TRANSPORT DEVICE

Abstract

A transport device moves a sheet member supported by adsorption portions to a space above a second table being a transport destination, and moves the adsorption portions in a direction of approaching the second table by reducing a speed gradually or stepwisely so as to bring the sheet member into contact with the second table. With this, a transport speed of the sheet member is improved, and air is prevented from entering a space between the sheet member and the table being a transport destination.

Description

TECHNICAL FIELD

The disclosure relates to a transport device configured to transport a sheet member and a transport method.

BACKGROUND ART

In PTL 1, a fine pattern is formed on a metal mask being a sheet having a thickness of approximately from 30 μm to 100 μm. Further, the metal mask is mounted to a frame body, which has a form formed of a sufficiently solid material as compared to that of the metal mask, so as to be transported.

CITATION LIST

Patent Literature

PTL 1: JP 2009-129728 A

SUMMARY

Technical Problem

Before the metal mask is mounted to the frame body, the fine pattern formed on the metal mask is subjected to inspection in some cases. In this case, the metal mask is transported to an inspection device in a sheet shape, and is placed on a table of the inspection device. However, as the metal mask is small in thickness, distortion of the metal mask is liable to be caused by wind pressure along with movement during transport. Further, when the metal mask is placed on the table of the inspection device in a distorted state, inspection results at a desired accuracy cannot be obtained with the inspection device in some cases.

When a sheet-shaped member other than a metal mask is transported, distortion is liable to be caused by receiving a wind pressure along with movement. Further, the sheet-shaped member is placed on a table of a device being a transport destination in a distorted state. When the device being a transport destination subjects processing to the sheet-shaped member placed on the table, a desired effect of the processing cannot be obtained in some cases.

Further, when a transport speed is reduced in order to suppress the wind pressure received during transport, a time period required for the transport is increased. As a result, a tact time of a product is increased, which leads to increase of manufacturing cost.

The disclosure has been made in view of the above-mentioned problems in the related art, and has an object to reduce a time required for transport of a sheet member and to prevent air from entering a space between the sheet member and a table of a device being a transport destination.

Solution to Problem

In order to solve the above-mentioned problems, a transport device according to one aspect of the disclosure is a transport device configured to transport a sheet member from a first table to a second table. The transport device includes supporting ends of the sheet member placed on the first table with a plurality of adsorption portions, moving the adsorption portions to a space above the second table, and bringing the sheet member into contact with the second table by moving the adsorption portions in a direction of approaching the second table at a speed reduced gradually or stepwisely.

In order to solve the above-mentioned problems, a transport device according to one aspect of the disclosure is a transport device configured to transport the sheet member from a first table to a second table, and includes supporting ends of the sheet member placed on the first table with a plurality of adsorption portions including a first adsorption portion and a second adsorption portion, moving the plurality of adsorption portions to a space above the second table, bringing a region of the sheet member, which is supported by the first adsorption portion, into contact with the second table by moving the first adsorption portion in a direction of approaching the second table, and bringing a region of the sheet member, which is supported by the second adsorption portion, into contact with the second table by moving the second adsorption portion in a direction of approaching the second table after the region being supported by the first adsorption portion is brought into contact with the second table.

In order to solve the above-mentioned problems, a transport method according to one aspect of the disclosure is a transport method of the transport device configured to transport the sheet member from the first table to the second table. The transport method includes supporting the ends of the sheet member placed on the first table with one of or the plurality of adsorption portions, moving the adsorption portions to the space above the second table, and bringing the sheet member into contact with the second table by moving the adsorption portions in the direction of approaching the second table at a speed reduced gradually or stepwisely.

In order to solve the above-mentioned problems, a transport method according to one aspect of the disclosure is a transport method of the transport device configured to transport the sheet member from a first table to a second table, and includes supporting ends of the sheet member placed on the first table with a plurality of adsorption portions including a first adsorption portion and a second adsorption portion, moving the plurality of adsorption portions to a space above the second table, bringing a region of the sheet member, which is supported by the first adsorption portion, into contact with the second table by moving the first adsorption portion in a direction of approaching the second table, and bringing a region of the sheet member, which is supported by the second adsorption portion, into contact with the second table by moving the second adsorption portion in a direction of approaching the second table.

Advantageous Effects of Disclosure

According to an embodiment of the disclosure, there can be exerted an effect of reducing a time required for transport of the sheet member and preventing air from entering the space between the sheet member and the table of the device being a transport destination.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view for illustrating a configuration of a transport device according to a first embodiment of the disclosure.

FIG. 2 is a plan view for illustrating a pad arranged on a distal end of an adsorption cylinder of the transport device according to the first embodiment.

FIG. 3A is a plan view of a vapor deposition mask including a mask sheet, and FIG. 3B is a cross-sectional view taken along the line A-A of FIG. 3A.

FIG. 4 is a flowchart for illustrating steps of manufacturing the above-mentioned vapor deposition mask.

FIG. 5A is a cross-sectional view for illustrating a configuration of an organic EL display panel in the first embodiment, and FIG. 5B is a flowchart for illustrating an outline of a manufacturing method of the organic EL display panel in the first embodiment.

FIG. 6 is a schematic view for illustrating a state in a vapor deposition step when a light-emitting layer of the organic EL display device in the first embodiment is formed.

FIG. 7 is a flowchart for illustrating a transport method of the transport device according to the first embodiment.

Each of FIGS. 8A to 8E is a view for illustrating a state in which the transport device according to the first embodiment transports a sheet member. FIG. 8A is a view for illustrating a state of adsorption. FIG. 8B is a view for illustrating a state in which the sheet member is raised. FIG. 8C is a view for illustrating a state in which the sheet member approaches a second table at a first speed. FIG. 8D is a view for illustrating a state in which the sheet member approaches the second table at a second speed. FIG. 8E is a view for illustrating a state in which transport of the sheet member to the second table is completed.

FIG. 9 is a flowchart for illustrating a transport method of a transport device according to a second embodiment of the disclosure.

Each of FIGS. 10A to 10C is a view for illustrating a state in which the transport device according to the second embodiment transports the sheet member. FIG. 10A is a view for illustrating a state in which an end of the sheet member on one adsorption cylinder side approaches the second table. FIG. 10B is a view for illustrating a state in which an end of the sheet member on another adsorption cylinder side approaches the second table. FIG. 10C is a view for illustrating a state in which transport of the sheet member to the second table is completed.

FIG. 11 is a flowchart for illustrating a transport method of the transport device according to a third embodiment of the disclosure.

Each of FIGS. 12A and 12B is a view for illustrating a state in which the transport device according to the third embodiment transports the sheet member. FIG. 12A is a view for illustrating a state in which the adsorption cylinders are rotated to distort the sheet member. FIG. 12B is a view for illustrating a state in which the adsorption cylinders are returned to eliminate distortion of the sheet member.

FIG. 13 is a perspective view for illustrating a configuration of a transport device according to a fourth embodiment of the disclosure.

FIG. 14 is a flowchart for illustrating a transport method of the transport device according to the fourth embodiment.

Each of FIGS. 15A to 15C is a view for illustrating a state in which the transport device according to the fourth embodiment transports the sheet member. FIG. 15A is a view for illustrating a state in which slide movement of the sheet member in an X-axis direction is completed. FIG. 15B is a view for illustrating a state in which air is sent to the sheet member. FIG. 15C is a view for illustrating a state in which transport of the sheet member to the second table is completed.

FIG. 16 is a perspective view for illustrating a configuration of a transport device according to a fifth embodiment of the disclosure.

FIG. 17 is a perspective view for illustrating a configuration of a transport device according to a sixth embodiment of the disclosure.

FIG. 18 is a plan view for illustrating a pad arranged on a distal end of an adsorption cylinder of the transport device according to the sixth embodiment.

DESCRIPTION OF EMBODIMENTS

First Embodiment

Now, an embodiment of the disclosure is described.

Schematic Configuration of Transport Device 1

FIG. 1 is a perspective view for illustrating a configuration of a transport device 1 according to a first embodiment of the disclosure. FIG. 2 is a plan view for illustrating a pad 25a or 26a arranged on a distal end of an adsorption cylinder 25 or 26 of the transport device 1 according to the first embodiment.

The transport device 1 includes a guide rail 20, a guide rail 21, an adsorption cylinder drive unit 23, an adsorption cylinder drive unit 24, an adsorption cylinder (adsorption portion, first adsorption portion) 25, an adsorption cylinder (adsorption portion, second adsorption portion) 26, and a controller 30. The transport device 1 transports a sheet member 29 from a first table 61 of a device performing previous processing before transport to a second table 62 of a device being a transport destination performing next processing.

A normal direction with respect to a surface of the first table 61 or the second table 62 is a Z-axis direction. A direction orthogonal to the Z axis, in which the first table 61 and the second table 62 are aligned, is an X-axis direction. A direction orthogonal to the Z axis and the X axis is a Y-axis direction.

The guide rails 20 and 21 are parallel to each other. The guide rails 20 and 21 are arranged so as to be above and cross over the first table 61 and the second table 62.

The adsorption cylinder drive unit 23 is mounted to the guide rail 20 so as to be slidable, and the adsorption cylinder drive unit 24 is mounted to the guide rail 21 so as to be slidable. It is preferred that the guide rails 20 and 21 have, for example, glass scales or the like so as to measure move distances of the adsorption cylinder drive units 23 and 24.

