Sputter target container

- Tosoh SMD, Inc.
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Description

FIG. 1 is a top orthogonal view of the container;

FIG. 2 is a top plan view of the container;

FIG. 3 is a side elevational view of the container; and,

FIG. 4 is a bottom plan view of the container.

Referenced Cited
U.S. Patent Documents
D292176 October 6, 1987 Kuerti
D348220 June 28, 1994 Herzog et al.
D352896 November 29, 1994 Jones
D359448 June 20, 1995 Aronson
3464579 September 1969 Asenbauer
3746205 July 1973 Helguera
3868041 February 1975 Knize
5282943 February 1, 1994 Lannutti et al.
Patent History
Patent number: D382111
Type: Grant
Filed: Dec 11, 1995
Date of Patent: Aug 12, 1997
Assignee: Tosoh SMD, Inc. (Grove City, OH)
Inventors: Steven L. Bardus (Westerville, OH), Thomas J. Ashbrook (Columbus, OH), Timothy A. Friar (Columbus, OH)
Primary Examiner: Philip S. Hyder
Law Firm: Biebel & French
Application Number: 0/47,704
Classifications
Current U.S. Class: D/3273; D9/428
International Classification: 0301;