Abstract: Provided is a set of polarizing plates comprising a front-plate-integrated polarizing plate to be disposed at a viewing side of a liquid crystal cell and a back-side polarizing plate to be disposed at a back-side of the cell. The front-plate-integrated polarizing plate includes a front-side polarizing plate and a front plate having a Young's modulus of 2 GPa or more. An amount of shrinkage observed in the front-side polarizing plate in an absorption axis direction after the front-side polarizing plate is stuck to a glass substrate and heated at 85° C. for 500 hours is taken as X, and an amount of shrinkage observed in the back-side polarizing plate in an absorption axis direction after the back-side polarizing plate is stuck to a glass substrate and heated at 85° C. for 500 hours is taken as Y, the amount of shrinkage X being smaller than the amount of shrinkage Y.

Abstract: A liquid crystal display panel includes: a first polarization layer, a second polarization layer, and a liquid crystal layer located between the two polarization layers. Liquid crystal molecules in the liquid crystal layer are initially aligned along a first direction. At least one first region and at least one second region are defined in the first polarization layer and the second polarization layer. In the first region, the absorption axis of the first polarization layer extends along the first direction while the absorption axis of the second polarization layer is perpendicular to the first direction. In the second region, the absorption axis of the first polarization layer extends along a second direction while the absorption axis of the second polarization layer is perpendicular to the second direction. A first angle formed by the second direction and the first direction is greater than 0 degree but less than 90 degrees.

Abstract: A display panel includes a color filter film, a first polarizing film, and a second polarizing film. The color filter film comprises a color filter region and a light blocking region. The first polarizing film, placed at one side of the color filter film, comprises a first region corresponding to the color filter region of the color filter film and a second region corresponding to the light blocking region of the color filter film. The second polarizing film, placed at the one side of the color filter film, comprises a first region corresponding to the color filter region of the color filter film and a second region corresponding to the light blocking region of the color filter film, wherein a polarization axis of the second region of the second polarizing film and a polarization axis of the second region of the first polarizing film are perpendicular to each other.

Abstract: The present invention discloses an array substrate and a method for preparing the same, and a display device. The array substrate comprises a substrate, and a thin-film transistor and a passivation layer formed on a side of the substrate, and the array substrate is divided into a reflective region and a transmissive region, wherein an insulating layer is formed on the reflective region on a side of the passivation layer that is far from the substrate, and a nanoparticle layer for diffuse reflecting an incident light is formed on a side of the insulating layer that is far from the substrate. Not only the viewing angle of the array substrate is enlarged, but also the performances of the array substrate such as transmittance, contrast and dark-state uniformity are guaranteed, thus the present invention is especially applicable for display devices for large-scale outdoor display.

Abstract: A display device includes a display panel and a backlight unit providing the display panel with light. The backlight unit includes a first light source including a top emitting diode package and second and third light sources arranged in a first direction to allow the first light source to be disposed between the second and third light sources. Each of the second and third light sources includes a side emitting diode package. An optical distance between the top emitting diode package of the first light source and the optical member is greater than optical distances between the optical member and the side emitting diode packages of the second and third light sources.

Abstract: A backlight unit according to an exemplary embodiment of the present disclosure includes: a bottom chassis; a light source disposed on the bottom chassis; a reflective sheet disposed on the bottom chassis; at least one optical sheet disposed above the light source and the reflective sheet; and a supporter fixed to the bottom chassis and supporting the optical sheet. The supporter includes a locking portion fastened to the bottom chassis and a supporting portion extending from the locking portion, and the locking portion is positioned lower than the reflective sheet.

Abstract: A liquid crystal display includes a first display panel and a second display panel facing each other, a driver connecting line disposed on the first display panel, a driving circuit part connected to the driver connecting line, a backlight unit disposed adjacent to the first display panel, a reinforcing part overlapping the driver connecting line and disposed adjacent to at least one side of the second display panel, a second polarizer disposed on the second display panel, and a film layer disposed on the second polarizer and the reinforcing part. The second polarizer overlaps a top surface of the second display panel and does not overlap a top surface of the reinforcing part.

