Patents Issued in June 19, 2008
  • Publication number: 20080143978
    Abstract: A method performed by an image display system is provided. The method includes accessing an image frame and generating first and second sub-frames from the image frame for simultaneous display by first and second display devices, respectively, in at least partially overlapping positions on a display surface so that a simulated image formed from the first and the second sub-frames approximates, subject to at least one smoothing constraint, a target image formed from the image frame and at least one property of each of the first and the second display devices.
    Type: Application
    Filed: October 31, 2006
    Publication date: June 19, 2008
    Inventors: Niranjan Damera-Venkata, Nelson Liang An Chang
  • Publication number: 20080143979
    Abstract: A laser projection device includes: an incidence optical system condensing laser light, a scanning device deflect the laser light in a first scanning direction and a second scanning direction with a mirror, and a projection optical system guiding the deflected light to a surface to be scanned. The scanning device performs the deflection in the first scanning direction by resonant driving and performs the deflection in the second scanning direction by non-resonant driving. The incidence optical system has different optical powers in the first scanning direction and the second scanning direction, and makes light incident on the scanning device in a convergent state in the first scanning direction and in a substantially parallel light state in the second scanning direction. The projection optical system has a negative optical power in the first scanning direction.
    Type: Application
    Filed: December 12, 2007
    Publication date: June 19, 2008
    Inventor: Kenji KONNO
  • Publication number: 20080143980
    Abstract: Disclosed is a substrate processing method which includes an exposure step wherein an immersion area of a first liquid is formed on a substrate and the substrate is exposed by being irradiated with an exposure light through the first liquid, and an immersion step wherein the substrate is immersed in a second liquid before the exposure step. By this method, occurrences of problems caused by adhesion marks, which are always involved in immersion exposure, can be reduced.
    Type: Application
    Filed: October 25, 2005
    Publication date: June 19, 2008
    Applicant: NIKON CORPORATION
    Inventors: Katsushi Nakano, Masahiko Okumura, Tarou Sugihara, Takeyuki Mizutani, Tomoharu Fujiwara
  • Publication number: 20080143981
    Abstract: An optical arrangement, in particular a projection system, illumination system or beam shaping system for EUV lithography, including at least one optical element that is arranged in a beam path of the optical arrangement and that reflects radiation in the soft X-ray- or EUV wavelength range, wherein at least during operation of the optical arrangement at least one of, preferably each of, the reflective optical elements in the beam path, at least at the optical surface, has an operating temperature of approximately 30° C. or more, preferably of approximately 100° C. or more, particularly preferably of approximately 150° C. or more, and even more preferably of approximately 250° C. or more, and wherein the optical design of the at least one reflective optical element is selected such that its optical characteristics are optimised for operation at the operating temperature. Also presented is a method for providing a reflective optical element with such an optical design.
    Type: Application
    Filed: September 13, 2007
    Publication date: June 19, 2008
    Applicants: Carl Zeis SMT AG, ASML Netherlands B.V.
    Inventors: Dirk Heinrich EHM, Annemieke van de Runstraat, Bastiaan Theodoor Wolschrijn, Arnoldus Jan Storm, Thomas Stein, Marco G. H. Meijerink, A. G. Ton M. Bastein, Esther L. J. van Soest-Vercammen, Norbertus Benedictus Koster, Frits G. H. M. Gubbels, Peter J. Oprel, Michiel Nienoord, Michel Riepen, Johannes Hubertus Josephina Moors
  • Publication number: 20080143982
    Abstract: An iterative method of producing optimized setpoint data for controlling the actuation of elements of an array of individually controllable elements in a maskless system and systems therefore. The optimization is based on estimation of a device structure that can utilizes one or more of the following factors: the low-pass characteristics of the projection system, the configuration of the illumination system, and the process window properties.
    Type: Application
    Filed: December 14, 2006
    Publication date: June 19, 2008
    Applicants: ASML Holding N.V., ASML Netherlands B.V.
    Inventors: Kars Zeger Troost, Jason Douglas Hintersteiner, Patricius Aloysius Jacobus Tinnemans, Wenceslao A. Cebuhar, Ronald P. Albright, Bernardo Kastrup
  • Publication number: 20080143983
    Abstract: In some aspects, a reticle is provided for use in forming a patterned region on a substrate using a multi-pattern, multi-exposure process. The reticle includes (a) a first pattern for the multi-pattern, multi-exposure process formed on a first region of the reticle; and (b) a second pattern for the multi-pattern, multi-exposure process formed on a second region of the reticle that is offset from first region of the reticle. Numerous other aspects are provided.
