Abstract: A crimping device has for each crimper an anvil including a conductor anvil provided with a force sensor on which the force that arises in the conductor anvil during the crimping operation acts. The conductor anvil rests on a sensor body which in turn rests on a supporting part of the crimping device. The force sensor measures the force that is required to manufacture the conductor crimp, the quality of the crimped fastening being assessable by reference to the force curve generated by the force sensor.

Abstract: A round billet containing, by mass %, 10.50 to 14.00% of Cr with a value represented by the equation of “Cr+4Si?(22C+0.5Mn+1.5Ni+30N)” of not more than 9.0%, wherein the symbols of the elements represent the contents, by mass %, of the elements in the steel, is heated at a soaking temperature of 1100 to 1250 ° C. so that an in-furnace time (min) is not less than “0.5×Diameter of the round billet (mm)”, and then pierced and rolled with a piercing efficiency by a piercing mill of not less than 50%, a value regulated by the equation: “{(Diameter of the round billet?Roll gap at the foremost end of the plug)/Diameter of the round billet} ×100” of not more than 8.0, and a plug shape represented by the equation: “Radius of foremost end of the plug (mm)/Diameter of the round billet (mm)” of 0.06 to 0.17. The thus-manufactured high-Cr seamless steel pipe or tube has excellent internal surface properties with minimized internal surface defects.

Abstract: A roll straightener serving as both zigzag type and opposed type and capable of being easily switched from one to the other between the zigzag type and the opposed type and being manufactured at low cost is disclosed. The roll straightener has odd-numbered pairs of upper and lower rolls. Plural lower rolls (22, 23, 24) from a second lower roll (22) counted from an insertion side of a work (10) up to a lower roll (24) located at a middle position are made movable in both vertical and transverse directions of the rolls, while the other upper rolls (11, 12, 13, 14, 15, 16, 17) and lower rolls (21, 25, 26, 27) are made movable in only the vertical direction. As a result, a change can be made easily from one to the other between a zigzag type roll straightener and an opposed type roll straightener and the manufacturing cost is so much reduced.

Abstract: The invention relates to an adjusting roll for the rapid adjustment of rolls in rolling frames, among others vertical upset forging frames, comprising at least one respective piston, which acts on both sides of a working roll to adjust the latter, by means of assembled parts of at least one working roll or an interposed support roll. The inventive adjusting roll has been improved by the provision of a piston (KO), which is equipped with two piston rods (ST1, ST2) that point in opposite directions and the piston or pistons (KO) are inserted into a respective cavity in the roll base (ZB) or roll cover (ZD), said base and cover comprising coaxial bores for conducting the piston rods (ST1, ST2).

Abstract: A method for manufacturing a one piece axle tube housing with an integral spindle includes providing a tube blank, providing the blank with a region of increased thickness, inserting a mandrel having a reduced diameter profile, passing a reducing die over the tube to conform the tube to the shape of the mandrel; and extraction of the mandrel from the tube to cause outward deformation of the tube at specific locations. A further swaging step may be used to form the final spindle structure.

Abstract: A semi-automated method for manufacturing a woodworker's holdfast tool from an unheated length of mild steel rod includes forging a flattened contact surface at one end of the rod and subsequently bending the rod upwardly away from the contact surface and forming the crook portion in an automated wire forming machine configured to exceed the desired working angle during cold forming of the crook portion to account for the resilience of the rod when the bending force is removed.

Abstract: A support assembly for use in a die transfer system for transferring workpieces between successive die stations is movable vertically on a carriage assembly during use of the system. The assembly movably supports an elongate transfer bar having workpiece engaging devices mounted thereon. The assembly comprises a support body adapted for slidably mounting a horizontal support member having a forward end on which the transfer bar is mounted. The support body is constructed substantially of aluminum alloy panels and adhesive which rigidly connects the panels. A drive system is provided for moving the support member relative to the support body. Preferably, the support body has a vertical section and a horizontal section extending rearwardly from the bottom end of the vertical section.

Abstract: The device serves to receive a tool for calibrating of workpieces (83), preferably workpieces manufactured by a powder metallurgical process. On the example shown the tool comprises the lower stamps (77, 78, 79) and the upper stamps (80, 81, 82) located on tool supports (31, 32, 33; 31?, 32?, 33?). These stamps may be moved up and down individually or together parallel to the axis (40). Also movable up and down is the tool support (41) on which, if required, a center pin (85) is mounted. The device is particularly suitable for the calibration of complicated workpieces, such as represented for example by the workpiece (83) having the form of a body of rotation.

