Patents Issued in May 6, 2004
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Publication number: 20040083925Abstract: A release agent for metallic mold for forming a plastic molded product characterized by containing a borate ester of polyoxyalkylene.Type: ApplicationFiled: July 24, 2003Publication date: May 6, 2004Inventor: Shigekatu Sato
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Publication number: 20040083926Abstract: A dry mix for producing embedding or molding compositions for metal casting processes such as the lost wax process containing a hydraulic binder component composed of sulfate-carrier-free ground portland clinker.Type: ApplicationFiled: September 5, 2003Publication date: May 6, 2004Inventors: Darina Mitkova, G?uuml;nter Schneider
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Publication number: 20040083927Abstract: A method for making a gypsum product water resistant, the method comprising adding a suspension of a hydrophobic substance to a gypsum slurry.Type: ApplicationFiled: November 6, 2002Publication date: May 6, 2004Inventor: Haggai Shoshany
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Publication number: 20040083928Abstract: A method comprising adding a suspension of a hydrophobic substance to a gypsum slurry. The hydrophobic substance may impart water repellent characteristics to the gypsum, may be used as a foaming aid, density reducer, dimension stabilizer, and others, and may increase the mechanical strength and durability of the gypsum product. In another embodiment of the present invention, suspensions of other substances may be used in addition to or in place of the hydrophobic substance to impart these characteristics.Type: ApplicationFiled: February 27, 2003Publication date: May 6, 2004Inventor: Haggai Shoshany
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Publication number: 20040083929Abstract: The invention provides an apparatus and method for positioning a moveable mass, such as the moveable components found in a typical XY table. The apparatus comprises driving means producing a driving force to move the mass along an axis, which mass has a variable center of gravity position perpendicular to said axis. The driving force from the driving means is operative to act through the center of gravity of the mass as the position of the center of gravity changes.Type: ApplicationFiled: November 5, 2002Publication date: May 6, 2004Applicant: ASM Technology Singapore Pte LtdInventors: Wen Chen, You Yong Liao
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Publication number: 20040083930Abstract: A method and associated apparatus of mounting an object such as a portable computer on a vehicle steering wheel provides an ergonomic workstation environment in a vehicle and an optimal operation environment for the object.Type: ApplicationFiled: August 18, 2003Publication date: May 6, 2004Inventor: Kyu Hyun Han
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Publication number: 20040083931Abstract: A small shelf primarily for attachment to the bedposts of wooden or metal bunk beds, although it may also be attached to the headboards of these type beds. The shelf is best molded of a plastic such as ABS, having integrally molded therewith at one end thereof a perpendicular mounting angle frame for attachment to a clamping device also of plastic. The surface of the shelf has a hole or depression therein for supporting a cup, beverage can or the like; and a groove therein for holding a writing instrument for example for inhibiting the occasional disruption inherent in this type of bed. Adequate space on the surface is provided to support a small radio, clock or book when the total weight thereon is no more than 5 or 6 pounds. The invention comprises plastic clamps slidably positioned into channels of the mounting angle frame.Type: ApplicationFiled: November 5, 2002Publication date: May 6, 2004Inventor: Jeffrey Stephen Gawronski
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Publication number: 20040083932Abstract: A folding and tilting table is disclosed which is versatile, simply constructed and easy to use. The table includes a table top, an elongated support member, two leg assemblies pivotally mounted to ends of the support member, a set of wheels connected to the leg assemblies and an elongated hinge connected to the support member and to the table top. A first pair of latch assemblies restrain the table top to the support member and a second pair of latch assemblies restrain the leg assemblies. Once released, the table top may rotate from an in-use horizontal position to a vertical position for storage. Also once released, the leg assemblies may move from the use mode to storage mode quickly and easily.Type: ApplicationFiled: October 31, 2002Publication date: May 6, 2004Inventors: Mark A. Kottman, Josiah M. Ives, Mark Schaefers, William C. Cesaroni, Shawn O. Barrett, Robert J. Glenn
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Publication number: 20040083933Abstract: A linear table includes a slide plate, a base, and pair of bearing assemblies. Each bearing assembly has an inner and outer bearing way, and a rolling element located between the bearing ways. The bearing ways are securely fixed to the slide plate and the base. A precision parallel device and preload fixture are used to align the bearing ways and provide a proper preload on the bearing assemblies without integral preload screws or other preload method, or integral bearing locating shoulders or other such geometry.Type: ApplicationFiled: August 28, 2003Publication date: May 6, 2004Inventors: Thomas J. Baric, James K. Monnich, Jeremy F. Mikesell, Mark S. Koster
