Patents Issued in February 8, 2018
-
Publication number: 20180039147Abstract: A liquid crystal display device includes: a plurality of scan lines and signal lines on one of a pair of substrates arranged to be opposed to each other with a liquid crystal layer sandwiched therebetween, the scan lines and signal lines extending in different directions; and an orientation film, pixel electrode, insulating layer and common electrode, the orientation film being rubbed in a rubbing direction having a given inclination with respect to a pixel arrangement direction. The pixel electrode is partitioned by the scan lines and signal lines and has subpixels made up of first and second regions. The first region has a plurality of slit-shaped openings having a given inclination in a first direction with respect to the rubbing direction. The second region has a plurality of slit-shaped openings having a given inclination in a second direction with respect to the rubbing direction.Type: ApplicationFiled: October 17, 2017Publication date: February 8, 2018Inventors: Daisuke Ito, Hideyuki Omori
-
Publication number: 20180039148Abstract: An electrochromic device includes a chamber defined by a substantially transparent first substrate, a second substrate, and a sealing member; wherein: the first substrate comprises a first surface, and a second surface comprising a first substantially transparent, electrically conductive coating and disposed opposite to the first surface; the second substrate comprising a first surface comprising a second substantially transparent, electrically conductive coating, and a second surface disposed opposite to the first surface; the second surface of the first substrate and the first surface of the second substrate being located proximally to each other and having a substantially uniform spacing of distance, d, between them; and 0 ?m<d?65 ?m; an electrochromic medium comprising a cathodic component, an anodic component, and a solvent; and insoluble spacing objects within the chamber, the insoluble spacing objects having a largest dimension that is greater than 0, but less than or equal to d.Type: ApplicationFiled: August 3, 2017Publication date: February 8, 2018Inventors: Sue F. Franz, Kelvin L. Baumann, Adam R. Heintzelman
-
Publication number: 20180039149Abstract: Aspects of this disclosure concern controllers and control methods for applying a drive voltage to bus bars of optically switchable devices such as electrochromic devices. Such devices are often provided on windows such as architectural glass. In certain embodiments, the applied drive voltage is controlled in a manner that efficiently drives an optical transition over the entire surface of the electrochromic device. The drive voltage is controlled to account for differences in effective voltage experienced in regions between the bus bars and regions proximate the bus bars. Regions near the bus bars experience the highest effective voltage.Type: ApplicationFiled: October 17, 2017Publication date: February 8, 2018Inventors: Gordon Jack, Sridhar K. Kailasam, Stephen C. Brown, Anshu A. Pradhan
-
Publication number: 20180039150Abstract: An electrophoretic display device includes an electrophoretic display module, a color filter layer, a first adhesive layer, a first protection layer, a second adhesive layer, and a second protection layer. The electrophoretic display module has a first surface and a second surface. The color filter layer is located on the first surface of the electrophoretic display module. The first adhesive layer is located on the color filter layer and between the first protection layer and the color filter layer. The second adhesive layer is located on the second surface of the electrophoretic display module and between the second protection layer and the electrophoretic display module.Type: ApplicationFiled: May 16, 2017Publication date: February 8, 2018Inventors: Po-Yuan LO, Tai-Yuan LEE
-
Publication number: 20180039151Abstract: A segmented traveling wave Mach Zehnder optical modulator is described. The segmented traveling wave Mach Zehnder optical modulator may comprise two or more radio frequency (RF) segments, and each RF segment may be configured to support a modulating RF signal. The modulating RF signals may be configured to modulate an optical signal propagating along an optical path of the segmented traveling wave Mach Zehnder optical modulator. The RF modulating signal in the second RF segment may be generated by amplifying the modulating RF signal of the first RF segment, using an RF amplifier. The RF amplifier may be configured to amplify a band-pass spectral portion of the modulating RF signal.Type: ApplicationFiled: August 8, 2016Publication date: February 8, 2018Applicant: Acacia Communications, Inc.Inventors: Christopher Doerr, Ricardo Aroca, Long Chen
-
