Abstract: Reactive gas is released through a crystal source material or melt to react with impurities and carry the impurities away as gaseous products or as precipitates or in light or heavy form. The gaseous products are removed by vacuum and the heavy products fall to the bottom of the melt. Light products rise to the top of the melt. After purifying, dopants are added to the melt. The melt moves away from the heater and the crystal is formed. Subsequent heating zones re-melt and refine the crystal, and a dopant is added in a final heating zone. The crystal is divided, and divided portions of the crystal are re-heated for heat treating and annealing.

Abstract: A compartment for powder coating workpieces conveyed through an aperture for the workpieces formed in an end wall and coated by means of automatic coating equipment inside the compartment in which there is negative pressure comprises at least one manual coating station located beyond and adjacent the aperture, as seen in conveying direction of the workpieces for manually coating workpieces outside of the compartment. In this manner, on the one hand, openings in the sidewalls of the compartment for manual coating of the workpieces from the side of the compartment can be dispensed with and, on the other hand, practically unlimited free space is offered during manual coating.

Abstract: A wafer lifter for self-centering a wafer onto a wafer pedestal situated in a physical vapor deposition chamber and a method for self-centering a wafer onto the wafer pedestal are described. The wafer lifter is constructed by a lifter body of annular shape, at least four support fingers emanating upwardly from the wafer lifter body and are spaced-apart from each other, and a platform on a tip portion of each of the at least four support fingers defined by a slanted surface from a vertical plane of an outside surface of the support finger. The platform, when supporting a wafer thereon, leaves substantially no gap between the slanted surface and an outer periphery of the wafer.

Abstract: A rotary substrate processing apparatus includes a rotor 1 having a holding member for holding a plurality of semiconductor wafers W arranged at appropriate intervals and a motor 4 for rotating the rotor 1. The holding member includes open/close holding rods 3 that are moved to open or close the rotor 1 in inserting the wafers W into the rotor 1 sideways and a plurality of constant-position holding rods 2a to 2d for holding the wafers W in cooperation with the open/close holding rods 3. Among the constant-position holding rods 2a to 2d, at least one constant-position holding rod 2a is equipped with a plurality of press members 5 which move toward respective peripheral portions of the wafers W by centrifugal force due to the rotation of the rotor 1. Consequently, it becomes possible to make the wafers W follow the rotation of the rotor 1 ensurely and also possible to reduce slip between the open/close holding rods 3, the constant-position holding rods 2a to 2d and the wafers W.

Abstract: A method for cleaning vehicle windows by means of a wiper with a wiper strip (12), whose wiper lip (16) rests against the vehicle window. The wiper strip (12) is set into oscillations lateral to its longitudinal direction (20) during the wiping operation and/or shortly before it is begun.

Abstract: A method of cleaning articles, such as infant feeding bottles is disclosed. The method provides for the use of alkali metal chloride, more particularly sodium chloride. The salt is deposited into the article to be cleaned, then water is added, and then the article is shaken to cause the crystalline substance to contact the interior walls of the container, thereby cleaning and sanitizing the interior of the article.

Abstract: The present invention is directed to a controlled environment processing chamber or chambers in which solvents and/or solutions used for processing a material or object can be introduced. The process includes a means of applying a negative gauge pressure to the chamber to remove air or other non-condensable gases. Means are provided for introducing a solvent, solvent mixture or solution in either a liquid or vapor state. A first system recovers solvent(s) or solution(s) from the object being processed and chamber, and a second system, separate from the first system, further recovers residual solvent or solution from the object and chamber. Treatment may be in the form of coating, etching, deposition, cleaning, stripping, plating, adhesion, dissolving, penetrating, anodizing, impregnating, debinding or any other process in which material is removed or deposited on a solid surface by transfer from or to a liquid or gas phase.

Abstract: A substrate treatment process is disclosed to remove organic matter existing on a substrate such as a wafer, glass substrate or ceramic. The process comprises treating the substrate with ozone water and then with hydrogen water, or treating the substrate with ozone-hydrogen water or treating the substrate with ozone water and hydrogen water at the same time.

