Patents Issued in April 25, 2019
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Publication number: 20190121212Abstract: A liquid crystal display device includes: a plurality of scan lines and signal lines on one of a pair of substrates arranged to be opposed to each other with a liquid crystal layer sandwiched therebetween, the scan lines and signal lines extending in different directions; and an orientation film, pixel electrode, insulating layer and common electrode, the orientation film being rubbed in a rubbing direction having a given inclination with respect to a pixel arrangement direction. The pixel electrode is partitioned by the scan lines and signal lines and has subpixels made up of first and second regions. The first region has a plurality of slit-shaped openings having a given inclination in a first direction with respect to the rubbing direction. The second region has a plurality of slit-shaped openings having a given inclination in a second direction with respect to the rubbing direction.Type: ApplicationFiled: December 18, 2018Publication date: April 25, 2019Inventors: Daisuke Ito, Hideyuki Omori
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Publication number: 20190121213Abstract: Provided is an active matrix substrate that includes gate lines (13G), source lines, pixel switching elements, a plurality of gate line driving circuits (11) that control potentials of the gate lines, in the display region, and control signal lines (15L1) that supply a control signal to the gate line driving circuits (11). Each of the gate line driving circuits (11) includes driving switching elements and a capacitor. At least part of the driving switching elements and the capacitor are arranged at positions closer to, not the gate line (13G) corresponding to the gate line driving circuit (11), but another gate line (13G).Type: ApplicationFiled: December 18, 2018Publication date: April 25, 2019Inventors: TAKESHI NOMA, KOHHEI TANAKA, TAKAYUKI NISHIYAMA, RYO YONEBAYASHI
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Publication number: 20190121214Abstract: This disclosure provides connectors for smart windows. A smart window may incorporate an optically switchable pane. In one aspect, a window unit includes an insulated glass unit including an optically switchable pane. A wire assembly may be attached to the edge of the insulated glass unit and may include wires in electrical communication with electrodes of the optically switchable pane. A floating connector may be attached to a distal end of the wire assembly. The floating connector may include a flange and a nose, with two holes in the flange for affixing the floating connector to a first frame. The nose may include a terminal face that present two exposed contacts of opposite polarity.Type: ApplicationFiled: October 17, 2018Publication date: April 25, 2019Inventors: Travis D. Wilbur, Stephen Clark Brown
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Publication number: 20190121215Abstract: A first display includes a layer of electro-optic material with first and second electrodes on opposed sides thereof. One or both electrodes have at least two spaced contacts. Voltage control means are arranged to vary the potential difference between the two spaced contacts attached to the same electrode. A second display includes a layer of electro-optic material with a sequence of at least three electrodes adjacent thereto. Voltage control means vary the potential difference between the first and last electrodes of the sequence. The electrodes of the sequence alternate between two surfaces of the layer of electro-optic material, and have edges that overlap or lie adjacent the preceding and following electrodes of the sequence. The electrodes, other than the first and last, are electrically isolated such that the potential thereof is controlled by passage of current through the layer of electro-optic material. Methods for driving these displays are also provided.Type: ApplicationFiled: December 20, 2018Publication date: April 25, 2019Inventors: Richard J. PAOLINI, JR., Stephen BULL, Seth J. BISHOP, Karl Raymond AMUNDSON, Stephen J. TELFER, George G. HARRIS
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Publication number: 20190121216Abstract: Digital camera comprising an upright Wide camera configured to provide a Wide image with a Wide image resolution and a folded Tele camera configured to provide a Tele image with a Tele image resolution higher than the Wide image resolution, the Wide and Tele cameras having respective Wide and Tele fields of view FOVW and FOVT and respective Wide and Tele image sensors, the digital camera further comprising a rotating OPFE operative to provide a folded optical path between an object or scene and the Tele image sensor, wherein rotation of the OPFE moves FOVT relative to FOVW. In some embodiments, a rectangular FOVT is orthogonal to a rectangular FOVW. When included in a host device having a user interface that displays FOVT within FOVW, the user interface may be used to position FOVT relative to FOVW, scan FOVT across FOVW and acquire, store and display separate Wide and Tele images, composite Wide plus Tele images and stitched Tele images.Type: ApplicationFiled: December 5, 2016Publication date: April 25, 2019Inventors: Gal Shabtay, Ephraim Goldenberg, Eran Kali, Noy Cohen, Gil Avraham, Ruthy Katz
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Publication number: 20190121217Abstract: [Object] Technology capable of adjusting a view angle area more easily and intuitively is desired. [Solution] According to the present disclosure, there is provided an information processing device including: a control unit which superimposes an adjustment view angle area for adjusting a view angle area of one imaging device among a plurality of imaging devices onto the view angle area of the one imaging device. According to the present disclosure, since a control unit superimposes an adjustment view angle area onto a view angle area of one imaging device, a user can adjust the view angle area more easily and intuitively. Of course, the effects of the present disclosure are not limited thereto.Type: ApplicationFiled: March 10, 2017Publication date: April 25, 2019Inventors: Nobuho Ikeda, Hiroshi Ikeda, Seijiro Inaba, Hideyuki Sato