Publication number: 20180039152Abstract: An optical modulation device includes: a Mach-Zehnder modulator including a semiconductor waveguide; a plurality of phase modulators that are spaced from each other; a first amplifier that is coupled with an input transmission line transmitting an electrical signal, has an input impedance substantially equal to a characteristic impedance of the input transmission line; a first interconnection that is coupled to the first amplifier and transmits the electrical signal to a first end of one of the plurality of phase modulators that is provided on an input side of the Mach-Zehnder modulator; a second interconnection that is coupled to the first amplifier and transmits the electrical signal to a first end of the other of the plurality of phase modulators that is provided on an output side of the Mach-Zehnder modulator; and a plurality of termination resistors respectively coupled to second ends of the plurality of phase modulators.Type: ApplicationFiled: July 26, 2017Publication date: February 8, 2018Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventors: Akira FURUYA, Taizo TATSUMI
-
Publication number: 20180039153Abstract: An optical device includes an array of unit optical elements. Each of the unit optical elements includes a plurality of amplitude adjustment (AA) elements, each of the plurality of AA elements configured for processing one of different phases of an optical signal; an optical antenna, and a combining mechanism for optically coupling the plurality of AA elements to the optical antenna. The optical device also includes a controller coupled to the plurality of AA elements, the controller configured for generating control signals for the plurality of AA elements according to a target optical beam pattern.Type: ApplicationFiled: August 2, 2017Publication date: February 8, 2018Applicant: University of Southern CaliforniaInventors: Hossein Hashemi, SungWon Chung, Hooman Abediasl
-
Publication number: 20180039154Abstract: An optical device includes a row of optical units, each of the optical units comprising an antenna element and an associated phase shifting element, a first optical power splitter optically coupled to a first optical input/output element, and a first plurality of boundary adjustment elements. In the optical phased array, each of the first plurality of boundary adjustment units optically couples the first optical power splitter to different sub-rows of the row of optical units, and each of the plurality of boundary adjustment elements include a sub-row amplitude adjustment element and a sub-row phase adjustment element.Type: ApplicationFiled: August 2, 2017Publication date: February 8, 2018Applicant: University of Southern CaliforniaInventors: Hossein Hashemi, SungWon Chung, Hooman Abediasl
-
Publication number: 20180039155Abstract: A method of making a microstructured optical fiber comprising loading the core and cladding materials of the fiber with hydrogen and deuterium at a loading temperature; annealing the fiber at a selected temperature Tanneal; pumping the fiber with radiation; and reducing the temperature of the fiber and storing the fiber at the reduced temperature before the step of pumping the fiber; and wherein the method allows the hydrogen and the deuterium to become bound to the core material and the cladding material.Type: ApplicationFiled: August 22, 2017Publication date: February 8, 2018Applicant: NKT PHOTONICS A/SInventor: Carsten L. THOMSEN
-
Publication number: 20180039156Abstract: According to an embodiment, disclosed are a camera module and an auto-focus adjustment method using the same, the camera module comprising: an optical unit comprising at least one lens; an image sensor unit for converting an optical signal obtained from the optical unit into image information; an image information processing unit for extracting focusing image information from the converted image information; a memory unit for storing an AF code value; a control unit for detecting the AF code value corresponding to the focusing image information extracted at the image information processing unit and generating a driving signal to move the optical unit; and a driving unit for adjusting the position of the at least one lens according to the driving signal, wherein the AF code value is updated with the AF code value of the last focus image so that the focus image may be obtained quickly, and it is possible to perform accurate focusing and obtain a high quality image even if the number of uses increases or the usaType: ApplicationFiled: February 26, 2016Publication date: February 8, 2018Inventors: Young Seop Moon, Min Kim
-
Publication number: 20180039157Abstract: A VCM is disclosed, the VCM including a rotor having a first driving unit and arranged therein with a lens, a stator having a second driving unit wrapping the first driving unit and being opposite to the first driving unit, a base supporting the stator and having an opening formed at a position corresponding to that of the lens, a connection terminal including a pair of first and second connection terminals arranged at an upper surface of the base, and an elastic member including a first elastic member coupled to the rotor and electrically connected the first connection terminal and a second elastic member coupled to the rotor and electrically connected the second connection terminal.Type: ApplicationFiled: October 19, 2017Publication date: February 8, 2018Inventors: Seong Min Lee, Sang Ok Park, Jun Taek Lee
-
