Abstract: A liquid crystal display includes: a color filter substrate; and a plurality of pixels formed in a matrix form on the color filter substrate, each pixel including a first red sub-pixel, a first green sub-pixel, a first blue sub-pixel, a pair of second red sub-pixel and third green sub-pixel, a pair of second green sub-pixel and third blue sub-pixel, and a pair of second blue sub-pixel and third red sub-pixel.

Abstract: A difference in brightness between a portion, at which fiber overlaps, and any other portion of a plastic substrate in which a fiber cloth is contained is eliminated by setting the axis of the fiber and the optical axis of a polarizing plate so as to be coaxial with each other. Thereby, a normal displaying can be effected.

Abstract: A display device and a method of manufacturing the same is disclosed, to prevent a parasitic capacitance caused by a metal substrate. The display device comprises a metal substrate including a pixel array provided with a plurality of storage lines to supply a storage voltage, and a supplying line connected to the storage lines; and a voltage source, connected to the supplying line, which generates the storage voltage, wherein the metal substrate is connected to any one of an output terminal of the voltage source, the supplying line and the storage lines.

Abstract: An active matrix circuit substrate includes: a substrate having an avoidance portion provided in a predetermined region; a plurality of pixel electrodes provided on the substrate; a driving circuit that is provided on the substrate and drives the a plurality of pixel electrodes; a plurality of wiring lines which are provided on the substrate and include a plurality of power lines electrically connected to the driving circuit and a part of which has a detour portion that makes a detour to avoid the avoidance portion; and a connecting portion which is provided in the periphery of the avoidance portion on the substrate and which is connected to the power lines such that the plurality of power lines are packed.

Abstract: An electric field driving device, in which a plurality of pixels, each of which is formed of two or more sub-pixels that respectively correspond to different colors from one another, are arranged in a matrix in a pixel region on a substrate, includes pixel electrodes, a common electrode, an insulating layer, and a material. Each of the pixel electrodes is formed in correspondence with the sub-pixel on the substrate. The common electrode is formed above the pixel electrodes on the substrate so that at least part of the common electrode overlaps each of the pixel electrodes in plan view. The insulating layer is formed on the substrate between the pixel electrodes and the common electrode. The material is driven by an electric field that is generated on the basis of a difference in electric potential between each of the pixel electrodes and the common electrode. The common electrode has a plurality of slits that at least partly overlap the pixel electrodes in plan view.

Abstract: The liquid crystal display device includes a first insulation substrate, a gate line which is disposed on the first insulation substrate and extends substantially in a first direction, first and second data lines which are insulated from the gate line, extend substantially in a second direction and intersect the gate line, a pixel electrode which includes first and second sub-pixel electrodes which are each provided with different data voltages via the first and second data lines, respectively, and which are separated from each other by a gap, the second sub-pixel electrode at least partially overlapping the first and second data lines, a second insulation substrate which faces the first insulation substrate, a black matrix which is disposed on the second insulation substrate and includes an irregular shape and extends substantially along the first and second data lines and a liquid crystal layer which is interposed between the first and second insulation substrates.

Abstract: A liquid crystal display device that is used in a small portable device includes a driver circuit which is freely mounted because the mounting area is small. The liquid crystal display device includes a liquid crystal display element and the liquid crystal driver circuit. The liquid crystal driver circuit is mounted along one side of a liquid crystal display panel. The liquid crystal display panel is connected to a flexible printed circuit board mounted with a rewritable memory element. The memory element stores transition commands for various modes of the driver circuit. The driver circuit reads a transition command from the memory element using a simple command and executes a transition of any of the various modes to another one.

Abstract: A liquid crystal display includes a terminal substrate, an opposed substrate, a seal member and a protective wall. The terminal substrate includes: a display area which displays an image, a terminal which inputs an external signal to a wiring in the display area, and a connection conductor which electrically connects the wiring in the display area and the terminal. The opposed substrate includes a conductive film on a surface thereof. The seal member surrounds the display area and through which the terminal substrate and opposed substrate are attached with each other while being opposed with each other. The protective wall surrounds a proximity portion of the connection conductor and the conductive film outside of an area surrounded by the seal member, together with the seal member to isolate and protect the proximity portion from an outside.