    Type: Application
    Filed: December 7, 2007
    Publication date: June 19, 2008
    Inventor: Michael C. Smayling
  • Publication number: 20080143984
    Abstract: A catadioptric lens with optical elements, which are arranged along an optical axis and with at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
    Type: Application
    Filed: February 25, 2008
    Publication date: June 19, 2008
    Applicant: Carl Zeiss SMT AG
    Inventors: Hubert HOLDERER, Christian Hembd-Soellner, Rudolf Von Buenau, Ulrich Haag
  • Publication number: 20080143985
    Abstract: A lithography system in which a performance criterion of the lithography system is predicted, based on one or more operating conditions of the lithography system, and compared to measurements of that performance criterion. The lithography system may determine from a difference between the measured and predicted performance criterion which, if any, sub-system of the lithography system is not performing as expected.
    Type: Application
    Filed: February 5, 2008
    Publication date: June 19, 2008
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Franciscus Van De Mast, Johan Christiaan Gerard Hoefnagels, Johannes Onvlee, Reinder Teun Plug
  • Publication number: 20080143986
    Abstract: An imaging member adjustment system for an imaging module includes an imaging field opposing the imaging module and positioning targets provided in connection with the imaging field. The imaging module includes an optical source generating an optical path, an imaging member responsive to input from the optical source, and a lens interposed between the imaging member and imaging field. At least one adjustment mechanism is operatively connected to the imaging member for adjusting the imaging member with respect to the imaging field. A controller operatively communicates with the imaging member and the at least one adjustment mechanism. In operation, the positioning targets interrupt the optical path and provide positioning information to the controller. In turn, the controller signals the at least one adjustment mechanism to adjust the imaging member in any of horizontal and vertical direction to optimize focus and alignment of the imaging member with respect to the imaging field.
    Type: Application
    Filed: October 19, 2006
    Publication date: June 19, 2008
    Inventors: Gene M. Nitschke, David Baum
  • Publication number: 20080143987
    Abstract: An exposure apparatus comprises an illumination optical system configured to illuminate a reticle arranged on a surface to be illuminated with a light beam from a light source, a projection optical system configured to project a pattern of the reticle onto a substrate, and a stage configured to drive the substrate, wherein the illumination optical system includes a light distribution forming unit configured to form a trapezoidal light intensity distribution along a scanning direction of the reticle on the surface to be illuminated to uniform a light angle distribution for illuminating each point on the surface to be illuminated, and the substrate is exposed with the light intensity distribution and light angle distribution formed by the light distribution forming unit, while the stage drives the substrate by tilting a normal to the substrate with respect to an optical axis of the projection optical system.
    Type: Application
    Filed: December 13, 2007
    Publication date: June 19, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Takanori Uemura
  • Publication number: 20080143988
    Abstract: Disclosed is a system for calculating transmission utility factor value of photo energy for exposure and a method for calculating transmission utility factor value of photo energy utilizing the calculation system in which the photo energy generated from an excimer laser generator passes various optical systems (which include a lens and a reflection mirror and so on), the photo energy used for exposing a wafer is divided by the photo energy generated from the excimer laser generator and the percentage of the result is finally calculated at real time. According to the present invention, an increase of the exposing time due to the lowering of the photo transmission utility factor value and a lowering of productivity in semiconductor are prevented. According to the present invention, the badness or contamination of the optical systems between the excimer laser generator and the exposure device can be also predicted at real time.
    Type: Application
    Filed: November 28, 2007
    Publication date: June 19, 2008
    Inventor: Woon-Sig Hong
  • Publication number: 20080143989
    Abstract: The invention is directed to a method and an arrangement for stabilizing the average emitted radiation output of a pulsed radiation source. It is the object of the invention to find a novel possibility for stabilizing the average emitted radiation output of a pulsed radiation source which enables a reliable regulation even when there is no sufficiently reliable manipulated variable for influencing the emitted pulse energy (Ei). According to the invention, this object is met in that the individual pulse energy (Ei) of the current radiation pulse is measured, the deviation of the current individual pulse energy (Ei) from a previously determined target value (E0) is determined, and the pulse interval (?ti+1) preceding the triggering of the next radiation pulse is controlled depending on the magnitude of the deviation between the current individual pulse energy (Ei) and the target value (E0) of the pulse energy.
