Abstract: The invention relates to a starter unit (1) comprising an input (E) which may be coupled to a drive input, an output (A) which may he coupled to a drive output, a starter element (2) in the form of a hydrodynamic coupling (3), a switchable clutch (7), comprising at least two clutch elements, which may be brought into frictional engagement, either directly or indirectly, by means of further transfer agents, being a first clutch element (10) and a second clutch element (11) each rotationally fixed to the input (E) and the output (A) respectively. The hydrodynamic coupling (3) and the switchable clutch (7) are arranged in a parallel fashion in two power branches (8,9) and may be activated individually or in common.

Abstract: The invention relates to a starter unit (1), comprising the following: an input (E) which may be coupled to a drive input; an output (A) which may be coupled to a drive output; a starter element (1) in the form of a hydrodynamic coupling comprising a pump wheel (4) and a turbine wheel (5) which together form a toroidal working chamber (6) and a pump wheel shell (10) which is coupled to the pump wheel (4) in a rotationally fixed manner; and a converter lockup clutch (7) comprising at least two clutch disks which may be brought into frictional functional engagement with each other, directly or indirectly, by means of further transmission means—a first clutch disk (8) and a second clutch disk (9). The first clutch disk (8) is rotationally fixed to the pump wheel shell (10) and the second clutch disk (9) is rotationally fixed to the turbine wheel (5).

Abstract: A friction clutch, particularly for a motor vehicle, including a clutch disk which can be coupled in frictional engagement with the crankshaft of an internal combustion engine and which is connected by a hub to a transmission input shaft so as to be fixed with respect to rotation relative to it and can revolve with the latter around a common axis of rotation. The clutch further includes an actuation system for engaging or disengaging the frictional engagement of the clutch disk which is arranged concentric to the transmission input shaft, and a transmission brake for reducing the rotational speed of the transmission input shaft during determined shifting processes of the transmission. The transmission brake can be controlled independent from the actuation system of the friction clutch, and all component parts of the transmission brake are integrated in the actuation system of the friction clutch.

Abstract: A ratchet type one-way clutch in which an outer ring is made of aluminum is improved in durability. In order to solve such problems as an increase in the number of parts, complication, bulkiness, an increase in weight and an increase in cost, there is provided a one-way clutch with the lock-up function also having the function of idly rotating only in one direction and the function of blocking the rotation in both directions. In a ratchet type one-way clutch having an outer ring having a pocket in the inner periphery thereof, an inner ring disposed coaxially with the outer ring and having a notch in the outer periphery thereof, a pawl contained in the pocket and fitted in the notch of the inner ring for transmitting torque between the inner ring and the outer ring, and a resilient member for biasing the pawl toward the inner ring, the outer ring is made of aluminum, and the inner peripheral side surface of the outer ring is subjected to a hardening process.

Abstract: A crankshaft 2 of an internal combustion engine, which is supported with freedom to rotate around an axis of rotation 3, can be connected by a first clutch 1 to a flywheel 4, which is also supported with freedom to rotate around the axis of rotation 3. In addition, the flywheel 4 can be connected by a second clutch 5 to a transmission shaft 6, also supported with freedom to rotate around the axis of rotation 3. The flywheel 4 is provided with at least one permanent magnet and thus forms the rotor 8 of a crankshaft starter-generator. The pole fields of the permanent magnets can be moved past the stator coil of a stator 9 of the crankshaft starter-generator, this coil being mounted on a stationary component. Each of the first and the second clutches 1, 5 has its own separately operated actuating means and can be engaged and disengaged either independently of each other or in common.

Abstract: An aluminum pressure plate and flywheel, for a clutch in a vehicle drivetrain, have wear resistant surfaces applied at the clutch disc interface. The wear resistant surfaces are applied to the pressure plate and flywheel using a plasma transferred wire arc thermal spray process.