Abstract: A liquid crystal display panel includes a TFT substrate; a backlight system configured to emit light beams in a first color; a color film substrate having at least a first subpixel, a second subpixel, and a third subpixel; a liquid crystal layer; and a polarization system. The first subpixel is configured to let the light beams in the first color pass through and to emit the light beams in the first color. The second subpixel includes a plurality of first quantum dots and a plurality of second quantum dots and is configured to emit light beams in at least a second color based on the light beams in the first color. The third subpixel includes a plurality of third quantum dots and a plurality of fourth quantum dots and is configured to emit light beams in at least a fourth color based on the light beams in the first color.

Abstract: The present disclosure provides a LCD panel. The LCD panel includes a first substrate, a second substrate, a liquid crystal layer sandwiched between the first substrate and the second substrate, a plurality of regions arranged in an array including a first region and a second region, a first organic film on the first substrate, and a second organic film on the second substrate. In the first region, at least one stripe-shaped first electrode is formed having a first configuration direction, the first organic film has a polarization direction in a first direction and the second organic film has a polarization direction perpendicular to the first direction. In the second region, at least one stripe-shaped second electrode is formed having a second configuration direction, the first organic film has a polarization direction in a second direction and the second organic film has a polarization direction perpendicular to the second direction.

Abstract: The present invention provides an array substrate and a liquid crystal display panel using the array substrate. The array substrate includes: a glass substrate (20), a gate terminal (21) formed on the glass substrate (20), a gate insulation layer (22) formed on the gate terminal (21), an oxide semiconductor layer (23) formed on the gate insulation layer (22), an etching stop layer (24) formed on the oxide semiconductor (23), source/drain terminals (25) formed on the gate insulation layer (23), the oxide semiconductor layer (23) and the etching stop layer (24), a protective layer (26) formed on the etching stop layer (24), the source/drain terminals (25), and the gate insulation layer (22), a color filter (27) formed on the protective layer (26), a planarization layer (28) formed on the color filter (27) and the protective layer (26), and a pixel electrode (29) formed on the planarization layer (28). The pixel electrode (29) is electrically connected to the source/drain terminals (25).

Abstract: The present invention provides an array substrate and a liquid crystal display panel using the array substrate. The array substrate includes: a glass substrate (20), source/drain terminals (22) formed on the glass substrate (20), an oxide semiconductor layer (23) formed on the glass substrate (20) and the source/drain terminals (22), a gate insulation layer (24) formed on the glass substrate (20), the source/drain terminals (22), and the oxide semiconductor layer (23), a gate terminal (25) formed on the gate insulation layer (24), a protective layer (26) formed on the gate insulation layer (24) and the gate terminal (25), a color filter (27) formed on the protective layer (26), a planarization layer (28) formed on the protective layer 26 and the color filter (27), and a pixel electrode (29) formed on the planarization layer (28). The pixel electrode (29) is electrically connected to the source/drain terminals (22).

Abstract: Display device, including: substrates, color filters having first and second color filters, drain and gate signal lines (of light blocking material), wherein, an overlapping portion adjacent the first and second color filter overlap, is formed on a region with one of the drain or gate signal lines, a first color filter edge is a first taper and a second color filter edge is a second taper, in the overlapping portion, the first taper is closer to the drain or gate signal line than the second taper in the overlapping portion, the first taper angle is 45° or more and 90° or less corresponding to a surface of the drain or gate signal line, the second taper angle is 45° or more and 90° or less corresponding to a surface of the first taper and, the first taper angle is larger than the second taper angle.

Abstract: In an IPS system liquid crystal display device, scan lines are extended in a first direction and arrayed in a second direction, video signal lines are extended in the second direction and arrayed in the first direction, an orientation axis of an orientation film is oriented in the second direction, the pixel electrode includes a first region including a through-hole for supplying a video signal and second and third regions through which light is transmitted, the second region is inclined at an angle ?, the third region is inclined at an angle ??, each of the second region and the third region is bent at a bending point so as to protrude in the first direction, a protruded part and a recessed part are formed in the vicinity of a boundary between the first and second regions.

