Abstract: An optical disk pasting apparatus 1 for pasting two disks by overlapping the second disk D2 on the first disk D1 on which an adhesive agent 4 is coated, is featured in that said second disk D2 is overlapped on the first disk D1 while adsorbing and holding said second disk D2 by warping so that the second disk is swelled in a direction (the direction of the arrow X) opposite to the first disk D1 side opposed the second disk D2, wherein closed space 5 formed between both disks D1 and D2 is vacuumed and attracted by bringing the outside areas of the first disk D1 and the second disk D2 in contact with each other.

Abstract: Method of producing a shielding casing (4) in which there is provided a sealing and shielding profile section (9) which fills a gap between first and second adjoining casing portions (1, 2) and which comprising pasty material is applied under pressure from a coordinate-controlled applicator device (5) having an applicator needle or nozzle directly on to the first casing portion and then sets there elastically adhering thereto in self-supporting relationship, wherein the sealing and shielding profile section is produced by simultaneously applying at least one first material (8a) with material properties adapted for a good sealing action and a second material (8b) with material properties adapted to a good shielding action, from the applicator needle or nozzle (6) provided with at least a first and a second passage (6a, 6b), whereby the second material firmly adheres to the first material.

Abstract: A process for mounting a semiconductor chip onto a circuit board adheres resin of ACF to a peripheral lateral surface of the semiconductor chip to a higher height level while avoiding the generation of voids within the resin of the ACF extending out of the periphery of the semiconductor chip. A semiconductor chip is mounted onto a circuit board via ACF and is pressed against the circuit board while heating the ACF and the peripheral region thereof extending out of the periphery of the semiconductor chip. A frame for adding a load is placed on the peripheral region of the ACF so that a gap is formed between the inside surface of the frame and the lateral surface of the semiconductor chip, and presses the peripheral region of the ACF against the circuit board, whereby the resin of the ACF is forced into the gap and adheres to the peripheral lateral surface of the semiconductor chip. Together therewith, gas dwelling in the inside of the peripheral region of the ACF is expelled therefrom to the outer air.

Abstract: A curable resin composition comprising (1) a polymerizable vinyl monomer, (2) a polymerization initiator, (3) an aromatic amine and/or a pyridine derivative, (4) a &bgr;-diketone elate and/or a &bgr;-keto-ester, and (5) a phosphate.

Abstract: An adhesive silicone elastomer film obtained by forming a radiation-curable silicone rubber composition into a film and curing the resulting film by radiation; the composition including (A) an oily organopolysiloxane, (B) a radiation sensitizer and (C) an alkoxysilane and/or a partial hydrolysis-condensation product thereof. The oily organopolysiloxane includes, e.g., a compound represented by the formula: This film can be produced in a short time as clean films easy to handle and having a uniform shape, can rationalize work steps when used, and also has a low elasticity and sufficient heat resistance, adhesiveness and workability. This film is useful in the covering or bonding of articles.

Abstract: A applicator for focusing a plasma directly into a process chamber in which a process gas is injected into an applicator housing through a narrow channel. A focused power source generates a homogeneous plasma from the process gas within the applicator. The homogeneous plasma is focused directly into the process chamber through an outlet defined in the applicator. The outlet is configured to provide a desired expansion of gas or plasma torch strength. In the preferred embodiment of the invention, a plasma of non-reactive species is directly focused into the process chamber to increase the density of the non-reactive ions in the chamber, such that the ratio of reactive and non-reactive ions in the process chamber is controlled, and etch process performance is enhanced.

Abstract: A plasma reactor and methods for processing semiconductor substrates are described. An induction coil inductively couples power into the reactor to produce a plasma. A thin electrostatic shield is interposed between the induction coil and plasma to reduce capacitive coupling. The shield is electromagnetically thin such that inductive power passes through the shield to sustain the plasma while capacitive coupling is substantially attenuated. Reducing capacitive coupling reduces modulation of the plasma potential relative to the substrate and allows for more controllable processing.

Abstract: An apparatus and method for providing a modulated-bias plasma are described. In particular, an RF source or collector includes one or more sources to provide differing driving frequencies or bias frequencies, respectively. These frequencies, over time, interfere with one another to produce beating at one or more controllable, infinitely variable beat frequencies. As a beat frequency has significantly fewer cycles per second than a driving or bias frequency, a modulated-bias plasma may be provided without turning power on and off as in conventional “pulsed” plasma systems. Beat frequencies facilitate modulation of the driving or bias frequencies, which may lie within a relatively narrow frequency band. Also, the use of a plurality of driving or bias frequencies facilitates use of more conventional RF sources or collectors owing to lower power requirements at each frequency.