Abstract: A clutch is provided including a clutch cover assembly including a cover rotatable about and axis. The pressure plate is spaced apart from the clutch cover assembly and is moveable along the axis for engaging the clutch member. A sleeve including a retainer is moveable along the axis between engaged and disengaged positions. A lever having first and second opposing ends are respectively supported between the container and the clutch cover assembly. The lever includes a fulcrum arranged between first and second ends supported by a portion of the pressure plate. A resilient member is arranged between the portion of the pressure plate and the fulcrum for absorbing vibrational forces transmitted in the direction of the axis.

Abstract: A clutch assembly is provided that includes a flywheel. A clutch cover is secured to the flywheel. An intermediate plate is spaced from the flywheel, and a pressure plate is arranged between the clutch cover and the intermediate plate. The intermediate plate may be secured to the clutch cover by flexible straps or another similar device. The straps retract the pressure plate from an engaged position to a disengaged position. First and second friction discs are respectively arranged between the pressure plate and the intermediate plate and the intermediate plate and the flywheel. The pressure plate forces the intermediate plate and the friction discs toward the flywheel to couple and engine and transmission together. A separator moves the intermediate plate with the pressure plate from the engaged position to the disengaged position thereby permitting self-disengagement of the friction discs from the flywheel.

Abstract: A hydraulically-operated clutch for an automatic transmission includes a clutch housing assembly with a clutch pack positioned therein. A movable piston is supported in the clutch housing assembly and defines an expandable chamber between the piston and clutch housing assembly. Pressurized fluid is provided to the expandable chamber to effect movement of the piston between engaged and disengaged positions with respect to the clutch pack. The piston and clutch housing assembly are configured such that only a small portion of the expandable chamber is pressurized when the piston is in the disengaged position, thereby providing improved response time for movement of the piston to the engaged position.

Abstract: A system for handling banknote flows with the aid of a banknote handling machine (1) for feeding banknotes into and out of a banknote magazine (10) included in the banknote handling machine (1). The system comprises a first unit (21) which includes a locality (210) that is divided by an inner wall (211) into an outer room (212) and an inner room (213), with the banknote handling machine (1) being orientated through the inner wall (211). The banknote handling machine (1) includes a banknote infeed location (111) and at least one banknote outfeed location (112) in the outer room (212), and a combined banknote infeed/outfeed location (121) in their room (213).

Abstract: A currency handling system comprising a fitness detector. The fitness detector comprising a thickness detector, a limpness detector, a soil detector or a combination thereof. The thickness detector comprising an upper roller displaceable in a predetermined arc by a note passing between the upper roller and a lower roller. The limpness detector comprising a single driven crackle roller comprising an elongated central bulge and two outer bulges, wherein the central bulge is in conforming relation to a flexible belt. Sheet metal guides further facilitate note deformation and sound production.

Abstract: A coin processing system for processing a plurality of coins of mixed denominations comprises a rotatable disc for imparting motion to the plurality of coins, a sensor for differentiating between valid and invalid coins, a stationary sorting head, a diverter and a controller. The stationary sorting head has a lower surface generally parallel to and spaced slightly away from the rotatable disc. The lower surface forms a queuing channel and a plurality of exit channels for sorting and discharging coins of particular denominations. The queuing channel has a first segment for receiving coins and a second segment for moving the coins past the sensor and is configured to move coins at a faster rate along the second segment for increasing the spacing between adjacent coins. The diverter is disposed along the second segment beyond the sensor and is moveable between a first position for permitting coins to proceed to the plurality of exit channels and a second position for diverting coins to a reject region.

Abstract: A coin discrimination sensor having an excitation coil and two detector coils arranged to detect eddy currents in a passing coin. The excitation coil is provided a composite waveform formed by adding a low frequency signal (30 KHz) with a high frequency signal (480 KHz). The two detector coils are arranged at different distances from the passing coin, and are calibrated to eliminate the common-mode voltage when no coin is present. As a coin passes by the sensor, eddy currents are induced in the coin which result in phase and amplitude shifts in the low and high frequency components of the detector signal. The low and high frequency components are separated from the detector signal, and their respective phases and amplitudes are ascertained and compared against values stored in a lookup table. These values represent the composition, thickness, and diameter characteristics of known coins, and if the signature of the processed coin does not appear in the lookup table, it can be flagged as an invalid coin.