Abstract: The displacement between a TFT substrate and a counter substrate and the cut of an alignment film caused by a columnar spacer are prevented. A liquid crystal display device includes: a TFT substrate including a scanning line extending in a first direction, a picture signal line extending in a second direction, a pixel electrode formed in a region surrounded by the scanning line and the picture signal line, and a common electrode formed as opposed to the pixel electrode through an insulating film; a counter substrate disposed as opposed to the TFT substrate and having a spacer; and a liquid crystal sandwiched between the substrates. A common metal interconnection is formed to cover the picture signal line or the scanning line, and stacked on the common electrode. A through hole is formed on the common metal interconnection. The tip end of the spacer is disposed inside the through hole.

Abstract: A liquid crystal display includes: a first substrate; and pixel electrodes disposed on the first substrate, each of the pixel electrodes including: a stem including a first stem and a second stem perpendicularly crossing each other; and a plurality of branch electrodes extending from the stem, wherein one of the first stem of and the second stem of each pixel electrode has a different width corresponding to a location of pixel electrodes on the display.

Abstract: A liquid crystal display includes: a first pixel and a second pixel for displaying different colors, the first pixel and the second pixel each including a first sub-pixel electrode receiving a first voltage; a second sub-pixel electrode receiving a second voltage; an insulating layer disposed between the first sub-pixel electrode and the second sub-pixel electrode; and a common electrode receiving a common voltage. A first portion of the first sub-pixel electrode and a second portion of the second sub-pixel electrode overlap each other, a difference between the first voltage and the common voltage is larger than a difference between the second voltage and the common voltage, and a ratio of the second voltage to the first voltage for the first pixel is different from a ratio of the second voltage to the first voltage for the second pixel.

Abstract: The present invention provides a TFT (Thin-Film Transistor) array substrate structure, which includes a plurality of sub-pixels (4) arranged to correspond to a black matrix (2). Each of the sub-pixels (4) includes a main zone (42) and a sub zone (44). A data line (6) is arranged between the sub-pixels and a gate scan line (8) is arranged between the main zones (42) and the sub zones (44). Pixel electrode trunks (10) are arranged between two sub-pixels (4) and pixel electrode branches (12) are respectively set in the main zones (42) and the sub zones (44) of the two sub-pixels (4). The pixel electrode branches (12) are respectively in electrical connection with the pixel electrode trunks (10).

Abstract: In the technical field of liquid crystal display, a pixel electrode and a liquid crystal display are provided. The pixel electrode comprises a first trunk and a second trunk formed as an elongated linear member, said first trunk and said second trunk being orthogonal to each other, and a plurality of branches each formed as an elongated linear member and extending from the first trunk or the second trunk, wherein an acute angle ? formed between either branch and the first trunk satisfies the following relationship: 0°<?<45° or 45°<?<90°.

Abstract: A display device includes a transistor, a data line, a pixel electrode, a common electrode, and a liquid crystal layer. The data line is connected to a source electrode of the transistor. A geometric radius of curvature associated with the display device is perpendicular to the data line. The pixel electrode is connected to a drain electrode of the transistor and includes a plate electrode. Sides of the plate electrode are oriented at acute angles with respect to the data line in a plan view associated with the display device. The common electrode overlaps the pixel electrode and has a slit. The slit has a first edge and a second edge. The first edge is perpendicular to the data line in the plan view and is longer than the second edge. The liquid crystal layer is positioned between the pixel electrode and the common electrode.

Abstract: A liquid crystal display includes a first substrate and a second substrate opposed to each other with a liquid crystal layer between the first substrate and the second substrate. The first substrate has a plurality of drain signal lines and a plurality of gate signal lines, and a plurality of pixel regions are defined by the drain signal lines and the gate signal lines. Each of the pixel regions includes a first electrode having a plurality of strip-like portions extending in an extension direction of the drain signal lines, the strip-like portions having at least one bent portion so that extension directions of each two parts of the strip-like portions separated by the at least one bent portion are different from each other, and a second electrode formed between the first substrate and the first electrode, and being overlapped with the strip-like portions in plan view.

