Patents Issued in October 23, 2018
  • Patent number: 10109715
    Abstract: A semiconductor device according to an embodiment includes: a substrate having a first plane and a second plane provided on the opposite side of the first plane; a first nitride semiconductor layer provided on the first plane; source electrodes provided on the first nitride semiconductor layer; drain electrodes provided on the first nitride semiconductor layer, each of the drain electrodes provided between the source electrodes; gate electrodes provided on the first nitride semiconductor layer, each of the gate electrodes provided between each of the source electrodes and each of the drain electrodes; a first wire provided on the second plane and electrically connected to the source electrodes; a second wire electrically connected to the drain electrodes; a third wire provided on the second plane and electrically connected to the gate electrodes; and an insulating interlayer provided between the first nitride semiconductor layer and the second wire.
    Type: Grant
    Filed: December 28, 2016
    Date of Patent: October 23, 2018
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Yosuke Kajiwara, Kentaro Ikeda, Hisashi Saito, Masahiko Kuraguchi
  • Patent number: 10109716
    Abstract: A tunable breakdown voltage RF MESFET and/or MOSFET and methods of manufacture are disclosed. The method includes forming a first line and a second line on an underlying gate dielectric material. The second line has a width tuned to a breakdown voltage. The method further includes forming sidewall spacers on sidewalls of the first and second line such that the space between first and second line is pinched-off by the dielectric spacers. The method further includes forming source and drain regions adjacent outer edges of the first line and the second line, and removing at least the second line to form an opening between the sidewall spacers of the second line and to expose the underlying gate dielectric material. The method further includes depositing a layer of material on the underlying gate dielectric material within the opening, and forming contacts to a gate structure and the source and drain regions.
    Type: Grant
    Filed: September 24, 2015
    Date of Patent: October 23, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Vibhor Jain, Qizhi Liu, John J. Pekarik
  • Patent number: 10109717
    Abstract: A semiconductor device including a first fin protruding on a substrate and extending in a first direction; a first gate electrode on the first fin, the first gate electrode intersecting the first fin; a first trench formed within the first fin at a side of the first gate electrode; a first epitaxial layer filling a portion of the first trench, wherein a thickness of the first epitaxial layer becomes thinner closer to a sidewall of the first trench; and a second epitaxial layer filling the first trench on the first epitaxial layer, wherein a boron concentration of the second epitaxial layer is greater than a boron concentration of the first epitaxial layer.
    Type: Grant
    Filed: May 16, 2017
    Date of Patent: October 23, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Jung Han Lee, Myung Il Kang, Jae Hwan Lee, Sun Wook Kim, Seong Ju Kim, Sung Jin Park, Hong Seon Yang, Joo Hee Jung
  • Patent number: 10109718
    Abstract: A semiconductor component and a method for manufacturing the semiconductor component, wherein the semiconductor component includes a transient voltage suppression structure that includes at least two diodes and a Zener diode. In accordance with embodiments, a semiconductor material is provided that includes an epitaxial layer. The at least two diodes and the Zener diode are created at the surface of the epitaxial layer, where the at least two diodes may be adjacent to the Zener diode.
    Type: Grant
    Filed: May 1, 2014
    Date of Patent: October 23, 2018
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Umesh Sharma, Harry Yue Gee, Der Min Liou, David D Marreiro, Sudhama C Shastri
  • Patent number: 10109719
    Abstract: In one general aspect, a method of fabricating a power device can include preparing a semiconductor substrate of a first conductivity type, and forming a first Field Stop (FS) layer and a second FS layer.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: October 23, 2018
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Kyu-hyun Lee, Se-kyeong Lee, Doo-seok Yoon, Soo-hyun Kang, Young-chul Choi
  • Patent number: 10109720
    Abstract: A semiconductor device and a manufacturing method thereof are provided. The semiconductor device includes a substrate, a patterned conductive layer and an epitaxial layer. The substrate includes a first fin structure and a second fin structure respectively protruding from a top surface of the substrate, and the second fin structure has a recess. The patterned conductive layer is disposed on the substrate and covers a first end of the first fin structure. The epitaxial layer is disposed in the recess. The first end of the first fin structure and a second end of the epitaxial layer face a first direction.
    Type: Grant
    Filed: June 9, 2017
    Date of Patent: October 23, 2018
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Tan-Ya Yin, Chia-Wei Huang
  • Patent number: 10109721
    Abstract: Various semiconductor devices, such as horizontal gate-all-around devices, and methods of fabricating such are disclosed herein. An exemplary semiconductor device includes a fin structure having a channel region disposed between a first source/drain region and a second source/drain region. The fin structure includes a first nanowire and a second nanowire disposed in the channel region, the first source/drain region, and the second source/drain region. The fin structure further includes an epitaxial layer that wraps the first nanowire and the second nanowire in the first source/drain region and the second source/drain region. A gate is disposed over the channel region of the fin structure, such that the gate wraps the first nanowire and the second nanowire in the channel region. In some implementations, the first nanowire, the second nanowire, and the epitaxial layer combine to have a vertical bar-like shape in the first source/drain region and the second source/drain region.
