Abstract: The present teachings provide a method for manufacturing a semiconductor device including a semiconductor substrate and a lower surface electrode in which an aluminum containing layer, a titanium layer, a nickel layer, and a nickel oxidation-prevention layer are laminated in order from a semiconductor substrate side, wherein the titanium layer of the lower electrode is formed by sputtering in an atmosphere of a partial pressure of oxygen being equal to or less than 5×10?6 Pa.

Abstract: An energy contamination detection apparatus includes a membrane and a charge collection plate disposed at a distance from the membrane. The membrane is configured to receive an ion beam and allow a portion of the ion beam having energy levels above a desired energy level to pass therethrough toward the charge collection plate and absorb or reflect portions of the ion beam having energy levels at or below the desired energy level. A voltage source is electrically coupled to the charge collection plate for providing a bias voltage to the charge collection plate. A detection circuit is coupled to the charge collection plate and is configured to detect energy contamination based on an amount of charge collected on the charge collection plate.

Abstract: A sample is ionized by chemical ionization by flowing the sample and a reagent gas into an ion source at a pressure below 0.1 Torr. While maintaining the ion source at a pressure below 0.1 Torr, the reagent gas is ionized in the ion source by electron ionization to produce reagent ions. The sample is reacted with the reagent ions at a pressure below 0.1 Torr to produce product ions of the sample. The product ions are transmitted into an ion trap for mass analysis.

Abstract: A method of mounting rods in quadrupole, hexapole, octupole, and other multipole geometries is described. First and second dies are used to hold the rods in the required configuration with the plurality of rods extending through each of the two dies. A coupling arrangement is used to separate the first and second dies, and also prevents motion in the plane of the dies. The rods are seated and retained against individual supports and arranged circumferentially about an intended ion beam axis. The supports are desirably fabricated from silicon bonded to a glass substrate, a support for a first rod being electrically isolated from a support for a second adjacent rod.

Abstract: A microengineered multipole ion guide for use in miniature mass spectrometer systems is described. Exemplary methods of mounting rods in hexapole, octupole, and other multipole geometries are described. The rods forming the ion guide are supported in etched silicon structures defined in at least first and second substrates.

Abstract: A radio-frequency ion guide (20) for converging ions by a radio-frequency electric field and simultaneously transporting the ions into the subsequent stage is composed of eight rod electrodes (21 through 28) arranged in such a manner as to surround an ion optical axis (C). Each of the rod electrodes (21 through 28) is disposed at a tilt with respect to the ion optical axis (C) so that the radius r2 of the inscribed circle (29b) at the end face of the ion exit side is larger than the radius r1 of the inscribed circle (29a) at the end face of the ion injection side. Accordingly, the gradient of the magnitude or depth of the pseudopotential is formed in the ion's traveling direction in the space surrounded by the rod electrodes (21 through 28). Ions are accelerated in accordance with this gradient. Therefore, even in the case where the gas pressure is relatively high and ions have many chances to collide with gas, it is possible to moderate the ions' slowdown and prevent the ions' delay and stop.

Abstract: A method and apparatus for performing a slice and view technique with a dual beam system. The feature of interest in an image of a sample is located by machine vision, and the area to be milled and imaged in a subsequent slice and view iteration is determined through analysis of data gathered by the machine vision at least in part. A determined milling area may be represented as a bounding box around a feature, which dimensions can be changed in accordance with the analysis step. The FIB is then adjusted accordingly to slice and mill a new face in the subsequent slice and view iteration, and the SEM images the new face. Because the present invention accurately locates the feature and determines an appropriate size of area to mill and image, efficiency is increased by preventing the unnecessary milling of substrate that does not contain the feature of interest.

Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like). In certain embodiments, the ion sources, systems and methods can enhance the ability to make tips having desired physical attributes (e.g., the number of atoms on the apex of the tip). This can enhance performance (e.g., increase reliability, stability and the like).

Abstract: In a spectral image formed by two orthogonal axes, one of which is an axis of the amount of energy loss and the other of which is an axis of positional information, by the use of an electron spectrometer and a transmission electron microscope, distortion in the spectral image of a sample to be analyzed is corrected with high efficiency and high accuracy by comparing electron beam positions calculated from a two-dimensional electron beam position image formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information) with reference electron beam positions, and calculating amounts of the distortion based on the differences of the electron beam positions. Method and apparatus are offered which correct distortion in a spectral image with high efficiency and high accuracy, the image being formed by the two orthogonal axes (the axis of the amount of energy loss and the axis of positional information).