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Publication number: 20040083934Abstract: A worktable includes a housing secured to bottom of a table top and having a chamber formed by two side walls and a bottom panel and having one or more orifices formed in the bottom panel by peripheral fences. One or more plates are secured between the side walls of the housing, and each has an aperture formed by a peripheral fence and aligned with the orifice of the housing for receiving a leg. A sleeve is engaged between the leg and the housing and the plate with a wedge action, for stably securing the leg to the table top with the housing without fasteners.Type: ApplicationFiled: November 1, 2002Publication date: May 6, 2004Inventor: Ming Mo Lin
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Publication number: 20040083935Abstract: The modular security safe with offset security bolt box of the present invention includes a number of modular panels which serve as the top, bottom, and sides of the safe. The modular panels of the safe are cast in a plastic or metal mold with high-density concrete reinforced by expanded metal. The modular panels included outer portions and stepped or rabbeted inner portions. The panels are formed from a sheet of material bent to a desired form. Concrete is poured in to the panel, in a single pour step. The panel is vibrated to allow the concrete to settle, and the concrete is allowed to set. The outer surface can then be covered with a desired laminate. The panels have security bolt boxes attached by bolts to the inner portions thereof. Security bolt boxes comprise a tray having a bottom and upstanding walls, and they can be formed by bending a single sheet of material. The modular side panels are attached to the top and bottom panels by bolts extending through the security bolt boxes.Type: ApplicationFiled: October 27, 2003Publication date: May 6, 2004Inventor: Karl Alizade
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Publication number: 20040083936Abstract: A structure of a motor driven driving mechanism of a sewing machine comprises a motor mounted on one side of the sewing machine and a driving mechanism disposed inside the frame of the sewing machine driven by the motor. A rotor shaft extends out of the cover, the rotor shaft comprises a connecting portion for connecting with the driving mechanism, and at least one resilient element is disposed on two sides of the connecting portion for connecting the connecting portion with the driving mechanism. Since the rotor shaft rotatably drives the driving mechanism, therefore frictional or ramming effects among the assembly parts can be eliminated or at least substantially reduced. Thus noise during operation and the damage to the mechanical parts can be effectively reduced.Type: ApplicationFiled: October 30, 2002Publication date: May 6, 2004Inventor: Jui-Jung Chuo
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Publication number: 20040083937Abstract: A personal watercraft includes an inner lid attached in covering relation over a rear portion opening provided in a deck of the personal watercraft, in which a rear edge of the rear portion opening is pressed by a locking member disposed in a locking position thereof to assure the air-tightness of the inner lid, and a rear cover 48 is provided in covering relation over the inner lid. A projection is provided integrally on the locking member which allows attachment of the rear cover when the locking member is in the locked position, but blocks attachment of the rear cover by being sandwiched between the deck and the rear cover, when the locking member is at an unlocked position thereof. A torsion spring (biasing member) which biases the locking member toward the unlocked position is provided between the locking member and the deck. The attaching structure prevents the inner lid from being not attached inadvertently.Type: ApplicationFiled: September 11, 2003Publication date: May 6, 2004Applicant: Honda Giken Kogyo Kabushiki KaishaInventors: Jun Nakajima, Tadaaki Nagata
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Publication number: 20040083938Abstract: Formations on the surface of bodies for reducing the drag relative to a medium which the body is located in or close to. The formations comprise a plurality of cavities (1,20,40,60). The surface in which the cavities are formed is closed. The cavity has a disruption edge (5,25,44,66) adjacent to the cavity, with the disruption edge located upstream of the cavity, so as to set the flowing medium most proximal to the surface into turbulence upon passing the disruption edge. The cavity has a maximum depth from the surface of at least approximately 2 mm.Type: ApplicationFiled: July 29, 2003Publication date: May 6, 2004Inventors: Fred Olsen, Hans Oigarden
