Patents Issued in September 2, 2004
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Publication number: 20040169795Abstract: A color filter and a method for manufacturing the same are provided. The color filter includes a polarizer matrix (202), which is patterned in accordance with the pixel arrangement of a liquid crystal display device. The polarizer matrix (202) is made of a thin crystal film material, which may linearly polarize incident light along one direction. By incorporating with a polarizer film (206), the polarizer matrix (202) becomes an effective black matrix. A thinner black matrix may thus be produced, and the manufacturing processes of the color filter are simplified.Type: ApplicationFiled: February 27, 2004Publication date: September 2, 2004Inventors: Sheng-Shiou Yeh, Jia-Pang Pang
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Publication number: 20040169796Abstract: An object of the invention is to provide a color filter and a liquid crystal display device using it, which can acquire uniform color purity within a pixel. A color filter for coloring the first light ray L1 having a unidirectional optical path and the second light ray L2 having a bidirectional optical path for each pixel. This filter comprises: a step-forming layer of optically transmissive material, which can be supported by a base layer 20, and which is patterned for a pixel to form at least one recess-shaped portion having a bottom face 3b of a predetermined shape corresponding to an area wherein the first light ray L1 is caused to be transmitted and a wall face 3w of a predetermined height; and a coloring layer 1C deposited on the step-forming layer 30 and the recess-shaped portion for coloring the first and second light rays.Type: ApplicationFiled: December 12, 2003Publication date: September 2, 2004Inventor: Miho II
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Publication number: 20040169797Abstract: The invention enhances the aperture ratio of an electro-optical panel. A light-shielding layer includes a first light-shielding layer and second light-shielding layers. The first light-shielding layer is formed so as to overlap a plurality of scanning lines and a plurality of data lines. Each of the second light-shielding layers is provided on the downside of the direction of rubbing with respect to the corresponding projecting pattern. Each of the projecting patterns is formed such that part thereof overlaps the corresponding data line. The second light-shielding layers overlap the first light-shielding layer. All or part of each of the second light-shielding layers can also function as the first light-shielding layer to increase the area of an aperture.Type: ApplicationFiled: February 18, 2004Publication date: September 2, 2004Applicant: SEIKO EPSON CORPORATONInventors: Shin Fujita, Toru Nimura
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Publication number: 20040169798Abstract: A reflective LCD has a plurality of pixels formed in rows and columns in a matrix. Among the pixels, pixels A and B are arranged adjacent to each other in the same column. A connection line is arranged over the two pixels A and B arranged adjacent to each other in the same column. A first end of the connection line is connected to a capacitor electrode contact of a storage capacitor formed in the pixel A and to a reflective pixel electrode formed in the pixel A. A second end of the connection line is extended over a gate line for the pixel A with an insulating film among functional films being between the connection line and the gate line and is connected to a source electrode (or drain electrode) of a switching element formed in the pixel B.Type: ApplicationFiled: February 25, 2004Publication date: September 2, 2004Inventor: Takayuki Iwasa
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Publication number: 20040169799Abstract: A liquid crystal device has a configuration including substrates 200 and 300 bonded to each other with a sealant 110 and a liquid crystal 160 enclosed in the gap therebetween. Common electrodes 214 are provided on the inner face of the substrate 200, whereas an underlying film 301, a reflective film 302 composed of a silver alloy, a protective film 303 covering the reflective film 302, and segment electrodes 314 are provided on the inner face of the backside substrate 300. Since the protective film 303 suppresses the crystal grain growth of the reflective film 302 at a high-temperature treatment, a decrease in reflectance is avoided. A lead 350 comprises a laminate of a reflective conductive film 352 having a crystal grain size which is larger than that of the reflective film 302 and a transparent conductive film 354 which is formed by patterning the same layer as the segment electrode 314.Type: ApplicationFiled: March 8, 2004Publication date: September 2, 2004Inventors: Manabu Hanakawa, Shoji Hinata
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Publication number: 20040169800Abstract: In a liquid crystal display, first and second substrates are provided opposing each other with a liquid crystal layer held between them, the outer surface of the first substrate serves as a light scattering surface having a light scattering characteristic, and a reflector including an irregular reflection surface is provided on the light scattering surface so that the reflection surface is on the light scattering surface side.Type: ApplicationFiled: March 8, 2004Publication date: September 2, 2004Inventors: Katsumasa Yoshii, Tetsushi Tanada
