Abstract: The present invention provides compositions comprising metal complexes, and related methods. In some embodiments, metal complexes of the invention may be useful as catalysts for chemical reactions, including metathesis reactions, wherein the catalysts exhibit enhanced activity and stereoselectivity. In some embodiments, the invention may advantageously provide metal complexes comprising a stereogenic metal atom. Such metal complexes may be useful in enantioselective catalysis.

Abstract: Use a solvent blend that contains 1-methoxy-2,7-octadiene and an alkanols rather than the alkanols by itself to prepare a catalyst precursor suitable for use in butadiene telomerization.

Abstract: A method of forming a film system includes depositing a monolayer formed from a fluorocarbon onto a substrate. After depositing, the method includes ablating the monolayer to define a plurality of cavities therein, wherein each of the plurality of cavities is spaced apart from an adjacent one of the plurality of cavities along the monolayer. After ablating, the method includes embedding a photocatalytic material into each of the plurality of cavities to form a film on the substrate and thereby form the film system. The film system includes a plurality of regions including the photocatalytic material and disposed within the monolayer such that each of the plurality of regions abuts and is surrounded by the fluorocarbon.

Abstract: A catalyst for oxidising ammonia comprises a selective catalytic reduction (SCR) catalyst and a composite heterogeneous extruded honeycomb having longitudinally extending parallel channels, which channels being defined in part by channel walls having a total longitudinal length, wherein the channel walls comprise a pore structure including a periodic arrangement of porous cells embedded in an inorganic matrix component, at least some of which porous cells are defined at least in part by an active interface layer of a catalytically active material comprising a precious metal supported on particles of a support material.

Abstract: A system and method is disclosed for efficiently sulfiding metal catalyst resident in a reactor vessel comprises a sulfiding module and a hydrogen sulfide detection module and a remote computer all arranged and configured to communicate wirelessly and to allow remote control and monitoring of the modules and sulfiding process.

Abstract: An ion exchanger includes a housing and a cartridge. The housing has an inlet port, through which coolant flows in, and an outlet port, through which the coolant flows out. The cartridge is detachably attached to the housing. The cartridge is filled with ion-exchange resin. The ion exchanger is configured to remove ions from the coolant through ion exchange when the coolant flowing in the housing passes through the ion-exchange resin. The cartridge includes a bypass route that causes some of the coolant that has flowed into the housing to bypass the ion-exchange resin and flow to the outlet port.

Abstract: A test method and apparatus employs a microfluidic device to characterize properties of a fluid. The microfluidic device has an inlet port, an outlet port, and a microchannel as part of a fluid path between the inlet port and the outlet port. While a fluid is introduced into the microchannel, the fluid temperature is maintained while the fluid pressure in the microchannel is varied to characterize the properties of the fluid in the microchannel. The properties of the fluid can relate to a scale onset condition of the fluid at the pressure of the flow through the microchannel. In one aspect, fluid pressure in the microchannel is maintained while the fluid temperature is varied to characterize the properties of the fluid. In another aspect, flow rate of the fluid through the microchannel is varied while the fluid temperature is maintained to characterize the properties of the fluid in the microchannel.

Abstract: The present invention generally pertains to a system for performing injection of multiple substantially controlled volumes into or out of a droplet, and methods and kits comprising the same. The system of the present invention comprises at least one microfluidic channel, one or more injection channels, an injection inlet associated with each of the one or more injection channels, and a mechanism for disrupting an interface between a droplet and a fluid and/or emulsion, wherein the at least one microfluidic channel comprises one or more droplets are flowing therein, and wherein each of the one or more injection channels comprises at least one fluid and/or emulsion therein.

Abstract: A method for reading a microfluidic microplate having a plurality of cells is provided. The method includes determining target locations on the microfluidic microplate, each of the target locations being deviated from a center of each of the cells, and directing a beam centered at each of the target locations perpendicular to the microfluidic microplate, the beam having a predetermined diameter. Each of the plurality of cells includes a well structure including a side wall for a loading well, a through hole at a center of a base of the well structure, and a microfluidic channel formed in a spiral pattern configured to start from a first end of the microfluidic channel and end with a second end of the microfluidic channel at the base of the well structure, wherein the first end of the microfluidic channel is connected to the through hole, and the second end of the microfluidic channel includes an outlet hole.

