FLUID CONTROL DEVICE

Abstract

Provided is a fluid control device including: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and a side surface adjacent to the installation surface; a heater that heats the body member; a heater holding member that has a facing surface facing the installation surface of the body member and holds the heater along the side surface with the facing surface made to face the installation surface; and a pressing mechanism that presses the facing surface toward the installation surface.

Description

TECHNICAL FIELD

The present invention relates to a fluid control device.

BACKGROUND ART

As a conventional fluid control device, for example, as disclosed in Patent Literature 1, there has been one including: a block-shaped body member having inside a flow path through which fluid flows and respective equipment installed on an installation surface of the body member to control the fluid flowing through the flow path.

In addition, the conventional fluid control device is structured to screw a heater for heating the body member to a side surface adjacent to the installation surface of the body member.

Meanwhile, this sort of fluid control device is generally installed together with other such fluid control devices. However, in this case, adjacent fluid control devices are arranged with side surfaces of body members approximated to each other. For this reason, a heater is positioned between the adjacent body members and consequently becomes difficult to access, and therefore it has been very troublesome to maintain the heater.

CITATION LIST

Patent Literatures

Patent Literature 1: Japanese Unexamined Patent Application Publication No. 2016-119012

SUMMARY OF INVENTION

Technical Problem

Therefore, the main object of the present invention is to obtain a fluid control device that enables a heater arranged on a side surface of a body member to be easily detached and is superior in maintainability.

Solution to Problem

That is, the fluid control device according to the present invention is one including: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and a side surface adjacent to the installation surface; a heater that heats the body member; a heater holding member that has a facing surface facing the installation surface of the body member and holds the heater along the side surface with the facing surface made to face the installation surface; and a pressing mechanism that presses the facing surface toward the installation surface.

Since such a fluid control device is structured so that the heater holding member that is pressed by the pressing mechanism against the installation surface of the body member and thereby attached to the installation surface holds the heater along the side surface, the heater holding member can be detached from the installation surface side of the body member, which is relatively easily accessible even after integrated arrangement. This improves the maintainability of the heater. In addition, since the pressing mechanism presses the facing surface toward the installation surface, the positional displacement of the heater holding member with respect to the body member can be suppressed.

Also, the installation surface may be one including a first contact part that contacts with the facing surface, the facing surface may be one including a second contact part that contacts with the first contact part, and at least one of the first contact part and the second contact part may be one formed in a surface shape that is tilted with respect to a pressing direction of the pressing mechanism.

In addition, the first contact part and the second contact part may be ones constituting a slide mechanism that interposes between the installation surface and the facing surface, and the slide mechanism may be one that slides the heater holding member with respect to the body member with use of pressing by the pressing mechanism so that the heater moves toward the side surface.

In such a configuration, between the installation surface and the facing surface, the pressing by the pressing mechanism enables the heater holding member to be slid with respect to the body member so that the heater moves toward the side surface, and therefore the heater can be surely brought into close contact with the side surface of the body member. This allows the heat of the heater to be efficiently transferred to the body member.

As a specific configuration of the slide mechanism, it is only necessary that the slide mechanism is one including: the first contact part provided on the installation part; and the second contact part provided on the facing surface and brought into contact with the first contact part, and at least one of the first contact part and the second contact part is configured to be formed in a surface shape that is tilted with respect to the pressing direction of the pressing mechanism. Also, in this case, the first contact part and the second contact part may be ones configured to make a surface contact with each other.

In such a configuration, the slide mechanism capable of sliding the heater holding member with respect to the body member can be configured without using a complicated structure.

Also, specific configurations of the heater holding member include one in which the heater holding member is one including: an attachment part having the facing surface; and a heater holding part that extends from a facing surface side of the attachment part along the side surface, and the heater is provided on at least one of one surface of the heater holding part, which faces the side surface, and the other surface on the side opposite to the one surface.

Further, the one surface of the heater holding member may be one tilted from the facing surface toward the side surface.

In such a configuration, when the pressing mechanism presses the facing surface toward the installation surface, the close contact can be achieved with at least part of the heater holding part biased toward the side surface.

