Abstract: Under one aspect, a nonplanar photovoltaic module having a length includes: (a) an elongated nonplanar substrate; and (b) a plurality of solar cells disposed on the elongated nonplanar substrate, wherein each solar cell in the plurality of solar cells is defined by (i) a plurality of grooves around the nonplanar photovoltaic module and (ii) a groove along the length of the photovoltaic module. In some embodiments, each groove of the plurality of grooves about the photovoltaic module, independently, has a repeating pattern, a non-repeating pattern, or is helical. In some embodiments, the module further includes a patterned conductor providing serial electrical communication between adjacent solar cells. In some embodiments, portions of the patterned conductor providing serial electrical communication between adjacent solar cells are within a groove of the plurality of grooves about the photovoltaic module.

Abstract: The present invention relates to a photovoltaic module comprising a front-side glass cover, a back-side cover and a number of interconnected solar cells. The solar cells are arranged in an embedding layer between the front-side and the back-side cover.

Abstract: The fabrication and characterization of large scale inverted organic solar array fabricated using all-spray process is disclosed. Solar illumination has been demonstrated to improve transparent solar photovoltaic devices. The technology using SAM has potential to revolute current silicon-based photovoltaic technology by providing a complete solution processable manufacturing process. The semi-transparent property of the solar module allows for applications on windows and windshields. The inventive modules are more efficient than silicon solar cells in artificial light environments. This significantly expands their use in indoor applications. Additionally, these modules can be integrated into soft fabric substances such as tents, military back-packs or combat uniforms, providing a highly portable renewable power supply for deployed military forces.

Abstract: The present invention relates to an educational solar cell module. According to the present invention, the electrodes of the solar cells can be easily and removably connected to each other in series or in parallel, and the variations in voltage and current according to the number of connected solar cells can be easily observed to thereby increase interest in solar energy. The educational solar cell module includes: a plurality of frames; a solar cell panel joined to the top surface of the frames; and a frame coupling member disposed on the frames to couple neighboring frames to each other so that the frames can be continuously joined and arrayed.

Abstract: The present invention provides a transparent conductive film which is low in terms of surface resistivity and high in terms of transparency. The transparent conductive film according to the present invention includes an adhesive conductive layer in openings of a conductive metal mesh layer provided on at least one surface of a transparent base material, wherein the conductive layer is composed of a conductive adhesive composition containing (A) a water-soluble vinyl polymer, (B) an organic additive, and (C) a conductive organic polymer compound, the organic additive (B) is at least one member selected among water-soluble polyhydric alcohols, water-soluble pyrrolidones, and hydrophilic aprotic solvents, and the conductive organic polymer compound (C) is at least one member selected among polyanilines, polypyrroles, polythiophenes, and derivatives thereof.

Abstract: A multi-layered film, a backsheet for photovoltaic modules, a method of manufacturing the same, and a photovoltaic module are provided. The multi-layered film can be configured so that a resin layer including a fluorine-based polymer and an oxazoline group-containing polymer is formed on a substrate. As a result, the resin layer including the fluorine-based polymer can have excellent durability and weather resistance, and show high interfacial adhesive strength to the substrate. During the preparation of the multi-layered film, a drying process can also be performed at a relatively low temperature, so that the manufacturing costs can be reduced and the quality of the product can be prevented from being deteriorated by thermal deformation or thermal shock. The multi-layered film may be effectively used as the backsheet in a variety of photovoltaic modules.

Abstract: A back contact configuration for a CIGS-type photovoltaic device is provided. The back contact configuration includes an interfacial seed layer, made up of one or more layers/sublayers, disposed between a Mo based rear contact/electrode and a CIGS inclusive semiconductor absorber. The interfacial seed layer may be of or include one or more element(s) that make up, or help make up, the CIGS inclusive semiconductor absorber. Various methods and compositions of the interfacial seed layer are disclosed, including a seed layer comprising metallic and/or substantially metallic Cu—In—Ga, CIGS, and/or a stack of alternating layers of or including Cu, In and Ga. Methods for making the back contact configuration, including an interfacial seed layer, are also provided.

Abstract: A material is manufactured from a transformative process of heating a structure comprising a transparent conductive oxide disposed over a semiconductor material. The heating process causes a p-type dopant from the semiconductor material diffuses into the transparent conductive oxide, and causes the semiconductor material to transform into an intrinsic semiconductor layer over a bulk layer. The material manufactured exhibits photovoltaic properties because the layers formed during the transformative process create a p-i-n or a p-n junction having a band-gap difference between the top layer and the bulk layer.

