Abstract: It is an object of the present invention to provide a Ag—Pd—Cu—Ge type silver alloy which can form a reflective electrode film having such two characteristics that it is very reduced in the lowering of reflectance caused by thermal deterioration and has resistant to yellowing caused by sulfurization even after a heating step in a process of producing a color liquid crystal display. The silver alloy according to the present invention includes a composition containing at least four elements including Ag as its major component, 0.10 to 2.89 wt % of Pd, 0.10 to 2.89 wt % of Cu and 0.01 to 1.50 wt % of Ge, and the total amount of Pd, Cu and Ge is 0.21 to 3.00 wt %.

Abstract: A handling machine for handling rails, arranged in line immediately downstream of a rolling plant, which allows an optimal clamping of the rail along its longitudinal extension, thus effectively withstanding the deflection and its variations, while allowing a longitudinal movement of the rail caused by thermal shrinkage, thus avoiding damages both to the external surface of the rail and to the handlers. A process of handling the rail is also described, which optimizes moving, positioning along a roller table and maintaining the rail substantially rectilinear during the thermal treatment to which it is subjected.

Abstract: A method for the manufacturing of high strength cold rolled steel sheets includes continuously annealing a cold rolled steel sheet that has a composition containing C: 0.05-0.3% mass, Si: 0.6-3.0% mass, Mn: 1.0-3.0% mass, P: ?0.1% mass, S: ?0.02% mass, Al: 0.01-1% mass, N: ?0.01% mass, and Fe and inevitable impurities: balance, in a manner such that the cold rolled steel sheet is heated in a furnace using an oxidizing burner to a steel sheet temperature of ?700° C., then soak-annealed in a reducing atmosphere furnace at 750-900° C., then cooled so the average cooling rate between 500° C. and 100° C. is ?50° C./s. High-Si cold rolled steel sheets with high strength and good phosphatability while containing Si?0.6% are obtained without controlling conditions so as to increase the dew point in the reducing atmosphere in the soaking furnace or to increase the vapor hydrogen partial pressure ratio.

Abstract: Disclosed herein is a method of treating a component comprising solution treating the component for a period of about 4 to about 10 hours at a temperature of about 1750 to about 1850° F.; cooling the component to a temperature of about 1490 to about 1520° F. at an average rate of 1° F./min to about 25° F./min; stabilizing the component at about 1450 to about 1520° F. for a period of from about 1 to about 10 hours; cooling the component to room temperature; precipitation aging the component by heating the component to a first precipitation aging temperature of about 1275 to about 1375° F. for about 3 to about 15 hours; cooling the component at an average rate of 50 to about 150° F./hour to a second precipitation aging temperature of about 1100 to about 1200° F. for a time period of about 2 to about 15 hours; and cooling the component.

Abstract: The present disclosure relates to compositions comprising at least one fluoroolefin and an effective amount of a stabilizer comprising at least one ascorbic acid, terephthalate, or nitromethane, or mixtures thereof. The stabilized compositions may be useful in cooling apparatus, such as refrigeration, air-conditioning, chillers and heat pumps, as well as in applications as foam blowing agents, solvents, aerosol propellants, fire extinguishants, and sterilants.

Abstract: A method for producing a magnetic sheet wherein a magnetic sheet composition is applied onto a substrate. The magnetic sheet composition contains: a binder; magnetic powder; and a curing agent, wherein the binder contains a thermosetting organic resin, and the curing agent contains a sulfonium borate complex expressed by General Formula 1: where R1 is an aralkyl group, R2 is a lower alkyl group, X is a halogen atom, and n is an integer of 0 to 3.