Abstract: A liquid crystal display includes a first substrate and a second substrate opposed to each other with a liquid crystal layer between the first substrate and the second substrate. The first substrate has a plurality of drain signal lines and a plurality of gate signal lines, and a plurality of pixel regions are defined by the drain signal lines and the gate signal lines. Each of the pixel regions includes a first electrode having a plurality of strip-like portions extending in an extension direction of the drain signal lines, the strip-like portions having at least one bent portion so that extension directions of each two parts of the strip-like portions separated by the at least one bent portion are different from each other, and a second electrode formed between the first substrate and the first electrode, and being overlapped with the strip-like portions in plan view.

Abstract: A first static electricity protection circuit is provided with a first n-type transistor and a first p-type transistor, a second static electricity protection circuit is provided with at least one of a second n-type transistor and a second p-type transistor, a source is connected with a gate in these transistors, a gate of the first n-type transistor is electrically connected with a low potential power wiring VSS, a drain of the first n-type transistor is electrically connected with a signal wiring SL, a gate of the first p-type transistor is electrically connected with a high potential power wiring VDD, a drain of the first p-type transistor is electrically connected with the signal wiring SL, and a drain of at least one of the second n-type transistor and the second p-type transistor is electrically connected with the low potential power wiring VSS or the high potential power wiring VDD.

Abstract: A display panel is provided. The display panel includes a first substrate, a first insulating layer, a common electrode, a second insulating layer, a first pixel electrode, and a second pixel electrode. The first insulating layer is located on the first substrate. The common electrode having a first through hole is located on the first insulating layer. The second insulating layer covers the common electrode and partially covers the first through hole. The first pixel electrode is located on the second insulating layer and penetrates through the first through hole. The second pixel electrode is located on the second insulating layer. The second pixel electrode is adjacent to the first pixel electrode and overlaps a portion of the first through hole.

Abstract: The present invention provides a TFT array substrate structure, which includes first and second gates (11, 13), a semiconductor layer (20), first and second sources (31, 33), and first and second drains (42, 44). The first gate (11) and the first drain (42) are arranged to overlap in space so as to form a first overlapping zone (D). The second gate (13) and the second drain (44) are arranged to overlap in space so as to form a second overlapping zone (E). The first gate (11) has a first edge (113) corresponding to the first overlapping zone (D). The second gate (13) has a second edge (133) corresponding to the second overlapping zone (E). The first edge (113) and the first drain (42) intersect in space in an inclined manner. The second edge (133) and the second drain (44) intersect in space in an inclined manner.

Abstract: This invention discloses a liquid crystal display panel and an array substrate. The liquid crystal display device comprises a first substrate, a second substrate, a liquid crystal layer sandwiched between the first substrate and the second substrate. There are a plurality of scan lines and data lines on the first substrate. The liquid crystal display panel are divided into multiple pixel areas by the scan lines and data lines. The area of the main pixel area is getting larger and the area of the sub-pixel area is getting smaller from a edge to a center of the liquid crystal display panel, and voltage applied on the sub-pixel area when displaying is smaller than the main pixel area. This design enhances the brightness uniformity of the liquid crystal display panel and eliminate the whiting issues in the side edges.

Abstract: A display device includes a plurality of pixels, and each of the plurality of pixels includes: a first sub-pixel including a transistor connected to a gate line and a data line that intersect with each other and are insulated from each other and a first liquid crystal capacitor connected to the transistor. A second sub-pixel includes a first capacitor that is connected to the first liquid crystal capacitor and a second liquid crystal capacitor that is connected to the first capacitor; a resistor that is connected to the first capacitor; and a second capacitor that is connected to the resistor.

Abstract: A first transistor, a second transistor, a third transistor, a fourth transistor are provided. In the first transistor, a first terminal is electrically connected to a first wiring; a second terminal is electrically connected to a gate terminal of the second transistor; a gate terminal is electrically connected to a fifth wiring. In the second transistor, a first terminal is electrically connected to a third wiring; a second terminal is electrically connected to a sixth wiring. In the third transistor, a first terminal is electrically connected to a second wiring; a second terminal is electrically connected to the gate terminal of the second transistor; a gate terminal is electrically connected to a fourth wiring. In the fourth transistor, a first terminal is electrically connected to the second wiring; a second terminal is electrically connected to the sixth wiring; a gate terminal is connected to the fourth wiring.

