Abstract: In an evaporated fuel treatment apparatus, for reducing blow-by of an evaporated fuel component to the outside, the evaporated fuel treatment apparatus includes at least one adsorption chamber filled with a first adsorbent and a second adsorbent that adsorb and desorb a fuel component of evaporated fuel, and the first adsorbent has a higher pore volume than the second adsorbent with respect to effective pores that effectively adsorb and desorb a low-boiling fuel component, and the first adsorbent has a lower pore volume than the second adsorbent with respect to pores smaller than the effective pores and having higher adsorbability and lower desorbability on butane than the effective pores.

Abstract: An ink containing a first coloring material and a second coloring material, the sum total of these contents being 6.0% by mass or less. The first coloring material is a black coloring material exhibiting a difference ??max1 of 20.0 or more between a maximum absorption wavelength in a 20.0% by mass aqueous solution of 1,2-hexanediol and a maximum absorption wavelength in water, the second coloring material is a specific coloring material exhibiting a difference ??max2 of 12.0 or less between a maximum absorption wavelength in a 20.0% by mass aqueous solution of 1,2-hexanediol and a maximum absorption wavelength in water, and the sum of the ??max1 and the ??max2 is 35.0 or less.

Abstract: An ink composition contains a coloring material, 1,2-pentanediol with a content in the range of more than 0% by mass to less than 20% by mass, and 1,2-hexanediol.

Abstract: An ink set for an aqueous ink jet includes a first ink and a second ink, in which the first ink satisfies requirement 1 and requirement 2 described below: requirement 1: the first ink contains a coloring material, a fluorinated surfactant, and a specific salt, and requirement 2: the difference between the dynamic surface tensions of the first ink at lifetimes of 50 msec and 5000 msec measured by a maximum bubble pressure method at 25° C. is 17 mN/m or more, and the dynamic surface tension of the first ink at a lifetime of 5000 msec is 32 mN/m or less.

Abstract: An ink set for ink jet recording is provided, the ink set containing a first ink which contains a first pigment and a second ink which contains a second pigment, wherein each of the first and second inks contains polyester-modified polydialkylsiloxane.

Abstract: Dry construction pellets that may be made by mixing predetermined portions of two or more components of cementitious materials without ingredients that would allow the mixture to cure, and separating the un-curable mixture of the two or more components into a plurality of pellets, each having substantially the predetermined portions of the two or more components. An extrusion system may include a transport line configured to transport the dry pellets in a gaseous transport stream.

Abstract: A fast hydraulic binder comprising cement, at least one first superplasticizer, a calcium salt, and at least one second superplasticizer different from the first superplasticizer and comprising a main chain and pendant groups connected to the main chain adapted so as to separate from the main chain in a basic medium, wherein the result is that the second plasticizer has a fluidifying action which increases at least temporarily over time in a basic medium.

Abstract: Disclosed is a system or method for efficiently manufacturing construction materials using carbon nanomaterials. In one or more embodiments, the method comprises creating a blend of carbon nanomaterials, wherein the blend of the carbon nanomaterials includes at least one of a carbon nanofiber, a carbon nanotube, a graphite nanoparticle and an amorphous carbon. The method also includes dispersing the carbon nanomaterials and adding a plasticizer and a sand to the dispersed mixture within 3 minutes. The method also includes adding at least one of water and a cement binding agent to the dispersed mixture after the plasticizer and the sand have been added.

Abstract: A graphite crucible for silicon single crystal manufacturing by the Czochralski method, having a long life cycle, contains at least one gas venting hole provided in a corner portion of the crucible. Gas generated by reaction between the graphite crucible and a quartz crucible is released to the outside through the gas venting hole, and formation of SiC on the surface of the graphite crucible and deformation of the quartz crucible caused by the pressure of the generated gas are prevented.

Abstract: Highly-qualified crystals are grown with good yield under an optimal temperature condition by controlling the axial temperature distribution in the vicinity of the seed crystal locally. In an apparatus for producing crystals to grow crystals wherein a seed crystal 14 is placed in a crucible 11 which is retained in a furnace, raw materials 12 filled in the crucible 11 are heated and liquefied, and a raw material 12 slowly cooled in the crucible 11 from below upward, the apparatus including a temperature controller for controlling temperature to cool or heat the vicinity of the seed crystal 14 locally. The temperature controller controls the temperature by a hollow constructed cap 17 mounted outside the portion of crucible 11 and regulates refrigerant flow running through the hollow portion.