Abstract: Excellent adhesion to subsequently applied paint or elastomer is obtained by coating a metal substrate with a phosphate conversion coating by contact with a liquid phosphating solution that contains zinc cations, phosphate anions, and at least one adhesion promoter selected from (i) film-forming organic substances, (ii) polymers of vinyl phenols modified by substitution of substituted aminomethyl moieties on their aromatic rings, (iii) inorganic oxides of one of the elements silicon, aluminum, titanium, and zirconium. Preferably, the phosphating solution also contains manganese and nickel cations and either iron cations or hydroxylamine. If adhesion to paint is desired, the adhesion promoter preferably is an acrylic film-forming substance, while if adhesion to elastomers is desired, the adhesion promoter preferably is a polymer of vinyl phenol and the phosphating solution preferably also contains calcium cations.

Abstract: A method for treating a micro-roughened metal surface to improve bonding between the metal surface and a polymer material. The method involves post-treating the micro-roughened conversion coated metal surface with an aqueous organo-silicon wetting composition after having formed the micro-roughened conversion coated metal surface with an adhesion promotion composition. Suitable organo-silicons include organosilanes, organosiloxanes, organosilizanes and the like. The method can be employed in the circuit board industry to improve bonding between layers in multilayer circuit boards.

Abstract: The present invention provides a non-oriented electrical steel sheet having ultra-high magnetic flux density and low core loss, characterized by: comprising a steel containing, in terms of wt %, Si: 0.4% or less, Ni: 2.0% to 6.0%, and Mn: 0.5% or less, with the balance consisting of Fe and unavoidable impurities; and having B25, the magnetic flux density under the magnetic field strength of 2500 A/m, of 1.70T or higher and B50, the magnetic flux density under the magnetic field strength of 5000 A/m, of 1.80T or higher.

Abstract: A stainless steel alloy that exhibits both high strength and toughness as a result of having particular ranges for chemistry, tempering temperatures and grain size. The alloy is a precipitation-hardened martensitic stainless steel with an ultimate tensile strength of at least 1200 MPa, a Charpy impact toughness of greater than 55 J, and a grain size of ASTM 5 or finer. The alloy consists essentially of, by weight, 14.0 to 16.0 percent chromium, 6.0 to 7.0 percent nickel, 1.25 to 1.75 percent copper, 0.5 to 1.0 percent molybdenum, 0.03 to 0.5 percent carbon, niobium in an amount by weight of ten to twenty times greater than carbon, the balance iron, minor alloying constituents and impurities.

Abstract: The steel sheet comprises: a ferritic phase having ferritic grains of 10 or more grain size number and ferritic grain boundaries; and at least one kind of Nb precipitates and Ti precipitates. The ferritic grain has a low density region with a low precipitate density in the vicinity of grain boundary. The low density region has a precipitate density of 60% or less to the precipitate density at center part of the ferritic grain. The steel sheet consists essentially of 0.002 to 0.02% C, 1% or less Si, 3% or less Mn, 0.1% or less P, 0.02% or less S, 0.01 to 0.1% sol.Al, 0.007% or less N, at least one element of 0.01 to 0.4% Nb and 0.005 to 0.3% Ti, by mass %, and the balance being Fe.

Abstract: The invention relates to a higher-strength steel strip or steel sheet comprising a predominantly ferritic-martensitic microstructure with a martensite content of between 4 and 20%, wherein the steel strip or steel sheet, apart from Fe and impurities due to smelting, comprises (in % by weight) 0.05-0.2% C, ≦1.0% Si, 0.8-2.0% Mn, ≦0.1% P, ≦0.015% S, 0.02-0.4% Al, ≦0.005% N, 0.25-1.0% Cr, 0.002-0.01% B. Preferably the martensite content is approximately 5% to 20% of the predominantly martensitic-ferritic microstructure. Such a higher-strength steel strip or steel sheet made from a dual phase steel comprises good mechanical/technological properties even after being subjected to an annealing process which includes an overageing treatment. Furthermore, the invention relates to a method for producing steel strip or steel sheet according to the invention.