    Type: Application
    Filed: December 4, 2007
    Publication date: June 19, 2008
    Inventors: JESKO BRUDERMANN, Juergen Kleinschmidt
  • Publication number: 20080143990
    Abstract: An exposure apparatus for exposing a substrate to radiant energy is disclosed. The apparatus comprises a holder configured to hold the substrate, a shutter for regulating exposure time for the substrate, and a controller configured to control an operation of the shutter, wherein the controller is configured to control the operation of the shutter based on information having a correlation with intensity of light reflected from the holder and the substrate held by the holder.
    Type: Application
    Filed: December 14, 2007
    Publication date: June 19, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Shinichi Hirano
  • Publication number: 20080143991
    Abstract: A scan exposure apparatus includes first and second light-shielding plates arranged within an illumination optical system for illuminating an original, the plates defining a region of the original to be illuminated in a direction of the scan. The scan exposure apparatus further includes a rotation mechanism that rotates at least one of the first and second light-shielding plates in a plane perpendicular to an optical axis of the illumination optical system so as to adjust distribution of widths in a direction perpendicular to the direction of the scan, each of the widths being a width of the region in the direction of the scan.
    Type: Application
    Filed: December 13, 2007
    Publication date: June 19, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Shinji Nishimura
  • Publication number: 20080143992
    Abstract: A lithographic apparatus uses polarized light to improve the imaging properties such as exposure latitude, while maintaining and extending the lifetime of an illumination system in a lithographic apparatus.
    Type: Application
    Filed: January 30, 2008
    Publication date: June 19, 2008
    Applicants: ASML NETHERLANDS B.V., Carl Zeiss SMT AG
    Inventors: Christian Wagner, Wilhelmus Petrus De Boeij, Roel De Jonge, Tilmann Heil, Damian Fiolka
  • Publication number: 20080143993
    Abstract: An illumination optical system that is used for an exposure apparatus that includes a mirror and exposes an object, illuminates a surface to be illuminated using light from a light source, and includes a filter member arranged at a position that substantially has a Fourier transform relationship with the surface to be illuminated, the filter member including a transmittance distribution preset to correct a non-uniformity of a transmittance distribution of the illumination optical system caused by the mirror.
    Type: Application
    Filed: January 23, 2008
    Publication date: June 19, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Takahisa Shiozawa, Yoshio Goto
  • Publication number: 20080143994
    Abstract: An exposure apparatus that comprises a stage (28) that moves in the X-axis direction, an X-axis linear motor (80) that drives the stage, a counter mass (30) that moves in a direction opposite to the stage due to the action of the reaction force of the drive force of the stage in the X-axis direction by the motor (80), X-axis trim motors (26A, 26B) that drives the counter mass in the X-axis direction, and a control unit that controls the trim motors and gives the counter mass an initial velocity in the +X direction when the stage is moved via the motor (80), for example, in the +X direction. Accordingly, the strokes required for the movement of the counter mass can be shortened without increasing the size of the counter mass.
    Type: Application
    Filed: April 6, 2005
    Publication date: June 19, 2008
    Applicant: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Publication number: 20080143995
    Abstract: A moving apparatus includes a movable body movable in at least one direction; an electromagnet configured to drive a movable body and including a coil; an electromagnet control system configured to perform feedback control of the electromagnet on the basis of a command value input to the electromagnet control system; and a thrust correction unit configured to calculate a correction coefficient corresponding to a thrust error of the electromagnet and correct the command value by multiplying the command value by the correction coefficient or by adding the correction coefficient to the command value.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 19, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventors: Yoshihisa Hiyama, Yoshihiro Hirata
  • Publication number: 20080143996
    Abstract: A processing apparatus comprises a unit processing an object, a first conveyer to perform conveyance of the object between the unit and a station arranged between an external apparatus and the unit, the external apparatus including a second conveyer to hold the object with a hand thereof to perform conveyance of the object to or from the station, and a controller to output a request signal and a stop instruction signal. The request signal requests the external apparatus to perform the conveyance by the second conveyer, and is output before the processing apparatus becomes a state to allow the second conveyer to perform the conveyance, and the stop instruction signal instructs the external apparatus to stop the hand and is output based on a state of the processing apparatus after an output of the request signal and before the conveyance of the second conveyer.