Abstract: The geometry of transition from cylindrical to rectangular shape through the conical part in hydride vapor phase epitaxial (HVPE) systems for deposition of III-nitride films is disclosed. It is used to ensure the laminar gas flow inside the growth zone of the system. For the velocity of flow within the atmospheric pressure reactor to be sufficient, the precursors are injected through the narrow diameter tubing injectors. The quartz reactor geometry is introduced to control the transition from jet to laminar flow.

Abstract: In a substrate processing apparatus, a film deposition device and a heat processing device to perform an anneal processing are airtightly connected to a vacuum conveying chamber, and a substrate rotating unit to cause a substrate to rotate around a vertical axis is provided in the vacuum conveying chamber. A control unit is arranged to stop a relative rotation of a plurality of reactive gas supplying units, a separating gas supplying unit and a table by a rotation device in the middle of a film deposition process of the substrate, cause a conveying unit to take out the substrate from a vacuum chamber, and output a control signal that causes a substrate rotating unit to change a direction of the substrate.

Abstract: Provided is a mounting table structure for use in forming a thin film on a surface of a target object mounted on the mounting table structure by using a raw material gas including an organic metal compound in a processing chamber. The mounting table structure includes: a mounting table main body which mounts thereon the target object and has therein a heater; and a base which supports the mounting table main body while surrounding a side surface and a bottom surface of the mounting table main body, the base having therein a coolant path where a coolant flows therethrough and being maintained at a temperature higher than the solidification temperature or the liquefaction temperature of the raw material gas, but lower than the decomposition temperature of the raw material gas.

Abstract: Processing gas is supplied from the central upper part of a processing chamber to a wafer on a mounting board, while the processing chamber is exhausted from processing gas exhaust passages at areas outside of the wafer. In addition, purge gas is supplied from purge gas supply passages to a buffer chamber formed between the peripheral part of a container main body and that of a cover body. The supplied flow-rate of the processing gas is made less than the exhaust flow-rate in the processing gas exhaust passages. Accordingly, the purge gas in the buffer chamber is drawn into the processing chamber via a purge gas supply hole formed of a gap between the container main body and the cover body due to a negative pressure inside the processing chamber caused by a difference between the flow rates.

Abstract: The invention provides methods and compositions for the removal of lignin from water suspensions originating from lignocellulosic feedstocks. The method involves adding coagulants and flocculants to the suspension. While hydrolysis does remove some lignin, the pitch in many feedstocks prevents the hydrolysis from coming into contact with all of the lignin or so effectively blocks it that the lignin can re-condense. This is especially the case with low lignin grass based lignocellulosic feedstock. But with the addition of the inventive coagulants and flocculants, a phase separation substantially accelerates and lignin forms flocs that forms that physically separates the lignin from the pitch and the cellulose thereby makes removal the lignin from aqueous suspensions by decanting and filtration effective and easy.

Abstract: Methods for removing halogen-containing residues from a substrate are provided. By combining the heat-up and plasma abatement steps, the manufacturing throughput can be improved. Further, by appropriately controlling the pressure in the abatement chamber, the removal efficiency can be improved as well.

Abstract: In an embodiment of the disclosed technology, a toothbrush head formed of a bristled tread is rotatable about at least one vertically disposed sprocket. The toothbrush head has an elongated neck with sprockets extending axially therefrom. Bristles are wrapped around either or both sprockets. The bristles may be on a single belt wrapped around both sprockets. Alternatively, the bristles may extend from two spindles, each fitted around a sprocket. The sprockets rotate circumferentially within an upper head portion of the device. The bristles spin 360 degrees (full rotation) around the sprockets and within the stationary head. The head portion itself is replaceable or changeable, such that a handle portion may be used by multiple users or replaced.

Abstract: A method of implementing cleaning solution replacement in a recyclable fluid cleaning system for semiconductor wafers includes activating electrode current for an electrolysis reactor included in the cleaning system. At least one of electrode voltage and operating time for the electrolysis reactor is monitored, until a trigger point has been reached. The trigger point includes one of the electrode voltage reaching a predetermined threshold voltage value, a process time counter reaching a predetermined counter value, and a time value that the electrode voltage has been at the threshold voltage value reaching predetermined value. The process time counter is incremented based on one or more of actual wafer processing time, wafer type, number of wafers processed, and thickness of material to be stripped. Upon reaching the trigger point, the electrode current is deactivated, and at least a portion of cleaning system fluid is drained and replaced with fresh cleaning fluid.