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Publication number: 20040083939Abstract: This invention relates to methods for absorbing impacting shock loads from waves on marine hulls by using a diffuser to provide a reduced impact zone forward of the hull and to divide the wave and cause the non-compressible liquid of the wave to mix with air in the diffuser channels to form a compressible fluid to further absorb impacting shock loads. This system was invented to provide for wave shock absorption of wide bow flat-bottomed marine hulls. These hulls being more buoyant and stable, provided more usable space, while possessing very efficient planing hulls that are easier to manufacture than three dimensional pointed bow hulls.Type: ApplicationFiled: October 29, 2003Publication date: May 6, 2004Inventor: Ian Arthur Royle
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Publication number: 20040083940Abstract: An ROV comprising a topside, a fish and an umbilical cable for connecting the topside and the fish together. The fish is adapted to be powered by an onboard battery inductively coupled to the fish. The cable is of a fine diameter to reduce drag through the water. RF transmissions carry control and return signals to and from the fish and topside. The fish has two cameras. The front facing camera is located behind a dual layer flooded dome. A pan and tilt mechanism is fitted to one of the cameras and uses a pivotable gimbal frame driven by a lead nut moving along an arcuate bolt.Type: ApplicationFiled: October 28, 2003Publication date: May 6, 2004Inventors: Chris D. Shelton, Nigel Mark Jagger, Shaun David Househam, Lawrence Samuel Tyson, Jeremy Daniel Cooper, Michael William Dormer, Jan Matteo Paoli, Nicholas Ian Kempt, Mark Sanders, Graham Michael Pullin, Jaime Valls Miro, Frances Samalionis, Paul South, Tracy Currer, Steve O'Connor, Martin Bontoft
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Publication number: 20040083941Abstract: A boat with an inflatable collar mounted on the sides of the hull. The inflatable collar extends outwardly from the sides of the hull so that it contacts and displaces an increasing volume of water as the boat lists. The inflatable collar is partially filled with foam and the foam inserts are sized so that the boat retains a sufficient righting moment for its intended purpose, even when the inflatable collar has lost its water- and air-tight integrity. The foam inserts may also be sized to provide the boat with sufficient buoyancy to ensure that the boat will float even if filled with water or capsized.Type: ApplicationFiled: October 29, 2003Publication date: May 6, 2004Applicant: Safe Boats International, L.L.C.Inventor: William M. Hansen
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Publication number: 20040083942Abstract: A motorless water craft used to carry objects, or more particularly to aid hunters and hunting dogs in the retrieval of game, particularly water fowl. The motorless water craft is utilized as a trailing vessel, to be towed by, or attached to, a hunter's lead boat. Specifically, at least two pontoons are connected together, preferably in parallel orientation, by various platforms and a tow bar. The various platforms serve as a place for the dog to drop retrieved game, to ride or rest while waiting to retrieve game, and to mount or dismount the water craft. The platforms are of a design and material, such as plywood wrapped in a water proof material, that may adequately support the weight of the dog and that are able to maintain a viable connection to the pontoons. Atop the platforms there is hingedly attached a canopy, preferably in camouflaged design, within which the dog may be concealed while waiting to retrieve game.Type: ApplicationFiled: October 31, 2002Publication date: May 6, 2004Inventor: Scott E. Dunn
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Publication number: 20040083943Abstract: A spiral configured structure formed of metal or polymer is naturally biased into an erected and spiral arranged position, to form either a cone, a cylindrical structure, or other shaped structure, and which includes a series of lights, or a highly illuminated or phosphorescence dyed cloth, to act as a warning structure to the surrounding environment. The spiral structures can be contracted, into a flattened or near flattened configuration, and held by a fastening band, into closure. Various cross bracings or members are applied, at particular locations of the spiral structure, to provide it with reinforcement and rigidity at their upper and lower regions.Type: ApplicationFiled: September 9, 2003Publication date: May 6, 2004Inventor: Sunny E.L. Huang
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Publication number: 20040083944Abstract: An tire pressure indicator operative to provide a first visual indication if the tire pressure within a tire to which the indicator is coupled is below a first predetermined pressure and a second different visual indication if the tire pressure is above a second predetermined pressure. The indicator includes first and second magnetic members rotatably mounted within a housing that includes a transparent portion. The first magnetic member rotates in response to air pressure applied to a diaphragm that is mechanically coupled to the first magnetic member. The second magnetic member includes portions having first and second visual characteristics that are viewable through a transparent portion.Type: ApplicationFiled: October 16, 2003Publication date: May 6, 2004Inventor: Jason A. Morris
