Abstract: A simple antenna is connected to the RF input port on a conventional digital TV to receive video content from a plurality of video content sources wirelessly. The wireless RF transmission by a local transmitter has a range generally limited to within a home or room. The low power RF transmission is on a carrier frequency that is legally authorized by the FCC in frequency and power level. To identify the open channels for the RF transmission, a tuner scans for weak channels, and the transmitter is tuned to transmit on the detected weak channels.

Abstract: A broadcast receiving apparatus to minimize standby power and a method thereof. The broadcast receiving apparatus includes a sensor to detect variation in an inputted alternating current (AC) voltage and outputting a direct current (DC) voltage corresponding to the detection result, and a controller to detect variation in currents based on a digital voltage corresponding to the DC voltage and to determine the on/off state of an external apparatus, connected to the broadcast receiving apparatus, according to the detection result of the controller. Therefore, it is possible to determine whether the external apparatus is switched on or off according to a variation in power supplied to the external apparatus, to cut off a power supplied to the external apparatus based on the determination result, and to selectively control a power supplied to components of the broadcast receiving apparatus based on power saving data.

Abstract: Laser projection system suitable for commercial motion picture theaters and other large screen venues, including home theater, uses optical fibers to project modulated laser beams for simultaneously raster scanning multiple lines on screen. Emitting ends of optical fibers are arranged in an array such that red, green and blue spots are simultaneously scanned onto the screen in multiple lines spaced one or more scan lines apart. Use of optical fibers enables scanning of small, high resolution spots on screen, and permits convenient packaging and replacement, upgrading or modification of system components. Simultaneous raster scanning of multiple lines enables higher resolution, brightness, and frame rates with available economical components. Fiber-based beam coupling may be used to greatly enhance the flexibility of the system.

Abstract: A conductive layer of a touch sensor and a pixel electrode conductive layer of a display panel are integrated to a touch display panel during the same fabrication. The touch sensor defines a plurality of sensor groups that are insulated from each other in a same conductive layer, and each of the sense groups is divided into a plurality of mutually-coupled first electrodes, a plurality of mutually-coupled second electrodes and a plurality of mutually-coupled third electrodes. The first electrodes and the third electrodes are insulated from each other and are horizontally interlaced. The first electrodes and the second electrodes are insulated from each other and are located on opposite sides of a horizontal symmetry axis. A gain for compensating a vertical coordinate of a touch position is introduced according to capacitance variances of the first electrodes and the second electrodes.

Abstract: An optical sensor is provided with a photodiode (D1) which receives light in a first range, including light to be detected, and a photodiode (D2) which receives light in a second range other than the light to be detected. For instance, the photodiode (D1) receives light at all the incident angles, and the photodiode (D2) has a light blocking film on an incident light path so as to selectively receive only the incident light from the oblique directions. The differential between the output from the photodiode (D1) and that from the photodiode (D2) is read out as sensor output.

Abstract: Provided is a display device provided with a non-contact type touch sensor having excellent properties, in place of a contact-point type touch sensor. The display device includes a first circuit having a first electrode (62c) formed on a first substrate (2) having a display surface of a display panel, a field effect transistor formed on a second substrate (1) opposed to the first substrate (2) so that the first electrode (62c) is spaced from the field effect transistor on the back channel side, a gate terminal of the field effect transistor being connected to a first wiring (Vrstn) and a first drain/source terminal thereof being connected to a second wiring (Vsm), and a switch, one end of which is connected to a second drain/source terminal of the field effect transistor and the other end being connected to a third wiring (Vom).

Abstract: An active matrix substrate includes first and second pixel electrodes (17a, 17b) in each pixel region, the first pixel electrode (17a) is connected with a data signal line (15) via a transistor (12), a second pixel electrode (17b) is connected with the first pixel electrode (17a) via a capacitor formed between the second pixel electrode (17b) and a coupling capacitance electrode (67) electrically connected with the first pixel electrode (17a), the second pixel electrode (17b) overlaps a retention capacitor line (18) via an insulating layer, and the insulating layer has a thin region (51a) positioned to be at least a part of a portion which does not overlap the coupling capacitance electrode (67).

