ACTUATOR

Abstract

An actuator includes a suspension plate, an outer frame, one or more supporting elements, a piezoelectric sheet, an inlet plate, and a resonance sheet. The suspension plate, the outer frame, the supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure, and the modular structure has a length, a width, and a height.

Description

CROSS-REFERENCE TO RELATED APPLICATION

This non-provisional application claims priority under 35 U.S.C. § 119(a) to Patent Application No. 110121456 filed in Taiwan, R.O.C. on Jun. 11, 2021, the entire contents of which are hereby incorporated by reference.

BACKGROUND

Technical Field

The present disclosure relates to an actuator, in particular, to an actuator which is miniaturized, thin, and quiet.

Related Art

With the advancement of science and technology, products used in many sectors such as pharmaceutical industries, computer techniques, printing industries, or energy industries are all developed toward elaboration and miniaturization. The actuators are key components that are used in, for example, micro pumps, nebulizers, inkjet heads, or industrial printers. Therefore, how to break through the bottleneck in the technological development of the actuators by a novel structure is the important content of development.

For example, in medical industries, many equipment or apparatuses (such as blood pressure meters or portable or wearable equipment or apparatuses) are driven by pneumatic-power. Such apparatus usually utilizes a motor and a pneumatic valve to achieve the purpose of fluid transmission. However, owing to the bulk volume of the traditional motor and fluid valve, the entire volume of these apparatuses cannot be reduced. As a result, the object of miniaturizing these apparatuses and making them portable cannot be accomplished. Moreover, during operations of the traditional motor and fluid valve, the motor and fluid valves usually generate noise, have poor heat dissipation performances, and make the use of these apparatuses not convenient and comfortable.

Therefore, how to develop a device or an apparatus to improve and address above problem, make traditional device or apparatus driven by pneumatic-power to become smaller, to be miniaturized, to be more quiet, and to dissipate heat more quickly, thereby providing an actuator which is portable and can be used conveniently and comfortably, is an issue of concern recently.

SUMMARY

One object of the present disclosure is to provide an actuator including a piezoelectric sheet in combination with a suspension plate. Through the fluid fluctuation generated by the piezoelectric sheet under a high-frequency vibration, a pressure gradient is generated in the flow path designed in the actuator. As a result, the fluid is transmitted from the intake end to the discharge end through the difference of resistances exist between the intake end and the discharge end of the flow path, so as to overcome the problems occurring in known equipment or apparatus utilizing the pneumatic-power, such as too large in volume, hard to be miniaturized, unable to be portable, and generating loud noises during operation.

Another object of the present disclosure is to provide an actuator wherein the suspension plate, the outer frame, the supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure. The modular structure has a length, a width, and a height which are all of millimeter (mm) scale, micrometer (μm) scale, or nanometer (nm) scale.

To achieve the aforementioned object(s), a general embodiment of the present disclosure provides an actuator including a suspension plate, an outer frame, at least one supporting element, a piezoelectric sheet, an inlet plate, and a resonance sheet. The suspension plate has a first surface and a second surface, and the suspension plate is capable of bending and vibrating. The outer frame is disposed around an outer periphery of the suspension plate. The at least one supporting element is connected between the suspension plate and the outer frame to provide a flexible support for the suspension plate. The piezoelectric sheet is disposed above the first surface of the suspension plate. The inlet plate is disposed on the second surface of the suspension plate. The inlet plate has at least one inlet hole, at least one convergence channel, and a convergence chamber. The at least one inlet hole is configured to introduce a gas flow into the actuator, and the at least one convergence channel is corresponding to the at least one inlet hole for guiding the gas flow introduced from the at least one inlet hole to be converged into the convergence chamber formed by a central recess. The resonance sheet is disposed between the inlet plate and the suspension plate. The resonance sheet has a perforation corresponding to the convergence chamber of the inlet plate, and a movable portion is provided in the periphery of the perforation. The suspension plate, the outer frame, the at least one supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated into a modular structure, and the modular structure has a length, a width, and a height.

