Abstract: Spherical particles of one or more elemental metals and elemental carbon are prepared from a precursor in the form of a metal oleate. The metal oleate precursor is dispersed in a liquid vehicle and aerosol droplets of the dispersed precursor are formed in a stream of an inert gas. The aerosol droplets are heated in the stream to decompose the oleate ligand portion of the precursor and form spherical particles that have a mesoporous nanocrystalline structure. The open mesopores of the spherical particles provide a high surface area for contact with fluids in many applications. For example, the mesopores can be infiltrated with a hydrogen absorbing material, such as magnesium hydride, in order to increase the hydrogen storage capacity of the particles.

Abstract: A quick-change system for a tool holder comprises a machine-side receiving fixture having a hollow-cylindrical extension on which a switching sleeve is displaceably held. Automatic angular alignment of the tool holder upon introduction into the hollow-cylindrical extension of the receiving fixture is enabled by an alignment of the points of the star-shaped end face on the cylindrical holding portion of the tool holder, upon impact against a first set of three balls angularly spaced 120° apart. Once the tool holder has aligned itself in this way, then the first balls make their way into the longitudinal grooves of the cylindrical holding portion, whereby a rotationally fixed coupling is achieved. Upon the further insertion into the hollow-cylindrical extension, an axial securement finally occurs when a second set of three balls are displaced radially inward into associated depressions on the cylindrical holding portion.

Abstract: A position controlling device for a carpenter angle drill/hollow chisel mortiser has a mounting group, a positioning group, and a retaining arm. The mounting group has two crossbars and a bridge bar. The bridge bar is connected to the crossbars. The positioning group is connected to the mounting group, and has two limiting blocks, a holding frame, and a circuit breaker. The limiting blocks are connected to the bridge bar between the crossbars. The holding frame is securely connected to one of the limiting blocks. The circuit breaker is mounted in the holding frame and has a contacting slice and an electric wire. The contacting slice is elastically connected to the circuit breaker, and transversally extends out of the holding frame. The retaining arm selectively abuts the contacting slice of the circuit breaker to enable the circuit breaker at a turn-off condition.

Abstract: A magnetized material is affixed to an exterior of a drill housing of a portable power drill or a battery pack used for providing power to the portable power drill. The magnetized material is employed to retain magnetic objects. The magnetized material can be provided in a planar sheet or upon a three-dimensionally shaped form. In a sheet configuration, the magnetized object retention panel is defined by a magnetized surface and an opposite, attachment surface. A series of grooves can be formed within the magnetized material enabling conformation of the sheet to a non-planar surface on the drill or battery pack. The three-dimensionally shaped form can be provided as a channel having at least one channel sidewall extending generally perpendicular from an edge of a channel basewall terminating at a base surface. Inclusion of a pair of sidewalls provides a planar supporting surface for standing the drill upright.

Abstract: A double eccentric positioning apparatus uses two equal offset eccentric bushings to accurately position a tool in two dimensions. Miniature servo motors and precise gearing control the rotation of each eccentric bushing, which controls the direction of the offset vectors. The offset vectors are used to determine the final position of the drill bushing. The desired rotation angles can be mathematically calculated based on desired position. The inner eccentric bushing is located concentric to the offset of the outer eccentric bushing. This allows any position, within a radius of two times the eccentric offset, to be achieved. The use of worm gearing on the eccentric bushings prevents back-driving of the servo motors, due to the lead angle of the worm gears, and the friction between the worm wheel and worm gear.

Abstract: A bolt on drive assembly for a core drill which utilizes an improved high strength spoked reinforcer mounted beneath a disc. The disc and high strength spoke reinforcer are removably mounted on the tube by bolt fasteners. A drive connection is removably mounted and centrally located on a outer disc of the pair of discs. The drive connection is adapted to connect with a drive shaft to cause rotation of the tube. The system can also include a split in the disc when the high strength spoked reinforcer is not welded thereto thereby providing a means of water control. The high strength spoked reinforcer can be a separate piece that is bolted to the disc or can be integrally formed as one piece therewith. An adapter is provided that allows for standard drilling that fits into a recess in the center hub and is removable to expose the recess for attachment to a specialized drill motor, such as an A-flange.

