Patents Issued in April 24, 2018
  • Patent number: 9952463
    Abstract: A touch panel for narrowing bezel region and a touch display device using the same is disclosed. The touch panel includes a first transparent substrate, a first conduction layer, a transparent optical glue layer, a second transparent substrate and a second conduction layer from bottom to top. A bezel region of the first transparent substrate is provided with first conduction pads respectively connected with second conduction pads respectively through first conduction wires. The second transparent substrate is provided with third conduction pads. The second transparent substrate is penetrated with penetrating holes respectively arranged over the second conduction pads and respectively neighboring the third conduction pads. A third conduction layer is arranged on the third conduction pads and fills the penetrating holes. The second conduction pads are respectively connected with the third conduction pads through the third conduction layer in the penetrating holes.
    Type: Grant
    Filed: June 13, 2016
    Date of Patent: April 24, 2018
    Assignees: Interface Optoelectronics (Shenzhen) Co., Ltd., General Interface Solution Limited
    Inventors: Chin-Yuan Chen, Ping-Yang Chen
  • Patent number: 9952464
    Abstract: Related to is the technical field of liquid crystal displays, and in particular to a liquid crystal display panel and a frame curing method. The liquid crystal display panel comprises an array substrate, a color filter substrate, and a liquid crystal layer disposed therebetween, the liquid crystal layer being provided with a frame for package in a periphery thereof, wherein the color filter substrate is provided, on a side thereof away from the liquid crystal layer, with a first polarizer, and a second polarizer is arranged between the color filter substrate and the frame, with no black matrix therebetween.
    Type: Grant
    Filed: January 20, 2015
    Date of Patent: April 24, 2018
    Assignee: Shenzhen China Star Optoelectronics Technology Co., Ltd.
    Inventor: Yuejun Tang
  • Patent number: 9952465
    Abstract: A liquid crystal panel and a liquid crystal display device are provided. The liquid crystal panel includes a color filter substrate and an array substrate disposed opposite to each other, and a liquid crystal layer (170) located between the color filter substrate and the array substrate, and liquid crystals in the liquid crystal layer are vertically aligned. A protrusive structure (150, 55) is provided on the color filter substrate and/or the array substrate, and a recess (160, 65) is provided around the protrusive structure (150, 55).
    Type: Grant
    Filed: May 19, 2015
    Date of Patent: April 24, 2018
    Assignee: BOE Technology Group Co., Ltd.
    Inventors: Hongfei Cheng, Jianbo Xian, Yong Qiao
  • Patent number: 9952466
    Abstract: A liquid crystal display includes a display substrate, in which a plurality of domains is defined, includes a pixel electrode disposed in each of the plurality of domains and configured to have a plurality of branch electrodes and a common electrode. A liquid crystal layer disposed between the display substrate and an opposite substrate. A plurality of domains is arranged in a column direction and a row direction. Each of the domains includes first and second sides, a first horizontal edge, and a second horizontal edge facing the first horizontal edge. The second side is parallel with the column direction and the first side is parallel with a first slanted direction. A slit is defined between adjacent branch electrodes. The slit has a first width adjacent to the first horizontal edge, and a second width adjacent to the second horizontal edge.
    Type: Grant
    Filed: December 7, 2015
    Date of Patent: April 24, 2018
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jeongho Lee, Hyangyul Kim, Soojung Chae, Junho Song, Jeanho Song, Sujin Lee, Jieun Lee
  • Patent number: 9952467
    Abstract: A liquid crystal display is provided. A photo-alignment layer thereof includes a polyimide and a crosslinker including an alkylene group (—CnH2n—, where n is a natural number) and a plurality of crosslinking end groups, wherein the plurality of crosslinking end groups include at least two types of end groups or end group derivatives, each type having a different available functional group.
    Type: Grant
    Filed: January 26, 2016
    Date of Patent: April 24, 2018
    Assignee: Samsung Display Co., Ltd.
    Inventors: Jin-Soo Jung, Suk Hoon Kang, Jong Hwan Jeon, In Ok Kim, Jun Woo Lee, Baek Kyun Jeon
  • Patent number: 9952468
    Abstract: One inventive aspect is a liquid crystal display panel. The panel includes an array substrate and an opposite substrate. Each of the array substrate and the opposite substrate include a display area and a non-display area. The panel also includes a liquid crystal layer sandwiched between the array substrate and the opposite substrate, a first alignment layer disposed on a surface of the array substrate facing the liquid crystal layer, and a second alignment layer disposed on a surface of the opposite substrate facing the liquid crystal layer. The first and second alignment layers define a first orientation direction in the display area, and the non-display area includes at least one electrode line. The first and second alignment layers also define a second orientation direction at least in the non-display area corresponding to the electrode line.