Also, specific configurations of the pressing mechanism include one in which the pressing mechanism is one including: a screw hole provided in the installation surface; a long hole that penetrates through the attachment part and extends in a direction away from the heater holding part; and a screw member that is screwed to the screw hole through the long hole.

The fluid control device configured as described enables the heater arranged on the side surface of the body member to be easily detached from the installation surface side even after integrated arrangement, thus improving maintainability.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is an exploded perspective view schematically illustrating a fluid control device according to a first embodiment;

FIG. 2 is a cross-sectional view schematically illustrating a state where a body member of the fluid control device according to the first embodiment is cut in its longer direction;

FIG. 3 is an exploded cross-sectional view schematically illustrating a state where the body member of the fluid control device according to the first embodiment is cut in its width direction;

FIGS. 4(a) and 4(b) are cross-sectional views schematically illustrating a process of attaching a heater holding member to the body member of the fluid control device according to the first embodiment;

FIG. 5 is a cross-sectional view schematically illustrating a state where a body member of a fluid control device according to a second embodiment is cut in its width direction;

FIGS. 6(a)-6(c) are cross-sectional views schematically illustrating a process of attaching a heater holding members to the body member of the fluid control device according to the second embodiment;

FIGS. 7(a) and 7(b) are cross-sectional views schematically illustrating a fluid control device of another embodiment according to the first embodiment;

FIGS. 8(a) and 8(b) are cross-sectional views schematically illustrating a fluid control device of another embodiment according to the first embodiment; and

FIG. 9 is a cross-sectional view schematically illustrating a fluid control device of another embodiment according to the second embodiment.

DESCRIPTION OF EMBODIMENTS

In the following, the fluid control device according to the present invention will be described on the basis of the drawings.

The fluid control device according to the present invention is one that is used incorporated in, for example, a semiconductor manufacturing line or the like.

First Embodiment

As illustrated in FIGS. 1 and 2, a fluid control device 100 according to the present embodiment includes: a body member 10 having inside a flow path L through which fluid flows; respective equipment 20 that is installed on the body member 10 to control the fluid flowing through the flow path L; heaters 30 that heat the body member 10; and heater holding members 40 that are attached to the body member 10 to hold the heaters 30.

The body member 10 is a block-shaped one. Specifically, the body member 10 is a rectangular parallelepiped member. In addition, the body member 10 includes, on one end surface in a longer direction, an introduction port 10a for introducing the fluid into the flow path L, as well as includes, on the other end surface in the longer direction, a lead-out port 10b for leading the fluid out of the flow path L.

In addition, the body member 10 is configured so that, with a predetermined surface extending in the longer direction as an installation surface S1, on the installation surface S1, the respective equipment 20 is installed and also the heater holding members 40 are attached. Also, the body member 10 includes, on the installation surface S1, a purge gas introduction port 10c for introducing purge gas into the flow path L.

The respective equipment 20 is one that controls the fluid flowing through the flow path L. Specifically, the respective equipment 20 in the present embodiment includes: a first pneumatic valve 20a; preheating tank 20b, first flow rate regulation valve 20c, heating tank 20d, pressure sensor 20e, second pneumatic valve 20f, third pneumatic valve 20g, second flow rate regulation valve 20h, and flow rate sensor 20i. In addition, these respective pieces of equipment 20 are installed on the installation surface S1 of the body member 10 in this order from the upstream side toward the downstream side of the flow path L.

Further, the respective equipment 20 in the present embodiment is configured to, while the first flow rate regulating valve 20c is regulating the flow rate of liquid material introduced from the introduction port 10a, heat the liquid material in the preheating tank 20b and in the heating tank 20d to produce material gas, and after feedback control of the flow rate of the material gas is performed using the second flow rate regulation valve 20h so that a measured value of the flow rate sensor 20i comes close to a set value, lead the material gas out of the lead-out port 10b.

The heaters 30 are flat plate-shaped ones. As the heaters 30, for example, rubber heaters can be used.

The heater holding members 40 are ones that are attached on the installation surface S1 of the body member 10 and hold the heaters 30 along the side surfaces S2 adjacent to the installation surface S1 of the body member 10. Here, the side surfaces S2 are surfaces adjacent to the installation surface S1 of the body member 10 along the longer direction, and the side surfaces S2 in the present embodiment are orthogonal to the installation surface S1. In addition, the present embodiment is structured to attach the two heater holding members 40 to the body member 10, and both the heater holding members 40 are symmetric in structure and their attachment structure with respect to the centerline a extending in the longer direction of the body member 10, and therefore in the following, the structure will be described with a focus on one of the heater holding members 40.