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Publication number: 20040169801Abstract: A liquid crystal display device free from reduction of chromaticity and having a good image quality in comparison with a normally white mode semi-transmission liquid crystal display device even in a case of employing a normally black mode, able to secure a gap of a reflection portion able to suppress occurrence of defects, enabling a reduction of voltage, able to realize a reduction of power consumption, exhibiting a more natural color of the dark state of transmission, and able to improve the image quality, wherein a reflection portion and a transmission portion are provided in one pixel, a normally black mode which becomes a dark state when no voltage is supplied is employed, an orientation mode of the liquid crystals is a twist orientation, a polarization plate and one phase difference plate are provided on a viewing surface side, and a polarization plate is provided on a back surface side.Type: ApplicationFiled: February 26, 2004Publication date: September 2, 2004Applicant: Sony CorporationInventors: Masaaki Kabe, Youko Takada, Eiji Sakai, Makoto Jisaki, Hidemasa Yamaguchi, Shuichi Tatemori
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Publication number: 20040169802Abstract: A method for forming an alignment layer of a liquid crystal display device includes providing a substrate having a plurality of unit panels formed thereon, loading the substrate onto a stage, selectively dropping an alignment material onto a first one of the unit panel regions by an alignment material dropping unit having a plurality of heads, each of the heads having a plurality of holes arranged along a row at regularly-spaced interval distance d1, and forming an alignment layer on the substrate to have a uniform thickness.Type: ApplicationFiled: February 27, 2004Publication date: September 2, 2004Applicant: LG.Philips LCD Co., Ltd.Inventors: Heon-Do Yun, Yong-Sang Byun
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Publication number: 20040169803Abstract: There is a liquid crystal display element capable of obtaining a good display performance which is not influenced by the deterioration with the time course and the history of applied voltage.Type: ApplicationFiled: March 10, 2004Publication date: September 2, 2004Applicant: Kabushiki Kaisha ToshibaInventors: Rieko Fukushima, Kohki Takatoh
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Publication number: 20040169804Abstract: A method for forming an alignment layer of a liquid crystal display device includes providing a substrate having a plurality of unit panels formed thereon, loading the substrate onto a stage, selectively dropping an alignment material onto unit panel areas by using an alignment material dropping unit having a plurality of heads, each of the plurality of heads having a plurality of holes, and removing the alignment material remaining on a surface of the holes using an alignment material removal unit connected to the alignment material dropping unit.Type: ApplicationFiled: February 27, 2004Publication date: September 2, 2004Applicant: LG.Philips LCD Co., Ltd.Inventors: Heon-Do Yun, Yong-Sang Byun
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Publication number: 20040169805Abstract: A method for forming an alignment layer of a liquid crystal display device includes: providing a substrate with a unit panel area; loading the substrate on a stage; selectively dropping an alignment material onto the unit panel area through an alignment material dropping unit having a head that has a plurality of holes through which the alignment material is dropped; and removing alignment material remaining about the holes of the alignment material dropping unit by an alignment material removing unit which scrapes the surface of the alignment material dropping unit having the holes therein.Type: ApplicationFiled: February 27, 2004Publication date: September 2, 2004Applicant: LG. Philips LCD Co., Ltd.Inventors: Heon-Do Yun, Yong-Sang Byun
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Publication number: 20040169806Abstract: In a vertically aligned liquid crystal display device for controlling liquid crystal molecules alignment in voltage application by providing linear structures or linear slits consisting of a plurality of constituent units to at least one of a pair of substrates having an electrode thereon, there is provided alignment controlling means for forming an alignment singular point s=−1 of liquid crystal molecules at an intersecting point between the structures on the pixel electrode or the slits in the electrode and an edge of a pixel electrode on one of the substrates.Type: ApplicationFiled: March 2, 2004Publication date: September 2, 2004Applicants: Fujitsu Limited, FUJITSU DISPLAY TECHNOLOGIES CORPORATIONInventors: Arihiro Takeda, Yoshio Koike, Takahiro Sasaki, Kouji Tsukao, Shingo Kataoka, Kimiaki Nakamura, Yuichi Inoue, Kazutaka Hanaoka, Seiji Tanuma, Takatoshi Mayama, Hidefumi Shida, Yasutoshi Tasaka, Takashi Sasabayashi, Yohei Nakanishi