Abstract: The present invention provides an aluminum alloy structural plate excelling in strength and corrosion resistance, in particular, resistance to stress corrosion cracking, and a method of manufacturing the aluminum alloy plate. This aluminum alloy structural plate includes 4.8-7% Zn, 1-3% Mg, 1-2.5% Cu, and 0.05-0.25% Zr, with the remaining portion consisting of Al and impurities, wherein the aluminum alloy structural plate has a structure in which grain boundaries with a ratio of misorientations of 3-10° is 25% or more at the plate surface. The aluminum alloy structural plate is manufactured by: homogenizing an ingot of an aluminum alloy having the above composition; hot rolling the ingot; repeatedly rolling the hot-rolled product at 400-150° C. so that the degree of rolling is 70% or more to produce a plate with a specific thickness, or repeatedly rolling the hot-rolled product at a material temperature of 400-150° C. in a state in which rolls for hot rolling are heated at 40° C.

Abstract: This invention provides a method and apparatus for casting, hot rolling and annealing of non-heat treatable aluminum alloys which comprises continuously casting, hot rolling and, in-line with the hot rolling line, heating the aluminum sheet using infrared heat. The infrared heating system uses a control to assure that the aluminum alloy is heated to the proper temperature based on one or a number of process variables, such as hot rolling exit temperature, hot rolled product exit rate in terms of speed and product dimensions, and sheet temperature at the exit of the infrared heater. Variations in the infrared heating temperature can be tolerated in the product without deviating from target mechanical properties.

Abstract: The adhesion of a capping layer, e.g., silicon nitride, to inlaid Cu is improved with an attendant reduction in hillock formation and, hence, improvement in electromigration resistance, by laser thermal annealing the exposed surface of the inlaid Cu after CMP to remove copper oxide therefrom. Embodiments include laser thermal annealing in NH3 or H2 at a temperature of about 370° to about 420° for a short period of time, e.g., about 10 to about 100 nanoseconds, to remove the copper oxide. Embodiments also include sequentially and contiguously laser thermal annealing the exposed planarized surface of inlaid Cu, ramping up the introduction of SiH4 and then initiating (PECVD) of a silicon nitride capping layer. Embodiments also include Cu dual damascene structures formed in dielectric material having a dielectric constant (k) less than about 3.9.

Abstract: The objective of the present invention is to provide a forging method that improves workability in machining, by turning the metallographical structure of products subject to impact load to a fine ferrite-perlite structure, without adopting the method of quenching and tempering, to obtain, as strength, a yield point (YP value) exceeding that obtained by the method of quenching and tempering, and making the tensile strength (TS) smaller compared with the method of quenching and tempering. A material to be forged has at least one kind of group 5 metal added thereto and is heated to a temperature suitable for hot forging. After forging to prescribed shape, cooling, and holding for a prescribed set time in a furnace at a tempering temperature, the material is further cooled to normal temperature by natural cooling.

Abstract: A method of fabricating ball protective mask includes (1) aluminum extrusion: the aluminum extruded structure has a suitably shaped outer ring frame and densely packed hollow holes so that the cross section thereof forms a grid-like structure, two sides thereof being provided with lugs; (2) slicing; (3) deburring by punching; (4) punch forming: the slice is punched to form a curved mask to accomplish an inchoate form of the mask; (5) subjecting the mask to heat treatment to obtain a product with satisfactory surface hardness.

Abstract: Relative coarse flakes fabricated from used and manufacturing scrap asphalt shingle material are finish processed into ground cover and/or erosion control products. Processing of the flakes include (i) softening the surface of the flakes, (ii) embedding a surface treatment material into the softened surface of the flakes, and either (iii) supplying the flake as loose ground cover, or (iv) compressing the flakes into a portable mat.

