slide relative to each other. When there is relative axial displacement or movement between the seal element 72 and the flow element 74, the seal interface therebetween is a dynamic seal. When the seal element 72 and the flow element 74 are stationary relative to each other, the seal interface therebetween is a static seal. Particularly for metal to metal seals, there may be leakage or by-pass flow, but the seal element 72 is intended to inhibit such leakage or by-pass flow to an acceptable amount for particular applications, relative to the overall flow FP, by having a tight tolerance between the outside diameter of the flow element 74 and the inside diameter of the seal element 72. In general, and particularly for low flow rates, the seal between the seal element 72 and the flow element 74 reduces or minimizes by-pass flow or leakage so that such leakage will not adversely affect the desired flow profile. In lower pressure applications there may be no leakage or by-pass flow depending on the tolerances allowed for the seal element 72/flow element 74 interface.
Although in
In
In the position of
In the position of
In the position of
In an embodiment, the flow element 74 may be realized using a ¼inch piece of tubing such as stainless steel tubing. Using the teachings herein, very precise control of the flow may be achieved to as low as approximately 0.01 Cv for full flow or more, even greater than 1 Cv. Using the teachings herein even 0.0001 Cv full scale flow can be achieved. Fine or course resolution may be realized as needed for particular applications. For example, a fine resolution using a “digital” pattern of flow opening 76 (see, for example,
The flow openings 76 may be used in many embodiments in the form of slots or openings through the wall of a tubular flow element as noted above. This allows the use of a thin wall tubular body 80 with a geometrically stable flow area because the various flow openings 76 are geometrically stable, thereby providing a stable flow area as the variant orifice.
In
In the embodiments described thus far, the flow element is movable under the control of the actuator assembly 12 while the seal element is fixed in position relative to the flow element. Alternatively, the flow element may be fixed in position relative to the seal element with the seal element being movable under control of the actuator assembly 12. In either case, flow is changed by relative axial displacement between the flow element and the seal element.
Note that in the circled portion Y of
Note that in the various embodiments herein, the flow element 74 may include an end taper 74b (
In an alternative embodiment, rather than using formed flow openings 76 in a flow element 74, the flow element 74 may be made of a porous material. For example, the flow element 74 may be made of a sintered stainless steel having a porosity that is a function of the size of the pores in the sintered material. These pores can then serve as flow openings to provide a flow path through the wall of the hollow flow element 74.
From
In order to reduce the need for tight tolerances on this press fit assembly, the alternative embodiment of
The first portion 204 has an inside diameter surface 214 that is greater than the diameter of the inside diameter surface 212 of the second portion 206. Therefore, the flow element 74 easily fits through the first portion 204 and does not need to have tight tolerance therewith.
A transition portion 216 that may be tapered or otherwise stepped or shaped as needed is provided that joins the first portion 204 and the second portion 206. The transition portion 216 provides a preferably first tapered transition 218 between the outside diameter surface of the first portion 204 with the outside diameter surface of the second portion 206. The transition portion 216 also provides a preferably second tapered transition 220 between the inside diameter surface 214 of the first portion 204 with the inside diameter surface 212 of the second portion 206. The transition portion 216 therefore preferably has a thinner wall thickness 222 as compared with the wall thickness 224 of the first portion 204 and the wall thickness 226 of the second portion 206. The wall thicknesses 224 and 226 may be but need not be the same as each other. In effect, the second portion 206 is cantilevered from the first portion 204 by the transition portion 216. This has the advantageous feature that the transition portion 216 separates or segments axially the press-fit portion 204 and the seal portion 206. Therefore, any stress and distortion of the seal element 200 caused by the press-fit assembly into the valve body bore 78 is taken up by the transition portion 216 and does not affect or distort the concentricity of the seal portion 206 and the flow element 74. This avoids distortion particularly of the seal surface 212 with respect to the flow element 74. In other words, the transition portion 216 in effect axially isolates or separates the press-fit portion 204 from the seal portion 206. The press-fit portion 204, the transition portion 216 and the seal portion 206 preferably are aligned along a reference axis, such as for example the axis X with the transition portion 216 axially between the first portion 204 and the second portion 206.
It is intended that the inventions not be limited to the particular exemplary embodiments disclosed for carrying out the inventions, but that the inventions will include all embodiments falling within the scope of the appended claims.
Claims
1. Flow control device, comprising:
- a body comprising a flow path having a first portion and a second portion,
- a flow element comprising at least one flow opening,
- a seal element disposed between said first portion and said second portion, said flow element being operable with said seal element to control flow between said first portion and said second portion,
- said at least one flow opening presenting a first flow area when said flow element is in a first position, and said at least one flow opening presenting a second flow area when said flow element is in a second position.