    Type: Application
    Filed: December 17, 2007
    Publication date: June 19, 2008
    Applicant: CANON KABUSHIKI KAISHA
    Inventor: Shinichi Hirano
  • Publication number: 20080143997
    Abstract: A laser scanner apparatus is disclosed herein for measuring the geometry and physical dimensions of one or more objects in a specified location or platform. The specified location or platform is within a range less than a predetermined maximum object distance. The laser scanner includes a waveform generator that generates a predetermined reference waveform to an analog laser that provides an modulated laser beam responsive to the reference waveform, an optical scanning system which 1) transmits and scans the object with the modulated laser light beam and 2) includes a means for receiving reflected the modulated laser light from the surface of an object on the platform or specified location, an avalanche photo-detector positioned to receive the processed modulated light from the optical processing system, and convert energy in the incident light into an amplitude-modulated range signal, a mixer is provided to down-convert the frequency of the range signal into a lower (LF) frequency.
    Type: Application
    Filed: December 19, 2006
    Publication date: June 19, 2008
    Inventors: Dean Greenberg, David Lilly
  • Publication number: 20080143998
    Abstract: A method for eliminating internal reflection signal in a range finding system is disclosed, including the steps of receiving a range-finding signal reflected by an object and an internal reflection signal caused by internal reflection of the range finding system, converting the range finding signal and internal reflection signal, as a combination, into an electrical current signal, cropping the electrical current signal in a time interval for the electrical current signal to pass so as to generate a first electrical signal indicating the internal reflection signal, and subtracting the first electrical signal from the current signal to provide a second electrical signal representing the range-finding signal reflected by the object.
    Type: Application
    Filed: February 26, 2008
    Publication date: June 19, 2008
    Applicant: Asia Optical Co., Inc.
    Inventor: Chih-Wei Hung
  • Publication number: 20080143999
    Abstract: A laser ranger has a rotational light source and a receiver. The rotational light source is used to provide a light beam with a pre-determined rotation speed. The receiver detects the time period for the light beam to travel from a first position to a second position of the receiver, such that the distance between the rotational light source and the receiver is calculated based on the detected time period and the spacing between the first and second positions of the receiver.
    Type: Application
    Filed: September 19, 2007
    Publication date: June 19, 2008
    Inventor: Liu Wen-YU
  • Publication number: 20080144000
    Abstract: Apparatus for determining distance comprising a transmitting unit for emitting a light pulse, a receiver matrix having at least one photoelectric element and a control unit, wherein the receiver matrix has a first and a second integrator which are connected to the photoelectric element, which are activatable independently of each other and which are each adapted to integrate a measurement signal outputted by photoelectric element over a period of time predetermined by the control unit and thereby to form an integrator state and to output the integrator state as an output signal.
    Type: Application
    Filed: June 13, 2007
    Publication date: June 19, 2008
    Inventors: Andreas Thun, Wilfried Wagner
  • Publication number: 20080144001
    Abstract: Systems and methods for spectral imaging are disclosed. Such spectral imaging can be used to determine properties of a subject material at different locations upon the surface and/or within the material. For example, strain and/or stress within an imaged area of the material can be determined. A system for spectral imaging can include a light source, a two-dimensional sensor array configured to image light from a two-dimensional area of a subject material, a filter configured to filter light from the subject material before the light is imaged and a processor in communication with the two-dimensional sensor array. The processor can be configured to determine a property of the subject material at a plurality of locations within the two-dimensional area of the subject material. Such spectral imaging systems can facilitate the performance of piezospectroscopic measurements of two-dimensional surfaces in a rapid manner while preserving accuracy.
    Type: Application
    Filed: December 14, 2007
    Publication date: June 19, 2008
    Inventors: Bauke Heeg, John B. Abbiss, Anatoliy I. Khizhnyak, David R. Clarke
  • Publication number: 20080144002
    Abstract: A molecularly imprinted polymer sensor device for detecting a specific inorganic target ion is disclosed. The device includes at least one or more molecularly imprinted polymer beads comprising a macroporous structure having a plurality of complexing cavities therein, wherein the complexing cavities contain cationic ligands spatially oriented to selectively receive and bind a specific inorganic target ion to be detected and having operatively associated therewith a light source for generating excitation energy of the beads.