Abstract: In the deformation of geometrically similar components of a component family, in which the characteristic which differs is in particular thickness, there is according to conventional construction techniques of deformation tools a separate deformation tool necessary for each component. The inventive deformation tool system, including the following tool active parts stamp, blank holder and matrix, were in at least one work tool active part is shaped in a mask technique, enable the deformation of various components with this deformation tool system, in that for at least one tool active part at least two exchangeable masks of different characteristics are provided. Depending upon the component of a component family to be produced an optimal mask is selected from the pre-constituted supply of masks and used for deformation of the component in the deformation tool.

Abstract: A crimping device has a contact advancer provided with an exchangeable anvil part. A first pulley, a belt and an advancing motor drive a first carriage. A gripper for advancing the contact belt is guided in a direction crosswise to a direction of the first carriage. The distance between the gripper and the first carriage is determined by a second carriage and a roller of the gripper rolling in a fifth linear guide of the second carriage. The distance from the gripper is predetermined by the exchangeable anvil part and depends on the width of the contact belt. The gripper operates independent of the distance between the transport holes and independent of the width of the contact belt. The anvil part including the belt guide is an exchangeable part and only fits one type of crimp contact and is executed crimp-contact specifically.

Abstract: Press driving modules are provided to permit a standardized press design. The presses of a press line are equipped with always identical press driving modules, and the pressing force of the presses is varied only by the adaptation of the number of press driving modules. The press driving modules each contain two driving devices, respectively, that interact parallel or in series and have different characteristic curves. In particular, they have different maximal traveling speeds and different maximal forces. They can also have a different design with respect to their positioning capability and path resolution. This concept permits not only a standardization of presses of different performance classes within a press line but, beyond that, the largely free definition of characteristic path-time curves of the slides, and thereby finally also a freer design of workpieces, particularly of vehicle body parts.

Abstract: A press for compacting a soft mass into a shaped workpiece. The press has a die adapted to hold the soft mass and having an open side, a compacting tool displaceable along an axis through the side into the die to compact the mass therein, a cylinder centered on the axis adjacent and outside the die, a piston shiftable in the cylinder along the axis and connected to the compacting tool, a relatively movable guide formation outside the die, offset from the axis, and fixed to the piston, a second guide formations fitting with the first formation, outside the die, offset from the axis, and generally stationary relative to the piston. The formations having engaging surfaces extending parallel to the axis, and actuator for displacing the piston axially into the die and thereby compact the mass therein. The guide-formation surfaces sliding axially relative to each other on axial displacement of the piston.

Abstract: An apparatus is described for calibrating at least one sensor within a gas detector which detector has a gas inlet in fluid communication with the or each sensor, the apparatus comprising a housing that contains: a) a surface for abutting against the detector; b) a holder for holding the gas detector with respect to the housing in such a manner that a region of the detector containing the gas inlet abuts against the surface of the housing to form a sealed gas interface between the surface and the detector; c) a connector for connecting a source of pressurized calibration gas to the apparatus, d) a conduit for delivering a calibration gas from the connector to the interface between the detector and the apparatus housing, e) electrical connections within the holder for forming electrical connections between the apparatus and a detector held within the holder, and e) a flow controller within the conduit for providing calibration gas at a predetermined level to the interface, the flow controller including an elec

Abstract: Systems and methods of detecting occlusions and fluid-loss conditions (e.g., disconnects and/or leakages) in an infusion pump are discussed. For example, electrokinetic infusion pumps may develop an occlusion in the fluid flow path, which can disrupt control of fluid dispersed from the pump. As well, an infusion set disconnect can also result in a fluid-loss that can be disruptive. Such disruptions can be troublesome to systems that control the infusion pump, such as closed loop controllers. Accordingly, systems and methods described herein can be used to detect such occlusions and fluid-loss conditions during infusion pump operation. For example, a position sensor can be used to monitor fluid flow from the infusion pump, with the measurement being compared with an expected value to detect an occlusion or fluid-loss condition. Other algorithms for utilizing the position sensor are also described.

Abstract: Systems and methods of controlling the flow of fluid from infusion pumps, such as pumps utilizing an electrokinetic engine, are discussed. In particular, a closed loop control technique can be utilized to regulate movement of a non-mechanically-driven moveable partition, which can be used to drive the flow of an infusion fluid. For example, one or more fluid shot amounts can be delivered by the infusion pump. One or more measured amounts can be determined for the fluid shot amount(s). An average measured amount can be calculated from the measured amounts, and a correction factor can be calculated using the average measured amount and an expected shot amount. Subsequently, a fluid shot amount can be delivered base upon the correction factor. Variations of this method, and systems for implementing the method, or portions thereof, are also discussed.