Abstract: Disclosed is a registration system and a method useful for controlling and correcting the phase and position of simultaneously advancing webs having pre-printed objects spaced at a pitch length characterized by small but significant pitch variation to a target web. Also disclosed are consumer products, such as disposable absorbent articles including the preprinted objects which were previously included in the webs phased before combining with a target web by utilizing the instant registration system. The pre-printed objects may include pre-printed, pre-bonded, pre-applied, pre-cut, or pre-glued objects or elements of disposable absorbent articles or registration marks produced on a separate independent process not control-linked to the instant registration method. The registration marks may be visible or normally invisible to the human eye.

Abstract: An optical-disk bonding apparatus for bonding two or more disk substrates with an adhesive, has a turning table for clamping the disk substrates; a thickness gauge for measuring a thickness of bonding layers; and a rotation control unit for controlling the turning of a turning table; wherein the thickness of the bonding layers is measured with the thickness gauge on the turning table; and a rotation of the turning table or the pressure acting on the disk substrates is controlled based on the measured thickness data.

Abstract: In a ceramic green-sheet stack to be fired to form a multilayered ceramic substrate having a cavity, a shrinkage-reducing pad is formed along a boundary interface between first ceramic green sheets having an opening for defining a cavity, and second ceramic green sheets having no opening. The shrinkage-reducing pad is exposed on the entire periphery of the inner peripheral surface of the cavity at the bottom end of the inner peripheral surface. The shrinkage-reducing pad contains a glass component, and serves to reduce shrinkage stress produced at the boundary interface between the first and second ceramic green sheets during the firing process.

Abstract: The invention describes an improved process for the sealing of alternating flutes of ‘honeycomb’ designed filters to be made after construction, or fabrication, of the basic filter structure, rather than during construction, as is shown in the prior art. The method seals both sides of the primary flutes as is typically done for one side in the prior art and then the media is rolled into a honeycomb shape so that secondary flutes, open on both sides of the roll are created. The roll is vertically orientated and then the lower end is immersed into a sealing compound to such a depth which will cause the sealing compound to travel up into the lower portion of the roll to a height above the height of the lower seal for the primary flutes. The sealing compound is allowed to cure, effectively sealing the secondary flutes. The roll is then cut along a line located above the height of the lower seal for the primary flutes and before the top surface of the sealing compound in the secondary flutes.

Abstract: A method and system for manufacturing a consolidated cellulosic article having first and second surfaces of a desired contour, a uniform density and variable caliper and basis weight are disclosed. The method and system employ a primary press having first and second similarly contoured platens to consolidate a mat of cellulosic material and a binding agent to a softboard having first level of density with first and second opposed sides of similar contour. A removal tool is then employed to remove cellulosic material from one or both of the first and second sides in a planar fashion. The resulting mat is then compressed a second time by a secondary press having first and second platens corresponding in shape to a higher density level while maintaining a substantially uniform caliper and basis weight.

Abstract: An electronic circuit is made by printing a Parmod® composition on a temporary substrate and curing it to produce a pattern of metal conductors. The conductors are laminated to a substrate under heat and pressure to produce a laminate with the metal prepatterned into the desired circuit configuration. The conductor can also be coated with a polymer and cured to form a prepatterned substrate. Single and double-sided circuits or multilayers can be made this way.

Abstract: An optical disk is manufactured by bonding a resin stamper having, on a principal plane, asperity pits on which a thin film is formed and a second substrate having a thickness of 0.3 mm or less with radiation cured resin such that the asperity pits face to the second substrate. The resin stamper is peeled off after curing the radiation cured resin to form asperity pits on the second substrate. A metal film is formed on the asperity pits on the second substrate to attain an information recording layer on the second substrate. A first substrate having an information recording layer and the second substrate having the formed information recording layer are bonded such that the both information recording layers face each other.