Abstract: Systems and methods for in-process vision inspection for automated machines are disclosed. In one embodiment, a head assembly includes a tool moveable over a workpiece and adapted to perform a manufacturing operation on the workpiece, and an inspection unit operatively positioned proximate the tool and moveable with the tool relative to the workpiece. The inspection unit is adapted to perform a vision inspection of a portion of the workpiece simultaneously with the performance of the manufacturing operation on the workpiece. In a particular embodiment, the inspection unit includes a camera adapted to monitor an area including the portion of the workpiece upon which the tool has performed the manufacturing operation, and a processor operatively coupled to the camera and adapted to receive an image from the camera and to analyze the image to determine a presence of a defect within the portion of the workpiece.

Abstract: A method for die bonding includes positioning a dispenser in a die bonding apparatus, wherein the dispenser includes a reservoir having bonding adhesive therein including particles and a liquid carrier. The dispenser is moved to provide mechanical agitation to the dispenser for mixing the bonding adhesive into a homogeneous mixture of particles and the liquid carrier, wherein the bonding adhesive is not dispensed during moving. After the moving, the bonding adhesive is dispensed onto a bonding location on the workpiece without removing the dispenser from the die attach apparatus. An integrated circuit (IC) die is attached onto the bonding adhesive over the bonding location. The method can also include determining an amount of time elapsed after the last mixing of the bonding adhesive or the positioning of the dispenser in the die bonding apparatus, and automatically initiating movement for mixing only if the elapsed time exceeds a predetermined time.

Abstract: A method of pre-priming a membrane includes folding the membrane along a longitudinal axis to create a folded membrane. The folded membrane includes a lower layer, an upper layer, and an exposed portion of the lower layer that is uncovered by the upper layer. A primer is applied over the exposed portion and a portion of the upper layer adjacent thereto simultaneously.

Abstract: A draping device for draping a two-dimensional textile semi-finished product includes a first rotationally symmetrical body having a first axis of rotation and a peripheral surface which varies along the axis of rotation. A first drive is configured to rotate the first body about the first axis of rotation so as to deform, via the first body, the semi-finished product.

Abstract: A method of assembly of fencing made of thermoplastic materials which can be easily assembled utilizing ultrasonic welding and which can include a unique configuration for the ultrasonic welding surfaces which prevents the flow of melted thermoplastic materials outwardly onto the decorative outer surfaces of the various fencing parts. Any excess thermoplastic material is designed to pass inwardly toward the longitudinally extending bore defined in the various fencing construction parts. This concept is particularly useful for attaching capping fence members which are injection molded onto structural fence members which are extruded.

Abstract: Certain example embodiments of this invention relate to a frit slurry paste for use in assemblies (e.g., a vacuum insulated glass unit or a plasma display panel), and methods of making the same. Frit powder, binder material, and a water-based solvent are mixed together to form an intermediate mixture. The frit powder is substantially lead free, and the water-based solvent is provided at a first temperature. Additional water-based solvent is added to the intermediate mixture to form a frit slurry paste. The additional water-based solvent is provided at a second temperature, with the second temperature being lower than the first temperature. The binder material is provided at a concentration of 0.001%-20% by weight with respect to the frit slurry paste or the frit slurry paste absent the frit powder. The frit slurry paste has a bulk viscosity of 2,000-200,000 cps.

Abstract: A system and method of making an open-ended, reinforced, layered belt having a profile layer, a top layer material, and tensile cords fully encapsulated there between. The method includes engaging portion of the profile layer on a rotatable cylindrical mandrel with an engaging roller, disengaging with a take-off roller, and applying and fusing the cords to the profile layer at a desired cord spacing there between. The cord may be fused by melting the profile layer surface with a heated plow and/or with heated cord. The cord is then covered with the top layer material in a lamination step involving heating to melt at least a portion of the top layer and pressing it to fuse it to the reinforced profile layer. Lamination may be done downstream or directly on the mandrel.