To achieve the aforementioned object(s), another general embodiment of the present disclosure provides an actuator including a suspension plate, an outer frame, at least one supporting element, a piezoelectric sheet, an inlet plate, and a resonance sheet. The suspension plate has a first surface and a second surface, and the suspension plate is capable of bending and vibrating. The outer frame is disposed around an outer periphery of the suspension plate. The least one supporting element is connected between the suspension plate and the outer frame to provide a flexible support for the suspension plate. The piezoelectric sheet is disposed above the first surface of the suspension plate. The inlet plate is disposed on the second surface of the suspension plate. The inlet plate has at least one inlet hole, at least one convergence channel, and a convergence chamber. The at least one inlet hole is configured to introduce a gas flow into the actuator, and the at least one convergence channel is corresponding to the at least one inlet hole for guiding the gas flow introduced from the at least one inlet hole to be converged into the convergence chamber formed by a central recess. The resonance sheet is disposed between the inlet plate and the suspension plate. The resonance sheet has a perforation corresponding to the convergence chamber of the inlet plate, and a movable portion is provided in the periphery of the perforation. The suspension plate, the outer frame, the at least one supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated into a modular structure, and the modular structure has a length in a range between 1 nm and 999 nm, a width in a range between 1 nm and 999 nm, and a height in a range between 1 nm and 999 nm.

BRIEF DESCRIPTION OF THE DRAWINGS

The disclosure will become more fully understood from the detailed description given herein below, for illustration only and thus not limitative of the disclosure, wherein:

FIG. 1 illustrates a front exploded view of an actuator, having an inlet plate, a suspension plate, a resonance sheet, a first insulation sheet, a conductive sheet, and a second insulation sheet, according to an exemplary embodiment of the present disclosure;

FIG. 2 illustrates a rear exploded view of the actuator, having the inlet plate, the suspension plate, the resonance sheet, the first insulation sheet, the conductive sheet, and the second insulation sheet, of the exemplary embodiment of the present disclosure;

FIG. 3 illustrates a schematic view for the structure of the actuator of the exemplary embodiment of the present disclosure;

FIG. 4 illustrates a cross-sectional view of the actuator, having the inlet plate, the suspension plate, the resonance sheet, the first insulation sheet, the conductive sheet, and the second insulation sheet, of the exemplary embodiment of the present disclosure; and

FIG. 5A to FIG. 5E illustrate schematic views showing the operation steps of the actuator shown in FIG. 4.

DETAILED DESCRIPTION

The present disclosure will now be described more specifically with reference to the following embodiments. It is to be noted that the following descriptions of different embodiments of this disclosure are presented herein for the purpose of illustration and description only, and it is not intended to limit the scope of the present disclosure.

Please refer to FIG. 1, FIG. 2, and FIG. 4. According to one embodiment of the present disclosure, an actuator 1 including a suspension plate 11, an outer frame 12, at least one supporting element 13, and a piezoelectric sheet is provided. The suspension plate 11 has a first surface 11c and a second surface 11b, and the suspension plate 11 is capable of vibrating and bending. The outer frame 12 is disposed around the outer periphery of the suspension plate 11. The at least one supporting element 13 is connected between the suspension plate 11 and the outer frame 12. In this embodiment, the two ends of each of the supporting elements 13 are connected to the outer frame 12 and the suspension plate 11, respectively, to provide a flexible support for the suspension plate 11. Moreover, at least one clearance 15 is provided between the supporting element 13, the suspension plate 11, and the outer frame 12, so as to allow the gas to pass through the at least one clearance 15. It is noted that, the configurations and the number of the suspension plate 11, the outer frame 12, and the supporting element 13 are not limited to the aforementioned embodiments and can be varied according to practical application requirements. Moreover, the outer frame 12 is disposed around the outer periphery of the suspension plate 11 and has a conductive pin 12c protruding outwardly for electrical connection, but not limited thereto.

In this embodiment, the suspension plate 11 is a stepped structure. That is, in this embodiment, the second surface 11b of the suspension plate 11 further has a protruding portion 11a. The protruding portion 11a may be, but not limited to, a round protruding structure. The second surface 11b of the suspension plate 11 is coplanar with the second surface 12a of the outer frame 12, and the second surface 11b of the suspension plate 11 is also coplanar with the second surface 13a of the supporting element 13. Moreover, a specific depth is provided between the protruding portion 11a of the suspension plate 11 and the second surface 12a of the outer frame 12, the protruding portion 11a of the suspension plate 11 and the second surface 11b of the suspension plate 11, and the protruding portion 11a of the suspension plate 11 and the second surface 13a of the supporting element 13, respectively. The first surface 11c of the suspension plate 11, the first surface 12b of the outer frame 12, and the first surface 13b of the supporting element 13 form a flat coplanar structure, but not limited thereto.

