ETCHING DEVICE AND OPERATING METHOD THEREOF
A device includes a chamber, a wafer holder, a gas source, a vacuum sealing device, and an inductive coil. The wafer holder is disposed in the chamber. The wafer holder has a wafer-mounting surface in parallel with a gravity direction. The gas source is configured to generate gas. The vacuum sealing device is connected between the gas source and the chamber. The inductive coil is wound around the vacuum sealing device to excite the gas into plasma.
This application claims priority to U.S. Provisional Application Ser. No. 62/775,370, filed Dec. 4, 2018, the disclosures of which are incorporated herein by reference in their entireties.
BACKGROUND Technical FieldThe present disclosure relates to a device and a method for performing an etching process. More particularly, the present disclosure relates to a device and a method of performing a dry etching process, such as photoresist stripping.
Description of Related ArtIn current semiconductor industry, a dry etching process is generally used to perform photoresist stripping. Moreover, while an operation of transferring a photoresist pattern is performed, the dry (plasma) etching process has an advantage of high accuracy, and thus the plasma etching process is used for processing a large amount of wafers on semiconductor production lines.
However, the plasma etching process often generates a large amount of particles, such as negatively charged by-products generated by chemical mechanisms and attached with electrons due to exposure to the plasma. As a result of the interaction between the magnetic field and the electric field in a chamber, the negatively charged by-products are suspended above the wafer and are not easily to be removed. Therefore, after the plasma etching process is performed, the suspended negatively charged by-products (particles) drop on the top surface of the wafer, thus causing contamination.
SUMMARYAccording to some embodiments of the present disclosure, a method includes the following steps. A wafer is disposed on a wafer-mounting surface of a wafer holder that is disposed in a chamber. The wafer-mounting surface is in parallel with a gravity direction. A gas is flown from a gas source to vacuum sealing device. An inductive coil wrapping around a vacuum sealing device excites the gas into plasma. The plasma is injected to the wafer.
In some embodiments, the method further includes performing a purging operation through at least one exhaust pipe connected to the chamber, while the wafer is disposed on the wafer holder.
In some embodiments, the method further includes following steps. The wafer is removed. A clean operation is performed after the wafer is removed.
In some embodiments, performing the clean operation further includes following steps. A purging operation is performed through an exhaust pipe connected to a first end and a second end of the vacuum sealing device. A blocking membrane is disposed between the vacuum sealing device and the chamber, such that the vacuum sealing device is separate from the chamber.
In some embodiments, the exhaust pipe and the vacuum sealing device are made of ceramic materials.
According to some embodiments of the present disclosure, a device includes a chamber, a wafer holder, a gas source, a vacuum sealing device, and an inductive coil. The wafer holder is disposed in the chamber. The wafer holder has a wafer-mounting surface in parallel with a gravity direction. The gas source is configured to generate gas. The vacuum sealing device is connected between the gas source and the chamber. The inductive coil is wound around the vacuum sealing device to excite the gas into plasma.
In some embodiments, the wafer holder has a chuck pin configured to fix a wafer on the wafer-mounting surface of the wafer holder.
In some embodiments, the wafer holder has an electrostatic chuck configured to fix a wafer on the wafer-mounting surface of the wafer holder.
In some embodiments, the device further includes at least one exhaust pipe connected to the chamber.
In some embodiments, the device further includes an exhaust pipe and a blocking membrane. The exhaust pipe is connected to a first end and a second end of the vacuum sealing device. The blocking membrane is disposed between the vacuum sealing device and the chamber.
In some embodiments, the exhaust pipe is Y-shaped.
In some embodiments, the exhaust pipe is made of a ceramic material.
In some embodiments, the wafer holder includes a heater.
In some embodiments, the vacuum device is made of a ceramic material.
In some embodiments, the vacuum sealing device is a diamond shape, a round shape, or a semicircular shape.
In summary, the disclosure provides a method and a device for performing an etching process. The wafer is disposed on the wafer-mounting surface of the wafer holder, and the wafer-mounting surface of the wafer holder is in parallel with a gravity direction, and thus particles may drop on a side surface of the wafer without dropping on a top surface of the wafer. Therefore, the contamination problem on the top surface of the wafer can be resolved, and performance of the wafer can be improved.
It is to be understood that both the foregoing general description and the following detailed description are by examples, and are intended to provide further explanation of the disclosure as claimed.
The disclosure can be more fully understood by reading the following detailed description of the embodiment, with reference made to the accompanying drawings as follows:
Reference will now be made in detail to the present embodiments of the disclosure, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.
The vacuum sealing device 300 is connected between the chamber 100 and the gas source 400. As shown in
In some embodiments, the vacuum sealing device 300 may be made of a ceramic material, but the disclosure is not limited thereto. In other embodiments, the vacuum sealing device 300 may be made of another suitable material. For example, the vacuum sealing device 300 may provide two functions. The ceramic material forms a vacuum wall for maintaining the interior of the vacuum sealing device 300 at sufficiently low pressure for forming the plasma. Moreover, the vacuum sealing device 300 may also act as a dielectric window for allowing RF inductive power to pass from the externally placed inductive coil 500 into the interior of the vacuum sealing device 300. In the present embodiment, the vacuum sealing device 300 is a diamond shape. In other embodiments, the vacuum sealing device 300 is a round shape, a semicircular shape, or another suitable shape.