Abstract: A device for monitoring the presence of steps and pallets of an escalator or moving walkway, such that missing steps or pallets are immediately detected, so that the drive will be stopped before the missing or defective part reaches the visible area of the escalator or moving walkway.

Abstract: A positive displacement sorter apparatus includes a plurality of interconnected slats defining an endless web, an upper run of the endless web defining a conveying surface. A plurality of pusher shoes are provided, each moving along at least one of the plurality of slats to laterally displace articles on the conveying surface. A linear motor propulsion system may be provided for propelling the web including at least one motor primary and a plurality of motor secondaries at the slats.

Abstract: A system for conveying LCD glass substrates 100 traveling between processing devices 210, 220 and 230 and conveying LCD glass substrates. The conveyor system 100 includes an upper conveyor 110 for conveying LCD glass substrates in the feeding direction between processing devices, a lower conveyor 120 arranged so as to form a multi-storied structure together with the upper conveyor for conveying LCD glass substrates in the return direction between processing devices, and a vertical conveyor for vertically conveying LCD glass substrates from the upper conveyor to the lower conveyor or vice versa. The vertical conveyor is provided with a plurality of conveyor tables, of which each is able to support the a LCD glass substrate from the underside thereof and moving it up and down linking to each other. One conveyor table forms a part of the upper conveyor while the another conveyor table forms a part of the lower conveyor.

Abstract: The palletizer comprises a loader carriage (10) provided with a plurality of parallel horizontal corridors (11) for receiving the articles, each corridor comprising:

Abstract: An automatic feed device for individual publishing products to which publishing products (12), of whatever thickness and size, are fed from a first conveyor belt (13) in a scaled arrangement, one partially on top of the other, to be laid down on a second conveyor belt (14) one after the next separated and not overlapping, comprising a bearing structure (15), at least one pair of manipulator members (19, 19′) which, one at a time, grip, through relative gripping members (27, 32, 33), the publishing products (12), arranged scaled which advance on the first conveyor belt (13) and lay them down them on the second conveyor belt (14) separated one from the next, the manipulators (19, 19′) being alternately mobile forwards and backwards between the first and second conveyor belt (13, 14) and being able to oscillate to determine both the gripping of the individual product and the subsequent laying down thereof always in two predetermined positions of the first and second conveyor belt.

Abstract: A package control conveyor system comprises a plurality of independently-controllable package conveying units each of which comprises a zone control module operably connected to a package sensing device and a package conveying unit for selectively activating and deactivating the package conveying unit, wherein the zone control modules are communicably interconnected upstream and downstream so that each zone control module can selectively activate and deactivate its associated package conveying unit in response to information provided by one or more upstream and/or downstream zone control modules.

Abstract: Systems and techniques for detecting and reporting conditions of a conveyor belt by receiving image data from at least one camera structured and arranged to capture an image of a portion of a conveyor belt, detecting an object in the portion of the conveyor belt based on the received image data, and generating status information associated with the portion of the conveyor belt based on the detected object.

Abstract: A pultruded slat for a reciprocating slat conveyor system comprises a slat body including a top portion, a first side portion, and a second side portion, the first and second side portions depending downwardly from opposite lengthwise sides of the top portion; wherein the first side portion and second side portion each include projections extending toward an opposing side portion, wherein the top portion of the slat body comprises a plurality of closed cells, and wherein a bottom of the top portion, the first side portion, the second side portion, and the projections comprise an open cell.

Abstract: A conveyor for transporting objects sensitive to electrostatic discharge. In one embodiment, the present invention relates to a roller conveyor with conductive rollers in electrical communication with an electrical ground. The rollers preferably have about 105 ohms resistance from the outer diameter to the inner diameter to ensure that electrostatic charges built up on the conveyed object can flow to ground, yet not flow too quickly. In another embodiment, the roller shafts are supported on highly conductive bushings that provide a path to electrical ground that is preferably less that 104 ohms. In yet another embodiment, the roller shafts are driven by a conductive pulley that minimizes the build-up of electrostatic charge as a result of a triboelectric effect with the drive belt.