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Publication number: 20190121218Abstract: Photographic lighting devices, systems, and methods having a plurality of electrical energy storage/discharge (EESD) elements and/or one or more light sources in a single photographic lighting device to perform one or more photographic lighting effects. EESD elements and one or more light sources can be configured to have multiple separate light emissions occur in a single image acquisition window. The multiple light emissions are separated in an image acquisition window by a time period that is about shutter speed exposure time/(N?1), where N is the number of light emissions. In one such example, two light emissions are separated by a time period that is about shutter speed exposure time/(N?1).Type: ApplicationFiled: December 17, 2018Publication date: April 25, 2019Applicant: Lab Partners Associates, Inc.Inventor: James E. Clark
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Publication number: 20190121219Abstract: Disclosed is a shielding device, which includes: a casing having an open portion; a deformable unit installed at the casing and configured to be deformed in one direction at a predetermined temperature; a power transmission unit connected to the deformable unit to transmit a power generated by the deformation of the deformable unit; and a shielding unit installed at the casing and connected to the power transmission unit to receive the power from the power transmission unit, the shielding unit being configured to open or close the open portion, wherein the deformable unit is deformed at a first temperature to be expanded or compressed, and the shielding unit closes the open portion by means of the deformation of the deformable unit.Type: ApplicationFiled: May 22, 2018Publication date: April 25, 2019Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGYInventors: Donghyun HWANG, Doik KIM, Junsik KIM, Youngsu CHA
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Publication number: 20190121220Abstract: [Object] To provide a control device, control method, and program, capable of executing a process suitable for a state of proximity of an eye with respect to a viewfinder, and an operating state with respect to an operation display portion. [Solution] The control device includes a process control unit that executes a process related to shooting or playback of an image, on a basis of whether proximity of an eye with respect to a viewfinder is detected, and detection of an operation state with respect to an operation display portion.Type: ApplicationFiled: September 1, 2016Publication date: April 25, 2019Applicant: SONY CORPORATIONInventors: AYAKO IWASE, DAISUKE HIRO, LYO TAKAOKA
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Publication number: 20190121221Abstract: The fitting room comprises a portrait photographic system which comprises: a mirror; a support physically attached to the mirror, or to a structural member fixed thereto, the support being configured and arranged to interchangeably and removably attach thereto any of a plurality of portable computing devices having cameras; and a local computing entity adapted to establish a communication link with the portable computing device attached or to be attached to the support, in order to acquire one or more images of a user placed in front of the mirror with the built-in camera of the portable computing device once attached to the support. The computer program comprises computer subprograms adapted to operate the system of the fitting room of the invention.Type: ApplicationFiled: April 5, 2017Publication date: April 25, 2019Inventor: Francesc Xavier MARTÍ I RENOM
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Publication number: 20190121222Abstract: According to principles of the embodiments as disclosed herein, a device for monitoring the use of a handheld device is provided which allows for increased accuracy and ease of monitoring the use of handheld devices during usability testing. The device includes a handheld device mount configured to be releasably coupleable to a handheld device. The handheld device mount includes a cavity and a base and opposing first and second sides and first and second sidewalls extending from the base at the sides of the base. The mast has a first and second end. The first end of the mast is coupled to and extends from a third side of the cavity. A camera mount is located at the second end of the mast and configured to receive a camera.Type: ApplicationFiled: December 17, 2018Publication date: April 25, 2019Inventors: Karen Taxier, Luke VanDuyn, Matthew Bailey
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Publication number: 20190121223Abstract: The present technology relates to a compound-eye camera module and an electronic device in which a plurality of monocular camera modules can be fixed together by a connecting member more effectively. In the compound-eye camera module, a camera-side positioning portion for positioning formed on a camera-side reference surface of each of the monocular camera modules and a member-side positioning portion for positioning formed on a member-side reference surface of the connecting member are fitted together, to connect the plurality of monocular camera modules together, whereby the plurality of monocular camera modules can be fixed together by the connecting member more effectively. The present technology can be applied to, for example, a compound-eye camera module in which a plurality of CMOS image sensors is connected together.Type: ApplicationFiled: March 31, 2017Publication date: April 25, 2019Inventors: JUNICHI TOKUNAGA, SEIYA TSUZAKI, YUUJI KISHIGAMI