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Publication number: 20040083945Abstract: There are disclosed a silicon seed crystal which is composed of silicon single crystal and used for the Czochralski method, wherein oxygen concentration in the seed crystal is 15 ppma (JEIDA) or less, a silicon seed crystal which is used for the Czochralski method, wherein the silicon seed crystal does not have a straight body, and a method for producing a silicon single crystal by the Czochralski method comprising using said seed crystal, bringing a tip end of the seed crystal into contact with a silicon melt to melt the tip end of the seed crystal, with or without performing necking operation, and growing a silicon single crystal.Type: ApplicationFiled: October 28, 2003Publication date: May 6, 2004Applicant: Shin-Etsu Handotai Co., Ltd.Inventors: Eiichi Iino, Masanori Kimura
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Publication number: 20040083946Abstract: Methods and apparatus for concurrent growth of multiple crystalline ribbons from a single crucible employ meniscus shapers to facilitate continuous growth of discrete and substantially flat crystalline ribbons having controlled width.Type: ApplicationFiled: October 30, 2002Publication date: May 6, 2004Applicant: Evergreen Solar Inc.Inventor: Richard Lee Wallace
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Publication number: 20040083947Abstract: A process for producing a silicon single crystal which is doped with highly volatile foreign substance by pulling the single crystal from a melt which is held under predetermined process conditions in a crucible. A quantity of the foreign substance N0 is added in order to achieve a desired resistance of the melt, and the melt, after a time t, is after-doped at least once with a quantity &Dgr;N(t) of the foreign substance, in order to compensate for losses caused by the foreign substance evaporating out of the melt.Type: ApplicationFiled: October 21, 2003Publication date: May 6, 2004Applicant: Wacker Siltronic AGInventors: Martin Weber, Peter Vilzmann, Erich Gmeilbauer, Robert Vorbuchner
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Publication number: 20040083948Abstract: A method for making photonic crystal structures using amorphous silicon that is temperature compatible with a wide variety of substrates. Both hydrogenated and non-hydrogenated amorphous silicon may be used.Type: ApplicationFiled: October 31, 2002Publication date: May 6, 2004Inventor: Jeremy A. Theil
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Publication number: 20040083949Abstract: The present invention provides for sequential chemical vapor deposition by employing a reactor operated at low pressure, a pump to remove excess reactants, and a line to introduce gas into the reactor through a valve. A first reactant forms a monolayer on the part to be coated, while the second reactant passes through a radical generator which partially decomposes or activates the second reactant into a gaseous radical before it impinges on the monolayer. This second reactant does not necessarily form a monolayer but is available to react with the monolayer. A pump removes the excess second reactant and reaction products completing the process cycle. The process cycle can be repeated to grow the desired thickness of film.Type: ApplicationFiled: October 22, 2003Publication date: May 6, 2004Inventor: Arthur Sherman
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Publication number: 20040083950Abstract: Method and assembly for forming a paper or board web and a product made using the method. According to the method, the web (11) is made from fibers and then the web (11) is treated with pigment particles. The web is treated with microscopic pigment particles whose average size is so small as to permit the particles to adhere to each other by van der Waals forces. The particles are transferred to the web and adhered thereto advantageously using an ion-blast technique.Type: ApplicationFiled: October 29, 2003Publication date: May 6, 2004Applicant: Valmet CorporationInventors: Vilho Nissinen, Timo Nyberg, Pasi Rajala, Lars Gronroos, Pentti Virtanen, Veli Kasma, Hannu Niemela
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Publication number: 20040083951Abstract: An apparatus for atomic layer deposition preventing mixing of a precursor gas and an input gas. From the apparatus a flow of the input gas is provided over a surface of the workpiece wherein a beam of the electromagnetic radiation is directed into the input gas in close proximity to the surface of the workpiece, but spaced a finite distance therefrom. The input gas is dissociated by the beam producing a high flux point of use generated reactive gas species that reacts with a surface reactant formed on the surface of the workpiece by a direct flow of the precursor gas flown from the dispensing unit. The surface reactant and reactive gas species react to form a desired monolayer of a material on the surface of the workpiece.Type: ApplicationFiled: October 30, 2003Publication date: May 6, 2004Inventor: Gurtej S. Sandhu