Publication number: 20180039158Abstract: To enable achievement of a reduction in the thickness in a blade driving device that includes a driving member, and to enable a reduction in size of an installation area in a blade driving device that includes a driving member. The blade driving device 1 comprises a base member 2 that has an opening 2A, one or more blade members 3 that operate so as to advance into the opening 2A or withdraw from the opening 2A, and a driving member 4 that is supported on the base member 2 and that moves within a plane that is perpendicular to an optical axis that passes through the opening 2A, for driving the blade member, wherein the driving member 4 is disposed at a position that overlaps the blade member on the periphery of the opening 2A.Type: ApplicationFiled: February 26, 2016Publication date: February 8, 2018Applicant: Nidec Copal CorporationInventors: Kazuo SHIKAMA, Longji BAI, Nobuaki WATANABE
-
Publication number: 20180039159Abstract: To enable continuous operational control of the blade member with high resolution and good accuracy, even when achieving miniaturization and thickness reduction in a blade driving device, through enabling smooth movement of a movable member in a blade driving device. A blade driving device 1 comprises: a base member 2 that has an opening 2A; one or a plurality of blade members 3 that operate so as to advance into the opening 2A or withdraw from the opening 2A; a driving member 4 that moves within a plane that is perpendicular to the optical axis that passes through the opening 2A, to drive the blade member 3; and supporting members 7 that are provided between the base member 2 and the driving member 4, so as to provide sliding support or elastic support of the driving member 4 in a state that is separated from the base member 2.Type: ApplicationFiled: February 26, 2016Publication date: February 8, 2018Applicant: Nidec Copal CorporationInventors: Kazuo SHIKAMA, Longji BAI, Nobuaki WATANABE
-
Publication number: 20180039160Abstract: A making method of random uneven data includes a step of making random uneven data by performing a filter operation in a real space using a filtering function with respect to random array data obtained using a random number or random array data obtained by randomly arranging a predetermined shape part.Type: ApplicationFiled: August 1, 2017Publication date: February 8, 2018Inventors: Kei Ueda, Kazuhiko Momoki
-
Publication number: 20180039161Abstract: An optical element driving device is provided, including a fixed part, a movable part, a driving mechanism, and a position sensing assembly. The fixed part includes a base. The movable part includes a holder for carrying an optical element. The driving mechanism is configured to drive the holder to move along a first direction with respect to the base. The position sensing assembly includes a magnetic element and a magnetic field sensing element in corresponding positions. The magnetic element is configured to sense the amount of displacement of the holder along the first direction with respect to the base. The magnetic pole direction of the magnetic element is different from the first direction.Type: ApplicationFiled: August 3, 2017Publication date: February 8, 2018Inventors: Ichitai MOTO, Yi-Liang CHAN
-
Publication number: 20180039162Abstract: A camera system includes a camera with a lens assembly and image processing electronics internal to the camera housing. The lens assembly and image processing electronics are sensitive to thermal gradients within the camera body. The image processing electronics are coupled to a thermal management system that transfers thermal energy away from the electronics towards a heat diffuser. The thermal management system comprises a heat controller with a heat source, an offset arm, and a heat exchange. The thermal energy moves from the heat source to the heat exchange via the offset arm. The thermal management system also manages heat transfer between auxiliary electronic components and the image processing electronics. The thermal management system is constructed of materials that react to the compressive forces created on the system during camera assembly.Type: ApplicationFiled: December 19, 2016Publication date: February 8, 2018Inventor: Ihab A. Ali
-
Publication number: 20180039163Abstract: A pylon/camera assembly including a body having a first face adjacent to a second face, and a third face adjacent to the first face and the second face, such that the first face and the second face form a first corner and the second and third face form a second corner, a first aperture arranged at and centered about the first corner, a second aperture arranged at and centered about the second corner, a first camera positioned within the first aperture, the first camera facing outwardly from the body, and a second camera positioned within the second aperture, the second camera facing outwardly from the body.Type: ApplicationFiled: October 16, 2017Publication date: February 8, 2018Inventors: Paul M. Halsey, Joel D. Curtin
-
