Abstract: A sacrificial fabric structure is disclosed for protection from the moving chain in chain saws. The structure includes fabric woven in a loose satin weave.

Abstract: Stressed-skin panels are provided having internal open-cell grids molded from material such as fibers, and methods and apparatus for the production thereof are disclosed. The invention utilizes a porous screen having a plurality of elastomeric pads spaced apart thereon. Fiber dispersed in fluid is introduced into the apparatus and over and around the pads. Pressure exerted thereon expels fluid through the screen and consolidates the fibers to form a panel. The pads are designed and constructed in a manner so as to consolidate the fiber mat located below the pads compressed by the pressure, so that the finished panel includes an integrally-molded flange. The height, shape and/or spacing of the pads in the present invention advantageously provide improved mold release and greater resistance to compression set after repeated use. The pads provide greater consistency and improved quality in the flange formation on the panels.

Abstract: When a temporary adhesive layer for peelably bonding a transfer-receiving material to a thermal transfer sheet comprising a substrate film and a heat-fusible ink layer disposed on one side thereof is caused to comprise a specific adhesive, an excellent composite thermal transfer material is provided. In such a composite thermal transfer sheet, the thermal transfer sheet is firmly bonded to the transfer-receiving material so as not to cause wrinkles or deviation, both of these members may easily be peeled from each other so that the ink layer is exactly transferred to the paper in a transfer region and it is not transferred thereto at all in a non-transfer region, whereby the transfer-receiving material is not contaminated. An antistatic treatment provides a composite thermal transfer sheet causing no trouble due to charging at the time of or after printing operation.

Abstract: An effect coating material and an effect coating, especially for vehicle bodies, containing interference pigments, in which the interference pigments are composed of three-dimensionally crosslinked, liquid-crystalline, main-chain polymers, which include main-chain mesogens having an at least approximately chiral nematic arrangement, and which are formed from at least one esterified cellulose ether.

Abstract: A semiconductor integrated circuit is made by a process including the formation on a surface of a semiconductor integrated circuit processing wafer of a layer of material applied to the wafer by plasma enhanced chemical vapor deposition (PECVD). The layer of material may include plural sub-layers, the thicknesses of which are additive to result in the thickness of the layer of material itself. The sub-layers of material may have non-uniform thicknesses across a dimension of the processing wafer because of compromises in the process which are necessary to control various parameters of the material layer other than its thickness. These non-uniformities of thickness of the sub-layers may be controlled to offset one another so that the resulting layer of material has a substantially uniform thickness across the dimension of the processing wafer.

Abstract: A transfer printing dye-sheet for printing a dye of a pattern and/or an image thereon to a receiver sheet is disclosed. The transfer printing dye-sheet is composed of a substrate having on one surface thereof a pressure-sensitive film binder, a first layer of transparent oil coated onto the pressure-sensitive film binder, a layer dye of pattern and/or image which is ultraviolet light-curable being printed onto the first layer of transparent oil, a second layer of transparent oil coated onto the dye of pattern and/or image, and a transfer film covering the second layer of transparent oil. The process of preparing the transfer printing dye-sheet is also disclosed. The transfer printing dye-sheet can transferably print more beautiful and reliable patterns and/or images onto a receiver sheet in an economical manner.

Abstract: Spunbond multicomponent filaments and nonwoven webs made from the filaments are disclosed. In accordance with the present invention, the multicomponent filaments contain a crimp enhancement additive. Specifically, the crimp enhancement additive is added to one of the polymeric components in order to accelerate its solidification rate. The additive enhances crimp, allows for highly crimped filaments to be made at smaller deniers, and produces low density webs with improved stretch and cloth-like properties. Specifically, the additive incorporated into the filaments is a nonionic surfactant such as an alkyl ether alkoxylate, a siloxane alkoxylate, an ester of a polyalkylene glycol, a polysaccharide derivative, a glycerol ester, or mixtures thereof.