    Type: Grant
    Filed: June 10, 2015
    Date of Patent: April 24, 2018
    Assignees: SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD., TIANMA MICRO-ELECTRONICS CO., LTD.
    Inventor: Zhaokeng Cao
  • Patent number: 9952469
    Abstract: A method of manufacturing a liquid crystal device having a first substrate and a second substrate facing each other with a liquid crystal layer interposed therebetween, and a sealing member formed in a peripheral portion of at least one of the substrates. The method includes forming the sealing member, disposing the liquid crystal layer inside the sealing member, and bonding the first substrate to the second substrate. In forming the sealing member, a ring-shaped portion that seals the liquid crystal layer inside the sealing member, a first sealing layer and a second sealing layer that face each other to be separated from each other are formed. In the bonding of the first substrate to the second substrate, a junction portion is formed in which the first and second sealing layers are pressed and joined outside the sealing member so as to form the ring-shaped portion.
    Type: Grant
    Filed: September 1, 2016
    Date of Patent: April 24, 2018
    Assignee: Seiko Epson Corporation
    Inventors: Yoichi Momose, Satoshi Hasegawa
  • Patent number: 9952470
    Abstract: A color film substrate comprises a underlying substrate, a shading layer on the underlying substrate and photo spacers on the shading layer. The photo spacer comprises a top surface, a bottom surface and side surfaces for connecting the top surface and the bottom surface, and the top surface comprises at least one inclined face portion unparallel to the bottom surface.
    Type: Grant
    Filed: May 6, 2015
    Date of Patent: April 24, 2018
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Jian Xu, Hongfei Cheng, Yong Qiao
  • Patent number: 9952471
    Abstract: A pixel electrode includes a frame electrode, a main electrode orthogonally connected with a middle part of the frame electrode, a plurality of first branch electrodes which are parallel with one another and spaced with one another, and a plurality of second branch electrodes which are parallel with one another and spaced with one another. The first branch electrodes and the second branch electrodes are respectively connected to the frame electrodes at inclination angles of 135° and 45°. The first branch electrodes and the second branch electrodes are orthogonal to each other, and the pixel electrode includes two areas in one sub pixel, in which the first and second branch electrodes are extended from the frame electrode in directions that diverge from each other.
    Type: Grant
    Filed: July 24, 2015
    Date of Patent: April 24, 2018
    Assignee: SHENZHEN CHINA STAR OPTOELECRTRONICS TECHNOLOGY CO., LTD.
    Inventor: Xinhui Zhong
  • Patent number: 9952473
    Abstract: A display device including: a display panel which displays an image with light, including: a substrate including: first and second light blocking areas extending in first and second directions, respectively, and a pixel area at which the image is displayed, defined by the first and second light blocking areas which intersect each other; a first shielding line and a data line spaced apart from each other on the substrate at the first light blocking area; a gate line at the second light blocking area to intersect the data line; and a thin film transistor connected to the data and gate lines. The shielding line includes a protrusion protruding toward the data line, the protrusion being overlapped by the thin film transistor. The shielding line is in a same layer of the display panel as the data line among layers disposed on the substrate of the display panel.
    Type: Grant
    Filed: April 28, 2017
    Date of Patent: April 24, 2018
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Junki Jeong, Jisun Kim, Meehye Jung
  • Patent number: 9952474
    Abstract: A deskew display panel is disclosed in present invention. The deskew display panel includes a plurality of data lines arranged in a column direction, a plurality of scanning lines perpendicular to the column direction and intersecting the data lines; a sub-pixel array including a plurality of sub-pixels arranged in array, each sub-pixel including a transistor and disposed between any two neighboring scanning lines and any two neighboring data lines; the scanning lines disposed in the sub-pixel array and parallel to each other; sub-pixels in each row including a plurality of sub-pixel sets, each sub-pixel set including two sub-pixels, the sub-pixel including the transistor, gates of the transistors connected to two neighboring scanning lines respectively, sources of the transistors connected to the same data line, and drains of the transistors connected to a liquid crystal capacitor and a storage capacitor.
    Type: Grant
    Filed: June 2, 2015
    Date of Patent: April 24, 2018
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Cong Wang, Peng Du
  • Patent number: 9952475
    Abstract: A liquid crystal display which enhances an aperture ratio and stabilizes a storage voltage includes a first substrate, a second substrate opposing the first substrate, a liquid crystal layer between the first substrate and the second substrate, a gate line, a data line, a first sub-pixel electrode, and a second sub-pixel electrode on the first substrate, a first transistor connected to the gate line, the data line, and the first sub-pixel electrode, and a second transistor connected to the gate line, the data line, and the second sub-pixel electrode and including a source electrode, a drain electrode and at least one floating electrode between the source electrode and the drain electrode.