Abstract: A liquid crystal display panel capable of reducing a capacitance of a parasitic capacitor between a data line and a pixel electrode. The liquid crystal display panel comprises: a thin film transistor at a crossing of a gate line and a data line, liquid crystal cells including a pixel electrode connected to the thin film transistor; first shield patterns in the liquid crystal cells, each shield pattern being parallel to the data line without overlapping the data line, wherein the shield patterns are insulated from and overlap with an outer portion of the pixel electrode; and a common line arrayed to connect the shield patterns for each the liquid crystal cell.

Abstract: In a semiconductor device, a first interlayer insulating layer made of an inorganic material and formed on inverse stagger type TFTs, a second interlayer insulating layer made of an organic material and formed on the first interlayer insulating layer, and a pixel electrode formed in contact with the second interlayer insulating layer are disposed on a substrate, and an input terminal portion that is electrically connected to a wiring of another substrate is provided on an end portion of the substrate. The input terminal portion includes a first layer made of the same material as that of the gate electrode and a second layer made of the same material as that of the pixel electrode. With this structure, the number of photomasks used in the photolithography method can be reduced to 5.

Abstract: Embodiments of the present invention relate to a liquid crystal display. According to an embodiment, a liquid crystal display including a plurality of pixels arranged in a matrix according to an exemplary embodiment of the present invention includes: a plurality of pixel electrodes respectively including a first sub-pixel electrode and a second sub-pixel electrode; a plurality of first thin film transistors connected to the first sub-pixel electrodes; a plurality of second thin film transistors connected to the second sub-pixel electrodes; a plurality of third thin film transistors connected to the second sub-pixel electrodes; a plurality of first gate lines connected to the first and second thin film transistors; a plurality of data lines connected to the first and second thin film transistors; a plurality of second gate lines connected to the third thin film transistors; and a step-down capacitor connected between the drain electrode of the third thin film transistor and the first gate line.

Abstract: An object is to improve reliability of a semiconductor device. A semiconductor device including a driver circuit portion and a display portion (also referred to as a pixel portion) over the same substrate is provided. The driver circuit portion and the display portion include thin film transistors in which a semiconductor layer includes an oxide semiconductor; a first wiring; and a second wiring. The thin film transistors each include a source electrode layer and a drain electrode layer. In the thin film transistor in the driver circuit portion, the semiconductor layer is sandwiched between a gate electrode layer and a conductive layer. The first wiring and the second wiring are electrically connected to each other in an opening provided in a gate insulating film through an oxide conductive layer.

Abstract: A liquid crystal display with an integrated mounting portion for receiving a printed circuit board is presented. A liquid crystal panel has a first surface on which an image is displayed and a second surface opposite the first surface, a printed circuit board is connected to the liquid crystal panel and has a front surface and a rear surface, and an intermediate receiving container includes a frame and a printed circuit board mounting portion positioned on a sidewall of the frame. The printed circuit board is mounted on the printed circuit board mounting portion such that the front plane of the printed circuit board and the first plane of the liquid crystal panel face the same side.

Abstract: A backlight assembly is provided. The backlight assembly includes a mold frame having a tetragonal frame shape and including four side parts and a bottom part extending from bottoms of the side parts, a printed circuit board disposed on the bottom part of the mold frame, at least one light source disposed on the printed circuit board, and a light guide sheet disposed at a side of the light source and accommodated in the mold frame.

Abstract: Disclosed is a liquid crystal display device, which includes a base, a supporting part, and a liquid crystal display. The supporting part is fixedly connected with the liquid crystal display. A sliding hole along a horizontal direction is defined at the supporting part. The device further includes a first and second posts for supporting the liquid crystal display. The first post includes a first sliding end and a first connecting end, and the second post includes a second sliding end and a second connecting end. The first and second sliding ends slide to connect with the sliding hole. The first and second posts are screw-connected by the first connecting end and the second connecting end and screw-connected with the base. The first and second posts control a distance between the liquid crystal display and the base by rotating inwardly or outwardly.