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Publication number: 20190121224Abstract: A method for calibrating a projection system having a plurality of projectors, and a camera. The method comprises the camera capturing an image of a calibration pattern projected on to a projection surface by a first projector of the plurality of projectors; determining a projective reconstruction using corresponding points between pixels in the captured image and pixels in the projected calibration pattern; and determining a set of solutions for intrinsic parameters of the first projector, the set of solutions converting the projective reconstruction to a Euclidean reconstruction based on minimisation of reprojection error between the camera and the first projector. The method also comprises determining intrinsic parameters of the first projector by selecting the intrinsic parameters from the set of solutions according to a reprojection error with respect to another projector; and applying the selected intrinsic parameters to determine a Euclidean reconstruction of the projection surface.Type: ApplicationFiled: October 9, 2018Publication date: April 25, 2019Inventors: CAMERON MURRAY EDWARDS, ERIC WAI SHING CHONG
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Publication number: 20190121225Abstract: A projector includes a light source device and a cooling device. The light source device includes a first light source having a plurality of first light emitting elements, a second light source having a plurality of second light emitting elements, and a light combining member adapted to combine light. The cooling device includes a first cooling section adapted to cool the first light emitting elements with a liquid refrigerant so that a first temperature difference increases in a first direction, and a second cooling section adapted to cool the second light emitting elements with a liquid refrigerant so that a second temperature difference increases in a second direction. The first and second light sources are arranged so that an illuminance distribution caused by the first temperature difference and an illuminance distribution caused by the second temperature difference are canceled out in the light combining member.Type: ApplicationFiled: October 24, 2018Publication date: April 25, 2019Applicant: SEIKO EPSON CORPORATIONInventors: Takahiro SUZUKI, Takahiro MIYATA, Makoto ZAKOJI
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Publication number: 20190121226Abstract: The present invention provides an electronic device, wherein the electronic device includes a projector and a controller. The projector includes a laser module and a lens module with a cover glass, wherein a laser beam generated from the laser module passes through the lens module to generate a projected image. The controller is coupled to the projector, and is arranged for determining if the cover glass is broken to generate a determination result, and controlling a power of the laser module according to the determination result.Type: ApplicationFiled: September 27, 2018Publication date: April 25, 2019Inventors: Biing-Seng Wu, Kuan-Ming Chen, Han-Yi Kuo, Li-Chiu Tsai, Chih-Yu Chuang
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Publication number: 20190121227Abstract: A projector is provided with a projection unit that projects an image on a projection surface; a detection unit that detects the direction of approach of an indication member or of the shadow of the indication member that has approached a detection region including the projection surface; and a controller that controls display gaps of a plurality of icons which is projected on the projection surface based on the projection direction in which the image is projected by the projection unit and the direction of approach which is detected by the detection unit, wherein the controller makes the display gaps when a plurality of the icons are projected along the projection direction wider than the display gaps when a plurality of the icons are projected along a direction which is different from the projection direction of the projection unit.Type: ApplicationFiled: December 20, 2018Publication date: April 25, 2019Applicant: NIKON CORPORATIONInventors: Seiji TAKANO, Hidenori KURIBAYASHI
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Extreme Ultraviolet Lithography System, Device, and Method for Printing Low Pattern Density Features
Publication number: 20190121228Abstract: A lithography system includes a radiation source configured to generate an extreme ultraviolet (EUV) light. The lithography system includes a mask that defines one or more features of an integrated circuit (IC). The lithography system includes an illuminator configured to direct the EUV light onto the mask. The mask diffracts the EUV light into a 0-th order ray and a plurality of higher order rays. The lithography system includes a wafer stage configured to secure a wafer that is to be patterned according to the one or more features defined by the mask. The lithography system includes a pupil phase modulator positioned in a pupil plane that is located between the mask and the wafer stage. The pupil phase modulator is configured to change a phase of the 0-th order ray.Type: ApplicationFiled: December 14, 2018Publication date: April 25, 2019Inventors: Yen-Cheng Lu, Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen -
Publication number: 20190121229Abstract: Provided is a pellicle film, a pellicle frame and a pellicle for EUV decreased in the amount of dust or the like attached thereto, and a method for producing the same. Provided is a method for producing a pellicle including forming a pellicle film above a substrate; forming a metal mask on a surface of the substrate opposite to a surface having the pellicle film formed thereon; removing a part of the substrate from the side of the metal mask; and removing the metal mask. In an embodiment, the present invention provides a pellicle film, a pellicle frame and a pellicle for EUV decreased in the amount of dust or the like attached thereto, and a method for producing the same.Type: ApplicationFiled: December 17, 2018Publication date: April 25, 2019Applicant: MITSUI CHEMICALS, INC.Inventors: Atsushi Okubo, Yosuke Ono, Kazuo Kohmura, Yasuhisa Fujii, Wataru Yoshikawa