    Type: Application
    Filed: December 17, 2007
    Publication date: June 19, 2008
    Inventors: George M. Murray, Glen E. Southard
  • Publication number: 20080144003
    Abstract: A system for monitoring non-volatile residue concentrations in ultra pure water includes a nebulizer for generating an aerosol composed of multiple water droplets, a heating element changing the aerosol to a suspension of residue particles, and a condensation particle counter to supersaturate the dried aerosol to cause droplet growth through condensation of a liquid onto the particles. The nebulizer incorporates a flow dividing structure that divides exiting waste water into a series of droplets. The droplets are counted to directly indicate a waste water flow rate and indirectly indicate an input flow rate of water supplied to the nebulizer. The condensation particle counter employs water as the condensing medium, avoiding the need for undesirable chemical formulations and enabling use of the ultra pure water itself as the condensing medium.
    Type: Application
    Filed: November 6, 2007
    Publication date: June 19, 2008
    Inventors: David B. Blackford, Frederick R. Quant, Derek R. Oberreit
  • Publication number: 20080144004
    Abstract: In one aspect, the present invention provides systems and methods for non-invasively determining the amount of an analyte in a subject's blood using a set of light sources and a set of light detectors for measuring optical density. Advantageously, in embodiments of the invention, the light sources are operated such that each of the light sources outputs light at the same time, thereby concurrently illuminating the fingertip with light from each light source, and while the fingertip is illuminated by the light sources, a data processor reads data output from each light detector substantially simultaneously.
    Type: Application
    Filed: December 14, 2007
    Publication date: June 19, 2008
    Applicant: Futrex Inc.
    Inventor: Robert D. Rosenthal
  • Publication number: 20080144005
    Abstract: Methods for processing a cytological specimen suspended in a liquid. Light at a wavelength less than 450 nm is directed through the liquid. The intensity of the light transmitted through the liquid is detected and compared to a threshold to determine whether the blood content of the specimen should be reduced before a specimen slide is prepared. In one embodiment, Light at different wavelengths is directed through the liquid. One of the wavelengths is at or near a hemoglobin absorption peak that is less than 450 nm.
    Type: Application
    Filed: December 18, 2007
    Publication date: June 19, 2008
    Applicant: Cytyc Corporation
    Inventors: Patrick Guiney, Howard Kaufman
  • Publication number: 20080144006
    Abstract: In order to be able to measure topographies on wafers or devices in a fashion free from destruction, the invention provides a method for measuring three-dimensional topographic structures (22) on wafers (2) or devices in which with the aid of a confocal microscope (1) at least one fluorescing topographic structure (22) is scanned with excitation light, and the fluorescence light emitted from the focal point (17) in the focal plane (19) of the objective (15) and excited by the excitation light is detected, and measured data are obtained from the position of the focal point (17) and the detected fluorescence signal.
    Type: Application
    Filed: May 13, 2005
    Publication date: June 19, 2008
    Applicant: SCHOTT AG
    Inventors: Michael Stelzl, Volker Seidemann, Jürgen Leib, Ha-Duong Ngo
  • Publication number: 20080144007
    Abstract: A thermal lens detection apparatus comprising: i) an optical cell for containing at least one target analyte present in a carrier liquid, ii) a probe beam having a pre-determined wavelength, iii) an excitation beam having a pre-determined wavelength shorter than that of the probe beam and a Rayleigh length approximately equal to the radius of said optical cell, the beam axis of said probe beam and the beam axis of said excitation beam being at an angle to each other but both the probe beam and excitation beam being focusable so that their beams overlap in the interior portion of the optical cell, iv) a signal photo-detector for receiving at least a portion of said probe beam signal after its passage through said optical cell, and iv) an optical cutoff filter which blocks the excitation beam from impinging on said signal photo-detector.
    Type: Application
    Filed: November 30, 2007
    Publication date: June 19, 2008
    Inventor: Alexander Kachanov
  • Publication number: 20080144008
    Abstract: A system for positioning a product, comprising a chuck (71) for supporting the product, an intermediate stage (79) supporting said chuck (71), and a stationary base (72) supporting said intermediate stage (79). The chuck (71) can move with respect to the intermediate stage (79) in a first direction X (80), and the intermediate stage (79) can move with respect to said stationary base in a second direction Y (81). The system furthermore comprises at least one laser interferometer (73,74,75,76,77,78) for measuring the position of the chuck (71) relative to the stationary base (72). The main part (73,74,75,76,77,78) of said laser interferometer is attached to said intermediate stage (79), so that it can measure the distance between a reflector (83,84,85) on the chuck (71) and a reflector (82,87) on the stationary base (72).