    Type: Grant
    Filed: March 17, 2016
    Date of Patent: April 24, 2018
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Keunwoo Kim, Gunwoo Yang
  • Patent number: 9952476
    Abstract: An array substrate and a display device are provided. The array substrate includes a plurality of data lines; a plurality of gate lines; and a plurality of sub-pixel units defined by the gate lines and the data lines intersecting each other. The sub-pixel unit includes a first pixel electrode and a second pixel electrode respectively disposed on two sides of the gate line and a common electrode disposed between the first pixel electrode and the second pixel electrode. At least a first compensation electrode is connected to at least a side of the common electrode, at least a part of projection of it on a plane having the first pixel electrode overlaps the first pixel electrode; and/or at least a second compensation electrode is connected to a side of the first pixel electrode, and at least a part of projection of it on a plane having the common electrode overlaps the common electrode. The display device can have a wide viewing angle.
    Type: Grant
    Filed: November 17, 2015
    Date of Patent: April 24, 2018
    Assignee: BOE Technology Group Co., Ltd.
    Inventors: Wenbo Li, Pan Li
  • Patent number: 9952477
    Abstract: A liquid crystal display panel is disclosed. Said liquid crystal display panel comprises a plurality of sub pixels that are configured in a pixel array, said pixel array being formed by a plurality of data lines and a plurality of scanning lines that are configured orthogonally to each other, and said plurality of scanning lines comprising: a first scanning line, which is turned on during a first time period after a polarity of a voltage of a driving signal of a data line is reversed, wherein the first sub pixel is charged through said data line; and at least one second scanning line, which are turned on during a second time period, wherein the second sub pixel is charged through said data line. A value of an equivalent capacitor of the first sub pixel is larger than that of the second sub pixel, so that the sustaining voltage of the first sub pixel is equal to that of the second sub pixel.
    Type: Grant
    Filed: December 16, 2014
    Date of Patent: April 24, 2018
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
    Inventors: Caiqin Chen, Je Hao Hsu
  • Patent number: 9952478
    Abstract: Disclosed are a display device and a method of driving the same. The display device includes: a panel on which pixels, defined by intersections of a plurality of gate lines and a plurality of data lines, are alternately connected to one side and another side of the data line and the gate line; a data driver which supplies a data voltage having a different polarity to the data lines in odd columns even columns; and, a gate driver which supplies a gate voltage, which has first polarity and corresponds to a data voltage having the first polarity, to gate lines in odd rows, and supplies a gate voltage, which has a second polarity, and corresponds to a data voltage having the second polarity, to gate lines in even rows.
    Type: Grant
    Filed: August 8, 2014
    Date of Patent: April 24, 2018
    Assignee: LG Display Co., Ltd.
    Inventors: Kwangpyo Hong, JoongLok Song
  • Patent number: 9952479
    Abstract: The present invention relates to a display substrate and a method for fabricating the same, a display panel and a display device. The display substrate comprises a plurality of pixels, each of which has a display region, a non-display region being between the plurality of pixels, and the display substrate further comprises a protection metal layer covering the non-display region. In the display substrate, the protection metal layer covers the non-display region of the display substrate so as to shield the structures of the thin-film transistors, signal lines and the like on the display substrate, and thus the stability of structure of the display panel as well as the high resolution of the display panel and excellent display effect thereof can be ensured, and, in the meantime, the procedure of fabrication process is simplified, the manufacture efficiency is improved, and the cost for manufacturing is reduced.
    Type: Grant
    Filed: January 6, 2016
    Date of Patent: April 24, 2018
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY, CO., LTD.
    Inventors: Binbin Cao, Peng Jiang, Peng Chen, Jongwon Moon, Yinhu Huang, Chengshao Yang, Haipeng Yang
  • Patent number: 9952480
    Abstract: A display device includes a first gate line and a data line intersecting each other, a pixel electrode, a switching element comprising a gate electrode connected to the first gate line, a source electrode connected to the data line, and a drain electrode connected to the pixel electrode, and a connecting portion which connects the drain electrode with the pixel electrode, and a distance between the data line and the connecting portion is less than a distance between the data line and the gate electrode in a first direction perpendicular to the data line.
    Type: Grant
    Filed: January 6, 2017
    Date of Patent: April 24, 2018
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jaemin Seong, Kyunghee Kim
  • Patent number: 9952481
    Abstract: Embodiments described include bus bars for electrochromic or other optical state changing devices. The bus bars are configured to color match and/or provide minimal optical contrast with their surrounding environment in the optical device. Such bus bars may be transparent bus bars.