The adsorption cylinder 25 is mounted to the adsorption cylinder drive unit 23 so as to be slidable in the Z-axis direction, and the adsorption cylinder 26 is mounted to the adsorption cylinder drive unit 24 so as to be slidable in the Z-axis direction. The adsorption cylinder drive unit 23 may further be capable of rotating the adsorption cylinder 25 about a center axis of the adsorption cylinder 25 (a rotation direction is a θ direction), and may further be capable of sliding the adsorption cylinder 25 in the Y-axis direction. The adsorption cylinder drive unit 24 may further be capable of rotating the adsorption cylinder 26 about a center axis of the adsorption cylinder 26 (a rotation direction is the θ direction), and may further be capable of sliding the adsorption cylinder 26 in the Y-axis direction.

Each of the adsorption cylinders 25 and 26 has a tubular shape such as a cylinder. The adsorption cylinder 25 has a base connected to the adsorption cylinder drive unit 23 so as to be slidable, and can support the sheet member 29 with a distal end. The adsorption cylinder 26 has a base connected to the adsorption cylinder drive unit 24 so as to be slidable, and can support the sheet member 29 with a distal end.

Note that, the shape of each of the adsorption cylinders 25 and 26 is not limited to a cylindrical shape, and may be a columnar shape other than a cylindrical shape. Further, the shape is not limited to the tubular shape, and may be any shape as long as the sheet member 29 can be supported with the distal end.

For example, the adsorption cylinders 25 and 26 cause the distal ends thereof to adsorb both ends of the sheet member 29 through adsorption so as to support the sheet member 29. For example, the adsorption cylinders 25 and 26 are formed of a hollow metallic material. The adsorption cylinder 25 has the pad (elastic member) 25a on the distal end, and the adsorption cylinder 26 has the pad (elastic member) 26a on the distal end. For example, the pads 25a and 26a are formed of an elastic material such as rubber, resin, and the like. As described above, surfaces of the adsorption cylinders 25 and 26, which are held in contact with the sheet member 29, are elastic. Thus, the adsorption cylinders 25 and 26 are brought into contact with the sheet member 29 so that the sheet member 29 can be prevented from being damaged.

As illustrated in FIG. 2, a number of suction ports 25b being openings are formed in the surface of the pad 25a (the surface held in contact with the sheet member 29), and a number of suction ports 26b being openings are formed in the surface of the pad 26a. A number of suction ports 25b and 26b are formed. Thus, the adsorption cylinders 25 and 26 can disperse a pressure to be applied on the surface of the sheet member 29 when the sheet member 29 is sucked and supported.

Various patterns are formed in a center between both ends of the sheet member 29 illustrated in FIG. 1. Thus, the adsorption cylinders 25 and 26 cannot support the center of the sheet member 29, and transport the sheet member 29 from the first table 61 to the second table 62 by supporting both the ends of the sheet member 29.

The controller 30 controls the entire transport device 1. The controller 30 includes an adsorption cylinder drive control unit 31. The adsorption cylinder drive control unit 31 controls drive of the adsorption cylinder drive units 23 and 24. Based on an instruction from the adsorption cylinder drive control unit 31, the adsorption cylinder drive unit 23 moves along the guide rail 20 in the X-axis direction together with the adsorption cylinder 25, moves the adsorption cylinder 25, rotates the adsorption cylinder 25, or causes the adsorption cylinder 25 to perform adsorption. Based on an instruction from the adsorption cylinder drive control unit 31, the adsorption cylinder drive unit 24 moves along the guide rail 21 in the X-axis direction together with the adsorption cylinder 26, moves the adsorption cylinder 26, rotates the adsorption cylinder 26, or causes the adsorption cylinder 26 to perform adsorption.

As described above, in order to support and transport the sheet member 29, the transport device 1 includes two transport units, which are a transport unit including the guide rail 20, the adsorption cylinder drive unit 23, and the adsorption cylinder 25, and a transport unit including the guide rail 21, the adsorption cylinder drive unit 24, and the adsorption cylinder 26. Note that, the number of transport units included in the transport device 1 is not limited to two, but may be one or three or more.

Further, the above-mentioned configuration is an example, and the transport device 1 is not limited to the above-mentioned configuration. In this embodiment, the transport device 1 is only required to have the adsorption cylinders 25 and 26, which are slidable in the X-axis direction and the Z-axis direction and can support the sheet member 29 with the distal ends.

As an example of the sheet member 29 transported by the transport device 1, a mask sheet forming a vapor deposition mask can be exemplified. The vapor deposition mask is used at the time of vapor deposition, and is a mask for forming a vapor deposition layer on a substrate in a pattern. As an example of the vapor deposition layer formed on the substrate in a pattern, a light-emitting layer arranged to a pixel of an organic electro luminescence (EL) display device can be exemplified.

Further, as an example of the sheet member 29, a flexible display device such as an organic EL display device can be exemplified.

Vapor Deposition Mask

First, with reference to FIGS. 3A and 3B and FIG. 4, description is made of a vapor deposition mask. FIG. 3A is a plan view of a vapor deposition mask including a mask sheet, and FIG. 3B is a cross-sectional view taken along the line A-A of FIG. 3A. FIG. 4 is a flowchart for illustrating steps (Step S110) of manufacturing the above-mentioned vapor deposition mask.

As illustrated in FIG. 3A and FIG. 4, a plurality of support sheets 13 are stretched over a frame-shaped frame 12, and ends of the support sheets 13 are engaged and welded in recessed portions of the frame 12 (Step Sa). With this, the support sheets 13 are mounted to the frame 12 so as to extend parallel to a sheet vertical direction (a longitudinal direction of the frame 12).

Sequentially, a plurality of cover sheets 14 are stretched over the frame 12, and ends of the cover sheets 14 are engaged and welded in recessed portions of the frame 12 (Step Sb). With this, the cover sheets 14 are mounted to the frame 12 so as to extend parallel to a sheet horizontal direction (a transverse direction orthogonal to the longitudinal direction of the frame 12). As described above, the support sheets 13 and the cover sheets 14 are mounted to the frame 12 in a lattice pattern.

Next, both ends 11b of a strip-shaped mask sheet 11 manufactured in advance are set to grippers (not illustrated), and the mask sheet 11 is arranged on the frame 12 so as to overlap with the cover sheets 14 (Step Sc). Valid portions 11a are formed to be arrayed between both the ends 11b of the mask sheet 11. In each of the valid portions 11a, vapor deposition holes being through holes are formed in a pattern corresponding to a pixel area of a substrate subjected to vapor deposition. Each of the ends 11b of the mask sheet 11 has a shape having a center cut away therefrom, and portions positioned on both sides of the cutaways of both the ends 11b are nipped with the grippers.

Then, a tension is applied to the mask sheet 11 by the grippers. Each of the grippers is independently adjusted so as to position the mask sheet 11 with respect to the frame 12 (Step Sd). At this time, the positioning is performed so that the positions of the vapor deposition holes in the valid portions 11a of the mask sheet 11 match with the pixel area of the substrate subjected to vapor deposition.

As illustrated in FIG. 3A, FIG. 3B, and FIG. 4, when the positioning is completed, welding portions 15 of the mask sheet 11 are welded to the frame 12 through use of a laser (Step Se). Specifically, spot welding is performed at a plurality of positions. With this, the mask sheet 11 and the frame 12 are fused so that a plurality of welded spots are formed. When the welding is completed, the grippers holding both the ends 11b are released (Step Sf), and all the mask sheets 11 are welded to the frame 12. After that, outer portions (unnecessary portions) of the welding portions 15 in the mask sheet 11 are cut (Step Sg).

Steps Sc to Sg are repeated, and a predetermined number of mask sheets 11 are mounted to the frame 12. In this manner, a vapor deposition mask 10 is obtained.

As a base material of the frame 12, the support sheets 13, the cover sheets 14, and the mask sheet 11, a metallic material such as an invar material and SUS is used, for example.

The mask sheet 11 is small in thickness, which is, for example, from approximately from 10 μm to 50 μm, and hence is liable to be distorted by receiving a wind pressure along with the movement. The mask sheet 11 can be regarded as the sheet member 29 illustrated in FIG. 1. Before the mask sheet 11 is mounted to the frame 12, the vapor deposition holes are formed in a pattern, and the positions and a size of the vapor deposition holes are inspected.

As illustrated in FIG. 3A and FIG. 4, the plurality of valid portions 11a are formed on inner sides of the positions of the welding portions 15 between both the ends by forming the vapor deposition holes in a pattern on a stripe-shaped metallic member such as an invar material through etching or the like (Step S51). Further, when the valid portions 11a are formed, the cutaways of both the ends 11b are also formed. In this manner, the mask sheet 11 is obtained. The mask sheet 11 in which the valid portions 11a are formed is placed on the first table 61 illustrated in FIG. 1 before inspection.

Next, in order to perform an inspection step being a subsequent step to which the mask sheet 11 having the valid portions 11a formed therein is subjected, the transport device 1 illustrated in FIG. 1 transports the mask sheet 11 on the first table 61 to the inspection device (Step S52), and places the mask sheet 11 on the second table 62. Note that, a specific transport method through use of the transport device 1 is described later with reference to FIG. 7 and FIGS. 8A to 8E.