Abstract: A rotating cutting tool configured to rotate around an axis of rotation in a rotary direction, and a support pad for such a tool is disclosed. The support pad defines a central longitudinal axis and has a first longitudinal edge side, an opposite second longitudinal edge side, a first transversal edge side and an opposite second transversal edge side. The support pad includes a first support surface, which is convexly curved as viewed in a plane perpendicular to the central longitudinal axis and a first recess, which extends into the first support surface in a direction from the first longitudinal edge side towards the second longitudinal edge side. The first recess extends to a final position on the first support surface.

Abstract: A vacuum drilling system and methods is provided that may utilize both a through tool coolant supply as well as a central vacuum extraction system. The system may include a cutting head provided on a hollow tube and a vacuum source to apply vacuum pressure to the area of the cutting head via one or more chip inlets arranged proximate to the cutting head. Sealed coolant containment channels supply coolant to the area of the cutting head.

Abstract: A workpiece machining method that machines a workpiece surface by moving a rotating tool, which has a cutting blade for interrupted cutting of the workpiece surface, relative to the workpiece comprises: a first process of determining the pattern of arrangement of multiple cavities on the surface of the workpiece formed after cutting by the cutting blade; and a second process of determining the tool path of the rotating tool so that the multiple cavities are disposed on the surface of the workpiece according to the pattern of arrangement determined in the first process.

Abstract: A milling tool has single sided and indexable milling inserts having a round basic shape. Each milling insert has a plurality of tangentially spaced-apart and alternately usable cutting edges, which individually fall archedly from a first end, situated closest to an upper reference plane, to a lowest point, from which it again rises toward a second end. A reinforcing chamfer surface included in the cutting edge is formed with an increasing width in a direction from the first end of the cutting edge toward the second end.

Abstract: A cutting tool and a cutting insert, each of which including a base surface and an anti-slip arrangement adjacent thereto. Each anti-slip arrangement includes an actuator surface and non-parallel first and second abutment surfaces, and the actuator surface of the cutting tool is a surface of a clamp of the cutting tool. The cutting insert is mounted on the cutting tool via engagement of the base surfaces thereof and the clamp is operable to bias the actuator surfaces against each other and thereby force the first and second abutment surfaces against each other, for preventing slippage of the cutting insert along the tool's base surface.

Abstract: A rotary cutting apparatus includes a pair of cutting tools each having a cutting blade along a tip end of its outer peripheral portion having a mountain-shaped cross section, and cuts a cylindrical material into pieces with a predetermined width by sandwiching the cylindrical material between the cutting blades so the cutting blades are respectively placed on inner and outer peripheries of the cylindrical material, and relatively rotating and moving the pair of cutting tools along an entire circumference of the cylindrical material. A second imaginary line connecting an axial center of the cylindrical material and an axial center of the inner peripheral-side cutting tool is shifted in a circumferential direction of the cylindrical material about the axial center of the cylindrical material with respect to a first imaginary line connecting the axial center of the cylindrical material and an axial center of the outer peripheral-side cutting tool.

Abstract: A device used for cutting a pipe from an inside. The device has a spindle arranged to be rotated. The device further has protrusions fastened to the spindle and arranged to position the device or a part of the device inside the pipe. The protrusions have at least one blade arranged to machine material off the inner surface of the pipe to cut the pipe while the spindle is being rotated.

Abstract: A jigsaw includes a motor, a rod having a blade attached thereto, a power transmission portion that converts rotation transmitted from the motor to vertical movement of the rod to vertically move the blade, and a counterweight that moves vertically in a direction of the vertical movement of the rod outside a range of the vertical, movement of the rod and the blade. At least a part of the counterweight is disposed so as to cross an extended line of a trajectory of the vertical movement of the rod. The counterweight moves vertically independently of the vertical movement of the rod which is produced by the power transmission portion.