    Type: Grant
    Filed: August 7, 2017
    Date of Patent: October 23, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun-Hsiung Lin, Chung-Cheng Wu, Carlos H. Diaz, Chih-Hao Wang, Wen-Hsing Hsieh, Yi-Ming Sheu
  • Patent number: 10109722
    Abstract: The disclosure relates to methods of forming etch-resistant spacers in an integrated circuit (IC) structure. Methods according to the disclosure can include: forming a mask on an upper surface of a gate structure positioned over a substrate; forming a spacer material on the substrate, the mask, and exposed sidewalls of the gate structure; forming a separation layer over the substrate and laterally abutting the spacer material to a predetermined height, such that an exposed portion of the spacer material is positioned above an upper surface of the separation layer and at least partially in contact with the mask; and implanting a dopant into the exposed portion of the spacer material to yield a dopant-implanted region within the spacer material, wherein the dopant-implanted region of the spacer material has a greater etch resistivity than a remainder of the spacer material.
    Type: Grant
    Filed: March 2, 2017
    Date of Patent: October 23, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Ruilong Xie, Zhenxing Bi, Pietro Montanini, Eric R. Miller, Balasubramanian Pranatharthiharan, Oleg Gluschenkov, Ruqiang Bao, Kangguo Cheng
  • Patent number: 10109723
    Abstract: A method of forming a semiconductor device that includes forming a fin structure from a bulk semiconductor substrate and forming an isolation region contacting a lower portion of a sidewall of the fin structure, wherein an upper portion of the sidewall of the fin structure is exposed. A sacrificial spacer is formed on the upper portion of the sidewall of the fin structure. The isolation regions are recessed to provide an exposed section of the sidewall of the fin structure. A doped semiconductor material is formed on the exposed section of the lower portion of the sidewall of the fin structure. Dopant is diffused from the doped semiconductor material to a base portion of the fin structure.
    Type: Grant
    Filed: November 3, 2016
    Date of Patent: October 23, 2018
    Assignee: International Business Machines Corporation
    Inventors: Veeraraghavan S. Basker, Zuoguang Liu, Tenko Yamashita, Chun-Chen Yeh
  • Patent number: 10109724
    Abstract: A heterojunction bipolar transistor unit cell may include a compound semiconductor substrate. The heterojunction bipolar transistor unity may also include a base mesa on the compound semiconductor substrate. The base mesa may include a collector region on the compound semiconductor substrate and a base region on the collector region. The heterojunction bipolar transistor unity may further include a single emitter mesa on the base mesa.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: October 23, 2018
    Assignee: QUALCOMM Incorporated
    Inventors: Gengming Tao, Bin Yang, Xia Li, Miguel Miranda Corbalan
  • Patent number: 10109725
    Abstract: A reverse-conducting MOS device is provided having an active cell region and a termination region. Between a first and second main side. The active cell region comprises a plurality of MOS cells with a base layer of a second conductivity type. On the first main side a bar of the second conductivity type, which has a higher maximum doping concentration than the base layer, is arranged between the active cell region and the termination region, wherein the bar is electrically connected to the first main electrode. On the first main side in the termination region a variable-lateral-doping layer of the second conductivity type is arranged. A protection layer of the second conductivity type is arranged in the variable-lateral-doping layer, which protection layer has a higher maximum doping concentration than the maximum doping concentration of the variable-lateral-doping layer in a region attached to the protection layer.
    Type: Grant
    Filed: June 22, 2017
    Date of Patent: October 23, 2018
    Assignee: ABB Schweiz AG
    Inventors: Liutauras Storasta, Chiara Corvasce, Manuel Le Gallo, Munaf Rahimo, Arnost Kopta
  • Patent number: 10109726
    Abstract: A semiconductor device including a mesa portion formed on a front surface side of a semiconductor substrate; a floating portion formed on the front surface side of the semiconductor substrate; a trench formed surrounding the floating portion and separating the mesa portion from the floating portion; an electrode formed inside the trench; and an outside wiring portion formed along an arrangement direction of the mesa portion and the floating portion, outside the region surrounded by the trench. An edge of the outside wiring portion on the mesa portion and floating portion side includes a protruding portion formed in at least part of a region opposite the floating portion and protruding beyond the trench toward the floating portion side, and a recessed portion formed in at least part of a region opposite the mesa portion and recessed to the outside wiring portion side farther than the protruding portion.