Further, the inspection device performs inspection by selecting a plurality of representative vapor deposition holes in the valid portions 11a of the mask sheet 11 and determining whether an error of the positions and the size is within a predetermined range (Step S53).

Subsequently, the mask sheet 11 being a conforming article is used in above-mentioned Step Sc, and the mask sheet 11 being a non-conforming article is not used in Step Sc and is eliminated from the steps of manufacturing the vapor deposition mask.

Display Panel

Next, with reference to FIGS. 5A and 5B and FIG. 6, description is made of a flexible organic EL display panel (display panel) 41 as an example of the sheet member 29 illustrated in FIG. 1. Here, as a display panel, the organic EL display panel 41 is exemplified. However, in place of the organic EL display panel, various sheet-shaped display panels such as an inorganic EL display panel and a liquid crystal display panel may be used.

FIG. 5A is a cross-sectional view for illustrating a configuration of the organic EL display panel, and FIG. 5B is a flowchart for illustrating an outline of a manufacturing method of the organic EL display panel.

First, a TFT substrate is prepared in TFT array layer formation (Step S101). The TFT substrate is prepared by forming a TFT array layer 43 on a substrate 42 being a mother glass. A TFT (transistor, drive element) included in a pixel circuit arranged for each pixel, a gate wiring line, a source wiring line, other various wiring lines, a passivation film (protection film), an interlayer insulating film (flattering film), and further the TFT array layer 43 are formed on the substrate 42 by a publicly known method. In the TFT array layer 43, a reflective electrode layer contact with an anode, an ITO layer, and a pixel bank layer for defining a light emitting region are formed.

The passivation film prevents peeling of the metallic film in the TFT so as to protect the TFT. The passivation film is formed on the mother glass or another layer on the mother glass so as to cover the TFT. The passivation film is an inorganic insulating film formed of, for example, silicon nitride, silicon oxide, and the like.

The interlayer insulating film provides a leveled surface over irregularities on the passivation film. The interlayer insulating film is formed on the passivation film. The interlayer insulating film is an organic insulating film formed of a photosensitive resin such as an acrylic or a polyimide.

Next, in an organic EL element layer formation step (Step S102), an organic EL layer is formed for each pixel area of the TFT substrate. The organic EL layer includes, for example, an electric function layer, a light-emitting layer, and a cathode electrode. The light-emitting layer emits light of different colors for each pixel, for example, red, green, and blue. In the vapor deposition step, the light-emitting layer is formed at a predetermined position in each pixel area in vacuum by vapor deposition through use of the vapor deposition mask 10 (see FIGS. 3A and 3B). The vapor deposition mask used in the vapor deposition step is prepared in advance in the above-mentioned vapor deposition mask preparation step (Step S110) before the vapor deposition step.

Further, a transparent electrode facing the reflective electrode through intermediation of the organic EL layer is formed so as to cover the organic EL layer. With this, the organic EL element layer is formed in the pixel area.

Further, subsequently, in a sealing step (Step S103), a sealing layer is formed. As one example, the sealing layer may have a three layer structure, in which an inorganic layer, an organic layer, and an inorganic layer are laminated in this order.

Then, in a flexible step (Step S104), the substrate 42 being glass is peeled off from the TFT substrate, and a film being a support body is attached. With this, the sheet-shaped organic EL display panel 41 in which a panel area is formed in the center is obtained.

The sheet member 29 illustrated in FIG. 1 may be the sheet-shaped organic EL display panel 41.

Subsequently, the sheet-shaped organic EL display panel 41 is placed on the first table 61 illustrated in FIG. 1 before being partitioned into pieces. Then, in a transport step (Step S105), the sheet member 29 (the sheet-shaped organic EL display panel 41) placed on the first table 61 by the transport device 1 is transported and placed on the second table 62 of a partition device being a device in the next step.

Next, in a partition step (Step S106), the sheet member 29 (the sheet-shaped organic EL display panel 41) placed on the second table 62 is cut out to be partitioned into pieces.

Subsequently, in a module step (Step S107), a module such as a driver is mounted to the sheet member 29 partitioned into pieces (the sheet-shaped organic EL display panel 41 partitioned into pieces), and a casing or the like are also mounted. In this manner, the organic EL display device is obtained.

FIG. 6 is a schematic view for illustrating a state in a vapor deposition step when a light-emitting layer of the organic EL display panel in the first embodiment is formed.

In the vapor deposition step in which the light-emitting layer is vapor-deposited, the vapor deposition mask provided with the mask sheet 11 having the plurality of through holes is held in close contact with the TFT array layer 43. Then, in vacuum, vapor deposition particles 50 (for example, an organic light-emitting material) vaporized or sublimated with a vapor deposition source 40 are vapor-deposited to the substrate 42 having the TFT array layer 43 through intermediation of the mask sheet 11. With this, a vapor deposition pattern corresponding to the through holes of the mask sheet 11 is formed on the substrate 42 having the TFT array layer 43.

Transport Method by Transport Device 1

Next, with reference to FIG. 7 and FIGS. 8A to 8E, description is made of a transport method of the transport device 1 illustrated in FIG. 1. FIG. 7 is a flowchart for illustrating a transport method (transport steps) of the transport device 1 according to the first embodiment. Each of FIGS. 8A to 8E is a view for illustrating a state in which the transport device 1 according to the first embodiment transports the sheet member 29. The transport steps illustrated in FIG. 7 are steps in Step S52 illustrated in FIG. 4 or Step S105 illustrated in FIG. 5B.

Note that, as described above, based on an instruction from the adsorption cylinder drive control unit 31 illustrated in FIG. 1, the adsorption cylinder drive unit 23 operates the adsorption cylinder 25, and the adsorption cylinder drive unit 24 operates the adsorption cylinder 26.

Further, in this embodiment, the adsorption cylinders 25 and 26 are only required to move at least in the X-axis direction and the Z-axis direction, and are not necessarily required to move in the Y-axis direction or to be rotated in the θ-axis direction.

Further, the adsorption cylinders 25 and 26 may be capable of being driven independently. However, in this embodiment, the adsorption cylinders 25 and 26 are operated at the same timing. Thus, the adsorption cylinders 25 and 26 may be driven in a synchronized manner.

The adsorption cylinders 25 and 26 move from original positions (start positions) to a space above the sheet member 29 placed on the first table 61. Then, the adsorption cylinders 25 and 26 move in the Z-axis direction so as to approach the first table 61, and the pad 25a on the distal end of the adsorption cylinder 25 and the pad 26a on the distal end of the adsorption cylinder 26 are brought into contact with both the ends of the sheet member 29 placed on the first table 61.

As illustrated in FIG. 7 and FIG. 8A, through suction as indicated with the arrow P1, the adsorption cylinders 25 and 26 cause the pads 25a and 26a to adsorb both the ends of the sheet member 29. With this, the adsorption cylinders 25 and 26 support both the ends of the sheet member 29 (Step S1).

Next, as illustrated in FIG. 7 and FIG. 8B, the adsorption cylinders 25 and 26 move in the Z-axis direction and a direction away from the first table 61 as indicated with the arrow T1. With this, the adsorption cylinders 25 and 26 raise the sheet member 29 (Step S2).

Further, as illustrated in FIG. 7, FIG. 8B, and FIG. 8C, the adsorption cylinders 25 and 26 move in the X-axis direction and a direction of moving from the space above the first table 61 to a space above the second table 62 as indicated with the arrow T2. With this, the adsorption cylinders 25 and 26 slide the sheet member 29 in a parallel direction (Step S3).

Next, as illustrated in FIG. 7 and FIG. 8C, the adsorption cylinders 25 and 26 move to the space above the second table 62 and to a predetermined XY coordinate position, and movement in the X-axis and Y-axis directions is stopped. In this manner, slide movement in the X-axis and Y-axis direction is completed (Step S4).

Subsequently, as illustrated in FIG. 7 and FIG. 8C, the adsorption cylinders 25 and 26 lower (move) in the Z-axis direction and a direction of approaching the second table 62 as indicated with the arrow T3. At this time, the adsorption cylinders 25 and 26 lower at a first speed while approaching a predetermined distance H1 from the second table 62 (Step SS). The first speed is relatively higher among the speed for moving in the Z-axis direction.

Further, as illustrated in FIG. 7 and FIG. 8D, when the adsorption cylinders 25 and 26 travel for the predetermined distance H1 from the second table 62, the adsorption cylinders 25 and 26 subsequently lower (move) in the Z-axis direction at a second speed relatively lower among the speed of moving in the Z-axis direction (Step S6). That is, the second speed is lower than the first speed.

Then, when a back surface of the sheet member 29 (a surface opposite to the surface contact with the adsorption cylinders 25 and 26) is brought into contact with the second table 62, the adsorption cylinders 25 and 26 stop moving in the Z-axis direction and release the adsorption. With this, the adsorption cylinders 25 and 26 release the support of the sheet member 29, and the transport of the sheet member 29 from the first table 61 to the second table 62 is completed (Step S7). Then, the adsorption cylinders 25 and 26 return to the original positions.

As described above, when moving in the direction of approaching the second table 62 being a transport destination, the adsorption cylinders 25 and 26 first lower the supported sheet member 29 at the relatively high first speed. As a result, the transport speed of the sheet member 29 can be improved.