    Type: Grant
    Filed: December 24, 2014
    Date of Patent: April 24, 2018
    Assignee: View, Inc.
    Inventors: Robert T. Rozbicki, Gordon Jack, Disha Mehtani
  • Patent number: 9952482
    Abstract: There is presented an optical apparatus comprising first and second photon pair sources configured to convert at least one pump light photon into a first and second correlated signal and idler photon pairs. In one example, the apparatus is configured to use one of the signal and idler photons from the first correlated photon pair for controlling the conversion of the pump light photon in the second photon pair source. The apparatus may configured such that, at least one of the signal and idler photons from the first correlated photon pair is output from the first photon pair source onto an optical path wherein at least one of the signal and idler photons from the second correlated photon pair is output from the second photon pair source onto the optical path. A method is also provided for outputting one or more photons using the optical apparatus.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: April 24, 2018
    Assignee: The University of Bristol
    Inventors: Terence Rudolph, Mark Thompson, Jonathan Matthews, Damien Bonneau
  • Patent number: 9952483
    Abstract: Advantageous collar grips are provided to secure a grip on a camera lens ring, such as the focusing, zooming, or aperture control rings. A collar grip of a pliable and stretchable material can be placed around the lens ring to allow improved manipulation and thereby more accurate manipulation of the lens. Extended surface features on the collar grip can secure it to the lens ring and ensure an accurate grasp. The collar grip also provides increased diameter to the focusing ring, which can further aid in more accurate focusing ability.
    Type: Grant
    Filed: October 28, 2016
    Date of Patent: April 24, 2018
    Assignee: BAND.IT.Co.
    Inventors: Elezar Tonev, Christopher M. Cooper, Domenic Aluise, Jacob Barrineau, Thomas E. Bender
  • Patent number: 9952484
    Abstract: A photographic background assembly, comprises a collapsible background unit having a semi-rigid frame, and a background mounting member. The collapsible background unit comprises a magnetic portion, and the background mounting member comprises at least one magnetic receiving formation configured to engage the magnetic portion of the collapsible background unit, such that the collapsible background unit is selectively attachable to the background mounting member by the magnetic portion so as to provide a background for use in photography.
    Type: Grant
    Filed: November 12, 2014
    Date of Patent: April 24, 2018
    Assignee: MANFROTTO UK LIMITED
    Inventor: Matthew Bailey
  • Patent number: 9952485
    Abstract: A video surveillance camera system having an easily removable and separable video camera housing comprised of a dome base, a rotational base, gimbal, and a spherically shaped transparent dome cover is disclosed. The dome base includes a surface mounting plate and a grommet. The rotational base has an outer rim being removably attachable to the dome base and rotatable about a first axis parallel to the dome base. The rotational base further includes a gimbal bracket attached to the outer rim and tiltable about a second axis perpendicular to the dome base; the gimbal bracket further includes a gimbal mount which is constructed and arranged to receive a gimbal. The separable and removable gimbal provides an electrically connected circuit board and zoom lens, wherein the circuit board includes an outlet for a CAT5 connection cable and a BNC connection cable and a switch to allow independent operation of either connection.
    Type: Grant
    Filed: June 10, 2016
    Date of Patent: April 24, 2018
    Assignee: INNOTECH SECURITY, INC.
    Inventors: Moshe Luski, Devin Benjamin
  • Patent number: 9952486
    Abstract: There is provided a image projection apparatus including an image generation unit for generating an image by using light emitted from a light source, comprising: a movable unit configured to hold the image generation unit and to be able to change a position of the image generation unit; and a drive unit configured to drive the movable unit to move, wherein the movable unit is disposed to move horizontally.
    Type: Grant
    Filed: March 1, 2016
    Date of Patent: April 24, 2018
    Assignee: Ricoh Company, Ltd.
    Inventors: Akihisa Mikawa, Tetsuya Fujioka, Hideo Kanai, Yasunari Mikutsu, Satoshi Tsuchiya, Takahiro Hiramatsu, Yukimi Nishi, Jun Mashimo, Yoshito Saito
  • Patent number: 9952487
    Abstract: A projector includes a casing having a top plate and a bottom plate, an optical engine disposed in the casing and between the top and bottom plates, and a plurality of heat sinks disposed around the optical engine. The top plate and the bottom plate have a plurality of top holes and bottom holes, respectively. Each heat sink has a plurality of fins and a plurality of air channels formed between the fins, wherein the top holes are aligned and communicate with the bottom holes through the air channels straightly.