Abstract: Methods are provided for the large-scale high-content analysis of biological samples. In some embodiments, the methods are implemented in a reversed open microwell system that includes an array of open microwells, at least one microchannel, at least one input port and at least one output port. In certain embodiments, the reversed open microwell system can be inserted in an automated management system which includes an incubator at controlled temperature, humidity and CO2 levels, a fluid dispensing system, and is capable of phase-contrast and fluorescence image acquisition. Also provided are kits for introducing fluids into a microfluidic device, and systems for discharging one or more fluids in a microfluidic device.

Abstract: Single-sided optoelectrowetting (SSOEW)-configured substrates are provided, as well as microfluidic devices that include such substrates. The substrates can include a planar electrode, a photoconductive (or photosensitive) layer, a dielectric layer (single-layer or composite), a mesh electrode, and a hydrophobic coating. Fluid droplets can be moved across the hydrophobic coating of such substrates in a light-actuated manner, upon the application of a suitable AC voltage potential across the substrate and the focusing of light into the photoconductive layer of the substrate in a location proximal to the droplets. Walls can be disposed upon the substrates to form the microfluidic devices. Together the walls and substrate can form a microfluidic circuit, through which droplets can be moved.

Abstract: A sorting device (10) is disclosed comprising a channel (40) adapted to allow passage of a plurality of samples in a fluid to a first side of a sorting junction (50) and a plurality of Braille valves (105) connected by a plurality of connectors to the sorting junction (50). An analysis device (80), such as a camera, is used for analysing ones of the plurality of the samples and adapted to control ones of the plurality of Braille valves depending on properties of the analysed ones of the plurality of the samples.

Abstract: A method and an apparatus for thermal processing of nucleic acid in a thermal profile. The method employs at least a first bath and a second bath, the method further employing a reactor holder for holding reactor(s) accommodating reaction material containing the nucleic acid. The method includes maintaining bath mediums in the baths at two different temperatures; and alternately allowing the reactor(s) to be in the two baths in a plurality of thermal cycles to alternately attain a predetermined high target temperature THT, and a predetermined low target temperature TLT, wherein the bath medium in at least one of the baths is a high thermal conductivity powder.

Abstract: A locking bolt assembly (1) for securing a mantle (40) to a head assembly (60) of a crushing device includes locking bolt (10) having a head portion (10a) and a thread portion (10b); a re-useable thrust plate (30) disposed between the head portion (10a) and a top surface portion (42) of the mantle (40); one or more fasteners (20) for connecting the locking bolt (10) to the re-useable thrust plate (30); and one or more permanent jacking screws (34) for forcing the locking bolt (10) up and the thrust plate (30) down onto the top surface portion (42) of the mantle (40) so that the mantle (40) is secured on the head assembly (60).

Abstract: An automatic cleaning device for a ring hammer crusher, and a ring hammer crusher having the automatic cleaning device are provided. The automatic cleaning device includes an automatic cleaning assembly at a back side of a feeding opening of a crushing chamber of the ring hammer crusher; the automatic cleaning assembly includes a material meeting disk and a cleaning blocking rod; the material meeting disk is connected to a drive member and is driven by the drive member to rotate, and the cleaning blocking rod is fixed to the crushing chamber and is cooperated with a material meeting surface of the material meeting disk for cleaning. The ring hammer crusher having the automatic cleaning device has a simple structure and convenient operation, thus improving cleaning effect.

Abstract: An apparatus for paper shredding and compacting which includes a shredded paper storage portion, a movable ram disposed within the shredded paper storage portion, and a movable push rod.