Abstract: To obtain a SEM capable of both providing high resolution at low acceleration voltage and allowing high-speed elemental distribution measurement, a SE electron source including Zr—O as a diffusion source is shaped so that the radius r of curvature of the tip is more than 0.5 ?m and less than 1 ?m, and the cone angle ? of a conical portion at a portion in the vicinity of the tip at a distance of 3r to 8r from the tip, is more than 5° and less than (8/r)°. Another SE electron source uses Ba—O and includes a barium diffusion supply means composed of a sintered metal and a barium diffusion source containing barium oxide.

Abstract: A method of marking a target includes intersecting a thermal infrared beam from a handheld housing at room temperature with the target, a portion of a beam path extending from the housing to the target being substantially optically direct. The method also includes viewing the intersected beam with a remote thermal imaging device.

Abstract: A novel electron multiplier that regulates in real time the gain of downstream dynodes as the instrument receives input signals is introduced. In particular, the methods, electron multiplier structures, and coupled control circuits of the present invention enable a resultant on the fly control signal to be generated upon receiving a predetermined threshold detection signal so as to enable the voltage regulation of one or more downstream dynodes near the output of the device. Accordingly, such a novel design, as presented herein, prevents the dynodes near the output of the instrument from being exposed to deleterious current pulses that can accelerate the aging process of the dynode structures that are essential to the device.

Abstract: In one embodiment, a system includes a turbine including multiple components in fluid communication with a working fluid that provides power or thrust. The system also includes an imaging system in optical communication with at least one component. The imaging system is configured to receive a broad wavelength band image of the at least one component during operation of the turbine, to split the broad wavelength band image into multiple narrow wavelength band images, and to output a signal indicative of a two-dimensional intensity map of each narrow wavelength band image.

Abstract: An infrared imaging system including a substrate, a plurality of hexagonal shaped micro-bolometer pixels combined to define a focal plane array. Each pixel is electrically connected to the substrate with a pair of opposing isolation legs. One end of the isolation leg is attached to the pixel's periphery while the other is fixed to that substrate so that the focal plane array and a plane containing the substrate have a parallel, spaced-apart relationship. In this manner, the isolation legs provides an electrical communication path from each pixel to the substrate as each pixel undergoes an internal change in resistance due to absorption of infrared energy. At the same time, the legs separate the pixels from the substrate so that there is no heat transfer between the pixel and the substrate due to direct contact. The hexagonal shape arrangement also allows for a staggered arrangement of adjacent rows in the array, thereby increasing the fill factor for the focal plane array of the device.

Abstract: High sensitivity thermal detectors that perform beyond the blackbody radiation noise limit are described. Thermal detectors, as described herein, use spectrally selective materials that absorb strongly in the wavelength region of the desired signal but only weakly or not at all in the primary thermal emission band. Exemplary devices that can be made in accordance with the present invention include microbolometers containing semiconductors that absorb in the MWIR and/or THz range but not the LWIR.

Abstract: In one embodiment, a heterodyne detection system for detecting light includes a first input aperture adapted for receiving first light from a scene input, a second input aperture adapted for receiving second light from a local oscillator input, a broadband local oscillator adapted for providing the second light to the second input aperture, a dispersive element adapted for dispersing the first light and the second light, and a final condensing lens coupled to an infrared detector. The final condensing lens is adapted for concentrating incident light from a primary condensing lens onto the infrared detector, and the infrared detector is a square-law detector capable of sensing the frequency difference between the first light and the second light. More systems and methods for detecting light are described according to other embodiments.

Abstract: A solar sensor for the detection of the direction of incidence and the intensity of solar radiation comprises a housing (12) made of a plastic material that is permeable to at least some of the solar radiation, the housing (12) having a curved side (14) facing the incident solar radiation and the housing (12) optically acting as a lens and having an internal focal plane (26) defined by the lens characteristics thereof. At least two photosensors (16) are embedded in the plastic material of the housing (12), each photosensor (16) having a sensor area (18) sensitive to at least the part of the radiation to which the plastic material is permeable, and the sensor areas (18) of the photosensors (16) being arranged in a substantially common plane (19) located in front of or behind the focal plane (26), seen from side (14) facing the incident solar radiation.