Abstract: A cleaning apparatus for cleaning a semiconductor wafer includes a rotary brush to be positioned to clean the semiconductor wafer, and an optical sensing device associated with the rotary brush to sense a separation distance between a reference position thereon and the semiconductor wafer. An actuator is coupled to the optical sensing device to position the rotary brush based upon the sensed separation distance.

Abstract: A cleaning station that includes a container designed to hold a solvent and having a floor and two pairs of side walls connected to form an enclosure, with a first shelf disposed at a location elevated in relation to the container floor and a second shelf disposed above the first shelf, the second shelf being slidable and being removably provided, there being brushes located in an opening in the first shelf that may be used for cleaning tools and a plurality of additional openings in the first shelf to allow the passage of solvent.

Abstract: A flow rate sensor for a dishwasher includes a container configured for holding an amount of liquid. The container has a known volume corresponding to a vertical activation length, and inlet and a selectively closeable liquid outlet. An upright hollow tube is mounted in the container and has at least one magnetically activated sensor device activatable within the vertical activation length. At least one float is movably mounted to the tube for floating on the liquid. The float includes a magnet therein for activating the sensor device when the float moves the magnet through the vertical activation length. A controller is in electrical communication with the sensor device and includes a timer function. The controller calculates the rate of flow into or out of the container based on the time taken by the float to move through the vertical activation length. Related dishwasher designs are also disclosed.

Abstract: A pressure-relief assembly for adjusting pressure within a washing chamber of a washer. The pressure-relief assembly is composed of a housing having an opened upper end and an internal cavity communicating with a washing chamber of a washer. A valve assembly is moveable relative to the opened upper end of the housing between one of two opened positions and a closed position. The valve assembly has a first plate section dimensioned to overlay and cover the opened end of the housing. The first plate section has an opening extending therethrough. A second plate section is dimensioned to overlay the first plate section, the second plate section being moveable relative to the first plate section between a closed position and an open position.

Abstract: A method of bonding a metal to a substrate involves forming a plurality of nano-features in a surface of the substrate, where each nano-feature is chosen from a nano-pore and/or a nano-crevice. In a molten state, the metal is over-cast onto the substrate surface, and penetrates the nano-features. Upon cooling, the metal is solidified inside the nano-features, where the solidification of the metal forms a mechanical interlock between the over-cast metal and the substrate.

Abstract: A high strength press-formed member includes a steel sheet constituting the member including a composition including by mass %, C: 0.12% to 0.69%, Si: 3.0% or less, Mn: 0.5% to 3.0%, P: 0.1% or less, S: 0.07% or less, Al: 3.0% or less, N: 0.010% or less, Si+Al: at least 0.

Abstract: Provided is a welding metal in which the chemical component composition thereof is appropriately controlled; an A value that is specified by a predetermined relational expression satisfies the requirement of being 3.8% to 9.0%; an X value that is specified by a predetermined relational expression satisfies the requirement of being 0.5% or greater; the area percentage of carbide particles having a circle-equivalent diameter of 0.20 ?m or greater in the welding metal is 4.0% or less; and the number of carbide particles having a circle-equivalent diameter of 1.0 ?m or greater is 1000 particles/mm2 or less. This welding metal, which can exhibit not only high strength but also good low-temperature toughness and good drop-weight characteristics, is useful as a material for a pressure vessel in a nuclear power plant.

Abstract: A gamma prime nickel-base superalloy and components formed therefrom that exhibit improved high-temperature dwell capabilities, including creep and hold time fatigue crack growth behavior. A particular example of a component is a powder metallurgy turbine disk of a gas turbine engine. The gamma-prime nickel-base superalloy contains, by weight, 16.0 to 30.0% cobalt, 11.5 to 15.0% chromium, 4.0 to 6.0% tantalum, 2.0 to 4.0% aluminum, 1.5 to 6.0% titanium, up to 5.0% tungsten, 1.0 to 7.0% molybdenum, up to 3.5% niobium, up to 1.0% hafnium, 0.02 to 0.20% carbon, 0.01 to 0.05% boron, 0.02 to 0.10% zirconium, the balance essentially nickel and impurities, wherein the titanium:aluminum weight ratio is 0.5 to 2.0.