Abstract: A method and apparatus for using photoemission to determine the endpoint of a dry etch process. In one embodiment, the endpoint of a dry etch process is determined when the dry etch process is acting on a substrate comprising a layer of a first material overlying a second material. The substrate is illuminated with a beam of monochromatic light. The photon energy of the monochromatic light is greater than the work function of one of the two materials, and less than the work function of the other material. Thus the beam of light is capable of inducing photoemission of electrons in only one of the two materials: the material with a work function less than the photon energy of the beam of light. The electrons emitted by the photoemitting material are collected. The current generated by the collected stream of electrons, the photocurrent, is amplified. A time-series of amplified photocurrent measurements is monitored for changes that correspond to the endpoint of the dry etch process.

Abstract: Method and apparatus for a chemical-mechanical-polishing (CMP) support pad structure are described. The support pad structure is made with a housing to hold an open-cell material and a fluid. The fluid is supplied in a gaseous and/or a liquid state to affect rigidity of the pad. By controlling rigidity, material removal rates may be directly affected during CMP processing. Moreover, fluid flow through the support pad structure may be regulated to adjust temperature during CMP processing.

Abstract: There is provided a deinking process carried out using white water according to which an excellent whiteness and an excellent areal ratio of residual ink fines can be secured while maintaining a proper pulp yield. In the deinking process comprising a flotation step wherein use is made of treatment water containing white water, at least part of the flotation step is effected in the presence of at least one compound selected from the group consisting of cationic compounds, amine compounds, acid salts of amine compounds, and ampholytic compounds.

Abstract: A process for dewatering lime mud in a kraft pulping process is described. The process includes an improvement which comprises adding an effective amount of an alkyleneamine to the lime mud prior to filtration. The preferred alkyleneamine is ethyleneamine, that is, an amine having at least one —(CR2—CR2—NH—)— unit wherein each R independently is H or an alkyl (straight, branched or cyclic) group of from about 1 to about 10 carbon atoms. Ethyleneamines include ethylenediamine, diethylenetriamine, triethylenediamine, triethylenetetramine, tetraethylenepentamine, piperazine, aminoethylpiperazine, and ethyleneamine mixtures such as mixtures of ethyleneamine oligomers having an average molecular weight of about 200-500.

Abstract: A sheet composition with certain proportions of meta-aramids and mica used as a flame barrier composition.

Abstract: A traveling screen system has a traveling screen guided about a multiplicity of support and guide rollers. A scanning device scans a transverse position of the traveling screen and an adjusting device adjusts the angular orientation of at least one of the support and guide rollers. The adjusting device is supported on one side on a displaceable bearing block which is supported on a carriage. Between the control device for the bearing block of the displaceable roller and the scanning device, a coupling is provided by which a return of the control motion of the roller to the scanning device is effected. The coupling is formed by a Bowden cable, by a hydraulic circuit with control cylinders, or by an electric circuit with control devices.

Abstract: An apparatus for doctoring a roll in a paper machine, comprising a doctor blade and an integral blade holder including a support tray carrying fluid actuated tubes for applying the doctor blade to the roll. The blade holder is removably mounted on and releasably secured to the doctor back.

Abstract: A sealing device and process for laterally sealing at least one overpressure zone or underpressure zone adjacent to an actuating surface in a paper-making machine. The sealing device has at least one sealing element arranged movably at least locally in an intake area of a support. The sealing element is loaded with a sealing or opposing force in order to place it against the actuating surface. A stopping element is fixed at a distance from the actuating surface which limits the seating motion of the sealing element.

Abstract: Tantalum and niobium aluminate mixed metal oxides may be made by a process comprising mixing a first metal compound selected from the group consisting of aluminum alkoxide, aluminum beta-diketonate, aluminum alkoxide beta-diketonate, and mixtures thereof with a second metal compound selected from the group consisting of niobium alkoxide, niobium beta-diketonate, niobium alkoxide beta-diketonate, tantalum alkoxide, tantalum beta-diketonate, tantalum alkoxide beta-diketonate, and mixtures thereof to provide a precursor and then hydrolyzing the mixture. The resulting mixed metal oxide may be used in a variety of components of integrated circuits.