Specifically, the heater holding member 40 includes: paired attachment parts 40a respectively having facing surfaces 40s facing the installation surface S1 of the body member 10; and a heater holding part 40b laid across the respective attachment parts 40a. In addition, as illustrated in FIG. 3, the heater holding part 40b extends along the side surface S2 of the body member 10 with the facing surfaces 40s of the paired attachment parts 40a facing the installation surface S1. Also, the heater holding member 40 is configured so that the facing surface 40s of each of the attachment parts 40a is pressed toward the installation surface S1 by a pressing mechanism 50. The heater holding member 40 in the present embodiment includes the two attachment parts 40a, but may be one including one or three or more attachment parts 40a.

In addition, the heater 30 is provided on one surface 40x of the heater holding part 40b, which faces the side surface S2, and on the other surface 40y on the other side. The heater 30 may be provided on the one surface 40x of the heater holding part 40b or on both of the one surface 40x and the other surface 40y.

The pressing mechanism 50 is one that presses the facing surface 40s toward the installation surface S1. Specifically, the pressing mechanism 50 includes: a screw hole 50a provided in the installation surface S1 of the body member 10; a long hole 50b that penetrates through the attachment part 40a of the heater holding member 40 and extends in a direction away from the heater holding part 40b (in a direction intersecting with the one surface 40x); and a bolt-like screw member 50c that is screwed to the screw hole 50a through the long hole 50b. In addition, the screw member 50c has a shaft part 50x that passes through the long hole 50b and a head part 50y that does not pass through the long hole 50b.

Further, the pressing mechanism 50 is configured to, by screwing the screw member 50c into the screw hole 50a, allow the head part 50y of the screw member 50c caught by the long hole 50b to press the facing surface 40s of the attachment part 40a toward the installation surface S1.

In addition, a slide mechanism 60 interposes between the facing surface 40s and the installation surface S1. The slide mechanism 60 is one that slides the heater holding member 40 with respect to the body member 10 with use of the pressing by the pressing mechanism 50 so that the heater 30 held by the heater holding member 40b moves toward the side surface S2 side.

Specifically, the slide mechanism 60 is one including: a first contact part 60a provided on the installation surface S1; and a second contact part 60b provided on the facing surface 40s. In addition, the first contact part 60a is configured of a part of the installation surface S1, which is in contact with the facing surface 40s, and for example, a part of a surface shape or a protrusion shape. Also, the second contact part 60b is configured of a part of the facing surface 40s, which is in contact with the installation surface S1, and for example, a part of a surface shape or a protrusion shape. Further, the first contact part 60a and the second contact part 60b are configured to slidably contact with each other when the facing surface 40s is pressed toward the installation surface S1 by the pressing mechanism 50.

As illustrated in FIG. 3, the first contact part 60a and the second contact part 60b in the present embodiment are formed in a surface shape (specifically a planar surface shape) tilted with respect to the pressing direction X of the pressing mechanism 50. In addition, the first contact part 60a and the second contact part 60b are configured to make a surface contact with each other. Further, the surface configuring the first contact part 60a is tilted so that an angle θ1 formed with the side surface S2 is an acute angle. Also, the surface configuring the second contact part 60b is tilted so that an angle θ2 formed with the one surface surface 40x is an acute angle. In addition, the side surface S2 is a surface faced by the heater 30 held by the heater holding member 40 that is attached on the installation surface S1 by bringing the first contact part 60a and the second contact part 60b into contact with each other. Incidentally, the surface configuring the first contact part 60a is tilted so as to face in a direction (the right direction in FIG. 3) opposite to a direction (the left direction in FIG. 3) in which the side surface S2 faces, and the surface configuring the second contact part 60b is tilted so as to face in a direction (the left direction in FIG. 3) opposite to a direction (the right direction in FIG. 3) in which the one surface 40x faces. In other words, in a state where the first contact part 60a and the second contact part 60b are in contact with each other, the surface configuring the second contact part 60b is tilted so as to face in the same direction as the direction (the left direction in FIG. 3) in which the side surface S2 faces. That is, it is only necessary that, in the state where the first contact part 60a and the second contact part 60b are in contact with each other, at least one of them is formed in a surface shape tilted with respect to the pressing direction X of the pressing mechanism 50, and when the first contact part 60a is formed in a surface shape, the surface is tilted so as to face in the direction opposite to the direction in which the side surface S2 faces, whereas when the second contact part 60b is formed in a surface shape, the surface is tilted so as to face in the same direction as the direction in which the side surface S2 faces (in the direction opposite to the direction in which the one surface 40x faces).