Abstract: The present invention provides a liquid crystal display panel which exhibits excellent durability by protecting portions of a substrate which are liable to be most easily cracked or chipped. In a liquid crystal display panel arranging a sealing material between a TFT substrate and a CF substrate, and holding a liquid crystal layer between the TFT substrate and the CF substrate, the CF substrate has one-side surface thereof formed in a recessed shape as viewed from above, a flexible printed circuit board is connected to a region of the TFT substrate where the CF substrate and the TFT substrate do not overlap with each other, and a sealing material is formed along a shape of the CF substrate. Portions where the TFT substrate and the CF substrate overlap with each other and correspond to both sides of the portion where the flexible printed circuit board is arranged can be formed such that the sealing material is filled in the portions with no gap.

Abstract: A method of manufacturing a liquid crystal display device forms a seal pattern having a liquid crystal inlet seal pattern across a cutting-plane line above a mother substrate where a plurality of panels are arranged in matrix with the cutting-plane line interposed therebetween, and cuts the mother substrate at the cutting-plane line into the plurality of panels. The method includes coating an organic film, patterning the organic film to form an organic film removal area placed along the cutting-plane line and including a wide portion where the organic film removal area is wide with a boundary with the organic film being curved, coating a photosensitive resin over the organic film, forming the liquid crystal inlet seal pattern in the wide portion of an adjacent panel, and cutting the mother substrate at the cutting-plane line so as to divide the liquid crystal inlet seal pattern.

Abstract: There is provided a liquid crystal display device in which light leaks near spacers are prevented. The liquid crystal display device controls the optical transmissivity of a liquid crystal layer interposed between substrates disposed in opposition to each other, by means of an electric field generated in the layer-thickness direction of the liquid crystal layer, includes spacers formed on a liquid-crystal-side surface of one of the substrates, signal lines formed on a liquid-crystal-side surface of the other substrate, an insulating film formed to cover the signal lines, and electrodes formed on the upper surface of the insulating film, each of which serves as one electrode contributing to control of the optical transmissivity of the liquid crystal layer.

Abstract: An adhesive-film exfoliating device includes first and second guide tables 5, 6 having flat mount surfaces 5a, 6a for mounting a liquid crystal display panel 2 having glass plates 3 and polarizing plates 4, a take-up roller 7 on the backside of the tables 5, 6 and a slit 8 arranged between the guide tables 5, 6 to allow a passage of one polarizing plate 4 exfoliated from the lower glass plate 3. The slit 8 is formed with a breadth less than 5 mm. The breadth corresponds to a dimension of the slit 8 in a feeding direction of the glass plate 3 on the flat mount surfaces 5a, 6a. In a manufacturing method of the liquid crystal display panel 2, a process of exfoliating one polarizing plate 4 from the lower glass plate 3 includes a step of pulling the polarizing plate 4 through the slit 8 in a direction to exfoliate the plate 4 from the glass plate 3.

Abstract: Each of temples of an eyeglass frame includes a first and second temple portions rotatably coupled together via a second joint, an axis of the second joint coupling the first and second temple portions together is disposed on either an inner side or an outer side of a center of a width of the temple, and opposing surfaces are formed at ends of the first and second temple portions forming the second joint, the opposing surfaces being formed on either an outer side or an inner side of the axis intersecting the axial direction of the temple, and magnets are mounted in the opposing surfaces, and a gap is formed between the opposing surfaces or in surfaces on an outer side of the second joint, enabling the temples to be further pushed open outward by only a small angle in a state opened due to the first joint.