Abstract: A conveying apparatus is composed of a motor-installed roller (2), cams (3), a rotation axis deflector (4), a drive pulley (5), a driven pulley (6), an endless belt (7), a flat support (8) and a spring (9). The roller (2) and the deflector (4) take their position enclosed with the belt (7), and the shaft (15) of the roller (2) is operatively connected by the deflector (4) to the drive pulley (5). A sleigh-shaped top plate (25) of the support (8) intervenes between the roller (2) and the back surface of belt (7), and when the cylindrical casing (12) of this roller rotates, the cams (3) will also rotate to raise the support (8) and lift the upper transporting path of the belt (7), so that the apparatus is rendered so smaller in size that it can be used as a cross transporter adapted for installation in any desired space.

Abstract: The crossover conveyor chain system includes a first conveyor chain (S1) and a second conveyor chain (S2) crossing the first conveyor chain (S1) to transfer the product from the first conveyor chain (S1) to the second conveyor chain (S2) while reorienting the product to a direction nearly perpendicular to that on the first conveyor chain (S1). The first conveyor chain (S1) is supported on an end bar (10) or a small-diameter sprocket, and the second conveyor chain (S2) is formed a plurality of chain unit pairs each including at least two types of chain units (A) different in length from each other and a coupling pin (B). Each of the chain units (A) has front convex portions (1) and front concave portions (3), disposed alternately at the front thereof, rear convex portions (2) and rear concave portions (4), disposed alternately at the back thereof, and a transfer overhanging portion (7) formed integrally at one lateral thereof.

Abstract: The invention provided for a conveyor belt wherein chain links are assembled such that eye parts are inserted into the intervals between two eye parts in the opposite chain link, whereafter the transverse rod according to the invention is inserted from one side of the conveyor belt through the overlapping openings in both chain links. When the notches provided on the transverse rod adjacent the head portion come into contact with the end face of the chain link, i.e. the side of the chain link, the notches can be brought into engagement with slits provided in the outmost chain link by twisting the head portion and pushing it into the end portion of the chain link. When the notches are engaged in the slits the transverse rod is fixated such that it will not move sideward in relation to the longitudinal direction of the conveyor belt.

Abstract: A section of chain for conveying product along a material handling system includes a pin connecting a center link between two side links. The pin may have a sleeve portion around and at least partially along the shaft portion of the pin. The sleeve portion may engage a center link of the section of chain and may be movable relative to the shaft portion. The sleeve portion may comprise a polymeric material. The sleeve portion may be molded over an I-pin or the like, or may be slid or pressed onto a stud-ended pin or bolt or the like. The pin may include a generally spherical-shaped ball member or portion on the shaft portion to enhance flexibility of the section of chain. The pin may be dialable or selectably positioned at the side links to control and adjust the wear surface of the pin relative to the chain links.

Abstract: A slide switch capable of significantly reducing the number of parts therefor and facilitating assembling thereof. The slide switch includes a base provided thereon with fixed contacts, a slider provided thereon with a movable contact spring and arranged on the base so as to be movable in a desired direction while being guided by a combination of guide grooves and slide elements, and a restoring spring-equipped cover provided with restoring springs adapted to be pressed against four sides of the slider. The restoring spring-equipped cover is mounted on the base from a side of an upper surface of the slider, so that the slider slid in a desired direction may be returned to an original position by restoring force of the restoring springs, whereby selective contacting between the movable contact spring and the fixed contacts permits switching operation, mode changing-over operation and the like to be selectively carried out.