Abstract: A method for fabricating a refastenable absorbent garment includes moving a continuous body panel web in a machine direction and successively fixedly securing a plurality of discrete fastener pieces, spaced along the machine direction, to the body panel web. Each of the fastener pieces comprises a first and second end also spaced along the machine direction. The method further includes successively cutting said body panel web and each of the fastener pieces along a cross direction between the first and second ends of each of the fastener pieces and thereby forming a plurality of discrete body panels each comprising opposite side edges and a plurality of pairs of fastener members fixedly secured to one of the plurality of body panels and a next successive body panel.

Abstract: An article of clothing has a trim of thermoplastic material, which encapsulates a peripheral region of a fabric layer and is provided with a multiplayer structure preferably including at least one retroreflective layer. The article of clothing is manufactured in accordance with a sealing method utilizing RF, sonic sealing, heat sealing, and vibration sealing performed simultaneously with cutting excess of the thermoplastic material.

Abstract: There is provided an improved lever device for clamps of a garment-hanger, wherein the interior section, which press on the fabric the hung cloth, is coated by a strip of soft material, which is joined to the undersurface by means of a peripheral welding cord which is placed substantially along the external profile of the welded strip.

Abstract: A method for manufacturing shaped components for absorbent articles from web materials including the following steps. A first web of material is provided in a machine direction. The first web is cut into at least two shaped strips having alternating nested projecting portions defined by at least one shaping cut having a pattern extending in the machine direction and alternately extending in the cross machine direction to alternate distal points located between longitudinal side edges of the first web. At least a first and a second of the shaped strips are separated. A second web of material is provided in the machine direction. At least the first shaped strip is joined to the second web. The second web is repositioned in the cross machine direction a predetermined distance. At least the second shaped strip is joined to the second web. The resultant composite web is cut into separate shaped components.

Abstract: A flexible material includes a plurality of separate resilient elements joined to a flexible, resiliently stretchable substrate. Such a material is suitable for providing protective war for human and animal bodies. Preferably, the elements includes a foam material such as a closed cell polyethylene foam and the substrate includes a knitted fabric. In an advantageous embodiment, a second flexible substrate is bonded over the elements to sandwich them between the two layers of substrate.

Abstract: A pre-cut resilient fibrous insulation blanket includes a plurality of longitudinally extending blanket sections that are formed in the blanket by a plurality of laterally spaced apart cut and separable connector arrangements that hold the insulation blanket together for handling but enable the insulation blanket to be separated at any of the cut and separable connector arrangements to form a reduced width resilient fibrous insulation blanket. The number and widths of the blanket sections together with the lateral compressibility and resilience of the insulation blanket or a reduced width insulation blanket formed from the insulation blanket enable the insulation of essentially any width framework cavity up to the width of the insulation blanket with no more than one separation of the insulation blanket.

Abstract: A flat non-porous unitary solid surface product comprised of: (a) a flat non-porous unitary matrix made of polymethylmethacrylate, polyvinyl chloride, polycarbonate, or combinations thereof; and (b) a visible decorative object that is permanently fixated in the matrix, wherein the decorative object extends to least one edge of the matrix. A method for manufacturing the flat non-porous unitary solid surface product.

Abstract: A grid protects a manometer diaphragm from plasma. A plasma chamber is used to generate a plasma. A manometer is used to measure the pressure in the plasma chamber. A grounded electrically conductive grid is used to screen out ions in the plasma before they reach a diaphragm in the manometer. The grid may be formed in a centering ring. A pipe may be used to connect the manometer to the plasma chamber. The centering ring may be placed in the joint in the pipe, with the centering ring and grid being grounded to the pipe.

Abstract: In a multi-chamber load-locking device which is placed between a loading station which places a wafer cassette which houses semiconductor wafers and a transfer chamber which conveys the semiconductor wafers and in which lock-loading device chamber space is divided into two by the vertical motion of a plate, a device which comprises: sealing means by which the chamber space is selectively divided into two by contacting the plate and a state of no airflow is caused; a cylindrical cam provided with the same axis as that of the chamber; and a rotary actuator dynamically connected with the cylindrical cam, wherein the turning moment of the rotary actuator is converted into the vertical thrust of the axis and the plate rises and descends.