Abstract: Apparatus for determining physical properties of micromachined cantilevers used in cantilever-based instruments, including atomic force microscopes, molecular force probe instruments and chemical or biological sensing probes. The properties that may be so determined include optical lever sensitivity, cantilever spring constant and cantilever sample separation. Cantilevers characterized with the method may be used to determine fluid flow rates. The apparatus measures cantilever deflection resulting from drag force as the cantilever is moved through fluid. Unlike other methods for determining such physical properties of cantilevers, the method described does not depend on cantilever contact with a well-defined rigid surface. Consequently, the apparatus may be employed in situations where such contact is undesirable or inconvenient.

Abstract: The present invention discloses a lifting apparatus, comprising: a vertical guide device; a turntable device which is movable along the vertical guide device upwards or downwards; and a first driving device which drives the turntable device moving in an upward and downward direction guided by the vertical guide device. Wherein said turntable device comprises: a bracket which is slidably engaged with the vertical guide device and projects perpendicularly toward a side of the vertical guide device; a turntable which is rotatably provided on the bracket; and a second driving device which rotates the turntable on the bracket. The present invention further discloses a safety inspection system comprising the lifting apparatus. Compared with prior art, the present invention combines a rotating mechanism and a lifting mechanism as a single apparatus, thus, realizing the self rotation and elevation of the objects to be detected.

Abstract: A device for measurement of entrained and dissolved gas has a first module arranged in relation to a process line for providing a first signal containing information about a sensed entrained air/gas in a fluid or process mixture flowing in the process line at a process line pressure. The device features a combination of a bleed line, a second module and a third module. The bleed line is coupled to the process line for bleeding a portion of the fluid or process mixture from the process line at a bleed line pressure that is lower than the process pressure. The second module is arranged in relation to the bleed line, for providing a second signal containing information about a sensed bleed line entrained air/gas in the fluid or process mixture flowing in the bleed line.

Abstract: The present invention provides methods of collecting and detecting compounds in a human breath sample, comprising: exhaling into a handheld sample collector to absorb at least one breath compound in an exhaled breath collector of said collector; connecting the handheld sample collector to a breath analyzer; transferring the breath compounds from the exhaled breath collector of the sample collector into the breath analyzer; and detecting breath compounds using two or more sensors. The method may be performed to detect breath compounds for determining health or disease diagnosis, or for drug monitoring.

Abstract: Screening of items for the presence of contaminants, such as explosives residue, is accomplished by subjecting an item loaded into a pressure chamber to a pressure substantially in excess of atmospheric pressure conditions and rapidly decompressing the item to the ambient atmospheric pressure. The rapid decompression serves to scavenge vapors and particles from the exterior and interior of the item and any objects it contains. A sample of the vapors and particles removed from the item by the rapid decompression is sampled and is tested to determine whether a predetermined contaminant is present in the sample. Depending on the types of contaminants for which the sample is tested, it is possible to detect whether explosives, biological or chemical agents, and/or narcotics residues are present on or in the item being screened.

Abstract: A device and a method provide a detection of a presence of a test gas. The device comprises a vacuum chamber connected to a vacuum pump equipped with an electronic power supply unit. At least one portion of the chamber is separated from a surrounding outside environment by a membrane selectively permeable to the test gas. A gas flow from the outside environment is guided forcefully over the surface of the membrane via a flow conveyor, which comprises an inlet duct, a diffuser and an outlet duct. The presence of any test gas is detected by the changes in the electrical current to the vacuum pump provided by the power supply.

Abstract: Method allowing to perform at least an evaluation of the inlet capillary pressure value of a porous medium. From a displacement experiment on a sample of the medium, a curve of the volume of saturating fluid expelled from the sample as a function of time is drawn. The differential pressure between the inlet face and at least one point located at a distance Li from the inlet face that is greater than the distance between the inlet face and the interface between the two fluids within the sample is then continuously measured as a function of time. At least one motive pressure gradient of the first fluid is thereafter calculated by means of distance Li and of the curve. Finally, at least one value of the inlet capillary pressure is determined by calculating the difference between the differential pressure and the value of the motive pressure gradient of the expelled fluid. Application: notably production of oil reservoirs for example.