Abstract: A method of forming a solar cell 100 having three dimensional junctions 116 created between a conductive substrate 102 having a first conductivity and a conductive layer 120 having an opposite second conductivity comprising the steps of applying the conductive layer 120 on a top surface 104 of the conductive substrate 102, exposing selective portions of the conductive layer 102 to laser radiations 124 having a wavelength ranging up to 10.6 ?m. Due to this laser application, the conductive layer 102 diffuses across a thickness of the conductive substrate 102 in the form of a plurality of channels 126. The plurality of channels 126 being formed in spaced apart relationship with each other. Thereafter, metal contacts are thermosetted on a bottom surface 114 of the conductive substrate 102 for electrically connecting exposed ends 136 of the plurality of channels 126.

Abstract: Composite materials useful for devices such as photoelectrochemical solar cells include a substrate, a metal oxide film on the substrate, nanocrystalline quantum dots (NQDs) of lead sulfide, lead selenide, and lead telluride, and linkers that attach the NQDs to the metal oxide film. Suitable linkers preserve the 1s absorption peak of the NQDs. A suitable linker has a general structure A-B-C where A is a chemical group adapted for binding to a MOx and C is a chemical group adapted for binding to a NQD and B is a divalent, rigid, or semi-rigid organic spacer moiety. Other linkers that preserve the 1s absorption peak may also be used.

Abstract: The present invention is directed to an electroconductive thick film paste composition comprising electrically conductive Ag, a second electrically conductive metal selected from the group consisting of Ni, Al and mixtures thereof and a Pb-free bismuth-tellurium-oxide all dispersed in an organic medium. The present invention is further directed to an electrode formed from the thick film paste composition and a semiconductor device and, in particular, a solar cell comprising such an electrode.

Abstract: A photovoltaic device (e.g., solar cell) includes: a front substrate (e.g., glass substrate); a semiconductor absorber film; a back contact including a first conductive layer of or including copper (Cu) and a second conductive layer of or including molybdenum (Mo); and a rear substrate (e.g., glass substrate). The first conductive layer of or including copper is located between at least the rear substrate and the second conductive layer of or including molybdenum, and wherein the semiconductor absorber film is located between at least the back contact and the front substrate.

Abstract: A back contact configuration for a CIGS-type photovoltaic device is provided. According to certain examples, the back contact configuration includes an optical matching layer and/or portion of or including MoSe2 having a thickness substantially corresponding to maxima of absorption of reflected light in CIGS-type absorbers used in certain photovoltaic devices. Certain example methods for making the back contact configuration wherein a thickness of the MoSe2 layer and/or portion can be controlled to be within thickness ranges that correspond to maxima of CIGS light absorption for reflected solar light are also provided.

Abstract: A photovoltaic device (e.g., solar cell) includes: a front substrate (e.g., glass substrate); a semiconductor absorber film; a back contact including a first conductive layer of or including an alloy of molybdenum (Mo) and copper (Cu) and optionally a second conductive layer of or including either molybdenum (Mo) or Cu; and a rear substrate (e.g., glass substrate). The first conductive layer of or including molybdenum and copper is located between at least the rear substrate and a semiconductor absorber film that is located between at least the back contact and the front substrate.

Abstract: Solar cells including low recombination velocity electrical contacts and systems and methods of forming the same. The solar cells include a cell body that defines a front side and an opposed back side. The solar cells further include a front side electrical contact that forms an electrical connection with the front side of the cell body, a back side electrical contact that forms an electrical connection with the back side of the cell body, and at least one intermediate layer that includes an electrically insulating layer and is situated between the cell body and the front side electrical contact and/or the back side electrical contact.

Abstract: A three-dimensional solar cell comprising a semiconductor substrate with an inverted pyramidal cavity, emitter metallization regions on ridges on the surface of the semiconductor substrate which define an opening of the inverted pyramidal cavity, and base metallization regions on a region which form the apex of the inverted pyramidal cavity. A method for fabricating a three-dimensional thin-film solar cell from an inverted pyramidal three-dimensional thin-film silicon substrate by doping ridges on the surface of the semiconductor substrate which define an opening of an inverted pyramidal cavity on the substrate to form an emitter region, and doping a region which forms the apex of the inverted pyramidal cavity to form a base region. Adding a surface passivation layer to the surface of the substrate. Selectively etching the passivation layer from the emitter region and base region. Then concurrently metallizing the emitter region and base region.