Abstract: An electronic apparatus includes: a display panel, a retention member retaining the display panel, and an external case covering the retention member. The retention member has a retention main body portion retaining the display panel and a plurality of fastening portions for fixing to the external case. At least one of the plurality of fastening portions has a displacement absorbing portion absorbing displacement of the retention member.

Abstract: The present invention discloses a liquid crystal display module, a backlight module and a back plate thereof. The back plate has a back-plate mainbody disposed on a bottom of the backlight module, and two bent structures integrally and symmetrically arranged on two opposite sides of the back-plate mainbody for supporting an optical film assembly of the backlight module. The present invention is applied to a LCD module with a separate-type backlight module design for saving the used number of housing strips, simplifying the structure of the backlight module, and enhancing the stability thereof.

Abstract: The present invention discloses a backlight module and a liquid crystal display (LCD). A backlight module comprising an optical film, at least one light source, at least one reflecting housing and a reflecting surface. The reflecting surface and the optical film are symmetrically disposed with respect to the light source, and are disposed in identical side of the light source; the reflecting housing comprises a first reflecting layer and a second reflecting layer; the reflecting surface has a predetermined trajectory, and corresponds to the first reflecting layer and the light source. In the predetermined trajectory, the lights entering into the reflecting surface are reflected by the reflecting surface and enter into the optical film.

Abstract: A method of manufacturing a planar light source includes disposing a plurality of light emitting devices on a substrate and disposing an optical sheet to be separated from the light emission surface formed by the plurality of light emitting devices by an optical length l, the step of disposing the plurality of light emitting devices on the substrate including determining a degree of pitch S between two adjacent light emitting devices among the plurality of light emitting devices, and the step of determining the degree of pitch S including: calculating a degree of luminance of the light emitting device in the optical sheet, and determining a distance between one region in the optical sheet directly above the light emitting device, and another region in the optical sheet having a half of maximum luminance, to be S/2.

Abstract: A bi-stable chiral splay nematic mode liquid crystal display device includes: first and second substrates facing and spaced apart from each other; a gate line and a data line on an inner surface of the first substrate; a thin film transistor connected to the gate line and the data line; a reflecting plate on the thin film transistor, the reflecting plate including an embossing pattern; a first passivation layer including a flat top surface on the reflecting plate; a first electrode on the first passivation layer; a second passivation layer on the first electrode; at least one second electrode and at least one third electrode on the second passivation layer; a fourth electrode on an inner surface of the second substrate; and a liquid crystal layer including bi-stable chiral splay nematic liquid crystal molecules between the first and second substrates.

Abstract: Liquid crystal cells and lenses having a variable resulting pre-tilt across two or more areas of the cell, and in particular, cells and lenses are provided wherein a resulting pre-tilt is varied across the cell according to any desired birefringence profile that can be utilized in liquid crystalline optical elements and liquid crystal displays. Methods of fabrication of the liquid crystal cells with variable resulting pre-tilt are disclosed.

Abstract: An electro-optical device includes a pair of substrates bonded together via a seal member disposed in a seal region, and a plurality of light-shielding layers formed so as to overlap with each other on one of the substrates, and one of the plurality of light-shielding layers is larger in outer shape than another light-shielding layer formed at a level higher than the one of the light-shielding layer, in plan view from above the one of the substrates.

Abstract: A display substrate includes a base substrate and first, second and third color filters. The first, second and third color filters are disposed on the base substrate adjacent to each other and convert incident light into color light. At least one of the first, second and third color filters includes pigment particles which are regularly arranged to have refractive index anisotropy.

