Patents Issued in September 27, 2016
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Patent number: 9454045Abstract: According to an exemplary embodiment of the present invention, a liquid crystal display includes: a first substrate; a first subpixel electrode disposed on the first substrate, supplied with a first voltage and including a first sub region and a second sub region; a second subpixel electrode disposed on the first substrate and supplied with a second voltage; an insulating layer disposed on the first sub region of the first subpixel electrode and disposed beneath the second subpixel electrode and the second sub region of the first subpixel electrode; a second substrate facing the first substrate; and a common electrode disposed on the second substrate, in which a first region in which the first subpixel electrode is formed includes four distinct areas having different characteristics.Type: GrantFiled: October 23, 2014Date of Patent: September 27, 2016Assignee: Samsung Display Co., Ltd.Inventors: Min Ju Han, Su Jeong Kim, Dan Bi Yang, Ji Phyo Hong
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Patent number: 9454046Abstract: The present disclosure provides a liquid crystal panel and a method for manufacturing the same. The liquid crystal display panel includes: first and second substrates disposed opposite to each other; a liquid crystal layer including a plurality of liquid crystal molecules and disposed between the first and second substrates; first and second alignment layers disposed on the first and second substrates and facing the liquid crystal layer; and first and second electrode both disposed on the first substrate, so that an electric field is formed between the first and second electrodes when a voltage is applied to the first and second electrodes. The first electrode has a plurality of slits, each of which has an end region and a central region adjacent to the end region, and the alignment layers at the end region and the central region have different alignment directions.Type: GrantFiled: October 23, 2014Date of Patent: September 27, 2016Assignees: Shanghai Tianma Micro-Electronics Co., Ltd., Tianma Micro-Electronics Co., Ltd.Inventor: Zhaokeng Cao
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Patent number: 9454047Abstract: A liquid crystal display panel includes an upper substrate and a lower substrate arranged opposite to each other, a liquid crystal layer disposed between the upper and lower substrates, a first electrode on the upper substrate facing the lower substrate side, and a second electrode and a third electrode on the lower substrate facing the upper substrate and electrically insulated from each other. The first, second and third electrodes are connected respectively to first, second and third voltages. When the first voltage is opposite in polarity to the second voltage and the second voltage is identical in polarity to the third voltage, the liquid crystal display panel is in a first display state. When the first voltage is identical in polarity to the third voltage and the second voltage is opposite in polarity to the third voltage, the liquid crystal display panel is in a second display state.Type: GrantFiled: April 7, 2015Date of Patent: September 27, 2016Assignees: SHANGHAI AVIC OPTOELECTRONICS CO., LTD., TIANMA MICRO-ELECTRONICS CO., LTD.Inventors: Kerui Xi, Tingting Cui
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Patent number: 9454048Abstract: A horizontal electric field mode liquid crystal display device having a novel electrode structure, and a manufacturing method thereof are provided. The liquid crystal display device includes a first substrate having an insulating surface; a first conductive film and a second conductive film over the insulating surface; a first insulating film over the first conductive film; a second insulating film over the second conductive film; a second substrate facing the first substrate; and a liquid crystal layer positioned between the first substrate and the second substrate. Part of the first conductive film exists also on a side portion of the first insulating film, and part of the second conductive film exists also on a side portion of the second insulating film. The liquid crystal layer includes liquid crystal exhibiting a blue phase.Type: GrantFiled: March 9, 2012Date of Patent: September 27, 2016Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.Inventors: Hidekazu Miyairi, Tetsuji Ishitani, Daisuke Kubota, Shinya Sasagawa
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Patent number: 9454049Abstract: In an amorphous silicon thin film transistor-liquid crystal display device and a method of manufacturing the same, gate patterns including a gate line and a gate electrode are formed on an insulation substrate having a display region and a driving circuit region on which a plurality of shift resistors are formed. A gate insulating film, active layer patterns and data patterns including source/drain electrodes are formed successively on the substrate. A passivation layer on the substrate has a first contact hole exposing a drain electrode of the display region and second and third contact holes respectively exposing a gate electrode and source/drain electrode of a first transistor of each of the shift resistors.Type: GrantFiled: December 24, 2013Date of Patent: September 27, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventor: Dong-Gyu Kim