In this embodiment, the piezoelectric sheet 14 is attached to the first surface 11c of the suspension plate 11. In some other embodiments, the configuration of the suspension plate 11 may be a square plate structure with double flat surfaces, but not limited thereto, and the configuration of the suspension plate 11 may be varied according to practical conditions. In some embodiments, the suspension plate 11, the supporting element 13, and the outer frame 12 may be an integrally-formed structure and may be made from a metal plate, for example, but not limited to, a stainless steel plate. In some other embodiments, the side length of piezoelectric sheet 14 is shorter than the side length of the suspension plate 11. In further embodiments, the side length of piezoelectric sheet 14 is equal to the side length of the suspension plate 11, and the piezoelectric sheet 14 is configured as a square plate structure corresponding to the suspension plate 11, but not limited thereto. It is noted that, in this embodiment, the piezoelectric sheet 14 may also have two electrodes formed by silver-palladium alloy doped with graphene materials. The electrodes are provided for reducing the resistance to increase the mobility of charge and increasing the thermal conductivity to dissipate heat quickly. The surface of one of the electrodes is coated with a coating of the thermal conduction layer, which also can increase the thermal conductivity to dissipate heat quickly. The surface of the other electrode is coated with an adhesive layer made of epoxy resin doped with conductive materials, so that the electrode can be adhered to the first surface 11c of the suspension plate 11 through the adhesive layer for reducing the resistance to increase the charge mobility and increasing the thermal conductivity to dissipate heat quickly. The two electrodes are applied with a voltage to drive the suspension plate 11 to vibrate and bent, but not limited thereto. The configuration of the electrodes of the piezoelectric sheet 14 may be varied according to practical requirements.

Please refer to FIG. 1 and FIG. 2. As shown in these figures, in this embodiment, the actuator 1 further includes an inlet plate 16, a resonance sheet 17, a first insulation sheet 18a, a second insulation sheet 18b, and a conductive sheet 19. The suspension plate 11 is disposed in correspondence to the resonance sheet 17. The inlet plate 16, the resonance sheet 17, the outer frame 12, the first insulation sheet 18a, the conductive sheet 19, and the second insulation sheet 18b are sequentially stacked and assembled with each other. The cross-sectional view of the assembled structure of the actuator 1 is shown in FIG. 4.

Please refer to FIG. 1 and FIG. 2. As shown in FIG. 1, in this embodiment, the inlet plate 16 has at least one inlet hole 16a. The number of the inlet hole 16a is preferably four, but not limited thereto. The inlet hole 16a penetrates through the inlet plate 16, so that the gas outside the actuator 1 can flow into the actuator 1 from the at least one inlet hole 16a in response to the atmospheric pressure outside the actuator 1. As shown in FIG. 2, the inlet plate 16 has at least one convergence channel 16b. The convergence channels 16b converges into a convergence chamber 16c formed by a central recess, and the convergence chamber 16c is in communication with the convergence channels 16b. It is noted that, in this embodiment, the inlet plate 16 has a first surface 16d which may be coated with a coating doped with graphene materials to increase thermal conductivity for dissipating heat quickly, but not limited thereto. The coating material on the surface of the inlet plate 16 may be varied according to different requirements. The at least one convergence channel 16b provided on the first surface 16d of the inlet plate 16 is corresponding to the at least one inlet hole 16a, so that the gas flow entering the convergence channel 16b through the at least one inlet hole 16a can be guided and converged into the convergence chamber 16c, so as to deliver the gas flow. In this embodiment, the inlet plate 16 is integrally formed with the inlet hole 16a, the convergence channel 16b, and the convergence chamber 16c. The convergence chamber 16c is formed by a central recess for converging and storing the gas temporarily. In some embodiments, the inlet plate 16 is made of stainless steel, but not limited thereto. In some other embodiments, the depth of the convergence chamber 16c formed by the central recess is substantially equal to the depth of the convergence channel 16b, but not limited thereto. The resonance sheet 17 is made of a flexible material, but not limited thereto. Moreover, the resonance sheet 17 has a perforation 17c in correspondence to the convergence chamber 16c of the inlet plate 16, so as to allow the gas in the convergence chamber to pass through the resonance sheet 17 through the perforation 17c. In some other embodiments, the resonance sheet 17 is made of copper, but not limited thereto. As shown in FIG. 3, it is noted that, in this embodiment, the actuator 1 having the suspension plate 11, the outer frame 12, the supporting element 13, the piezoelectric sheet 14, the inlet plate 16, and the resonance sheet 17 is fabricated as a modular structure, and the modular structure has a length L, a width W, and a height H. In one embodiment, the modular structure has the length in a range between 1 mm and 999 mm, the width in a range between 1 mm and 999 mm, and the height in a range between 1 mm and 999 mm, but not limited thereto. In some embodiments, the modular structure has the length in a range between 1 μm and 999 μm, the width in a range between 1 μm and 999 μm, and the height in a range between 1 μm and 999 μm, but not limited thereto. In some embodiments, the modular structure has the length in a range between 1 nm and 999 nm, the width in a range between 1 nm and 999 nm, and the height in a range between 1 nm and 999 nm. To simplify the description, the actuator 1 in the following descriptions is not limited to the scale of millimeter, micrometer, or nanometer. The scale in the manufacturing process may be varied as millimeter, micrometer, or nanometer scale, depending on different requirements.