Abstract: A gamma prime nickel-base superalloy and components formed therefrom that exhibit improved high-temperature dwell capabilities, including creep and hold time fatigue crack growth behavior. A particular example of a component is a powder metallurgy turbine disk of a gas turbine engine. The gamma-prime nickel-base superalloy contains, by weight, 18.0 to 30.0% cobalt, 11.4 to 16.0% chromium, up to 6.0% tantalum, 2.5 to 3.5% aluminum, 2.5 to 4.0% titanium, 5.5 to 7.5% molybdenum, up to 2.0% niobium, up to 2.0% hafnium, 0.04 to 0.20% carbon, 0.01 to 0.05% boron, 0.03 to 0.09% zirconium, the balance essentially nickel and impurities, wherein the titanium:aluminum weight ratio is 0.71 to 1.60.

Abstract: After a reducing agent is added to a water reaction system containing silver ions to deposit silver particles by reduction, the silver particles are dried to obtain a silver powder which is heat-treated at a temperature of higher than 100° C. and lower than 400° C. The silver powder thus heat-treated has a maximum coefficient of thermal expansion of not greater than 1.5% at a temperature of 50° C. to 800° C., and has no heating peak when the silver powder is heated from 50° C. to 800° C. The silver powder has an ignition loss of not greater than 1.0% when the silver powder is ignited until the weight of the silver powder is constant at 800° C. The silver powder has a tap density of not less than 2 g/cm3 and a BET specific surface area of not greater than 5 m2/g.

Abstract: There is provided a copper alloy sheet including 1.0 to 3.5 mass % Ni, 0.5 to 2.0 mass % Co, and 0.3 to 1.5 mass % Si, a Co/Ni mass ratio being 0.15 to 1.5, an (Ni+Co)/Si mass ratio being 4 to 7, and a balance being composed of Cu and an unavoidable impurity, wherein in observation results of a crystal grain boundary property and crystal orientation by EBSP measurement, a density of twin boundaries among all crystal grain boundaries is 40% or more and an area ratio of crystal grains with Cube orientation is 20% or more, on a rolled surface.

Abstract: The present invention disclosed a method of producing a three-dimensional porous tissue in-growth structure. The method includes the steps of depositing a first layer of metal powder and scanning the first layer of metal powder with a laser beam to form a portion of a plurality of predetermined unit cells. Depositing at least one additional layer of metal powder onto a previous layer and repeating the step of scanning a laser beam for at least one of the additional layers in order to continuing forming the predetermined unit cells. The method further includes continuing the depositing and scanning steps to form a medical implant.

Abstract: The present invention solves the problem of melting of Al in heating before hot-stamping, which had been a problem in the past in applying hot-stamping to Al-plated steel sheet, and provides Al-plated steel sheet for hot-stamping and a method of hot-stamping using that Al-plated steel sheet to solve the problem of delayed fracture due to residual hydrogen, and, furthermore, a method of a rapid heating hot-stamping using that Al-plated steel sheet. The Al-plated steel sheet of the present invention is produced by annealing the Al-plated steel sheet as coiled in a box-anneal furnace for the time and at the temperature indicated in FIG. 5, and alloying of a plated Al and a steel sheet. Further, a method of rapid heating hot-stamping in the present invention is characterized by cutting out a stamping blank of an Al-plated steel sheet, and heating that blank in heating before hot-stamping by an average temperature with a rising rate of 40° C./sec or more and a time of exposure to an environment of 700° C.

Abstract: During a process of cooling a hypereutectic Al—Si alloy melt, ultrasonic vibration is applied to the melt to crystallize primary crystal ?-Al using, in combination, an ultrasonic transducer (8) that generates the ultrasonic vibration, an ultrasonic horn (7) that is connected to the ultrasonic transducer (8) and transmits the ultrasonic vibration in a specified direction, a treatment vessel (2) that holds the melt and is in contact with the ultrasonic horn (7), and a treatment vessel fixing device (3) that fixes the treatment vessel (2) by pressing the treatment vessel toward the ultrasonic horn (7).