    Type: Application
    Filed: January 25, 2005
    Publication date: June 19, 2008
    Applicant: KONINKLIJKE PHILIPS ELECTRONIC, N.V.
    Inventor: Arjan Franklin Bakker
  • Publication number: 20080144009
    Abstract: A system and method permits for the separation of auto-fluorescence from a signal by applying a single probe to a sample, exciting the sample with a single wavelength light source, thereby emitting a light a distance from the light source. The emitted light is split, and the split light is collected into two or more distinct channels. A first channel of the distinct channels is positioned closer to the light source than a second distinct channel of the distinct channels, and the second channel is closer to the emission frequency of the single probe than is the first channel. The light collected in the first channel and the light collected in the second channel are investigated, and an output signal is generated based upon the investigation.
    Type: Application
    Filed: December 18, 2006
    Publication date: June 19, 2008
    Inventors: Robert T. Krivacic, Huangpin B. Hsieh, Douglas N. Curry, Richard H. Bruce
  • Publication number: 20080144010
    Abstract: In one embodiment, a surface is navigated by 1) using a first light sensor, mounted to a navigation device, to detect light reflected from a surface, and 2) using outputs of the first light sensor, over time, to determine relative movement of the navigation device with respect to the surface. While using the first light sensor, it is determined whether the outputs of the first light sensor, over time, are indicating movement of the navigation device with respect to the surface. If not, 1) a second light sensor that is mounted to the navigation device, and of a different type than the first light sensor, is used to detect light reflected from the surface, and 2) outputs of the second light sensor, over time, are used to determine relative movement of the navigation device with respect to the surface.
    Type: Application
    Filed: December 18, 2006
    Publication date: June 19, 2008
    Inventors: Lye Hock Bernard Chang, Srinivasan Lakshmanan
  • Publication number: 20080144011
    Abstract: The invention relates to an apparatus for detecting the orientation/position of products, in particular fish on a transport element. Said apparatus includes a transport element for transporting the products from an input area to an output area and measuring means arranged in the region of the transport element. The apparatus is characterised in that the measuring means comprises a support, on which at least two transmitters and at least two receivers are positioned. The invention also relates to a corresponding method.
    Type: Application
    Filed: January 26, 2006
    Publication date: June 19, 2008
    Inventors: Arne Burmeister, Alexander Rieker
  • Publication number: 20080144012
    Abstract: A system and method for optical spectroscopic measurements is described. One embodiment includes a measurement head for optical spectroscopic measurements, the measurement head comprising an illumination source configured to illuminate a sample, a collection optic configured to view the sample, and an internal reference, wherein the internal reference can be illuminated by the illumination source and viewed by the collection optic.
    Type: Application
    Filed: December 13, 2007
    Publication date: June 19, 2008
    Inventors: Alexander F. H. Goetz, Leonid G. Feldman, Thomas Ciupak, Robert J. Faus, Brian Curtiss
  • Publication number: 20080144013
    Abstract: Systems and methods for integration of fluorescence and reflective imaging are provided. The system and method can measure reflectance and fluorescence spectrally and spatially with co-registered hyperspectral signatures, and can output a co-registered image from first and second co-registered hyperspectral image data sets.
    Type: Application
    Filed: November 30, 2007
    Publication date: June 19, 2008
    Applicant: INSTITUTE FOR TECHNOLOGY DEVELOPMENT
    Inventors: Mark Allen Lanoue, Robert E. Ryan, Duane O'Neal, Jeffrey A. Russell
  • Publication number: 20080144014
    Abstract: An apparatus for inspecting a wafer, comprising a first illuminator for radiating an illumination beam in a first illumination beam path onto a surface of the wafer and being configured as continuous light source; a second illuminator for radiating an illumination light beam in a second illumination beam path onto a surface of the wafer and being configured as continuous light source; a first detector means defining a first detection beam path; a second detector means defining a second detection beam path, wherein the first and the second detector means have a predetermined spectral sensitivity and detect data of at least an illuminated area moveable in a scanning direction on the surface of the wafer in a plurality of different spectral ranges.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 19, 2008
    Applicant: Vistec Semiconductor Systems GmbH
    Inventors: Wolfgang Vollrath, Alexander Buettner, Christof Krampe-Zadler
  • Publication number: 20080144015
    Abstract: An inspection unit, in which a laser source and a reflection measuring module containing a laser source and a light receiver are connected to an optical switch, is connected to an input optical fiber of an optical fiber device. An end of an output optical fiber is beveled and is connected to the light receiver through an adapter. When loss is measured, inspection light from the laser source is input into the light receiver through the input optical fiber, the optical fiber device, and the output optical fiber. When return loss is measured, an optical switch is switched to input inspection light, from the laser source in the reflection measuring module, into the optical fiber device through the input optical fiber, and to input light reflected from the optical fiber device into the light receiver in the reflection measuring module.