Abstract: A multi-function device for testing masks such as NBC masks used in civilian and military applications. In its preferred form, the device is self-contained and can be readily transported to field sites by one or two individuals. The device includes a protective storage and transport case. The case includes an upper portion and a lower portion. The upper portion of the case houses the power unit assembly and includes sufficient storage space to store such things as an aerosol generator reservoir, various headform accessories, a containment shroud, manuals (e.g. installation, operation and maintenance manuals) and nominal tools. The lower portion of the case houses the head assembly and controller unit which are preferably mounted on a cover or top panel. Underneath the top or cover panel of the lower portion of the case are stored the light scattering chamber, flow sensor, pressure transducer, circuit boards and valves.

Abstract: A vibration meter and a method of measuring a viscosity of a fluid flowing through a pipe are disclosed. The vibration meter comprises meter electronics and a transducer assembly with an electromechanical excitation arrangement and with a flow tube which oscillates in operation. A sensor arrangement produces sensor signals. representative of inlet-side and outlet-side deflections of the flow tube. An evaluation circuit derives from said sensor signals and from an excitation current generated by an excitation circuit for the excitation arrangement a viscosity value representative of the viscosity of the fluid.

Abstract: A microelectromechanical (MEM) fluid health sensing device comprises a viscosity sensor which provides an output that varies with the viscosity of a fluid in which it is immersed, and at least one other sensor which provides an output that varies with another predetermined parameter of the fluid. The viscosity sensor is preferably a MEM device fabricated by means of a “deep etch” process. The sensors are preferably integrated together on a common substrate, though they might also be fabricated separately and packaged together to form a hybrid device. A data processing means may be included which receives the sensor outputs and provides one or more outputs indicative of the health of the fluid. Sensor types which may be part of the present device include, for example, a temperature sensor, a MEM electrochemical sensor, a MEM accelerometer, a MEM contact switch lubricity sensor, and/or an inductive metallic wear sensor.

Abstract: A sensor for analyzing a fluid sample has a sample cavity for accepting sample fluid. At least one test region is disposed along the sample cavity, and at least one vent fulfills the dual function of venting the sample cavity and guiding the sample fluid in the sample cavity via appropriate location and geometry of at least one sample guide edge.

Abstract: Apparatus and methods for estimating a physical property of a specimen, particularly the specimen strength, are provided. More specifically, a roller indenter comprising an indenting wheel and a force indicator is used to create an elongated trough in a specimen. The width of the trough is measured as a plurality of locations and correlated with a known standard to provide an estimate of the strength of the sample.

Abstract: A probe array for includes a handle, a first probe and a second probe. The first probe has a first shank, connected to the handle, and a first tip; and the second probe has a second shank, connected to the handle, and second tip. The first tip contains a different material from the second tip. The probe array may be used to write on a surface by contacting the first tip with a surface, where a first ink is on the first tip. This writing method may further include lifting the first tip from the surface and contacting the second tip with the surface.

Abstract: A device such as a sensor for use in an atomic force microscope. The device comprises a first oscillator, a second oscillator, a pair of first co-axial members interconnecting the first and second oscillators for torsionally suspending the first oscillator, a support structure, and a pair of second co-axial members whose axis is orthogonal to an axis of the first co-axial members and which interconnect the second oscillator and the support structure for torsionally suspending the second oscillator.

Abstract: An optical microcantilever capable of reducing loss when propagating light. An optical microcantilever 10 comprises a support 1, an optical waveguide 2, a light-blocking film 3, a reflecting film 4, a pointed tip 5, a microscopic aperture 6 formed at the end of the tip 5, and a mirror 7 for reflecting propagating light H propagated from a light input/output end 8 of the optical waveguide 2 towards the microscopic aperture 6.

Abstract: The preheater plug (1) includes a tubular body inside which a pressure sensor (90) is mounted, the pressure sensor measuring the internal pressure of an engine cylinder wherein the plug (1) is arranged. The pressure sensor is provided with connection lugs extending in a substantially longitudinal manner in relation to the axis of the tubular body. The body (10) has a lateral groove in the inner lateral wall. At least one connection lug is engaged in the groove.

Abstract: A tire pressure mounting apparatus is provided including a pressure sensor for sensing the pressure in a tire. The pressure sensor has a housing. A threaded fastener is secured to the housing and forms a first valve portion. A tire valve stem projects through a first opening in a rim for holding the tire. The tire valve stem carries a second valve portion therein. The first valve portion and the second valve portion form a valve when screwed together.