Abstract: A method for manufacturing complex hollow composite parts with at least one internal structure formed in situ by laying laminated layers around a removable mandrel assembled inside the part's inner cavity. The inner mandrel is made up of two jig plate assemblies aligned in a parallel manner and space apart where the internal structure is to manufactured. Each jig plate assembly is made up of at least three jig plates stacked in an edge-to-edge manner Located on opposite sides of each jig plate assembly is an elastic envelope filled with spherical objects. When evacuated, the envelope collapses and relaxes and composite material may then laid up inside the inner cavity and around the envelopes. When exposed to a heat, the envelopes expand and in situ and form internal structures inside surface of the cavity. Each envelope and each jig plate assemblies can be easily dissembled and reused.

Abstract: A method for producing a laminated optical film that allows three-dimensional images to be reproduced, which is preferably used in a large image display apparatus. One embodiment of the method includes laminating a polarizing plate and a ?/4 plate and forming a ?/2 layer partially on the ?/4 plate. The polarizing plate and the ?/4 plate are laminated such that an angle between an absorption axis of a polarizer of the polarizing plate and a slow axis of the ?/4 plate is substantially 45°, and the ?/2 layer is formed such that an angle between the absorption axis of the polarizer and a slow axis of the ?/2 layer is substantially 45°.

Abstract: A method for electromagnetic welding of molded parts wherein a mold and at least two molded parts for coupling are placed in the mold, wherein at least a contact surface between the molded parts comprises a thermally activiated coupling means and an induction-senstive component. The coupling means is activated by heating the induction-senstive component by means of an inductor. The inductor comprises an electrical conductor which, under alternating voltage, generates an electromagnetic field which is substantially cylindrical in at least a direction of welding. The molded parts are pressed together in the configuration defined by the mold, wherein the molded parts are coupled by the thermally activated coupling means. Also disclosed is an assembly of molded parts, an inductor, an assembly of the inductor with an alternating current generator, and a device for electromagnetic welding.

Abstract: A sandwich of impact resistant material comprising: a first tile comprising a plurality of nano-particles bonded together, wherein the nano-structure of the nano-particles is present in the first tile and the first tile comprises a hardness value; a second tile comprising a plurality of nano-particles bonded together, wherein the nano-structure of the nano-particles is present in the second tile and the second tile comprises a hardness value; and a third tile comprising a plurality of nano-particles bonded together, wherein the nano-structure of the nano-particles is present in the third tile and the third tile comprises a hardness value, wherein the second tile is coupled in between the first tile and the third tile, and the second tile comprises a hardness value greater than the first tile and the second tile.

Abstract: The invention is a two-part composition comprising: A) in one part (i) one or more isocyanate functional prepolymers; and B) in a second part (ii) one or more compounds having isocyanate reactive groups; (iii) one or more fillers selected such that the composition is nonconductive; (iv) one or more catalysts for the reaction of isocyanate groups with active hydrogen containing compounds wherein either or both of the one or more isocyanate functional prepolymers and the one or more compounds having isocyanate reactive groups have solid organic particles grafted thereto such that the composition contains from about 6 to about 13 percent by weight of the total composition of solid organic particles. In a preferred embodiment, the second part comprises from about 35 to about 65 percent by weight of one or more compound having isocyanate reactive groups which have solid organic particles grafted to the backbone.

Abstract: A semiconductor device may be formed by the method comprising providing a patterned photoresist mask over the etch layer, the photoresist mask having at least one photoresist line having a pair of sidewalls ending at a line end, placing a coating over the at least one photoresist line comprising at least one cycle, wherein each cycle comprises: a) depositing a polymer layer over the photoresist line, wherein an amount of polymer at the line end is greater than an amount of polymer on the sidewalls, and b) hardening the polymer layer, and etching features into the etch layer through the photoresist mask, wherein a line end shortening (LES) is less than or equal to 1.

Abstract: An omnibus process of pulping and bleaching lignocellulosic materials in which a charge of a lignocellulosic material is biopulped and/or water extracted prior to pulping and bleaching. The lignocellulosic material may be mechanically pulped and bleached in the presence of an enzyme that breaks lignin-carbohydrate complexes. The aqueous extract in embodiments including a water extract step is separated into acetic acid and hemicellulose sugar aqueous solutions.