Abstract: An object of the invention is to provide a plastic film that is inapt to cause winding deviation, wrinkling and blocking even under a high-speed running condition. The invention provides a plastic film wherein at least 1,000 positive electrified patterns and at least 1,000 negatively electrified patterns each having an area of at most 10 mm2 and an arbitrary shape are distributed per 100 cm2 of the film, and a polypropylene film wherein the static friction coefficient &mgr;s between one surface of the film and another surface of the film is at least 0.2, and the dynamic friction coefficient &mgr;d therebetween is at least 0.08.

Abstract: A method of depositing a (200)-oriented platinum thin film on a substrate, including the steps of forming a oxygen containing platinum layer on the surface of a silicon wafer heated to a temperature range over room temperature and not exceeding 700° C. under a mixed gaseous atmosphere of oxygen and inert gas and annealing the substrate at a temperature between 400° C. and 1000° C. The platinum thin film formed according to the present invention in (200)-oriented and does not have any conventional defects such as hillocks or voids.

Abstract: The present invention provides a method of forming an aluminum nitride layer on a substrate in a processing chamber comprising depositing a first aluminum nitride layer at a first chamber pressure on a substrate, and then depositing a second aluminum nitride layer at a second chamber pressure higher than the first chamber pressure on the aluminum nitride nucleating layer. The first aluminum nitride layer is deposited by sputtering an aluminum target in a nitrogen and inert gas plasma in a processing chamber at a chamber pressure of about 1.5 to about 3 milliTorr. The second aluminum nitride layer is deposited by sputtering an aluminum target in a nitrogen and inert gas plasma at a chamber pressure of about 5 to about 10 milliTorr. The process may be carried out in the same physical vapor deposition chamber with the substrate being maintained at a temperature of preferably between about 125° C. and about 500° C.

Abstract: A chemical vapor deposition apparatus for depositing a thin film of highly dielectric materials for giga-capacity memory devices can reliably clean reaction products formed within the deposition chamber without sacrificing the production efficiency. The apparatus comprises a hermetic deposition chamber containing a substrate holding section for supporting a substrate, and a gas supply head disposed opposite to the substrate holding section for directing a gaseous feed material onto the substrate. There are provided a trapping member supporting device for supporting a trapping member so as to be opposite to a target cleaning area inside the deposition chamber, and a plasma generation device for generating a plasma between the target cleaning area and the trapping member supported by the trapping member supporting device.

Abstract: This invention relates to a new family of materials that exhibits improved stability to the chemical environment used in metal ore reduction, and thus provides an opportunity for improving the energy use and efficiency of such processes by their use. More specifically, the inventions relates to an electrode, used in the construction and/or operation of a reduction cell use to produce metal from ore, which is comprised of a compound or compounds described by the chemical formulas M3NX2 or M2NX, where M is a transition metal, N is a group 3a, 4a or 5a element, and X is carbon or nitrogen; or a composite containing in part, at least one of such compounds.

Abstract: An activated cathode comprising an electrically conductive substrate, an interlayer comprising a nickel oxide formed on the surface of the electrically conductive substrate, and a catalyst layer containing at least one lanthanum component selected from oxides and hydroxides of lanthanum metals and at least one platinum component selected from platinum metals and silver and oxides and hydroxides thereof formed on the interlayer. A process for the preparation of an activated cathode is also disclosed which comprises forming an interlayer comprising a nickel oxide on the surface of an electrically conductive substrate, and then forming a catalyst layer containing at least one lanthanum component selected from oxides and hydroxides of lanthanum metals and at least one platinum. component selected from platinum metals and silver and oxides and hydroxides thereof on the surface of the interlayer.

Abstract: The present invention provides an ion exchange membrane type electrolyzer, which comprises electrodes at opposed positions via an ion exchange membrane, spacers are mounted in dot-like arrangement on openings of electrode surface to maintain spacing between the ion exchange membrane and surface of at least one of the electrodes.

Abstract: A nonconductive insert is provided to fill the void resulting from the removal of mother-plate corners wrapped within the abutting ends of side and bottom edge strips. The insert includes at least one anchor, adapted to frictionally engage the end of a strip mounted along the edge of the mother plate. The insert and its anchors are designed to completely fill the void left by the missing mother-plate corner, thereby preventing penetration of electrolyte and accumulation of deposits. According to other embodiments of the invention, the insert may be incorporated into the edge-strip end as an integral component of the strip.