    Type: Grant
    Filed: November 30, 2016
    Date of Patent: October 23, 2018
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Tatsuya Naito
  • Patent number: 10109727
    Abstract: A semiconductor device includes a lateral switching device having: a substrate; a channel forming layer that has a heterojunction structure made of a GaN layer and an AlGaN layer and is formed with a recessed portion, on the substrate; a gate structure part that includes a gate insulating film and a gate electrode formed in the recessed portion; and a source electrode and a drain electrode on opposite sides of the gate structure part on the channel forming layer. The AlGaN layer includes a first AlGaN layer that has an Al mixed crystal ratio determining a two dimensional electron gas density, and a second AlGaN layer that has an Al mixed crystal ratio smaller than that of the first AlGaN layer to induce negative fixed charge, and is disposed in contact with the gate structure part and spaced from the source electrode and the drain electrode.
    Type: Grant
    Filed: December 8, 2015
    Date of Patent: October 23, 2018
    Assignee: DENSO CORPORATION
    Inventors: Kazuhiro Oyama, Yasushi Higuchi, Seigo Oosawa, Masaki Matsui, Youngshin Eum
  • Patent number: 10109728
    Abstract: A transistor structure including a scandium gallium nitride back-barrier layer. For instance, the transistor structure may include a buffer layer disposed on a substrate and a back-barrier layer disposed on the buffer layer, the back-barrier layer including scandium gallium nitride (ScxGa1-xN). The transistor structure may further include a channel layer disposed on the back-barrier layer, and a barrier layer disposed on the channel layer. The barrier layer may include at least one of aluminum gallium nitride, indium gallium aluminum nitride, scandium aluminum nitride, scandium aluminum gallium nitride, or indium gallium boron aluminum nitride. The transistor structure may be incorporated into a high electron mobility transistor (HEMT).
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: October 23, 2018
    Inventor: Robert L. Coffie
  • Patent number: 10109729
    Abstract: The present disclosure relates to a transistor device having a donor bi-layer configured to provide low-resistance to source and drain contacts while maintaining a high-mobility two-dimensional electron gas within a channel layer, and an associated method of formation. In some embodiments, the transistor device has a channel layer disposed over a substrate and a donor bi-layer disposed over the channel layer. The donor bi-layer includes a mobility-enhancing layer of AlzGa(1-z)N disposed over the channel layer and having a first molar fraction z in a first range, and a resistance-reducing layer of AlxGa(1-x)N disposed on and in contact with the mobility-enhancing layer of AlzGa(1-z)N and having a second molar fraction x in a second range less than the first range. Source and drain contacts are over the resistance-reducing layer of AlxGa(1-x)N. The donor bi-layer has a conduction band energy that monotonically decreases from top to bottom surfaces of the donor bi-layer.
    Type: Grant
    Filed: August 22, 2016
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Po-Chun Liu, Chung-Yi Yu, Chi-Ming Chen, Chen-Hao Chiang
  • Patent number: 10109730
    Abstract: A semiconductor device includes a codoped layer, a channel layer, a barrier layer, and a gate electrode disposed in a trench extending through the barrier layer and reaching a middle point in the channel layer via a gate insulating film. On both sides of the gate electrode, a source electrode and a drain electrode are formed. On the source electrode side, an n-type semiconductor region is disposed to fix a potential and achieve a charge removing effect while, on the drain electrode side, a p-type semiconductor region is disposed to improve a drain breakdown voltage. By introducing hydrogen into a region of the codoped layer containing Mg as a p-type impurity in an amount larger than that of Si as an n-type impurity where the n-type semiconductor region is to be formed, it is possible to inactivate Mg and provide the n-type semiconductor region.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: October 23, 2018
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Tatsuo Nakayama, Hironobu Miyamoto
  • Patent number: 10109731
    Abstract: A power MOSFET includes an insulating layer, a first conductivity type doping layer situated on a bottom of the insulating layer, a second conductivity type body situated on a bottom of the first conductivity type doping layer, a gate electrode adjacent to the bottom of the insulating layer and covered with an insulating film in other regions and projected to penetrate the second conductivity type body, and a source electrode including a first region situated on a top of the insulating layer and a second region in contact with the first conductivity type doping layer by penetrating the insulating layer.
    Type: Grant
    Filed: October 26, 2016
    Date of Patent: October 23, 2018
    Assignees: Magnachip Semiconductor, Ltd., ITM Semiconductor Co., Ltd.
    Inventors: Soo Chang Kang, Seung Hyun Kim, Yong Won Lee, Ho Seok Hwang, Sang Hoon Ahn
  • Patent number: 10109732
    Abstract: A device includes a semiconductor region of a first conductivity type, a trench extending into the semiconductor region, and a conductive field plate in the trench. A first dielectric layer separates a bottom and sidewalls of the field plate from the semiconductor region. A main gate is disposed in the trench and overlapping the field plate. A second dielectric layer is disposed between and separating the main gate and the field plate from each other. A Doped Drain (DD) region of the first conductivity type is under the second dielectric layer, wherein an edge portion of the main gate overlaps the DD region. A body region includes a first portion at a same level as a portion of the main gate, and a second portion at a same level as, and contacting, the DD region, wherein the body region is of a second conductivity type opposite the first conductivity type.