    Type: Application
    Filed: July 16, 2007
    Publication date: June 19, 2008
    Applicant: SAE Magnetics (H.K.) Ltd
    Inventors: Masanori Goto, Tsutomu Fukai, Masahiro Onishi
  • Publication number: 20080144016
    Abstract: An improved technique for acoustic sensing involves, in one embodiment, launching into a medium, a plurality of groups of pulse-modulated electromagnetic-waves. The frequency of electromagnetic waves in a pulse within a group differs from the frequency of the electromagnetic waves in another pulse within the group. The energy scattered by the medium is detected and, in one embodiment, the beat signal may be used to determine a characteristic of the environment of the medium.
    Type: Application
    Filed: October 3, 2007
    Publication date: June 19, 2008
    Inventors: Andrew B. Lewis, Stuart Russell
  • Publication number: 20080144017
    Abstract: A system and method for inspecting an article, the system includes a spatial filter that is shaped such as to direct output beams towards predefined locations and an optical beam directing entity, for directing the multiple output beams toward multiple detector arrays. The method includes spatially filtering multiple input light beams to provide substantially aberration free output light beams; and directing the multiple output beams by an optical beam directing entity, toward multiple detector arrays.
    Type: Application
    Filed: December 20, 2007
    Publication date: June 19, 2008
    Inventors: Emanuel Elyasaf, Steven R. Rogers
  • Publication number: 20080144018
    Abstract: An apparatus rapidly reads out wavefront errors of an input wavefront and includes a holographic optical element (HOE), a position readout detector and a readout device. The HOE receives the input wavefront and includes a hologram of a particular wavefront recorded with reference waves, each defining a particular aberration coefficient. The position readout detector includes a plurality of position sensing devices (PSDs) receiving an optical output of the HOE, each PSD sensing the occurrence and magnitude in the input wavefront of any of the particular aberrations defined by the reference waves recorded to the holographic optical element with the particular wavefront. The readout device provides a readout value of each PSD upon application of the input wavefront to the holograph optical element, each readout value representing in the input wavefront the presence and magnitude of any of the particular aberrations defined by the reference waves.
    Type: Application
    Filed: December 13, 2006
    Publication date: June 19, 2008
    Inventors: Mark A. Stevens, Allen C. Layton
  • Publication number: 20080144019
    Abstract: A rotary encoder for determining the rotation of an object to be measured includes a shaft that is coupled to the rotation of the object to be measured, as well as at least one bearing in which the shaft is rotationally mounted. The rotary encoder also has a rotary-transducer base member having a bearing fixation region at which the bearing is fixed in position, at least one depression area being formed continuously with a defined depth on the rotary-transducer base member along the periphery of the bearing fixation region such that it surrounds at least half the periphery of the bearing fixation region.
    Type: Application
    Filed: November 26, 2005
    Publication date: June 19, 2008
    Inventors: Yoshiyuki Nakamura, Masato Takahashi
  • Publication number: 20080144020
    Abstract: The method of mobile radio positioning aided by a single fan laser comprising: generating a single sloping fan beam by using a stationary fan laser transmitter positioned in a location with known coordinates; detecting the single sloping fan beam by using the mobile laser detector; receiving the averaged low-passed filtered estimate of angular rate of the laser beam; receiving the plurality of main time tags; receiving the plurality of additional time tags; and timing the fan laser beam strike at the rover's location to improve an accuracy in determination of position coordinates of the rover.