Abstract: A color liquid crystal display device includes a liquid crystal display element and a backlight unit. The liquid crystal display element includes a color filter having a red filter segment, a green filter segment, and a blue filter segment. The red filter segment is prepared from a red photosensitive resin composition which includes a pigment combination, an alkali-soluble resin, a compound having an ethylenic group, and a photoinitiator. The pigment combination includes an azo-based red pigment and an anthraquinone-based red pigment. A weight ratio of the azo-based red pigment to the anthraquinone-based red pigment ranges from 20/80 to 80/20. The backlight unit is coupled to the liquid crystal display element and has a color temperature ranging from 6,000 K to 20,000 K.

Abstract: The present invention provides a liquid crystal display device which allows an improvement in contrast ratio by compensating retardation given in a liquid crystal layer, even if a retardation layer has an inclined portion, and a desired retardation is varied at the inclined portion. The present invention is a vertical alignment liquid crystal display device, including: a pair of substrates facing each other; a liquid crystal layer disposed between the pair of substrates; a transmissive display region; and a reflective display region, wherein one of the pair of substrates includes a ?/4 retardation layer in the reflective display region, the ?/4 retardation layer protruding towards the liquid crystal layer, the ?/4 retardation layer includes an inclined portion inclined to a flat face of the substrate, and an azimuth of the inclined portion is substantially parallel to a slow axis azimuth of the ?/4 retardation layer.

Abstract: The invention relates to an optical compensation film for IPS or FFS-mode liquid crystal display devices, having the tilt angle ?[°] not equal to zero, ?[°] being defined as ? giving the minimum value of retardation R[?] which is retardation measured for incident light coming in a direction tilted by ?° from a normal line relative to the film-plane, the direction being in a plane including the direction perpendicular to the in-plane slow axis thereof and the normal line; and having retardation along the thickness direction at a wavelength of 550 nm, Rth(550), not equal to zero.

Abstract: A method for fabricating a liquid crystal display device includes providing an LCD panel that includes a photopolymerizable compound in its liquid crystal layer; and forming alignment sustaining layers by polymerizing the photopolymerizable compound in the liquid crystal layer of the LCD panel with the liquid crystal layer irradiated with light and supplied with a voltage simultaneously. The forming the alignment sustaining layers includes the steps of: i) applying a predetermined voltage between a pixel electrode and a counter electrode while a switching element is in ON state; and ii) changing the voltage at a storage capacitor counter electrode into a voltage, of which the polarity is opposite to a voltage at the storage capacitor counter electrode in the step i), after the switching element in ON state has been turned OFF.

Abstract: An LCD device includes first and second substrates, an alignment layer formed over at least one of the substrates, and a liquid crystal layer formed between the substrates. The alignment layer is formed of a mixture of rubbing alignment and UV alignment materials. A method of fabricating the LCD device includes preparing first and second substrates; coating an alignment layer over at least one of the substrates; performing a rubbing process on the substrate coated with the alignment layer; and irradiating polarized UV rays onto the substrate coated with the alignment layer, wherein the alignment layer is formed of a mixture of rubbing alignment a UV alignment materials. The rubbing process obtains high anchoring energy is obtained, thereby preventing afterimages. Also, the process of irradiating the polarized UV rays eliminates the problem of light leakage.

Abstract: A liquid crystal display device (1) includes a first substrate (2), a second substrate (3) provided to face the first substrate (2), a liquid crystal layer (4) sandwiched between the first substrate (2) and the second substrate (3), a first polarizing plate (5) and a second polarizing plate (6) respectively provided on a side of the first substrate (2) and a side of the second substrate (3) which are opposed to sides to which the liquid crystal layer (4) is provided, and a common electrode (7) and a pixel electrode (9) provided to the liquid crystal layer (4) side of the first substrate (2). Alignment of liquid crystal molecules (4a) of the liquid crystal layer (4) is controlled by an electric field generated between the common electrode (7) and the pixel electrode (9). A polarizing layer (13) is provided on the liquid crystal layer (4) side of the second substrate (3) so as to be in contact with the liquid crystal layer (4).

