Sputtering target

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Description

FIG. 1 is a perspective view showing substantially the top of a sputtering target of the present invention;

FIG. 2 is a perspective view showing substantially the bottom of a sputtering target of the present invention;

FIG. 3 is a top view of a sputtering target of the present invention;

FIG. 4 is a side view of a sputtering target of the present invention;

FIG. 5 is a bottom view of a sputtering target of the present invention; and,

FIG. 6 is a cross-sectional view of a sputtering target of the present invention.

Referenced Cited
U.S. Patent Documents
5460708 October 24, 1995 Takeuchi et al.
5480530 January 2, 1996 Zejda
5529673 June 25, 1996 Strauss et al.
Patent History
Patent number: D381030
Type: Grant
Filed: Nov 21, 1995
Date of Patent: Jul 15, 1997
Inventor: Avi Tepman (Cupertino, CA)
Primary Examiner: Antoine Duval Davis
Law Firm: Patterson & Streets
Application Number: 0/47,081
Classifications
Current U.S. Class: Heat Treatment, Welding Or Brazing (D15/144); Lubricator Or Oil Collector. (D15/150); Miscellaneous (D15/199)
International Classification: 1509;