Abstract: Example embodiments are directed to a method and an apparatus for measuring phase roughness in an extreme ultraviolet (EUV) mask. In example embodiments, a speckle generated by the phase roughness in the EUV mask is detected by irradiating an EUV beam on the EUV mask. The phase roughness in the EUV mask is calculated and measured using the speckle.

Abstract: When detecting scintillation events in a nuclear imaging system, time-stamping and energy-gating processing is incorporated into autonomous detection modules (ADM) (14) to reduce downstream processing. Each ADM (14) is removably coupled to a detector fixture (13), and comprises a scintillation crystal array (66) and associated light detect or (s) (64), such as a silicon photomultiplier or the like. The light detector(s) (64) is coupled to a processing module (62) in or on the ADM (14), which performs the energy gating and time-stamping.

Abstract: When detecting photons in a computed tomography (CT) detector, a sensor (10, 38) includes a photodiode that is switchable between liner and Geiger operation modes to increase sensing range. When signal to noise ratio (SNR) is high, a large bias voltage is applied to the photodiode (12) to charge it beyond its breakdown voltage, which makes it sensitive to single photons and causes it to operate in Geiger mode. When a photon is received at the photodiode (12), a readout transistor (18) senses the voltage drop across the photodiode (12) to detect the photon. Alternatively, when SNR is low, a low bias voltage is applied to the photodiode (12) to cause it to operate in linear mode.

Abstract: A method and system for reducing scintillator afterglow. Methods for reducing afterglow include conditioning a scintillator by exposing it to high flux densities of ionizing radiation. One technique includes operating an x-ray tube at elevated amperage.

Abstract: In order to provide a particle radiotherapy apparatus with high sensitivity for detecting annihilation radiation pairs, an elliptic detector ring of a particle radiotherapy apparatus according to this invention makes rotating movement relative to a top board. Specifically, with rotation about a base axis of a first ring and a second ring, the elliptic detector ring makes rotating movement in a state of being tilted relative to the first ring. Incidentally, the elliptic detector ring cannot be disposed in a position to interfere with travel of this particle beam. According to the construction of this invention, the elliptic detector ring is tilted relative to the top board, and besides makes rotating movement relative to the top board. Since the elliptic detector ring can be moved away from the particle beam by rotating the elliptic detector ring, it is possible to provide the particle radiotherapy apparatus which can detect annihilation radiation while emitting the particle beam.

Abstract: The application describes an X-ray detector for use in a medical equipment, wherein the detector comprises an unit for transforming X-ray radiation into electrical charge, a first capacitor for being charged by an electrical charge, wherein the first capacitor is electrically connected to the unit for transforming, a second capacitor for being charged by an electrical charge, and a first gain switching gate, wherein the second capacitor is electrically connected with the unit for transforming if the first gain switching gate is in on-state, wherein the detector is adapted to switch on the first gain switching gate for short periods. Further the application describes an X-ray system comprising a detector according to the invention, wherein the system is adapted for gain selection, wherein the detector is adapted to switch on the first gain switching gate for short periods.

Abstract: Example embodiments are directed an X-ray detector including an oxide semiconductor transistor. The X-ray detector including the oxide semiconductor transistor includes an oxide semiconductor transistor and a signal storage capacitor in parallel to each other on a substrate. The oxide semiconductor transistor includes a channel formed of an oxide semiconductor material, and a photoconductor. A pixel electrode and a common electrode are formed on opposite surfaces of the photoconductor. The channel includes ZnO, or a compound including ZnO and at least one selected from a group consisting of gallium (Ga), indium (In), hafnium (Hf), and tin (Sn).