    Type: Grant
    Filed: May 3, 2016
    Date of Patent: April 24, 2018
    Assignee: Qisda Corporation
    Inventor: Chi-Cheng Lin
  • Patent number: 9952488
    Abstract: A projector includes a base, a light module secured on the base, and a cover secured on the light module. The light module includes a bracket, and the cover includes two securing members. The bracket and the securing members define a plurality of through holes to reduce the weight of the bracket and the through holes. The securing member is equipped with a hook, and the hook is elastically deformed to be engaged with the bracket.
    Type: Grant
    Filed: August 7, 2015
    Date of Patent: April 24, 2018
    Assignee: HON HAI PRECISION INDUSTRY CO., LTD.
    Inventor: Chin-Wen Yeh
  • Patent number: 9952489
    Abstract: The disclosure relates to a discharge lamp including a light emitting tube having a discharge space therein, and a pair of electrodes disposed in the discharge space so as to be opposed to each other, wherein a changing rate of a cross-sectional area is equal to or lower than 200%. The changing rate is a rate of change of the cross-sectional area in every 0.25 mm in a direction along an optical axis of the light emitting tube. The cross-sectional area is an area of a plane perpendicular to the optical axis in a space between an outside shape of at least one of the pair of electrodes and an inside wall of the light emitting tube.
    Type: Grant
    Filed: August 1, 2016
    Date of Patent: April 24, 2018
    Assignee: SEIKO EPSON CORPORATION
    Inventor: Tomohiro Yokoo
  • Patent number: 9952490
    Abstract: Disclosed is a light assembly configured to be installed in a movie projector. The light assembly includes an adaptor configured to mechanically couple with a bulb mount of the movie theatre projector. The light assembly further includes a female socket rigidly connected to the adaptor and a male socket configured to mate with the female socket. Yet further, the light assembly includes one or more cooling fans configured to generate airflow, a heat sink configured to dissipate heat, a first thermal transfer pad configured to conduct heat, a primary mounting plate, and a second thermal transfer pad. Moreover, the light assembly includes a Light Emitting Diode (LED) Array configured to generate light, wherein the LED Array is mounted on a board. Further, the light assembly includes a lens mounting plate, multiple lens mount standoffs, a lens configured to collimate light emitted from the LED Array, and a lens retainer.
    Type: Grant
    Filed: March 23, 2017
    Date of Patent: April 24, 2018
    Inventor: George Erik McMillan
  • Patent number: 9952491
    Abstract: A phosphor includes a sintered body of a ceramic material. The sintered body contains Ce:Y3Al5O12 as a main phase and a ceramic material as a subphase. The ceramic material has a refractive index different from that of the main phase. The sintered body has a crystal grain boundary and a void at the crystal grain boundary.
    Type: Grant
    Filed: November 29, 2016
    Date of Patent: April 24, 2018
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Akio Ikesue, Takashi Endo
  • Patent number: 9952492
    Abstract: A projection-type display device includes: a plurality of light sources that emit light beams with different colors; a projection unit that projects light beams based on image information among light beams emitted from the plurality of light sources onto a projection screen; and a light source control unit that selectively performs first control or second control as defined herein.
    Type: Grant
    Filed: March 28, 2017
    Date of Patent: April 24, 2018
    Assignee: FUJIFILM Corporation
    Inventor: Daisuke Ito
  • Patent number: 9952494
    Abstract: A video projecting structure includes a substrate having a visible light transmittance greater than or equal to 5% and less than or equal to 90%, a reflectivity greater than or equal to 5% and less than or equal to 90%, and a front haze less than or equal to 30.
    Type: Grant
    Filed: December 1, 2016
    Date of Patent: April 24, 2018
    Assignee: Asahi Glass Company, Limited
    Inventors: Yukihiro Tao, Kenta Sekikawa, Hitoshi Tsujimura, Kenichi Ebata, Yuriko Kaida
  • Patent number: 9952495
    Abstract: A virtual field-of-view frame or reference window in a field of view of a stereo camera, and projected in a reduced manner by left and right shooting lenses to form an image on each of a left and right image pickup devices. Standard image data and stereoscopic video data is sent. The standard stereoscopic video data is displayed on a display screen having positions of left and right screens exactly matching each other and having the position and size for reproducing and displaying the reference window as a reference dimension display equivalent to the reference window, simultaneously with left and right polarizations. With eyeglasses for field-of-view separation left and right videos are separately viewed.