Abstract: An apparatus and method for measuring a volume of a person's body. The apparatus comprises a body suit having an inner layer and an outer layer which forms a body portion and a head portion. The body suit further has a cavity defined within the inner layer, the cavity having an amount of known initial volume. The apparatus further comprises a fluid assembly which is removeably connected to the body suit. The fluid assembly is configured to discharge fluid into the cavity and around the body when the body is disposed within the cavity. The fluid assembly discharges the fluid to fill the cavity from a first position to a second position, the second position having an amount of a final volume such that a difference between the known initial volume amount and the final volume amount of the second position equals the volume of the body.

Abstract: A chemical storage device and a method for monitoring chemical usage are described herein. The device and disclosed method utilize a chemical storage canister and a load cell integrated into one transportable unit. The load cell is capable of compensating for the added weight of attached dispensing devices used in the semiconductor industry. Additionally, the load cell continuously displays the weight of the chemicals as they are withdrawn from the chemical storage device. These functionalities are included in the control logic of the load cell which is incorporated into the load cell itself.

Abstract: The invention relates to a method of calibrating an ophthalmic-lens-piercing machine, a device used to implement one such method and an ophthalmic-lens-machining apparatus comprising one such device. The inventive method applies to a machine comprising a piercing tool, a lens support which is associated with a first reference mark (O1, X1, Y1), and programmable tool-control means which are associated with a second reference mark expressing set co-ordinates which define a target piercing point (M).

Abstract: The invention relates to a method of analysing the hydrocarbon composition of geological strata, comprising an analysis of the gaseous hydrocarbon concentrations contained in the drilling muds.According to the invention, for a given depth range, gaseous hydrocarbon concentration ratios are established in pairs at essentially-identical depths. Subsequently, a sub-set of said ratios is selected in order to form a signature that is representative of the gaseous hydrocarbon composition of the depth range. The aforementioned signature is defined by at least one straight line representing the concentration of a first gaseous hydrocarbon in relation to the concentration of a second hydrocarbon. Said signature is then compared to reference signatures in order to determine the hydrocarbon concentration of the geological stratum corresponding to the depth range.

Abstract: A fluid flow model is comprised of one cross-flow style core holder and a multitude of standard style core holders, all connected by a concurrent combination of serial and parallel flow paths. The sum of these flow paths yields a fluid flow model that closely approximates a small radial slice of a conventional reservoir. The fluid flow model has particular applicability to estimate the requisite treatment fluid for use in acidizing as well as water control methods.

Abstract: The present invention provides packaging for MEMS devices and other sensors for downhole application. The MEMS devices and/or other sensors may aid in characterizing formation fluids in situ. The packaging facilitates high temperature, high pressure use, which is often encountered in downhole environments.

Abstract: A device for determining at least one parameter of a medium flowing in a line, in particular for determining the air mass flow rate in the intake manifold of an internal combustion engine, which include a line component 3 and a sensor device 1 having a bypass part 6, are known. To prevent separation of the flow at the sidewalls of the bypass part, it is provided that a flow diversion element 2 be positioned in the line component 3 upstream from the bypass part 6 with respect to the main flow direction 18 and have at least one diversion surface 20 facing the main flow direction 18, which, starting from an apex line 25 located at a distance from the bypass part 6, curves evenly on both sides toward the two sidewalls 16, 17 so that the ends 38 of the diversion surface 20 facing away from the apex line are aligned with the sidewalls 16, 17.

Abstract: Devices for determining at least one parameter of a medium flowing in a conduit, in particular for determining the air-mass flow in the intake tract of an internal combustion engine, including a conduit member and sensor device having a bypass section are already known. To prevent flow detachment at the side walls of the bypass section, it is proposed that a flow guide wall running substantially parallel to the side wall provided with the separation opening of the bypass section be arranged in the conduit member behind the separation opening, as viewed in the main flow direction; the length dimension b of the flow guide wall, as viewed in the main flow direction, being equal to or greater than the distance a of the separation opening from the rear wall; and the distance c of the flow guide wall from the center axis of the conduit member being greater than or equal to the distance d of the side wall provided with the separation opening of the bypass section from the center axis.

Abstract: A fluid intake tracking apparatus that is configured to reversibly couple with a water bottle, mug or other fluid container to keep track of the number of bottles that are consumed by the user during a selected period of time. In one embodiment, the indicator is an electronic device with a display, timer and alarm and powered by a solar cell. In another embodiment, the indicator is permanently mounted to a cup and includes a slidable post within a longitudinal slot and a parallel scale of numbers indicating the intake events.