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Publication number: 20190121230Abstract: A method including obtaining a first image of an object, generating a second image by convolving the first image with a filter kernel, wherein each pixel value of the second image is a weighted combination of a plurality of accumulation values associated with surrounding pixels of the first image, and determining, based on the second image, whether the object includes a defect.Type: ApplicationFiled: March 24, 2017Publication date: April 25, 2019Inventor: Guobin OU
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Publication number: 20190121231Abstract: Methods and systems for dispensing fluid in imprint lithography, including selecting drop patterns, each associated with different target locations on a substrate and a selected volume for each drop of each drop pattern; selecting a plurality of subsets of nozzles of a dispenser, each subset configured to dispense drops corresponding to each drop pattern; for each drop pattern: dispensing the drops corresponding to the drop pattern from each subset of nozzles; obtaining an image of the drops from each subset of nozzles; and processing the image from each subset of nozzles to determine a positional error of the drops with respect to the target locations and a volumetric error of the drops with respect to the selected volume for each drop; and adjusting, based on the positional error and the volumetric error of the drops from each subset of nozzles for each drop pattern, dispense parameters of the dispenser.Type: ApplicationFiled: October 19, 2017Publication date: April 25, 2019Inventors: Matthew C. Traub, Tom H. Rafferty, Whitney Longsine, Yeshwanth Srinivasan, Van Nguyen Truskett
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Publication number: 20190121232Abstract: According to one embodiment, a pattern formation method can include performing a first processing of causing a surface of a first member of a processing body to be hydrophobic. The processing body includes the first member and a second member. The second member is provided at a portion of the first member. The method can include performing a second processing of causing the processing body to contact an atmosphere including a metal compound. The second processing is after the first processing. The method can include performing a third processing of processing the processing body in an atmosphere including at least one selected from the group consisting of water, oxygen, and ozone. The third processing is after the second processing. In addition, the method can include removing, after the third processing, at least a portion of another portion of the first member by using the second member as a mask.Type: ApplicationFiled: August 13, 2018Publication date: April 25, 2019Applicant: Toshiba Memory CorporationInventors: Tomoaki SAWABE, Shinobu Sugimura, Koji Asakawa
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Publication number: 20190121233Abstract: A chemically amplified positive-type photosensitive resin composition capable of suppressing the occurrence of “footing” in which the width of the bottom (the side proximal to the surface of a support) becomes narrower than that of the top (the side proximal to the surface of a resist layer) in the nonresist portion; and the generation of development residue when a resist pattern serving as a template for a plated article is formed on a metal surface of a substrate using the photosensitive resin composition. A mercapto compound having a specific structure is included in the photosensitive resin composition, and includes an acid generator which generates acid upon exposure to an irradiated active ray or radiation, and a resin whose solubility in alkali increases under the action of acid.Type: ApplicationFiled: October 15, 2018Publication date: April 25, 2019Inventors: Akiya KAWAUE, Yuta YAMAMOTO, Kazuaki EBISAWA, Yasushi KUROIWA
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Publication number: 20190121234Abstract: A color resist material of a color filter and a method for preparing a color resist pattern of a color filter are provided. The color resist material of a color filter includes: a polyfunctional monomer including a divinylbenzene monomer.Type: ApplicationFiled: March 28, 2018Publication date: April 25, 2019Inventor: Guangying MOU
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Publication number: 20190121235Abstract: A photo-curable and thermo-curable resin composition includes an epoxy resin including an epoxy group; a carboxyl group-containing photosensitive resin; a photopolymerization initiator; and a filler, wherein a value of an equivalent number of the epoxy group/an equivalent number of the carboxyl group is from more than 1 to less than 2.Type: ApplicationFiled: May 18, 2018Publication date: April 25, 2019Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.Inventors: Geum-Hee YUN, Hwa-Young LEE, Seol-Ah CHONG
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Publication number: 20190121236Abstract: Lithographic apparatuses suitable for, and methodologies involving, complementary e-beam lithography (CEBL) are described. In an example, a column for an e-beam direct write lithography tool includes a first blanker aperture array (BAA) including a staggered array of openings having a pitch along an array direction. The array direction is orthogonal to a scan direction. Each opening has a first dimension in the array direction. The column also includes a second BAA including a staggered array of openings having the pitch along the array direction. Each opening has a second dimension in the array direction, the second dimension greater than the first dimension.Type: ApplicationFiled: December 20, 2018Publication date: April 25, 2019Inventor: YAN A. BORODOVSKY