Abstract: A lead-free conductive paste composition contains a source of an electrically conductive metal, a fusible material, an optional additive, and an organic vehicle. An article such as a high-efficiency photovoltaic cell is formed by a process of deposition of the lead-free paste composition on a semiconductor substrate (e.g., by screen printing) and firing the paste to remove the organic vehicle and sinter the metal and fusible material.

Abstract: A dye-sensitized solar cell with internal microlens array includes an anodic electrode, a cathodic counter-electrode, and an electrolyte. The anodic electrode includes a porous nano-structured active metal oxide layer having a sensitizer dye adsorbed thereon. In one embodiment, a microlens array comprising a plurality of microlens elements is disposed between the electrodes, and preferably between a transparent substrate of the anodic electrode and active metal oxide layer for dispersing light incident on the substrate to the active oxide layer. In some embodiments, the microlens elements may be convex or concave in configuration. The microlens array improves solar conversion efficiency of the solar cell. A method for forming a microlens array is further provided.

Abstract: A method is disclosed for making semiconductor films from a eutectic alloy comprising a metal and a semiconductor. Through heterogeneous nucleation said film is deposited at a deposition temperature on relatively inexpensive buffered substrates, such as glass. Specifically said film is vapor deposited at a fixed temperature in said deposition temperature where said deposition temperature is above a eutectic temperature of said eutectic alloy and below a temperature at which the substrate softens. Such films could have widespread application in photovoltaic and display technologies.

Abstract: A solar cell and a method for manufacturing the same are disclosed. The solar cell includes a substrate, an emitter region positioned at one surface of the substrate, a first insulating layer including a lower layer positioned on the emitter region and an upper layer positioned on the lower layer, and a first electrode which is formed of a first conductive paste and is electrically connected to the emitter region. The first insulating layer includes a plurality of first contact holes, and a portion of the first electrode is filled in the plurality of first contact holes.

Abstract: A back electrode type solar cell in which a no-electrode-formed region where no electrode is placed is provided in a part of a peripheral portion of a back surface of the back electrode type solar cell such that a line connecting end portions of a plurality of electrodes to one another includes a partially inwardly recessed region and the no-electrode-formed region is located adjacent to each of an electrode for n-type and an electrode for p-type adjacent to each other, a solar cell module, a method of manufacturing a back electrode type solar cell with interconnection sheet, and a method of manufacturing a solar cell module are provided.

Abstract: There is provided a novel material used for solar cells that can contribute to the improvement in maximum output of solar cells without using the conventional MPPT system. A film-forming material for forming a light-collecting film on a transparent electrode of a solar cell, including an aromatic group-containing organic polymer compound (A) and a cross-linker (B), wherein the film-forming material exhibits an index of refraction of 1.5 to 2.0 at a wavelength of 633 nm and a transmittance of 95% or more with respect to light having a wavelength of 400 nm, and a solar cell obtained by coating a cured film made from the film-forming material on a surface of a transparent electrode.

Abstract: There is provided a novel material used for solar cells that can contribute to the improvement in maximum output of solar cells. A film-forming material for forming a light-collecting film on a transparent electrode of a solar cell, including an aromatic group-containing organic polymer compound (A), wherein the film-forming material exhibits an index of refraction of 1.5 to 2.0 at a wavelength of 633 nm and a transmittance of 95% or more with respect to light having a wavelength of 400 nm, and a solar cell obtained by coating a cured film made from the film-forming material on a surface of a transparent electrode.

Abstract: Provided is a method for manufacturing a solar cell element that can increase the film thickness for collector electrodes formed in a screen printing process and reduce the resistance value of the same as well as contribute to improvements in conversion efficiency. When a collector electrode for a solar cell element is formed by screen printing of a conductive paste, that screen-printing process is repeated a plurality of times. At this time, the squeegee speed during the second or later screen printing is faster than the squeegee speed during the first screen printing. The second and later screen printing is superimposed on the collector electrode printed the first time; therefore, the faster the squeegee speed is, the better the plate release is for the paste and foundation. The amount of paste applied increases, and the film for the collector electrode that is formed becomes thicker.

Abstract: Described herein are solar modules including spectral concentrators. In one embodiment, a solar module includes a set of photovoltaic cells and a spectral concentrator optically coupled to the set of photovoltaic cells. The spectral concentrator is configured to: (1) collect incident solar radiation; (2) convert the incident solar radiation into substantially monochromatic, emitted radiation; and (3) convey the substantially monochromatic, emitted radiation to the set of photovoltaic cells.