    Type: Grant
    Filed: July 27, 2016
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chun-Wai Ng, Hsueh-Liang Chou, Ruey-Hsin Liu, Po-Chih Su
  • Patent number: 10109733
    Abstract: In a semiconductor device, in a gate insulating film which is formed on/over an inner wall of a trench, the film thickness of a part of a gate insulating film formed so as to cover a corner of the trench is made thicker than the film thickness of a part of the gate insulating film part formed on/over a side face of the trench.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: October 23, 2018
    Assignee: RENESAS ELECTRONICS CORPORATION
    Inventors: Yasunori Yamashita, Koichi Arai, Kenichi Hisada
  • Patent number: 10109734
    Abstract: A semiconductor device comprises a transistor in a semiconductor body having a first main surface. The transistor comprises a source region of a first conductivity type, a drain region, a body region of a second conductivity type, different from the first conductivity type, and a gate electrode disposed in gate trenches extending in a first direction parallel to the first main surface. The source region, the body region and the drain region are arranged along the first direction. The body region comprises first ridges extending along the first direction, the first ridges being disposed between adjacent gate trenches in the semiconductor body. The body region further comprises a second ridge. A width of the second ridge is larger than a width of the first ridges, the widths being measured in a second direction perpendicular to the first direction.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: October 23, 2018
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Till Schloesser
  • Patent number: 10109735
    Abstract: A process for fabricating a gate-wrap-around field-effect transistor is provided, including: providing a superposition of first to third nanowires, each made of a semiconductor, the second nanowire being subjected to a strain along its longitudinal axis, a median portion of the first to third nanowires being covered by a sacrificial gate; forming voids by removing a portion of the first and third nanowires that is intermediate between their ends and their median portion, while preserving the superposition of the first to third nanowires level with the ends and under the sacrificial gate; forming an electrical insulator in the voids around the second nanowire; removing the sacrificial gate and the median portion of the first and third nanowires; and forming a gate electrode wrapped around the median portion of the second nanowire.
    Type: Grant
    Filed: October 12, 2017
    Date of Patent: October 23, 2018
    Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
    Inventors: Remi Coquand, Emmanuel Augendre, Shay Reboh
  • Patent number: 10109736
    Abstract: A transistor with a multi-strained layer superlattice (SLS) structure is provided. A first strained layer superlattice (SLS) layer is arranged over a substrate. A first buffer layer is arranged over the first SLS layer and includes dopants configured to increase a resistance of the first buffer layer. A second SLS layer is arranged over the first buffer layer. A second buffer layer is arranged over the second SLS layer and includes dopants configured to increase a resistance of the second buffer layer. A channel layer is arranged over the second buffer layer. An active layer is arranged over and directly abuts the channel layer. The channel and active layers collectively define a heterojunction. A method for manufacturing the transistor is also provided.
    Type: Grant
    Filed: February 12, 2015
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chi-Ming Chen, Chung-Yi Yu, Po-Chun Liu
  • Patent number: 10109737
    Abstract: A method of forming high germanium content silicon germanium alloy fins with controlled insulator layer recessing is provided. A silicon germanium alloy (SiGe) layer having a first germanium content is provided on a surface of an insulator layer using a first condensation process. Following the formation of a hard mask layer portion on the SiGe layer, a second condensation process is performed to convert a portion of the SiGe layer into a SiGe fin of a second germanium content that is greater than the first germanium content and other portions of the SiGe layer into a shell oxide structure located on sidewalls of the SiGe fin. After forming a fin placeholder material, a portion of each shell oxide structure is removed, while maintaining a lower portion of each shell oxide structure at the footprint of the SiGe fin.
    Type: Grant
    Filed: June 5, 2017
    Date of Patent: October 23, 2018
    Assignee: International Business Machines Corporation
    Inventors: Pouya Hashemi, Renee T. Mo, John A. Ott, Alexander Reznicek
  • Patent number: 10109738
    Abstract: A semiconductor device is provided that includes a deep trench defining an active region, and a fin-type pattern protruding within the active region. The fin-type pattern having a lower portion, an upper portion of a narrower width than the lower portion, and a first stepped portion formed at a boundary between the upper portion and the lower portion. The device also includes a first field insulating film surrounding the lower portion and a second field insulating film formed on the first field insulating film and partially surrounding the upper portion.
    Type: Grant
    Filed: November 14, 2017
    Date of Patent: October 23, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung-soo Kim, Song-E Kim, Koung-Min Ryu, Sun-Ki Min
  • Patent number: 10109739
    Abstract: A FinFET including a substrate, a plurality of insulators and a gate stack is provided. The substrate comprises a plurality of trenches and at least one semiconductor fin between the trenches, wherein the semiconductor fin comprises at least one groove, and the at least one groove is located on a top surface of the semiconductor fin. The insulators are disposed in the trenches. The gate stack partially covers the semiconductor fin, the at least one groove and the insulators.