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Publication number: 20040083952Abstract: A coating station, which in intended for coating a web with a coating material, includes a load-bearing and cross-directional frame extending substantially across the entire width of the web. The coating station also includes applicator elements supported to the frame. The frame is arranged by at least one cross component formed out of sheet metal into a box-type structure, the cross component extending substantially across the entire width of the web. The cross component is attached to the end components by its end parts.Type: ApplicationFiled: October 27, 2003Publication date: May 6, 2004Applicant: Metso Paper, Inc.Inventors: Leo Kurkinen, Vilho Nissinen, Mika Vahakuopus, Risto Vaatanen
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Publication number: 20040083953Abstract: Described are methods and apparatuses useful for spin-coating process solutions onto substrates, wherein the methods and apparatuses incorporate a pressure sensor to detect the pressure of a process solution, such as a pressure related to a beginning or end of a dispense of process solution from a dispenser; some preferred methods and apparatuses measure pressure of a photoresist, developer, water, solvent, or cleaner in a dispense line; and some preferred methods and apparatuses incorporate process control systems involving interrupted, parallel control methods.Type: ApplicationFiled: October 29, 2003Publication date: May 6, 2004Inventors: Jimmy D. Collins, Samuel A. Cooper
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Publication number: 20040083954Abstract: A coating apparatus having a fluid circulating system wherein the fluid ascending in a dipping container overflows an overflow edge disposed at the top of the dipping container into an overflow-fluid receiving container and returns from the bottom of the overflow-fluid receiving container into the dipping container, wherein the dipping container has a depth of ⅓ to ⅔ of the internal diameter thereof. When the dipping container is too deep, the powder or the like tends to be compressed tightly in the upper part of the dipping container, often impeding efficient insertion of a substrate, but the coating apparatus according to the present invention, the dimension thereof being specified as above, keeps favorable fluidity of the powder or the like.Type: ApplicationFiled: July 22, 2003Publication date: May 6, 2004Inventor: Takuji Nakamura
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Publication number: 20040083955Abstract: A vacuum chamber used for processing articles, such as integrated circuit wafers, display panels, and the like, has a small load lock chamber formed at an opening in a wall of the chamber by a moveable article supporting surface within the chamber and a cover outside of the chamber. The supporting surface and cover are sealed to the chamber wall when urged against it. Articles placed into the load lock chamber, when the cover is opened, are moved into the vacuum chamber for processing by moving the supporting surface away from the wall after the cover has been closed and a vacuum established in the load lock chamber. Articles are removed from the vacuum chamber in a reverse manner. Various mechanisms are describe for moving the articles, including a particular robotic device that simultaneously swaps the positions of two articles between the supporting surface and a processing location within the vacuum chamber by first pulling the articles together and then rotating them in a half-circle.Type: ApplicationFiled: July 17, 2003Publication date: May 6, 2004Inventor: Bruce Gordon Ramsay
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Publication number: 20040083956Abstract: This invention relates to a device, such as a paint mat, removably attachable to the base of a paint can, for collecting spills and drips from the paint can during use. The paint mat includes an attachment means, such as a magnet, in the central portion thereof, for attachment to the base of the paint can. When attached, the paint mat extends beyond the perimeter of the paint can. The paint mat may include an aperture distal to the central portion but not extending past the perimeter of the base. The semi-rigid board also includes an advertisement on at least one side thereof and an extension therefrom so as to allow a brush to rest.Type: ApplicationFiled: November 4, 2002Publication date: May 6, 2004Inventor: Thomas Christopher Demitry
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Publication number: 20040083957Abstract: A method and apparatus for coating a work piece. The system comprising an applicator adapted to travel over a portion of the work piece. The system being operable to heat the work piece and/or apply a coating onto the work piece as the applicator travels over the work piece. The system may comprise an induction heating system to heat the work piece. The system may be adapted to apply a variety of coatings, such as a liquid coating and a dry powder coating. The applicator being operable to heat the work piece prior to applying the coating or heating the work piece after the coating has been applied. The applicator may also be adapted to apply heat to heat shrink a coating material onto the work piece.Type: ApplicationFiled: November 1, 2002Publication date: May 6, 2004Inventor: Steven D. Latvis