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Publication number: 20190121237Abstract: Implementations described herein generally relate to improving silicon wafer manufacturing. In one implementation, a method includes receiving data from one or more manufacturing tools about a manufacturing process of a silicon wafer. The method further includes determining, based on the data, predictive information about a quality of the silicon wafer. The method further includes providing the predictive information to a manufacturing system, wherein the predictive information is used to determine whether to take corrective action.Type: ApplicationFiled: October 3, 2018Publication date: April 25, 2019Inventors: Raman K. NURANI, Anantha R. SETHURAMAN, Koushik RAGAVAN
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Publication number: 20190121238Abstract: The disclosure relates to a projection exposure apparatus for semiconductor lithography which includes an actuator system to mechanically actuate a component of the projection exposure apparatus. The actuator system has at least one mechanism to reduce and/or dampen the heat input into the component that is due to heat arising during the operation of the actuator system.Type: ApplicationFiled: October 18, 2018Publication date: April 25, 2019Inventors: Benjamin Sigel, Andreas Bertele, Peter Kloesch, Martin Mahlmann, Jochen Weber
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Publication number: 20190121239Abstract: An imprint lithography method of configuring an optical layer includes selecting one or more parameters of a nanolayer to be applied to a substrate for changing an effective refractive index of the substrate and imprinting the nanolayer on the substrate to change the effective refractive index of the substrate such that a relative amount of light transmittable through the substrate is changed by a selected amount.Type: ApplicationFiled: October 19, 2018Publication date: April 25, 2019Inventors: Vikramjit Singh, Michael Nevin Miller, Frank Y. Xu, Shuqiang Yang
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Publication number: 20190121240Abstract: An optical element for transmitting radiation includes: a first surface region surrounding an optically used area of the optical element; and a second surface region that adjoins the first surface region. A circumferential edge is formed between the first and second surface regions. The optical element further includes a one-piece film which covers the first surface region, the edge and the second surface region. The film includes a hydrophobic material at least on its side facing away from the first and the second surface regions. An optical assembly includes at least one such optical element. A method produces such an optical element.Type: ApplicationFiled: December 18, 2018Publication date: April 25, 2019Inventors: Roland Pilz, Thomas Petasch
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Publication number: 20190121241Abstract: Lithography methods and corresponding lithography apparatuses are disclosed herein for improving throughput of lithography exposure processes. An exemplary lithography method includes generating a plurality of target material droplets and generating radiation from the plurality of target material droplets based on a dose margin to expose a wafer. The dose margin indicates how many of the plurality of target material droplets are reserved for dose control. In some implementations, the plurality of target material droplets are grouped into a plurality of bursts, and the lithography method further includes performing an inter-compensation operation that designates an excitation state of target material droplets in one of the plurality of bursts to compensate for an energy characteristic of another one of the plurality of bursts.Type: ApplicationFiled: December 13, 2018Publication date: April 25, 2019Inventors: Yen-Cheng Lu, Jeng-Horng Chen, Shun-Der Wu, Anthony Yen
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Publication number: 20190121242Abstract: A lithography system may include a wafer stage. The wafer stage may include a wafer mounting part configured to carry a wafer and configured to oscillate along a plane that is parallel to a top surface of the wafer in a wafer exposure process. The wafer stage may further include a driving device configured to affect an oscillatory movement of the wafer mounting part in the wafer exposure process.Type: ApplicationFiled: December 11, 2018Publication date: April 25, 2019Inventor: Qiang WU
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Publication number: 20190121243Abstract: In an exposure apparatus that has an illumination optical system to illuminate a mask with an illumination light and a projection optical system to project a pattern image of the illuminated mask onto a substrate, first and second movable bodies, respectively holding the mask and the substrate, are moved based on measurement information of first and the second encoder systems so that, in an exposure operation of the substrate, scanning exposure in which the mask and the substrate are each moved relative to the illumination light is performed with a first direction within the predetermined plane serving as a scanning direction while compensating for a measurement error of the second encoder system that occurs due to at least one of tilt of the second head of the second encoder system and tilt in telecentricity of the second head.Type: ApplicationFiled: December 20, 2018Publication date: April 25, 2019Applicant: NIKON CORPORATIONInventor: Yuichi SHIBAZAKI