    Type: Grant
    Filed: January 19, 2009
    Date of Patent: April 24, 2018
    Inventor: Minoru Inaba
  • Patent number: 9952496
    Abstract: A panoramic photography head for easily photographing a plurality of images having different orientations without any vignetting in order to generate a panoramic image and to provide a photography system using the panoramic photography head are provided. A panoramic photography system includes: a digital camera body with a lens having a predetermined field of view at a front end thereof and can photograph a digital image; a panoramic photography head connected to a lower surface of the digital camera body; and a legged platform connected to a lower surface of the panoramic photography head.
    Type: Grant
    Filed: July 13, 2017
    Date of Patent: April 24, 2018
    Assignee: Entaniya Co., Ltd.
    Inventor: Masaki Okumura
  • Patent number: 9952497
    Abstract: A mask blank suitable for fabricating a phase shift mask having a thin film pattern composed of a material enabling dry etching with a fluorine-based gas and a substrate-engraved pattern. The mask blank 100 is used to fabricate a phase shift mask having a thin film pattern and a substrate-engraved pattern. The mask blank 100 has a structure in which an etching stopper film 2, a thin film for pattern formation 3 and an etching mask film 4 are laminated in this order on a transparent substrate 1. The etching stopper film 2 is made of a material that contains chromium and oxygen and the oxygen content thereof is more than 50 at %. The thin film 3 is made of a material that can be dry-etched by a fluorine-based gas. The etching mask film 4 is made of a material that contains chromium, the chromium content thereof is not less than 45 at %, and the oxygen content thereof is not more than 30 at %.
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: April 24, 2018
    Assignee: HOYA CORPORATION
    Inventors: Yasushi Okubo, Ryo Ohkubo
  • Patent number: 9952498
    Abstract: This invention provides a mask blank in which a thin film for transfer pattern formation is provided on a main surface of a transparent substrate. The thin film is made of a material containing a transition metal and silicon and further containing at least one of oxygen and nitrogen. The thin film has as its surface layer an oxide layer with an oxygen content higher than that of a region, other than the surface layer, of the thin film. The thin film is formed so that the thickness of its central portion is greater than that of its outer peripheral portion on the main surface side. The oxide layer is formed so that the thickness of its central portion is greater than that of its outer peripheral portion on the main surface side.
    Type: Grant
    Filed: September 21, 2016
    Date of Patent: April 24, 2018
    Assignee: HOYA CORPORATION
    Inventors: Toshiyuki Suzuki, Shigenori Ishihara
  • Patent number: 9952499
    Abstract: A mask fabricating method includes dividing an outline of a design layout into segments, setting comparison areas with respect to an evaluation point corresponding to each of the segments, for each segment, calculating an overlapping area between the design layout and each of the comparison areas, classifying the segments into groups based on the calculated overlapping areas, wherein segments having a characteristic of the same overlapping area are included in a first group, calculating bias values for each of the segments, obtaining a representative bias value for each group, for each group, assigning the representative bias value obtained for that group to each of its segments, updating the design layout based on the segments with their assigned representative bias values, and fabricating a mask based on the updated design layout.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: April 24, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Moon-Gyu Jeong, So-Rang Jeon
  • Patent number: 9952500
    Abstract: Embodiments of the present disclosure include methods, program products, and systems for adjusting an integrated circuit (IC) layout for optical proximity correction (OPC). Methods according to the disclosure can include: defining a target region of the IC design layout, the target region having a plurality of patterns including a first pattern positioned adjacent to a second pattern, wherein an OPC modeling rule of the IC design layout prohibits the first pattern from being adjusted, and wherein the second pattern does not reduce a printability metric of the first pattern; adjusting the design of the second pattern to reduce at least one printing error in the first pattern, wherein a functionality of the second pattern in the IC design layout is unchanged after the adjusting; and implementing OPC on the IC design layout including the target region with the adjusted second pattern therein.
    Type: Grant
    Filed: August 17, 2016
    Date of Patent: April 24, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Sudeep Mandal, Arun S. Mampazhy
  • Patent number: 9952501
    Abstract: A photomask blank comprising a transparent substrate (1), an etching stop film (2), a light-shielding film (3), and an etching mask film (4) has on the substrate side a reflectance of up to 35% with respect to exposure light. The etching stop film (2) consists of a first layer (21) which is disposed contiguous to the substrate and functions as an antireflective layer and a second layer (22) functioning as a fluorine-base dry etching-resistant layer, one of the first and second layers is a layer having compressive stress and the other is a layer having tensile stress.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: April 24, 2018
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Souichi Fukaya, Shinichi Igarashi, Takashi Yoshii
  • Patent number: 9952502
    Abstract: A pellicle for lithography processes, including extreme ultraviolet (EUV) lithography may mitigate thermal accumulation in a membrane of the pellicle. The pellicle includes a membrane and at least one thermal buffer layer on at least one surface of the membrane. An emissivity of the thermal buffer layer may be greater than an emissivity of the membrane. A carbon content of the thermal buffer layer may be greater than a carbon content of the membrane. Multiple thermal buffer layers may be on separate surfaces of the membrane, and the thermal buffer layers may have different properties. A capping layer may be on at least one thermal buffer layer, and the capping layer may include a hydrogen resistant material. A thermal buffer layer may extend over some or all of a surface of the membrane. A thermal buffer layer may be between at least two membranes.