In addition, at least one of the first contact part 60a and the second contact part 60b only has to be formed in a surface shape tilted with respect to the pressing direction X of the pressing mechanism 50, and they may be configured so that the other makes a point contact or line contact with the one surface. In this case, it is preferable that the first contact part 60a and the second contact part 60b are configured to contact with each other at two or more points.

Also, in the state where the first contact part 60a and the second contact part 60b are in contact with each other, the heater holding part 40b is such that the one surface 40x is parallel to the side surface S2 or the one surface 40x is tilted from the facing surface 40s toward the side surface S2 side.

In addition, the body member 10 in the present embodiment is provided with the first contact part 60a in each of spaces on the installation surface S1 between the pressure sensor 20e and the second pneumatic valve 20f and between the third pneumatic valve 20g and the second flow rate regulation valve 20h.

Next, a method for attaching the heater holding member 40 to the body member 10 in the present embodiment will be described on the basis of FIGS. 4(a) and 4(b).

First, as illustrated in FIG. 4(a), the heater holding member 40 is arranged so that the facing surface 40s faces the installation surface S 1. Then, the first contact part 60a and the second contact part 60b are brought into contact with each other.

Subsequently, the shaft part 50x of the screw member 50c is screwed to the screw hole 50 through the long hole 50b. After that, by screwing the screw member 50c into the screw hole 50a, the head 50y of the screw member 50c presses the attachment part 40a to press the second contact part 60b toward the first contact part 60a.

This causes sliding between the first contact part 60a and the second contact part 60b as illustrated in FIG. 4(b). As a result, the heater holding member 40 slides with respect to the body member 10. Then, the heater 30 held by the heater holding part 40b indirectly closely contacts with the side surface S2 via the heater holding member 40b.

Second Embodiment

As illustrated in FIGS. 5 and 6, a fluid control device 100 according to the present embodiment includes: a body member 10 having inside a flow path L through which fluid flows; respective equipment 20 that is installed on the body member 10 to control the fluid flowing through the flow path L; heaters 30 that heat the body member 10; and a holding mechanism M that holds the heater 30 while bringing the heaters 30 into close contact with the body member 10.

The body member 10 is a block-shaped one. Specifically, the body member 10 is a rectangular parallelepiped member. Also, the body member 10 includes an installation surface S1 extending in a longer direction, and paired side surfaces S2 extending in the longer direction and adjacent to the installation surface S1. In addition, the body member 10 is configured so that the respective equipment 20 is installed on the installation surface S1. Accordingly, the paired side surfaces S1 face in mutually opposite directions.

The holding mechanism M includes paired heater holding plates 70, a locking structure 80, and a connecting structure 90.

The paired heater holding plates 70 are ones that face corresponding ones of the side surfaces S2 of the body member 10 to hold the heaters 30 with the side surfaces S2. For example, the heater holding plates 70 are ones formed by folding an elastic plate material.

Specifically, the heater holding plates 70 respectively include: holding parts 71 that extend along the side surfaces S2 of the body member 10; hooking parts 72 that are formed at one end parts extending from the holding parts 71 in a direction opposite to a direction X (the upper direction in FIG. 5) in which the installation surface S1 of the body member 10 faces; and facing parts 73 that are formed at the other end parts extending from the holding parts 71 in the direction X in which the installation surface S1 faces. Also, the heater holding plates 70 are configured to sandwich and hold the heaters 30 between the holding parts 71 and the side surfaces S2. In addition, in other words, the direction in which the installation surface S1 faces can also be said to be the upright direction of the respective equipment 20 installed on the installation surface S1.