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Patent number: 9454050Abstract: LCD device includes two substrates, a first and second color filters, two liquid crystal layers. The first color filters are formed on portions of the second substrate corresponding to border area The second color filters are formed on portions of the second substrate corresponding to the display area except the border area. A first liquid crystal layer between the first and the second substrate is comprised in border area, and a zero electric field is formed on the first liquid crystal layer so as to completely transmit light incident into the first liquid crystal layer therethrough. A borderline having various colors can be displayed by forming various patterns of color filters having various colors on portions of the second substrate corresponding to the border area under normally white mode, thereby producing picture frame effect while images are displayed on the screen.Type: GrantFiled: January 30, 2015Date of Patent: September 27, 2016Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Yong-Ho Yang, Dong-Ho Lee, Soong-Yong Joo
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Patent number: 9454051Abstract: A display panel is provided, which comprises a plurality of the pixel units. Each of the pixel units comprises a main pixel portion having a first thin film transistor and a sub-pixel portion having a second thin film transistor, wherein a second distance is unequal to a first distance. Insulation layers of the two pixel portions are designed to be different thicknesses, so that a color cast problem from a large viewing angle is solved, so as to improve the watching effect, and lower the production cost.Type: GrantFiled: August 6, 2014Date of Patent: September 27, 2016Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.Inventor: Li Chai
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Patent number: 9454052Abstract: Disclosed are an in-cell touch liquid crystal display (LCD) apparatus having a pixel electrode top structure and a method of manufacturing the same. The in-cell touch LCD apparatus is implemented in the pixel electrode top structure, thereby preventing color mixing between red, green, and blue pixels. The method of manufacturing the in-cell touch LCD apparatus decreases the number of masks necessary to manufacture a TFT array substrate, thereby reducing a manufacturing time and the manufacturing cost.Type: GrantFiled: November 5, 2015Date of Patent: September 27, 2016Assignee: LG DISPLAY CO., LTD.Inventors: Ji Ho Nam, Yoon Hwan Woo
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Patent number: 9454053Abstract: Thin-film devices, for example electrochromic devices for windows, and methods of manufacturing are described. Particular focus is given to methods of patterning optical devices. Various edge deletion and isolation scribes are performed, for example, to ensure the optical device has appropriate isolation from any edge defects. Methods described herein apply to any thin-film device having one or more material layers sandwiched between two thin film electrical conductor layers. The described methods create novel optical device configurations.Type: GrantFiled: December 10, 2012Date of Patent: September 27, 2016Assignee: View, Inc.Inventors: Fabian Strong, Yashraj Bhatnagar, Abhishek Anant Dixit, Todd Martin, Robert T. Rozbicki
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Patent number: 9454054Abstract: A system for filling a variable reflectance vehicular electro-optic element assembly (such as for a rearview mirror assembly) includes a front substrate, a rear substrate and a perimeter seal disposed between the front and rear substrates. The perimeter seal spaces the front and rear substrates apart and forms an interpane cavity therebetween. The perimeter seal has a gap between terminal ends of the perimeter seal to provide a fill port for the mirror reflective element assembly when the front and rear substrates are mated together. The fill port allows an electro-optic medium to flow therethrough during the filling process. During the filling process, the front and rear substrates are fixtured in a chamber with the fill port disposed at an upper portion of the front and rear substrates, with the filling process being one of (i) a gravity feed filling process and (ii) a pressurized filling process.Type: GrantFiled: November 7, 2014Date of Patent: September 27, 2016Assignee: MAGNA MIRRORS OF AMERICA, INC.Inventors: Hamid Habibi, Michael L. Gallas
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Patent number: 9454055Abstract: Controllers for providing functions for windows capable of undergoing reversible optical transitions. In some cases, the controllers have multiple features that can sense and adapt to local environmental conditions. The controllers can be integrated with a building management system (BMS) to greatly enhance the BMS's effectiveness at managing local environments in a building. For example, controllers may control one or more functions such as powering a smart window, determining the percent transmittance, size, and/or temperature of a smart window, providing wireless communication between the controller and a separate communication node, etc.Type: GrantFiled: March 16, 2011Date of Patent: September 27, 2016Assignee: View, Inc.Inventors: Stephen C. Brown, Dhairya Shrivastava, David Walter Groechel, Anshu Pradhan, Gordon Jack, Disha Mehtani, Robert T. Rozbicki
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Patent number: 9454056Abstract: Controllers and control methods apply a drive voltage to bus bars of a thin film optically switchable device. The applied drive voltage is provided at a level that drives a transition over the entire surface of the optically switchable device but does not damage or degrade the device. This applied voltage produces an effective voltage at all locations on the face of the device that is within a bracketed range. The upper bound of this range is associated with a voltage safely below the level at which the device may experience damage or degradation impacting its performance in the short term or the long term. At the lower boundary of this range is an effective voltage at which the transition between optical states of the device occurs relatively rapidly. The level of voltage applied between the bus bars is significantly greater than the maximum value of the effective voltage within the bracketed range.Type: GrantFiled: August 10, 2015Date of Patent: September 27, 2016Assignee: View, Inc.Inventors: Anshu A. Pradhan, Disha Mehtani, Gordon Jack