Abstract: A method and a system for forming slider end stops on a zipper tape that comprises first and second interlockable zipper parts. The method comprises the following steps: (a) transmitting sufficient ultrasonic wave energy into first and second areas of the zipper tape to cause the first and second interlocked zipper parts to deform and fuse in the first and second areas, the first and second areas being separated by a gap; and (b) applying sufficient heat and pressure onto a third area of the zipper tape to cause the interlocked zipper parts to deform and fuse in the third area, at least part of the third area being located between the first and second areas in the gap. The first and second areas do not impinge upon the zipper rails. The third area does impinge upon the zipper rails. Thus the zipper rails are deformed in the third area, but not in adjacent areas located below and contiguous with the first and second areas.

Abstract: A bonding tool for bonding electronic components by ultrasonic vibration. The bonding tool includes a horn supported by two ribs from both sides, and a transducer is attached to an end of this horn. A protrusion protruding downward from the center between the ribs is provided on the horn, and a tip of the protrusion is a bonding portion which contacts the electronic component. The transducer is driven to apply vertical vibration to the horn. A phase of vertical expansion and compression vibration on the horn generated by this vertical vibration is set to have the same phase as that of bending vibration on the protrusion. Accordingly, displacement by expansion and vertical vibration at side ends of the bonding portion is canceled out by displacement caused by bending vibration.

Abstract: A method of making bleached mechanical pulps is disclosed for pulping mills having a primary and a secondary refiner. A first step is to provide cellulosic materials, such as wood chips to refine into the pulp; the wood chips have an initial brightness level. A second step is to provide a bleaching liquor to the refining system of the pulp mill, wherein the liquor comprises an amount of hydrogen peroxide and an amount of alkali having greater than 0% to 100% magnesium hydroxide or soda ash or a combination thereof. A third step is to hold the pulp with the bleaching liquor at a temperature in the range of about 85° to about 160° C. and for about 2 to about 180 minutes. The components of the bleach liquor can be added at the first refiner or interstage between refiners.

Abstract: The invention relates to a paper machine clothing in the form of a fabric with a web pattern which recurs regularly over the surface and has indentations (20) that are formed by the thread overlays (21), the latter having been surface ground. Said thread overlays cover three consecutive warp or weft threads crosswise thereto. A paper machine clothing of this type can be used especially in “through air drying” techniques to produce an especially voluminous tissue paper.

Abstract: A dry end section for a paper-making machine for producing a high-bulk tissue is provided. Such a machine comprises a through-air dryer adapted to finally dry a paper web and a through-air drying fabric configured to transport the web through the through-air dryer. A separating device is included for facilitating separation of the web from the through-air drying fabric. A reel is also provided and is configured to receive the web thereon. The web is received directly on the separating device or on a fabric wrapped about the separating device. In some instances, the web may be compressed between the separating device and an adjacent roll or by a web-compressing device disposed along the fabric transporting the web. The web is then transported to the reel directly from the fabric or other support mechanism extending between the separating device and the reel, without free draw of the web. Associated methods are also provided.

Abstract: A method of reducing the level of malodorous amines emitted by paper when exposed to an alkaline environment is provided, which comprises making the paper so that it does not contain ammonium groups that are bonded to any polymer contained in the paper by only one chemical bond. Laminates which emit reduced levels of amines and which are comprised of this paper are also provided. In a preferred embodiment, the paper is sized with a sizing emulsion comprised of alkenyl succinic anhydride and a cationic water-soluble polymer having ammonium groups that are attached to the polymer by at least two chemical bonds.

Abstract: The product is presented in the form of a solution and is composed of carbonated magnesium di-n-propylate, n-propanol, and a hydrofluorocarbon (HFC) diluent selected from 1,1,1,2-tetrafluoroethane (HFC 134a) and 1,1,1,2,3,3,3-heptafluoropropane (HFC 227). The product may be obtained by a procedure which comprises preparing a solution of carbonated magnesium di-n-propylate in n-propanol and diluting said solution by addition of the HFC diluent. The product is suitable for de-acidifying cellulose-type material and preserving objects based on cellulose-type material.