Abstract: A unitary housing including an electrical plug with externally extending prongs for insertion into an outlet or receptacle, an electrical switch in connection therewith, and an indicator of the presence or absence of electrical power applied to the prongs of the plug, with the electrical switch being of an amperage rating greater than that of a circuit breaker protecting the electrical power supply system, such that turning the switch “on”, increases the supplied electrical power to overload the circuit breaker, before overloading the switch.

Abstract: A gravity-type sensor device comprising a switch which monitors the position of an object over a three dimensional pathway which extends dimensionally about all three orthogonal axes where the object may be tilted, rotated or inverted, as well as translated through space rather than maintained at a fixed location, so as to provide a signal to indicate that the object is moving in the correct three dimensional manner, whereby the switch is disposed within an external housing in a manner that allows the position of the switch to be altered relative to the housing, thereby allowing the angle or plane of the pathway to be adjusted when the housing is attached to different objects.

Abstract: A novel unipolar design of Secondary Isolating Contacts for Circuit Breakers which provides flexibility to build schematic logistics by exploiting programmability of the design and which is flexible for subsequent addition or deletion or replacement of SICs with minimum efforts.

Abstract: A key switch device, wherein the second cam part (24B) of a second link member (4) is supported on a cantilever member (32) extended from the second link member (4) in the form of a cantilever and the cantilever member (32) is energized by a torsion spring (33) in the direction to allow the first cam part (24A) of a first link member (3) to abut mutually on the second cam part (24B), a cam face (25A) is formed on the second cam part (23B), a cam face (25A) abutting on the linear and punctate contact parts of the cam face (25A) of the second cam part (24B) at an acute angle in plan view and having a slanted surface (60) is formed on the first cam part (24A), and a clearance (63) formed from the contact part to the fixed point (64) of the torsion spring (33) is provided between the cam face (25A) of the second cam part (24B) and the slanted surface (60).

Abstract: A process for separating sulfonic acid compounds from a phenolic solvent is provided by contacting the phenolic solvent with a hydrotalcite-type material (HTM). The process can be applied in the conventional industrial process for converting cumene to phenol to remove sulfonic acid compounds from the phenol product. A process and a facility for producing purified phenol by converting cumene to phenol are provided. In the conversion of cumene to phenol, the phenol often contains carbonyl-type impurities. The phenol and carbonyl-type impurities are reacted in the presence of a sulfonic acid cation exchange resin catalyst (IER) to produce a reaction product that may contain sulfonic acid compounds. The reaction product is contacted with an HTM to reduce the amount of sulfonic acid compounds which may be present and to produce a purified phenol-containing stream. The purified phenol-containing stream may be further purified using conventional separation techniques, such as distillation.

Abstract: A chemical plant for performing a chemical reaction between particles of a material such as lithium metal, and a reagent such as butyl chloride in solution in hexane, in which one reaction product is a solid material, includes a reaction vessel (12). Several ultrasonic transducers (16) are attached to a wall of the vessel (12) so as to irradiate ultrasonic waves into the vessel, the vessel being large enough that each transducer irradiates into fluid at least 0.1 m thick, each transducer irradiating no more than 3 W/cm2, and the transducers being sufficiently close to each other and the number of transducers being sufficiently high that the poser dissipation within the vessel is at least 10 W/litre but no more than 200 W/litre. The high intensity of ultrasound ensures tat lithium chloride is cleaned off the surface of the lithium metal particles throughout the vessel (12).

Abstract: This invention is to a process and system for controlling solids distribution in a gas-solids reactor. Solids distribution is controlled by controlling electrical charges between solid particles flowing between conductive surfaces within a gas-solids reactor. The electrical charges are controlled by conventional means such as by grounding the opposing conductive surfaces, or by applying a voltage to one of the opposing conductive surfaces.

Abstract: A reactor for the plasma assisted processing of gaseous media, including a cylindrical reactor bed of gas permeable dielectric material contained between two co-axial electrodes, wherein the inner electrode has associated with it a number of radially projecting vanes or disks made of a dielectric material having a permittivity greater than that of the reactor bed material.