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Patent number: 9454057Abstract: An electrophoretic display (EPD) including a plurality of first electrodes, a plurality of second electrodes, and a plurality of pixel units is provided. The first electrodes are arranged in parallel and configured to receive a plurality of first electrode driving signals. The second electrodes are arranged in parallel and disposed perpendicular to the first electrodes, and the second electrodes are configured to receive a plurality of second electrode scanning signals. The pixel units are respectively arranged between the first electrodes and the second electrodes as an array. Each pixel unit includes a first capacitor and a second capacitor. The first terminal of the first capacitor is coupled to the corresponding first electrode. The first terminal of the second capacitor is coupled to the second terminal of the first capacitor, and the second terminal of the second capacitor is coupled to the corresponding second electrode.Type: GrantFiled: October 15, 2012Date of Patent: September 27, 2016Assignee: SiPix Technology Inc.Inventors: Yan-Liang Wu, Chi-Mao Hung, Wei-Min Sun, Pei-Lin Tien, Chih-Yuan Hsu
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Patent number: 9454058Abstract: Embodiments of the present invention provide a color electrophoretic display panel and a fabricating method thereof, and a display device provided with the color electrophoretic display panel. The color electrophoretic display panel comprises: a plurality of pixel units each of which comprises more than two different colors of electrophoretic particles, and the threshold voltages driving the different colors of electrophoretic particles are different.Type: GrantFiled: December 5, 2013Date of Patent: September 27, 2016Assignee: BOE TECHNOLOGY GROUP CO., LTD.Inventor: Mingchao Li
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Patent number: 9454059Abstract: The present invention includes a linear driver for Mach-Zehnder modulator (MZM) configured in a differential form with two waveguides carrying two traveling waves. Each waveguide comprises a MZM material configured with either a single segment in 3×MZM length or two split segments with one in 2×MZM length and another one in either 1× or 2×MZM length. By coupling a DC current source supplied with a modulation voltage with each segment thereof for providing electrical modulation signal overlapping with each of the two traveling waves. The modulated traveling waves in the two waveguides then are combined in one output signal by a multimode interference coupler. By properly choosing the configuration of MZM linear segments with optional length ratios, a low power consumption MZM linear driver provides either NRZ or PAM-4 modulation scheme to the input optical signals for telecommunication through silicon photonics.Type: GrantFiled: August 28, 2014Date of Patent: September 27, 2016Assignee: INPHI CORPORATIONInventor: Radhakrishnan L. Nagarajan
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Patent number: 9454060Abstract: A mode locked semiconductor disk laser with an output beam having an ultra-short pulse length which provides the incident beam to a non linear microscope. The wavelength of the beam is at or near the action cross section maximum absorption wavelength for creating two photon excited fluorescence of a fluorescent biological marker in a sample. Semiconductor disk lasers combine excellent beam quality and output power, stability while maintaining simplicity and easiness of operation. In addition, these types of lasers are ideally suited for mass production as they are built in wafer-scale technology enabling a high level of integration. Importantly this non expensive, turn-key, compact laser system could be used as a platform to develop portable non-linear bio-imaging devices for clinical studies, facilitating its wide-spread adoption in “real-life” applications.Type: GrantFiled: September 19, 2011Date of Patent: September 27, 2016Assignee: The University of DundeeInventors: Craig Hamilton, Graeme Malcolm, Ursula Keller, Thomas Sudmeyer, Kurt Weingarten, Pablo Loza-Alvarez, Yohan Barbarin, Edik Rafailov
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Patent number: 9454061Abstract: A technique relates to frequency conversion. A mechanical resonator is configured to oscillate at a mechanical resonance frequency with a displacement in an axis. An optical resonator includes a first mirror opposite a second mirror in which an optical cavity is formed between. The first mirror is fixed to the mechanical resonator such that the first mirror is moved to change an optical length of the optical cavity according to the displacement of the mechanical resonator. Changing the optical length changes an optical resonance frequency of the optical resonator. A microwave resonator is positioned to move according to the displacement of the mechanical resonator such that moving the mechanical resonator changes a Josephson inductance of the microwave resonator, thereby changing a microwave resonance frequency of the microwave resonator.Type: GrantFiled: December 17, 2015Date of Patent: September 27, 2016Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Baleegh Abdo, Jared B. Hertzberg