Abstract: Process and apparatus for determining properties of a traveling material web. The process includes simultaneously illuminating a plurality of measuring points on the material web with electromagnetic radiation, and imaging, through at least one optical device, the plurality of measuring points on one detection surface of at least one detector. The device includes at least one radiation source for illuminating a plurality of measuring points on the material web, at least one detector having a detection surface, and at least one optical device for imaging of the measuring points on the detection surface of the at least one detector.

Abstract: The measuring device comprises at least one measuring head having a reference part, which comprises a reference surface against which the moving web is supported. The reference surface comprises a measuring area in the inside of which the property of the web is measured. The reference part is arranged in connection with the measuring head in such a way that below the reference part, there is a substantially open air space. The measuring head comprises means for generating negative pressure in the air space below the reference part, and the reference part comprises holes formed through it, in such a way that the negative pressure generated in the air space affects through the reference part the space between the reference surface and the moving web in such a way that the web is supported against the reference surface substantially over the whole area of the measuring area.

Abstract: Use of an essentially impermeable transfer belt (16) for a soft tissue paper machine for conducting a soft tissue web (1) through a shoe press nip in the press section of the paper machine, and from the shoe press nip to a Yankee cylinder (5) in the dryer section of the paper machine in a closed draw. The Yankee cylinder forms, together with a transfer means (17), a transfer nip for transferring the soft tissue web from the transfer belt to the Yankee cylinder.

Abstract: A magnetic dipole ring assembly positioned inside a vacuum chamber and around a wafer being sputter deposited with a ferromagnetic material such as NiFe or other magnetic materials so that the material is deposited with a predetermined magnetization direction in the plane of the wafer. The magnetic dipole ring may include 8 or more arc-shaped magnet segments arranged in a circle with the respective magnetization directions precessing by 720° around the ring. The dipole ring is preferably encapsulated in a vacuum-tight stainless steel carrier and placed inside the vacuum chamber. The carrier may be detachably mounted on a cover ring, on the shield, or on the interior of the chamber sidewall. In another embodiment, the magnet is a magnetic disk placed under the wafer. Such auxiliary magnets allow the magnetron sputter deposition of aligned magnetic layers.

Abstract: A process gas source (16) is connected to the vacuum chamber (5), and a metering valve (12) actuated by an automatic controller is installed between the vacuum chamber (5) and the process gas source (16). A potentiometric measurement electrode compares the amount of a gas in the vacuum chamber (5) with a reference gas by way of a reference electrode or with a solid body substituting for the reference electrode and sends a signal to automatic control unit (14), which contains a signal amplifier. The control unit then drives the generator of the power supply or the metering valve for the process gas.

Abstract: A sputtering target having an annular vault with a throat between two sidewalls and facing a substrate to be sputter coated. The vault is partially closed by a plate placed in the annular throat between the sidewalls. Thereby, the plasma density is increased within the vault. Furthermore, the position of the annular gap in the plate between the two sidewalls may be chosen to increase uniformity of sputtering deposition arising from the two sidewalls. The plate may be formed of one or more annular rings attached to the walls or a single plate having apertures formed therein may bridge the throat. Alternatively, the target may be formed as a cylindrical hollow cathode with the plate partially closing the circular throat. A rotating asymmetric roof magnetron may be combined with a hollow cathode without the restricting plate.

Abstract: A sputtering target comprising a substrate and a target material formed on the substrate, wherein the target material comprises a metal oxide of the chemical formula MOx as the main component, wherein MOx is a metal oxide which is deficient in oxygen as compared with the stoichiometric composition, and M is at least one metal selected from the group consisting of Ti, Nb, Ta, Mo, W, Zr and Hf, a process for its production, and a method for forming a film having a high refractive index.