Specifically, the holding parts 71 extend facing the body member 10 and the respective equipment 20 installed on the installation surface S1 of the body member 10. Further, the holding parts 71 are attached with the heaters 30 on the inner surfaces thereof facing the side surfaces S2. The hooking parts 72 are formed by folding the one end parts of the heater holding plates 70 in a downward L-shape. Also, the facing parts 73 are formed by folding the other end parts of the heater holding plates 70 at a right angle, and configured so as to face the installation surface S1. In addition, the facing parts 73 are formed with through-holes 73h constituting the connecting structure 90.

The locking structure 80 is one that is provided to the body member 10 to lock the one end parts of the paired heater holding plates 70. Specifically, the locking structure 80 is formed in an elongated rectangular shape extending along the opposite surface S3 to the installation surface S1 of the body member 10, and includes: a plate 81 formed to have a wider width than the opposite surface S3; and locking pieces 82 that rise from both sides extending in the longer direction of the plate 81 and face the side surfaces S2 of the body member 10.

The plate 81 is fixed to the opposite surface S3 of the body member 10. The locking pieces 82 extend along the side surfaces S2 of the body member 10, and also include locking surfaces 82s facing the side surfaces S2. Also, the distance between the locking surfaces 82s and corresponding ones of the side surfaces S2 is set to a distance that is the same as or shorter than the thickness of the heaters 30. In addition, the locking structure 80 may be configured of members different from the body member 10 as in the present embodiment, or may be provided integrally with the body member 10.

The connecting structure 90 is one that mutually connects the other end parts of the paired heater holding plates 70, which extend in the direction in which the installation surface S1 faces. Specifically, the connecting structure 90 includes: the through-holes 73h formed in the facing parts 73; a connecting plate 91 laid between the respective facing parts 73; and screws 92 screwed to the connecting plate 91 through the through-holes 73h. The connecting structure 90 is adapted to mutually connect the facing parts 73 formed at the other end parts of the paired heater holding plates 70 in a position facing the installation surface S1 and interposing the respective equipment 20 installed on the installation surface S1.

Further, the paired heater holding plates 70 are configured to bend in mutually facing directions in a state where the hooking parts 72 (the one end parts) are locked by the locking structure 80 and the facing parts 73 (the other end parts) are connected by the connecting structure 90. This allows the heaters 30 to be brought into a state of being pressed toward the side surfaces S2 by the elasticity of the bent heater holding plates 70.

Also, the heater holding plates 70, the plate 81, and the connecting plate 91 are all such that length in the longer direction is the same as or longer than the length of the body member 10 in the longer direction. In doing so, the holding mechanism M is adapted to, while holding the heaters 30 on the side surfaces S2 of the body member 10, configure a housing that houses inside the body member 10 and the respective equipment 20.

Next, an assembly procedure for the fluid control device 100 according to the present embodiment will be described.

First, as illustrated in FIG. 6(a), the plate 81 constituting the locking structure 80 is fixed to the opposite surface S3 to the installation surface S1 of the body member 10. In this case, the locking pieces 82 are arranged separated from the side surfaces S2 of the body member 10. Then, the hooking parts 72 of the paired heater holding plates 70 are inserted between the locking surfaces 82s and the side surfaces S2 and locked to the locking pieces 82. Subsequently, as illustrated in FIG. 6(b), with locking positions to the locking pieces 82 as pivot points, the paired heater holding plates 70 are rotated to positions where the holding parts 71 are substantially parallel to the side surfaces S2. In doing so, the heaters 30 are pressed against the side surfaces S2 by the elasticity of the heater holding plates 70 and brought into a state of closely contacting with the side surfaces S2 of the body member 10. Finally, as illustrated in FIG. 6(c), the facing parts 73 of the paired heater holding plates 70 are mutually connected by the connecting structure 90. Specifically, the paired heater holding plates 70 are connected by screwing the screws 92 passed through the through-holes 73h of the facing parts 73 to the connecting plate 91. In doing so, the heaters 30 are sandwiched between the holding parts 71 of the heater holding plates 70 and the side surfaces S2 of the body member 10, and held in the state of closely contacting with the side surfaces S2.