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Publication number: 20040083958Abstract: Apparatus and methods for monitoring the application of a viscous material onto at least one moving strand or other narrow substrates. A detection unit, such as a machine vision system, an infrared sensor, an ultraviolet detector, or a light curtain with multiple detectors, senses radiation originating from the viscous material after it is applied to the strand or strands and, typically, before each strand is contacted with a substrate. The detection unit determines a detected value representative of a characteristic of the pattern from the sensed radiation, compares the detected value with a reference value representative of a desired standard for the characteristic, and outputs a signal in accordance with the result of the comparison.Type: ApplicationFiled: October 31, 2002Publication date: May 6, 2004Applicant: Nordson CorporationInventors: Laurence B. Saidman, David Zgonc, Patrick L. Crane
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Publication number: 20040083959Abstract: A chemical vapor deposition apparatus includes a deposition chamber defined at least in part by chamber walls, a substrate holder inside the chamber, and at least one process chemical inlet to the chamber. At least one purge inlet to the chamber is positioned elevationally above the substrate holder and outside a lateral periphery of the substrate holder. The purge inlet is configured to inject at least one purge material into the chamber and past the substrate holder. The purge inlet can be positioned and configured to inject an annular purge material curtain concentric to the substrate holder. A chemical vapor deposition method includes injecting at least one purge material into a deposition chamber and forming a purge curtain from the injected purge material. The purge curtain can extend downward from elevationally above a substrate holder and outside a lateral periphery of the substrate holder. The purge curtain can flow past the substrate holder.Type: ApplicationFiled: March 13, 2001Publication date: May 6, 2004Inventors: Craig M. Carpenter, Ross S. Dando
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Publication number: 20040083960Abstract: Reactors having isolated gas connectors, systems that include such reactors, and methods for depositing materials onto micro-devices workpieces are disclosed herein. In one embodiment, a reactor for depositing material onto a micro-device workpiece includes a reaction chamber, a lid attachable to the reaction chamber, and a connector. The connector has a first portion coupled to the lid, a second portion coupled to the reaction chamber, a gas passageway extending through the first and second portions, and a seal. The seal can surround the gas passageway between the first and second portions. The first portion is detachably coupled to the second portion. In one aspect of this embodiment, the connector can also include a second gas passageway extending through the first and second portions and a second seal surrounding the second gas passageway between the first and second portions.Type: ApplicationFiled: August 15, 2002Publication date: May 6, 2004Inventor: Ross S. Dando
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Publication number: 20040083961Abstract: Methods for depositing material onto workpieces, methods of controlling the delivery of gases in deposition processes, and apparatus for depositing materials onto workpieces. One embodiment of a method for depositing material onto a workpiece comprises placing a micro-device workpiece having a plurality of submicron features in a reactor proximate to outlet ports of a gas distributor in the reactor. This method also includes flowing a gas from a gas supply to a closed compartment of the reactor until the gas reaches a desired pressure within the compartment, and subsequently dispensing the gas from the outlet ports of the gas distributor. The compartment can be in a reaction chamber of the reactor or outside of the reaction chamber. The gas can be dispensed from the outlet ports by opening an outlet valve between the compartment and the outlet ports while also physically displacing the gas from the compartment.Type: ApplicationFiled: August 15, 2002Publication date: May 6, 2004Inventor: Cem Basceri
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Publication number: 20040083962Abstract: Processing gases reactive with each other are provided in parallel to a processing chamber through separate delivery lines including mass flow controllers devoted to each line. The parallel delivery lines meet in a mixing manifold located proximate to the processing chamber and relatively far downstream from the mass flow controllers and other flow-constricting components of the gas delivery system. The continuous high flow of gas provided by the devoted mass flow controllers may maintain a sufficiently high pressures on the delivery lines to prevent partial clogging from leading to a further drop in pressure and complete obstruction of the delivery line.Type: ApplicationFiled: August 15, 2002Publication date: May 6, 2004Applicant: Applied Materials, Inc.Inventors: Won Bang, Yen-Kun Wang, Steve Ghanayem