    Type: Grant
    Filed: April 15, 2016
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Hua Kuan, Chen-Chieh Chiang, Chi-Cherng Jeng
  • Patent number: 10109740
    Abstract: An antifuse device includes a gate structure formed on a substrate including first spacers formed in an upper portion and a conductive material formed in a lower portion below the first spacers. Two conductive regions are disposed adjacent to the gate structure and on opposite sides of the gate structure. A dielectric barrier is formed between the conductive material and each of the conductive regions such that a dual antifuse is formed across the dielectric barrier between the conductive material and the conductive regions on each side of the gate structure.
    Type: Grant
    Filed: July 18, 2016
    Date of Patent: October 23, 2018
    Assignee: International Business Machines Corporation
    Inventors: Praneet Adusumilli, Alexander Reznicek, Oscar van der Straten
  • Patent number: 10109741
    Abstract: An improved conductive feature for a semiconductor device and a technique for forming the feature are provided. In an exemplary embodiment, the semiconductor device includes a substrate having a gate structure formed thereupon. The gate structure includes a gate dielectric layer disposed on the substrate, a growth control material disposed on a side surface of the gate structure, and a gate electrode fill material disposed on the growth control material. The gate electrode fill material is also disposed on a bottom surface of the gate structure that is free of the growth control material. In some such embodiments, the gate electrode fill material contacts a first surface and a second surface that are different in composition.
    Type: Grant
    Filed: October 11, 2016
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Nan Wu, Shiu-Ko JangJian, Chun Che Lin, Wen-Cheng Hsuku
  • Patent number: 10109742
    Abstract: A method for manufacturing a semiconductor device includes forming a fin structure over a substrate. The fin structure has a top surface and side surfaces and the top surface is located at a height H0 measured from the substrate. An insulating layer is formed over the fin structure and the substrate. In the first recessing, the insulating layer is recessed to a height T1 from the substrate, so that an upper portion of the fin structure is exposed from the insulating layer. A semiconductor layer is formed over the exposed upper portion. After forming the semiconductor layer, in the second recessing, the insulating layer is recessed to a height T2 from the substrate, so that a middle portion of the fin structure is exposed from the insulating layer. A gate structure is formed over the upper portion with the semiconductor layer and the exposed middle portion of the fin structure.
    Type: Grant
    Filed: September 30, 2015
    Date of Patent: October 23, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yuan-Shun Chao, Chih-Pin Tsao, Hou-Yu Chen
  • Patent number: 10109743
    Abstract: A highly reliable semiconductor device is manufactured by giving stable electric characteristics to a transistor in which an oxide semiconductor film is used. In a transistor using an oxide semiconductor film for an active layer, a microvoid is provided in a source region and a drain region adjacent to a channel region. By providing a microvoid in the source region and the drain region formed in an oxide semiconductor film, hydrogen contained in the channel region of an oxide semiconductor film can be captured in the microvoid.
    Type: Grant
    Filed: June 9, 2016
    Date of Patent: October 23, 2018
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Junichi Koezuka, Yuichi Sato, Shinji Ohno
  • Patent number: 10109744
    Abstract: It is an object of the present invention to connect a wiring, an electrode, or the like formed with two incompatible films (an ITO film and an aluminum film) without increasing the cross-sectional area of the wiring and to achieve lower power consumption even when the screen size becomes larger. The present invention provides a two-layer structure including an upper layer and a lower layer having a larger width than the upper layer. A first conductive layer is formed with Ti or Mo, and a second conductive layer is formed with aluminum (pure aluminum) having low electric resistance over the first conductive layer. A part of the lower layer projected from the end section of the upper layer is bonded with ITO.
    Type: Grant
    Filed: July 19, 2017
    Date of Patent: October 23, 2018
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Yoshinari Higaki, Masayuki Sakakura, Shunpei Yamazaki
  • Patent number: 10109745
    Abstract: A method of manufacturing a flexible display is disclosed. In one aspect, the method includes attaching a protective film to a flexible display panel. The flexible display panel includes a bending region along which the flexible display panel is configured to be bent. The method also includes removing a portion of the protective film that corresponds to the bending region and bending the flexible display panel along the bending region.
    Type: Grant
    Filed: October 20, 2015
    Date of Patent: October 23, 2018
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Jisung Ko, Youngji Kim, Jongseong Kim, Taehyun Sung, Hyungu Lee
  • Patent number: 10109746
    Abstract: Disclosed is a graphene transistor using graphene as a channel region and a logic device using the same. A doping metal layer is provided over a graphene channel of the graphene transistor. The doping metal layer has a work function higher or lower than that of the graphene. When the doping metal layer has a work function lower than that of the graphene, the graphene, which is below the doping metal layer, is doped with an n-type. Also, when the doping metal layer has a work function higher than that of the graphene, the graphene, which is below the doping metal layer, is doped with a p-type. As described above, various aspects of junction may be implemented in the graphene channel, and three states may be obtained from a single transistor.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: October 23, 2018
    Assignee: GWANGJU INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Byoung Hun Lee, Yun Ji Kim, So Young Kim
  • Patent number: 10109747
    Abstract: A semiconductor memory device and a method of fabricating the same. The device includes a plurality of gates vertically stacked on a top surface of a substrate with an epitaxial layer formed in the substrate, a vertical channel vertically penetrating the gates to be electrically connected to the epitaxial layer, and a memory layer provided between the vertical channel and the gates. The epitaxial layer has a top surface positioned at a level between a bottom surface of the lowermost one of the gates and the top surface of the substrate.