Abstract: Disclosed herein are compositions and methods that involve ionic liquids and biomass. Multiphasic compositions involving ionic liquids and a polymer and uses of such compositions for fractioning various components of biomass are disclosed. Methods of making and using compositions comprising an ionic liquid, biomass, and a catalyst are also disclosed.

Abstract: A flushable moist wipe or hygiene tissue including a hydraulically entangled nonwoven material impregnated with a wetting composition. The nonwoven material contains at least 70%, by fiber weight, pulp fibers and the rest manmade fibers and/or natural fibers with a length of at least 6 mm. The moist wipe or hygiene tissue has a length in the machine direction which exceeds the width in the cross-machine direction with at least 25%. The moist wipe or hygiene tissue has a wet strength in machine direction which is at least 3 times higher than the wet strength in cross-machine direction, wherein the wet strength in cross-machine direction is between 50 and 200 N/m.

Abstract: A process for the pyrolysis of waste material and/or organic material in a pyrolysis reactor is provided. According to the process, the material is placed in the reactor and heated with an induction heater, optionally in the presence of one or more soft magnets. The products of the pyrolysis reaction, such as gases and liquids may be collected in a storage vessel attached to the reactor. A pyrolysis reactor for the pyrolysis of waste and/or organic material is also provided.

Abstract: Disclosed herein is an apparatus and a method for producing a pyrolysis liquid, wherein the pyrolysis liquid is formed by means of pyrolysis from a raw material by forming, and a pyrolysis reactor, a gaseous pyrolysis product by pyrolysis and condensing it in a condenser into a pyrolysis liquid, and feeding circulation gas into the pyrolysis reactor. The circulation gas is conducted by a liquid ring compressor into the pyrolysis reactor and purified before being conducted into the pyrolysis reactor, and the pyrolysis liquid is used as the liquid layer in the liquid ring compressor.

Abstract: Disclosed are examples of apparatuses for evaporative purification of a contaminated liquid. In each example, there is a first vessel for storing the contaminated fluid. The first vessel includes a surface coated with a layer of superhydrophobic material and the surface is at least partially in contact with the contaminated liquid. The contaminants do not adhere to the surface as the purified liquid evaporates, thus simplifying maintenance of the apparatus.

Abstract: A plasma generation apparatus and method, which achieve both sterilization and deodorization of attached bacteria even under the condition that steam or fine droplets of water are present. A pair of electrodes is prepared, plasma discharge is carried out by applying designated voltage between the pair of electrodes, fluid passage holes are provided at corresponding parts of respective electrodes so as to communicate with each other, and steam or fine droplets of water are applied to the fluid passage holes and plasma generated around the fluid passage holes.

Abstract: In one embodiment of the present invention an electrolytic cell is provided comprising a containment vessel; a first electrode; a second electrode; a source of electrical current in electrical communication with the first electrode and the second electrode; an electrolyte in fluid communication with the first electrode and the second electrode; a gas, wherein the gas is formed during electrolysis at or near the first electrode; and a separator; wherein the separator includes an inclined surface to direct flow of the electrolyte and the gas due to a difference between density of the electrolyte and the combined density of the electrolyte and the gas such that the gas substantially flows in a direction distal to the second electrode.

Abstract: Embodiments of the invention generally relate to a process kit for a semiconductor processing chamber, and a semiconductor processing chamber having a kit. More specifically, embodiments described herein relate to a process kit including a cover ring, a shield, and an isolator for use in a physical deposition chamber. The components of the process kit work alone and in combination to significantly reduce particle generation and stray plasmas. In comparison with existing multiple part shields, which provide an extended RF return path contributing to RF harmonics causing stray plasma outside the process cavity, the components of the process kit reduce the RF return path thus providing improved plasma containment in the interior processing region.