Abstract: A scanning laser ophthalmoscope comprises: a laser source that emits a laser beam; an irradiation optical system that scans the laser beam over a fundus two-dimensionally; a photoreceptor optical system that receives reflection from the fundus by using a photoreceptor element; an image processor that obtains an image of the fundus based on an output signal from the photoreceptor element; a monitor; and a controller that causes the monitor to display the obtained fundus image, wherein the image processor comprises a subtractive processing circuit that performs time-subtractive processing on the output signal from the photoreceptor element in a state where the output signal is input as an analog signal, and forms the fundus image based on the signal subjected to the subtractive processing.

Abstract: A method and apparatus for compensating for aberrations or distortions of an optical system such as an eye of a patient which is to be imaged by a camera is disclosed. Light passing through the optical system is detected by a charge coupled device (62) via an imaging system (60). Phase data relating to the light passing through the system is determined and a processor (64) processes the data so that a transformation is determined which transforms the data relating to the wavefront of the light so that the phase data is transformed to remove aberrations or distortions introduced by the optical system. Thus, clearer images of the fundus of an eye generated by light passing through the optical system of the eye and for determining distortions or aberrations introduced by the optical system of the eye are provided.

Abstract: A wavefront aberration compensating apparatus, including: a deformable mirror which compensates a wavefront aberration of a light flux and includes electrodes, and a thin-film mirror which changes a configuration thereof in accordance with a voltage value applied to each of the electrodes; an optical system provided with the deformable mirror and including an object subjected to aberration compensation; a wavefront sensor which measures the wavefront aberration of the light flux; a memory which stores therein a voltage template provided for each expansion mode according to a polynomial of wavefront aberration, as a voltage alignment data for the electrodes which induces the corresponding expansion mode; and a controller configured to determine a superposition amplitude value of each of the expansion modes and calculate the voltage value applied to each of the electrodes by using the voltage templates stored such that the wavefront aberration obtained by the wavefront sensor becomes a desired aberration, and t

Abstract: A wavefront aberration compensating apparatus includes: a deformable mirror which compensates a wavefront aberration of a light flux entered, the deformable mirror including a plurality of electrodes, and a thin-film mirror which changes a configuration thereof in accordance with a voltage value applied to each of the electrodes; an optical system provided with the deformable mirror, and including an object subjected to aberration compensation; a wavefront sensor which receives the light flux traveled through the object and the deformable mirror, and which measures the wavefront aberration of the light flux; and a controller configured to calculate the voltage value applied to each of the electrodes, on the basis of differences, from a signal outputted from the wavefront sensor, between application points on the thin-film mirror and target points both corresponding to the electrodes, respectively, and to repeat compensation of the configuration of the thin-film mirror of the deformable mirror on the basis of

Abstract: A wavefront aberration compensating apparatus, which includes: a deformable mirror having electrodes and a thin-film mirror; an optical system provided with the deformable mirror and including an object; a wavefront sensor which measures a wavefront aberration of a light flux; and a controller configured to: calculate a first voltage value applied to each of the electrodes, on the basis of differences between application points on the thin-film mirror and target points both corresponding to the electrodes respectively; determine a superposition amplitude value of each expansion mode according to a polynomial of wavefront aberration, and calculate a second voltage value applied to each of the electrodes by using voltage templates previously stored, such that the wavefront aberration obtained by the wavefront sensor becomes a desired aberration; determine the voltage value applied to each of the electrodes, by mainly using the second voltage value in an initial stage of compensation of the configuration of the

Abstract: The invention relates to a device, for measuring the contrast of fringes in a Michelson interferometer at full field, comprising a Wollaston prism for diverting two perpendicular incident polarisations into two different emergent directions, said diverting means being arranged within the interferometer as substitute for a single polariser. The device is of application to a Michelson interferometer used in an OCT tomographical system and comprising means for obtaining interferometric contrast without use of a modulation technique or synchronous detection methods.