In such a configuration, since the heater holding plates 70 hold the heaters 30 while pressing the heaters 30 against the side surfaces S2 by their elastic restoring forces, the heaters 30 can be brought into close contact with the body member 10. This allows the heat of the heaters 30 to be efficiently transferred to the body member 10. Also, since the holding mechanism M can also serve as the housing that houses the body member 10 and the respective equipment 20, the need to separately providing the body member 10 with dedicated parts for holding the heaters 30 is eliminated, making it possible to reduce the number of parts. Further, since the facing parts 73 of the paired heater holding plates 70, which face the installation surface S1, are configured to be connected to each other by the connecting structure 90, the connection between both the heater holding plates 70 by the connecting structure 90 can be released from the installation surface S1 side of the body member 10.

In addition, the locking structure 80 may also be another structure, and for example, may be a structure fixed to the side surfaces S2 of the body member 10. Also, the present embodiment is configured to lock the heater holding plates 70 to the locking pieces 82 provided to the plate 81, but, for example, may be configured to lock the heater holding plates 70 to locking holes provided in the plate 81. Further, the connecting structure 90 may be another structure, and for example, may be a structure provided with hooks that mutually engage with the other end parts of the paired heater holding plates 70.

Other Embodiments

As illustrated in FIG. 7(a), as another embodiment according to the first embodiment, the heater holding member 40 may be configured so that the one surface 40x of the heater holding part 40b is tilted from the facing surface 40s toward the side surface S2 side. In such a configuration, when the facing surface 40s is pressed toward the installation surface S1 by the pressing mechanism 50, at least part of the heater holding part 40b is biased toward the side surface S2, increasing a force to closely contact with the side surface S2.

Also, in the above-described first embodiment, the heater holding member 40 includes one member; however, as illustrated in FIG. 7(b), the heater holding member 40 may be configured of multiple members (two members in FIG. 7(b)). In addition, similarly, in the above-described embodiments, the body member 10 is configured of one member, but may be configured of multiple members.

Further, in the above-described first embodiment, the first contact part 60a and the second contact part 60b are respectively configured in parallel planar surface shapes, but as illustrated in FIG. 8(a), may be respectively configured in parallel curved shapes.

In addition, as illustrated in FIG. 8(b), at least one of the installation surface S1 and the facing surface 40s may be provided with a contact surface CS1, CS2 orthogonal to the pressing direction X separately from the first contact part 60a and the second contact part 60b. Such a configuration enables the contact between the contact surfaces CS1 and CS2 to restrict the pressing by the pressing mechanism 50, as well as enables the facing surface 40s to be positioned with respect to the installation surface S1.

Also, in the above-described first embodiment, the heater holding member 40 is configured to be attached to the installation surface S1 of the body member 10, but may be configured to be attached to the opposite surface to the installation surface S1 (to the lower surface when defining the installation surface S1 as the upper surface of the body member 10).

Further, in the above-described first embodiment, the other surface 40y of the heater holding part 40b is provided with the heater 30; however, the one surface 40x of the heater holding part 40b may be provided with the heater 30 and the other surface 40y may be provided with a heat insulating material. Such a configuration allows the heat of the heater 30 to be more efficiently transferred to the body member 10.

In addition, as another embodiment according to the first embodiment, between the first contact part 60a and the second contact part 60b, a washer member whose friction resistance is lower than those of the first contact part 60a and second contact part 60b may be interposed. Further, on the surface of the first contact part 60a, a material whose friction resistance is lower than that of the first contact part 60a may be stacked, and on the surface of the second contact part 60b, a material whose friction resistance is lower than that of the second contact part 60b may be stacked. Such a configuration allows the heater holding member 40 to be easily slid with respect to the body member 10, improving workability. Further, it is also possible to prevent material from being firmly fixed to the first contact part 60a and the second contact part 60b.

In addition, the above-described second embodiment is structured to mutually connect the other end parts of the paired heater holding plates 70 by the connecting structure 90, but may be structured to connect the other end parts (facing parts 73) of the heater holding plates 70 to the body member 10 (specifically, to the installation surface S1 of the body member 10) by the connecting structure 90. In this case, it is only necessary that the connecting structure 90 is configured to include: for example, the through-holes 73h formed in the facing parts 73, screw holes 10h provided in the installation surface S1 of the body member 10; and screws 92 screwed to the screw holes 10h through the through-holes 73h.