Abstract: A portable working machine includes a working machine body, bolt members erected on the working machine body, a cover member configured to be attachable to and detachable from the working machine body, in which the cover member has through-holes through which the bolt members are inserted when attaching the cover member, fixing members configured to be fastened to the bolt members to fix the cover member attached to the working machine body, and a holding member attached to an outer surface of the cover member with a predetermined gap space between the holding member and the outer surface of the cover member, in which the holding member is configured to retain the fixing members on an outer side of the outer surface of the cover member when a fastening of the fixing members to the bolt members is released to prevent the fixing members from dropping off the cover member.

Abstract: In one embodiment, a method for forming a pair of aligned holes is provided. The method comprises determining a diameter of a cleanup hole associated with a plurality of misaligned holes, in which the cleanup hole diameter may also correspond to a fastener diameter. Additionally, a tapered reamer is at least partially inserted into a gap defined by the plurality of misaligned holes. The tapered reamer has a longitudinal axis and may be configured such that the longitudinal axis aligns with a center of the cleanup hole when the tapered reamer is inserted into the gap defined by the plurality of misaligned holes. The plurality of misaligned holes may then be reamed with the tapered reamer to form the cleanup hole defined by the plurality of aligned holes having a same center and a same diameter.

Abstract: The present disclosure relates to a gear cutting machine for gear cutting a workpiece, in particular a toothed wheel, by form milling having at least one cutter head for mounting at least one end mill, wherein the cutter head or the end mill and/or the workpiece mount are adjustable and the end mill axis can be aligned approximately parallel to the machined tooth flank of the clamped workpiece, and wherein the cutter axis can be applied to the flank contour and the end mill has an outer contour corresponding to the flank contour.

Abstract: Method and apparatus for lapping gears which includes an active torque system to substantially improve the lapping process with respect to run-out and other longer-term motion transmission errors without compromising tooth-to-tooth performance. Motion transmission error measurements provide the basis for calculating a corrective active torque component which is combined with conventional process torque to reduce or eliminate part run-out.

Abstract: A gap detection apparatus for determining in real time the gap required for electrochemical machining gap includes a tooling electrode, a plurality of tool adjusting electrodes, a feedback circuit, a processing feed mechanism for controlling the tooling electrode, a three-dimensional driving mechanism, and an automatic control and measurement system. The tooling electrode includes a plurality of through-holes for receiving tool adjusting electrodes. The three-dimensional driving mechanism is mounted upon the processing feed mechanism, which includes a Z-coordinate feeding portion having a thimble for the feeding of the tool adjusting electrodes. The automatic control and measurement system controls the feed of the processing feed mechanism and the three-dimensional driving mechanism, and establishes the required gap for electrochemical machining.

Abstract: Apparatuses and methods are provided for manufacturing bearing assemblies. In accordance with one embodiment, a fixture is provided for use in brazing bearing elements to a bearing ring. The fixture comprises a substantially annular body and at least one or more force-applying mechanism associated with the annular body. The force applying mechanisms include a push rod disposed within a channel that is formed in the annular body, the push rod being displaceable within the channel. A biasing member is configured to bias the push rod in a radial direction relative to the annular body. In one embodiment, a plurality of force-applying mechanisms are circumferentially spaced about the substantially annular body. In one embodiment, the push rods extend radially inwardly from a peripheral surface of the body, while in another embodiment the push rods extend radially outwardly from peripheral surface of the body.

Abstract: A method of applying solder includes providing a first roller and a second roller, where at least one of the first and second rollers has an outer surface comprising a solder wicking material. A metallic article is provided, the metallic article having a first side and a second side, and having an opening extending from the first side to the second side. The metallic article is dipped in solder, where the dipping forms an initial coating of solder on the metallic article. After the dipping, the metallic article is fed between the first and second rollers. The wicking material removes solder from the metallic article, such that a solder thickness of the initial coating on the metallic article is reduced after exiting the first and second rollers.

Abstract: A weld travel speed sensing system includes at least one sound sensor configured to sense a sound generated to allow determination of a position of a welding torch. The weld travel speed sensing system is configured to determine a position of a point on the welding torch based on the sensed sound.