Further, when the sheet member 29 approaches the second table 62 at the increasing speed, the back surface receives a larger wind pressure. Accordingly, distortion and waviness are liable to be caused to the sheet member 29.

Further, when the sheet member 29 is brought into contact with the second table 62 at a high speed, air is liable to enter the space between the back surface of the center between both the ends supported by the adsorption cylinders 25 and 26 and the second table 62.

When the air enters the space between the sheet member 29 and the second table 62 as described above, trouble is liable to be caused in the later steps in the process performed by the device including the second table 62.

For example, in the case where the sheet member 29 is the mask sheet 11, the mask sheet 11 is small in thickness, which is approximately from 10 μm to 50 μm. Thus, when the mask sheet 11 is brought into contact with the second table 62 at a high speed, distortion and waviness are liable to be caused due to a wind pressure along with movement, and the air is liable to enter the space between the center and the second table 62. When the air enters as described above, in the case where the device including the second table 62 is the inspection device, the positions and the size of the vapor deposition holes of the sheet member 29 placed on the second table 62 cannot be inspected accurately in some cases.

Further, the mask sheet 11 has the vapor deposition holes formed in a pattern in the center between both the ends. Thus, the center of the mask sheet 11 cannot be supported by the adsorption cylinders. Further, even when the sheet member 29 is a flexible display panel, the pixel pattern is formed in the center. Accordingly, the center cannot be supported. As described above, only both the ends of the sheet member 29 can be supported. This point also causes the air to enter the space between the center and the second table 62 when the sheet member 29 is brought into contact with the second table 62 at a high speed.

In view of this, in the transport device 1, the adsorption cylinders 25 and 26 cause the sheet member 29 to travel from the second table 62 for the predetermined distance H1, and subsequently to approach and be brought into contact with the second table 62 at the second speed lower than the first speed. In this manner, the sheet member 29 is placed on the second table 62. With this, distortion and waviness are prevented from being caused to the sheet member 29, and the air is prevented from entering the space between the center of the sheet member 29 and the second table 62.

With this, even in the case where the positions and the size of the vapor deposition holes in the sheet member 29 placed on the second table 62 are inspected, inspection can be performed accurately.

As described above, when the adsorption cylinders 25 and 26 move the sheet member 29 in the direction of approaching the second table 62, a time period required for the sheet member 29 to be brought into contact with the second table 62 can be reduced by moving at the first high speed in a case where the sheet member 29 is far away from the second table 62.

Further, when the sheet member 29 becomes close to the second table 62, the speed for moving the sheet member 29 is changed to the second speed lower than the first speed. Accordingly, a wind pressure that the sheet member 29 receives along with the movement can be suppressed, and distortion in the center of the sheet member 29 can be suppressed. Therefore, the air can be prevented from entering the space between the sheet member 29 and the second table 62.

As described above, with the transport device 1, a time period required for transporting the sheet member 29 can be reduced, and the air can be prevented from entering the space between the sheet member 29 and the second table 62.

Further, as the case of the sheet member 29, the pattern is formed in the center. Thus, the center cannot be supported, and both the ends are supported. Even in such case, the air can be prevented from entering the space between the sheet member 29 and the second table 62.

Note that, when the adsorption cylinders 25 and 26 cause the sheet member 29 to approach the second table 62, the speed is reduced in two stages including the first speed and the second speed. However, the speed may be reduced in three or more stages.

Further, instead of reducing the speed stepwisely, the adsorption cylinders 25 and 26 may gradually reduce the movement speed of the sheet member 29 from the time when the movement toward the second table 62 is started to the time when the sheet member 29 is brought into contact with the second table 62. With this, the similar effects can be obtained.

Further, for example, when the adsorption cylinders 25 and 26 adsorb the sheet member 29 on the first table 61, wrinkles are formed or distortion is caused to the sheet member 29 due to some cause in some cases. In this case, at least one of the adsorption cylinders 25 and 26 can be rotated in the θ-axis direction, and wrinkles or distortion that is caused can be eliminated through rotation in the θ-axis direction. Further, at least one of the adsorption cylinders 25 and 26 can be moved in the Y-axis direction, and wrinkles or distortion that is caused to the sheet member 29 due to some cause may be eliminated by changing the distance between the adsorption cylinders 25 and 26.

Further, as described above, the guide rails 20 and 21 illustrated in FIG. 1 may have components such as a glass scale capable of measuring a move distance.

For example, before the sheet member 29 is moved in the X-axis direction, the device including the first table 61 causes a camera to capture an image of the sheet member 29 placed on the first table 61. Further, from the captured image, the controller 30 acquires the XY coordinate position of the sheet member 29, that is, the coordinate of the sheet member 29 at the time of starting the movement. With this, based on an instruction from the controller 30, the adsorption cylinders 25 and 26 can arrange the sheet member 29 at a desired position (coordinate position) on the second table 62.

Thus, for example, even when the sheet member 29 is the mask sheet 11 (see FIGS. 3A and 3B) and the device including the second table 62 is the inspection device, the inspection device can promptly perform inspection on the positions and the size of the vapor deposition holes at the predetermined positions in the mask sheet 11.

Note that, in addition to the X-axis direction and the Z-axis direction, the adsorption cylinders 25 and 26 can move also in the Y-axis direction, and further can be rotated in the θ-axis direction. In such case, placement can be performed more accurately at the desired positions on the second table 62.

Second Embodiment

With reference to FIG. 9 and FIGS. 10A to 10C mainly, description is made of a second embodiment of the disclosure as following. Note that, members having the same function as the members stated in the embodiment above are appended with the same reference signs for the sake of description, and the description thereof is omitted.

FIG. 9 is a flowchart for illustrating a transport method of a transport device according to the second embodiment. Each of FIGS. 10A to 10C is a view for illustrating a state in which the transport device according to the second embodiment transports the sheet member.

As illustrated in FIG. 9 and FIGS. 10A to 10C, the transport device 1 illustrated in FIG. 1 may transport the sheet member 29 from the first table 61 to the second table 62. Steps S1 to S4 are the same as those in the transport method described with reference to FIG. 7 and FIGS. 8A to 8E.

As illustrated in FIG. 9 and FIG. 10A, the adsorption cylinders 25 and 26 support the sheet member 29 placed on the first table 61, and move the sheet member 29 to the predetermined XY coordinate position in the space above the second table 62. In this manner, the slide movement on the XY plane is completed (Step S4). Subsequently, as indicated with the arrow T11, first, the adsorption cylinder 25, that is, one of the adsorption cylinders 25 and 26, lowers (moves) in the Z-axis direction and the direction of approaching the second table 62 (Step S15).

Then, as illustrated in FIG. 9 and FIG. 10B, when the back surface of the sheet member on the end of the adsorption cylinder 25 side is brought into contact with the second table 62, the adsorption cylinder 25 stops the movement in the Z-axis direction. As indicated with the arrow T12, the adsorption cylinder 26, that is, the other one of the adsorption cylinders 25 and 26 lowers (moves) in the Z-axis direction and the direction of approaching the second table 62 (Step S16).

While the adsorption cylinder 26 is lowering, the end of the sheet member 29 on the adsorption cylinder 25 side is held in contact with the second table. Accordingly, the back surface of the sheet member 29 is inclined. Thus, as the adsorption cylinder 26 lowers, the air between the back surface of the sheet member 29 and the second table 62 flows to the outside from the space between the sheet member 29 and the second table 62 as indicated with the arrow P2.

Further, when the back surface of the sheet member 29 on the end of the adsorption cylinder 26 side is brought into contact with the second table 62, the adsorption cylinder 26 stops the movement in the Z-axis direction.

With this, the transport of the sheet member 29 from the first table 32 to the second table is completed (Step S7).

Here, when both the ends of the sheet member are supported, the center of the sheet member is distorted so as to be slightly convex downward. Thus, when both the ends of the sheet member approach the second table, the distorted center of the sheet member is brought into contact with the second table in the first place. After that, both the ends of the sheet member are brought into contact with the second table. Alternatively, when the sheet member is thin, the center of the sheet member is distorted so as to be convex upward due to a wind pressure at the time of lowering to the second table, and both the ends are brought into contact with the second table in the first place. After that, the center of the sheet member is brought into contact with the second table.

As described above, when both the ends of the sheet member are simultaneously brought into contact with the second table, the timing when both the ends are brought into contact with the second table and the timing when the center is brought into contact with the second table are slightly different from each other in some cases. As a result, there is a risk in that slight air may enter the space between the center of the sheet and the second table.

In view of this, in the transport device 1 according to this embodiment, the adsorption cylinder 25, that is, one of the adsorption cylinders 25 and 26 supporting both the ends of the sheet member 29 approaches the second table 62 in the first place, and the end of both the ends of the sheet member 29, which is supported by the adsorption cylinder 25, is brought into contact with the second table 62 in the first place.

Sequentially, the other adsorption cylinder 26 approaches the second table 62. Then, as the adsorption cylinder 26 lowers, the air flows to the outside from the space between the sheet member 29 and the second table 62. Further, the end of the both ends of the sheet member 29, which is supported by the adsorption cylinder 26, is brought into contact with the second table 62. With this, the air can be prevented from entering the space between the sheet member 29 and the second table 62 more securely.