Besides, it goes without saying that the present invention is not limited to each of the above-described embodiments, but can be variously modified without departing from the scope thereof.

LIST OF REFERENCE CHARACTERS

100: Fluid control device

10: Body member

S1: Installation surface

S2: Side surface

20: Respective equipment

30: Heater

40: Heater holding member

40a: Attachment part

40s: Facing surface

40b: Heater holding part

40x: One surface

40y: The other surface

50: Pressing mechanism

50a: Screw hole

50b: Long hole

50c: Screw member

60: Slide mechanism

60a: First contact part

60b: Second contact part

M: Holding mechanism

70: Heater holding plate

80: Locking structure

90: Connecting structure

Claims

1. A fluid control device comprising:

a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and a side surface adjacent to the installation surface;

a heater that heats the body member;

a heater holding member that has a facing surface facing the installation surface of the body member and holds the heater along the side surface with the facing surface made to face the installation surface; and

a pressing mechanism that presses the facing surface toward the installation surface.

2. The fluid control device according to claim 1, wherein

the installation surface is one including a first contact part that contacts with the facing surface,

the facing surface is one including a second contact part that contacts with the first contact part, and

at least one of the first contact part and the second contact part is formed in a surface shape that is tilted with respect to a pressing direction of the pressing mechanism.

3. The fluid control device according to claim 2, wherein

the first contact part and the second contact part are ones constituting a slide mechanism that interposes between the installation surface and the facing surface, and

the slide mechanism is one that slides the heater holding member with respect to the body member with use of pressing by the pressing mechanism so that the heater moves toward the side surface.

4. The fluid control device according to claim 2, wherein

the first contact part and the second contact part are configured to make a surface contact with each other.

5. The fluid control device according to claim 1, wherein

the heater holding member is one comprising:

an attachment part having the facing surface; and

a heater holding part that extends from a facing surface side of the attachment part along the side surface, and

the heater is provided on at least one of one surface of the heater holding part and the other surface on a side opposite to the one surface, the one surface facing the side surface.

6. The fluid control device according to claim 5, wherein

the one surface of the heater holding member is tilted from the facing surface toward the side surface.

7. The fluid control device according to claim 5, wherein

the pressing mechanism is one comprising:

a screw hole provided in the installation surface;

a long hole that penetrates through the attachment part and extends in a direction away from the heater holding part; and

a screw member that is screwed to the screw hole through the long hole.

8. A fluid control device comprising: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and paired side surfaces adjacent to the installation surface; heaters arranged along the respective side surfaces; and a holding mechanism that holds the heaters while bringing the heaters into close contact with the side surfaces, wherein

the holding mechanism comprises:

paired heater holding plates that face corresponding ones of the side surfaces of the body member and hold the heaters with the side surfaces;

a locking structure that is provided to the body member and locks one end parts of the paired heater holding plates, the one end parts extending in a direction opposite to a direction in which the installation surface faces; and

a connecting mechanism that mutually connects the other end parts of the paired heater holding plates, the other end parts extending in the direction in which the installation surface faces, and

the heaters are configured to be held brought into close contact with the side surfaces by locking the one end parts of the paired heater holding plates to the locking structure and mutually connecting the other end parts by the connecting mechanism.

9. A fluid control device comprising: a body member that is a block-shaped one having inside a flow path through which fluid flows and has an installation surface on which respective equipment for controlling the fluid flowing through the flow path is installed and paired side surfaces adjacent to the installation surface; heaters arranged along the side surfaces; and a holding mechanism that holds the heaters while bringing the heaters into close contact with the side surfaces, wherein

the holding mechanism comprises:

heater holding plates that face the side surfaces of the body member and hold the heaters with the side surfaces;

a locking structure that is provided to the body member and locks one end parts of the heater holding plates, the one end parts extending in a direction opposite to a direction in which the installation surface faces; and

a connecting mechanism that connects the other end parts of the heater holding plates to the body member, the other end parts extending in the direction in which the installation surface faces, and

the heaters are configured to be held brought into close contact with the side surfaces by locking the one end parts of the paired heater holding plates to the locking structure and connecting the other end parts to the installation surface by the connecting mechanism.