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Publication number: 20040169807Abstract: A liquid crystal display includes an array pixel including a plurality of pixels arranged in a matrix. The plurality of pixels include a set of pixels including a pair of center pixels adjacent to each other, and a pair of first-color pixels and a pair of second-color pixels obliquely facing each other across the center pixels. Each pixel includes a pixel electrode and a thin film transistor. The liquid crystal display further includes a plurality of gate lines extending in a row direction for transmitting a gate signal to the pixels, and a plurality of data lines extending in a column direction for transmitting data signals to the pixels. The pixels are subject to polarity inversion.Type: ApplicationFiled: August 12, 2003Publication date: September 2, 2004Inventors: Soo-Guy Rho, Keun-Kyu Song, Jeong-Ye Choi, Nam-Seok Roh, Cheol-Woo Park, Mun-Pyo Hong, Ho-Yong Jeong
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Publication number: 20040169808Abstract: A pixel structure of an in-plane switching liquid crystal display device is described. The structure includes a glass substrate, a data line, a gate line, a transistor and a common electrode. The data line, the gate line and the transistor are located on the glass substrate. The transistor is composed of a gate electrode, a source electrode and a drain electrode. The common electrode has an opening disposed directly over the data line, the gate line and the transistor, wherein the opening is wider than the data line.Type: ApplicationFiled: September 4, 2003Publication date: September 2, 2004Applicant: HANNSTAR DISPLAY CORPORATIONInventors: Po-Sheng Shih, Wei-Hsin Wang
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Publication number: 20040169809Abstract: A liquid crystal fabrication method includes the steps of: dropping liquid crystal on a first substrate at an upper surface inside regions enclosed by a sealing agent disposed thereon; overlaying a second substrate on the first substrate downward to stick the substrates together; sticking a polarizing plate on an upper surface of the first and second substrates; and collectively dividing the first and second substrates and the polarizing plate.Type: ApplicationFiled: February 27, 2004Publication date: September 2, 2004Applicant: Sharp Kabushiki KaishaInventors: Koji Yamabuchi, Makoto Nakahara, Akinori Izumi
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Publication number: 20040169810Abstract: A liquid crystal display has spacers for maintaining a liquid crystal layer and a cell gap between a substrate and an opposite substrate and also has regions either within a single pixel or over two or more pixels. The spacers are of columnar shape elongated from the substrate to the opposite substrate or the other way round, and the columnar spacers are provided in regions in which the liquid crystal layer is thinnest among those regions in which the liquid crystal layer varies in thickness. The structure makes the liquid crystal display having two or more different cell gaps to stably maintain those cell gaps and produces good quality displays.Type: ApplicationFiled: March 4, 2004Publication date: September 2, 2004Applicant: Sharp Kabushiki KaishaInventors: Koichi Fujimori, Yozo Narutaki, Tokihiko Shinomiya
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Publication number: 20040169811Abstract: A method for manufacturing an optical compensated bend nematic liquid crystal display panel and a structure thereof are described. A surface of a first glass substrate having a plurality of first spacers disposed thereon, wherein a first alignment layer is formed on the surface of the first glass substrate, is provided first in this method. Then, a mixture consisting essentially of a plurality of liquid crystal molecules and a plurality of monomers with long side chains, of which carbon number is over 7, is coated on the surface of the first glass substrate. Thereafter, the mixture is cured by UV irradiation and the monomers are transferred into polymers to form an isolation layer on top of the mixture. After a second glass substrate having a plurality of second spacers disposed thereon and a second alignment layer formed thereon is provided, the first glass substrate and the second glass substrate are aligned and assembled.Type: ApplicationFiled: September 25, 2003Publication date: September 2, 2004Inventors: Kei-Hsiung Yang, Chien-Huang Liao, Hao-Ming Chang, Yen-Ting Chen
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Publication number: 20040169812Abstract: A gate wire including a gate line and a gate electrode is formed on an insulating substrate of a TFT array panel. A semiconductor pattern made of amorphous silicon is formed on the gate insulating layer covering the gate wire. A data wire including a data line, a source electrode, and a drain electrode is formed on the semiconductor pattern or the gate insulating layer covering the gate wire. A part of the semiconductor pattern extends under the data line, and a light blocking member overlapping the semiconductor pattern under the data line is formed using the same layer as the gate wire. The light blocking member is to prevent light incident upon the substrate from a backlight from entering the amorphous silicon layers; therefore, the stripes of different brightness and waterfall phenomenon in which the stripes move up and down can be removed in an LCD using a backlight driven by a rectangular wave of ON/OFF signals outputted from inverter.Type: ApplicationFiled: December 17, 2003Publication date: September 2, 2004Inventor: Dong-Gyu Kim