Note that, at least one of the adsorption cylinder 25 and the adsorption cylinder 26 may approach the second table 62 so that the speed is reduced stepwisely or gradually as in Steps SS and S6.

Third Embodiment

With reference to FIG. 11 and FIGS. 12A and 12B mainly, description is made of a third embodiment of the disclosure as following. Note that, members having the same function as the members stated in the embodiment above are appended with the same reference signs for the sake of description, and the description thereof is omitted.

FIG. 11 is a flowchart for illustrating a transport method of the transport device according to the third embodiment. Each of FIGS. 12A and 12B is a view for illustrating a state in which the transport device according to the third embodiment transports the sheet member.

In the transport device 1 according to this embodiment (see FIG. 1), the adsorption cylinders 25 and 26 moves at least in the X-axis direction and the Z-axis direction. In addition to this, the adsorption cylinders 25 and 26 are rotated in θ-axis direction so as to control distortion of the sheet member 29.

Steps S1 and S2 are the same as those in the transport method described with reference to FIG. 7 and FIGS. 8A to 8E. As illustrated in FIG. 11 and FIG. 12A, the adsorption cylinders 25 and 26 support both the ends of the sheet member on the first table 61, and move in the Z-axis direction and the direction away from the first table 61. With this, the adsorption cylinders 25 and 26 raise the sheet member 29 (Step S2).

Further, the adsorption cylinders 25 and 26 are rotated reversely to each other in the θ-axis direction by a predetermined angle (Step S23). With this, the adsorption cylinders 25 and 26 cause distortion 17 having a predetermined form at a predetermined position on the supported sheet member 29. In other words, the adsorption cylinders 25 and 26 control distortion of the sheet member 29 so as to prevent unintended distortion to be formed in the sheet member 29.

As an example, when the sheet member 29 is viewed from the normal direction, a clockwise direction is indicated with a +θ-axis direction, and a direction reverse to the clockwise direction is indicated with a −θ-axis direction. In this case, the adsorption cylinder 25 is rotated in the +θ-axis direction by a predetermined angle, and the adsorption cylinder 26 is rotated in the −θ-axis direction at a predetermined angle. With this, the slight distortion in the center of the sheet member 29 is eliminated, and the distortion 17 having a predetermined shape is formed at a position in the sheet member 29 in the vicinity of the edge opposite to the edge on the front side in the advance direction in the X-axis direction.

Note that, the position and the shape of the distortion 17 formed in the sheet member 29 are merely examples, and the distortion may be controlled so as to have various shapes at various positions depending on a material, an area, a thickness, and strength of the sheet member 29, the distance between the adsorption cylinders 25 and 26, and other parameters.

Next, as illustrated in FIG. 11, FIG. 12A, and FIG. 12B, the adsorption cylinders 25 and 26 moves the sheet member 29 having the distortion 17 from the space above the first table 61 to the space above the second table 62 in the X-axis direction as indicated with the arrow T2 (Step S3).

Further, as illustrated in FIG. 11 and FIG. 12B, when the adsorption cylinders 25 and 26 move to the predetermined XY coordinate positions in the space above the second table 62, the slide movement in the X-axis and Y-axis directions is completed (Step S4).

Sequentially, the adsorption cylinders 25 and 26 are rotated so as to be returned by the predetermined angle by which the adsorption cylinders 25 and 26 are rotated in Step S23 (Step S24). With this, the adsorption cylinders 25 and 26 cause the sheet member 29 to have a leveled shape again by eliminating the distortion 17 formed in the sheet member 29.

Further, the adsorption cylinders 25 and 26 perform the processes in Step S5 to S7 described with reference to FIG. 7 and FIGS. 8A to 8E so as to move in the Z-axis direction and place the sheet member 29 at the predetermined position on the second table 62. In this manner, the transport of the sheet member 29 from the first table 61 to the second table 62 is completed.

Note that, the elimination of the distortion 17 from the sheet member 29 in Step S24 may be performed after Step S6, that is, after the sheet member 29 is placed on the second table 62.

Further, as in Steps S5 and S6, the adsorption cylinders 25 and 26 may stepwisely or gradually reduce the speed at which the sheet member 29 approaches the second table. Alternatively, in place of reducing the speed, as in Steps S15 and S16 (see FIG. 9 and FIGS. 10A to 10C), one of the adsorption cylinders 25 and 26 may lower to the second table 62 first, and then the other one may lower to the second table 62.

Here, in the transport path through which the sheet member 29 is transported from the first table 61 to the second table 62, the movement distance in the X-axis direction is relatively large. Thus, in order to reduce the time of the transport steps, it is preferred that the movement speed in the X-axis direction be increased as much as possible.

However, when the movement speed is increased, unintended distortion is caused to the sheet member 29 due to a wind pressure along with the movement in some cases. Particularly, both the ends of the sheet member 29 are supported by the adsorption cylinders 25 and 26. Thus, in a case where the sheet member 29 is away from the first table 61, the center is slightly distorted in some cases. When the distortion portion in the center receives a strong wind pressure along with the movement in the X-axis direction at a high speed, unintended distortion is liable to be caused.

Further, when such unintended distortion is formed in the sheet member 29, the relative positions of the adsorption cylinders 25 and 26 and the sheet member 29 supported by the adsorption cylinders 25 and 26 are shifted from each other in some cases. When the relative positions of the adsorption cylinders 25 and 26 and the sheet member 29 supported by the adsorption cylinders 25 and 26 are shifted from each other, the placement position on the second table 62 being a transport destination is shifted from the predetermined position in some cases.

In view of this, in this embodiment, in Step S23, before the sheet member 29 is moved in the X-axis direction, the adsorption cylinders 25 and 26 are rotated reverse to each other. Accordingly, the distortion 17 is intentionally formed in the supported sheet member 29. In other words, the adsorption cylinders 25 and 26 control distortion of the sheet member 29 so as to prevent unintended distortion to be formed in the sheet member 29.

With this, the strong wind pressure cause when the sheet member 29 is moved in the X-axis direction at a high speed can be avoided, and the pressure to be applied to the sheet member 29 can be suppressed.

With this, the relative positions of the adsorption cylinders 25 and 26 and the sheet member 29 supported by the adsorption cylinders 25 and 26 are prevented from being shifted from each other. Accordingly, the adsorption cylinders 25 and 26 can accurately transport the sheet member 29 to the predetermined position on the second table 62 being a transport destination.

As a result, both accuracy of the position at the transport destination and the transport speed can be improved.

As described above, after the adsorption cylinders 25 and 26 support the sheet member 29 and before the adsorption cylinders 25 and 26 release the support of the sheet member 29, at least one of the adsorption cylinders 25 and 26 is rotated. Accordingly, the torsion in the sheet member 29 can be controlled.

Further, after the adsorption cylinders 25 and 26 support the sheet member 29 and before the adsorption cylinders 25 and 26 start moving to the space above the second table 62, at least one of the adsorption cylinders 25 and 26 is rotated. Accordingly, under a state of controlling the distortion in the sheet member 29, the adsorption cylinders 25 and 26 can move to the space above the second table. With this, the air can be less liable to enter the space between the sheet member 29 and the second table 62, and the sheet member 29 can be transported to the predetermined position on the second table 62.

Fourth Embodiment

With reference to FIGS. 13 to 15C mainly, description is made of a fourth embodiment of the disclosure as following. Note that, members having the same function as the members stated in the first embodiment to the third embodiment above are appended with the same reference signs for the sake of description, and the description thereof is omitted.

FIG. 13 is a perspective view for illustrating a configuration of a transport device 1A according to the fourth embodiment. The transport device 1A includes a controller 30A in place of the controller 30 of the transport device 1 (see FIG. 1), and further includes an air sending unit 28. The controller 30A has a configuration in which an air sending control unit 32 is added to the controller 30.

The air sending control unit 32 controls drive of the air sending unit 28. Based on an instruction from the air sending control unit 32, the air sending unit 28 starts air sending or stops the air sending having been started. The air sending unit 28 is arranged above the second table 62. The air sending unit 28 is arranged between the guide rails 20 and 21. The air sending unit 28 may be connected and fixed to both of the guide rails 20 and 21. An air sending port of the air sending unit 28 faces the second table 62.

A portion of the air sending unit 28, which protrudes to the second table 62 from the guide rails 20 and 21 is at a height larger than a height at which the sheet member 29 moves in the X-axis direction (the distance in the normal direction from the surfaces of the first table 61 and the second table 62 to the surface of the sheet member 29). With this, the sheet member 29 moving the space above the first table 61 to the space above the second table 62 and the air sending unit 28 are prevented from being brought into contact with each other.

FIG. 14 is a flowchart for illustrating a transport method of the transport device according to the fourth embodiment. Each of FIGS. 15A to 15C is a view for illustrating a state in which the transport device according to the fourth embodiment transports the sheet member. As illustrated in FIG. 14, the adsorption cylinders 25 and 26 performs the processes in Steps S1 to S4 described with reference to FIG. 7 and FIGS. 8A to 8E.

Further, as illustrated in FIG. 14 and FIG. 15A, the adsorption cylinders 25 and 26 support the sheet member 29 placed on the first table 61, and move the sheet member 29 to the predetermined XY coordinate position in the space above the second table 62. In this manner, the slide movement on the XY plane is completed (Step S4). Then, the air sending port of the air sending unit 28 overlaps with the center of the sheet member 29 in the space above the sheet member 29.