Abstract: A ferromagnetic magnetron target contains a pattern of blind holes with a circular cross-section distributed along a sputtering surface thereof. A process produces the target for a given magnetron source with a given tunnel field and includes determining and storing the tunnel field course when individual blind holes are provided in a new target surface, additively superimposing the determined tunnel field course of plural individual blind holes, comparing the resulting tunnel field course with a DESIRED tunnel field course; and changing, as a function of the comparison result, the relative parameter position of one or more of the individual blind holes, or the like to control the working of blind holes into the plane target sputtering surface.

Abstract: Method and devices for performing chromatographic pattern analysis determine chromatographic variability due to a plurality of sources without requiring identification or characterization of peaks or other chromatographic features, receives data indicative of a standard chromatogram and a first sample chromatogram generated from a first mixture by a High Pressure Liquid Chromatography (HPLC) device and data indicative of a plurality of additional sample chromatograms generated by the HPLC device from a plurality of different mixtures. The method and devices generate from the standard chromatogram, a plurality of sets of chromatographic variability data, each set being indicative of a different effect of the chromatographic variability of the HPLC. The standard chromatogram is modified as a function of the variability data, and a residual value, indicative of a difference between the modified standard chromatograms and the first sample chromatogram is generated.

Abstract: The present invention provides a multilayer film composition wherein at least two layers of the multilayer film composition are applied via electrophoretic deposition processes. In a preferred embodiment, the first layer of the multilayer film composition is a conductive film layer applied by a cationic electrodeposition process with a second layer applied directly to the conductive first layer via a cathodic electrodeposition process. Preferably, the second layer of the cathodic electrocoat coating composition comprises a carbamate functional cathodic resin.

Abstract: A continuous electrodeionization apparatus and method. The continuous electrodeionization apparatus and method provide improved removal of weakly ionized ions, particularly silica. The apparatus and method involves using macroporous ion exchange resins that are both highly crosslinked and have a high water content. In preferred embodiments, the ion exchange resin beads also have a substantially uniform diameter.

Abstract: The invention concerns a method for extracting by electrodialysis a compound comprising at least amine functions capable of protonation from a liquid medium. More particularly it concerns a method for extracting, and separating at least the monomers comprising amine functions capable of protonation from a liquid medium derived from the hydrolysis of polyamides. The method of extraction from a liquid medium consists in subjecting to protonation the amine function(s) of the compounds to be extracted by adjusting the pH of the medium and in separating the compounds by passing them through a cationic membrane under the effect of an electric current. The invention is particularly applicable in processes for the chemical stabilisation of polyamides such as the PA 66 PA 6.

Abstract: A multilayer engine bearing (10) includes a steel backing (12) having a liner (14) of bearing metal of either copper-lead or aluminum alloys formed on the backing (12). A multilayer overplate (24, 124) is formed on the base lining member (16) and includes at least a first layer (28, 128) electrodeposited from a bath at a first current density to a desired thickness, and at least one additional layer (26, 126) electrodeposited from the same bath but at a different current density and to a desired thickness to yield a composite lamellar overplate structure having layers with differing deposit characteristics, such as hard and soft layers, generated from the same bath at different current densities.

Abstract: A method is described for plating adherent, hard decorative gold in one or two steps, eliminating multistage substrate stripping on chromium plated automobile emblems.

Abstract: A process for fabricating a silica-based optical device on a silicon substrate is disclosed. The device has a cladding formed in a silicon substrate. The device also has an active region, and that active region is formed on the cladding. The cladding is fabricated by forming a region of porous silicon in the silicon substrate. The porous silicon is then oxidized and densified. After densification, the active region of the device is formed on the cladding.

Abstract: A method for recuperating from saponification products of alkaline polyterephthalate with soda where both terephthalate ions are in acid form and the sodium ions are in the form of soda is disclosed. In this method the sodium terephthalate solution resulting from dissolving the saponification products are subjected to a step of electrochemical pre-acidification to bring the pH to 4 to 7. Thereafter an electrochemical acidification step by electrolysis is undertaken to precipitate the terephthalic acid in the anode section and recuperate the soda in the cathode section which can be recycled.

Abstract: In a method of producing reduced sulfur dyes, the improvement comprising cathodically reducing a sulfur dye to produce at least 150 Ah.kg−1 of reduction equivalents with respect to the solid dye, wherein at least 50 Ah.kg−1 is introduced by cathodic reduction.