In this embodiment, as shown in FIG. 1, FIG. 2, and FIG. 4, the first insulation sheet 18a, the conductive sheet 19, and the second insulation sheet 18b of the actuator 1 are sequentially disposed under the frame 12, and the shape of these elements is also substantially in correspondence to the shape of the outer frame 12. In some embodiments, the first insulation sheet 18a and the second insulation sheet 18b are made of an insulation material (such as plastic, but not limited thereto), so as to provide the function of insulation. In this embodiment, the conductive sheet 19 is made of a conductive material, for example, but not limited to, a metal, so as to provide electrical conduction effect. In this embodiment, the conductive sheet 19 may also have a conductive pin 19a so as to provide electrical conduction effect. The conductive pin 12c is electrically connected to one of the electrodes of the piezoelectric sheet 14, and the conductive pin 19a is electrically connected to the other electrode of the piezoelectric sheet 14.

In this embodiment, as shown in FIG. 4, the inlet plate 16, the resonance sheet 17, the outer frame 12, the first insulation sheet 18a, the conductive sheet 19, and the second insulation sheet 18b are sequentially stacked with each other to form a device for fluid transmission. Moreover, in this embodiment, a gap h is located between the resonance sheet 17 and the outer frame 12, and a filling material, for example, but not limited to, a conductive adhesive, is filled into the gap h between the resonance sheet 122 and the periphery of the outer frame 1232 of the piezoelectric actuator 123. Therefore, a specific depth can be maintained between the resonance sheet 17 and the second surface 11b of the suspension plate 11, thereby the gas flow can be guided to flow more quickly. Moreover, since a proper distance is kept between the protruding portion 11a of the suspension plate 11 and the resonance sheet 17, the contact possibility between these components can be decreased, and thus the noise can be reduced as well. In some other embodiments, the height of the outer frame 12 may be increased to provide a gap between the outer frame 12 and the resonance sheet 17, but not limited thereto.

Please further refer to FIG. 1, FIG. 2, and FIG. 4. In this embodiment, the resonance sheet 17 has a movable portion 17a and a fixed portion 17b. After the inlet plate 16, the resonance sheet 17, and the outer frame 12 are sequentially stacked and assembled with each other, the movable portion 17a and the inlet plate 16 above the movable portion 17a together form a chamber for converging the gas. A first chamber 10 is further formed between the resonance sheet 17, the suspension plate 11, the supporting element 13, and the outer frame 12 for storing the gas temporarily. The first chamber 10 is in communication with the convergence chamber 16c formed by the central recess of the inlet plate 16 through the perforation 17c of the resonance sheet 17. The periphery of the first chamber 10 are in communication with the clearance 15 between the supporting elements 13, so that the first chamber 10 is in communication with the flow path.