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Publication number: 20190121244Abstract: A liquid immersion exposure apparatus includes a projection system, an immersion area forming member having a liquid supply inlet, a liquid recovery outlet and an opening through which an exposure beam is projected, and a substrate stage having a substrate holding portion on which the substrate is held and a stage member having an upper surface provided adjacent to the upper surface of the held substrate with a gap therebetween. A portion of a liquid immersion area is formed by the immersion area forming member on the upper surface of the held substrate and another portion of the liquid immersion area is formed on the upper surface of the stage member when exposing an edge portion of the upper surface of the substrate with exposure light via liquid in the liquid immersion area.Type: ApplicationFiled: December 19, 2018Publication date: April 25, 2019Applicant: NIKON CORPORATIONInventor: Hiroyuki NAGASAKA
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Publication number: 20190121245Abstract: An automated photomask storage and retrieval system includes a plurality of mobile storage units aligned in a first direction. Each mobile storage unit is movable in the first direction and includes a plurality of storage cells. A gantry is disposed over the plurality of mobile storage units. The gantry includes a supporting frame movable in the first direction. The plurality of mobile storage units interpose a pair of supporting members of the supporting frame. A beam connects the pair of supporting members and is movable along the pair of supporting members in a second direction perpendicular to the first direction. The beam includes a plurality of buffer cells. A robotic arm is disposed adjacent to the plurality of buffer cells and movable along the beam. The robotic arm is configured to transfer a container containing a photomask between a storage cell and a buffer cell.Type: ApplicationFiled: October 22, 2018Publication date: April 25, 2019Inventors: Chun-Jung HUANG, Chien-Fa LEE, Yiang-Luen LIN, Sam CHIN
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Publication number: 20190121246Abstract: A liquid immersion exposure apparatus includes a movable stage configured to move below and relative to a projection system, a liquid supply inlet and a first liquid collection outlet, the movable stage having a second liquid collection outlet. A first measurement system is provided downstream of the first liquid collection outlet and measures an amount of liquid collected via the first liquid collection outlet. A second measurement system is provided downstream of the second liquid collection outlet and measures an amount of liquid collected via the second liquid collection outlet. A substrate held on the movable stage is exposed with an exposure beam from the projection system via liquid in a liquid immersion area which covers a portion of an upper surface of the substrate and which is formed while performing liquid supply via the liquid supply inlet and liquid collection via the first liquid collection outlet.Type: ApplicationFiled: December 18, 2018Publication date: April 25, 2019Applicant: NIKON CORPORATIONInventors: Nobutaka MAGOME, Naoyuki KOBAYASHI
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Publication number: 20190121247Abstract: A new way of drying and/or wetting a surface, such as a top surface of a substrate, is disclosed which is useful in immersion lithography. The surface is placed under a single phase extractor and a priming liquid is delivered between the single phase extractor and the surface. The single phase extractor is only activated after the priming liquid has been provided between the single phase extractor and the surface. Priming liquid is delivered to the single phase extractor during the whole of the drying and/or wetting process.Type: ApplicationFiled: December 20, 2018Publication date: April 25, 2019Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Martinus Hendrikus Antonius LEENDERS, Sjoerd Nicolaas Lambertus DONDERS, Harry SEWELL, Louis John MARKOYA, Marcus Martinus Petrus Adrianus VERMEULEN, Diane Elaine MARIKOYA
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Publication number: 20190121248Abstract: A patterning apparatus for a lithographic apparatus, the patterning apparatus including a patterning device support structure configured to support a patterning device having a planar surface; a patterning device conditioning system including a first gas outlet configured to provide a first gas flow over the planar surface in use and a second gas outlet configured to provide a second gas flow over the planar surface in use, wherein the first gas outlet and the second gas outlet are arranged at different distances perpendicular to the planar surface; and a control system configured to independently control a first momentum of gas exiting the first gas outlet and a second momentum of gas exiting the second gas outlet or to independently vary the first gas flow and/or the second gas flow over the planar surface of the patterning device.Type: ApplicationFiled: March 8, 2017Publication date: April 25, 2019Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Günes NAKIBOGLU, Lowell Lane BAKER, Ruud Hendrikus Martinus Johannes BLOKS, Hakki Ergün CEKLI, Geoffrey Alan SCHULTZ, Laurentius Johannes Adrianus VAN BOKHOVEN, Frank Johannes Jacobus VAN BOXTEL, Jean-Philippe Xavier VAN DAMME, Christopher Charles WARD