Publication number: 20180039164Abstract: The present invention provides a light-reflecting device for a photographic light, comprising a positioning member which is engageable with a support member, a top end of the support member being provided with a jacket; wherein the positioning member is provided with a locking mechanism of the jacket, the locking mechanism being provided with a movable lock button, the lock button being movably connected to the jacket. The present invention has the following beneficial effects: compact integral structure, convenient disassembling operation, and long life time.Type: ApplicationFiled: August 3, 2017Publication date: February 8, 2018Applicant: Yueqing Originality Photography Equipment Co., LtdInventor: Qingyuan CHEN
-
Publication number: 20180039165Abstract: A lens adapter and its back-locking lens fixing device are provided here. The lens fixing device comprises a connecting base (3) which has a receiving hole (31) for receiving the connecting end of the tube body (1) axially opened on it; the lens fixing device further comprises a limiting portion (4) mounted on the connecting base (3), which comprises a rotational portion (41) rotatably sleeved outside of the connecting base (3) and three second male pawl portions (42) those are connected with the rotational portion (41) and extend into the receiving hole (31) through a sidewall of the connecting base (3). The design lens adapter and its back-locking lens fixing device are clever and practical.Type: ApplicationFiled: August 5, 2016Publication date: February 8, 2018Inventor: Peter Chung Man Ho
-
Publication number: 20180039166Abstract: Embodiments of the present application provide a method for adjusting a relative position between devices and an adjustment apparatus. The method comprises: acquiring information associated with a first device's receiving of a reference signal transmitted by at least one signal source on at least one reference position of a second device, the at least one reference position being determined at least according to information associated with a relative position desired between the first device and the second device; and determining information associated with adjustment on the relative position between the first device and the second device at least according to the information associated with the first device's receiving of the reference signal transmitted on the at least one reference position.Type: ApplicationFiled: March 4, 2016Publication date: February 8, 2018Inventor: JIA LIU
-
Publication number: 20180039167Abstract: A method and apparatus for mounting a projector holder to or placing a projector holder on an object for displaying an image onto a surface is disclosed. The projector holder includes a body within which a projector is at least partially disposed. The body includes one or more pliable appendages that are adapted to be manipulated and deformed from a first configuration to a second configuration. In some embodiments, the body is formed in the shape of an animal.Type: ApplicationFiled: October 19, 2017Publication date: February 8, 2018Applicant: Mimono LLCInventor: Joseph Christian Rossell
-
Publication number: 20180039168Abstract: A light source device includes: a phosphor rotating body on which a phosphor that is formed on a surface and that is used in a rotating state with an axis of rotation that is perpendicular to the surface; a first excitation light source that generates first fluorescent light by irradiating first excitation light upon a first position that is separated from the center of rotation on the surface; a detection light generation unit that irradiates detection light upon a second position that is separated from the center of rotation on the surface and that differs from the first position; an optical detection unit that supplies a detection signal corresponding to emission light emitted from the phosphor rotating body in response to the detection light; and a control unit that receives the detection signal and controls the intensity of the first excitation light on the basis of the detection signal.Type: ApplicationFiled: April 3, 2015Publication date: February 8, 2018Inventor: Kenji SUZUKI
-
Publication number: 20180039169Abstract: A locally dimmed display has a spatial light modulator illuminated by a light source. The spatial light modulator is illuminated with a low resolution version of a desired image. The illumination may comprise a series of lighting elements that vary smoothly from one element to another at the spatial light modulator.Type: ApplicationFiled: October 17, 2017Publication date: February 8, 2018Applicant: Dolby Laboratories Licensing CorporationInventors: Lorne A. Whitehead, Gregory John Ward, Wolfgang Stuerzlinger, Helge Seetzen
-
Publication number: 20180039170Abstract: A nanoimprint liquid material in which the particle number concentration of particles having a particle diameter of 0.07 ?m or more is less than 310/mL is provided.Type: ApplicationFiled: February 23, 2016Publication date: February 8, 2018Inventors: Jun Kato, Takeshi Honma, Toshiki Ito
-
Publication number: 20180039171Abstract: A film has a maximum light transmittance value of 20% or lower in a wavelength range of 450 to 650 nm in a film thickness direction, a light transmittance of 20% or lower at a wavelength of 835 nm in the film thickness direction, and a minimum light transmittance value of 70% or higher in a wavelength range of 1000 to 1300 nm in the film thickness direction. A method of forming the film includes forming a first spectrally selective layer and forming a second spectrally selective layer. A kit for forming the film includes a first composition and a second composition.Type: ApplicationFiled: October 17, 2017Publication date: February 8, 2018Applicant: FUJIFILM CorporationInventors: Kazuya OOTA, Kyohei ARAYAMA, Masahiro MORI