Abstract: A method of grinding a mineral material (10) containing at least calcium impurities implemented in a plant (1) including a grinder (2) and a granulometric selection device, referred to as a selector device (3), able to separate the materials into two fractions. The method includes the following steps: grinding the mineral material by material bed compression with the grinder to obtain a ground material, separating the ground material into a fine fraction and a coarse fraction with the selector device, returning the coarse fraction (13) to the grinder (2) for a further grinding step. At least part of the ground material is subjected to sorting intended to separate the metal impurities from the mineral materials. A plant as it stands, and the method and installation will find a particular use for producing hydraulic binders such as cement.

Abstract: A milling system which includes a reservoir shaped and sized to contain a solvent or a slurry including the solvent and a material to be milled, a treatment column in communication with the reservoir, wherein the treatment column is configured to remove one or more of water, oxygen, and/or other impurities from the solvent, and a mill in fluid communication with the reservoir, wherein the mill is configured to triturate the material. The treatment column may be fluidly isolated from the rest of the system during milling.

Abstract: A grinding circuit comprises a grinding mill having a shaft in a grinding chamber, a cyclone for receiving circuit feed material and for feeding said circuit feed material further in the grinding circuit, and monitoring devices. The grinding mill process comprises pumping circuit feed material from a feed tank to the cyclone upstream of the mill, and pumping the circuit feed material forming slurry into the grinding mill for grinding the slurry into finer particles. The method of controlling the grinding mill process comprises monitoring at least one operational parameter, and controlling particle fineness online by adjusting at least one of the following operational parameters: flow rate of the circuit feed material, density of the circuit feed material, shaft speed, filling rate in the grinding mill, milling density and retention time.

Abstract: Roller pairs for processing a product, containing two grinding rollers, wherein at least one roller contains at least one sensor for obtaining measured values that characterize a state of at least one of the rollers, in particular a state of a circumferential surface. The sensor has a data connection to a data transmitter designed to transmit the measured values to a data receiver in an contact-free manner. Additionally, a measuring device for insertion into a receiving opening of a roller body of a roller of a roller pair, a product-processing installation, in particular a grinding installation containing at least one roller pair, a method of operating a product-processing installation, and a method of converting and/or upgrading at least one roller body are disclosed.

Abstract: Devices, systems, and methods for separating incinerator combined ash to recover desired materials are described. The devices, systems, and methods may include 2-stage screen(s), falling velocity separator(s)/jig(s), magnetic pulley(s), eddy current separator(s), sensor sorters, and optical sorter(s).

Abstract: A light source module for microparticles sorting performed in a light-induced dielectrophoresis chip is provided, which includes a light emitting element, a control unit and a light converting unit. The light emitting element is configured to generate and emit light. The control unit is configured to generate a driving signal based on image data. The Light converting unit is coupled to the control unit, and is configured to convert the light into a light pattern based on the driving signal. A luminous exitance of the light converting unit is between 9×104 lux and 1.2×105 lux.

Abstract: A plate separator for separating a substance from a substance mixture, with a separator device and an electric motor for rotary driving of the separator device. The separator device is coupled to the electric motor in a rotationally fixed manner. The electric motor is configured as an external rotor and has an inner-lying stator and an outer-lying rotor in the radial direction with respect to an axis of rotation. The separator device is fastened to the rotor and extends outward from the rotor in the radial direction. The stator is arranged, as viewed in the axial direction with respect to the axis of rotation, at least partially overlapping with the separator device.

Abstract: A sprinkler including a fixed base defining a water inlet and a nozzle, a rotating assembly arranged for rotation relative to the fixed based about a rotation axis and including a water stream director, receiving a pressurized stream of water from the nozzle and directing it in a generally radially outward direction and a rotation speed governing assembly operatively associated with the rotating assembly and operative to intermittently reduce a speed of rotation of the rotating assembly, so as to thereby increase a radial range of the stream, the rotational speed governing assembly including a rotating enclosure rotating together with the rotating assembly and enclosing a viscous material, a static element and a moving element.