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Publication number: 20190121249Abstract: A system and method is provided for providing a thermal distribution on a workpiece during a lithographic process. The system provides a source of lithographic energy to workpiece, such as a workpiece having a lithographic film formed thereover. A workpiece support having a plurality of thermal devices embedded therein is configured to support the workpiece concurrent to an exposure of the workpiece to the lithographic energy. A controller individually controls a temperature of each of the plurality of thermal devices, therein controlling a specified temperature distribution across the workpiece associated with the exposure of the workpiece to the lithographic energy. Controlling the temperature of the thermal devices can be based on a model, a measured temperature of the workpiece, and/or a prediction of a temperature at one or more locations on the workpiece.Type: ApplicationFiled: December 17, 2018Publication date: April 25, 2019Inventor: Shih-Ming Chang
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Publication number: 20190121250Abstract: A detection apparatus includes an image pickup unit and a processor which detects a position of a mark using a two-dimensional image of the mark. The processor generates a one-dimensional signal having a plurality of peaks by accumulating images included in a detection region, detects peaks in which differences between values of the peaks and a reference value are equal to or larger than a threshold value and peaks in which differences between values of the peaks and the reference value are smaller than the threshold value from among the plurality of generated peaks and obtains a failure region in the mark, resets the detection region such that the differences between the values of the detected peaks and the reference value become smaller than the threshold value, generates a one-dimensional signal by accumulating images included in the reset detection region, and detects a position of the mark.Type: ApplicationFiled: December 14, 2018Publication date: April 25, 2019Inventor: Tadaki Miyazaki
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Publication number: 20190121251Abstract: An electrophotographic photosensitive member includes a support, a charge generating layer containing a charge generation material, and a charge transporting layer containing a charge transport material in this order, the charge transporting layer serving as a surface layer. The charge transporting layer contains a polycarbonate resin having a particular structural unit.Type: ApplicationFiled: December 21, 2018Publication date: April 25, 2019Inventors: Tsutomu Nishida, Akira Sakakibara, Daisuke Miura, Yota Ito, Shoma Hinata, Tatsuya Yamaai, Nobuo Kosaka
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Publication number: 20190121252Abstract: A positively chargeable toner includes a plurality of toner particles. The toner particles each include a toner mother particle and an external additive. The toner mother particle includes a toner core containing a binder resin and a shell layer covering a surface of the toner core. The external additive includes a plurality of silica particles. The silica particles are each present on a surface of the shell layer and include a silica base having a surface treated with a surface treatment agent. The surface treatment agent includes a first treatment agent having a carboxyl group in a molecule thereof. The toner core and each of the silica particles is bonded to each other through a specific covalent bond. An amount of ring-unopened oxazoline groups included in 1 g of the positively chargeable toner as measured by gas chromatography-mass spectrometry is at least 0.10 ?mol and no greater than 100 ?mol.Type: ApplicationFiled: October 8, 2018Publication date: April 25, 2019Applicant: KYOCERA Document Solutions Inc.Inventor: Ryotaro KOMADA
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Publication number: 20190121253Abstract: An image forming apparatus includes a transfer unit to transfer a toner image onto a sheet, a fusing unit, a discharging unit to discharge the sheet passed through the fusing unit, a guide member having a through-hole at a conveying surface and provided downstream of the fusing unit and upstream of the discharging unit in a conveying direction of the sheet, and a Helmholtz resonator. The Helmholtz resonator includes a cavity portion and communicating portions through which the cavity portion is in communication with an outside area. The Helmholtz resonator and a conveying path of the sheet guided by the guide member are connected through the through-hole. The Helmholtz resonator is disposed on a downstream side with respect to the fusing unit and on an upstream side with respect to the discharging unit in the conveying direction of the sheet, and the communicating portion is disposed facing the guide member.Type: ApplicationFiled: September 26, 2018Publication date: April 25, 2019Inventors: Toru Sakano, Hiroki Kasama
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Publication number: 20190121254Abstract: A developing device includes a housing having an opening in a wall thereof, a developing roller rotatably arranged within the housing, and a magnetic pole structure, wherein the developing roller is configured to carry a developer on an outer surface thereof using the magnetic force of the magnetic pole structure. The developing device further includes a gap forming member located within, and spaced from, the housing at a location downstream, in the rotation direction of the developing roller, of the opening in the wall of the housing, forming a first gap with respect to the developing roller and forming a second gap with respect to the housing, a blocking member arranged in the first gap, and a guide section configured to guide airflow passing through the second gap in a general direction toward the developing roller.Type: ApplicationFiled: December 18, 2018Publication date: April 25, 2019Inventors: Masato OGASAWARA, Masayuki KASUKAWA, Koji IMAMIYA, Nobuaki TAKAHASHI, Takao IZUMI