Abstract: A display device in which low power consumption is realized without lowering an aperture ratio is provided. A liquid crystal capacitive element Clc is sandwiched between a pixel electrode 20 and an opposite electrode 80. The pixel electrode 20, one end of a first switch circuit 22, one end of a second switch circuit 23 and a first terminal of a second transistor T2 form an internal node N1. The other terminals of the first switch circuit 22 and the second switch circuit 23 are connected to a source line SL. The second switch circuit 23 is a series circuit composed of a first transistor T1 and a diode D1. A control terminal of the first transistor T1, a second terminal of the second transistor T2 and one end of a boost capacitive element Cbst form an output node N2. The other end of the boost capacitive element Cbst and the control terminal of the second transistor T2 are connected to a boost line BST and a reference line REF, respectively.

Abstract: A liquid crystal display device using a liquid crystal exhibiting a blue phase and having a novel structure, and a method for manufacturing the liquid crystal display device. A plurality of structure bodies (also referred to as ribs, protrusions, or projecting portions) are formed over the same substrate, and a pixel electrode and an electrode (a common electrode at a fixed potential) corresponding to the pixel electrode are formed thereover. An electric field is applied to the liquid crystal layer exhibiting a blue phase by using the pixel electrode that has an inclination and the electrode corresponding to the pixel electrode, which also has an inclination. A shorter distance between the adjacent structure bodies allows a strong electric field to be applied to the liquid crystal layer, which results in a reduction in power consumption for driving the liquid crystal.

Abstract: A liquid-crystal apparatus has an element substrate. This element substrate contains depressions inside, and these depressions are sealed with an insulating film, a silicon dioxide coating. To this end, the insulating film is formed by chemical vapor deposition, and this coating process lasts until voids formed in the depressions are closed at the top by the insulating film. Then, the insulating coating is ground. This grinding process lasts until the insulating film is flat, but should be terminated before the voids are opened.

Abstract: A liquid crystal display includes an insulation substrate; a gate line, a gate electrode, and a reference voltage line positioned on the insulation substrate; a reference electrode contacting the reference voltage line; a gate insulating layer disposed on the gate line and the reference electrode; a semiconductor disposed on the gate insulating layer and positioned on the gate electrode; a data line and a drain electrode disposed on the semiconductor; a passivation layer disposed on the data line and the drain electrode; and a pixel electrode connected to the drain electrode and overlapping the reference electrode.

Abstract: A pixel structure includes a scan line, a first data line, a second data line, a first active device, a second active device, a first pixel electrode, a second pixel electrode, a common line, and a first capacitance upper electrode. The first and the second data lines intersect the scan line. The common line is parallel to the scan line. The first pixel electrode is electrically connected to the first data line through the first active device. The second pixel electrode is electrically connected to the second data line through the second active device. A difference between a first voltage of the first pixel electrode and a second voltage of the second pixel electrode constitutes a driving electric field to drive a display medium. The first capacitance upper electrode is electrically connected to the first pixel electrode and located above the common line to form a first storage capacitor.

Abstract: A liquid crystal display device comprises a first and a second substrates which are oppositely configured, and a liquid crystal layer interposed therebetween, the first substrate comprising a transparent substrate and a plurality of scanning lines and data lines formed on the transparent substrate, the plurality of scanning lines and data lines crosswise defining a plurality of pixel regions. Each pixel region comprises at least two electrode groups and a third transparent electrode provided between the two adjacent electrode groups, each electrode group comprising a first and a second transparent electrodes alternately located on different layers. During operation of the liquid crystal display device, a fringe field is generated between the first and the second transparent electrodes, and a horizontal electric filed is generated between the first and the third transparent electrodes so as to enhance the transmittance of the whole liquid crystal display device.

Abstract: What is provided is an OCB mode liquid crystal display device (10), including: a plurality of gate bus lines (40); a plurality of source bus lines (42); pixels (58); and pixel electrodes (60) corresponding to the respective pixels (58). According to the OCB mode liquid crystal display device (10), a gap width (L22) between adjacent ones of the pixel electrodes (60) is wider at intersections (S30) of the plurality of gate bus lines (40) and the plurality of source bus lines (42) than in areas other than the intersections (S30).