-
Publication number: 20180039172Abstract: Stabilized precursor solutions can be used to form radiation inorganic coating materials. The precursor solutions generally comprise metal suboxide cations, peroxide-based ligands and polyatomic anions. Design of the precursor solutions can be performed to achieve a high level of stability of the precursor solutions. The resulting coating materials can be designed for patterning with a selected radiation, such as ultraviolet light, x-ray radiation or electron beam radiation. The radiation patterned coating material can have a high contrast with respect to material properties, such that development of a latent image can be successful to form lines with very low line-width roughness and adjacent structures with a very small pitch.Type: ApplicationFiled: October 16, 2017Publication date: February 8, 2018Inventors: Jason K. Stowers, Alan J. Telecky, Douglas A. Keszler, Andrew Grenville
-
Publication number: 20180039173Abstract: A resist composition comprising a base polymer and a sulfonium or iodonium salt of iodinated phenoxy or iodinated phenylalkoxy-containing fluorinated sulfonic acid offers a high sensitivity and minimal LWR or improved CDU independent of whether it is of positive or negative tone.Type: ApplicationFiled: August 2, 2017Publication date: February 8, 2018Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Jun Hatakeyama, Masaki Ohashi
-
Publication number: 20180039174Abstract: Regarding cured pattern films for semiconductor apparatuses, the present invention provides a photosensitive resin composition that is high in sensitivity and able to realize improved contact between a cured pattern film and metal wiring after a reflow process. The photosensitive resin composition includes an alkali-soluble resin which contains at least one selected from the group consisting of a resin (a-1) which contains, as primary component, a structure as represented by the undermentioned general formula (1), polyimides (a-2) and copolymers thereof, and a compound (c) which contains, as primary component, a structure as represented by the undermentioned general formula (2).Type: ApplicationFiled: March 15, 2016Publication date: February 8, 2018Applicant: TORAY INDUSTRIES, INC.Inventor: Yoshifumi IKEDA
-
Publication number: 20180039175Abstract: A negative resist composition comprising (A) a sulfonium compound of betaine type and (B) a polymer is provided. The resist composition is effective for controlling acid diffusion during the exposure step, exhibits a very high resolution during pattern formation, and forms a pattern with minimal LER.Type: ApplicationFiled: August 2, 2017Publication date: February 8, 2018Applicant: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Keiichi Masunaga, Satoshi Watanabe, Masaaki Kotake, Kenji Yamada, Masaki Ohashi
-
Publication number: 20180039176Abstract: A colored resin composition is disclosed including a polyimide resin having a specified structure to achieve remarkable heat resistance and enabling the formation of a colored film which is excellent in reliability because a coloring material is highly dispersed and stabilized therein. A colored resin composition is disclosed including (A) an alkali-soluble polyimide resin having a structural unit containing a phenolic hydroxyl group, a sulfonic acid group or a thiol group, (B) a coloring material, (C) a polymeric dispersant, and (D) an organic solvent. A patterned colored layer obtained from the composition of the present invention is useful for a decorative substrate, a touch panel, an organic EL display device and the like.Type: ApplicationFiled: September 26, 2017Publication date: February 8, 2018Applicant: TORAY INDUSTRIES, INC.Inventors: Yoshihiko Inoue, Ryosuke Aihara
-
Publication number: 20180039177Abstract: A positive resist composition comprising a polymer adapted to be decomposed under the action of acid to increase its solubility in alkaline developer and a sulfonium compound of specific structure has a high resolution. When the resist composition is processed by lithography, a pattern with minimal LER can be formed.Type: ApplicationFiled: July 21, 2017Publication date: February 8, 2018Applicant: Shin-Etsu Chemical Co., Ltd.Inventors: Keiichi Masunaga, Satoshi Watanabe, Masaaki Kotake, Masaki Ohashi
-
Publication number: 20180039178Abstract: [Problem] To provide a composition for an underlayer, which can form an underlayer having flattened surface. [Means for Solution] A composition for forming an underlayer, comprising a polymer having a repeating unit containing nitrogen and a solvent. An underlayer is formed by coating this composition on a substrate, preferably baking in an inert atmosphere, and then baking in the air containing oxygen.Type: ApplicationFiled: February 2, 2016Publication date: February 8, 2018Applicant: AZ Electronic Materials (Luxembourg) S.A.R.L.Inventors: Masato SUZUKI, Yusuke HAMA, Hiroshi YANAGITA, Go NOYA, Shigemasa NAKASUGI