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Publication number: 20190121255Abstract: An image forming apparatus in which when toner remaining on a development roller in an area from a developer nip to a regulating blade disposed upstream of a rotation direction of the development roller during a stoppage of the image forming apparatus passes through the developer nip, a bias is applied so that the toner is drawn to the development roller, and a relative speed difference between the photosensitive drum and the development roller is created so as to be larger than the that during an image forming operation.Type: ApplicationFiled: October 23, 2018Publication date: April 25, 2019Inventors: Yoshihiro Mitsui, Takuya Oka, Yasukazu Ikami
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Publication number: 20190121256Abstract: A toner cartridge according to one example embodiment includes a housing having a reservoir for holding toner and an outlet in fluid communication with the reservoir for exiting toner from the toner cartridge. A resiliently deflectable cam is positioned on an exterior portion of the housing to contact a media feed roll assembly when the toner cartridge is installed in the image forming device for biasing the media feed roll assembly into contact with a corresponding media feed roll in the image forming device to form a media feed nip in the image forming device.Type: ApplicationFiled: October 23, 2017Publication date: April 25, 2019Inventors: GREGORY ALAN CAVILL, JASON PAUL HALE, JAMES RICHARD LEEMHUIS, DAVID LEE MERRIFIELD, MATTHEW LEE ROGERS, DANIEL LEE THOMAS, RANDAL SCOTT WILLIAMSON
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Publication number: 20190121257Abstract: A toner container attachable to and detachable from a main body of an image forming device and including: a first chamber containing toner; a second chamber adjacent to the first chamber through a partition wall and downstream of the first chamber in a toner supply direction; and a switching member in the second chamber that is movable or rotatable and has a shell structure. The partition wall has a first aperture. A bottom wall of the second chamber opposing the partition wall has a second aperture and sits on the main body. The shell has third and fourth apertures. The fourth aperture coincides with the second aperture when the third aperture coincides with the first aperture, and the first aperture is closed by the shell when the third aperture faces an inner wall surface of the second chamber.Type: ApplicationFiled: October 12, 2018Publication date: April 25, 2019Inventors: Shuan Yang, Naoki Nonoyama, Shigeru Sawano
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Publication number: 20190121258Abstract: A toner container includes a container body, a tubular body, and a screw feeder. The tubular body forms a toner conveyance path communicating with an inside of the container body. The screw feeder feeds toner in the container body to the toner conveyance path by being rotationally driven inside the container body. The screw feeder pushes toner that has arrived inside the toner conveyance path further along the toner conveyance path by feeding pressure of succeeding toner.Type: ApplicationFiled: October 18, 2018Publication date: April 25, 2019Inventor: Daisuke Eto
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Publication number: 20190121259Abstract: A toner case includes a case main body, a feeding mechanism, a displacement member, and an elastic member. The case main body stores toner. A ventilation port is formed in the case main body. The feeding mechanism feeds the toner to outside the case main body. The displacement member includes a seal portion and is configured to be displaced between a closing position and an opening position. When the displacement member is at the closing position, the seal portion closes the ventilation port, and when the displacement member is at the opening position, the seal portion opens at least a part of the ventilation port. The elastic member holds the displacement member at the closing position by applying an elastic force to the displacement member.Type: ApplicationFiled: October 18, 2018Publication date: April 25, 2019Inventor: Daisuke Eto
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Publication number: 20190121260Abstract: A toner cartridge according to one example embodiment includes a housing having a toner reservoir. An outlet port faces downward on a front of the housing near a first side of the housing. A linkage is positioned on the first side of the housing and has an engagement surface that is accessible at the rear of the housing. A projection is positioned on the first side of the housing and is movable between a first position and a second position. The projection is operatively connected to the linkage such that the projection moves upward from the first position to the second position when the engagement surface receives a forward force that is toward the front of the housing. The projection extends outward sideways from the first side when the projection is in the second position.Type: ApplicationFiled: December 20, 2018Publication date: April 25, 2019Inventors: MICHAEL NUESTRO BAYUBAY, SALVADOR CAPURIHAN BONANCIAR, BRIAN SCOTT CARPENTER, DONATO AUSTRIA MARMOL, ROBERT WATSON MCALPINE, KATRINA ROSIT LACTUAN
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Publication number: 20190121261Abstract: An image forming apparatus includes a transport member that transports a continuous medium as a result of a transport surface of the transport member making contact with the continuous medium and a transfer device that is disposed on a downstream side in a direction in which the transport member transports the medium and that transfers an image onto the medium, which extends to the transport member, as a result of a transfer surface of the transfer device making contact with the medium. A moving speed of the transfer surface is lower than a moving speed of the transport surface when the medium is transported.Type: ApplicationFiled: December 18, 2018Publication date: April 25, 2019Applicant: Fuji Xerox Co., Ltd.Inventor: Kanji Watanabe