Abstract: An ophthalmic endoilluminator includes a light source, a variable-wedge rotating-disk attenuator, a condensing lens, and an optical fiber. The variable-wedge rotating-disk attenuator attenuates the light produced by the light source. The variable-wedge rotating-disk attenuator includes a wedge capable of being adjusted over a variable angle as measured through an arc of the wedge and an axle to which the wedge is attached. The axle rotates such that the wedge rotates around a pivot defined by the axle. The condensing lens focuses the attenuated light. The optical fiber carries the focused light into an eye. The variable-wedge rotating-disk attenuator is located such that it affects the intensity of a light beam transmitted into an eye.

Abstract: A variable-wedge rotating-disk attenuator for use in an ophthalmic endoilluminator is disclosed. The attenuator includes a wedge attached to an axle. The size of the wedge can be adjusted over a variable angle as measured through an arc of the wedge. The axle to which the wedge is attached rotates such that the wedge rotates around a pivot defined by the axle. The variable-wedge rotating-disk attenuator is located such that it affects the intensity of a light beam transmitted into an eye.

Abstract: A method for adjusting the picture definition on the camera lens of a motion picture camera. A drive unit is connected to the camera lens which is driven, in the manual focusing operation, by an picture definition handwheel of an operating unit, which displays the adjusted picture definition on a scale dial, and, in the automatic focusing operation, by an auto-focusing device for measuring the distance from an object to be recorded by the motion picture camera and outputting control signals to an electromechanical actuator, which is connected to the picture definition handwheel or to the scale dial of the operating unit, for adjusting or readjusting the picture definition adjusted on the picture definition handwheel or displayed on the scale dial as a function of the distance measured from the object to be recorded.

Abstract: The present invention discloses a rotation mirror image display, which comprises: a driving means; a control unit for controlling at least one image and generating at least one image-control signal; a rotating member being continuously driven by the driving means and generating at least one mirror image; and at least one emitting module having a plurality of LEDs and disposed outside a rotating path of the rotating member; wherein the display with the mirror image is formed by way of rotating the rotating member and controlling the control unit to let the emitting module generate the mirror image.

Abstract: A polarization conversion system (PCS) is located in the output light path of a projector. The PCS may include a polarizing beam splitter, a polarization rotating element, a reflecting element, and a polarization switch. Typically, a projector outputs randomly-polarized light. This light is input to the PCS, in which the PCS separates p-polarized light and s-polarized light at the polarizing beam splitter. P-polarized light is directed toward the polarization switch on a first path. The s-polarized light is passed on a second path through the polarization rotating element (e.g., a half-wave plate), thereby transforming it to p-polarized light. A reflecting element directs the transformed polarized light (now p-polarized) along the second path toward the polarization switch. The first and second light paths are ultimately directed toward a projection screen to collectively form a brighter screen image in cinematic applications utilizing polarized light for three-dimensional viewing.

Abstract: An imager is shifted with respect to an optical axis of a refractive optical system. Thereby, a throw distance of a projector is shortened. A wavelength-selective half wavelength plate for rotating a polarization direction of green light beams is disposed between a dichroic prism and the refractive optical system in such a manner that the polarization direction of the green light beams is in parallel to the shifting direction. Thereby, the green light beams are incident onto the refractive optical system as P-polarized beams, whereby a transmittance of the green light beams in the refractive optical system is increased, while suppressing lowering of the light amount of the green light beams, and color non-uniformity resulting from lowering of the light amount of the green light beams.

Abstract: A projector includes a lighting optical system for emitting a lighting beam, a color separation/light guiding optical system for separating the lighting beam from the lighting optical system into optical paths for three colored light beams, a light modulation device provided for each of the colored light beams and for modulating the light beam, which is separated and guided to the optical path for each of the colored light beams by the color separation/light guiding optical system, in accordance with image information, a light beam combining optical system for combining the colored light beams each modulated by the light modulation device for each of the colored light beams, and a projection optical system for projecting the light beams output via the light beam combining optical system.