Abstract: The subject innovation relates to starting and stopping an engine of an engine driven welder based on parameters related to the welder and parameters related to an environment in which the welder operates. In an embodiment, a method for managing a welder engine of an engine driven welder includes continuously monitoring welder parameters related to the engine driven welder, continuously monitoring environmental parameters influencing the welder engine, continuously calculating a restart value based at least in part on the engine parameters and the environmental parameters, continuously monitoring activity related to the engine to maintain an activity history, and stopping the engine based at least in part on the activity history and the restart value being outside a running range. Systems include components for accomplishing such aspects.

Abstract: A hybrid welder having a motor-driven welder assembly including a motor; an energy storage device electrically connected to the motor-driven assembly; a heat transfer assembly, the heat transfer assembly being in thermal communication with the motor and the energy storage device, wherein the heat transfer assembly is selectively adaptive to transfer heat from the motor to the energy storage device.

Abstract: A welding system for welding small precious metal firing tips to spark plug electrodes, such as ground and/or center electrodes. According to one embodiment, the welding system includes a firing tip storage assembly and a firing tip welding assembly, where the firing tip storage assembly uses pressurized gas introduced at the bottom of a part container to float or lift the firing tips so that the firing tip welding assembly can more easily acquire them with a vacuum-driven nozzle that also doubles as a welding electrode. The firing tip welding assembly is mounted to a robotic apparatus that can index or move the firing tip welding assembly between the firing tip storage assembly, a welding station and/or any other suitable positions.

Abstract: A method for welding tubes in a shell and tube heat exchanger, including forming ring-shaped tube sheet grooves on the tube sheet at the shell side, inserting tube joint members into the tube insertion holes of the tube sheet, producing ring wires by cutting a welding wire into pieces and bending the pieces into a ring shape, affixing the ring wire to the outer circumference of one end of the tube, inserting the end of the tube into the tube sheet such that the end of the tube contacts one end of the tube joint member and is located within the recessed distance range of the tube sheet groove, and performing shell side welding by inserting a welding torch into the tube joint member and welding the end of the tube joint member, the end of the tube and the joint part to the tube sheet at the shell side using the ring wire as filler metal.

Abstract: A spot welding apparatus according to is provided that includes an upper and lower moving unit, an upper welding gun, a left and right moving unit and a lower welding gun. In particular, the upper and lower moving unit includes a slide block that is provided at one side of an arm of a robot to move vertically by actuation of an actuator. The upper welding gun is mounted on the slide block and the left and right moving unit is installed at one side of the upper welding gun to horizontally move the upper welding gun by actuation of the actuator. Additionally, the lower welding gun is mounted to correspond to a lower side of the upper welding gun.

Abstract: A welding assembly includes a sonotrode, cleaning station, and controller. The controller periodically commands clamping of the sonotrode onto the cleaning block, and a transmission of ultrasonic energy into the cleaning block for a calibrated duration sufficient for removing residual amounts of metal from welding pads of the sonotrode. The cleaning block may include an aluminum bar coated with a polymeric material, e.g., porous polyethylene silica or alumina composite. A thin sacrificial layer of an anti-adhesion material, e.g., colloidal silica, may be periodically applied to the welding pads, particularly after a transition from welding a first metal to welding a second metal. The sacrificial layer may be applied via a sponge, a saturated surface, or spraying.

Abstract: A method for friction stir welding two components, with a rotating tool that comprises a rotating or non-rotating shoulder surface for subjecting the components to a process force in the region of a joining zone, and with a stirring pin for stirring plasticized material or for plasticizing and stirring the components in the region of the joining zone, in which method a stirring pin with a section slidably plunges in a slide on which the components are supported, which slide is guided along the joining zone on a side of the component, which side faces away from the tool, so that during welding an automatic relative movement between the stirring pin and the slide or the shoulder surface of the tool and a support surface of the slide, which support surface supports the components, is made possible, as well as a device for implementing such a method.