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Publication number: 20040083963Abstract: A method and apparatus for delivering precursors to a chemical vapor deposition or atomic layer deposition chamber is provided. The apparatus includes a temperature-controlled vessel containing a precursor. An energy source is used to vaporize the precursor at its surface such that substantially no thermal decomposition of the remaining precursor occurs. The energy source may include a carrier gas, a radio frequency coupling device, or an infrared irradiation source. After the precursor is exposed to the energy source, the vaporized portion of the precursor is transported via a temperature-controlled conduit to a chemical vapor deposition or atomic deposition chamber for further processing.Type: ApplicationFiled: August 19, 2002Publication date: May 6, 2004Inventors: Ross S. Dando, Craig M. Carpenter, Allen P. Mardian, Garo J. Derderian, Dan Gealy
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Publication number: 20040083964Abstract: Embodiments of the present invention provide methods, apparatuses, and devices related to chemical vapor deposition of silicon oxide. In one embodiment, a single-step deposition process is used to efficiently form a silicon oxide layer exhibiting high conformality and favorable gap-filling properties. During a pre-deposition gas flow stabilization phase and an initial deposition stage, a relatively low ratio of silicon-containing gas:oxidant deposition gas is flowed, resulting in formation of highly conformal silicon oxide at relatively slow rates. Over the course of the deposition process step, the ratio of silicon-containing gas:oxidant gas is increased, resulting in formation of less-conformal oxide material at relatively rapid rates during later stages of the deposition process step.Type: ApplicationFiled: September 19, 2002Publication date: May 6, 2004Applicant: Applied Materials, Inc.Inventors: Nitin K. Ingle, Xinyua Xia, Zheng Yuan
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Publication number: 20040083965Abstract: A vaporizer delivery system including a sublimatable solid precursor material applied to a wire substrate for vaporizing and achieving a continuous uninterrupted delivery of a vaporized precursor to a downstream semiconductor process chamber. The coated wire substrate is drawn past a heat source at a predetermined speed to rapidly heat and vaporize the sublimatable solid precursor.Type: ApplicationFiled: November 6, 2002Publication date: May 6, 2004Inventors: Luping Wang, Thomas H. Baum, Chongying Xu
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Publication number: 20040083966Abstract: To provide a low-stiffness air spring function without increasing the size of the equipment, a support frame, which supports a first gas chamber that is filled with a gas and that supports an object using the gas, is modified so that there is a second gas chamber, connected to the first gas chamber, provided within the support frame.Type: ApplicationFiled: August 6, 2003Publication date: May 6, 2004Applicant: Nikon CorporationInventors: Masato Takahashi, Koji Yamamoto
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Publication number: 20040083967Abstract: A plasma CVD apparatus includes first and second electrodes, neutral gas introduction pipes, and a plasma confining electrode interposed between the first and second electrodes to separate a plasma generation region and a substrate processing region. The plasma confining electrode has a hollow structure defined by an upper electrode plate, and a lower electrode plate, and has gas diffusing plates provided in the hollow structure, and has radical passage holes provided to supply radicals from the plasma generation region into the substrate processing region while isolating from a neutral gas. The plasma confining electrode is connected to the neutral gas introduction pipes, and a plurality of neutral gas passage holes are provided for each of the lower electrode plate and the gas diffusing plates to supply the neutral gas into the substrate processing region.Type: ApplicationFiled: August 26, 2003Publication date: May 6, 2004Applicants: NEC CORPORATION, ANELVA CORPORATIONInventors: Katsuhisa Yuda, Manabu Ikemoto
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Publication number: 20040083968Abstract: Apparatus for performing at least one processing operation on a substrate, the apparatus being provided with at least one process chamber and a vacuum lock for the purposes of placing the substrate from the surroundings into a process chamber without the reduced pressure in the respective process chamber being lost, the vacuum lock comprising a vacuum chamber which is bounded by a number of walls and to which a vacuum pump is connected, while in one of the walls at least one supply opening is provided, and for the purpose of the or each process chamber in one of the walls a process chamber opening belonging to a respective process chamber is provided, the at least one supply opening being externally closable with an outer cover and being closable from the vacuum chamber with an inner cover. Further disclosed is an assembly of such an apparatus with a transport device for supplying substrates to a supply opening of the vacuum lock and removing same.Type: ApplicationFiled: September 25, 2003Publication date: May 6, 2004Inventors: Ronaldus Joannes Cornelis Maria Kok, Michael Andrianus Theodoru Hompus, Marinus Franciscu Johannes Evers, Anton Habraken, Franciscus Cornelius Dings