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Publication number: 20040169813Abstract: This invention relates to liquid crystal (LC) displays comprising cells of well-defined shape, size and aspect ratio which cells are filled with a liquid crystal composition preferably containing dichroic dye(s), and novel processes for their manufacture.Type: ApplicationFiled: March 5, 2004Publication date: September 2, 2004Inventors: Rong-Chang Liang, Scott C.J. Tseng, Xuan Thanh Phan, Ying-Syi Li, Weijin Li
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Publication number: 20040169814Abstract: Novel eyewear are disclosed which comprise a lens and a sealing frame. The lens is adapted to cover at least one of a user's eyes. The frame has an adhesive side and is disposed adjacent the perimeter of the lens. A first portion of the adhesive side is disposed at the perimeter of the lens forming a seal between the frame and the lens. A second portion of the adhesive side extends laterally beyond the perimeter of said lens to provide adhesive attachment of the eyewear to the face of the user.Type: ApplicationFiled: July 25, 2002Publication date: September 2, 2004Inventor: Michael James Bleau
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Publication number: 20040169815Abstract: A rimless spectacle side arm mounting system, comprising a screw (2) installed approximately horizontally and approximately parallel to the “plane” of a lens (1), the thread of which is pointing to the outer edge of the lens (1), is free to cooperate with a nut (18) and is proud of the edge of the lens (1), a pair of spectacles comprising such a mounting system and a cord (20, 21) spectacle side arm, comprising a nut (18) in the form of an internally threaded dowel, one end of which is practically closed whilst still leaving room for the cord (20, 21) to pass through, the end of which on the side of the dowel (18) has a wider part to lock it in the dowel (18) whilst still leaving the dowel free to rotate.Type: ApplicationFiled: December 22, 2003Publication date: September 2, 2004Inventor: Francois Lambert
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Publication number: 20040169816Abstract: An accommodating intraocular lens is provided that having optical parameters that are altered in-situ using forces applied by the ciliary muscles, in which a lens body carries an actuator separating two fluid-filled chambers having either the same index of diffraction or different indices of refraction, actuation of the actuator changing the relative volumes of fluid within an optic element of the lens and altering the optical power of the lens.Type: ApplicationFiled: December 12, 2003Publication date: September 2, 2004Applicant: PowerVisionInventor: Victor Esch
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Publication number: 20040169817Abstract: Apparatus and methods are described for aligning diagnostic and therapeutic iris images, i(via) iris pattern recognition, for effecting more accurate laser treatment of the eye. A method for aligning a dilated pupil diagnostic iris image associated with a diagnostic measurement for calculating a laser treatment, with a constricted pupil diagnostic iris image, by identifying an iris landmark that is not identifiable solely between the two images, includes a sequential plurality of diagnostic iris images of varying pupil size such that the iris landmark can be tracked between the two images. The aligned, constricted pupil diagnostic image can then be aligned with a constricted pupil treatment image and the ablation pattern rotated accordingly. Limbal edge detection is used in the diagnostic images to provide pupil center translation information for translational alignment of the laser treatment.Type: ApplicationFiled: April 26, 2004Publication date: September 2, 2004Inventors: Ulf Grotehusmann, Gerhard Youseffi
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Publication number: 20040169818Abstract: A fundus camera capable of obtaining a fundus image under an accurate alignment condition and obtaining a fundus image under an accurate focusing condition. The fundus camera for photographing a fundus of an eye to be examined has a system having an objective lens and a diaphragm arranged in a position approximately conjugate with a pupil with respect to the lens, for observing and photographing the fundus via the lens and the diaphragm, an optical path bifurcating member which is arranged on an optical path between the lens and the diaphragm, a system for observing an anterior segment of the eye via the lens and the optical path bifurcating member, and a correction member, which is arranged on an optical path of the fundus observation/photographing optical system, for correcting a deviation of an optical axis of the fundus observation/photographing optical system caused by arrangement of the optical path bifurcating member.Type: ApplicationFiled: February 23, 2004Publication date: September 2, 2004Inventor: Hidetaka Hoshino