Abstract: The invention concerns a sputter target on a metal or metal alloy base with a melting point of not more than 750° C., especially tellurium alloy, with a microstructure of powder particles compacted by means of powder metallurgy, where the primary microstructure of the powder particles is very fine as compared with their size and where the particle size is clearly greater than the grain size of the primary microstructure.

Abstract: A magnetron sputter deposition process for producing a thin film alloy exhibiting shape memory characteristics comprising conducting the sputter deposition using krypton as process gas, depositing the alloy onto heated substrate so secondary annealing is unnecessary, and using a sputter target titanium, nickel and/or palladium in proportions so as to produce a thin film alloy of a composition having a titanium content ranging from at least about 50 atomic percent to less than about 52 atomic percent.

Abstract: An integrated current-to-voltage conversion circuit converts a first current to an output voltage representative of the first current. The circuit includes a first contact pad and second and third contact pads capable of being coupled across a first resistor. A first operational amplifier has a first input coupled to the first contact pad for producing a first voltage thereat, a second input for receiving a reference voltage, and a first output coupled to the third contact pad. A second voltage appears at the third contact pad. A second operational amplifier has a second output at which a third voltage appears, a first input coupled to the second output, and a second input coupled to the second contact pad. The output voltage is substantially equal to the difference between the second and third voltages.

Abstract: A gas sensor assembly comprises a housing (65) including a bore (61). A pin (50) extends through the bore (61) and an O-ring (100) is located in the bore. The O-ring (100) contacts the pin (50) and parts of the bore (61) so as to be restrained against movement in both lateral and axial directions. Two- and three-shot moulding processes are described for fabricating the assembly.

Abstract: A hydrogen sensor which may be employed in an overcharge/overdischarge detector for a battery and a hydrogen leakage detector for a fuel cell is provided. The hydrogen sensor includes a sensor element and a diffused resistor member. The gas to be measured passes through the diffused resistor member and reaches the sensor element. The sensor element outputs a signal indicative of the concentration of hydrogen contained in the gas as a function of a decrease in concentration of oxygen contained in the gas arising from reaction of the hydrogen on the oxygen. The diffused resistor member is so designed that speeds of diffusion of the hydrogen and the oxygen when passing through the diffused resistor member are different from each other for increasing the sensitivity of measurement of the concentration of hydrogen.

Abstract: Thin films of transition metal complex-based redox polymers are electrodeposited on electrodes via application of fixed or cycled potential. When hydrated, an electrodeposited film conducts electrons by electron exchange between backbone-bound, but mobile, functional segments of its redox polymer constituents. These functional segments, or redox complexes, have labile ligands, such as chloride anions, for example, in their inner coordination spheres. The backbones of the redox polymers have strongly coordinating ligands, such as pyridine- or imidazole-containing functions, for example, which are generally not coordinated prior to deposition. Electrodeposition results from coordinative crosslinking by exchange of labile ligands and strongly coordinating ligands between polymer chains, provided sufficient functional segments of the redox polymers are present at the electrode surface.

Abstract: An electrophoresis device includes first and second end reservoirs of buffer, and a separation tank between the end reservoirs. The separation tank fluidically interconnects the reservoirs and is configured to hold a stack of gel trays in an oriented electric field and covered by the buffer solution. At least one gas-driven fluid recirculation passage distinct from the separation tank drives buffer in one direction between the reservoirs, and stabilizes the buffer below the level of the trays, while stabilized buffer is free to complete its circulation between plural ones of the stacked trays without thermal or chemical upset of the electrophoresis conditions over time. The recirculation assembly may include a hood positioned to capture gas bubbles evolved at one electrode, and a transfer passage that extends between the two ends from a position toward the top of the hood, so that bubbles of gas drive buffer fluid along the transfer passage.