    Type: Application
    Filed: December 13, 2007
    Publication date: June 19, 2008
    Inventors: Mark E. Nichols, Nicholas C. Talbot, Gary L. Cain
  • Publication number: 20080144021
    Abstract: A system for testing a lighting diode includes one or more nozzles, a probe, and a detector, where the lighting diode is operable to emit light in response to a current. The one or more nozzles direct a cooling fluid towards the lighting diode. The probe applies a current to the lighting diode. The detector detects the light emitted by the lighting diode in response to the current.
    Type: Application
    Filed: December 18, 2006
    Publication date: June 19, 2008
    Inventor: Bradley M. Haskett
  • Publication number: 20080144022
    Abstract: The invention relates to an analysis system for analysing a sample on an analytical test element. The analysis system comprises a measuring module for carrying out measurements on the sample on the analytical test element and an optical module which comprises a lens and a diaphragm by which the light can be focused. The lens and the diaphragm of the optical module are combined as one piece in a multi-component injection-molded part.
    Type: Application
    Filed: December 22, 2007
    Publication date: June 19, 2008
    Inventors: Jochen Schulat, Klaus-Dieter Steeg
  • Publication number: 20080144023
    Abstract: This invention is a defect inspection apparatus having a reflecting objective lens free from chromatic aberration, or an achromatic catadioptric lens, and a dioptric objective lens, and thus constructed to suppress changes in brightness due to multi-wavelength illumination (i.e., illumination with the irradiation light having a plurality of wavelength bands), to provide a clearer view of defects present on a sample, by means of selective wavelength detection in order to improve sensitivity, and to allow one spatial image on the sample to be acquired as different kinds of optical images.
    Type: Application
    Filed: November 7, 2007
    Publication date: June 19, 2008
    Inventors: Yukihiro Shibata, Shunji Maeda
  • Publication number: 20080144024
    Abstract: A defect inspection apparatus includes an irradiation optical system 20, a detection optical system 30, and an image processor 40. In the irradiation optical system, a mirror 2603 is disposed to reflect downward a beam flux that has been guided to a first or second optical path, and a cylindrical lens 251 and an inclined mirror 2604 are disposed to focus the beam flux that has been directed downward by the mirror, at an inclination angle from a required oblique direction extending horizontally, onto a substrate 1 to be inspected, as a slit-shaped beam 90.
    Type: Application
    Filed: February 12, 2008
    Publication date: June 19, 2008
    Applicant: Hitachi High-Technologies Corporation 24-14
    Inventors: Hiroyuki Nakano, Akira Hamamatsu, Sachio Uto, Yoshimasa Oshima, Hidetoshi Nishiyama, Yuta Urano, Shunji Maeda
  • Publication number: 20080144025
    Abstract: An apparatus for inspecting a wafer, comprising at least one illuminator each arranged in an illumination beam path, wherein the at least one illuminator radiates an illumination spot onto a surface of the wafer and being a continuous light source; a detector arranged in a detection beam path has a predetermined spectral sensitivity and records data from the at least one illumination spot from the surface of the wafer; an imager generating a relative movement between the surface of the wafer and the detector, whereby in a meandering movement the illumination spot is passed across the entire surface of the wafer in the scanning direction; and the at least one illumination spot being detected in a plurality of different spectral ranges.
    Type: Application
    Filed: December 6, 2007
    Publication date: June 19, 2008
    Applicant: Vistec Semiconductor Systems GmbH
    Inventors: Wolfgang Vollrath, Alexander Buettner, Christof Krampe-Zadler
  • Publication number: 20080144026
    Abstract: Fiber optic surface-enhanced Raman spectroscopic (SERS) systems (also referred to as “SERS system”), portable SERS systems, SERS probes, and methods of using the SERS systems and SERS probes to detect an analyte, are disclosed.
    Type: Application
    Filed: August 6, 2007
    Publication date: June 19, 2008
    Inventors: Yiping Zhao, Yongjun Liu
  • Publication number: 20080144027
    Abstract: A method and system for spectroscopy of surface plasmons is presented. An electromagnetic wave is made incident on a diffraction grating. Surface plasmons are excited on a medium coincident to the diffraction grating and dispersion of a wavelength spectrum of the electromagnetic wave are simultaneously performed through diffraction. Changes in spatial distribution of intensity in the wavelength spectrum of the diffracted electromagnetic wave due to the excitation of the surface plasmons are measured.
    Type: Application
    Filed: January 12, 2006
    Publication date: June 19, 2008
    Inventors: Jiri Homola, Olga Telezhnikova, Jakub Dostalek