Abstract: The present invention provides a conductive paste and a conductor and a ceramic substrate using the conductive paste which, when used as a conductive material for a ceramic substrate, can prevent cutting of the conductor in a through hole and peeling of the conductor from the through hole side wall during burning, thereby improving the yield and reliability of through hole conduction. The conductive paste contains Cu powder, Ni powder, glass frit and an organic vehicle, the amount of the Ni powder being about 1 to 20% by weight relative to the total amount of the Cu powder and the Ni powder, and the amount of the glass frit being about 1 to 40% by weight relative to the total amount of the Cu powder, the Ni powder and the glass frit.

Abstract: A modular structure for providing electrical interconnections achieves greatly increased wiring density by forming vias and wiring patterns by chemical (e.g. lithographic) processes rather than by mechanical processes such as punching of vias and screening patterns of conductive paste. A basic module is a power core comprising an apertured metallic foil with an insulator applied to surfaces thereof, extending through at least one aperture and exposing the metallic foil in at least one aperture. The foil in the power core provides stiffness to facilitate subsequent handling and electrical shielding between conductive layers as well as a potential power connection. Via connections of increased conductivity and robustness are formed by plating the interior of vias after lamination of a desired combination of power cores and signal cores.

Abstract: A surface structure of a magnetoresistive film includes a magnetosensitive portion surrounded by a peripheral portion including at least an electrode film and a magnetic film underlying the electrode film for applying a unidirectional magnetic field onto the magnetosensitive portion. Side edges of the magnetoresistive film are covered by the magnetic film to be separated from the electrode film. An insulation film is on at least a peripheral area of a top surface of the magnetoresistive film so that a part of the electrode film extends on the insulating film so that the top surface of the magnetoresistive film is separated by the insulating film from the electrode film so as to keep an effective area of the magnetoresistive film in an actual area thereof.

Abstract: The present invention is a backing paper for photographic roll film. The backing paper includes a paper base having a first side and a second side. Superposed on the first side of the paper base is an antistatic opacifying layer which includes polyethylene and at least 10 weight percent of conductive carbon black particles, the carbon black particles having a surface chemistry of less than 1.5 percent by weight.

Abstract: A cutting member to be connected to a material removing device such as an annular bit, a drilling bit, a cutting bit, a saw and the like, consists of a binder agent, diamond grains and a small amount of hard material particles. The hard material particles reinforce the binder agent and supports the anchorage of the diamond grains.

Abstract: A chemically adsorbed film having a surface layer containing fluorine groups and a stem layer chemically bonded by siloxane bonds to a substrate is formed on the surface of a frictional portion of a machine part such as a gear or a bearing or on the surface of a game ball. An excellently self-lubricating low frictional resistance machine part or game ball thus can be obtained. A frictional portion of a gear or the like, made of SiO.sub.2 or like ceramic material, is dipped and held in a solution containing a surface active material, e.g.,CF.sub.3 (CF.sub.2).sub.7 (CH.sub.2).sub.2 SiCl.sub.3dissolved in a non-aqueous solvent. A hydrochloric acid removal reaction is brought about between SiCl groups of the material, which contains a fluorocarbon and a chlorosilane group, and hydroxyl groups numerously present on the SiO2 surface, thus forming bonds ofCF.sub.3 (CF.sub.2).sub.7 (CH.sub.2).sub.2 Si(O--).sub.3over the entire frictional portion surface.

Abstract: A coated substrate having a material substrate, and a coating composition fixed to a surface of the material substrate as a surface layer, the surface layer containing a hydrophilic resin which swells water but is not washed off by water, and which is solid in air at ambient temperatures that are encountered when said coated substrate is functioning as a reusable printing sheet and from which surface layer prior printing deposits can be readily removed, and when which the coated substrate has a surface resistivity of to 10.sup.5 to 10.sup.13 .OMEGA./.quadrature. at 25.degree. C., 50% RH after being dipped in water for 5 minutes and dried with a hot air of 60.degree. to 90.degree. C. for 5 minutes.