    Type: Grant
    Filed: August 20, 2015
    Date of Patent: October 23, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Byong-Hyun Jang, Juhyung Kim, Woonkyung Lee, Jaegoo Lee, Chaeho Kim, Junkyu Yang, Phil Ouk Nam, Jaeyoung Ahn, Kihyun Hwang
  • Patent number: 10109748
    Abstract: A multi-gate transistor includes a semiconductor fin over a substrate. The semiconductor fin includes a central fin formed of a first semiconductor material; and a semiconductor layer having a first portion and a second portion on opposite sidewalls of the central fin. The semiconductor layer includes a second semiconductor material different from the first semiconductor material. The multi-gate transistor further includes a gate electrode wrapping around sidewalls of the semiconductor fin; and a source region and a drain region on opposite ends of the semiconductor fin. Each of the central fin and the semiconductor layer extends from the source region to the drain region.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: October 23, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chih-Hsin Ko, Clement Hsingjen Wann
  • Patent number: 10109749
    Abstract: This semiconductor device includes: a semiconductor layer that is formed of first conductivity-type SiC; a plurality of trenches that are formed in the semiconductor layer; second conductivity-type column regions that are formed along the inner surfaces of the trenches; a first conductivity-type column region that is disposed between the adjacent second conductivity-type column regions; and insulating films that are embedded in the trenches. The semiconductor device is capable of improving a withstand voltage by means of a super junction structure. The semiconductor device may also include an electric field attenuation section for attenuating electric field intensity of a surface section of the first conductivity-type column region.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: October 23, 2018
    Assignee: ROHM CO., LTD.
    Inventors: Masatoshi Aketa, Yoshikatsu Miura
  • Patent number: 10109750
    Abstract: A lead-free conductive paste composition contains a source of an electrically conductive metal, a fusible material, an optional additive, and an organic vehicle. An article such as a high-efficiency photovoltaic cell is formed by a process of deposition of the lead-free paste composition on a semiconductor substrate (e.g., by screen printing) and firing the paste to remove the organic vehicle and sinter the metal and fusible material.
    Type: Grant
    Filed: April 21, 2015
    Date of Patent: October 23, 2018
    Assignee: E I DU PONT DE NEMOURS AND COMPANY
    Inventors: Carmine Torardi, Paul Douglas Vernooy
  • Patent number: 10109751
    Abstract: A method for fabricating a solar cell is disclosed. The method can include forming a dielectric region on a surface of a solar cell structure and forming a first metal layer on the dielectric region. The method can also include forming a second metal layer on the first metal layer and locally heating a particular region of the second metal layer, where heating includes forming a metal bond between the first and second metal layer and forming a contact between the first metal layer and the solar cell structure. The method can include forming an adhesive layer on the first metal layer and forming a second metal layer on the adhesive layer, where the adhesive layer mechanically couples the second metal layer to the first metal layer and allows for an electrical connection between the second metal layer to the first metal layer.
    Type: Grant
    Filed: February 17, 2017
    Date of Patent: October 23, 2018
    Assignees: SUNPOWER CORPORATION, TOTAL MARKETING SERVICES
    Inventors: Matthieu Moors, Taeseok Kim
  • Patent number: 10109752
    Abstract: A transparent electrode can include a graphene sheet on a substrate, a layer including a conductive polymer disposed over the graphene sheet, and a plurality of semiconducting nanowires, such as ZnO nanowires, disposed over the layer including the conductive polymer.
    Type: Grant
    Filed: November 26, 2013
    Date of Patent: October 23, 2018
    Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: Hyesung Park, Sehoon Chang, Jing Kong, Silvija Gradecak
  • Patent number: 10109753
    Abstract: Embodiments of the present invention provide a compound optical filter device comprising a semiconductor substrate having an optical transducer formed on the semiconductor substrate, the optical transducer responsive to light to produce a signal or responsive to a signal to emit light. An optical filter comprises a filter substrate separate and independent from the semiconductor substrate and one or more optical filter layers disposed on the filter substrate. The filter substrate is micro-transfer printed on or over the semiconductor substrate or on layers formed over the semiconductor substrate and over the optical transducer to optically filter the light to which the optical transducer is responsive or to optically filter the light emitted by the optical transducer. In further embodiments, the optical filter is an interference filter and the semiconductor substrate includes active components that can control or operate the optical transducer.