Abstract: The invention relates to a marking apparatus (100) for marking an object with laser light, comprising a plurality of gas lasers (10) and a control unit for individually activating each of the gas lasers (10) to emit a laser beam according to a sign to be marked. The gas lasers (10) are stacked such that the laser beams emitted by the gas lasers (10) form an array of laser beams, in particular a linear array with parallel laser beams, each gas laser (10a-i) comprises laser tubes (12) that at least partially surround an inner area (5). The apparatus (100) further comprises beam-delivery means (14) for directing the array of laser beams into the inner area (5) and a set of deflection means (30) for rearranging the array of laser beams into a desired array of laser beams. The set of deflection means (30) is arranged in the inner area (5) and comprises at least one deflection means (33a, 33i) per laser beam, in particular at least one mapping mirror (33a, 33i) or one optical waveguide per laser beam.

Abstract: A power schedule calculation method utilizes an idealized geometry to predict laser power levels on an additive path during laser deposition. The method calculates beam power for any point along the path traveled to form a build having a geometry. Each point along the path has associated with it an idealized geometry comprising a melt pool, hot zone and bulk portion. The method comprises creating a geometric description representing the geometry of the build during the process, creating a path description representing the path of the beam source through space during the process, calculating the idealized geometry for the point on the path based upon the geometric description and path description, calculating an energy balance at the melt pool for the point on the path, calculating total energy needed at the point on the path and calculating optimum beam source power. In the calculations, build temperature is based upon a calculation of hot zone temperature derived from the idealized geometry.

Abstract: The present disclosure provides three-dimensional (3D) objects, 3D printing processes, as well as methods, apparatuses and systems for the production of a 3D object. Methods, apparatuses and systems of the present disclosure may reduce or eliminate the need for auxiliary supports. The present disclosure provides three dimensional (3D) objects printed utilizing the printing processes, methods, apparatuses and systems described herein.

Abstract: A removal system is configured for removing a coating from a substrate of a component. A first and second energy source are each configured to direct electromagnetic radiation onto the component the electromagnetic radiation produces a respective first and second property. A sensor detects the first and second properties produced by the first and second stream of electromagnetic radiation. A controller is configured to receive the detected first and second property from the sensor and the associated first and second power levels from the respective first and second energy sources. The controller transmits an updated power level to at least one of the first and second energy sources in response to the first and second property received from the sensor and the associated power level received from the first and second energy sources.

Abstract: The invention relates to a marking apparatus for marking an object with laser light, comprising a plurality of lasers and a control unit for individually activating each of the lasers to emit a laser beam (90a-i) according to a sign to be marked. A set of deflection means (30) for directing the laser beams (90a-i) toward the object to be marked is provided, a set of telescopic means (40) comprising at least one telescopic means (40a-i) per laser beam (90a-i) is provided, and each telescopic means (40a-i) is adjustable for individually setting a focal length of the respective laser beam (90a-i).

Abstract: A ternary near eutectic alloy of Ni, Ti, Cr is described having a relatively low melting temperature of approximately 1230 deg. C. or less, suitable for fusing cracks in turbine blades and vanes without substantial risk of cracking during the repair process. Such an alloy is suitable for low temperature joining or repair of turbine blades since it contains the same components as typical turbine blades and vanes without foreign elements to lower the melting point of the repaired material or adversely affect the mechanical properties of the repaired component. Exclusion of boron eliminates the formation of brittle boron compounds, detrimental to the properties of the repair or seam.

Abstract: A assembling apparatus includes an electric cabinet, a manipulator, a conveying assembly, and a distribution assembly. The manipulator is controlled by the electric cabinet. The conveying assembly includes a vibration plate and a guide rail, the vibration plate is controlled by the electric cabinet. The distribution assembly includes a driving apparatus, a distribution board, and a connection board, the driving apparatus is directed by the electric cabinet, the guide rail is connected between the vibration plate and the connection board, and the distribution board is connected to the driving apparatus. The vibration plate conveys workpieces to the guide rail, the driving apparatus drives the distribution board to communicate with the connection board, the workpieces pass through the connection board and the distribution board, and the manipulator lifts the workpieces from the distribution board.