Abstract: A method of forming a magnetic structure having layers with different magnetization orientations provided by a common magnetic bias layer includes the steps of depositing an antiferromagnetic layer between first and second ferromagnetic layers. During the deposition of the first and second ferromagnetic layers, magnetization fields of different orientations are employed separately to induce different directions of magnetization in the first and second layers. The different directions of magnetization in the first and second layers are sustained, through the process of exchange coupling, by the interposed antiferromagnetic layer which serves as the bias layer. A magnetic structure thus fabricated, can be used as a read transducer capable of generating differential signals with common mode noise rejection, and can be used as a magnetic pole for a magnetic head with reduced Barkhausen noise.

Abstract: Cotton/nylon fiber blends have been discovered which are suitable for use in the warp yarns of durable fabrics dyed in light shades with permanent antistatic properties.

Abstract: A coating for sealing carbon-carbon composites against hydrogen. The coating comprises a first layer of silicon carbide and a second layer of a glass, glass-ceramic or a low-melting-point metal such as tin or an alloy thereof. Particularly when such second layer is a glass, e.g. an SiO.sub.2 -containing glass, or a glass-ceramic, preferably the silicon carbide coating is pretreated, e.g. by oxidation thereof to form a thin layer of SiO.sub.2 prior to application of the glass layer. The glass layer can be an SiO.sub.2 glass formed by sputtering or by decomposition of tetraethylorthosilicate (TEOS) applied to the oxidized silicon carbide coating. An alkali metal oxide, e.g. Na.sub.2 O, or an alkaline earth metal oxide, e.g. BaO, can be added to the SiO.sub.2 glass.

Abstract: A film to be laminated on a metal, which is formed of a polycarbonate resin having a high concentration of terminal hydroxyl groups or a composition comprising said resin and a polyester resin or a film to be laminated on a metal, which is formed by laminating the above film and a polyester film. The film is excellent in adhesion to a metal plate, moldability, heat resistance, retort resistance, odor retention property, impact resistance dent resistance and processability into a can, such as drawing fabrication, ironing fabrication or the like for producing metal cans.

Abstract: Film of at least two layers having at least one side softening at a lower temperature and at least one side softening at a higher temperature, wherein the higher-softening side substantially consists of a thermoplastic polyurethane which softens at above 100.degree. C. on a Kofler hot bench and the median of the softening range is at least 15.degree. C. above that of the lower-softening layer and the matrix component of the lower-softening side consists of at least one hot-bonding thermoplastic material from the group comprising polyamides, polyesters and polyurethanes having a median of the softening range on a Kofler hot bench of below 100.degree. C. and at least one thermoplastic additive component containing hydrocarbon is added to the lower-softening layer.

Abstract: A release coating suitable for on bowed rolls, press rolls, and other machine elements comprises an adhesive layer and a release layer. The adhesive layer includes an acrylated monomer, an acrylated urethane, and a diacrylated aromatic monomer. The release layer includes these three components and an acrylated polysiloxane. With these components, the release coating has superior release properties as well as good abrasion resistance and hardness.

Abstract: UV absorbing, colored film-covered glass articles comprising covering, on a surface of a glass substrate, a UV absorbing, colored film which comprises, as main components expressed by wt %, 5.about.50 of silicon oxide, 5.about.70 of titanium oxide, 20.about.80 of cerium oxide, 5.about.30 of coloring fine particles of at least one member selected from the group consisting of gold, silver, platinum, palladium, cadmium sulfide and cadmium selenide, and 0.about.30 of at least one coloring metal oxide selected from the group consisting of cobalt oxide, chromium oxide, copper oxide, manganese oxide, nickel oxide and iron oxide.The UV absorbing, colored film-covered glass articles can be arbitrarily controlled with respect to the color tone, the UV transmittance, and the visible light transmittance.

Abstract: The invention provides a pressure-sensitive adhesive composition for medical applications comprising a blend of at least two components comprised of about 5 to about 95% by weight of a first component comprised of at least one acrylic pressure-sensitive adhesive and about 5 to about 95% by weight of a second component comprised of either (a) at least one elastomer with a tackifying resin, or (b) at least one thermoplastic elastomer, wherein the resulting pressure-sensitive adhesive demonstrates a T.sub.0 of at least 1 N/dm and a T.sub.48 of less than 12 N/dm when adhered to skin. The pressure-sensitive adhesive composition is prepared either in the presence of a solvent or is alternatively prepared by melt blending. A method of preparing such an adhesive is also disclosed.