Abstract: An apparatus for electrochemically machining of a workpiece by means of an electrode has an actuator for setting a gap between the electrode and the workpiece. The apparatus further has a channel for flushing the gap with an electrolyte and a container for containing the electrolyte. Power cords and are provided for feeding an electric current I supplied by a power supply through the electrolyte in the gap. Near the gap an antenna is provided to pick up electromagnetic waves radiated from the gap. The antenna is connected to a band-pass filter which passes signals in a frequency band of 40 to 100 MHz to a level detector. The level detector compares the amplitude of the filtered signal with a threshold value and supplies a stop signal to the control unit when the amplitude exceeds the threshold value. The control unit is programmed to open a switch in the power supply in response to the stop signal.

Abstract: A method and arrangement is described for determining oxidizable constituents in a gas mixture by using a solid electrolyte cell with at least one reference electrode and at least one working electrode made of electrically conducting mixed oxides which is sensitive to the oxidizable constituents, with the current between the reference electrode and the working electrode induced by electrochemical oxidation of a gas constituent to be determined being measured.

Abstract: Heavy hydrocarbons are upgraded to higher value distillates in a hydrocarbon conversion process which employs several parallel reaction zones which each contain both hydrotreating and hydrocracking catalyst beds. The feed and liquid recycle from the bottom of the reaction zone is charged to the top of the uppermost catalyst bed. Hydrogen flow is countercurrent to the descending liquid, and products are removed overhead through vapor-liquid contactors. The flow of feed to one of the reaction zones is periodically stopped to allow sequential on-stream hydrogenative regeneration of the catalysts within the reaction zone.

Abstract: A method of treating a polychlorinated aromatic compound or a hydrocarbon oil containing a polychlorinated aromatic compound involves the step of heating while stirring the polychlorinated aromatic compound or the hydrocarbon oil containing the polychlorinated aromatic compound in the presence an alkali metal tert-butoxide as a reactant to remove chlorine from the polychlorinated aromatic compound and provide a post-reaction system with no chlorine.

Abstract: An apparatus for the purification of water contaminated by micro-organisms and chemicals by means of a three stage process is taught. The apparatus consists of a prefiltration stage, an ozonation stage, and a post filtration stage. The contaminated water is initially drawn from a reservoir through a filter through a bed consisting of a porous media, calcium bentonite, zeolite, activated carbon and a second porous media. The filtered water is then passed into a ozonation chamber wherein gaseous ozone is introduced so as to oxidize contaminants. The reduction/oxidation condition in the ozonation chamber serve to control the cycle time. Once the water is disinfected it is passed through a second filter consisting of a porous media and activated carbon before being dispensed into a clean water carafe.

Abstract: A modular water treatment apparatus is provided for soft drink postmix dispensers. The apparatus includes a basic filter unit and additional modules selected from booster pump, UV treatment, and ion exchange modules as needed to match situs water problems determined water testing. A control module has microcontroller based circuitry which provides apparatus monitoring and control. Disabling and warning alarms are generated for predetermined apparatus conditions on a priority basis. A hand-held controller can be coupled to the control module to provide an operator interface for entry and readout of data on the basis of key entries.

Abstract: A mechanically cleanable screen for separating liquid from chips and pulp without the screen getting blocked, particularly in the process area where cooking and circulation liquids are removed from a pressure vessel during the production of chemical pulp and paper pulp by a continuous method. The screen has two screens: a primary screen and a secondary screen which are attached to a common body one after another in the direction of the liquid to be filtered so that they form a cassette. The blades of the secondary screen generate shear and push forces that clean the slots of the primary screen.

Abstract: A filtration cell for carrying out a tangential flow filtration of a sample liquid contains at least two blocks and at least two filtration elements arranged between each pair of two adjacent blocks. The filtration elements each include an outlet for filtrate, a sheet of support material and two generally flat ultrafiltration or microfiltration membranes, arranged on either side of the support material in a sandwich construction. Each of the blocks, at a side adjacent the membranes, is provided with a respective channel for feeding a flow of sample liquid tangentially over the membranes such that each channel is connected in parallel with the inlet for the flow of sample liquid to be filtered and with an outlet for a concentrated solution. Each channel includes in its longitudinal direction a number of subsequent channel sections separated by transitional zones and is constructed and arranged such that the main flow direction in subsequent sections changes abruptly in the transitional zones.