Abstract: An illumination system includes a lamp, an optical element, a fan and a wind-guiding device. The extended direction of the central axis of the fan is slanted to the optic axis of an illumination beam from the lamp with an angle. The wind-guiding device includes a wind-guiding portion and a frame having a first carrying surface for carrying the fan. A second carrying surface of the frame is opposite to the first carrying surface and faces towards the lamp and the optical element. A wind-guiding plate of the wind-guiding portion is extended from a side of the frame towards the optical element and has a bending corner. A part of a cooling airflow from the fan passes through an opening of the frame and is blown to the lamp directly, and another part thereof is guided by the bending corner and is blown directly to the optical element.

Abstract: A plastic color wheel assembly includes a motor and a color filtering plate. The color filtering plate is disposed at one side of the motor and is made of plastic A projection system including the plastic color wheel is also disclosed.

Abstract: A projector includes a housing, a projecting module, a first luminance sensor, a second luminance sensor and a control module. The projecting module includes a light source for emitting light, a light valve for modulating the light into image light, and a projection lens for projecting the image light to a screen. The first luminance sensor senses the luminance of the image projected on the screen. The second luminance sensor senses the ambient luminance. The control module adjusts luminance of the light emitted from the light source according to sensed results of the two luminance sensors.

Abstract: A projection-type display device includes a shielding unit and image signal correction units that divide the picture plane of the spatial light modulation element into a plurality of areas and perform correction on the image signal applied to the spatial light modulation element according to the current shielding amount of the shielding unit for each of the plurality of areas. Accordingly, appropriate uniformity correction is performed even when there is a change in the angular distribution of light emitted from the spatial light modulation element and reaching the screen.

Abstract: A projection apparatus including a projection body and at least one adjusting leg is provided. The projection body has a casing, and the bottom of the casing has at least one accommodating cave. The adjusting leg includes a supporter and a pivoting rod. The supporter has a supporting portion and a screw connected to the supporting portion, and the projection body is capable of being supported on a surface by the supporting portion. The pivoting rod is pivoted to the casing and has a threaded hole, and the screw is screwed into the threaded hole. The pivoting rod is capable of being rotated along an axis of the pivoting rod to drive the supporter to rotate, so as to accommodate the supporting portion in the accommodating cave.

Abstract: A lithographic apparatus includes an illumination system constructed and arranged to condition a beam of radiation, and a support structure constructed and arranged to support a patterning device. The patterning device is configured to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate table constructed and arranged to hold a substrate. The substrate table includes a substrate support plate that is in thermal contact with a thermal conditioning plate. The apparatus further includes a projection system constructed and arranged to project the patterned beam of radiation onto a target portion of the substrate.

Abstract: According to one exemplary embodiment, an extreme ultraviolet (EUV) source collector module for use in a lithographic tool comprises an EUV debris mitigation filter. The EUV debris mitigation filter can be in the form of an aerogel film, and can be used in combination with an EUV debris mitigation module comprising a combination of conventional debris mitigation techniques. The EUV debris mitigation filter protects collector optics from contamination by undesirable debris produced during EUV light emission, while advantageously providing a high level of EUV light transmittance. One disclosed embodiment comprises implementation of an EUV debris mitigation filter in an EUV source collector module utilizing a discharge-produced plasma (DPP) light source. One disclosed embodiment comprises implementation of an EUV debris mitigation filter in an EUV source collector module utilizing a laser-produced plasma (LPP) light source.

Abstract: Apparatus and methods keep immersion liquid in a space adjacent to an optical assembly. An optical assembly projects an image onto a substrate supported adjacent to the optical assembly by a substrate table. An insertion member insertable into the space between the optical assembly and the substrate, the substrate table, or both, divides the immersion liquid into a first portion and a second portion, the first portion disposed between the optical assembly and the insertion member, and the second portion disposed between the insertion member and the substrate, the substrate table, or both. The insertion member keeps the optical assembly in contact with the first portion when the substrate is moved away from being disposed adjacent to the optical assembly.