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Patent number: 9454062Abstract: An observation optical system for observing an object includes, in order from the object side: a first lens having positive refractive power; a second lens having negative refractive power and a concave surface facing the object side; and a third lens having positive refractive power and a convex surface facing an eyepoint side. An aspherical surface is included on at least one lens surface, and given conditional expressions are satisfied, thereby providing a compact observation optical system having excellent optical performance, a viewfinder equipped with the observation optical system, and a method for manufacturing the observation optical system.Type: GrantFiled: September 20, 2011Date of Patent: September 27, 2016Assignee: Nikon CorporationInventor: Taku Matsuo
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Patent number: 9454063Abstract: A camera system includes a camera and a camera housing structured to at least partially enclose the camera. The camera comprises an internal heat sink thermally coupled to electronics of the camera and a lens ring positioned around a lens of the camera. The camera housing comprises a thermal conductor. An interior portion of the thermal conductor makes contact with the lens ring when the camera is enclosed within the housing, and an exterior portion extends outside the housing. The thermal conductor is configured to transfer heat from the interior of the housing to the exterior to dissipate heat from the camera's electronics.Type: GrantFiled: March 20, 2015Date of Patent: September 27, 2016Assignee: GoPro, Inc.Inventors: Rudy Samuels, David Christophe Northway
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Patent number: 9454064Abstract: One embodiment provides a motorized monopole for a camera, including: a monopole; an offset arrangement attached to the monopole; a camera mount; the offset arrangement rotating with respect to the monopole; the offset arrangement terminating in a connection attaching the camera mount; and a first motor imparting tilt movement to the camera mount with respect to the connection. Other aspects are described and claimed.Type: GrantFiled: February 4, 2014Date of Patent: September 27, 2016Assignee: Disney Enterprises, Inc.Inventors: Vincent H. Roberts, Kenneth D. Salter, Anthony M. Accardo, Miquel Angel Farre Guiu, Gunter Niemeyer
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Patent number: 9454065Abstract: A device support and trigger apparatus includes a handle, a frame member attached to the handle, a cage member, and a triggering assembly including a trigger section and an actuation section. The cage member rigidly or pivotally connected to the frame member accommodates a device. The cage member can be rigidly positioned in an upright position or can be pivotally rotated to position the device in an upright position or an inverted position. The trigger section is pulled using one hand to allow the actuation section to contact and actuate an activation button of the device positioned in the upright position in front of the handle. A push rod assembly of the device support and trigger apparatus is pushed using one hand to push the trigger section to allow the actuation section to contact and actuate the activation button of the device positioned in the inverted position above the handle.Type: GrantFiled: April 28, 2015Date of Patent: September 27, 2016Assignee: KNEKT INDUSTRIES LTDInventors: Benjamin Bodi Orton, Harry Reed Antipala, Kyle Christopher Maligro
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Patent number: 9454066Abstract: A multi-lens system can be configured to be selectively attachable to a mobile electronic device having a user-facing onboard camera lens and an outward-facing onboard camera lens. The multi-lens system can attach to the mobile electronic device in at least a first position and a second position. The first lens component in the first position is configured to be in optical alignment with the user-facing onboard camera lens and simultaneously the second lens component is configured to be in optical alignment with the outward-facing onboard camera lens. The first lens component in the second position is configured to be in optical alignment with the outward-facing onboard camera lens and simultaneously the second lens component is configured to be in optical alignment with the user-facing onboard camera lens. A portable attachment accessory can be configured to be selectively attachable to a lens system that is configured to receive a portion of a mobile electronic device.Type: GrantFiled: June 18, 2015Date of Patent: September 27, 2016Assignee: olloclip, LLCInventors: Patrick D. O'Neill, Chong Pak, Joshua Cantor, Jason Patrick, Daniel Arato, Ryan Nguyen, Robert O'Neill
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Patent number: 9454067Abstract: There are disclosed a laser projector configured to project an image to a back side of a screen and to detect a touch input, comprising a light source configured to irradiate at least one of red, green and blue lights, an infrared light emitting device configured to emit an infrared light to the screen, a light synthesis system configured to synthesize image information comprising color information for each pixel with the light irradiated from the light source so as to emit the synthesized light, a scanner configured to project the synthesized light toward the screen for each pixel, a detector configured to detect an infrared light reflected by an object approaching the screen, and a controller configured to control operations of the light source, the infrared light emitting device and the scanner and to recognize touch input based on the information detected by the detector, such that the laser projector that may perform the projection of the image to the screen and the touch recognition simultaneously may bType: GrantFiled: October 21, 2013Date of Patent: September 27, 2016Assignee: LG Electronics Inc.Inventors: Chanyoung Yoon, Jaewook Kwon