-
Publication number: 20180039179Abstract: Provided are: a pattern-forming method by which a laminate that has excellent interlayer adhesion of a resist film, yields a high-definition pattern and exhibits excellent gas barrier properties and high solvent resistance is obtained; and an electronic device produced by the same. The pattern-forming method includes: the step (1) of forming a film using a composition on a support; the exposure step (2) of irradiating a prescribed part of the thus formed film with an active energy ray to modify the developability of the prescribed part; and the development step (3) of developing the film to obtain a pattern, wherein, a plurality of compositions that differ in solubility to a developing solution are used as the composition, and the resulting pattern has a multilayer structure.Type: ApplicationFiled: February 23, 2016Publication date: February 8, 2018Applicant: ADEKA CORPORATIONInventors: Toshihiko MURAI, Kenji HARA, Masatomi IRISAWA
-
Publication number: 20180039180Abstract: A method of correcting an optical image formed by an optical system, the method including obtaining a map indicative of a polarization dependent property of the optical system across a pupil plane of the optical system for each spatial position in an image plane of the optical system, combining the map indicative of the polarization dependent property of the optical system with a radiation map of the intensity and polarization of an input radiation beam to form an image map, and using the image map to correct an optical image formed by directing the input radiation beam through the optical system.Type: ApplicationFiled: October 20, 2017Publication date: February 8, 2018Applicant: ASML Netherlands B.V.Inventors: Jaqueline BORGES NICOLAU, Hannah NOBLE, Johannes Jacobus Matheus BASELMANS, Bart SMEETS, Paulus Jacobus Maria VAN ADRICHEM
-
Publication number: 20180039181Abstract: Methods of fabricating semiconductor devices may include forming a hardmask layer including a photosensitive hardmask material on lower structures. The hardmask layer may include a lower portion and an upper portion thereon. An exposing and developing process may be performed on the hardmask layer to remove the upper portion of the hardmask layer and thereby form a hardmask structure with a substantially flat top surface.Type: ApplicationFiled: October 13, 2017Publication date: February 8, 2018Inventors: DoYoung Kim, Kyoungsil Park
-
Publication number: 20180039182Abstract: A photoresist layer is coated over a wafer. The photoresist layer includes a metal-containing material. An extreme ultraviolet (EUV) lithography process is performed to the photoresist layer to form a patterned photoresist. The wafer is cleaned with a cleaning fluid to remove the metal-containing material. The cleaning fluid includes a solvent having Hansen solubility parameters of delta D in a range between 13 and 25, delta P in a range between 3 and 25, and delta H in a range between 4 and 30. The solvent contains an acid with an acid dissociation constant less than 4 or a base with an acid dissociation constant greater than 9.Type: ApplicationFiled: November 15, 2016Publication date: February 8, 2018Inventors: An-Ren Zi, Joy Cheng, Ching-Yu Chang
-
Publication number: 20180039183Abstract: A real-time variable parameter micro-nano optical field modulation system includes a light source, a 4F optical system and a set of light wave modulation optical components. The 4F optical system includes a first optical assembly and a second optical assembly arranged along an optical path in sequence. The light wave modulation optical components are arranged between the first optical assembly and the second optical assembly, and generate optical field distribution with adjustable patterns and structural parameters thereof on a back focal plane of the system by segmented modulation of sub-wavefronts.Type: ApplicationFiled: January 6, 2016Publication date: February 8, 2018Inventors: Yan YE, Fengchuan XU, Guojun WEI, Yishen XU, Donglin PU, Linsen CHEN
-
PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY AND METHOD OF MONITORING A LATERAL IMAGING STABILITY
Publication number: 20180039184Abstract: A projection exposure system (10) for microlithography includes projection optics (12) configured to image mask structures into a substrate plane (16), an input diffraction element (28) configured to convert irradiated measurement radiation (21) into at least two test waves (30) directed onto the projection optics (12) with differing propagation directions, a detection diffraction element (34; 28) disposed in the optical path of the test waves (30) after they have passed through the projection optics (12) and configured to produce a detection beam (36) from the test waves (30) which has a mixture of radiation portions of both test waves (30), a photo detector (38) disposed in the optical path of the detection beam (36) configured to record the radiation intensity of the detection beam (36), time resolved, and an evaluation unit configured to determine the lateral imaging stability of the projection optics (12) from the radiation intensity recorded.Type: ApplicationFiled: July 18, 2017Publication date: February 8, 2018Inventors: Matthias MANGER, Armin RAUTHE-SCHOECH, Ulrich MUELLER -