Abstract: A balanced rotating assembly with a spindle automatically provides balancer limits, which achieves a balancing state while substantially minimizing short term vibration increases and which provides for multi-plane balancer dithering.

Abstract: A system for measuring gait kinematics information during exercise of a subject comprising a fixing member adapted for fixing onto the trunk of the body of the subject; an acceleration sensor attached to the fixing member for sensing the vertical acceleration of the trunk of the body of the subject; and a microprocessor coupled to the acceleration sensor adapted to receive the vertical acceleration data from the acceleration sensor, and to compute and derive the speed and distance traversed by the subject, and to communicate the speed and distance information. In the preferred embodiment, a heart-rate monitoring device is also provided.

Abstract: A method for manufacturing a micromechanical mass-spring system that includes a mass and an asymmetric spring is provided. A silicon substrate is provided, and the silicon substrate is etched to define a section upon which the asymmetric spring is to be formed. A surface layer is formed on the surface of the substrate. Etching is then performed to form the asymmetric spring from the surface layer, and further etching releases the mass and spring from the substrate. A device that includes a micromechanical mass-spring system manufactured according to the method is also provided.

Abstract: An angular velocity sensor includes a vibrator sensing an angular velocity, and a package on which the vibrator is mounted. The vibrator is arranged in the package so that a width direction of the vibrator coinciding with a long-side direction of the package. The vibrator may be attached to the package so that the vibrator is inclined with respect to a vertical direction.

Abstract: A sensor structure using vibrating sensor elements which can detect an angular rate and accelerations in two axes at the same time is provided. 2 sets of vibration units which vibrate in out-of-phase mode (tunning-fork vibration) and include four vibrating sensor elements of the approximately same shape supported on a substrate in a vibratile state are provided and the vibrating sensor elements are disposed so that vibration axes of the vibration units cross each other at right angles. Each of the vibrating sensor elements includes a pair of detection units and adjustment units for adjusting a vibration frequency. The vibrating sensor elements constitute a combined sensor having supporting structure for supporting the vibrating sensor elements independently so that the vibrating sensor elements do not interfere with each other.

Abstract: A method for reducing errors in a tuning fork gyroscope includes determining a first distance, gt, between an upper sense plate and a proof mass and a second distance, gb, between a lower sense plate and the proof mass. The method further includes applying a first voltage, Vt, to the upper sense plate and a second voltage, Vb, to the lower sense plate, wherein the ratio of the first voltage and the second voltage is a function of the first distance and the second distance.

Abstract: A system includes a support, a pendular element, an elastic restraint, an image sensor, and a processing system. The elastic restraint couples the pendular element to the support and applies to the pendular element a restraining force that opposes movement of the pendular element in at least a first direction. The image sensor captures images of the pendular element. The processing system determines one or more movement measures describing movement of the support from comparisons of ones of the images captured by the image sensor. In another aspect, a pendular element is elastically coupled to a support. A restraining force that opposes movement of the pendular element in at least a first direction is applied to the pendular element. Images of the pendular element are captured. One or more movement measures describing movement of the support are determined from comparisons of ones of the captured images.

Abstract: In an electrostatic-capacitance-type acceleration sensor, water, etc. penetrating into a sealed space incorporating an acceleration detector having a movable electrode 6, and sticking of the movable electrode 6 to a cap 8 due to static charge accumulated on the cap 8 during the anodic bonding being performed are prevented. A conductive shielding film 9 that can be extendedly transformed on the entire inner face of the cap 8 constituting the sealed space is provided, which is not only extendedly arranged so as to be sandwiched between a bonding frame 7 and the cap 8, but also electrically connected to the movable electrode 6; thereby, even if unevenness exists on the surface of the bonding frame 7, not only sufficient anodic bonding between the bonding frame 7 and the cap 8 becomes possible, but also the electric field due to the static charge accumulated in the cap 8 can be shielded.

Abstract: The invention relates to measurement devices used in the measurement of acceleration, and more specifically, to micromechanical acceleration sensors. The invention seeks to offer an improved method for the measurement of acceleration directed to three or two dimensions using a micromechanical acceleration sensor as well as an improved micromechanical acceleration sensor. Using this invention, the functional reliability of a sensor can be monitored in constant use, and it is suitable for use particularly in small-sized micromechanical acceleration sensor solutions measuring in relation to several axes.