In some embodiments, the wafer holder 200 has chuck pins 210. The chuck pins 210 are configured to fix a wafer 204 (as shown in
Referring to
In some embodiments, the wafer holder 200 further includes a heater 220 for heating the wafer 204. For example, a power source (not shown) may provide DC power to the heater 220, and the heater 220 may provide radiant energy to the wafer 204.
As shown in
In the present embodiment, as shown in
In some embodiments, the exhaust pipe 610 is Y-shaped, but the disclosure is not limited thereto. For example, the exhaust pipe 610 has a first exhaust pipe 612, a second exhaust pipe 614, and the third exhaust pipe 616. The first end 302 of the vacuum sealing device 300 is connected to the first exhaust pipe 612, while the second end 304 of the vacuum sealing device 300 is connected to the second exhaust pipe 614. As shown in
In some embodiments, the exhaust pipe 610 is made of a ceramic material. In other embodiments, the vacuum sealing device 300 and the exhaust pipe 610 are made of same materials, but the disclosure is not limited thereto. For example, the vacuum sealing device 300 and the exhaust pipe 610 are made of the ceramic material which is beneficial for removing the particles. In some embodiments, the exhaust pipe 610 is connected to a negative pressure source which is beneficial to performing the purging operation.
Referring to
In other words, when the electrostatic chuck 230 is controlled to hold a wafer 204, the power supply unit 800 provides a voltage to an electrode (not shown), and the electrode generate Coulomb force or Johnsen-Rahbek force between the wafer 204 and the electrode, such that the wafer 204 can be fixed on the wafer holder 200 by using the electrostatic chuck 230.
In summary, the disclosure provides a method and a device for performing an etching process. The wafer is disposed on the wafer-mounting surface of the wafer holder, and the wafer-mounting surface of the wafer holder is in parallel with a gravity direction, and thus particles may drop on a side surface of the wafer without staying on a top surface of the wafer. Therefore, the contamination problem on the top surface of the wafer can be resolved, and performance of the wafer can be improved.
Although the present disclosure has been described in considerable detail with reference to certain embodiments thereof, other embodiments are possible. Therefore, the spirit and scope of the appended claims should not be limited to the description of the embodiments contained herein.
It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present disclosure without departing from the scope or spirit of the disclosure. In view of the foregoing, it is intended that the present disclosure cover modifications and variations of this disclosure provided they fall within the scope of the following claims.
Claims
1. A method, comprising:
- disposing a wafer on a wafer-mounting surface of a wafer holder that is disposed in a chamber, wherein the wafer-mounting surface is in parallel with a gravity direction;
- flowing gas from a gas source to a vacuum sealing device, wherein an inductive coil wrapping around a vacuum sealing device excites the gas into plasma; and
- injecting the plasma to the wafer.
2. The method of claim 1, further comprising:
- performing a purging operation through at least one exhaust pipe connected to the chamber, while the wafer is disposed on the wafer holder.
3. The method of claim 1, further comprising:
- removing the wafer; and
- performing a clean operation after removing the wafer.
4. The method of claim 3, wherein performing the clean operation further comprises:
- performing a purging operation through an exhaust pipe connected to a first end and a second end of the vacuum sealing device; and
- disposing a blocking membrane between the vacuum sealing device and the chamber, such that the vacuum sealing device is separate from the chamber.
5. The method of claim 4, wherein the exhaust pipe and the vacuum sealing device are made of ceramic materials.
6. A device, comprising:
- a chamber;
- a wafer holder disposed in the chamber, wherein the wafer holder has a wafer-mounting surface in parallel with a gravity direction;
- a gas source configured to generate gas;
- a vacuum sealing device connected between the gas source and the chamber; and
- an inductive coil wound around the vacuum sealing device to excite the gas into plasma.
7. The device of claim 6, wherein the wafer holder has a chuck pin configured to fix a wafer on the wafer-mounting surface of the wafer holder.
8. The device of claim 6, wherein the wafer holder has an electrostatic chuck configured to fix a wafer on the wafer-mounting surface of the wafer holder.
9. The device of claim 6, further comprising:
- at least one exhaust pipe connected to the chamber.
10. The device of claim 6, further comprising:
- an exhaust pipe connected to a first end and a second end of the vacuum sealing device; and
- a blocking membrane disposed between the vacuum sealing device and the chamber.
11. The device of claim 10, wherein the exhaust pipe is Y-shaped.
12. The device of claim 10, wherein the exhaust pipe is made of a ceramic material.
13. The device of claim 6, wherein the wafer holder comprises a heater.
14. The device of claim 6, wherein the vacuum sealing device is made of a ceramic material.
15. The device of claim 6, wherein the vacuum sealing device is a diamond shape, a round shape, or a semicircular shape.
Type: Application
Filed: Jan 14, 2019
Publication Date: Jun 4, 2020
Inventors: Feng-Ju TSAI (Hsinchu County), Shyue-Ru DOONG (Taipei City)
Application Number: 16/247,539