Abstract: A magnetron sputter reactor for sputtering deposition materials such as tantalum, tantalum nitride and copper, for example, and its method of use, in which self-ionized plasma (SIP) sputtering and inductively coupled plasma (ICP) sputtering are promoted, either together or alternately, in the same or different chambers. Also, bottom coverage may be thinned or eliminated by ICP resputtering in one chamber and SIP in another. SIP is promoted by a small magnetron having poles of unequal magnetic strength and a high power applied to the target during sputtering. ICP is provided by one or more RF coils which inductively couple RF energy into a plasma. The combined SIP-ICP layers can act as a liner or barrier or seed or nucleation layer for hole. In addition, an RF coil may be sputtered to provide protective material during ICP resputtering. In another chamber an array of auxiliary magnets positioned along sidewalls of a magnetron sputter reactor on a side towards the wafer from the target.

Abstract: The invention relates to a system and a method of plating metal alloys, as well as to the structures thus obtained. The system for plating metal alloys comprises an electrolytic cell containing an electrolytic solution (3) in which an anode (4,4a,4b), a cathode (5), and a plurality of metal components to be plated onto the cathode are immersed, the anode (4,4a,4b) and the cathode (5) being electrically connected to means (6) adapted to apply a potential difference between said anode (4,4a,4b) and said cathode (5). The invention is characterized in that the means (6) adapted to apply a potential difference between said cathode (5) and said anode (4,4a,4b) impose a potential difference value that changes over time according to a predefined law.

Abstract: This invention is directed to a new method of mass-transfer/fabrication of micro-sized features/structures onto the inner diameter (ID) surface of a stent. This new approach is provided by technique of through mask electrical micro-machining. One embodiment discloses an application of electrical micro-machining to the ID of a stent using a customized electrode configured specifically for machining micro-sized features/structures.

Abstract: A biosensor with an underfill recognition system assesses whether to analyze a sample for one or more analytes in response to the volume of the sample. The underfill recognition system applies polling and test excitation signals to the sample. The polling signals generate one or more polling output signals, which maybe used to detect when a sample is present and to determine whether the sample has sufficient volume for analysis. The test excitation signal generates one or more test output signals, which may be used to determine one or more analyte concentrations in the sample.

Abstract: A method of measuring a quantity of a substrate contained in sample liquid is provided. This method can reduce measurement errors caused by a biosensor. The biosensor includes at least a pair of electrodes on an insulating board and is inserted into a measuring device which includes a supporting section for supporting detachably the biosensor, plural connecting terminals to be coupled to the respective electrodes, and a driving power supply which applies a voltage to the respective electrodes via the connecting terminals. One of the electrodes of the biosensor is connected to the first and second connecting terminals of the measuring device only when the biosensor is inserted into the measuring device in a given direction, and has a structure such that the electrode becomes conductive between the first and second connecting terminals due to a voltage application by the driving power supply.

Abstract: According to the present invention, phenols may be detected using an electrochemical sensor comprising a first compound, a working electrode and an electrolyte in contact with the working electrode, wherein the first compound operatively undergoes a redox reaction at the working electrode to form a second compound which operatively reacts in situ with the phenol, wherein said redox reaction has a detectable redox couple and wherein the sensor is adapted to determine the electrochemical response of the working electrode to the consumption of said second compound on reaction with the phenol. The phenol may be, for example, a cannabinoid or a catechin compound.

Abstract: A method for operating an ion-sensitive sensor with a measurement circuit which includes an ion-sensitive electrolyte-insulator-semiconductor structure (EIS); wherein the measurement circuit is embodied to issue an output signal which is dependent on ion concentration, especially a pH value, of a measured liquid; and wherein the method comprises the steps of: introducing the ion-sensitive electrolyte-insulator-semiconductor structure into a measured liquid; accelerating charging processes in the region of an insulator layer of the ion-sensitive electrolyte-insulator-semiconductor structure by operating the sensor over a predetermined time span at least a first working point; and dynamically adapting the working point to set a second working point, and registering and processing the output signal of the measurement circuit at the second working point.