Next, as illustrated in FIG. 14 and FIG. 15B, as indicated with the arrow P3, the air sending unit 28 sends air to the center of the sheet member 29 between both the ends supported by the adsorption cylinders 25 and 26 from an upper surface side (a surface side opposite to the surface facing the second table 62) (Step S34).

Further, the adsorption cylinders 25 and 26 lower the sheet member 29 in the Z-axis direction and the direction of approaching the second table 62 at the first speed (Step S5). When the distance between the sheet member 29 and the surface of the second table 62 is a predetermined distance, the adsorption cylinders 25 and 26 lower the sheet member 29 in the Z-axis direction and the direction of approaching the second table at the second speed (Step S6).

In Steps S5 and S6, while the adsorption cylinders 25 and 26 move the sheet member 29 in the Z-axis direction to approach the second table 62, the air sending unit 28 sends air to the upper surface side of the center of the sheet member 29 (the surface side opposite to the surface facing the second table 62). With this, even when the back surface of the center of the sheet member 29 receives a wind pressure along with the movement in the direction of approaching the second table 62, distortion caused due to the wind pressure can be prevented. That is, the leveled state of the sheet member 29 can be maintained, and at the same time, the sheet member 29 can be moved in the direction of approaching the second table 62.

Further, when the back surface of the sheet member 29 is brought into contact with the second table 62, the adsorption cylinders 25 and 26 stop moving in the Z-axis direction and release the adsorption. With this, the adsorption cylinders 25 and 26 release the support of the sheet member 29, and the transport of the sheet member 29 from the first table 61 to the second table 62 is completed (Step S7). Further, the air sending unit 28 stops sending air.

As described above, while the sheet member 29 moves in the direction of approaching the second table 62, the air sending unit 28 sends air to the center of the sheet member 29 from the upper surface side (the surface side opposite to the surface facing the second table 62). Thus, even when the sheet member 29 receives a wind pressure along with the movement in the direction of approaching the second table 62, the adsorption cylinders 25 and 26 can place the sheet member 29 on the second table 62 while maintaining the leveled state of the sheet member 29.

With this, the air can be prevented from entering the space between the sheet member 29 and the second table 62.

Note that, the adsorption cylinders 25 and 26 move in the direction of approaching the second table 62. At the same time, the air sending unit 28 may send air and move in the direction of approaching the second table 62 while maintaining a constant distance from the sheet member 29.

Further, an amount of air sent by the air sending unit 28 can be changed in accordance with the distance between the adsorption cylinders 25 and 26 and the second table 62. For example, the amount of air is gradually or stepwisely increased as the adsorption cylinders 25 and 26 approach the second table 62.

Further, as in Steps SS and S6, the adsorption cylinders 25 and 26 may stepwisely or gradually reduce the speed at which the sheet member 29 approaches the second table. Alternatively, in place of reducing the speed, as in Steps S15 and S16 (see FIG. 9 and FIGS. 10A to 10C), one of the adsorption cylinders 25 and 26 may lower to the second table 62 first, and then the other one may lower to the second table 62.

Fifth Embodiment

With reference to FIG. 16 mainly, description is made of a fifth embodiment of the disclosure as following. Note that, members having the same function as the members stated in the first embodiment to the fourth embodiment above are appended with the same reference signs for the sake of description, and the description thereof is omitted.

FIG. 16 is a perspective view for illustrating a configuration of a transport device 1B according to the fifth embodiment. As illustrated with the transport device 1B, three or more adsorption cylinders may be included.

The transport device 1B includes a controller 30B in place of the controller 30 of the transport device 1 (see FIG. 1), adsorption cylinder drive units 23B1, 23B2, 24B1, and 24B2 in place of the adsorption cylinder drive units 23 and 24, and adsorption cylinders 25B1, 25B2, 26B1, and 26B2 in place of the adsorption cylinders 25 and 26. The controller 30B includes an adsorption cylinder drive control unit 31B in place of the adsorption cylinder drive control unit 31 of the controller 30.

The adsorption cylinder drive control unit 31B controls drive of the adsorption cylinder drive units 23B1, 23B2, 24B1, and 24B2.

Based on an instruction from the adsorption cylinder drive control unit 31B, the adsorption cylinder drive unit 23B1 moves along the guide rail 20 in the X-axis direction together with the adsorption cylinder 25B1, moves the adsorption cylinder 25B1, rotates the adsorption cylinder 25B1, or causes the adsorption cylinder 25B1 to perform adsorption. Based on an instruction from the adsorption cylinder drive control unit 31B, the adsorption cylinder drive unit 23B2 moves along the guide rail 20 in the X-axis direction together with the adsorption cylinder 25B2, moves the adsorption cylinder 25B2, rotates the adsorption cylinder 25B2, or causes the adsorption cylinder 25B2 to perform adsorption. Based on an instruction from the adsorption cylinder drive control unit 31B, the adsorption cylinder drive unit 24B1 moves along the guide rail 21 in the X-axis direction together with the adsorption cylinder 26B1, moves the adsorption cylinder 26B1, rotates the adsorption cylinder 26B1, or causes the adsorption cylinder 26B1 to perform adsorption. Based on an instruction from the adsorption cylinder drive control unit 31B, the adsorption cylinder drive unit 24B2 moves along the guide rail 20 in the X-axis direction together with the adsorption cylinder 26B2, moves the adsorption cylinder 26B2, rotates the adsorption cylinder 26B2, or causes the adsorption cylinder 26B2 to perform adsorption.

The adsorption cylinder drive unit 23B1 and 23B2 are mounted to the guide rail 20 so as to be slidable in the X-axis direction. The adsorption cylinder drive unit 24B1 and 24B2 are mounted to the guide rail 21 so as to be slidable in the X-axis direction.

The adsorption cylinder 25B1 is mounted to the adsorption cylinder drive unit 23B1 so as to be slidable in the Z-axis direction. The adsorption cylinder 25B2 is mounted to the adsorption cylinder drive unit 23B2 so as to be slidable in the Z-axis direction. The adsorption cylinder 26B1 is mounted to the adsorption cylinder drive unit 24B1 so as to be slidable in the Z-axis direction. The adsorption cylinder 26B2 is mounted to the adsorption cylinder drive unit 24B2 so as to be slidable in the Z-axis direction.

Further, the adsorption cylinder drive unit 23B1 may further be capable of rotating the adsorption cylinder 25B1 about a center axis of the adsorption cylinder 25B1, and may further be capable of sliding the adsorption cylinder 25B1 in the Y-axis direction. The adsorption cylinder drive unit 23B2 may further be capable of rotating the adsorption cylinder 25B2 about a center axis of the adsorption cylinder 25B2, and may further be capable of sliding the adsorption cylinder 25B2 in the Y-axis direction. The adsorption cylinder drive unit 24B1 may further be capable of rotating the adsorption cylinder 26B1 about a center axis of the adsorption cylinder 26B1, and may further be capable of sliding the adsorption cylinder 26B1 in the Y-axis direction. The adsorption cylinder drive unit 24B2 may further be capable of rotating the adsorption cylinder 26B2 about a center axis of the adsorption cylinder 26B2, and may further be capable of sliding the adsorption cylinder 26B2 in the Y-axis direction.

The adsorption cylinder 25B1 includes a pad 25aB1 on a distal end. The adsorption cylinder 25B2 includes a pad 25aB2 on a distal end. The adsorption cylinder 26B1 includes a pad 26aB1 on a distal end. The adsorption cylinder 26B2 includes a pad 26aB2 on a distal end.

The shape, the function, and the operation of the adsorption cylinders 25B1 and 25B2 are the same as those of the adsorption cylinder 25. The shape, the function, and the operation of the adsorption cylinders 26B1 and 26B2 are the same as those of the adsorption cylinder 26. Further, the shape and the function of the pads 25aB1 and 25aB2 are the same as those of the pad 25a, and the shape and the function of the pads 26aB1 and 26aB2 are the same as those of the pad 26a.

As described above, the transport device 1B supports the ends of the sheet member 29 and transports the sheet member 29 with the four adsorption cylinders 25B1, 25B2, 26B1, and 26B2. With this, even when an area of the sheet member 29 is large, the sheet member 29 can stably be transported from the first table 61 to the second table 62.

Note that, the number of adsorption cylinders and the number of the adsorption cylinder control units are not limited to four, but may be three or five or more. Further, the number of guide rails is not limited to two, but may be one or three or more.

Sixth Embodiment

With reference to FIG. 17 and FIG. 18 mainly, description is made of a sixth embodiment of the disclosure as following. Note that, members having the same function as the members stated in the first embodiment to the fifth embodiment above are appended with the same reference signs for the sake of description, and the description thereof is omitted.

FIG. 17 is a perspective view for illustrating a configuration of a transport device 1C according to the sixth embodiment. FIG. 18 is a plan view for illustrating a pad 25aC or 26aC arranged on a distal end of an adsorption cylinder 25C or 26C of the transport device 1C according to the sixth embodiment.