Abstract: An article such as a spacecraft thermal radiator includes a substrate having a white thermal control coating thereon. The thermal control coating is formed of a matrix of a silica/silicate transformation product of a ceramic precursor, and a plurality of doped zinc oxide pigment particles distributed in the matrix. The zinc oxide pigment particles are doped with an element that forms shallow donorlike states in the zinc oxide. The coating has a solar absorptance of from about 0.2 to about 0.3 and an initial electrical resistivity of from about 1.times.10.sup.6 ohms per square to about 1.times.10.sup.8 ohms per square. The coating is stable at continuous operating temperatures of 225.degree. C., with short-term exposures of up to 800.degree. C.

Abstract: A coextruded, biaxially orientated film comprising a base layer, which comprises a polypropylene or a polypropylene mixture, and at least one top layer comprising olefinic polymers. The top layer comprises a combination of inorganic and/or organic particles and tertiary aliphatic amine of the formula I ##STR1## in which R.sup.1 essentially is an at least partially unsaturated alkyl radical having at least 18 carbon atoms or an essentially completely saturated alkyl radical having 8 to 26 carbon atoms andR.sup.2 and R.sup.3 are identical or different and are R.sup.4 --CH.sub.2 OH, in which R.sup.4 is an essentially saturated C.sub.1 -C.sub.6 -alkyl radical.The film is useful, for example, as a label or wrapping.

Abstract: A magneto-optical recording medium improved in reproduction stability and carrier-to-noise ratio by enlarging the magnetic anisotropy of a magnetic film. The magneto-optical recording medium is composed of a transparent substrate, a first dielectric film laminated on the transparent substrate, a magnetic film laminated on the first dielectric film, and a second dielectric film laminated on the magnetic film. The second dielectric film is formed from a material different from a material of the first dielectric film, and has film stress different from film stress of the first dielectric film. Accordingly, the coercive force and the magnetic anisotropy of the magnetic film can be enlarged.

Abstract: A method for use with a direct metal bonding type process in which a metal layer is bonded to an insulating layer. The metal layer is applied to the insulating layer to enable a direct metal bond to be formed between the layers. The integrity of the bond between a portion of the layers is reduced by providing, prior to bonding, an interrupter between the portion of the layers. A structure in which a metal layer is directly metal bonded to an insulating layer and includes an interrupter between a portion of the metal layer and a portion of the insulating layer. The interrupter reduces the integrity of the bond between the portion of the metal layer and the portion of the insulating layer. The structure includes other features similar to those set forth with respect to the above described method.

Abstract: A multilayered ceramic topcoat of a thermal barrier coating system is useful for high temperature corrosive applications such as hot section components in gas turbine engines. The ceramic topcoat includes at least two layers, each having generally columnar grain microstructures with different grain orientation directions. A preferred method of producing the multilayered ceramic topcoat includes positioning a superalloy substrate at a first angled orientation relative to a ceramic vapor cloud in an electron beam physical vapor deposition apparatus for a time sufficient to grow a first ceramic layer. The substrate is then reoriented to a second, different angled orientation for a time sufficient to grow a second ceramic layer. The ceramic layers exhibit columnar microstructures having respective grain orientation directions which are related to the first and second substrate orientations.

Abstract: Disclosed is a nickel layer formed on a substrate by sputtering, in which nickel layer a percent ratio of an X-ray diffraction peak intensity of the (200) plane of the nickel layer to that of the (111) plane of the nickel layer is not less than 10%. This nickel layer has a reduced stress, and therefore, lessens a bending of a substrate. The nickel layer is formed by a process for sputtering nickel on a substrate, comprising supplying an argon gas into a vacuum chamber, adjusting a pressure of the argon gas in the vacuum chamber to a predetermined value, ionizing the argon gas, bombarding a target containing nickel with the ionized argon gas, to sputter nickel atoms, and depositing the sputtered nickel atoms onto the substrate, wherein the predetermined pressure of the argon gas is not lower than 12 mTorr.