Abstract: This invention is related to novel perylene diester derivatives represented by the general formula (I) or general formula (II) as described herein. The derivatives are useful in various applications, such as luminescent dyes for optical light collection systems, fluorescence-based solar collectors, fluorescence-activated displays, and/or single-molecule spectroscopy. The invention also relates to a luminescent medium, such as a luminescent film, that can significantly enhance the solar harvesting efficiency of thin film CdS/CdTe or CIGS solar cells. The luminescent medium comprises an optically transparent polymer matrix and at least one luminescent dye that comprises a perylene diester derivative. Over 16% of an efficiency enhancement to a CdS/CdTe solar cell and over 12% of an efficiency enhancement to a CIGS solar cell can be achieved.

Abstract: An electronic device 1 includes a first glass substrate 2, a second glass substrate 3, and an electronic element part 4 provided between these glass substrates 2, 3. The electronic element part 4 provided between the first and second glass substrates 2, 3 is sealed with a sealing layer 9 made up of a molten fixed layer of a sealing glass material having an electromagnetic wave absorption ability. At least one of the first and second glass substrates 2, 3 is made up of a chemically tempered glass having a surface compressive stress value of 900 MPa or less.

Abstract: The invention relates to a flexible electrical generator comprising at least one photovoltaic device and a flexible support, wherein said photovoltaic device is attached to the flexible support and wherein the flexible support comprises a fabric comprising high-strength polymeric fibers, said flexible support comprising also a plastomer wherein said plastomer is a semi-crystalline copolymer of ethylene or propylene and one or more C2 to C12 ?-olefin co-monomers and wherein said plastomer having a density as measured according to ISO1183 of between 860 and 930 kg/m3.

Abstract: A self-assembly nano-composite solar cell comprises a substrate, a first electrode layer, a composite absorption layer and a second electrode layer. The first electrode layer is formed on the substrate. The composite absorption layer is formed over the first electrode layer and includes a plurality of vertical nano-pillars, a plurality of gaps each formed between any two adjacent nano-pillars, and a plurality of bismuth sulfide nano-particles filled into the gaps and attached to the nano-pillars. The second electrode layer is formed over the composite absorption layer. Through etching and soaking in solutions, the composite absorption layer with nano-pillars and bismuth sulfide nano-particles is fabricated to form a self-assembly nano-composite solar cell having high power conversion efficiency.

Abstract: Improved silicon solar cells, silicon image sensors and like photosensitive devices are made to include strained silicon at or sufficiently near the junctions or other active regions of the devices to provide increased sensitivity to longer wavelength light. Strained silicon has a lower band gap than conventional silicon. One method of making a solar cell that contains tensile strained silicon etches a set of parallel trenches into a silicon wafer and induces tensile strain in the silicon fins between the trenches. The method may induce tensile strain in the silicon fins by filling the trenches with compressively strained silicon nitride or silicon oxide. A deposited layer of compressively strained silicon nitride adheres to the walls of the trenches and generates biaxial tensile strain in the plane of adjacent silicon fins.

Abstract: A compound semiconductor thin film solar cell is provided, which includes a light-absorbing layer made of a compound semiconductor and a buffer layer formed on the light-absorbing layer. The buffer layer is formed with use of an ink containing nanoparticles each containing at least a metal element and an element of Group 16.

Abstract: A system having improved trapping force for acoustophoresis is described where the trapping force is improved by manipulation of the frequency of the ultrasonic transducer. The transducer includes a ceramic crystal. The crystal may be directly exposed to fluid flow. The crystal may be air backed, resulting in a higher Q factor.

Abstract: For eliminating turbulence in a wall bounded flow a section of the flow-bounding wall is moved in the direction of the flow over the flow-bounding wall.

Abstract: A method for actively manipulating a primary fluid flow over a surface using an active flow control system including an active fluid flow device to provide lift enhancement and lift destruction. The method including the disposing of an active fluid flow device in the surface. The active fluid flow device is then operated to generate at least one of a steady blowing secondary fluid flow, a pulsed secondary fluid flow or an oscillating secondary fluid flow. While flowing the primary fluid over the surface to create a primary flow field, a secondary fluid flow is injected in an upstream direction and substantially opposed to the incoming primary fluid flow. The injecting of the secondary fluid flow in this manner provides for influencing of the primary flow field by manipulating a momentum of the secondary fluid flow to influence the incoming primary fluid flow and resultant lift.