Abstract: An oblique vapor deposition substrate having an oblique vapor deposition layer formed thereon is provided, wherein a plurality of pixel sections is arranged in a matrix of intersected straight lines of two directions with each pixel section being spaced apart from each other, and has been relatively rotated in a plane of the oblique vapor deposition substrate taking into consideration the distribution of the vapor deposition directions in the oblique vapor deposition layer.

Abstract: Provided is an active matrix substrate manufacturing method, including the steps of: selectively forming a laminated structure pattern, by forming the laminated structure on a glass substrate (2), by forming a first photosensitive resin pattern (PR) on the laminated structure, and by selectively forming the laminated structure pattern using the first photosensitive resin pattern (PR), the laminated structure including a metal layer (a scanning signal line (11) material), a gate insulative layer (30), and a semiconductor layer (31, 33) (transistor material); fluorinating a surface of the first photosensitive resin pattern (PR) by dry-etching with fluorine gas; applying a coating-type transparent insulative resin (60) onto the glass substrate (2) to fill a space in the laminated structure pattern; and removing the fluorinated first photosensitive resin pattern (PR).

Abstract: A display apparatus includes a liquid crystal display panel, a flexible circuit board connected to a connection portion formed on one side of the liquid crystal display panel, a display window bonded to a display surface of the liquid crystal display panel so that an end face thereof protrudes from an end face on one side of the liquid crystal display panel, an exterior member in which an opening where the display window is arranged is formed, and a first light shielding member arranged so that the flexible circuit board positioned near a gap is covered therewith if the display window is arranged in the opening so that the gap is formed between the end face of the display window and the end face of the opening.

Abstract: Inter-substrate connection terminals are provided between four corners of an opposed substrate and a TFT substrate. Lines are provided between first and second terminals in the TFT substrate and an external circuit connection terminal. Lines are provided between first and second terminals, between first and third terminals, between the third and fourth terminals, and between second and fourth terminals, respectively. Lines bypassing the first terminal are provided between lines. A line bypassing the second terminal is provided between lines.

Abstract: A cooling assembly for an electronic image assembly having an open and closed gaseous loop. A closed gaseous loop allows circulating gas to travel across the front surface of an image assembly and through a heat exchanger. An open loop allows ambient gas to pass through the heat exchanger and extract heat from the circulating gas. An optional additional open loop may be used to cool the back portion of the image assembly (optionally a backlight). Ribs may be placed within the optional additional open loop to facilitate the heat transfer to the ambient gas. The cooling assembly can be used with any type of electronic assembly for producing an image.

Abstract: A liquid crystal display device of the present invention is arranged such that a retardation of a liquid crystal layer which obtained while no voltage is applied falls within ±(a value which is one-tenth of a main wavelength) of a value obtained by adding natural number times the main wavelength to a total retardation of at least one optical compensation film. This allows suppression of a transmittance during no voltage application.

Abstract: A method of manufacturing a flat panel display is disclosed. In one aspect, the method includes preparing first and second mother substrates, forming a plurality of display cells on at least one of the mother substrates, forming a plurality of sealant lines enclosing the respective cells on either one of the mother substrates and assembling and sealing the two mother substrates with the sealant lines interposed therebetween. The method also includes mounting the two mother substrates on a stage, irradiating a laser beam to a defined light irradiation region of the mother substrates and cutting the mother substrates while moving the light irradiation region along an imaginary cut line where the mother substrates are to be cut. The light irradiation region includes a linear region and a curved region.

Abstract: An immersion lithography apparatus is provided that includes an energy source, a projection optical system, a stage, a showerhead including an immersion liquid supply device and an immersion liquid discharge device that produces a flow of liquid within an exposure zone, and a cleaning device that cleans a portion of the projection optical system having been contacted with the immersion liquid by means of a cleaning gas. In an embodiment, the cleaning device includes a gas supply device and a gas discharge device that produce a flow of cleaning gas into the exposure zone. In embodiments, the apparatus includes a stage that includes a dose sensor and/or an ultra-violet light source. A method for insitu cleaning of a final lens element within an immersion lithography system having an immersion fluid showerhead that provides immersion fluid to an exposure zone of the immersion lithography system is also provided.