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Patent number: 9454068Abstract: A projection-type image display apparatus includes a light source unit that emits light, an image generating unit that generates image light according to an input video signal, a light-guide optical system that guides the light from the light source unit to the image generating unit, and a projection optical system that projects the image light generated by the image generating unit. The light source unit includes a light source that produces light, phosphor that is excited by the light from the light source, and a dichroic mirror that directs the light from the light source to the phosphor. The dichroic mirror is arranged with an incident angle of the light from the light source being 50° or more and 60° or less.Type: GrantFiled: October 6, 2015Date of Patent: September 27, 2016Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventor: Takaaki Tanaka
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Patent number: 9454069Abstract: In at least one embodiment of the disclosure, an illumination system includes a light source that emits an illumination light flux. A first lens array has a plurality of first small lenses arranged therein. The first small lenses divide the illumination light flux emitted from the light source into a plurality of segmental light fluxes. A second lens array has a plurality of second small lenses arranged therein. The second small lenses have a one-to-one correspondence with the first small lenses and are configured to receive the segmental light fluxes exiting from the first small lenses. At least some of the second small lenses each include a plurality of lens elements disposed in a surface direction that is the same as the second small lenses. A superimposing lens superimposes on an illuminated area the segmental light fluxes exiting from the plurality of second small lenses.Type: GrantFiled: December 15, 2014Date of Patent: September 27, 2016Assignee: Seiko Epson CorporationInventors: Katsumi Tanaka, Osamu Fujimaki
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Patent number: 9454070Abstract: In a projection optical system that projects an image displayed on an image display device arranged on a reduction-side conjugate plane onto a magnification-side conjugate plane, as a magnified image, the projection optical system includes a refractive optical system and a reflective optical system having negative refractive power in this order from a reduction side. Further, the following conditional formula (1) is satisfied: L/D+2?min/?max?1.01??(1).Type: GrantFiled: September 17, 2014Date of Patent: September 27, 2016Assignee: FUJIFILM CorporationInventors: Tomoyuki Baba, Masanao Kawana, Masaru Amano, Takeshi Kamiya
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Patent number: 9454071Abstract: A projection screen includes a substrate and an optical microstructure. The substrate has a projection area for projecting an image onto the projection area. The projection area includes a plurality of arrayed optical regions. Each of the optical regions includes a first and second optical sub-region with optical characteristics of reflective scattering/transmissive scattering/specular reflection and simple transmission, wherein an area of the second optical sub-region is larger than that of the first optical sub-region. The optical microstructure is arranged on the substrate for guiding the light of the image to a specific direction. The above-mentioned projection screen with two or more optical characteristics, for example, can be at the same time as the front projection screen and the rear projection screen, or allows the user to watch background image behind the projection screen. A projection system including the above-mentioned projection screen is also disclosed.Type: GrantFiled: July 14, 2014Date of Patent: September 27, 2016Assignee: NATIONAL TSING HUA UNIVERSITYInventor: Cheng-Huan Chen
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Patent number: 9454072Abstract: A segmented mask includes a set of cell structures, wherein each cell structure includes a set of features having an unresolvable segmentation pitch along a first direction, wherein the unresolvable segmentation pitch along the first direction is smaller than the illumination of the lithography printing tool, wherein the plurality of cell structures have a pitch along a second direction perpendicular to the first direction, wherein the unresolvable segmentation pitch is suitable for generating a printed pattern for shifting the best focus position of the lithography tool by a selected amount to achieve a selected level of focus sensitivity.Type: GrantFiled: November 7, 2013Date of Patent: September 27, 2016Assignee: KLA-Tencor CorporationInventors: Vladimir Levinski, Yoel Feler, Daniel Kandel
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Patent number: 9454073Abstract: A photomask blank and/or photomask includes a light transmitting substrate, a highly reflective material layer disposed on the light transmitting substrate, and a transfer pattern layer disposed on the highly reflective material layer. The highly reflective material layer reflects light to be transmitted through the light transmitting substrate, with a predetermined reflectivity.Type: GrantFiled: November 21, 2014Date of Patent: September 27, 2016Assignee: SK HYNIX INC.Inventor: Tae Joong Ha