Abstract: Clarifier for liquids laden with suspended matter, comprising: an outer, first, cylindrical tank (4), a central, second, cylindrical tank (1) for collecting the filtered liquid, roughly coaxial with the first; an intermediate tank (2), formed between the outer tank (4) and the central tank (1) and roughly coaxial therewith; structure (19) for the feed of pressurized backwash liquid to the filter medium (14); a hood (26) for recovering the washing liquid after it has passed through the filter medium (14); a rotary bridge (8) which can rotate above the collection of cylindrical tanks (1, 2, 4), a compartment for introducing the liquid that is to be clarified, this compartment being positioned between the intermediate tank (2) and the central tank (1) and feeding the outer tank (4) centrally with liquid laden with suspended matter, the said compartment being itself fed with liquid that is to be clarified from the outside via a number of inlets (3).

Abstract: An irradiation chamber adapted to treat a blood stream infection by subjecting the stream to ultraviolet radiation. The chamber is provided with a window transparent to UV rays under which is an array of parallel baffle plates that define a series of interconnected channels forming a labyrinthine passage extending from the inlet to the outlet of the chamber. Each baffle plate includes a transverse protuberance which intercepts the flow of blood in the related channels to produce a Bernoulli distortion acting to agitate the blood stream. And each baffle plate is vertically tapered to induce blood from the lower regions of the stream within the channels to rise to the upper region adjacent the window. As a consequence of these internal displacements within the flow stream and the intermingling of blood regions in the course of its flow through the labyrinthine passage, all portions of the blood stream are adequately exposed to UV rays.

Abstract: A cyclone separator having an improved efficiency to remove a broader spectrum of contained particles is disclosed. The cyclone separator is provided with a member positioned to interact with at least the inner portion of a fluid circulating within the cyclone cavity to impart changes in the acceleration of the fluid as it rotates within the cyclone cavity.

Abstract: A water filtering system includes a first filtering device connected between an inlet pipe and a fluid volume meter. A second filtering device is connected to the fluid volume meter and has a ceramic tube received therein. A third filtering device is connected to the second filtering device and has activated carbon particles received therein. The third filtering device is connected to a fourth filtering device which has a plurality of units received therein. Each unit has three partitions and two of which receive two magnetic members.

Abstract: A bag, particularly adapted for absorbing hydrocarbons dispersed in smaller quantities of water, has a ball-like shaped body formed from oleophobic netting materials. The bag body includes a tubular-shaped outer sleeve positioned about a tubular-shaped inner sleeve to form an interior space therebetween. Adjacent end portions of each sleeve then are connected so that an absorbent medium in the bag interior space is fully enclosed. The inner sleeve defines a central passageway through the bag. To hold the bag during use, a cord loop may be disposed in the central passageway with a knotted end of the cord joined with one of the sleeve end portion connections. A looped end of the cord then extends from an opposite end of the central passageway to provide convenient means for attaching the bag to a support while the bag is immersed in a hydrocarbon-water mix. As hydrocarbons are drawn to strands of the bag netting and then collect in voids of the netting, the bag discolors.

Abstract: The invention relates to a wafer rinsing system for rinsing chemicals and particles off of wafers without introducing contaminants. The system reduces the particle count on wafers by filtering the water and the gas used during rinsing at the wet bench. The system includes a rinsing unit, a local water filter bank, a local gas filtering system, an H2O2 injection unit, an auxiliary chemical injection unit, and a controller for operating the other components. The water filter bank provides a multiple stage filtering system to eliminate particles without a substantial drop in water pressure. The H2O2 injection unit provides a local source of H2O2 to clean the filter and rinser and to provide a mechanism for controlling the formation of native oxide on the wafer during rinsing. The auxiliary chemical injection unit provides a chemical additive to the rinsing unit to enhance the wafer cleaning process. The gas filtering system provides clean gas to the rinsing unit and to the injection units.

Abstract: A filter for removing undesired materials from a fluid, such as used cooking oil, for example, includes a filter envelope including first and second panels. The first panel has a permeability which is greater than that of the second panel. The first panel of the filter envelope may be formed from a filter pad and the second panel from a filter paper, and may enclose a metal spacer grid. When the filter is connected to a pump for drawing the oil through the filter, the flow of the oil is directed selectively through the filter pad, whereby undesired materials are removed from the oil. The filter provides for efficient flow of the oil to be filtered while removing undesired materials therefrom.