Abstract: An exposure apparatus exposes a substrate with exposure light that passes through an exposure liquid. The exposure apparatus comprises: an optical member, which has an emergent surface wherefrom the exposure light emerges; a first supply port, which supplies the exposure liquid; a liquid immersion member, which is capable of forming an immersion space so that an optical path of the exposure light that emerges from the optical member is filled with the exposure liquid; a second supply port, which supplies a cleaning liquid so that it contacts the liquid immersion member; and a preventive apparatus, which prevents the cleaning liquid and the optical member from contacting one another.

Abstract: It is disclosed a mask on which a pattern for transfer is formed. The mask comprising a first row pattern part and a second row pattern part which are arranged along a first direction on the mask. The whole region of the first row pattern part and the whole region of the second row pattern part region are arranged to deviate from each other by a predetermined amount in a second direction perpendicular to the first direction.

Abstract: Pattern images are projected under various conditions of liquid prior to exposing a substrate, and exposure conditions for exposing a pattern image on the substrate is determined based on each projection condition of the pattern images. When a pattern image is projected through liquid, a substrate can be excellently exposed in a desired exposure condition according to the condition of the liquid.

Abstract: An immersion lithographic apparatus typically includes a fluid handling system. The fluid handling system generally has a two-phase fluid extraction system configured to remove a mixture of gas and liquid from a given location. Because the extraction fluid comprises two phases, the pressure in the extraction system can vary. This pressure variation can be passed through the immersion liquid and cause inaccuracy in the exposure. To reduce the pressure fluctuation in the extraction system, a buffer chamber may be used. This buffer chamber may be connected to the fluid extraction system in order to provide a volume of gas which reduces pressure fluctuation. Alternatively or additionally, a flexible wall may be provided somewhere in the fluid extraction system. The flexible wall may change shape in response to a pressure change in the fluid extraction system. By changing shape, the flexible wall can help to reduce, or eliminate, the pressure fluctuation.

Abstract: There is disclosed an exposure method is a method of projecting patterns (M1, M2) of a mask (M) onto a substrate to effect exposure thereof, through a plurality of projection optical units each having an enlargement magnification, and the exposure method comprises: placing the mask (M) having first pattern regions (M1) arranged discontinuously in a positional relation corresponding to the enlargement magnification, and second pattern regions (M2) provided at least in part between the first pattern regions (M1), on the object plane side of the projection optical units; projecting enlarged images of either of the first pattern regions (M1) and the second pattern regions (M2) onto the substrate disposed on the image plane side of the projection optical units to effect exposure thereof; and then projecting enlarged images of the other pattern regions onto the substrate to effect exposure thereof.

Abstract: A lithographic apparatus and method for simultaneously exposing two patterning devices onto a substrate is disclosed. In an embodiment, a lithographic apparatus includes a plurality of illumination systems for receiving and conditioning a pulsed radiation beam, a beam director arranged between a source of the pulsed radiation and the illumination systems for alternately directing pulses of the radiation beam to the respective illumination systems, a support table for holding a plurality of patterning devices, each of the patterning devices being capable of imparting a respective conditioned radiation beam with a pattern in its cross-section to form a plurality of patterned radiation beams, and a projection system configured to project each of the plurality of patterned radiation beams coincidentally onto a target portion of a substrate. In an embodiment, the substrate is covered with a phase change material.

Abstract: Disclosed relates to an optical component for a maskless exposure apparatus, and more particularly, to a micro-prism array or a micro-mirror array which is an optical component capable of screening diffused light such that the image of a pixel of a digital micro-mirror display (DMD) formed by a first image-forming lens in the maskless exposure apparatus has no influence on the image of a neighboring pixel and of totally reflecting the light after reflection or diffraction at the same time, thus improving exposure performance by using the quantity of light being transmitted without a loss and increasing numerical apertures (NAs) at the same time.