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Patent number: 9454074Abstract: Reflective photomask blanks are provided. The reflective photomask blank includes a multi-layered reflection layer on a photomask substrate, a capping layer directly disposed on a top surface of the multi-layered reflection layer to include transition metal and silicon, a passivation layer disposed on a surface of the capping layer opposite to the multi-layered reflection layer, and a light absorption layer on the passivation layer.Type: GrantFiled: June 18, 2014Date of Patent: September 27, 2016Assignee: Samsung Electronics Co., Ltd.Inventors: Hwan-seok Seo, Su-young Lee
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Patent number: 9454076Abstract: The present invention provides a class of molecular glass photoresist (I and II) comprising bisphenol A as a main structure and their preparation. The molecular glass photoresist is formulated with a photoacid generator, a cross-linking agent, a photoresist solvent, and other additives into a positive or negative photoresist. A photoresist with a uniform thickness is formed on a silicon wafer by spin-coating. The photoresist formulation can be used in modern lithography, such as 248 nm photolithography, 193 nm photolithography, extreme-ultraviolet (EUV) lithography, nanoimprint lithography, electron beam lithography, and particularly in the EUV-lithography technique.Type: GrantFiled: May 18, 2012Date of Patent: September 27, 2016Assignee: INSTITUTE OF CHEMISTRY, CHINESE ACADEMY OF SCIENCESInventors: Guoqiang Yang, Jian Xu, Li Chen, Shuangqing Wang, Shayu Li
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Patent number: 9454077Abstract: Compounds and methods for controlling the surface properties are described. Compounds of the invention can form radicals upon exposure to irradiation, which can then react with nearby molecules to alter the surface properties of various substrates. The invention can provide surfaces that are resistant to dewetting, surfaces that have immobilized molecules such as carbohydrates and polymers immobilized, and surfaces that have metals deposited on the surface. The invention can be utilized in a wide range of application, such as sensors, microreactors, microarrays, electroless deposition of metals, and the like.Type: GrantFiled: January 5, 2015Date of Patent: September 27, 2016Assignee: THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORKInventors: Gregory T. Carroll, Jeffrey T. Koberstein, Denong Wang, Nicholas J. Turro
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Patent number: 9454078Abstract: The present invention provides a positive-type photosensitive resin composition capable of obtaining a cured film which exhibits low warpage, and is also excellent in high sensitivity and high resolution during firing at a lower temperature of 250° C. or lower.Type: GrantFiled: September 11, 2013Date of Patent: September 27, 2016Assignee: TORAY INDUSTRIES, INC.Inventors: Hiroyuki Onishi, Yuki Masuda, Masao Tomikawa
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Patent number: 9454079Abstract: According to one embodiment, there is provided an actinic ray- or radiation-sensitive resin composition including (A) a compound represented by a general formula (1) below that generates an acid when exposed to actinic rays or radiation, and (B) a resin.Type: GrantFiled: May 7, 2014Date of Patent: September 27, 2016Assignee: FUJIFILM CorporationInventors: Akinori Shibuya, Yoko Tokugawa, Tomoki Matsuda, Junichi Ito, Shohei Kataoka, Toshiaki Fukuhara, Naohiro Tango, Kaoru Iwato, Masahiro Yoshidome, Shinichi Sugiyama
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Patent number: 9454080Abstract: A spin treatment apparatus according to an embodiment performs a treatment while rotating a substrate and includes: at least three clamp pins configured to contact an outer peripheral surface of the substrate and clamp the substrate; rotatable pin rotators provided for the respective clamp pins and each configured to retain the corresponding clamp pin at a position offset from a rotation axis of the pin rotator parallel with a rotation axis of the substrate; magnet gears provided for the respective pin rotators around outer peripheral surfaces thereof and each having a magnetic-pole part formed spirally about the rotation axis of the pin rotator; rotation magnets provided for the respective magnet gears and positioned to attract and be attracted by the magnetic-pole part of the corresponding magnet gear; and a movement mechanism configured to move the rotation magnets along the rotation axes of the pin rotators.Type: GrantFiled: September 19, 2014Date of Patent: September 27, 2016Assignee: SHIBAURA MECHATRONICS CORPORATIONInventor: Masaaki Furuya
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Patent number: 9454081Abstract: Disclosed is a method and apparatus for mitigation of photoresist line pattern collapse in a photolithography process by applying a gap-fill material treatment after the post-development line pattern rinse step. The gap-fill material dries into a solid layer filling the inter-line spaces of the line pattern, thereby preventing line pattern collapse due to capillary forces during the post-rinse line pattern drying step. Once dried, the gap-fill material is depolymerized, volatilized, and removed from the line pattern by heating, illumination with ultraviolet light, by application of a catalyst chemistry, or by plasma etching.Type: GrantFiled: July 3, 2014Date of Patent: September 27, 2016Assignee: Tokyo Electron LimitedInventors: Mark H Somervell, Benjamen M Rathsack, Ian J Brown, Steven Scheer, Joshua S Hooge