Abstract: One aspect of this method of producing a copper alloy sheet includes: a hot rolling process; a cold rolling process; a recrystallization heat treatment process; and a finish cold rolling process in this order, wherein a hot rolling initiation temperature is 800° C. to 940° C., a cooling rate from a temperature after final rolling or 650° C. to 350° C. is 1° C./second or more, and a cold working rate is 55% or more. In the recrystallization heat treatment process, 550?Tmax?790, 0.04?tm?2, and 460?{Tmax?40×tm?1/2?50×(1?RE/100)1/2}?580 are fulfilled, in which Tmax is the highest arrival temperature, tm (min) is a retention time in a temperature range from a temperature lower than the highest arrival temperature by 50° C. to the highest arrival temperature, and RE (%) is a cold working rate.

Abstract: An energetic composition with controlled detonation having at least a first organic material and a second material, where the second material is a porous material (micro-, meso-, or macroporous), having a pore ratio of at least 10% and preferably greater than 50%, and the first material is, at least partially, infiltrated into the pores of the second material. A mixture containing such a composition, and a method for manufacturing such a composition and such a mixture. Additionally, a method for fragmenting or expanding a microporous material at nanoscale.

Abstract: Described is the use of synthetic adhesives in the manufacture of corrugated fiberboard at relatively low temperatures and high lineal speeds. The corrugated fiberboard includes a corrugated sheet of paper and a flat linerboard and the corrugation of the corrugated sheet of paper is produced at paper temperatures below 95° C. and at a lineal speed above 150 m/min. The production of the corrugation of a corrugated sheet of paper is immediately followed by a continuous operation in which a preferably unheated corrugated board adhesive is applied and the corrugated sheet of paper is adhered to at least one first linerboard. The corrugated board adhesive used is an aqueous adhesive dispersion based on at least one synthetic, dispersed polymer having preferably more than 40% by weight solids content, selected from acrylate copolymers, copolymers of vinylaromatics and conjugated aliphatic dienes and vinyl acetate-alkylene copolymers, wherein the glass transition temperatures of the polymers are above 20° C.

Abstract: A composite sandwich structure comprises a core sandwiched between composite laminate facesheets. The core includes a plurality of core sections spliced together at joints that incorporate integral features for arresting the propagation of irregularities in the facesheets.

Abstract: At least one exemplary embodiment is directed to a pressure management system for an earpiece comprising: a first valve, where the first valve allows air to pass from a first side of the valve to a second side more readily than from the second side to the first side an inflation channel, where the inflation channel has an outer diameter less than 5 mm; a pressure release mechanism; a pump; a stent, where the inflation channel is embedded; and a balloon, where the first valve, the inflation channel, the pressure release mechanism, the pump, and the balloon are operatively connected, where the first valve is positioned so that air from the pump passes through the first valve to inflate the balloon and where the leak rate of the air from the balloon back to the pump is less than 1% by volume per minute and where the pressure release mechanism is configured to release pressure from the balloon to the environment upon actuation, and where the pressure management system is configured to manage the inflation pressur

Abstract: A composite tube is made by applying a mixture of individual reinforcing fibers and a resin onto the interior cylindrical wall of the spinning mandrel.

Abstract: In some embodiments, a method of manufacturing electronic devices including providing a carrier substrate having a first side, a second side, and a first adhesive at the first side; providing a first flexible substrate; and bonding the first flexible substrate to the first side of the carrier substrate. The first adhesive bonds the first flexible substrate to the first side of the carrier substrate. The carrier substrate comprises a mechanism configured to compensate for a deformation of the carrier substrate. Other embodiments are disclosed.

Abstract: Multi-layer printed wiring boards may be produced by: (1) conveying an adhesive sheet from an adhesive sheet roll wherein an adhesive sheet having a prepreg formed on a support film is wound in a roll and placing the adhesive sheet such that a prepreg surface contacts one or both of the surfaces of a circuit board, (2) partially adhering the adhesive sheet to the circuit board by heating and pressing a part of the adhesive sheet from the support film side, and cutting the adhesive sheet according to the size of the circuit board with a cutter, (3) heating and pressing the temporarily fitted adhesive sheet under reduced pressure to laminate the adhesive sheet on the circuit board, (4) forming an insulating layer by thermally curing the prepreg, and (5) detaching the support film after the thermal curing step.

Abstract: A method produces adhesive tapes which are adhesive at least on one side, wherein an adhesive tape web, in which the at least one adhesive side is covered by a first liner, is guided into a cutting device in which a total of N individual adhesive tape strips located next to one another are produced in the machine direction from the adhesive tape web. Every other adhesive tape strip is removed from the first liner and is applied to a second liner in each case having a spacing a between the individual adhesive tape strips. The liners are cut between the adhesive tape strips located on the first liner and on the second liner, and the individual adhesive tapes, together with the liner strips, are wound up in a total of X rolls in a form of an Archimedean spiral.