Abstract: A process and apparatus are provided for electroplating a film onto a substrate having a top side including a plating surface includes the following steps. Provide a plating tank with an electroplating bath. Provide an anode in the bath. Place a substrate having a plating surface to be electroplated into the electroplating bath connecting surfaces to be plated to a first cathode. Support a second cathode including a portion thereof with openings therethrough extending across the plating surface of the substrate and positioned between the substrate and the anode. Connect power to provide a negative voltage to the first cathode and provide a negative voltage to the second cathode, and provide a positive voltage to the anode.

Abstract: Object The present invention relates to a to-be-mounted electronic component to which functional alloy plating using a bonding material for mounting is applied with a substitute bonding material for solder (tin-lead alloy), and aims at providing alloy plating which has been put to a practical use in such a way that the function of existing alloy plating of this type has been significantly improved to eliminate toxic plating from various kinds of electronic components for use in electronic devices so that it is useful in protecting the environment.

Abstract: The various embodiments of coaxial capacitors are self-aligned and formed in a via, including blind vias, buried vias and plated through holes. The coaxial capacitors are adapted to utilize the plating of a plated via as a first electrode. The dielectric layer is formed to overlie the first electrode while leaving a portion of the via unfilled. A second electrode is formed in the portion of the via left unfilled by the dielectric layer. Such coaxial capacitors are suited for use in decoupling and power dampening applications to reduce signal and power noise and/or reduce power overshoot and droop in electronic devices. For such applications, it is generally expected that a plurality of coaxial capacitors, often numbering in the thousands, will be coupled in parallel in order to achieve the desired level of capacitance.

Abstract: A method for electroplating a copper deposit onto a semiconductor integrated circuit device substrate having submicron-sized features, and a concentrate for forming a corresponding electroplating bath. A substrate is immersed into an electroplating bath formed from the concentrate including ionic copper and an effective amount of a defect reducing agent, and electroplating the copper deposit from the bath onto the substrate to fill the submicron-sized reliefs. The occurrence of protrusion defects from superfilling, surface roughness, and voiding due to uneven growth are reduced, and macro-scale planarity across the wafer is improved.

Abstract: A method and apparatus for plating metal onto a substrate including positioning an anode spacer including a anode surface and a substrate contact surface with the substrate contact surface immediate a deposition surface of a substrate. The apparatus generally includes a plating cell configured to contain a plating solution therein, an anode disposed in the plating solution, and an anode spacer positioned in the plating cell, the anode spacer having an anode surface, and a substrate contact surface positioned immediate a deposition surface of the substrate, the anode spacer configured to communicated the plating solution therethrough. The method generally includes positioning a substrate in a plating cell, positioning an anode spacer immediate a deposition surface of the substrate, and flowing a plating solution through the anode spacer to plate a metal onto the deposition surface.

Abstract: A method and apparatus for monitoring copper seed layer growth during copper plating of a semiconductor wafer. A ring contact for use in copper plating of the semiconductor wafer is generally divided into a plurality of switches thereof. The ring contact is biased to prior to copper plating of the semiconductor wafer to determine a copper seed layer conductivity. Each switch among the plurality of switches can be connected together and thereafter the switches may be biased to an anode during copper plating, thereby permitting in-situ monitoring of copper seed resistance prior to the copper plating and a detection of copper seed damage and copper seed corrosion associated with the copper plating.

Abstract: An electroplating system that includes a wet area comprising one or more electrochemical processing cells for processing one or more semiconductor substrates in an electrolyte solution, a dry area for transferring the semiconductor substrates to the wet area prior to processing the semiconductor substrates and for receiving the semiconductor substrates from the wet area after processing the semiconductor substrates, and a cleaning module for removing unwanted deposits from the semiconductor substrates after processing the semiconductor substrates in the wet area but prior to transferring the semiconductor substrates to the dry area.

Abstract: A new class of solar selective absorption coatings are disclosed. These coatings comprise a structured metallic overlayer such that the overlayer has a sub-micron structure designed to efficiently absorb solar radiation, while retaining low thermal emissivity for infrared thermal radiation. A sol-gel layer protects the structured metallic overlayer from mechanical, thermal, and environmental degradation. Processes for producing such solar selective absorption coatings are also disclosed.