Abstract: An optical element unit including a first optical element module and a sealing arrangement is disclosed. The first optical element module occupies a first module space and includes a first module component of a first component type and an associated second module component of a second component type. The first component type is optical elements and the second component type being different from the first component type. The sealing arrangement separates the first module space into a first space and a second space and substantially prevents, at least in a first direction, the intrusion of substances from one of the first space and the second space into the other one of the first space and the second space. The first module component at least partially contacts the first space and, at least in its area optically used, not contacting the second space. The second module component at least partially contacts the second space.

Abstract: Apparatus, systems and methods remove liquid from a workpiece. A first station subjects a workpiece to processing that leaves a liquid on a surface of the workpiece. A second station is disposed at a location spaced apart from the first station. A porous member is disposed between the first and second stations. The porous member has a liquid-phyllic surface that faces the workpiece and is spaced from a surface of the workpiece by a gap. The porous member has a length in a direction perpendicular to a movement direction in which the workpiece moves from the first station to the second station, the length being at least as large as a dimension of the workpiece in the direction perpendicular to the movement direction.

Abstract: An exposure apparatus includes an optical element via which a patterned beam is projected onto a substrate through exposure liquid filled in a space between the optical element and the substrate. The apparatus also includes a member having a surface and movable to a position at which the surface of the member faces the optical element. The apparatus also includes a cleaning system which cleans the surface of the member.

Abstract: A liquid immersion exposure apparatus includes an optical element via which a patterned beam is projected onto a substrate in an exposure operation, a liquid supply system having a supply port from which exposure liquid is supplied, and a member which has a surface and which is different from the substrate. In the exposure operation, the liquid supply system supplies the exposure liquid from the supply port to a space between the optical element and the substrate. In a cleaning operation, the member is moved to a position at which the surface of the member faces the optical element, and the liquid supply system supplies the exposure liquid from the supply port to a space between the optical element and the surface of the member.

Abstract: An immersion lithography system is provided which includes an optical source operable to produce light having a nominal wavelength and an optical imaging system. The optical imaging system has an optical element in an optical path from the optical source to an article to be patterned thereby. The optical element has a face which is adapted to contact a liquid occupying a space between the face and the article. The optical element includes a material which is degradable by the liquid and a protective coating which covers the degradable material at the face for protecting the face from the liquid, the protective coating being transparent to the light, stable when exposed to the light and stable when exposed to the liquid.

Abstract: A device manufacturing method includes exposing a substrate with a patterned beam of radiation formed by a reticle mounted on a displaceable reticle stage, determining a non-linear function for approximating a height and a tilt profile of a surface of the reticle with respect to the reticle stage, and controlling a displacement of the reticle stage during exposure of the substrate in accordance with the non-linear function.

Abstract: A stage assembly (220) that moves a work piece (200) along a first axis includes a stage base (236), a guide bar (238), a device table (240) that retains the work piece (200), a mover assembly (242), and a damper (225). The damper (225) can be a passive, electromagnetic damper that passively dampens movement of the guide bar (238) relative to the stage base (236) along a second axis that is orthogonal to the first axis. The damper (225) can includes a magnet array (356) and a conductor (366) that is positioned in a magnetic field that surrounds the magnet array (356). With this design, relative movement between the guide bar (238) and the stage base (236) along the second axis induces the flow of current in the conductor (366) and eddy current damping. The damper (225) can include a first damper subassembly (252A) that is coupled to the guide bar (238) and a second damper subassembly (252B) that is coupled to the stage base (236).