    Type: Grant
    Filed: January 12, 2016
    Date of Patent: April 24, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hwanchul Jeon, Munja Kim, Sungwon Kwon, Byunggook Kim, Roman Chalykh, Yongseok Jung, Jaehyuck Choi
  • Patent number: 9952503
    Abstract: A method for repairing a mask includes receiving a mask having first and second defective regions. A first treatment is performed to the mask. After performing the first treatment, a first repair process is performed on the mask. The first defective region is repaired to form a first repaired defective region. A second treatment is performed to the mask, including the first repaired defective region. After performing the second treatment, a second repair process is performed on the mask. The second defective region is repaired to form a second repaired defective region.
    Type: Grant
    Filed: March 21, 2016
    Date of Patent: April 24, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yen-Kai Huang, Yuan-Chih Chu
  • Patent number: 9952504
    Abstract: An imprint method for transferring a pattern to an imprint material supplied to a plurality of shot areas on a substrate using a mold includes removing a foreign matter attached to a pattern of the mold in such a manner that the plurality of shot areas includes a part shot-area where a part of pattern of the mold can be formed and the mold is brought into contact with an imprint material supplied to the part shot-area to transfer the pattern of the mold to the substrate and transferring a pattern to the shot area excluding the part shot-area, among the plurality of shot areas, using the mold used in the removing the foreign matter.
    Type: Grant
    Filed: June 24, 2014
    Date of Patent: April 24, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Yoshikazu Miyajima, Yukio Takabayashi, Shinichi Shudo
  • Patent number: 9952505
    Abstract: According to one embodiment, an imprint device includes a holding unit, a mounting unit, a moving unit, a curing unit, a pressing portion, and a detecting portion. The holding unit holds template having a pattern portion pressed onto a transfer portion provided on a substrate. The mounting unit mounts the substrate. The moving unit is provided on at least either the holding unit or the mounting unit. The moving unit moves the holding unit and the mounting unit in directions approaching each other or directions away from each other. The curing unit cures the transfer portion onto which the pattern portion of the template is pressed. The pressing portion pushes the template pressed onto the transfer portion in a direction intersecting a pressing direction of the template. The detecting portion detects a position of the template pushed by the pressing portion.
    Type: Grant
    Filed: September 9, 2014
    Date of Patent: April 24, 2018
    Assignee: TOSHIBA MEMORY CORPORATION
    Inventors: Yosuke Okamoto, Nobuhiro Komine, Kazuhiro Segawa, Manabu Takakuwa, Kentaro Kasa
  • Patent number: 9952506
    Abstract: A liquid discharge apparatus includes: a container divided by a dividing member into a first chamber configured to contain a first liquid to be discharged from a discharge port and a second chamber configured to contain a second liquid; a supply unit configured to supply the second liquid into the second chamber in accordance with decrease of the first liquid contained in the first chamber; and a measurement unit configured measure flow of the first liquid into the second chamber.
    Type: Grant
    Filed: July 20, 2015
    Date of Patent: April 24, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Tsuyoshi Arai, Tomonobu Saku, Yutaka Mita
  • Patent number: 9952507
    Abstract: Embodiments in accordance with the present invention encompass self-imageable polymer compositions containing a variety of photobase generators which are useful for forming films that can be patterned to create structures for microelectronic devices, microelectronic packaging, microelectromechanical systems, optoelectronic devices and displays. The compositions of this invention can be tailored to form positive tone or negative tone images depending upon the intended application in aqueous developable medium. The images formed therefrom exhibit improved properties including low wafer stress and better thermo-mechanical properties, among other property enhancements.
    Type: Grant
    Filed: February 12, 2016
    Date of Patent: April 24, 2018
    Assignee: PROMERUS, LLC
    Inventors: Pramod Kandanarachchi, Larry Rhodes, Hendra Ng, Wei Zhang, Brian Knapp
  • Patent number: 9952508
    Abstract: A reagent that enhances acid generation of a photoacid generator and composition containing such reagent is disclosed.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: April 24, 2018
    Assignee: Toyo Gosei Co., Ltd.