Please refer to FIG. 1, FIG. 2, FIG. 4, and FIG. 5A to FIG. 5E. When the piezoelectric sheet 14 is driven by a voltage, the piezoelectric sheet 14 starts to bend and vibrate vertically and reciprocatingly through taking the supporting elements 13 as pivots. As shown in FIG. 5A, when the piezoelectric sheet 14 is driven by a voltage and bends downwardly, the resonance sheet 17 will vertically vibrate along with the piezoelectric sheet 14 in a reciprocating manner since the resonance sheet 17 is a light and thin sheet. That is, in this embodiment, the portion of the resonance sheet 17 corresponding to the convergence chamber 16c will bend and vibrate along with the piezoelectric sheet 14. As a result, the portion of the resonance sheet 17 corresponding to the convergence chamber 16c is the movable portion 17a of the resonance sheet 17. Therefore, when the piezoelectric sheet 14 bends downwardly, the movable portion 17a of the resonance sheet 17 corresponding to the convergence chamber 16c also bends downwardly along with the piezoelectric sheet 14 in response to the introduction and pushing of the gas and the driving of the piezoelectric sheet 14. Hence, the gas outside the actuator 1 flows into the inlet plate 16 through the at least one inlet hole 16a of the inlet plate 16, and the gas is converged into the convergence chamber 16c through the at least one convergence channel 16b. Then, the gas flows into the first chamber 10 through the perforation 17c of the resonance sheet 17 corresponding to the convergence chamber 16c. Thereafter, the resonance sheet 17 will also resonate with the piezoelectric sheet 14 as driven by the vibration of the piezoelectric sheet 14, thereby performing vertical vibration in a reciprocating manner. As shown in FIG. 5B, when the piezoelectric sheet 14 bends downwardly, the movable portion 17a of the resonance sheet 17 also vibrates downwardly and attaches to the protruding portion 11a of the suspension plate 11. Because the distance between the regions except for the protruding portion 11a of the suspension plate 11 and the fixed portion 17b at the two sides of the resonance sheet 17 is not changed, the volume of the first chamber 10 is compressed through the deformation of the resonance sheet 17, and the communication space in the first chamber 10 is sealed, so as to force the gas in the first chamber 10 to be pushed and flowed toward the periphery of the first chamber 10 to pass through the clarence 15 between the supporting elements 13 of the piezoelectric sheet 14 and flowed downwardly. Thereafter, as shown in FIG. 5C, the movable portion 17a of the resonance sheet 17 bends and vibrates upwardly and recovers to its original position, and the piezoelectric sheet 14 is driven to vibrate and bend upwardly, thereby the volume of the first chamber 10 is compressed. However, since the suspension plate 11 is lifted upwardly, the gas in the first chamber 10 still flows toward the periphery of the first chamber 10. The gas contiguously enters the convergence chamber 16c through the convergence channels 16b from the at least one inlet hole 16a of the inlet plate 16. Thereafter, as shown in FIG. 5D, the movable portion 17a of the resonance sheet 17 moves upwardly in resonance with the upwardly vibration of the suspension plate 11. Therefore, the gas is contiguously converged into the convergence chamber 16c from the at least one inlet hole 16a of the inlet plate 16. Last, as shown in FIG. 5E, the movable portion 17a of the resonance sheet 17 also recovers to its original position. Under such configuration, it is noted that, when the resonance sheet 17 performs the vertical vibration in a reciprocating manner, the maximum distance of the vertical displacement of the vibration can be increased through changing the gap h between the resonance sheet 17 and the outer frame 12. In other words, providing the gap h between the resonance sheet 17 and the outer frame 12 allows the vibration of the resonance sheet 17 to have a greater amplitude of up-and-down displacement. Therefore, a pressure gradient can be generated in the flow path designed in the actuator 1, so as to transmit the gas flow rapidly. Moreover, the gas is transmitted from the intake end to the discharge end through the resistance difference between the intake end and the discharge end of the flow path, so as to complete the gas transmission. Moreover, in one embodiment, the actuator 1 still can push the gas into the flow path continuously even in the condition that the discharge end is under a pressure, and the noise generated by the actuator 1 can be reduced as well. Accordingly, by repeating the operation steps of the actuator 1 shown in FIG. 5A to FIG. 5E, a gas transmission from the outside of the actuator 1 to the inside of the actuator 1 can be achieved.