Abstract: In a photomask in which a device pattern, an alignment mark and a superimposition inspection mark are formed on a light transmitting base, each of the alignment mark and the superimposition inspection mark includes a main mark portion, and first and second auxiliary pattern portions. The main mark portion is constituted of one of a space pattern and a line pattern, the pattern having a linear width to be resolved on a photosensitive film formed on a semiconductor wafer, and each of the first and second auxiliary pattern portions includes an auxiliary pattern constituted of one of a repeated pattern of a space pattern and a repeated pattern of a line pattern, the repeated pattern having a linear width not to be resolved on the photosensitive film. The pitch of the repeated pattern is equal to the minimum pitch of the device pattern.

Abstract: Clamps are disclosed for holding an optical element relative to a support. An exemplary clamp includes first and second arms and a member connecting the arms such that a portion of a mounting feature of the optical element is between the first and second arms. The first arm applies a clamping force toward a respective portion of the mounting feature, and the second arm includes a seat. The seat has at least upper and intermediate portions. The upper portion engages the respective location on the mounting feature. The intermediate portion is situated between the upper portion and the second arm and has a lateral thickness less than the lateral thickness of the upper portion. The intermediate portion exhibits elastic and plastic deformability sufficient for any moment applied by the clamp to the mounting feature to be limited to less than a designated peak moment, while maintaining substantially full engagement of the upper portion with the respective location.

Abstract: An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements two-dimensionally juxtaposed, and a second optical integrator including a plurality of second wavefront dividing elements two-dimensionally juxtaposed. Each of the first wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface are emitted in parallel with the optical axis. Each of the second wavefront dividing elements is also so constructed that rays obliquely incident to a center on an optical axis of an entrance surface are emitted in parallel with the optical axis. The system satisfies the condition of P2/(2×tan ?)<L12.

Abstract: An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction, and a second optical integrator including a plurality of second wavefront dividing elements arranged in juxtaposition along the predetermined direction, which are arranged in order from the entrance side of light. The first wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted in parallel with the optical axis. The second wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted obliquely to the optical axis.

Abstract: There is provided an illumination system. The illumination system includes a source of light having a wavelength of less than or equal to about 193 nm, a first facet, a second facet, and a reflective element. The light is incident on the first facet via a first path, propagates from the first facet to the second facet via a second path, and propagates from the second facet to the reflective element via a third path. The second path and the third path are in substantially opposite directions from one another and substantially parallel to each other.

Abstract: An illumination system comprises (a) a first optical element upon which a light beam impinges, where the first optical element has first raster elements that partition said light beam into light channels; (b) a second optical element that receives said light channels, where the second optical element has a second raster elements; (c) an object plane that receives said light channels via said second optical element; and (d) an exit pupil that is provided with an illumination via said object plane. The system is characterized by an assignment of a member of said first raster elements and a member of said second raster elements to each of said light channels to provide a continuous beam path from said first optical element to said object plane for each of said plurality of light channels. The assignment is changeable to provide an adjustment of said illumination in said exit pupil.

Abstract: An illuminator for a lithographic apparatus, the illuminator including an illumination mode defining element and a plurality of polarization modifiers, the polarization modifiers being moveable into or out of partial intersection with a radiation beam having an angular and spatial distribution as governed by an illumination mode defining element.

Abstract: An exposure apparatus is configured so that a wafer carrier robot can deliver a wafer to a wafer holder held by a holder carrier robot or can carry out a wafer from the wafer holder held by the holder carrier robot, under a reduced-pressure environment. According to the apparatus, even if it takes a relatively long time to replace the wafer on the wafer holder used inside the reduced pressure space, by performing the wafer exchange operation and a predetermined operation (the exposure apparatus main section operation) using the stage on which the wafer holder holding the wafer is mounted concurrently, the influence that the wafer exchange time has on the throughput can be suppressed.

Abstract: A displacement measurement apparatus includes a light source, a splitter grating, a measurement grating, and first a second detector arrays. The splitter grating splits a light beam into first and second measurement channels that each illuminates the measurement grating. The first and second measurement channels split into 0th and 1st order diffraction products at the measurement grating in a first pass and recombine at the measurement grating in a second pass before being measured at the first and second detector arrays.