Abstract: The invention concerns a filtration device comprising a manifold providing fluid connection and mechanical connection comprising a clamping plate movably mounted relative to the manifold and adapted to compress at least one cassette against the manifold, means for driving and guiding the clamping plate comprising a rod extending between the manifold and the plate, an actuator provided with a body and a member moveable relative to the body, which member is adapted to move through a predetermined travel between an extended position and a retracted position, the body being carried by the manifold, and the member carrying the rod and driving the plate via the rod to a clamped position in which the member is in an intermediate retracted position in which it has moved through a shorter travel than the predetermined travel relative to its extended position.

Abstract: A driving apparatus is used for simultaneously tensioning the jackbolts of a multi-jackbolt tensioner and includes a central drive gear mounted for rotation along a central drive gear axis. An annular array of spindles surrounds the central drive gear, each spindle independently mounted for rotation, with one spindle associated with one of the jackbolts. A socket on one spindle end is configured to receive one of the jackbolts. A spindle gear surrounds each spindle and is configured to rotate the spindle. The spindle gear is meshed with the central drive gear to be rotated by the central drive gear, wherein at least one spindle gear is offset along the central drive gear axis from at least another spindle gear. A slip clutch is positioned radially between each spindle gear and the associated spindle, wherein rotation of the jackbolts is up to a torque setting of the slip clutch during tensioning.

Abstract: A first piston for high load is inserted into a housing so as to be movable vertically, and a second piston for low load is inserted into a cylindrical hole of the first piston so as to be movable vertically. An output portion projects from the second piston to above the housing. A first spring for high load and a second spring for low load are mounted in a spring chamber defined by both pistons and. Both springs and are mounted so as to urge the first piston and the second piston upward. A switching mechanism disposed in the pressure fluid chamber at a side opposite to the spring chamber, connects the first piston selectively to the housing or the second piston.

Abstract: A device for keyway broaching is provided with a housing, a drive shaft, a broaching carriage received and supported in the housing, a tool support connected to the broaching carriage, and a crank drive that couples the drive shaft and the broaching carriage with each other. The broaching carriage, when driven by the drive shaft, performs an oscillating movement comprising a cutting movement and a return stroke. A sleeve is arranged between the housing and the broaching carriage. A first seal is provided between the housing and the sleeve and/or between the sleeve and the broaching carriage. The tool support is connected to the broaching carriage with a rocking lever interposed between the tool support and the broaching carriage. The drive shaft has a control section that controls a relative movement between the rocking lever and the broaching carriage.

Abstract: A coolant delivery system which serves to deliver a cooling agent whose purpose is to carry away the heat that is generated in the process of machining a toothed profile by means of a skiving wheel rotating about its rotary axis. The coolant delivery system provides for a delivery path section which, seen in a projection onto a plane extending orthogonal to the rotary axis, is arranged closer to the axis than the toothed profile of the skiving wheel and has a dimensional component in the axial direction.

Abstract: A transfer unit of a test handler includes a base frame, a floating assembly, and an arm part. The base frame includes an inserted portion having a penetration hole. The inserted portion including an upper inserted portion disposed near an upper surface of the inserted portion, a lower portion disposed near a lower portion of the inserted portion and a middle inserted portion disposed between the upper inserted portion and the lower inserted portion. The floating assembly is inserted in the penetration hole of the base frame. The floating assembly includes a floating part, an elastic element, and a coupling element. The floating assembly moves back and forth, to left and right sides, and up and down, or flows within a predetermined angle range in the penetration hole.

Abstract: A skate blade sharpening system retains a skate blade in a sharpening position whose centerline has a first location relative to a first visual reference feature. A motor-driven rotating shaft has a wheel-mounting location for mounting a grinding wheel for sharpening operation. The shaft accepts an alignment wheel at the wheel-mounting location during an alignment, the alignment wheel having a second visual reference feature having a second location relative to a centerline of the grinding wheel when occupying the wheel-mounting location. An adjustment mechanism moves the shaft transversely during alignment to vary relative position between the wheel-mounting location and the sharpening position including an aligned position in which the centerline of the grinding wheel is aligned with the centerline of the sharpening position, the aligned position being indicated by alignment of the first visual reference feature with the second visual reference feature during alignment.