Abstract: A system includes a fluid controller coupled to an inflatable bladder and configured to add fluid to and remove fluid from the inflatable bladder, a control unit configured to provide information used by the fluid controller to adjust the pressurization of the inflatable bladder, the control unit including a user interface configured to display a plurality of indicia corresponding to a range of pressure levels in which the inflatable bladder is employed by a user, where each of the plurality of indicia is associated with a different level of pressure of the inflatable bladder, respectively. In one embodiment, the fluid controller is configured to adjust the pressurization, in response to a user input at the user interface, to a pressure level selected by the user based on a current pressure level of the inflatable bladder, the pressure level selected by the user and an operating time of the fluid controller.

Abstract: A valve assembly suitable for use as an inlet metering valve of a fuel injection system comprises an inlet opening, an outlet aperture, and a valve element arranged to control fluid flow between the inlet opening and the outlet aperture. The valve element is moveable in response to an applied control signal to a closed position and to a fully-open position, and is biased to return to a rest position when the control signal is absent. When the valve element is in the rest position, fluid flow between the inlet opening and the outlet aperture is permitted at a relatively low rate. When the valve element is in the closed position, fluid flow between the inlet opening and the outlet aperture is substantially prevented. When the valve element is in the fully-open position, fluid flow between the inlet opening and the outlet aperture is permitted at a relatively high rate.

Abstract: An actuator mounting system is provided. The actuator mounting system includes a flow body and an actuator configured to be coupled to the flow body. The flow body includes a plurality of mounting points and the actuator is configured to be coupled to the flow body in a plurality of predetermined positions via the plurality of mounting points.

Abstract: An apparatus (100) for recovering and depurating a cooling fluid that comprises at least one passage duct (12, 16), in particular two passage ducts (12, 16) of cooling fluid that extend entering or exiting the apparatus (100). Each passage duct (12, 16) has a distal end (13, 17) arranged to be connected to a high and/or low pressure connection (23, 27) of respective of high and low pressure lines (22, 26) of a refrigeration circuit (50) and a proximal end (14, 18) arranged to be connected to a coolant inlet/outlet fitting (32, 34) of the apparatus (100). The apparatus (100) also comprises a coolant recovery and depuration pathway (60), and a collection container (80) of accumulated cooling fluid that receives depurated cooling fluid from the recovery and depuration pathway (60).

Abstract: A chemical tank adapter for connecting a chemical injection pump system to a chemical tank is disclosed herein. The disclosed adapter generally comprises a novel connection member including a body, a first arm extending perpendicularly from a rear face of said body, and a second arm extending obliquely from a bottom face of said body. The disclosed adapter may further include one or more valves and an elbow member.

Abstract: A missile comprises a propulsion system, a passageway for delivering air to the propulsion system and a ducting element associated with the passageway. The ducting element has a ducting surface for ducting air into the passageway, and the ducting element is rotatable, about an axis that is aligned, or more preferably co-axial, with the axis of the passageway, from a stowed position in which the ducting surface is received in the passageway, to a deployed position in which the ducting surface protrudes from the passageway to duct air into the passageway.

Abstract: In a hydrant assembly, the combination comprising an outer tubular member having a first flow port.; an inner tubular member having a closure thereon to close the port in relatively axially advanced position of the closure, and to open the port in relatively axially retracted position of the closure that allows fluid flow through the port to an outlet, control means to control relative movement of the inner and outer members. A second port may be located sidewardly of the outer tubular member to pass fluid in relatively retracted position of the closure to relieve fluid pressure in space formed between the inner and outer members, the inner member being elongated and extending lengthwise in the outer tubular member. The outer tubular member may consist of plastic material. Travel of the closure acts to allow expansion of fluid as it freezes, to relieve pressure build-up within the assembly.

Abstract: A tyre inflation feed arrangement for a tyre supported on a wheel carried by a wheel rim rotatably mounted via a wheel hub on an axially outer end of an axle housing. The feed arrangement has an annular support body surrounding the outer end of the axle housing, and three concentric annular seals extending around an axially outwardly facing surface on the support body to seal two concentric annular chambers formed in the axial!y outwardly facing surface between the seals. A first of these annular chambers is connectable with pressurised air to inflate the associated tyre and the second annular chamber is connectable with pressurised air to operate a valve mounted on the wheel for admitting air into the tyre from the first annular chamber or exhausting air from the tyre.