Abstract: To provide a radiation imaging apparatus capable of restraining the change of image qualities due to the change of sensitivities of an MIS-type photoelectric conversion element and its control method. Therefore, an MIS-type photoelectric conversion element 217 is set to a saturation state before performing radiation imaging. As means for realizing the above mentioned, a light source 601, power supply 603 for making the light source 601 emit light, and switch 605 are provided. The light source 601 can use a light source capable of discharging the light having a wavelength which can be detected by a photoelectric conversion layer 209 at optional timing. For example, it is possible to use a light source in which a plurality of LEDs or cold cathode ray tubes are arranged, a light guide plate is combined with an LED or cold cathode ray tube, or an EL device.

Abstract: A flame sensor is provided with a focusing member. Ultraviolet light emitted from a tight source is reflected by an inner surface of the focusing member to be focused on an electrode of an electrode pair, to increase the sensitivity.

Abstract: A radiographic imaging system includes an imaging apparatus which takes a radiographic image of a subject and outputs image data of the radiographic image; an image processing apparatus which performs image processing of at least one of an exposure field recognition process and a trimming process on the image data of the radiographic image; an image processing information storage apparatus which stores the imaging conditions of the radiographic image and image processing information which indicates the image processing and its applicable range in an associated manner; and an image processing information search apparatus which searches for image processing information according to imaging conditions of current imaging, among the image processing information of past imaging stored.

Abstract: On control charge information, which is obtained from an on-controlled detection element, is acquired with respect to each of the detection elements of a radiation detector, and off control charge information, which corresponds to the on-controlled detection element, is acquired with respect to each of predetermined detection element intervals. Element interpolated off control charge information representing the off control charge information having not been acquired is formed by performing an interpolating operation in accordance with the off control charge information having been acquired with respect to each of the predetermined detection element intervals. The on control charge information is corrected with the corresponding off control charge information or the corresponding element interpolated off control charge information.

Abstract: When the IMRT technology for a radiation therapy system utilizing an X-ray or the like is applied as it is to a particle beam therapy system having a conventional wobbler system, there is posed the problem that it is required to utilize two or more boluses. The objective of the present invention is to solve the problem of excess irradiation in IMRT by a particle beam therapy system. More specifically, the problem of excess irradiation in IMRT by a particle beam therapy system is solved by raising the irradiation flexibility in the depth direction, without utilizing a bolus.

Abstract: The objective is to eliminate the effect of the hysteresis of a scanning electromagnet so that, in the raster scanning or the hybrid scanning, there is obtained a particle beam irradiation apparatus that realizes high-accuracy beam irradiation.

Abstract: An RF ion source utilizing a heating/RF-shielding element for controlling the temperature of an RF window and to act as an RF shielding element for the RF ion source. When the heating/RF shielding element is in a heating mode, it suppresses formation of unwanted deposits on the RF window which negatively impacts the transfer of RF energy from an RF antenna to a plasma chamber. When the heating/RF-shielding element is in a shielding mode, it provides an electrostatic shielding for the RF ion source.

Abstract: An ion source is provided that utilizes a cooling plate and a gap interface to control the temperature of an ion source chamber. The gap interface is defined between the cooling plate and a wall of the chamber. A coolant gas is supplied to the interface at a given pressure where the pressure determines thermal conductivity from the cooling plate to the chamber to control the temperature of the interior of the chamber.

Abstract: An ion source is provided that utilizes the same dopant gas supplied to the chamber to generate the desired process plasma to also provide temperature control of the chamber walls during high throughput operations. The ion source includes a chamber having a wall that defines an interior surface. A liner is disposed within the chamber and has at least one orifice to supply the dopant gas to an inside of the chamber. A gap is defined between at least a portion of the interior surface of the chamber wall and the liner. A first conduit is configured to supply dopant gas to the gap where the dopant gas has a flow rate within the gap. A second conduit is configured to remove the dopant gas from the gap, wherein the flow rate of the dopant gas within the gap acts as a heat transfer media to regulate the temperature of the interior of the chamber.

Abstract: Excitation light beam is irradiated onto a test region while shifting the irradiation position thereof, when performing analysis of a target substance using an analysis chip having the test region within a flow channel through which a sample solution is caused to flow, for capturing the target substance within the sample solution. Fluorescence generated at the test region is detected as a plurality of adjustment fluorescence signals. The target substance is analyzed using fluorescence generated when the excitation light beam is irradiated at an irradiation position within the test region determined based on the plurality of adjustment fluorescence signals.