Abstract: Sliding contacts comprising alloys such as Pd/Cu/Ag, Pt/Cu/Ag, Pd/Cu/Ag/Ni, Pt/Cu/Ag/Ni, Ag/Pd/Cu,Au, Ag/Pt/Cu/Au and two-layered composites comprising a surface layer of one of the foregoing alloys and a base layer comprised of copper or a copper-containing alloy. Also, three-layered composites comprising a surface layer of one of the foregoing alloys, an intermediate layer of one of the foregoing alloys and a base layer comprised of copper or a copper-containing alloy as well as direct current motors comprising commutators comprising a three-layered composite.

Abstract: An electrically activated light emitting cylindrical or other shaped composite filament. A core conductor is optionally surrounded by a first optional insulation layer, surrounded by an outer electrode and an electroluminescent phosphor. The entire assembly may be coated with a second insulation layer. Light is produced by the phosphor when the core conductor and the outer electrode are connected to and energized by an appropriate electrical power supply. The filament may be used to form various one-, two- and three-dimensional light emitting objects.

Abstract: The present invention relates to a fluorene-based alternating polymer having the following formula (I) to be used as light emitting materials of electroluminescent elements, and further relates to electroluminescent elements having an anode/luminescent layer/cathode structure, in which the fluorene-based alternating polymer is used as light emitting materials of the luminescent layer, or having a transporting and/or reflection layer added thereto, if necessary. ##STR1## wherein R, R', X, Ar and n are defined as above.

Abstract: A process for the preparation of polymers comprising: polymerizing at least one monomer of the formula X--CH.sub.2 --Ar--CH.sub.2 --X' in the presence of a base and at least one chain end controlling additive of the formula R--H to form a soluble conjugated poly(arylene vinylene) of the formulaR--CH.sub.2 --?AR--CH.dbd.CH--!.sub.n --Ar--CH.sub.2 --Rwhere X and X' are electron withdrawing groups, R--H is a compound containing at least one acidic proton, R is a nucleophile, Ar is an aryl or aromatic group with from 5 to 30 carbon atoms, and n represents the number of repeating segments.

Abstract: A process and structure wherein a film comprised of a perovskite or a spinel is built epitaxially upon a surface, such as an alkaline earth oxide surface, involves the epitaxial build up of alternating constituent metal oxide planes of the perovskite or spinel. The first layer of metal oxide built upon the surface includes a metal element which provides a small cation in the crystalline structure of the perovskite or spinel, and the second layer of metal oxide built upon the surface includes a metal element which provides a large cation in the crystalline structure of the perovskite or spinel. The layering sequence involved in the film build up reduces problems which would otherwise result from the interfacial electrostatics at the first atomic layers, and these oxides can be stabilized as commensurate thin films at a unit cell thickness or grown with high crystal quality to thicknesses of 0.5-0.7 .mu.m for optical device applications.

Abstract: An electrocatalyst comprising an alloy of platinum with a base metal selected from the group consisting of gallium, vanadium, chromium, manganese, iron, cobalt, nickel and copper, having a structure of vacant lattice site type lattice defects; the alloy being supported on a conductive carbon powder. The electrocatalyst is useful as a platinum-supported catalyst for an electrode, and has a superior electrochemical oxygen reduction activity and has platinum alloy particles having less base metal component.

Abstract: A battery sealing structure is provided, which can provide an excellent seal for a battery. The sealing structure has an explosion-proof function and contributes to improved battery assembling operation efficiency. A three-part stack, including a cap member (3), a PTC element (4) and a safety valve (5), is inserted in a gasket (8). The safety valve has the same outer diameter as the cap member (3) and has a breakable portions capable of being broken in the event of an increase of pressure in the battery. The gasket (8), made of a soft synthetic resin, is inserted in a battery housing (2). The stack is set on an upper surface of a stepped portion (8a) of the gasket such that its outer edge is in close contact with the inner periphery of the gasket.