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Publication number: 20040169819Abstract: An apparatus and method for testing a human eye's sensitivity to glare under various conditions where light intensity is varied and passes through a given translucent filter to create a glared condition. The human eye is then provided a filter such as a pair of sunglasses that with the proper level of filter may assist a human subject in eliminating the glared condition.Type: ApplicationFiled: January 7, 2004Publication date: September 2, 2004Inventor: Takuro Tsukatani
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Publication number: 20040169820Abstract: Methods, devices, and systems establish an optical surface shape that mitigates or treats presbyopia in a particular patient. The combination of distance vision and near vision in a patient can be improved, often based on input patient parameters such as pupil size, residual accommodation, and power need. Iterative optimization may generate a customized corrective optical shape for the patient.Type: ApplicationFiled: December 5, 2003Publication date: September 2, 2004Applicant: VISX, IncorporatedInventors: Guangming Dai, Kingman Yee
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Publication number: 20040169821Abstract: Apparatus for displaying still images that appear animated to viewers in motion relative to those images includes a backboard, a plurality of images mounted on a backboard, and a slitboard mounted between the backboard and the viewer. As viewers pass by, the slitboard acts like a shutter creating an animation effect. Various backboard and slitboard side profiles, such as, for example, parallel and vertical, parallel and non-vertical, parallel and nonplanar, and nonparallel and nonplanar, can be used to facilitate installation of the apparatus in spatially-constrained environments.Type: ApplicationFiled: March 1, 2004Publication date: September 2, 2004Applicant: Submedia, LLC.Inventors: Joshua D. Spodek, Matthew H. Gross, Brian Mills
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Publication number: 20040169822Abstract: A projection system including a lighting system, a screen, a color filter separating light emitted from the lighting system according to wavelengths of the light, a first reflecting mirror reflecting the light passing through the color filter to change a path of the light, a display device provided in a predetermined position in the first reflecting mirror, a second reflecting mirror reflecting light reflected from the first reflecting mirror toward the display device, and a projection lens unit enlarging and projecting a color image formed by the display device onto the screen.Type: ApplicationFiled: November 4, 2003Publication date: September 2, 2004Applicant: Samsung Electronics Co., Ltd.Inventors: Young-chol Lee, Il Kweon Moon, Hee-joong Lee
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Publication number: 20040169823Abstract: Image display apparatus comprising projector means, optical means for splitting incident light, a first modulator for modulating red light, a second modulator for modulating green light, a third modulator for modulating blue light, optical means for recombining the combined modulated red light, green light and blue light, and control means for controlling the operation of the first, second, third and fourth modulators such that the dynamic range of the image display apparatus is enhanced.Type: ApplicationFiled: November 26, 2003Publication date: September 2, 2004Inventors: Raymond John Bridgwater, Anirudh Luthra, John Robert Harding, Geoffrey Howard Blackham, Ian MacPherson
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Color management system having a prism to compensate for optical aberrations and to enhance contrast
Publication number: 20040169824Abstract: A color management system for use with projection displays includes a beamsplitter positioned to receive a light beam, a microdisplay positioned to receive the light beam from the beamsplitter and emit a modified light beam to the beamsplitter, and a plurality of prisms positioned to receive the modified light beam from the beamsplitter and emit a light output that compensates for an optical aberration induced by the beamsplitter.Type: ApplicationFiled: March 5, 2004Publication date: September 2, 2004Inventors: Michael Newell, Clark Pentico -
Publication number: 20040169825Abstract: A projector comprises a light source device 413 in which a light source cooling air flow channel X for introducing a cooling air to an internal light source lamp 411 is formed and an internal housing 47 for housing an optical element unit 600, which subjects the light beam emitted from this light source device 413 to an optical processing. The internal housing 47 is formed with a pair of optical element cooling opening portions 471A, 472A, which are oppositely arranged by mutually pinching the optical element unit 600 in order to allow a cooling air to pass through according to the arrangement of the optical element unit 600. Further, the underside of the internal housing 47 is provided with a fan 54, in which a suction port 54A is directed to the opening portion 471A and an exhaust port 54B is connected to the light source cooling air flow channel X. Since an air flows along an arrow marked channel, the optical element unit 600 and the light source lamp 411 can be sufficiently cooled.Type: ApplicationFiled: November 19, 2003Publication date: September 2, 2004Inventors: Takaaki Ozawa, Toshio Matsumiya