Abstract: This invention relates to methods and units for mitigation of carbon oxides during hydrotreating hydrocarbons including mineral oil based streams and biological oil based streams. A hydrotreating unit includes a first hydrotreating reactor for receiving a mineral oil based hydrocarbon stream and forming a first hydrotreated product stream, and a second hydrotreating reactor for receiving a biological oil based hydrocarbon stream and forming a second hydrotreated product stream.

Abstract: This invention relates to process for producing a reformate or gasoline product. The process involves a rapid cycle of reacting hydrocarbon feedstock to form the product and then regenerating the catalyst used in the reaction. The process can be carried out at relatively high liquid hourly space velocities and preferably at relatively low hydrogen to hydrocarbon ratios to produce a reformed product having relatively high liquid yield and hydrogen content.

Abstract: An extracorporeal blood treatment device including a filter having a primary and a secondary chamber separated by a semi-permeable membrane, a withdrawal line connected to the primary chamber and associated to a first pump, a return line at the outlet of the primary chamber, a first pre-infusion line (109) connected to a citrate container on the withdrawal line (106), associated to a second pump, a first post-infusion line connected to a calcium solution container and to the return line, and associated to a third pump, an effluent line from the secondary chamber connected to a drain pipe and associated to a fourth pump, a CPU including first means programmed to receive the signal output by the pumps and second means programmed to control the third post-infusion pump (121) as a function of the input flow rate, effluent liquid flow rate, and anticoagulation liquid flow rate.

Abstract: A container (14) with a content (8) has at least one hypochlorite compound, in particular a calcium hypochlorite compound, for generating an aqueous solution, and at least one inlet attachment (46) for attachment to a water supply line (48) and at least one outlet attachment (50) for attachment to an outlet line (52, 92) for a liquid composed of the incoming water and of the content (8), wherein the content (8) is located in accordance with the flow between the inlet attachment (46) and the outlet attachment (50), and the container (14) is designed as a transportable exchange unit that is sealed off from the outside in the unattached state.

Abstract: Described herein are systems, methods, and apparatuses for aggregating microorganism in an aqueous suspension. In particular, are systems, methods, and apparatuses that apply an electrical field and/or acoustic energy to an aqueous suspension comprising microorganisms as the aqueous suspension follows a flow path to cause aggregation of the microorganisms. The electrical field may be continuous or pulsed. In some embodiments, the flow path for the aqueous suspension may vary.

Abstract: Sanitary elements and cartridges of high performance are described which utilize a thin surrounding tubular shell with an exterior textured surface. Through the use of an overwrap material of particular design and by wrapping an assemblage of sheets of semipermeable membrane material, permeate carrier material and feed spacer material using a high tension, a spirally wound crossflow filtration element is constructed which has a substantially cylindrical outer surface of closely controlled OD that smoothly fits within such shell and which resists telescoping as a result of its radial compression.

Abstract: A method for performing maintenance on a chromatography column (1; 41) comprising the steps of: a) when maintenance is required, detaching a detachable joint (7; 63) between a bottom plate (5; 53) of the chromatography column and a stand (3; 43) on which the chromatography column is provided; b) attaching an adaptor (15; 59) provided in the chromatography system to any part of the chromatography column (1; 41) making it possible to lift the bottom plate (5; 53) from the stand (3; 43) with the adaptor (15; 59); and c) raising the adaptor (15; 59) and thereby also the bottom plate (5; 53) such that maintenance can be performed under the bottom plate (5; 53).