Abstract: A hydrogen absorbing alloy electrode contains an alloy which comprises particles A of a first hydrogen absorbing alloy and particles B of a second hydrogen absorbing alloy of a composition different from the composition of the first alloy joined to the particles A, with a joint layer C formed at the resulting joint interfaces and having a new composition containing the component elements of the first and second alloys. In a specific embodiment, particles A of a first hydrogen absorbing alloy having a CaCu.sub.5 -type structure are joined to particles B of a second hydrogen absorbing alloy having a Zr--Ni Laves-phase structure. In another embodiment, particles A of a first hydrogen absorbing alloy having a CaCu.sub.5 -type structure are joined to particles B of a second hydrogen absorbing alloy having a CaCu.sub.5 -type structure and different form the first alloy in composition.

Abstract: At step S21, a residual amount judging section of abattery residual amount display circuit measures a battery voltage. If a mode transition is detected at step S22, the process returns to step S21 without executing the subsequent steps. If it is judged at step S23 that the operation mode is a reception-waiting mode, the process goes to step S24, where the battery amount judging section judges a battery residual amount by comparing the detected battery voltage with threshold values. If the operation mode is judged to be a transmission mode, the battery residual amount judging section determines a voltage drop during a transmission at step S25, and converts the voltage drop into a battery voltage of a reception waiting mode at step S26 by subtracting the voltage drop from a batter voltage obtained in a reception waiting mode immediately before the mode transition.

Abstract: A nickel-hydrogen battery cell is provided with a pressure vessel made up of upper and lower vessel elements. The lower vessel element has a flange section on the outer wall thereof. A coil heater is attached to the flange section. The temperature of the pressure vessel is controlled by heating the flange section by means of the coil heater. The pressure vessel is assembled with reference to a fixing plate by coupling the flange section to the surface of the fixing plate.

Abstract: The battery of the invention includes at least one electrochemical cell for use and recharging underwater, particularly seawater, at a pressure at or greater than atmospheric pressure. The battery has an anode, a cathode, an associated electrolyte in a housing, and a pressure compensation fluid which has a density greater than water, but preferably between the density of water and the density of the electrolyte. Preferably the pressure compensation fluid has a density of about 1.2 g/cm.sup.3, and is non-conductive. Apparatus to compensate for changes in volume are provided, as are components for the escape of internally generated gases.

Abstract: Sealed lead-acid cells are disclosed which include an internal cell restraint contacting the interior surface of the cover and positioned between the positive plates and the cover, the internal cell restraint cooperates with an external cell restraint, such as a coated metal face plate, to direct positive plate growth which occurs in service away from the cover, the features disclosed allowing plastic-to-plastic terminal post-cover seals to be used and allow cells of capacities of up to 2,000 Ampere Hours or more to be provided.

Abstract: Disclosed is a nickel electrode for secondary battery, which ensures high packing density of an active material and improvement in a efficiency factor of the active material. The nickel electrode comprises a current collector supporting an active mixture material containing Ni(OH).sub.2 powder and CoO powder and/or Co(OH).sub.2 powder as essential components, wherein said Co(OH).sub.2 powder and/or CoO powder are spherical or almost spherical in shape.

Abstract: A method and an apparatus are disclosed for enhancing the solution diffusibility of a developing liquid in a semiconductor wafer developing unit through the agitation of the liquid by acoustic power. Two embodiments are described using sonic and ultrasonic waves. In the first embodiment, a sonic wave couples into the developing liquid, agitating it and thereby enhancing its solution diffusibility. In the second embodiment, an ultrasonic wave couples into the semiconductor wafer, causing the photoresist pattern to vibrate, again enhancing the solution diffusibility of the developing liquid.

Abstract: A control negative for use in setting up exposure conditions for three colors in a photo-printer contains a mosaic pattern in a frame. The mosaic pattern is constituted of a plurality of segments of different densities and sizes. The segments are arranged such that the same area transmittance density can be obtained when density values are measured from different areas of the frame. The control negative is useful for different type photo-printers having different photometric areas for measuring the area transmittance density of the control negative.