Abstract: A display panel includes a display layer and two electrophoresis layers; the display layer is located between the two electrophoresis layers; the display layer has two display surfaces; each of the two electrophoresis layers comprises a plurality of electrophoresis units, and states of the electrophoresis units include transparent state and non-transparent state. The display panel can implement single-side display, two-side display and completely-transparent display and has a simple structure, thereby leading to a reduced thickness.

Abstract: Provided is an electrophoresis display apparatus in which light is unlikely to be reflected by a partition wall part and which realizes high contrast. An electrophoresis display apparatus 1 is provided with a first base member 8 on which a semiconductor elements 9c are arranged, a second base member 16 facing the first base member 8, and partition walls 5 that are positioned between the first base member 8 and the second base member 16 and partition pixel regions 6, and has a reflection reduction film 7 that reduces light reflection in a location facing the partition walls 5, as viewed from a second base member 16 side.

Abstract: An imaging apparatus includes an optical path forming member which includes at least one exterior wall surrounding an imaging optical system and defines an optical path inside the exterior wall; a through-portion which extends through the exterior wall of the optical path forming member; a lid member which covers the through-portion from the outside of the optical path forming member; and a plurality of light shield walls provided on one of the optical path forming member and the lid member, wherein the plurality of light shield walls are intermittently arranged in a direction along an optical axis of the imaging optical system so that the through-portion includes a plurality of internal spaces which are respectively positioned between the light shield walls.

Abstract: A projection device is disposable into a display platform of a display rack having a plurality of display platforms, for directly projecting an image frame onto a projection screen of the display platform. The image frame projected to the projection screen is not reflected by any reflective mirror arranged between the projection device and the projection screen. A length of the image frame in a first direction is equal to at least ten times a length of the image frame in a second direction. Since no reflective mirror is arranged between the projection device and the projection screen, the projection device is more easily applicable to display racks.

Abstract: A rear-projection display device comprises a mobile light source supplying a light beam of at least one wavelength, a holographic mirror reflecting only said at least one wavelength, an absorbent screen and a transmissive diffuser, the absorbent screen being placed on the rear face of the holographic mirror, the elements being arranged such that the beam from the light source is reflected on the holographic mirror in order to sweep the surface of the transmissive diffuser.

Abstract: Provided is a fluorescent wheel for a projector capable of suppressing the heating of the phosphor layer and a light emitting device for a projector using the same. The fluorescent wheel for a projector includes: a phosphor layer (12); an annular ceramic substrate (11) which includes a first principal surface provided with the phosphor layer (12) and a second principal surface located on an opposite side to the first principal surface and has a higher thermal conductivity than the phosphor layer (12); and a reflective layer (13) provided on the second principal surface of the ceramic substrate (11).

Abstract: The light source apparatus of the present disclosure includes a solid-state light source, a dichroic mirror for reflecting blue excitation light emitted from the solid-state light source, a phase difference plate for receiving the excitation light reflected on the dichroic mirror, a fluorescent plate having a fluorescent region irradiated with the excitation light, which is reflected on the dichroic mirror and transmitted through the phase difference plate, to emit fluorescent light and a reflection region for reflecting the excitation light, and a plurality of condenser lenses that are disposed between the phase difference plate and the fluorescent plate and condense the excitation light and the fluorescent light. Among the plurality of condenser lenses, the condenser lens closest to the fluorescent plate is made of a glass material having a linear expansion coefficient of 32.5×10?7 or less.