Abstract: Some embodiments are directed to a valve made up of a rigid wall and a flap. The flap has a non-perforated flexible and deformable peripheral region situated facing the rigid wall. The rigid wall is perforated by at least one orifice situated facing the peripheral region. The flap is joined to the rigid wall by a non-deformable fixed connection. The peripheral region has a substantially conical shape before mounting with a large base and a small base and an inner face on the inner side of the cone. The peripheral region exhibits a deformation following the pressing of the inner face of the large base against the rigid wall in a assembled position.

Abstract: Dispensing systems utilize shaped cartridges to dispense one or more different types of chemical product concentrates. The chemical product concentrates may include, for example, tablets, capsules, encapsulated pellets or loose powders, or any other unit dose form factor. The chemical product concentrates may also include loose pellets or loose powders, or any other form of chemical product concentrate. The chemical product concentrates are dispensed from a plurality of shaped dispensing cartridges having different geometrically shaped cross-sections. Each cross-sectional shape may correspond to a different type of chemical product concentrate. Dispensing units include one or more shaped receptacles, each having a different geometrically shaped cross-section sized to receive a geometrically compatible one of the shaped dispensing cartridges. The dispensing units may further include shaped dispensing fitments sized to receive a geometrically compatible neck of a product container.

Abstract: A discharge device including a pump disposed to a container body in which contents are stored and which includes a discharge head provided with a discharge hole formed therein; a mounting cap; a support portion; and a press-down member. By rotating the press-down member, the discharge head is moved downward and the contents are discharged from the discharge hole. The discharge device includes a stopper which is movable between a restricted position where the downward movement of the discharge head is restricted and a non-restricted position where the downward movement of the discharge head is allowed.

Abstract: Apparatus for spraying a material on a surface comprises at least one elongate member having a distal end and a proximal end, at least one spray nozzle mounted at the distal end of the elongate member for spraying the material in a spray pattern, the spray nozzle being connected to a spray material input at the proximal end of the elongate member, a camera mounted at the distal end of the elongate member and connected to a camera output at the proximal end of the elongate member, the camera being arranged to capture images of the spray pattern, and a control mechanism arranged to control the operation of the spray nozzle from the proximal end of the elongate member.

Abstract: A coating material is uniformly applied on an inner wall surface of a container while preventing leakage of the coating material and an increase in an installation space. An application apparatus (10) that applies a coating material (L) on an inner wall surface of a container (C) includes: a spray gun (20) having a spray nozzle (22); an outgoing pipe (30) and a return pipe (33); a supply controller (50); a rotary driver (60); and a mover (70), wherein the outgoing pipe (30) and the return pipe (33) are each provided with a resilient-shape part (32, 35) capable of extending and contracting resiliently.

Abstract: An in-situ foam generation apparatus includes a dissolution chamber that houses a polymer stick cavity or canister, a mixing chamber that houses a static mixer, and a foaming chamber that houses a mechanical agitator in fluid communication with a compressed air inlet. The chambers are in fluid communication with one another by way of a respective chamber inlet and outlet, with the mixing chamber being located between the dissolution and foaming chambers. A pressure regulator can be used to control the incoming aqueous solution pressure to the dissolution chamber. A nozzle exhaust is in fluid communication with the outlet of the foaming chamber. One or more polymer sticks that include one or more cleaning agent can be loaded into the cavity or canister of the dissolution chamber. An end consistency of the polymer stick can be in a range of partially solidified to fully solidified.

Abstract: A method for forming a thin film having durability at a low cost is provided. A film formation apparatus 1 is used in the film formation method. The apparatus 1 comprises a vacuum container 11 in which a substrate 100 is placed at a lower part, a vacuum pump 15 for exhaust inside the container 11, a storage container 23 for storing a coating agent 21 provided outside the container 11, and a nozzle having an ejection part 19 capable of ejecting the coating agent 21 at its one end. A solution including two or more kinds of materials is used as the coating agent 21. The solution is ejected to the substrate in an atmosphere at a pressure set based on vapor pressures of respective materials composing the solution.