Abstract: An embodiment of the present invention provides a method for manufacturing a composite preform from tape material, including feeding a tape section into a tape section guide that suspends the tape across a tooling surface, moving at least one of the tape section guide and the tooling surface relative to each other to position the tape section at a desired location and orientation relative to the tooling surface, moving the tape section toward a pre-existing tape section disposed on the tooling surface, and tacking the tape section to the pre-existing tape section. A corresponding apparatus for manufacturing composite preforms is also disclosed.

Abstract: In one aspect, a vacuum drum assembly for use with a labeling apparatus includes apertures for supporting labels on an outer surface using vacuum pressure. The vacuum drum assembly may include air distributors for providing vacuum pressure to selected apertures to accommodate various lengths or widths of labels. The vacuum drum assembly may also be adjustable to vary the spacing between apertures to accommodate various lengths of labels.

Abstract: Drive shafts having helical blades and methods of making are disclosed. In one method a helical auger blade is formed by twisting or sculpting a heated polymer tube which has been placed over a cylindrical drive shaft. In another method a drive shaft is placed within a helical winding and heat is applied to melt polymer which has been coated over one or both of the drive shaft and helical winding.

Abstract: Multilayer articles comprise a thermoformable substrate, a base layer, and an optional transparent protective layer. Methods of making and using the paint film composites, and shaped articles made thereby, are also disclosed.

Abstract: A fabrication method of an electrochromic element includes the steps of: providing a first substrate and a second substrate, the first substrate including a first base layer and a first transparent conductive layer, the second substrate including a second base layer and a lower second transparent conductive layer; forming an ion storage layer on a surface of the upper first transparent conductive layer, and forming an electrochromic layer on a surface of the lower second transparent conductive layer; forming an electrolyte layer on a surface of the electrochromic layer; oppositely facing and combining the ion storage layer and the electrolyte layer in a gradually slantly manner by use of an assistant material disposed on corresponding peripheries of the electrolyte layer and the ion storage layer; and drying the combined electrolyte layer and the ion storage layer for complete manufacture of the electrochromic element as a finished product.

Abstract: A pressure sensitive adhesive composition is described comprising a polyisobutylene polymer having a first functional group and an acrylic polymer having a second functional group present in the acrylic polymer backbone. The first and second functional groups form a hydrogen bond. In some embodiments, the adhesive composition further comprises a crosslinker that covalently crosslinks the second functional group(s) present in the polymer backbone of the acrylic polymer. Also described are adhesive articles, such as a tape, methods of adhesively bonding, and methods of making a pressure sensitive adhesive.

Abstract: A plasma processing apparatus including: a monitor device which monitors a process quantity generated at plasma processing; a monitor value estimation unit which has monitor quantity variation models for storing change of a monitor value of the process quantity in accordance with the number of processed specimens and which estimates a monitor value for a process of a next specimen by referring to the monitor quantity variation models; and a control quantity calculation unit which stores a relation between a control quantity for controlling the process quantity of the vacuum processing device and a monitor value and which calculates the control quantity based on a deviation of the estimated monitor value from a target value to thereby control the process quantity for the process of the next specimen.

Abstract: A direct drive arrangement for controlling pressure volume within a confinement region of a processing chamber of a plasma processing system during substrate processing is provided. The confinement region is a chamber volume surrounded by confinement rings is provided. The arrangement includes plunger assemblies configured for changing the pressure of motor assemblies configured for vertically moving the plunger assemblies, and recording set point position values for the plunger assemblies. The arrangement further includes a set of circuits configured for driving the motor assemblies to move the plunger assemblies to change the pressure volume within the confinement region. The set of circuits is also configured for providing power to the motor assemblies. The set of circuits is further configured for receiving the set point position values from the motor assemblies.

Abstract: For coupling RF power from an RF input of a plasma chamber to the interior of a plasma chamber, an RF bus conductor is connected between the RF input and a plasma chamber electrode. In one embodiment, an RF return bus conductor is connected to an electrically grounded wall of the chamber, and the RF bus conductor and the RF return bus conductor have respective surfaces that are parallel and face each other. In another embodiment, the RF bus conductor has a transverse cross section having a longest dimension oriented perpendicular to the surface of the plasma chamber electrode that is closest to the RF bus conductor.