Publication number: 20180039185Abstract: An exposure apparatus exposes a substrate with illumination light via a liquid. A liquid immersion member of the exposure apparatus has a lower surface, a plurality of collection ports, and a plurality of supply ports. The lower surface has an opening through which illumination light passes. The collection ports are arranged at the lower surface to surround the opening, and the supply ports are arranged at the lower surface and between the opening and the collection ports to surround the opening, such that the liquid is supplied via the supply ports onto the substrate while the substrate is arranged opposite to a plane-convex lens of a projection optical system and such that the liquid is collected via the collection ports from the substrate.Type: ApplicationFiled: October 4, 2017Publication date: February 8, 2018Applicant: NIKON CORPORATIONInventor: Akimitsu EBIHARA
-
Publication number: 20180039186Abstract: A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space under an emitting surface of a last optical member. The exposure light is projected to a substrate through liquid in the liquid immersion space to expose the substrate while the substrate is moved in a scanning direction. The liquid immersion member includes (i) a first member having a liquid supply port and an opening through which the exposure light is projected, and (ii) a second member having a liquid recovery port facing downwardly and that is movable with respect to the first member. The liquid recovery port has a plurality of openings disposed in a four-sided shaped having four corners to surround the opening of the first member.Type: ApplicationFiled: October 17, 2017Publication date: February 8, 2018Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
-
Publication number: 20180039187Abstract: A liquid immersion lithography apparatus includes a projection system having a final optical element and a nozzle member having a first opening disposed on a first side of the final optical element and from which an immersion liquid is supplied, a second opening disposed on a second side of the final optical element and from which the immersion liquid is recovered, and a liquid recovery portion disposed to surround a path of an exposure beam and from which the immersion liquid is recovered. A tank is fluidicly connected to the liquid recovery portion of the nozzle member. During exposure of a substrate to the exposure beam, an upper surface of the substrate faces the liquid recovery portion, and the immersion liquid is supplied from the first opening while performing liquid recovery from the second opening and the liquid recovery portion.Type: ApplicationFiled: October 18, 2017Publication date: February 8, 2018Applicant: NIKON CORPORATIONInventors: Alex Ka Tim POON, Leonard Wai Fung KHO
-
Publication number: 20180039188Abstract: A lithographic apparatus is disclosed including a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid, an outlet configured to remove a mixture of liquid and gas passing through a gap between a liquid confinement structure of the liquid supply system and the substrate, and an evacuation system configured to draw the mixture through the outlet, the evacuation system having a separator tank arranged to separate liquid from gas in the mixture and a separator tank pressure controller, connected to a non-liquid-filled region of the separator tank, configured to maintain a stable pressure within the non-liquid-filled region.Type: ApplicationFiled: September 1, 2017Publication date: February 8, 2018Applicant: ASML NETHERLANDS B.V.Inventors: Jeroen Johannes Sophia Maria MERTENS, Sjoerd Nicolaas Lambertus DONDERS, Roelof Frederik DE GRAAF, Christiaan Alexander HOOGENDAM, Antonius Johannus VAN DER NET, Franciscus Johannes Herman Maria TEUNISSEN, Patricius Aloysius Jacobus TINNEMANS, Martinus Cornelis Maria VERHAGEN, Jacobus Johannus Leonardus Hendricus VERSPAY, Edwin Augustinus Matheus VAN GOMPEL
-
Publication number: 20180039189Abstract: A liquid immersion exposure apparatus includes a liquid immersion member which forms a liquid immersion space on an object disposed opposite to an emitting surface of an optical member. The liquid immersion member includes (i) a first member that has a first liquid supply port and a first opening through which the exposure light is projected, (ii) a second member that has a first liquid recovery port facing downwardly and that is movable with respect to the first member, and (iii) a gas supply port arranged radially outward of the first liquid recovery port with respect to a path of the exposure light. The first liquid recovery port has a plurality of openings disposed in a four-sided shape to surround the first opening of the first member. The second member is movable relative to the first member in a direction perpendicular to an optical axis of the optical member.Type: ApplicationFiled: October 17, 2017Publication date: February 8, 2018Applicant: NIKON CORPORATIONInventor: Shinji SATO
-