Abstract: This invention relates to a structure for fixing phase effects on EUV mask which contains a repeating pattern with an assist feature, or a pattern with two different sized features in close proximity. The EUV mask with the repeating pattern is capable of printing a group of trenches on a photoresist layer. The invention also relates to a method of fabricating an EUV mask for fixing phase effects. The EUV mask contains an absorber layer over the multilayer reflector, and the absorber layer is patterned to form a mask pattern which contains absorptive regions and reflective regions. The absorber is in the absorptive regions, and a phase shifter is deposited at least in the whole reflective regions of the mask pattern to a thickness capable of correcting phase effects. The phase shifter has an index of refraction value is about equal to or less than that of the absorber. The thickness of the phase shifter is determined by simulation.

Abstract: A reflective mask blank capable of facilitating the discovery of contaminants, scratches and other critical defects by inhibiting the detection of pseudo defects attributable to surface roughness of a substrate or film in a defect inspection using a highly sensitive defect inspection apparatus. The reflective mask blank has a mask blank multilayer film comprising a multilayer reflective film, obtained by alternately laminating a high refractive index layer and a low refractive index layer, and an absorber film on a main surface of a mask blank substrate, wherein, in the relationship between bearing area (%) and bearing depth (nm) as measured with an atomic force microscope for a 1 ?m×1 ?m region of the surface of the reflective mask blank on which the mask blank multilayer film is formed, the surface of the reflective mask blank satisfies the relationship of (BA70?BA30)/(BD70?BD30)?60(%/nm) and maximum height (Rmax)?4.5 nm.

Abstract: Photomask blanks are provided. One of the photomask blanks includes a light transmission substrate, a light blocking layer disposed on a top surface of the light transmission substrate, and a heat radiation layer disposed on sidewalls and a bottom surface of the light transmission substrate. Related photomasks and fabrication methods of the photomasks are also provided.

Abstract: A reticle is provided. The reticle comprises a substrate having at least a first region and a second region; and an organic layer aligned in certain directions by an irradiation of a polarized UV light formed on a surface of the substrate. Wherein the organic layer in the first region has a first polarization direction; the organic layer in the second region has a second polarization direction; and the first polarization direction and the second polarization direction have a predetermined angle.

Abstract: Methods and tools for repairing a semiconductor mask are provided. The method includes steps of positioning the semiconductor mask within a repair chamber including a repair tool, supplying a first gas and a second gas into the repair chamber. The first gas includes a repair material for repairing a defect on the mask, and the second gas includes a polar gas and assists deposition of the repair material on the semiconductor mask. The method further includes steps of activating the repair tool such that the repair tool interacts with the first and second gases to deposit the repair material at the site of the defect to repair the semiconductor mask and removing the repaired semiconductor mask from the repair chamber. A dimension of the deposited repair material is less than about 32 nanometers.

Abstract: The present invention relates to the substrates with UV-patternable hard-coating (UPHC) with, either on top or below the transparent conductive materials such as transparent conductive oxides (TCO), conductive polymers, carbon or metal based nanomaterials and nanocomposites, the process for its preparation and articles that comprise said substrates.

Abstract: A polymer for resist use is obtainable from a hemiacetal compound having formula (1a) wherein R1 is H, CH3 or CF3, R2 to R4 each are H or a monovalent hydrocarbon group, X1 is a divalent hydrocarbon group, ZZ designates a non-aromatic mono- or polycyclic ring of 4 to 20 carbon atoms having a hemiacetal structure, k1=0 or 1, and k2=0 to 3. A resist composition comprising the polymer displays controlled acid diffusion and low roughness during both positive and negative tone developments.

Abstract: Embodiments in accordance with the present invention encompass negative-tone, solvent developable, self-imageable polymer compositions containing photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays.

Abstract: Embodiments in accordance with the present invention encompass self-imageable polymer compositions containing a variety of photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays. The compositions of this invention can be tailored to form positive tone or negative tone images depending upon the intended application in aqueous developable medium. The images formed therefrom exhibit improved properties including low wafer stress and better thermo-mechanical properties, among other property enhancements.