Abstract: An in-line water trap located in the line of the flow of waste through a generally straight line or bend is provided for. Typically, the water trap comprises a fluid conduit having a first end, a second end and a passage between the first and second ends; and a vessel having a closed end, an open end and a skirt between the closed and open ends, the lobed vessel further having an inner surface defining an inner volume and an outer surface, the inner surface attachingly engaging an outer wall of the fluid conduit in so doing defining a flow path between the passage, the inner volume of the lobed vessel and the outer surface of the lobed vessel, in use, a fluid level inside the inner volume of the lobed vessel being substantially in communication with the second end of the fluid conduit to form a fluid seal.

Abstract: A containment housing includes a hexagonal portion configured to receive a linear variable differential transformer. The containment housing also includes a housing contact flange adjacent to the hexagonal portion. The housing contact flange has a flange face. The containment housing further includes an external threaded portion formed between the flange face and a containment housing end. The external threaded portion is configured to engage a fuel control housing portion of a fuel control. A length is defined between the flange face and the containment housing end, and a ratio of the length to a width of the housing contact flange is between 8.22 and 8.94.

Abstract: A drinking simulator provides for testing of dental samples under three different condition sets simultaneously. A first tank provides chilled liquid to testing chambers at a first temperature range, a second tank provides heated liquid to testing chambers at a second temperature range and a third tank provides heated liquid to testing chambers at a third temperature range. Shower heads in each of the tanks are provided to shower dental samples with the provided liquid. A human machine interface allows for user control of multiple showering modes and liquid temperatures and additionally displays testing conditions to the user.

Abstract: A pressure control valve for reactive adhesives includes a valve housing with a liquid recirculation passage communicating with a conduit leading to a dispensing apparatus and an adhesive pump, a valve element mounted within the valve housing, and a biasing member for biasing the valve element towards a valve seat in the liquid passage. The pressure control valve also includes a flexible seal with a first end fixedly coupled to the valve element and a second end fixedly coupled to the valve housing. The flexible seal also includes an intermediate portion that flexes or deforms as the first end of the flexible seal follows movements of the valve element, thereby preventing liquid adhesive in the liquid recirculation passage from contacting the biasing member. The flexible seal may include an arch-shaped compression seal or a thin flexible annular membrane.

Abstract: A natural gas storage and transport system comprises a housing having a compressor and a natural gas storage vessel in fluid communication with the compressor. The housing can have one or more guide members for enabling the housing to be loaded onto and removed from a transport vehicle removably supporting the housing.

Abstract: Substrate supports for use in process chambers having limited physical space for configuring chamber components are disclosed. In some embodiments, a substrate support may include a body having a support surface; a utilities feed coupled to the body and comprising a second portion coupled to and extending laterally away from the body beyond a diameter of the body, and first portion coupled to the second portion and extending perpendicularly away from the body; and a cover plate movably disposable beneath and with respect to the body between a first position disposed completely beneath the body, and a second position wherein the cover plate is disposed over the first portion of the utilities feed and includes a first portion disposed beneath the body, and wherein the first portion has a curved edge having a radius equal to the distance from a central axis of the support surface to the curved edge.

Abstract: Provided is a substrate treating apparatus using a process gas and an adjustment plate used thereof. A substrate treating apparatus including a chamber providing a space in which a process is performed, a support member supporting a substrate in the chamber, a gas supply member supplying a process gas onto the substrate disposed on the support member, and an exhaust assembly coupled to the chamber to exhaust a gas in the chamber, wherein the exhaust assembly includes an exhaust pipe connected to the chamber, an exhaust member connected to the exhaust pipe to provide a vacuum pressure in the exhaust pipe, a valve adjusting an opening rate of the exhaust pipe, and an adjustment plate having a cover plate which is provided in the chamber to interfere with a flow of the process gas in an internal region of the chamber in a direction corresponding to, when the exhaust pipe is partially opened, an opened region of the exhaust pipe. Consequently, the process gas may be uniformly supplied onto the substrate.

Abstract: A device is described for controlling a hydraulic accumulator of a hydraulic system, for example a vehicle transmission, having a valve device which may connect and disconnect an accumulator-side port of the device to and from a system-side port, the valve device including at least one first check valve which is situated hydraulically between the accumulator-side port and the system-side port, and which is blocking in the direction of the system-side port, the valve device also including an electrically actuated control valve which is situated between a control port of the first check valve and the accumulator-side port in such a way that the control valve may hydraulically unblock the first check valve, using the pressure prevailing at the accumulator-side port.