    Inventors: Satoshi Enomoto, Yusuke Suga
  • Patent number: 9952509
    Abstract: The present invention relates to a pattern forming method including: forming a film using an actinic ray-sensitive or radiation-sensitive resin composition that includes a (A) resin which has an increase in the polarity by the action of an acid, and thus, has a decrease in the solubility in a developer containing an organic solvent, a (B) compound capable of generating an acid upon irradiation with specific actinic ray or radiation, and a (C) solvent, exposing the film, and developing the exposed film using a developer including an organic solvent, in which the resin (A) has a structure in which a polar group is protected with a leaving group which decomposes to leave by the action of an acid, and the leaving group is a group represented by the following General Formula (I).
    Type: Grant
    Filed: July 1, 2016
    Date of Patent: April 24, 2018
    Assignee: FUJIFILM Corporation
    Inventors: Keita Kato, Keiyu Ou, Michihiro Shirakawa, Akiyoshi Goto, Masafumi Kojima
  • Patent number: 9952510
    Abstract: A thinner composition includes propyleneglycol C1-C10 alkylether, C1-C10 alkyl C1-C10 alkoxy propionate, and C1-C10 alkyl lactate, thereby is it possible to improve applicability of a photoresist while remarkably reducing an amount of the used photoresist, as well as having excellent solubility and EBR property to various photoresists, BARCs and underlayers.
    Type: Grant
    Filed: February 5, 2016
    Date of Patent: April 24, 2018
    Assignee: DONGWOO FINE-CHEM CO., LTD.
    Inventors: Cheol Min Choi, In Kak Song, Kyong Ho Lee
  • Patent number: 9952511
    Abstract: Lithographic apparatuses suitable for, and methodologies involving, complementary e-beam lithography (CEBL) are described. In an example, a blanker aperture array (BAA) for an e-beam tool is described. The BAA is a non-universal cutter.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: April 24, 2018
    Assignee: Intel Corporation
    Inventors: Yan A. Borodovsky, Donald W. Nelson, Mark C. Phillips
  • Patent number: 9952512
    Abstract: A developing method for forming a resist film having a high uniformity of CD distribution. After exposure of a resist film on a substrate surface to form a resist pattern, the method includes sequential steps of: (A) supplying a developer to the rotating substrate; (B) reacting the resist film with the developer; and (C) removing the developer from the surface of the resist film to terminate the reaction of the resist film with the developer. In step (A), a liquid-contact nozzle, having an ejection orifice for the developer and a lower surface extending laterally from the ejection orifice and disposed opposite the resist film, is used. In step (C), the boundary between a reaction-terminated area of the surface of the resist film, and an in-progress reaction area of the surface of the resist film, is moved from the center toward the periphery of the resist film.
    Type: Grant
    Filed: May 5, 2015
    Date of Patent: April 24, 2018
    Assignee: Tokyo Electron Limited
    Inventors: Hirofumi Takeguchi, Tomohiro Iseki, Yuichi Terashita
  • Patent number: 9952513
    Abstract: An undulator for a free electron laser includes a pipe for an electron beam and one or more periodic magnetic structures extending axially along the pipe. Each periodic magnetic structure includes a plurality of magnets and a plurality of passive ferromagnetic elements, the plurality of magnets being arranged alternately with the plurality of passive ferromagnetic elements in a line extending in an axial direction. Each of the plurality of magnets is spatially separated from the pipe, and each of the passive ferromagnetic elements extends radially from an adjacent magnet towards the pipe. A spacer element may be provided between the magnets and the pipe to provide radiation shielding for the magnets and/or cooling for the pipe.
    Type: Grant
    Filed: March 30, 2015
    Date of Patent: April 24, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Andrey Alexandrovich Nikipelov, Johannes Antonius Gerardus Akkermans, Leonardus Adrianus Gerardus Grimminck, Erik Roelof Loopstra, Michael Jozef Mathijs Renkens, Adrian Toma, Han-Kwang Nienhuys
  • Patent number: 9952514
    Abstract: An immersion lithography apparatus is disclosed in which liquid is supplied to a space between a projection system and a substrate, and a plate structure is provided to divide the space into two parts. The plate structure has an aperture to allow transmission of the projection beam, has through holes in it to reduce the damping effect of the presence of the plate and optionally has one or more inlets and outlets to provide various flows around the aperture in the plate. An embodiment of the invention may reduce the transportation of contaminants, stray light, temperature gradients, and/or the effect of bubbles on the imaging quality.
    Type: Grant
    Filed: August 29, 2014
    Date of Patent: April 24, 2018
    Assignee: ASML NETHERLANDS B.V.
    Inventors: Sjoerd Nicolaas Lambertus Donders, Bob Streefkerk, Martinus Hendrikus Antonius Leenders