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Patent number: 9454082Abstract: Anionic surfactants have a formula: RfSO2N(H)—CH2CH(CH3)OH; or RfSO2N(H)—CH2CH2O)xH, where x is an integer from 2-6. Rf is a fluoroalkyl group having 3 to 8 carbon atoms. Neutral surfactants having a formula: (a) Rf—SO2N[CH2CH(CH3)OH]2; (b) RfSO2N[CH2CH(CH3)OH][(CH2CH2O)nH], where n is an integer from 1-6; (c) RfSO2N(R)[(CH2CH2O)pH], where p is an integer from 2-6, and R is an alkyl group having 1 to 4 carbon atoms; or (d) RfSO2N[(CH2CH2O)qH][(CH2CH2O)mH], where q is an integer from 1-6 and m is an integer from 3-6. Rf is a fluoroalkyl group having 3 to 8 carbon atoms.Type: GrantFiled: January 9, 2014Date of Patent: September 27, 2016Assignee: 3M INNOVATIVE PROPERTIES COMPANYInventors: William M Lamanna, Patricia M. Savu, Jason M Kehren
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Patent number: 9454084Abstract: A method to determine the usefulness of an alignment mark of a first pattern in transferring a second pattern to a substrate relative to the first pattern already present on the substrate includes measuring the position of the alignment mark, modeling the position of the alignment mark, determining the model error between measured and modeled position, measuring a corresponding overlay error between first and second pattern and comparing the model error with the overlay error to determine the usefulness of the alignment mark. Subsequently this information can be used when processing next substrates thereby improving the overlay for these substrates. A lithographic apparatus and/or overlay measurement system may be operated in accordance with the method.Type: GrantFiled: April 23, 2013Date of Patent: September 27, 2016Assignee: ASML NETHERLANDS B.V.Inventors: Irina Lyulina, Franciscus Godefridus Casper Bijnen, Remi Daniel Marie Edart, Antoine Gaston Marie Kiers, Michael Kubis
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Patent number: 9454085Abstract: An illumination system of a microlithographic projection exposure apparatus includes a spatial light modulator which varies an intensity distribution in a pupil surface. The modulator includes an array of mirrors that reflect impinging projection light into directions that depend on control signals applied to the mirrors. A prism, which directs the projection light towards the spatial light modulator, has a double pass surface on which the projection light impinges twice, namely a first time when leaving the prism and before it is reflected by the mirrors, and a second time when entering the prism and after it has been reflected by the mirrors. A pupil perturbation suppressing mechanism is provided that reduces reflections of projection light when it impinges the first time on the double pass surface, and/or prevents that light portions being a result of such reflections contribute to the intensity distribution in the pupil surface.Type: GrantFiled: June 18, 2015Date of Patent: September 27, 2016Assignee: Carl Zeiss SMT GmbHInventors: Markus Deguenther, Damian Fiolka, Gerhard-Wilhelm Ziegler
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Patent number: 9454086Abstract: A method of programmable photolithography includes positioning (910) a programmable photomask in proximity to a photoresist layer on a sample. The programmable photomask is illuminated (920) with a plurality of different wavelengths of light simultaneously to expose the photoresist layer in a predetermined pattern. The programmable photomask is separated (930) from the photoresist layer and the photoresist layer is developed (940) to create the predetermined pattern in the photoresist layer.Type: GrantFiled: October 15, 2012Date of Patent: September 27, 2016Assignee: University of Utah Research FoundationInventor: Rajesh Menon
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Patent number: 9454087Abstract: The present invention provides an exposure apparatus which includes a projection optical system that projects a pattern of a reticle onto a substrate, and exposes the substrate through the projection optical system and a liquid, the apparatus including a recovery unit which includes a recovery path connected to a recovery port, and is configured to reduce a pressure in the recovery path to recover the liquid, supplied to a space between the projection optical system and the substrate, through the recovery port and the recovery path, and a heating unit which is disposed in the recovery path, and configured to heat the liquid recovered through the recovery port and the recovery path.Type: GrantFiled: April 16, 2013Date of Patent: September 27, 2016Assignee: CANON KABUSHIKI KAISHAInventors: Kenichi Kobayashi, Takahito Chibana, Hitoshi Nakano
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Patent number: 9454088Abstract: An immersion liquid is provided comprising an ion-forming component, e.g. an acid or a base, which has a relatively high vapor pressure. Also provided are lithography processes and lithography systems using the immersion liquid.Type: GrantFiled: October 16, 2015Date of Patent: September 27, 2016Assignee: ASML NETHERLANDS B.V.Inventors: Hans Jansen, Marco Koert Stavenga, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen, Anthonie Kuijper
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Patent number: 9454089Abstract: A table for a lithographic apparatus, the table having a catchment opening formed in an upper surface of the table, the catchment opening in fluid communication through the table with the environment of the table at a drain opening in a surface of the table other than the upper surface.Type: GrantFiled: February 19, 2016Date of Patent: September 27, 2016Assignee: ASML NETHERLANDS B.V.Inventors: Nicolaas Ten Kate, Raymond Wilhelmus Louis Lafarre
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Patent number: 9454090Abstract: Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.Type: GrantFiled: August 28, 2012Date of Patent: September 27, 2016Assignee: Micron Technology, Inc.Inventors: Hongqian Sun, Jianming Zhou, Volodymyr Temchenko