    Type: Grant
    Filed: February 19, 2016
    Date of Patent: October 23, 2018
    Assignee: X-Celeprint Limited
    Inventors: Christopher Bower, Ronald S. Cok
  • Patent number: 10109754
    Abstract: Disclosed is at least one embodiment of an infrared (IR) photovoltaic (PV) detector, comprising a IV-VI Lead (Pb)-salt layer disposed on a substrate and a charge-separation-junction (CSJ) structure associated with the IV-VI Pb-salt layer, wherein the CSJ structure comprises a plurality of element areas disposed upon or within the IV-VI Pb-salt layer, wherein the plurality of element areas are spaced apart from each other. Each element area may be connected to a first Ohmic contact thereby forming a plurality of interconnected first Ohmic contacts, and a second Ohmic contact may be disposed upon a portion of the IV-VI Pb-salt layer. In another non-limiting embodiment, a PV detector, comprising a heterojunction region that comprises at least one IV-VI Pb-salt material layer coupled to at least one non-Pb-salt layer, wherein the at least one IV-VI Pb-salt layer and the at least one non-Pb-salt layer form a p-n junction or Schottky junction with a type II band gap alignment.
    Type: Grant
    Filed: December 18, 2015
    Date of Patent: October 23, 2018
    Assignee: The Board of Regents of the University of Oklahoma
    Inventor: Zhisheng Shi
  • Patent number: 10109755
    Abstract: Techniques for fabrication of kesterite Cu—Zn—Sn—(Se,S) films and improved photovoltaic devices based on these films are provided. In one aspect, a method of fabricating a kesterite film having a formula Cu2?xZn1+ySn(S1?zSez)4+q, wherein 0?x?1; 0?y?1; 0?z?1; and ?1?q?1 is provided. The method includes the following steps. A substrate is provided. A bulk precursor layer is formed on the substrate, the bulk precursor layer comprising Cu, Zn, Sn and at least one of S and Se. A capping layer is formed on the bulk precursor layer, the capping layer comprising at least one of Sn, S and Se. The bulk precursor layer and the capping layer are annealed under conditions sufficient to produce the kesterite film having values of x, y, z and q for any given part of the film that deviate from average values of x, y, z and q throughout the film by less than 20 percent.
    Type: Grant
    Filed: May 26, 2016
    Date of Patent: October 23, 2018
    Assignee: International Business Machines Corporation
    Inventors: Santanu Bag, David Aaron Randolph Barkhouse, David Brian Mitzi, Teodor Krassimirov Todorov
  • Patent number: 10109756
    Abstract: A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
    Type: Grant
    Filed: August 12, 2015
    Date of Patent: October 23, 2018
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Hung Cheng, Chia-Shiung Tsai, Cheng-Ta Wu, Xiaomeng Chen, Yen-Chang Chu, Yeur-Luen Tu
  • Patent number: 10109757
    Abstract: A solar cell system includes a number of P-N junction cells, a number of inner electrodes, a first collecting electrode, a second collecting electrode and a reflector. The number of the P-N junction cells is M. M is equal to or greater than 2. The M P-N junction cells are arranged from a first P-N junction cell to an Mth P-N junction cell along the straight line. The P-N junction cells are arranged in series along a straight line. The number of the inner electrodes is M?1. At least one inner electrode includes a plurality of carbon nanotubes. A photoreceptive surface is parallel to the straight line. A reflector is located on an emitting surface opposite to the photoreceptive surface.
    Type: Grant
    Filed: June 8, 2014
    Date of Patent: October 23, 2018
    Assignees: Tsinghua University, HON HAI PRECISION INDUSTRY CO., LTD.
    Inventors: Yuan-Hao Jin, Qun-Qing Li, Shou-Shan Fan
  • Patent number: 10109758
    Abstract: A Monolithic photovoltaic cell is proposed. Said cell comprises at least one junction. Each one of said at least one junction comprises a base formed by a doped semiconductor material of a first conductivity type and an emitter formed by a doped semiconductor material of a second conductivity type opposed to the first. Said emitter is stacked on the base according to a first direction. The semiconductor material of the base and/or of the emitter of at least one of said at least one junction is a semiconductor material formed by a compound of at least one first element and a second element. The band gap and the lattice constant of said semiconductor material of the base and/or of the emitter depend on the concentration of said first element in said compound with respect to said second element.
    Type: Grant
    Filed: July 28, 2014
    Date of Patent: October 23, 2018
    Assignee: CESI—Centro Elettrotecnico Sperimentale Italiano Giacinto Motta S.p.A.
    Inventors: Roberta Campesato, Gabriele Gori
  • Patent number: 10109759
    Abstract: A semiconductor module includes a photocoupler, a gate driving IC, and a switching element, and at least one of a first structure and a second structure, wherein the first structure is a structure where in a part of a surface of a first lead frame joined to a bottom surface electrode of a light-emitting element, a first conductive layer is disposed with an insulating layer interposed, and a top surface electrode of the light-emitting element, and the first conductive layer are electrically connected by a wire, and the second structure is a structure where in a part of a surface of a second lead frame joined to a bottom surface electrode of a light-receiving element, a second conductive layer is disposed with an insulating layer interposed, and a top surface electrode of the light-receiving element, and the second conductive layer are electrically connected by a wire.