Abstract: There is described a fluid treatment system which may which may be used with radiation sources that do not require a protective sleeve—e.g., excimer radiation sources. An advantage of the present fluid system treatment is that the radiation sources may be removed from the fluid treatment zone without necessarily having to shut down the fluid treatment system, remove the fluid, break the seals which retain fluid tightness, replace/service radiation source and than reverse the steps. Instead, the present fluid treatment system allows for service/replacement of the radiation sources in the fluid treatment zone during operation of the fluid treatment system.

Abstract: The present disclosure significantly reduces the waiting time from inserting a specimen holder into an electron microscope until high quality data acquisition is possible. Characterizing the present disclosure, it is a specimen holder partly made of low thermal expansion material. The low thermal expansion material can be any of group 4, 5 or 6 in the periodic table of the elements.

Abstract: A system and method for sterilization of medical devices includes methods for reducing the variance in dose levels over the medical device by either varying the dose levels for each pass before a radiation source, such as an electron beam, or by increasing the number of passes before a radiation source.

Abstract: Introducing ultraviolet (UV) light to alter the environment inside a shoe or other footwear destroys microorganisms or inhibits their growth. Visible light can also be used to prevent further growth. Introducing forced air flow through the footwear removes dampness in and thereby deodorizes the footwear. A preferred embodiment comprises an adjustable shoe tree equipped with a UV germicidal light source and electronic safeguards that prevent appreciable leakage of UV radiation outside the shoe.

Abstract: An optical tomographic measuring device that includes: an illuminating component, a plurality of light-receiving components, a storage component, a specifying component, an acquiring component, and a constructing component is provided. The specifying component specifies a position of the measurement plane in the body length direction. The acquiring component acquires, from the storage component, an optical characteristic distribution that corresponds to the position specified by the specifying component. The constructing component constructs a density distribution of fluorescence in the measurement plane, on the basis of intensities of the fluorescence received at the respective light-receiving components and the optical characteristic distribution acquired by the acquiring component.

Abstract: An improved solid-state light source (103) for producing illuminating light (114) generated by interaction of light from an LED source (105) with a quantum dot, in one embodiment located in a well (117). A solid-state illuminator with integrated quantum dots advantageously allows for an efficient broadband or narrow band LED to be produced in a variety of specified colors and color temperatures, and allows for a more compact, less heat producing, and more energy efficient manufacturable illumination device, and further facilitates integration of the illuminator and detector into medical, industrial, and laboratory illuminators, microchips, or lab-on-chip devices or systems. Methods of use are also disclosed.

Abstract: Embodiments provide an optical sensor head and method of making an optical sensor head. In some cases the sensor head can be used as a fluorometric sensor to measure concentrations of substances within a liquid sample of interest. The sensor head includes a light source window and a detector window that transmit light between the sensor head and an analytical area. In some cases the windows include a ball lens positioned within a channel such that the ball lens and the channel create a seal between the interior and exterior of the sensor head.

Abstract: Embodiments provide a handheld fluorometer and method of determining a concentration of a product within a sample. In some cases the handheld fluorometer includes an immersible sensor head that measures a fluorescence of the product and a controller that calculates the concentration of product. In some cases the handheld fluorometer includes a handheld controller module, an immersible sensor head connected to the controller module, a sample cup for containing a water sample, and a fastener that removably fastens the sample cup about the immersible sensor head. In some cases the sensor head is angled with respect to the controller module and the fluorometer provides a substantially stable base. The sample cup can be removed to acquire a sample of water containing the product and then refastened about the sensor head for determining the concentration.

Abstract: A method for testing the sensitivity of electronic components and circuits against particle and photon beams using plasma acceleration, in which the flexibility of the multifaceted interaction can produce several types of radiation such as electron, proton, ion, neutron and photon radiation, and combinations of these types of radiation, in a wide range of parameters that are relevant to the use of electronic components in space, such as satellites, at high altitudes or in facilities that work with radioactive substances such as nuclear power plants. Relevant radiation parameter ranges are accessible by this method, which are hardly accessible with conventional accelerator technology. Because of the compactness of the procedure and its versatility, radiation testing can be performed in smaller laboratories at relatively low cost.