As illustrated in FIG. 17, the transport device 1C includes a controller 30C in place of the controller 30 of the transport device 1 (see FIG. 1), adsorption cylinder drive units 23C and 24C in place of the adsorption cylinder drive units 23 and 24, and adsorption cylinders 25C and 26C in place of the adsorption cylinders 25 and 26. The controller 30C includes an adsorption cylinder drive control unit 31C in place of the adsorption cylinder drive control unit 31 of the controller 30. The adsorption cylinder drive control unit 31C controls drive of the adsorption cylinder drive units 23C and 24C.

The adsorption cylinder drive unit 23C generates an electromagnetic force to the adsorption cylinder 25C by supplying electric power to the adsorption cylinder 25C. The adsorption cylinder drive unit 24C generates an electromagnetic force to the adsorption cylinder 26C by supplying electric power to the adsorption cylinder 26C.

In place of performing adsorption, the adsorption cylinders 25C and 26C generates an electromagnetic force to attract the sheet member 29. In this manner, both the ends of the sheet member 29 are supported.

Each of the pads 25aC and 26aC includes an electromagnet therein, and the electromagnet is covered with an elastic material such as rubber and resin.

As illustrated in FIG. 18, unlike the pad 25a (see FIG. 2), openings are not formed in a surface of the pad 25aC (a surface contact with the sheet member 29).

Note that, the configuration and the operation of the adsorption cylinder drive units 23C and 24C and the adsorption cylinders 25C and 26C other than the configuration and the operation of supporting the sheet member 29 with the electromagnets are the same as those of the adsorption cylinder drive units 23 and 24 and the adsorption cylinders 25 and 26.

However, in order to support the sheet member 29 by the adsorption cylinders 25C and 26C by generating an electromagnetic force, the sheet member 29 is required to be formed of a metallic material as the mask sheet 11.

Supplement

The transport device 1 according to a first aspect of the disclosure is the transport device 1 configured to transport the sheet member 29 from the first table 61 to the second table 62. The transport device 1 includes supporting the ends of the sheet member 29 placed on the first table 61 with one of or the plurality of adsorption cylinders 25 and 26, moving the adsorption cylinders 25 and 26 to the space above the second table 62, and bringing the sheet member 29 into contact with the second table 62 by moving the adsorption cylinders 25 and 26 in the direction of approaching the second table 62 at a speed reduced gradually or stepwisely.

With the above-mentioned configuration, when the sheet member is moved in the direction of approaching the second table, the sheet member is moved at a high speed at the time of being far away from the second table. Accordingly, a time period for the sheet member to be brought into contact with the second table can be reduced.

Further, when the sheet member becomes close to the second table, the speed for moving the sheet member is reduced. Accordingly, a wind pressure that the sheet member receives along with the movement can be suppressed, and distortion in the center can be suppressed. Therefore, the air can be prevented from entering the space between the sheet member and the second table.

As described above, with the above-mentioned configuration, a time period required for transporting the sheet member can be reduced, and the air can be prevented from entering the space between the sheet member and the second table.

In the first aspect, the transport device 1 according to a second aspect of the disclosure may include a plurality of absorption portions including a first adsorption portion (the adsorption cylinder 25) and a second adsorption portion (the adsorption cylinder 26). With this, the sheet member can stably be transported.

In the first aspect, the transport device 1 according to a third aspect of the disclosure includes the following steps. That is, the first adsorption portion (the adsorption cylinder 25) is moved in the direction of approaching the second table 62 to bring a region of the sheet member 29, which is supported by the first adsorption portion (the adsorption cylinder 25), into contact with the second table 62. The second adsorption portion (the adsorption cylinder 26) is moved in the direction of approaching the second table 62 to bring a region of the sheet member 29, which is supported by the second adsorption portion (the adsorption cylinder 26), into contact with the second table 62 after the region supported by the first adsorption portion (the adsorption cylinder 25) is brought into contact with the second table 62.

The transport device 1 according to a fourth aspect of the disclosure is the transport device 1 configured to transport the sheet member 29 from the first table 61 to the second table 62, and includes the following steps. That is, the ends of the sheet member 29 placed on the first table 61 are supported by the plurality of adsorption portions including the first adsorption portion (the adsorption cylinder 25) and the second adsorption portion (the adsorption cylinder 26). The plurality of adsorption portions are moved to the space above the second table 62. The first adsorption portion (the adsorption cylinder 25) is moved to the direction of approaching the second table 62 to bring the region of the sheet member 29, which is supported by the first adsorption portion (the adsorption cylinder 25), into contact with the second table 62. The second adsorption portion (the adsorption cylinder 26) is moved in the direction of approaching the second table 62 to bring the region of the sheet member 29, which is supported by the second adsorption portion (the adsorption cylinder 26), into contact with the second table 62 after the region supported by the first adsorption portion (the adsorption cylinder 25) is brought into contact with the second table 62.

With the above-mentioned configuration, the first adsorption portion is moved in the direction of approaching the second table. Accordingly, the region of the sheet member, which is supported by the first adsorption portion, is brought into contact with the second table in the first place. The first adsorption portion can press down the region of the sheet member, which is supported by the first adsorption portion. Thus, the air is less liable to enter the space between the region and the second table. Thus, the first adsorption portion can be moved in the direction of approaching the second table at a high speed to bring the region of the sheet member, which is supported by the first adsorption portion, into contact with the second table.

Further, the second adsorption portion is moved in the direction of approaching the second table 62 to bring the region of the sheet member 29, which is supported by the second adsorption portion, into contact with the second table 62 after the region supported by the first adsorption portion is brought into contact with the second table 62. Thus, the air between the center of the sheet member (the region between the region supported by the first adsorption portion and the region supported by the second adsorption portion) and the second table flows to the outside of the space between the center and the second table by moving the second adsorption portion in the direction of approaching the second table 62. Thus, the second adsorption portion can be moved in the direction of approaching the second table at a high speed to bring the region of the sheet member, which is supported by the second adsorption portion, into contact with the second table.

Therefore, the air can be prevented from entering the space between the sheet member and the second table.

As described above, with the above-mentioned configuration, a time period required for transporting the sheet member can be reduced, and the air can be prevented from entering the space between the sheet member and the second table.

In the fourth aspect, the transport device 1 according to a fifth aspect of the disclosure may bring the sheet member 29 into contact with the second table 62 when at least one of the first adsorption portion (the adsorption cylinder 25) and the second adsorption portion (the adsorption cylinder 26) is moved in the direction of approaching the second table 62 at a speed reduced gradually or stepwisely.

With the above-mentioned configuration, when the sheet member is moved in the direction of approaching the second table, the sheet member is moved at a high speed at the time of being far away from the second table. Accordingly, a time period for the sheet member to be brought into contact with the second table can be reduced.

Further, when the sheet member becomes close to the second table, the speed for moving the sheet member is reduced. Accordingly, a wind pressure that the sheet member receives along with the movement can be suppressed, and distortion in the center can be suppressed. Therefore, the air can be prevented from entering the space between the sheet member and the second table.

As described above, with the above-mentioned configuration, a time period required for transporting the sheet member can be reduced, and the air can be prevented from entering the space between the sheet member and the second table.

In the second aspect to the fifth aspect, the transport device 1 according to a sixth aspect of the disclosure may include rotating at least one of the plurality of adsorption cylinders 25 and 26 after the plurality of adsorption cylinders 25 and 26 support the sheet member 29 and before the plurality of adsorption cylinders 25 and 26 release the support of the sheet member 29. With the above-mentioned configuration, distortion in the sheet member can be controlled.

In the sixth aspect, the transport device 1 according to a seventh aspect of the disclosure may perform the rotating at least one of the plurality of adsorption cylinders 25 and 26 after the plurality of adsorption cylinders 25 and 26 support the sheet member 29 and before the plurality of adsorption cylinders 25 and 26 start moving in the space above the second table 62.

With the above-mentioned configuration, under the state in which the distortion of the sheet member is controlled, the plurality of adsorption portions can be moved in the space above the second table. With this, the air can be less liable to enter the space between the sheet member and the second table, and the sheet member can be transported to the predetermined position on the second table.

In the second aspect to the seventh aspect, the transport device 1A according to an eighth aspect of the disclosure may include the air sending unit 28 arranged while facing the second table 62 through intermediation of the sheet member 29 when the sheet member 29 arrives at the space above the second table 62 and may include a step of sending air from the air sending unit 28 to the sheet member 29 when the adsorption cylinders 25 and 26 are moved in the direction of approaching the second table 62.

With the above-mentioned configuration, while the sheet member moves in the direction of approaching the second table, the air sending unit sends air to the center of the sheet member from the upper surface (the surface side opposite to the surface facing the second table). Thus, even when the sheet member receives a wind pressure along with the movement in the direction of approaching the second table, the adsorption cylinders can place the sheet member on the second table while maintaining the leveled state of the sheet member.

With this, the air can be prevented from entering the space between the sheet member and the second table.

In the second aspect to the eighth aspect, in the transport device 1 according to a ninth aspect of the disclosure, the plurality of adsorption cylinders 25 and 26 may support the sheet member 29 by sucking the sheet member 29.

In the second aspect to the eighth aspect, in the transport device 1C according to a tenth aspect of the disclosure, the plurality of adsorption cylinders 25 and 26 may support the sheet member 29 by attracting the sheet member 29 with an electromagnetic force.