Abstract: A method for operating a water softening system (1) comprising an automatically adjustable blending means for mixing a blended water flow V(t)blended from a first, softened partial flow V(t)part1soft and a second untreated water partial flow V(t)part2raw and comprising an electronic control means (11), wherein the control means (11) readjusts the adjustment position of the blending means by means of one or more experimentally determined instantaneous measured values in such a fashion that the water hardness in the blended water flow V(t)blended is adjusted to a predetermined desired value (SW), is characterized in that the control means (11) ignores at least one of the one or more instantaneous measured values for readjustment of the adjustment position of the blending means in one or more defined operating situations, and instead uses the respectively last corresponding measured value that was valid prior to occurrence of the defined operating situation, or a standard value for the corresponding measur

Abstract: The present invention provides for a permeable reactive barrier and an effective method of removing contaminants from water using adsorbent powders, such as zero valent iron particles, adhered throughout a reticulated foam structure. This structure provides improved mass transfer, higher reaction rates and reduced residence times. The barrier includes a reticulated foam substrate with high permeability, an adherent coating and a reactive adsorbent arranged in a reticulated foam structure. The substrate can be selected from various materials including polyurethane and polyester. The adherent may be selected from a wide range of materials including polyurethanes, acrylics, silicones, siliconized acrylics, latex emulsions, and other inherently tacky materials that cure to a water resistant coating. The reactive adsorbent can be selected from various adsorbents including a powdered zero-valent iron (ZVI).

Abstract: Methods, apparatus and systems for treating wastewater onboard small marine vessels. A pre-determined volume of wastewater generated onboard the vessel is mixed with a larger volume of seawater. This mixture is disinfected and subjected to further oxidation. The excess oxidants are neutralized and the treated effluent is discharged overboard the vessel.

Abstract: A method of forming a discrete nanostructured element at one or more predetermined locations on a substrate is presented. The method includes forming a mask member over the substrate. A window is formed in the mask member at each of one or more locations at which it is required to form the nanostructured element thereby to expose a portion of a surface of the substrate. A portion of the substrate exposed by the window at the one or more locations is removed to form one or more recesses in the substrate. The method further includes forming a layer of a nanostructure medium over a surface of the recess and annealing the structure thereby to form the nanostructured element in each of the one or more recesses. The nanostructured element includes a portion of the nanostructure medium and has an external dimension along at least two substantially orthogonal directions of less than substantially 100 nm.

Abstract: A method of protecting a mold having at least one substantially planar surface provided with a plurality of mold cavities includes inserting a plurality of mandrels into respective ones of the plurality of mold cavities, depositing a layer of mold protection material onto the at least one substantially planar surface and the plurality of mandrels, and removing the plurality of mandrels from the mold substrate.

Abstract: A multi-step etch process wherein elliptical via openings and trench openings are formed in a dielectric layer includes supporting a multi-layer film stack on a temperature controlled electrostatic chuck in a plasma etch reactor. The multi-layer film stack has a dielectric layer and a patterned metal hard mask layer above the dielectric layer. An etchant gas is supplied to the plasma etch reactor. The etchant gas is energized into a plasma state, and via openings in a photo resist are transferred into a planarization layer and then into elliptical portions of the trench openings in a patterned hard mask layer while maintaining the chuck at a temperature of about 30 to 50° C. The elliptical openings are extended into a lower layer of the hard mask and into an underlying dielectric layer while maintaining the chuck at a temperature of 20° C. or below.

Abstract: An object is to provide a plasma processing device capable of rightly monitoring existence of plasma discharge and also rightly monitoring existence of abnormal discharge. Another object of the present invention is to provide a method of monitoring a state of plasma discharge in the plasma processing device. A discharge detection sensor 23, in which a dielectric member 21 and a probe electrode unit 22 are combined with each other, is attached to an opening portion 2a provided in a lid portion 2 composing a vacuum chamber.

Abstract: A method for etching a substrate includes etching at least one first layer of the substrate with a non-uniform substrate temperature and etching at least one second layer of the substrate with uniform substrate temperatures.