Abstract: A method is provided for reducing particle contamination in an ion implantation system, wherein an ion implantation system having source, mass analyzer, resolving aperture, decel suppression plate, and end station is provided. An ion beam is formed via the ion source, and a workpiece is transferred between an external environment and the end station for ion implantation thereto. A decel suppression voltage applied to the decel suppression plate is modulated concurrent with the workpiece transfer, therein causing the ion beam to expand and contract, wherein one or more surfaces of the resolving aperture and/or one or more components downstream of the resolving aperture are impacted by the ion beam, therein mitigating subsequent contamination of workpieces from previously deposited material residing on the one or more surfaces. The contamination can be mitigated by removing the previously deposited material or strongly adhering the previously deposited material to the one or more surfaces.

Abstract: An apparatus includes a light source having a gain medium for producing an amplified light beam of a source wavelength along a beam path to irradiate a target material in a chamber and to generate extreme ultraviolet light; and a subsystem overlying at least a portion of an internal surface of the chamber and configured to reduce a flow of light at the source wavelength from the internal surface back along the beam path.

Abstract: A positioner operating mode identifying function and an use parameter selecting function are provided in a calculating unit. A positive operating parameter and a negative operating parameter are stored in a storing portion. The positioner operating mode identifying function identifies the operating mode of a positioner or from the direction of change of a control output and the direction of change of an amplified pneumatic pressure signal Pout, and the identification result is set automatically as the current operating mode of the positioner. In accordance with the current operating mode identified for the positioner, the use parameter selecting function selects, as the use parameter from the storing portion, the positive operating parameter if the positive operating mode, and the negative operating parameter if the negative operating mode, and sets the selected use parameter automatically.

Abstract: An electromagnetic actuating device (1) having a housing (2) and two actuator pins (3, 4) that are supported in the housing so as to be movable independently of each other between a retracted rest position and an extended working position, and locking pins (7, 8) that hold the actuator pins in the rest position via locking mechanisms and that can be moved relative to the actuator pins in the movement direction of the actuator pins. A force is applied to the locking pins in the extension direction by further spring elements (15), and the locking pins are moved in the retraction direction by electromagnetic force application in order to unlock the locking mechanisms. The actuating device is an electromagnet (22) associated with the locking pins in common and having a reversible direction of the magnetic field, and the end sections (19) of the locking pins facing away from the actuator pins are provided with bipolar permanent magnets (20, 21) that are oriented with opposite polarities in the movement direction.

Abstract: A synchronous motor and a valve having a valve actuator and valve assembly is provided. The valve actuator includes the synchronous motor. The synchronous motor utilizes a magnetic coil, a stator and a rotor to generate rotational movement to drive the valve member for the valve assembly. The valve has a normal state in which the valve is maintained when power is not supplied to the motor. The valve has a non-normal actuated state when power is supplied to the motor. The motor is stalled in the non-normal state to maintain the valve in that state. The rotor includes a rotor shaft that passes through a magnetic hub of the stator. The rotor shaft is supported by a plurality of plastic and/or nylon bearings to prevent corrosion therebetween when the rotor shaft and bearings remain in a substantially fixed orientation for an extended period of time.

Abstract: A solenoid spool valve includes a sleeve, a spool, and a feed-back chamber. The sleeve has an input port and an output port. The input port receives fluid, and the output port is communicated with a control target chamber. The spool is received within the sleeve displaceably along a longitudinal axis of the sleeve to control a communication state of the input port and the output port. The feed-back chamber is communicated with the output port. The feed-back chamber applies pressure of output fluid to the spool in a valve closing direction for closing the solenoid spool valve. The sleeve has a feed-back passage opening at a passage between the output port and the control target chamber. The feed-back passage provides communication between the output port and the feed-back chamber.

Abstract: A solenoid spool valve includes a sleeve and a spool. The spool is received within the sleeve displaceably along a longitudinal axis to control a communication state of an input port, an output port, and a drain port of the sleeve. The sleeve includes an inner sleeve and an outer sleeve. The outer sleeve is fluid-tightly fitted with an outer peripheral surface of the inner sleeve. A feed-back chamber is defined at one axial end of the spool along the longitudinal axis, the feed-back chamber being communicated with the output port such that pressure of fluid in the output port is applied, as feed-back pressure, to the one axial end of the spool.