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Patent number: 9454091Abstract: A hydrazone derivative of triphenylamine is represented by general formula (1). In general formula (1), R1 and R2 each represent, independently of one another, at least one chemical group selected from the group consisting of a halogen atom, an optionally substituted alkyl group having a carbon number of at least 1 and no greater than 6, an optionally substituted alkoxy group having a carbon number of at least 1 and no greater than 6, and an optionally substituted aryl group having a carbon number of at least 6 and no greater than 12. In general formula (1), m and n each represent, independently of one another, an integer of at least 0 and no greater than 4. In general formula (1), 1 represents 0 or 1.Type: GrantFiled: June 15, 2015Date of Patent: September 27, 2016Assignee: KYOCERA Document Solutions Inc.Inventors: Hideki Okada, Kensuke Kojima, Fumio Sugai
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Patent number: 9454092Abstract: An object of the invention is to provide an electrophotographic photoreceptor in which the adhesion of the photosensitive layer is highly satisfactorily maintained regardless of the magnitude of shrinkage, and both of excellent electrical properties and excellent image characteristics are achieved. The present invention relates to an electrophotographic photoreceptor comprising: a conductive support; and, provided thereon, at least an undercoat layer and a photosensitive layer, wherein the undercoat layer comprises a binder resin and the binder resin comprises a polyamide resin which has a degree of elastic deformation of 56.0% or higher.Type: GrantFiled: December 22, 2014Date of Patent: September 27, 2016Assignee: MITSUBISHI CHEMICAL CORPORATIONInventors: Daisuke Yamazaki, Aiko Harada, Kazutaka Ida
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Patent number: 9454093Abstract: Disclosed is a method for producing a polymerized toner, wherein the method comprises: a suspension step of obtaining a suspension in which droplets of a first-stage polymerizable monomer composition containing at least a first-stage polymerizable monomer and a colorant are dispersed, by suspending the first-stage polymerizable monomer composition in an aqueous dispersion medium containing a dispersion stabilizer; a first-stage polymerization step of carrying out suspension polymerization by using the suspension, in the presence of a polymerization initiator; and a second-stage polymerization step of carrying out suspension polymerization by further adding a second-stage polymerizable monomer satisfying the following formula (1), when a polymerization conversion rate in the first-stage polymerization step becomes 20 to 80%: Tg1>Tg2.Type: GrantFiled: January 24, 2014Date of Patent: September 27, 2016Assignee: ZEON CORPORATIONInventors: Hisashi Kurokawa, Akihide Hagino, Hiroyuki Taguchi
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Patent number: 9454094Abstract: Provided is a magnetic toner, including a toner particle containing a binder resin and a magnetic iron oxide particle, in which: the binder resin includes a resin having a polyester unit in which at least one kind of aliphatic compound selected from the group consisting of an aliphatic monocarboxylic acid having 30 to 102 carbon atoms and an aliphatic monoalcohol having 30 to 102 carbon atoms is condensed at an end of the polyester unit; a content of the magnetic iron oxide particle is from 30 to 80 parts by mass with respect to 100 parts by mass of the binder resin; and the magnetic iron oxide particle satisfies the following conditions: (i) a number-based median diameter D50 is from 0.05 to 0.15 ?m; (ii) a number-based ratio D10/D50 is from 0.40 to 1.00; and (iii) a number-based ratio D90/D50 is from 1.00 to 1.50.Type: GrantFiled: April 20, 2015Date of Patent: September 27, 2016Assignee: CANON KABUSHIKI KAISHAInventors: Daisuke Tsujimoto, Yoshihiro Ogawa, Toru Takahashi, Wakashi Iida
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Patent number: 9454095Abstract: An electrophotographic toner includes capsule toner particles that each include an anionic toner core having a zeta potential at pH 4 of no greater than ?5 mV and a cationic shell layer disposed over a surface of the toner core. Each of the capsule toner particles has, at a surface thereof, a sodium concentration of no less than 200 ppm and no greater than 1,000 ppm as measured by an ICP spectrometer.Type: GrantFiled: December 22, 2014Date of Patent: September 27, 2016Assignee: KYOCERA Document Solutions Inc.Inventor: Hidetoshi Miyamoto
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Patent number: 9454096Abstract: A magnetic toner contains magnetic toner particles containing a binder resin and a magnetic body, and inorganic fine particles present on the surface of the magnetic toner particles, wherein the inorganic fine particles present on the surface of the magnetic toner particles contain metal oxide fine particles, the metal oxide fine particles containing silica fine particles, and optionally containing titania fine particles and alumina fine particles, and a content of the silica fine particles being at least 85 mass % with respect to a total mass of the silica fine particles, the titania fine particles and the alumina fine particles, when a coverage ratio A (%) is a coverage ratio of the magnetic toner particles' surface by the inorganic fine particles and a coverage ratio B (%) is a coverage ratio of the magnetic toner particles' surface by the inorganic fine particles that are fixed to the magnetic toner particles' surface, the magnetic toner has a coverage ratio A and a coverage ratio B/coverage ratio A in prType: GrantFiled: December 26, 2012Date of Patent: September 27, 2016Assignee: CANON KABUSHIKI KAISHAInventors: Yusuke Hasegawa, Tadashi Dojo, Michihisa Magome