In the second aspect to the tenth aspect, in the transport device 1 according to an eleventh aspect of the disclosure, the surfaces of the plurality of adsorption cylinders 25 and 26, which are brought into contact with the sheet member 29, may be formed of elastic members (the pads 25a and 26a). With the above-mentioned configuration, the plurality of adsorption cylinders are brought into contact with the sheet member, and hence the sheet member can be prevented from being damaged.

In the ninth aspect, in the transport device 1 according to a twelfth aspect of the disclosure, a plurality of suction ports may be formed in the surfaces of the plurality of adsorption cylinders 25 and 26, which are brought into contact with the sheet member 29. With the above-mentioned configuration, the plurality of adsorption cylinders can disperse a pressure to be applied to the surface of the sheet member when the sheet member is sucked to be supported.

In the first aspect to the twelfth aspect, in the transport device 1 according to a thirteenth aspect of the disclosure, a predetermined pattern may be formed on the center of the sheet member 29. With the above-mentioned configuration, without supporting the center of the sheet member with the adsorption portions, the air can be prevented from entering the space between the center and the second table.

In the thirteenth aspect, in the transport device 1 according to a fourteenth aspect of the disclosure, the sheet member 29 may have a thickness from 10 μm to 50 μm.

In the thirteenth aspect or the fourteenth aspect, in the transport device 1 according to a fifteenth aspect of the disclosure, the sheet member 29 may be the mask sheet 11 forming the vapor deposition mask 10.

In the thirteenth aspect to the fifteenth aspect, in the transport device 1 according to a sixteenth aspect of the disclosure, the device including the second table may be an inspection device configured to perform inspection the predetermined pattern. With the above-mentioned configuration, the air does not enter the space between the sheet member and the second table, and hence inspection on the sheet member can be performed accurately.

In the thirteenth aspect, in the transport device 1 according to a seventeenth aspect of the disclosure, the sheet member 29 may be a flexible display panel (the organic EL display panel 41).

A transport method according to an eighteenth aspect of the disclosure is a transport method of the transport device 1 configured to transport the sheet member 29 from the first table 61 to the second table 62. The transport method includes supporting the ends of the sheet member 29 placed on the first table 61 with one of or the plurality of adsorption cylinders 25 and 26, moving the adsorption cylinders 25 and 26 to the space above the second table 62, and bringing the sheet member 29 into contact with the second table 62 by moving the adsorption cylinders 25 and 26 in the direction of approaching the second table 62 at a speed reduced gradually or stepwisely.

A transport method according to a nineteenth aspect of the disclosure is a transport method of the transport device 1 configured to transport the sheet member 29 from the first table 61 to the second table 62, and includes the following steps. That is, the ends of the sheet member 29 placed on the first table 61 are supported by the plurality of adsorption portions including the first adsorption portion (the adsorption cylinder 25) and the second adsorption portion (the adsorption cylinder 26). The plurality of adsorption cylinders 25 and 26 are moved to the space above the second table 62. The first adsorption portion (the adsorption cylinder 25) is moved to the direction of approaching the second table 62 to bring the region of the sheet member 29, which is supported by the first adsorption portion (the adsorption cylinder 25), into contact with the second table 62. The second adsorption portion (the adsorption cylinder 26) is moved in the direction of approaching the second table 62 to bring the region of the sheet member 29, which is supported by the second adsorption portion (the adsorption cylinder 26), into contact with the second table.

The disclosure is not limited to each of the embodiments stated above, and various modifications may be implemented within a range not departing from the scope of the claims. Embodiments obtained by appropriately combining technical approaches stated in each of the different embodiments also fall within the scope of the technology of the disclosure. Moreover, novel technical features may be formed by combining the technical approaches stated in each of the embodiments.

REFERENCE SIGNS LIST

• 1, 1A to 1C Transport device
• 10 Vapor deposition mask
• 11 Mask sheet
• 20, 21 guide rail
• 23, 23B1, 23B2 Adsorption cylinder drive unit
• 24, 24B1, 24B2 Adsorption cylinder drive unit
• 25, 25B1, 25B2, 25C Adsorption cylinder (adsorption portion, first adsorption portion)
• 26, 26B1, 26B2, 26C Adsorption cylinder (adsorption portion, first adsorption portion)
• 25a, 25aB1, 25aB2, 25aC Pad
• 26a, 26aB1, 26aB2, 26aC Pad
• 25b, 26b Suction port
• 28 Air sending unit
• 29 Sheet member
• 30, 30A to 30C Controller
• 31, 31B, 31C Adsorption cylinder drive control unit
• 32 Air sending control unit
• 61 First table
• 40 Vapor deposition source
• 41 Organic EL display panel (display panel)
• 42 Substrate
• 43 TFT array layer
• 50 Vapor deposition particle
• 62 Second table

Claims

1 and 2. (canceled)

3. A transport device, which is configured to transport a sheet member from a first table to a second table, comprising:

supporting ends of the sheet member placed on the first table with an adsorption portion or a plurality of adsorption portions;

moving the adsorption portion to a space above the second table; and

bringing the sheet member into the second table by moving the adsorption portion in a direction of approaching the second table at a speed being reduced gradually or stepwisely,

wherein the transport device includes the plurality of adsorption portions including a first adsorption portion and a second adsorption portion, and

the transport device further includes

bringing a region of the sheet member, which is supported by the first adsorption portion, into contact with the second table by moving the first adsorption portion in a direction of approaching the second table, and

bringing a region of the sheet member, which is supported by the second adsorption portion, into contact with the second table by moving the second adsorption portion in a direction of approaching the second table after the region being supported by the first adsorption portion is brought into contact with the second table.

4 and 5. (canceled)

6. The transport device according to claim 3, further comprising:

rotating at least one of the plurality of adsorption portions after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions release the support of the sheet member.

7. The transport device according to claim 6,

wherein the rotating at least one of the plurality of adsorption portions is performed after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions start moving to the space above the second table.

8. The transport device according to claim 3, further comprising:

an air sending unit arranged while facing the second table through inter mediation of the sheet member when the sheet member arrives at the space above the second table; and

sending air from the air sending unit to the sheet member when the adsorption portion is moved in the direction of approaching the second table.

9. The transport device according to claim 3,

wherein the plurality of adsorption portions support the sheet member by sucking the sheet member.

10. The transport device according to claim 3,

wherein the plurality of adsorption portions support the sheet member by attracting the sheet member with an electromagnetic force.

11. The transport device according to claim 3,

wherein the plurality of adsorption portions have surfaces contact with the sheet member, the surfaces being formed of an elastic member.

12. The transport device according to claim 9,

wherein a plurality of suction ports are formed in the surfaces of the plurality of adsorption portions, which are in contact with the sheet member.

13. The transport device according to claim 3,

wherein a predetermined pattern is formed in a center of the sheet member.

14. The transport device according to claim 13,

wherein the sheet member has a thickness from 10 μm to 50 μm.

15. The transport device according to claim 13,

wherein the sheet member comprises a mask sheet forming a vapor deposition mask.

16. The transport device according to claim 13,

wherein a device including the second table comprises an inspection device configured to inspect the predetermined pattern.

17. The transport device according to claim 13,

wherein the sheet member comprises a flexible display panel.

18 and 19. (canceled)

20. A transport device, which is configured to transport a sheet member from a first table to a second table, comprising:

supporting ends of the sheet member placed on the first table with a plurality of adsorption portions including a first adsorption portion and a second adsorption portion;

moving the plurality of adsorption portions to a space above the second table;

bringing a region of the sheet member, which is supported by the first adsorption portion, into contact with the second table by moving the first adsorption portion in a direction of approaching the second table; and

bringing a region of the sheet member, which is supported by the second adsorption portion, into contact with the second table by moving the second adsorption portion in a direction of approaching the second table after the region being supported by the first adsorption portion is brought into contact with the second table.

21. The transport device according to claim 20,

wherein the sheet member is brought into contact with the second table by moving at least one of the first adsorption portion and the second adsorption portion in the direction of approaching the second table at a speed being reduced gradually or stepwisely.

22. The transport device according to claim 20, further comprising:

rotating at least one of the plurality of adsorption portions after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions release the support of the sheet member.

23. The transport device according to claim 22,

wherein the rotating at least one of the plurality of adsorption portions is performed after the plurality of adsorption portions support the sheet member and before the plurality of adsorption portions start moving to the space above the second table.

24. The transport device according to claim 20, further comprising:

an air sending unit arranged while facing the second table through inter mediation of the sheet member when the sheet member arrives at the space above the second table; and

sending air from the air sending unit to the sheet member when the adsorption portion is moved in the direction of approaching the second table.

25. A transport device, which is configured to transport a sheet member from a first table to a second table, comprising:

supporting ends of the sheet member placed on the first table with an adsorption portion or a plurality of adsorption portions;

moving the adsorption portion to a space above the second table; and

bringing the sheet member into the second table by moving the adsorption portion in a direction of approaching the second table at a speed being reduced gradually or stepwisely,

wherein the transport device further includes the plurality of adsorption portions including a first adsorption portion and a second adsorption portion,

an air sending unit is arranged while facing the second table through intermediation of the sheet member when the sheet member arrives at the space above the second table, and

the transport device further includes sending air from the air sending unit to the sheet member when the adsorption portion moves in a direction of approaching the second table.

26. The transport device according to claim 25,

wherein the plurality of adsorption portions support the sheet member by sucking the sheet member.