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Publication number: 20040169826Abstract: An apparatus and method for reducing the moiré effect in rear-projection displays by rotating the dark-stripe structure (711, 712) in the screen (71) 45±15 degrees relative to the displayed pixel structure. By rotating the dark-stripes (711) relative to the displayed pixels, the spatial frequency at which the moiré effect sets in can be improved by 15% to 41%.Type: ApplicationFiled: March 2, 2004Publication date: September 2, 2004Inventors: Dana J. Segler, Adam J. Kunzman
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Publication number: 20040169827Abstract: A projection display apparatus employs a plurality of projectors 1, 2, 3 and combines images from the projectors into a large composite image on a nonplanar screen such as a concave spherical screen 10. The composite image is of high quality and high resolution and is normally visible by audience. The projectors 1, 2, 3 receive video signals through a geometric conversion unit and project and display images on the nonplanar screen 10 according to the received video signals. The geometric conversion unit transforms the field angles of images to display, according to relationships among the positions of the projectors 1, 2, 3, the positions of areas of the nonplanar screen 10 to which the projectors project images, and the position of an audience, thereby compensating distortions of images caused by the nonplanar shape of the screen 10.Type: ApplicationFiled: February 23, 2004Publication date: September 2, 2004Inventors: Mitsuo Kubo, Masaru Watanabe, Hiroshi Hayashi
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Publication number: 20040169828Abstract: There is provided a projector apparatus having an image forming optical system including a plate fixed to a housing, and a plurality of reflecting mirrors attached to the plate through respective holding members. The material of the reflecting mirrors, and the materials of the plate and the holding members have approximately equal coefficients of linear expansion. Sliding means is provided at a contact point between the housing and the plate for releasing an excessive force generated at the contact point.Type: ApplicationFiled: February 18, 2004Publication date: September 2, 2004Applicant: NEC VIEWTECHNOLOGY, LTD.Inventor: Kunitaka Furuichi
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Publication number: 20040169829Abstract: A projection type display optical system is provided to resolve problems of keystone distortion, and to improve illumination efficiency and contrast uniformity of an image.Type: ApplicationFiled: February 26, 2004Publication date: September 2, 2004Applicant: LG Electronics Inc.Inventor: Soon Hyung Kwon
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Publication number: 20040169830Abstract: In a projection arrangement comprising a light source (1) for generating a luminous field (2), a reflecting light modulator (4; 27) onto which light coming from the luminous field (2) may be directed, said light being modulated by the light modulator (4; 27) in order to generate an image, and further comprising projection optics (5; 21, 32), arranged following the light modulator, for projecting said image, the projection optics (5; 21, 32) comprise imaging optics (5; 21) including a mirror (9, 25) and a lens (6; 7; 8; 22; 23; 24) arranged between the light modulator (4; 27) and the mirror (9; 25), the light coming from the light modulator (4; 27) and reflected by the mirror (9; 25) passing twice through the lens (6; 7; 8; 22; 23; 24) and the light coming from the luminous field (2), which is directed onto the light modulator (4; 27), passing through the lens (6; 7; 8; 22; 23, 24) of the imaging optics (5; 21) only once.Type: ApplicationFiled: December 5, 2003Publication date: September 2, 2004Inventor: Eberhard Piehler
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Publication number: 20040169831Abstract: In a display panel, a plurality of pixel sections are arranged in the form of a matrix. Each of the pixel sections includes a pixel for displaying an image for the left eye and a pixel for displaying an image for the right eye. Lenticular lens having repeated convex surfaces is disposed in front of the display panel to deflect the light emitted from each pixel in the horizontal direction from the pixel for displaying the image for the left eye to the pixel for displaying the image for the right eye in each pixel section. Reflection plate reflects the exterior light toward the display panel and has surface projections on the surface. In this case, the focal distance f of the lens is different from the distance H between the surface of the reflection plate and the apex of the lens.Type: ApplicationFiled: February 27, 2004Publication date: September 2, 2004Applicant: NEC CORPORATIONInventors: Shin-ichi Uehara, Nobuaki Takanashi