Abstract: An anti-reflective coating (ARC) composition for use in lithography patterning and a method of using the same is disclosed. In an embodiment, the ARC composition comprises a polymer having a chromophore; an acid labile group (ALG), more than 5% by weight; a thermal acid generator; and an optional crosslinker. The method includes applying the ARC composition over a substrate; crosslinking the polymer to form an ARC layer; cleaving the ALG of the ARC layer to reduce a film density of the ARC layer; forming a resist layer over the ARC layer, patterning the resist layer, and etching the ARC layer. Due to reduced film density, the ARC layer has a high etching rate, thereby preserving the critical dimension (CD) of the resist pattern during the etching process.

Abstract: A patternable layer is formed over a substrate. A photo-sensitive layer is formed over the patternable layer. The photo-sensitive layer contains an additive. The additive contains at least a floating control chemical and a volume control chemical. A spin drying or a baking process is performed to the photo-sensitive layer. The floating control chemical causes the additive to rise upward during the spin drying or baking process. Thereafter, as a part of an extreme ultraviolet (EUV) lithography process, the photo-sensitive layer is exposed. One or more outgassing chemicals are generated inside the photo-sensitive layer during the exposing. The volume control chemical is sufficiently voluminous and dense to trap the outgassing chemicals inside the photo-sensitive layer.

Abstract: To provide a coating composition which exhibits excellent followability to a difference in level in its application, and which is capable of forming a coating layer having a low refractive index in a short-wavelength region and exhibiting excellent solubility to an alkaline aqueous solution. A coating composition comprising a solvent and a fluorinated polymer (A) which has a unit represented by —[CX1X2—CY(—Rf—COOM)]— and has a number average molecular weight of from 1,000 to 7,500. X1 and X2 are each independently a hydrogen atom, a fluorine atom or a chlorine atom; Y is a hydrogen atom, a fluorine atom, a chlorine atom, a methyl group or a trifluoromethyl group; Rf is a branched perfluoroalkylene group which may contain an etheric oxygen atom between carbon-carbon atoms, or a branched oxyperfluoroalkylene group which may contain an etheric oxygen atom between carbon-carbon atoms; and M is a hydrogen atom or an ammonium ion which may be substituted.

Abstract: A novel resist underlayer film formation composition for lithography includes: a polymer having a structure of Formula (1) at a terminal of a polymer chain; a cross-linking agent; a compound promoting a cross-linking reaction; and an organic solvent: (where R1, R2, and R3 are each independently a hydrogen atom, a linear or branched C1-13 alkyl group, a halogeno group, or a hydroxy group; at least one of R1, R2, and R3 is the alkyl group; Ar is a benzene ring, a naphthalene ring, or an anthracene ring; two carbonyl groups are bonded to respective two adjacent carbon atoms of Ar; and X is a linear or branched C1-6 alkyl group optionally having a C1-3 alkoxy group as a substituent).

Abstract: A resist film structure is provided, which allows a resist layer to have improved photosensitivity to EUV or electron beams without changing the photosensitivity of the resist material itself. A metal layer 1 with a thickness as small as a nanometer level is provided on a resist polymer layer 2 formed on a substrate 3. When the resist layer in this structure is exposed to light, the metal layer 1 produces a surface plasmon effect to enhance the irradiation to the resist film, so that the photosensitivity of the resist film is improved.

Abstract: Methods of forming patterns includes guide patterns on a neutral layer. A self-assembling block copolymer (BCP) layer on the guide patterns and the neutral layer. By annealing the self-assembling BCP layer, first polymer block domains and second polymer block domains are formed The guide patterns are formed of a developable antireflective material. The neutral layer is formed of a cross-linked polymeric material.

Abstract: This invention relates to a method of obtaining optimal focus for exposing a photoresist in an EUV lithography with an EUV mask containing a pattern with an assist feature. The invention also relates to an EUV mask with a special focus test target for monitoring focus in EUV lithography, and a method of fabricating this EUV mask by designing the special focus test target. The EUV mask contains a repeating pattern, wherein the repeating pattern has two different pitches, i.e. a first pitch and a second pitch, and contains an assist feature between main features. Because the two different pitches have different focus offsets, the difference between linewidths of said gratings provides a calibration curve which is a measure of focus. The method for monitoring focus is performing an EUV exposure using a focus position with a pre-determined focus position as calibrated using the linewidth difference between the two gratings.