Abstract: An automatic dispensing device for wallboard joint taping is provided, including a body for holding a supply of viscous material and having a rear end and an opposite front end, a spool assembly disposed on the body and configured for supporting a spool of tape; at least one drive roller positioned at the front end and receiving an end of the spool of tape. Certain embodiments include an adhesive application assembly connected to the drive roller and mounted in operational relationship to the front end for dispensing a measured amount of adhesive upon an upper surface of the tape upon rotation of the at least one drive roll. In such embodiments, the body may be configured for holding sufficient adhesive to cover tape advanced by at least 200 rotations of the at least one drive roller.

Abstract: A doctoring apparatus has a flexible doctor blade advanced longitudinally across a surface being doctored. The doctor blade is feed in a continuous length from a storage cartridge and sequentially supported in a blade holder to apply the blade to a moving surface to be doctored. One or both of a pneumatic blade advancing device and a pneumatically operated clamping system are opened and closed in timed sequence with reciprocation of the blade holder longitudinally shifting the doctor blade in a selected direction across the doctored surface. The pneumatic blade advancing device includes an idler roller and a powered roller that co-operate to indexingly advance the doctor blade along the blade path. The clamping system includes a blade cutter to cut the doctor blade and that drives the cut off end of the doctor blade into a discard container.

Abstract: An improved hot melt glue gun with an automatic glue stick feeding structure includes a housing that is gun-shaped and that includes an inlet and an outlet. A glue stick feeding module is mounted in the housing and located adjacent to the inlet. The glue stick feeding module includes a motor connected to a casing. The casing includes a passage and a through-hole. The passage is located in the casing and intercommunicates with the inlet. The through-hole is aligned with the passage in a transverse direction. An activation module includes an activation rod reciprocatingly and movably extending through the through-hole. A micro switch is located adjacent to the activation module and is electrically connected to the motor. The micro switch is configured to be pressed by the activation rod to activate the motor. A hot melt module is mounted in the housing and located adjacent to the outlet.

Abstract: A caulking gun includes a gun body, a swinging member, a push rod, driving member and an abutting member. The gun body includes a side wall. The side wall has a penetrated portion. The penetrated portion defines an axial direction. The swinging member is swingably disposed on the gun body. The push rod is axially movably, disposed through the penetrated portion and the swinging member. The driving member is movably disposed in the gun body, and the driving member and the swinging member are located at two sides of the side wall respectively. The push rod is frictionally drivable by the driving member. The abutting member is axially movably disposed through the penetrated portion. The abutting member is disposed circumferentially around the push rod less than 360 degrees. Two ends of the abutting member are axially abuttable against the driving member and the swinging member respectively.

Abstract: The invention relates to a method for performing a coating process of a workpiece (4), comprising the steps of: providing the workpiece (4) in a coating unit (2); prefilling (S2) the coating unit (2) with a coating medium using a pump (6); filling (S3) the coating unit (2) with the coating medium by a dosing unit (5), wherein a predetermined amount of coating medium is applied to the coating unit (2) by the dosing unit (5) as soon the coating medium level has reached a given reference level (R).

Abstract: A substrate is rotated with a holding rotator to form a coating liquid film on the substrate, and at least a part of an excess of the coating liquid is pushed out toward a periphery edge of the substrate by a centrifugal force caused by the rotation of the substrate to build up the excess of the coating liquid along the periphery edge of the substrate. Moreover, gas is blown to the periphery edge of the substrate through a gas nozzle to exhaust the excess of the coating liquid building up at the periphery edge. Blowing the gas toward the periphery edge of the substrate through the gas nozzle makes the coating liquid unbalanced that builds up without being exhausted outside the substrate due to its surface tension. Accordingly, the rotation achieves the coating liquid film having a uniform thickness while the coating liquid film is formed to be thick.

Abstract: Embodiments herein relate to curing of an epoxy using an ultraviolet (UV) laser. A volume of epoxy may be coupled to an area of a surface, and the volume of epoxy is cured and surrounded by material other than cured epoxy, where the area of the surface is substantially equal to a diameter of the UV laser beam used to cure the epoxy. Other embodiments may be described and/or claimed.