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Publication number: 20040169832Abstract: Reduced-pressure (“vacuum”) chambers, and microlithographic exposure systems including one or more of such chambers, are disclosed. The vacuum chamber exhibits reduced deformation of a bulkhead of the chamber during evacuation of the chamber during a change in pressure differential across the bulkhead. A secondary wall is situated relative to the bulkhead outside the chamber and at a gap distance from the bulkhead, so as to form a secondary reduced-pressure chamber in the gap. The secondary reduced-pressure chamber is isolated from the pressure outside the chamber and from the subatmospheric pressure inside the chamber. The differential between the pressure outside the chamber and the pressure inside the secondary reduced-pressure chamber is exerted on the secondary wall, but has substantially no effect on the bulkhead, thereby reducing deformation of the bulkhead.Type: ApplicationFiled: March 10, 2004Publication date: September 2, 2004Applicant: Nikon CorporationInventor: Toshimasa Shimoda
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Publication number: 20040169833Abstract: Alignment marks (PMOL, PMOR, and FXY01 to FXY04) for measuring a wafer position are formed on a wafer (W) by projecting alignment mark patterns (PM and FM) arranged on a reticle reference plate (PL) fixed on a reticle stage (RSTG) which supports a reticle.Type: ApplicationFiled: February 24, 2004Publication date: September 2, 2004Applicant: Canon Kabushiki KaishaInventor: Hiroshi Tanaka
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Publication number: 20040169834Abstract: The invention relates to an optical lithography method and to an optical device for use with a lithography method. In particular the invention relates to optical devices for the production of semiconductor devices, wherein the optical device includes a lens system positioned, with respect to the optical path, behind a mask, and wherein, in an area between the mask and the lens system, a medium is provided which has a refractive index (n) greater than 1.Type: ApplicationFiled: November 17, 2003Publication date: September 2, 2004Applicant: Infineon Technologies AGInventors: Ernst-Christian Richter, Michael Sebald
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Publication number: 20040169835Abstract: A light condenser suitable for EUV lithography that includes reflective rings concentric to an optical axis. Each ring has a reflective surface to reflect light rays emanating from a light source so that the light rays converge towards a mask to produce Köhler illumination on the mask. The reflective surface has a curve segment that includes a section of a parabolic curve that is rotated relative to an optical axis and has a focal point at the light source.Type: ApplicationFiled: November 14, 2003Publication date: September 2, 2004Inventor: Michael Goldstein
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Publication number: 20040169836Abstract: In a method of producing an optical imaging system, for example a projection objective for microlithography, which has a plurality of optical elements, the imaging system is initially assembled and adjusted. In the process, at least one optical surface located in the vicinity of a pupil surface of the imaging system remains uncoated. During a subsequent measurement of the imaging system, for example using shearing interferometry, the wavefront errors in the exit pupil or an area conjugate therewith belonging to the imaging system are determined in a specially resolving manner. The optical element which has the correction surface is held in a separate mount and, following the measurement, is removed together with the mount. On the basis of the measurement, a topography and/or refractive index distribution of the correction surface which is required to compensate for the wavefront errors determined during the measurement is calculated.Type: ApplicationFiled: December 10, 2003Publication date: September 2, 2004Applicant: CARL ZEISS SMT AGInventor: Ulrich Wegmann
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Publication number: 20040169837Abstract: Measurements of an interferometric measurement system are corrected for variations of atmospheric conditions such as pressure, temperature, and turbulence using measurements from a second harmonic interferometer (SHI). A ramp, representing the dependence of the SHI data on path length, is removed before utilizing the SHI data. The SHI may include a passive Q-switched laser as a light source and Brewster prisms in the receiver module. Optical fibers may be used to conduct light to the detectors. A mirror reflecting the measurement beams has a coating of a thickness selected to minimize the sensitivity of the SHI data to changes in coating thickness.Type: ApplicationFiled: November 24, 2003Publication date: September 2, 2004Applicant: ASML NETHERLANDS B.V.Inventors: Wouter Onno Pril, Engelbertus Antonius F. Van De Pasch, Robert F. Dillon, Philip Dennis Henshaw