2. The flow control device of claim 1 wherein said first position and said second position of said flow element are relative to a reference axis.
3. The flow control device of claim 2 wherein said at least one flow opening comprises a single flow opening having a flow area that varies in relation to said reference axis.
4. The flow control device of claim 3 wherein said single flow opening comprises a tapered slot.
5. The flow control device of claim 2 wherein said at least one flow opening comprises a plurality of discrete flow openings disposed relative to said reference axis.
6. The flow control device of claim 5 wherein said plurality of discrete flow opening comprise two openings having overlapping ends that are radially separated.
7. The flow control device of claim 1 wherein said at least one flow opening presents a maximum flow area at an end portion of said at least one flow opening.
8. The flow control device of claim 1 wherein said at least one flow opening presents a minimum flow area at an end portion of said at least one flow opening.
9. The flow control device of claim 1 wherein said seal element blocks flow between said first portion and said second portion when said flow element is in a third position.
10. The flow control device of claim 1 wherein said flow element comprises a hollow member and said at least one flow opening is provided by an opening through a wall of said hollow member.
11. The flow control device of claim 10 wherein said seal element seals against an outer surface of said flow element.
12. The flow control device of claim 11 wherein a flow path between said first portion and said second portion comprises a flow portion through said at least one opening and said hollow member.
13. The flow control device of claim 1 wherein said at least one flow opening comprises a pore structure in a porous member.
14. The flow control device of claim 1 comprising an actuator that is operable to translate said flow element between said first position and said second position and a third position, wherein between said first position and said second position said at least one flow opening presents a first average rate of change of said flow area, and between said second position and said third position said at least one flow opening provides a second average rate of change of said flow area that is different from said first average rate of change.
15. A flow element for a flow control device, comprising:
- a hollow body comprising at least one flow opening in a wall of said hollow body, said at least one flow opening having a first flow area at a first position relative to a reference axis and a second flow area at a second position on said reference axis.
16. Flow control device, comprising:
- a body comprising a flow path having a first portion and a second portion,
- a flow element comprising an orifice having a variant flow area,
- a seal element disposed between said first portion and said second portion, said flow element being operable with said seal element to control flow between said first portion and said second portion,
- said orifice presenting a first flow area when said flow element is in a first position, and said orifice presenting a second flow area when said flow element is in a second position.
17. The flow control device of claim 16 wherein said first position and said second position of said flow element are relative to a reference axis.
18. The flow control device of claim 16 wherein said orifice comprises a pore structure in a porous member.
19. Metering valve, comprising:
- a body comprising a flow path having a first portion and a second portion,
- a flow element comprising a hollow tube and an orifice in said hollow tube, said orifice comprising a variant flow area,
- a seal element disposed between said first portion and said second portion, said flow element being operable with said seal element to control flow between said first portion and said second portion,
- said orifice presenting a first flow area when said flow element is in a first position, and said orifice presenting a second flow area when said flow element is in a second position.
20. The flow control device of claim 19 wherein said first position and said second position of said flow element are relative to a reference axis.
21. The flow control device of claim 19 wherein said orifice comprises a pore structure in a porous member.
22. The flow control device of claim 1 in combination with an actuator that is operable to move said flow element between said first position and said second position.
23. The flow control device of claim 16 in combination with an actuator that is operable to move said flow element between said first position and said second position.
24. The metering valve of claim 19 in combination with an actuator that is operable to move said flow element between said first position and said second position.
25. Flow control device, comprising:
- a body comprising a flow path having a flow path first portion and a flow path second portion,
- a flow element comprising at least one flow opening,
- a seal element disposed between said flow path first portion and said flow path second portion, said flow element being operable with said seal element to control flow between said flow path first portion and said flow path second portion,
- said seal element comprising a seal element first portion that is press-fit into a bore of said body, and a seal element second portion that admits said flow element and seals against an outer surface of said flow element, and a transition portion that joins said seal element first portion and said seal element second portion,
- said seal element first portion having an outside diameter, said seal element second portion having an outside diameter, wherein said seal element first portion outside diameter is greater than said seal element second portion outside diameter.
26. A seal element for a flow control device, comprising:
- a one-piece body comprising a first portion, a second portion, and a transition portion that joins said first portion and said second portion so that said first portion, said second portion and said transition portion align along a reference axis,
- said first portion having an outside diameter, said second portion having an outside diameter, wherein said first portion outside diameter is greater than said second portion outside diameter.
Type: Application
Filed: Mar 3, 2015
Publication Date: Sep 10, 2015
Inventor: William H. Glime, III (Chagrin Falls, OH)
Application Number: 14/636,410