    Type: Grant
    Filed: December 11, 2017
    Date of Patent: October 23, 2018
    Assignee: Mitsubishi Electric Corporation
    Inventor: Toshiya Tadakuma
  • Patent number: 10109760
    Abstract: The size-dependent band-gap tunability and solution processability of nanocrystals (NCs) make them attractive candidates for optoelectronic applications. One factor that presently limits the device performance of NC thin films is sub-bandgap states, also referred to as trap states. Trap states can be controlled by surface treatment of the nanocrystals.
    Type: Grant
    Filed: April 8, 2016
    Date of Patent: October 23, 2018
    Assignee: MASSACHUSETTS INSTITUTE OF TECHNOLOGY
    Inventors: Gyuweon Hwang, Donghun Kim, Jose M. Cordero, Mark W. B. Wilson, Chia-Hao M. Chuang, Jeffrey C. Grossman, Moungi G. Bawendi
  • Patent number: 10109761
    Abstract: A method (200) for fabricating thin-film optoelectronic devices (100), the method comprising: providing a substrate (110), forming a back-contact layer (120); forming at least one absorber layer (130) made of an ABC chalcogenide material, adding at least one alkali metal (235), and forming at least one cavity (236, 610, 612, 613) at the surface of the absorber layer wherein forming of said at least one cavity is by dissolving away from said surface of the absorber layer at least one crystal aggregate comprising at least one alkali crystal comprising at least one alkali metal. The method (200) is advantageous for more environmentally-friendly production of photovoltaic devices (100) on flexible substrates with high photovoltaic conversion efficiency and faster production rate.
    Type: Grant
    Filed: May 21, 2015
    Date of Patent: October 23, 2018
    Assignees: FLISOM AG, EMPA
    Inventors: Patrick Reinhard, Fabian Pianezzi, Benjamin Bissig, Stephan Buecheler, Ayodhya Nath Tiwari
  • Patent number: 10109762
    Abstract: A light source includes an upper electrode layer, a lower electrode layer, and an active layer interposed therebetween. At least one of the upper and lower electrode layers is divided into a plurality of electrodes separated from each other in an in-plane direction of the active layer. The separated electrodes independently inject current into a plurality of different regions in the active layer. The light source emits light by injecting current from the upper and lower electrode layers into the active layer, guide the light in the in-plane direction, and output the light. The plurality of different regions in the active layer include a first region not including a light exit end and a second region including the light exit end, and the second region is configured to emit light of at least first-order level. The active layer has an asymmetric multiple quantum well structure.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: October 23, 2018
    Assignee: Canon Kabushiki Kaisha
    Inventors: Kenji Yamagata, Toshimitsu Matsuu, Takeshi Yoshioka, Takeshi Uchida
  • Patent number: 10109763
    Abstract: A light-emitting device that may be manufactured includes an n-type semiconductor layer including a first dopant on a substrate, an active layer on the n-type semiconductor layer, and a p-type semiconductor layer including a second dopant on the active layer. The light-emitting device may be formed according to at least one of a first layering process and a second layering process. The first layering process may include implanting the first dopant into the n-type semiconductor layer into the n-type semiconductor layer according to an ion-implantation process, and the second layering process may include implanting the second dopant into the p-type semiconductor layer according to an ion-implantation process. Forming a semiconductor layer that includes an ion-implanted dopant may include thermally annealing the semiconductor layer subsequent to the ion implantation.
    Type: Grant
    Filed: November 21, 2016
    Date of Patent: October 23, 2018
    Assignee: Samsung Electronics Co., LTD.
    Inventors: Jae-sung Hyun, Dong-yul Lee, Jung-kyu Park
  • Patent number: 10109764
    Abstract: The present invention provides structures and methods that enable the construction of micro-LED chiplets formed on a sapphire substrate that can be micro-transfer printed. Such printed structures enable low-cost, high-performance arrays of electrically connected micro-LEDs useful, for example, in display systems. Furthermore, in an embodiment, the electrical contacts for printed LEDs are electrically interconnected in a single set of process steps. In certain embodiments, formation of the printable micro devices begins while the semiconductor structure remains on a substrate. After partially forming the printable micro devices, a handle substrate is attached to the system opposite the substrate such that the system is secured to the handle substrate. The substrate may then be removed and formation of the semiconductor structures is completed. Upon completion, the printable micro devices may be micro transfer printed to a destination substrate.
    Type: Grant
    Filed: September 15, 2017
    Date of Patent: October 23, 2018
    Assignee: X-Celeprint Limited
    Inventors: Christopher Bower, Matthew Meitl, David Gomez, Carl Prevatte, Salvatore Bonafede