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Publication number: 20040169838Abstract: The present invention describes an aperture comprising an opaque plate with a central opening and at least one peripheral opening and a method for combining an on-axis component and at least one off-axis component of illumination light.Type: ApplicationFiled: March 4, 2004Publication date: September 2, 2004Inventor: Thomas D. Lee
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Publication number: 20040169839Abstract: A device for the observation of passages on the sun of Venus and Mercury and more generally for observation of the solar disk by back projection of the solar image on a screen that also forms a sun screen for the protection of the eyes.Type: ApplicationFiled: April 14, 2004Publication date: September 2, 2004Inventor: Jean Gay
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Publication number: 20040169840Abstract: In a vehicle radar device, a predetermined number of received light signals output based on a predetermined number of laser beams radiated from a radar sensor are integrated by an integrator to produce an integrated signal. Integration of the predetermined number of received light signals helps amplify the received light signal components corresponding to the waves reflected by reflecting objects, making it possible to improve the sensitivity for detecting the waves reflected by the reflecting object. There are set a plurality of ranges of the received light signals to be integrated, each being shifted by one received light signal. This minimizes a drop in the angular resolution based on the integrated signals.Type: ApplicationFiled: October 14, 2003Publication date: September 2, 2004Inventors: Yoshiaki Hoashi, Katsuhiro Morikawa
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Publication number: 20040169841Abstract: An optical apparatus for identification of objects whose identifying data is stored in satellite-aided transmission systems, computer systems, or other electronic systems and a method for identifying objects. An optical apparatus with a fine focus is used to view an object. The position of the apparatus, distance to the object and other data related to the object relative to the apparatus is detected and data about the object is displayed.Type: ApplicationFiled: December 9, 2003Publication date: September 2, 2004Inventor: Otto Dufek
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Publication number: 20040169842Abstract: A method and apparatus for generating charge from a light pulse. In one example, a light sensor includes an active region for generating an electric charge in response to a light pulse. A drift region is formed within a substrate and receives the electric charge from the light sensor. A spatial charge distribution is produced within the drift region in response to an electric field. The drift region includes an outer edge and an inner edge. The volume of the drift region decreases from the outer edge to the inner edge.Type: ApplicationFiled: December 1, 2003Publication date: September 2, 2004Applicant: Sarnoff CorporationInventors: Taner Dosluoglu, Robert Amantea, Peter Alan Levine, Robin Mark Adrian Dawson
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Publication number: 20040169843Abstract: Detection apparatus for the optical detection of an object including detection means, which can detect the light emerging from the object, and also at least one imaging unit comprising first lens means having a plurality of lens elements arranged in the form of an array, through which light emerging from the object can pass; and second lens means, which are arranged between the first lens means and the detection means and can feed the light that has passed through the lens elements to the detection means, the second lens means having a plurality of lens elements arranged in the form of an array. Furthermore, the present invention relates to a method for operating a detection apparatus of this type and to a scanning apparatus and to a confocal microscope having a detection apparatus of this type.Type: ApplicationFiled: January 14, 2004Publication date: September 2, 2004Inventors: Aleksei Mikhailov, Vitalij Lissotschenko, Maxim Darscht
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Publication number: 20040169844Abstract: An aerial vehicle speed correlation method for two-dimensional visual reproduction of laser radar images of the present invention is capable of altering and controlling the output timing of the system's rated output lines based on the moving distance and the speed of [[the]] an aerial vehicle. The speed error correlation method of the present invention is not limited to outputting one output line for every scanned line (N) to reduce the accumulation of geometric distortion error along the in-track direction of the scan frame. The speed correlation method of the present invention uses a set of generated fire table of equations to correct tangential error along the cross-track direction and to improve the reproduction quality of the laser radar images.Type: ApplicationFiled: January 6, 2003Publication date: September 2, 2004Inventors: Kwo-Jyr Wong, Kuo-Shu Chang, Re-Fun Chen