According to one or some embodiments of the present disclosure, through the fluid fluctuation generated by the piezoelectric sheet under a high-frequency vibration, a pressure gradient is generated in the flow path designed in the actuator, so as to allow the fluid to flow rapidly. As a result, the fluid is transmitted from the intake end to the discharge end continuously through the difference of the resistances exist between the intake end and the discharge end of the flow path, so as to allow the fluid to flow rapidly and transmit continuously, thereby the fluid can be transmitted rapidly and quietly. Moreover, the entire volume of the actuator can be reduced, so that the actuator can be miniaturized even to millimeter scale, micrometer scale, or nanometer scale. Furthermore, the present invention can achieve great heat dissipation performance through coating a doped coating material on the surface of the inlet plate and the electrodes of the piezoelectric sheet.

The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.

Claims

1. An actuator comprising:

a suspension plate having a first surface and a second surface, wherein the suspension plate is capable of bending and vibrating;

an outer frame disposed around an outer periphery of the suspension plate;

at least one supporting element connected between the suspension plate and the outer frame to provide a flexible support for the suspension plate;

a piezoelectric sheet disposed above the first surface of the suspension plate;

an inlet plate disposed on the second surface of the suspension plate, wherein the inlet plate has at least one inlet hole, at least one convergence channel, and a convergence chamber; the at least one inlet hole is configured to introduce a gas flow into the actuator, and the at least one convergence channel is corresponding to the at least one inlet hole for guiding the gas flow introduced from the at least one inlet hole to be converged into the convergence chamber; and

a resonance sheet disposed between the inlet plate and the suspension plate, wherein the resonance sheet has a perforation corresponding to the convergence chamber of the inlet plate, and a movable portion is provided in a periphery of the perforation;

wherein the suspension plate, the outer frame, the at least one supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure, and the modular structure has a length, a width, and a height.

2. The actuator according to claim 1, wherein a first chamber is provided between the resonance sheet, the suspension plate, the at least one supporting element, and the outer frame, so that the piezoelectric sheet is driven and bent in the first chamber; when the suspension plate vibrates, the gas flow is introduced into the actuator from the at least one inlet hole of the inlet plate, converged into the convergence chamber through the at least one convergence channel, flows through the perforation of the resonance sheet and enters the first chamber, thereby the suspension plate and the movable portion of the resonance sheet generates resonance effect for transmitting the gas flow.

3. The actuator according to claim 1, wherein the modular structure has the length in a range between 1 mm and 999 mm, the width in a range between 1 mm and 999 mm, and the height in a range between 1 mm and 999 mm.

4. The actuator according to claim 1, wherein the modular structure has the length in a range between 1 μm and 999 μm, the width in a range between 1 μm and 999 μm, and the height in a range between 1 μm and 999 μm.

5. The actuator according to claim 1, wherein the modular structure has the length in a range between 1 nm and 999 nm, the width in a range between 1 nm and 999 nm, and the height in a range between 1 nm and 999 nm.

6. The actuator according to claim 1, wherein the suspension plate is square-shaped and has a protruding portion.

7. The actuator according to claim 1, wherein the actuator further comprises a conductive sheet, a first insulation sheet, and a second insulation sheet, and wherein the inlet plate, the resonance sheet, the outer frame, the first insulation sheet, the conductive sheet, and the second insulation sheet are sequentially stacked and assembled.

8. An actuator comprising:

a suspension plate having a first surface and a second surface, wherein the suspension plate is capable of bending and vibrating;

an outer frame disposed around an outer periphery of the suspension plate;

at least one supporting element connected between the suspension plate and the outer frame to provide a flexible support for the suspension plate;

a piezoelectric sheet disposed above the first surface of the suspension plate;

an inlet plate disposed on the second surface of the suspension plate, wherein the inlet plate has at least one inlet hole, at least one convergence channel, and a convergence chamber; the at least one inlet hole is configured to introduce a gas flow into the actuator, and the at least one convergence channel is corresponding to the at least one inlet hole for guiding the gas flow introduced from the at least one inlet hole to be converged into the convergence chamber; and

a resonance sheet disposed between the inlet plate and the suspension plate, wherein the resonance sheet has a perforation corresponding to the convergence chamber of the inlet plate, and a movable portion is provided in a periphery of the perforation;

wherein the suspension plate, the outer frame, the at least one supporting element, the piezoelectric sheet, the inlet plate, and the resonance sheet are fabricated as a modular structure, and the modular structure has a length in a range between 1 nm and 999 nm, a width in a range between 1 nm and 999 nm, and a height in a range between 1 nm and 999 nm.