Publication number: 20180039190Abstract: A lithography system is provided with: a measurement device measuring position information of marks on a substrate held in a first stage; and an exposure apparatus on a second stage, the substrate for which the position information measurement for the marks has been completed, performs alignment measurement to measure position information for part of marks selected from among the marks on the substrate, and performs exposure. The measurement device measures position information of many marks on the substrate to obtain higher-degree components of correction amounts of an arrangement of divided areas, and the exposure apparatus measures position information of a small number of marks on the substrate to obtain lower-degree components of the correction amounts of the arrangement of the divided areas and exposes the plurality of divided areas while controlling the position of the substrate by using the obtained lower-degree components and the higher-degree components obtained by the measurement device.Type: ApplicationFiled: August 9, 2017Publication date: February 8, 2018Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
-
Publication number: 20180039191Abstract: A measurement device is equipped with a surface plate, a slider which holds a substrate and which is movable relative to the surface plate, a drive system that moves the slider, a first position measurement system which measures the slider's first position information relative to the surface plate, a measurement unit having a mark detection system that detects a mark on a substrate, a second position measurement system which measures a relative second position information between the mark detection system and substrate, and a controller which obtains the first position information from the first position measurement system and second position information from the second position measurement system while controlling the slider's movement by the drive system, and obtains position information of a plurality of marks based on detection signals of the mark detection system having detected marks on the substrate, the first position information, and the second position information.Type: ApplicationFiled: August 9, 2017Publication date: February 8, 2018Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
-
Publication number: 20180039192Abstract: A reticle transfer apparatus includes a reticle, a reticle stage (4) and a robot (2). The robot (2) is configured to support, transport and transfer the reticle onto the reticle stage (4).Type: ApplicationFiled: February 24, 2016Publication date: February 8, 2018Inventors: Xiaoyu JIANG, Changgang WANG
-
Publication number: 20180039193Abstract: Provided is a toner binder which attains all of low-temperature fixing properties, gloss, and hot offset resistance and gives a toner that satisfies the flowability, high-temperature storability, charge stability, pulverizability, image strength, flex cracking resistance, and document anti-offset properties. The present invention is a toner binder which comprises a polyester resins and has a surfactant content of 100 ppm or less and in which the THF-insoluble components and the THF-soluble components respectively have a storage modulus (Pa) at 150° C., G?x150, and the storage modulus (Pa) at 150° C., G?y150, which satisfy the following relationships (1) and (2).Type: ApplicationFiled: February 22, 2016Publication date: February 8, 2018Applicant: Sanyo Chemical Industries, Ltd.Inventors: Masaru Honda, Tsuyoshi Izumi, Hiroshi Odajima, Masashi Minaki
-
Publication number: 20180039194Abstract: The present disclosure relates to toner compositions containing a high loading of white colorant of greater than 30 weight % by weight of the toner and processes thereof. The toner exhibits a lightness (L*) of at least 75.Type: ApplicationFiled: August 3, 2016Publication date: February 8, 2018Inventors: Karen A. MOFFAT, DAVID J.W. LAWTON, MELANIE L. DAVIS, JUAN A. MORALES-TIRADO, VARUN SAMBHY
-
Publication number: 20180039195Abstract: In accordance with an embodiment, a toner particle comprises two or more glass transition temperatures. Wherein, a first glass transition temperature is within a range from 5 degrees centigrade to 20 degrees centigrade and a second glass transition temperature is within a range from 50 degrees centigrade to 65 degrees centigrade.Type: ApplicationFiled: October 5, 2017Publication date: February 8, 2018Inventors: Takashi Urabe, Taishi Takano, Junichi Ishikawa, Maiko Yoshida
-
Publication number: 20180039196Abstract: An object of the present invention is to provide a toner being free of a problem of image non-uniformity or carrier attraction due to charging unevenness and enabling stable printing, even at continuous printing, in a high-speed development system susceptible to stress. In the toner for developing an electrostatic charge image of the present invention, as an external additive of the toner, a metal oxide-polymer composite particle containing a polymer-grafted metal oxide, and a composite oxide particle having a core-shell structure, with the core part containing titania and the shell part containing silica, are added as a first external additive and a second external additive, respectively.Type: ApplicationFiled: September 21, 2017Publication date: February 8, 2018Applicant: Mitsubishi Chemical CorporationInventors: Takeshi OWADA, Masaaki OKAMOTO