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Publication number: 20040083969Abstract: [Problem] To provide a film forming apparatus being capable of forming films sequentially with two types of film forming mechanisms in the same chamber.Type: ApplicationFiled: March 3, 2003Publication date: May 6, 2004Applicants: Seiko Epson Corporation, YOUTEC Co., Ltd.Inventors: Takeshi Kijima, Eiji Natori, Mitsuhiro Suzuki
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Publication number: 20040083970Abstract: Maintenance work on an apparatus is facilitated, the maintenance cycle is extended and an improvement in throughput is achieved. A processing chamber 2 and an auxiliary vacuum chamber 3 are connected via a transfer port 20 formed through their wall surfaces. At the inner wall of the transfer port 20, a detachable gate liner 100 constituted of a plurality of members is installed. The maintenance work at the inner wall of the transfer port is facilitated since the gate liner 100 alone simply needs to be disengaged to be washed, replaced or the like. Insulating films 200 and 300 constituted of a rare earth oxide spray-deposit film with high plasma erosion resistance are used to coat the surface of the gate liner 100 and the surface of a gate valve 4 over the area covering the transfer port 20. As a result, damage attributable to plasma does not occur readily at these surfaces, and the extent of metal contamination and dust generation is lowered.Type: ApplicationFiled: April 1, 2003Publication date: May 6, 2004Inventors: Kosuke Imafuku, Tsuyoshi Hida
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Publication number: 20040083971Abstract: The invention in one embodiment is realized in a plasma reactor for processing a semiconductor workpiece. The reactor includes a vacuum chamber having a side wall and a ceiling, a workpiece support pedestal within the chamber and generally facing the ceiling, a gas inlet capable of supplying a process gas into the chamber and a solenoidal interleaved parallel conductor coil antenna overlying the ceiling and including a first plurality conductors wound about an axis of symmetry generally perpendicular to the ceiling in respective concentric helical solenoids of at least nearly uniform lateral displacements from the axis of symmetry, each helical solenoid being offset from the other helical solenoids in a direction parallel to the axis of symmetry. An RF plasma source power supply is connected across each of the plural conductors.Type: ApplicationFiled: October 29, 2003Publication date: May 6, 2004Applicant: Applied Materials, Inc.Inventors: John Holland, Valentin N. Todorow, Michael Barnes
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Publication number: 20040083972Abstract: The present invention is generally directed to a novel gas delivery system for various deposition processes, and various methods of using same. In one illustrative embodiment, a deposition tool comprises a process chamber, a wafer stage adapted for holding a wafer positioned therein, and a gas delivery system positioned in the chamber above a position where a plasma will be generated in the chamber, wherein substantially all of a reactant gas is delivered into the chamber via the gas delivery system. In another illustrative embodiment, the reactant gas exiting the gas delivery system is directed so as to cover substantially all of an area defined by an upper surface of the wafer.Type: ApplicationFiled: October 31, 2002Publication date: May 6, 2004Inventors: Weimin Li, Neal R. Rueger, Li Li, Ross S. Dando, Kevin T. Hamer, Allen P. Mardian, Gurtej S. Sandhu
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Publication number: 20040083973Abstract: A plasma 10 is generated within a film formation chamber 2, and mainly a nitrogen gas 11 is excited within the film formation chamber 2. Then, the excited nitrogen gas 11 is reacted with a diborane gas 13 diluted with a hydrogen gas, thereby forming a boron nitride film 15 on a substrate 4. Thus, the boron nitride film 15 excellent in mechanical and chemical resistance, high in thermal conductivity, and having a low relative dielectric constant &kgr; can be formed speedily.Type: ApplicationFiled: September 16, 2003Publication date: May 6, 2004Inventors: Hitoshi Sakamoto, Noriaki Ueda, Takashi Sugino
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Publication number: 20040083974Abstract: For enhancing plasma uniformity and long-term stability so as to readily form a film with excellent uniformity of thickness and quality and with good repeatability and for suppressing occurrence of image defects and drastically increasing the yield to form a deposited film ready for volume production, particularly, a functional deposit film (for example, an amorphous semiconductor used for semiconductor devices, electrophotographic photosensitive members, photovoltaic devices, and so on) is formed in an apparatus including a reaction vessel which can be hermetically evacuated, a substrate holder in the reaction vessel, a source gas supply, a power supply for high-frequency power. An end covering member is provided at an end of each of the substrate holder, the source gas supply and the power supply.Type: ApplicationFiled: October 24, 2003Publication date: May 6, 2004Inventors: Kazuto Hosoi, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Kazuyoshi Akiyama, Hitoshi Murayama