Abstract: A system for grinding workpieces includes a grinding wheel, a first support for rotatably supporting the grinding wheel about a first rotational axis, and a grinding wheel drive for rotating the grinding wheel. The first support can be rotated about a second rotational axis using a support rotating device, the first rotational axis being inclined relative to the second rotational axis such that the grinding wheel lies diagonally against the surface of the workpiece and grinds a substantially conical surface on the workpiece while rotating about the second rotational axis when the workpiece contacts the grinding wheel surface at a distance from the second rotational axis. A position adjusting device may move the first support along the second rotational axis. The angle of inclination between the first rotational axis and the second rotational axis may be adjusted using an inclination adjusting device.

Abstract: A diameter expansion drill bit used for inserting in a prepared hole perforated in a framework to expand a diameter of a portion of the prepared hole by grinding has a plurality of blade sections that grind the portion of the prepared hole, a blade holding section that holds the plurality of blade sections movably in a radial direction respectively, and a shank section that supports the blade holding section, and the plurality of blade sections move to spread outwardly in the radial direction with respect to the blade holding section by centrifugal force due to rotation.

Abstract: Edges of panels, such as glass panels, are ground and polished using grinder wheels that are cooled and lubricated with a coolant. A coolant deflector is utilized to help prevent coolant, which may contain panel particles or abrasives, from entering between the panel and a conveying mechanism that transports the panel.

Abstract: A honing tool holder that provides a capability for automatically feeding the honing elements or stones when in the bore of a work piece, and for automatically stopping the feeding when a particular condition such as a bore size, is reached, so as to enable use of an in-process adjustable feed honing tool in a machine tool, machining center, or the like, lacking a feed mechanism or system. The holder can also include apparatus to automatically prevent feed past a limit. Both the feed force and feed limit can be adjustable, including by simple movements of the tool holder by the machine tool.

Abstract: A polishing apparatus capable of eliminating a variation in film thickness along a circumferential direction of a substrate, such as a wafer, is disclosed. The polishing apparatus includes: a polishing head including an elastic membrane for pressing the substrate against the polishing surface and a retainer ring arranged so as to surround the substrate, the retainer ring being capable of contacting the polishing surface; a rotating mechanism configured to rotate the polishing head about its own axis; a rotation angle detector configured to detect a rotation angle of the polishing head; and a polishing controller configured to periodically change a polishing condition of the substrate in synchronization with the rotation angle of the polishing head.

Abstract: A method of controlling polishing includes polishing a substrate of a non-metallic layer undergoing polishing and a metal layer underlying the non-metallic layer; storing a metal reference spectrum, the metal reference spectrum being a spectrum of light reflected from a same metal material as the metal layer; measuring a sequence of raw spectra of light reflected from the substrate during polishing with an in-situ optical monitoring system; normalizing each raw spectrum in the sequence of spectra to generate a sequence of normalized spectra, of which normalizing includes a division operation where the measured spectrum is in the numerator and the metal reference spectrum is in the denominator; and determining at least one of a polishing endpoint or an adjustment for a polishing rate based on at least one normalized predetermined spectrum from the sequence of normalized spectra.

Abstract: An adaptive feedback control method is provided for a chemical mechanical polish process to minimize a dielectric layer clearing time difference between two annular regions on a substrate. An optical system with an optical window passes below the polishing pad and detects reflected light interference signals from at least two annular regions. A pre-clearing time difference is determined and is used to calculate an adjustment to one or both of a CMP head membrane pressure and a retaining ring pressure. The pressure adjustment is applied before the end of the polish cycle to avoid the need for a second polish cycle and to reduce a dishing difference and a resistance difference in a metal layer in the at least two annular regions. In some embodiments, a second pressure adjustment is performed before the end of the cycle and different CMP head membrane pressure adjustments are made in different pressure zones.