Abstract: An optical exposure mask for patterning an optical beam comprises an etching stop layer of a material that is substantially transparent with respect to the optical beam, a transparent pattern provided on one of upper and lower major surfaces of the etching stop layer, and an opaque pattern provided on one of the upper and lower major surfaces of the etching stop layer for patterning the optical beam, wherein the material for the etching stop layer is selected from a group essentially consisted of Al.sub.2 O.sub.3, MgO and a mixture thereof, and the etching stop layer has an etching rate that is substantially smaller than the etching rate of a material forming the transparent pattern for any of dry and wet etching processes.

Abstract: A phase shifting mask can be used with exposure lights of two different wavelengths. The depth of the phase shifting layer is calculated and fabricated such that it shifts a first exposure light about 180.degree. and a second exposure light about 180.degree..

Abstract: Hydrogen fluoride undercut of oxide layers may be reduced by using a low pressure mixture of gaseous hydrogen fluoride and gaseous ammonia mixture. Organic photoresists can be used as a masking material when using the gaseous hydrogen fluoride/ammonia mixture without resulting in an enhanced reaction rate. In addition, because of the reaction conditions, the dimensions in the oxide layer being etched can be specifically sized smaller than openings made in the overcoating masking material.

Abstract: A process is disclosed for producing a structured mask for use in reproducing structures of that mask on an object with the aid of electromagnetic or particulate radiation, in particular for ion beam lithography. A flat smooth substrate of more than 20 .mu.m in thickness is selected and a thin diaphragm is produced from that substrate by etching one of the sections removed from the edging to a depth of c. 0.5-20 .mu.m, the tensile stress within the diaphragm being greater than 5 MPa. Lithographic structures are then formed on a central region of the diaphragm with a tensile stress of more than 5 MPa; apertures are etched into the diaphragm to form the mask structures and the effective thickness inside a diaphragm region substantially enclosing the mask structures is reduced, causing the central region containing the structures to be joined to the substrate edging elastically in such a way that the mean tensile stress within this central region is reduced to below 5 MPa.

Abstract: Methods are disclosed for manufacturing masks for charged-particle-beam (CPB) or X-ray transfer. The masks have substantially no pattern defects. In a representative method for making stencil masks, the mask is defined using multiple subfields each having a respective pattern of voids. The subfields are separated from each other by boundary regions lacking any pattern features. The boundary regions include supports to provide the mask with physical and thermal stability. The supports are formed by an etching step in which relatively large amounts of substrate are removed. In the methods, the mask pattern is formed, inspected, and "repaired" as required before performing the etching step that forms the supports. Thus, the forming, inspection, and repair steps can be performed before the mask is made too delicate.

Abstract: A method for producing a color filter involves (A) forming a photosensitive coating film on at least a transparent electrically conductive layer of a substrate having both the transparent electrically conductive layer and a light-intercepting layer on its outermost surface, and exposing the photosensitive coating film to light in a first irradiation amount through a mask having a predetermined pattern of a certain light transmittance and at least once displacing the mask to another position on the photosensitive coating film and exposing the photosensitive coating film to light in a second irradiation amount different from the first irradiation amount through the mask; and (B) developing and removing a photosensitive coating film portion exposed to light in one of smallest and largest irradiation amounts for exposing the transparent electrically conductive layer and electrodepositing a colored coating on the exposed electrically conductive layer for forming a colored layer thereon, operation of developing and

Abstract: A method of forming a focus/exposure matrix on a wafer is provided, wherein the wafer is used to calibrate the photostepper's focus and exposure time settings. The focus/exposure matrix comprising a series of patterns disposed on the wafer. The patterns being arranged in rows and columns. The patterns in a row being characterized by having been formed with substantially the same exposure time and an effective focus that increments between successive row patterns by an amount substantially corresponding to half the focus resolution of the photostepper. The patterns in a column being characterized by having been formed with substantially the same effective focus and an exposure time that increments between successive column patterns by a finite amount.