Abstract: A system that reduces the amount of water that enters a process chamber via a movable shaft is disclosed. The surface of the shaft is made hydrophobic. Any water droplets that are collected on the hydrophobic shaft are disposed at a high contact angle, making it more likely that these water droplets fall from the shaft. Further, any water that enters the process chamber is more readily removed from the shaft due to the lower energy of liberation. Reducing the amount of water in a process chamber may improve the lifetime of the components in the process chamber and may improve the yield of the workpieces being processed. This may be especially relevant when process gasses that contain halogens are employed.

Abstract: The present invention reduces noise generated by a phase change in an ultrasonic wave focusing apparatus that changes an ultrasonic wave focal point within a space by changing the phase of vibration of a plurality of ultrasonic transducers. When inputted position coordinates within a three-dimensional space are changed, the ultrasonic wave focusing apparatus calculates a target time lag Tnew that allows ultrasonic waves outputted from the ultrasonic transducers to form a focal point at the changed position coordinates X1, Y1, Z1. The ultrasonic wave focusing apparatus then examines the ultrasonic transducers to locate a particular ultrasonic transducer that outputs an ultrasonic wave whose time lag Ttmp differs from the target time lag Tnew, and changes the phase of the outputted ultrasonic wave to a target phase in multiple steps (steps 140 and 150).

Abstract: An electromagnetic acoustic transducer (EMAT) system for inspecting a part includes an EMAT sensor and a power supply for supplying an output power to the EMAT sensor. The power supply includes a DC/DC converter to boost an input DC voltage into a boosted DC voltage, a DC/AC inverter having Silicon Carbide (SiC) Mosfet power switches to invert the boosted DC voltage into an AC square voltage, and an output filter to filter the AC square voltage into an AC sinusoidal voltage. The AC sinusoidal voltage is the output power from the power supply to the EMAT sensor.

Abstract: Implementations of the subject matter described herein relate to sensors including piezoelectric micromechanical ultrasonic transducer (PMUT) sensor elements and arrays thereof. The PMUT sensor elements may be switchable between a non- ultrasonic force detection mode and an ultrasonic imaging mode. A PMUT sensor element may include a diaphragm that is capable of a static displacement on application of a force and is capable of a dynamic displacement when the PMUT sensor element transmits or receives ultrasonic signals. In some implementations, a PMUT sensor element includes a two dimensional-electron gas structure on the diaphragm. The sensors may further include a sensor controller configured to switch between a non-ultrasonic force detection mode and an ultrasonic imaging mode for one or more of the PMUT sensor elements, wherein an applied force is measured in the non-ultrasonic force detection mode and wherein an object is imaged ultrasonically during the ultrasonic imaging mode.

Abstract: An ultrasonic transducer includes a housing and a piezo element. The piezo element is inserted into a cavity of the housing and the housing has a covering which covers the cavity. A spring element is disposed between the covering and the piezo element. The spring element applies a spring force onto the piezo element and the covering has a plurality of conductor tracks or paths which contact through or plate through the covering. An assembly for insertion into the housing and a method for assembling an ultrasonic transducer are also provided.

Abstract: A vibratory system for a screening and/or feeder machine, the vibratory system including shaft lines, each shaft line having an unbalance module, the vibratory system also having a drive device configured to drive the shaft lines in rotation in synchronous manner and in the same direction. The vibratory system also includes an angle modifier device configured to modify the angular position of the unbalance module of one shaft line relative to the angular position of the unbalance module of the other shaft line or of one of the other shaft lines.

Abstract: A centrifugal dryer includes a housing and a basket positioned within the housing. The basket defines an opening formed laterally there through. The basket rotates around a central longitudinal axis through the housing. An annulus is formed between the basket and the housing. A cleaning device is positioned within the annulus, and the cleaning device introduces a liquid into the annulus. A scraping device is positioned within the annulus, and the scraping device rotates to remove cuttings from at least one surface.

Abstract: A construction site tool cleaning system. A construction sink is supported by support legs. A drip pant is preferably positioned under the support legs and under the construction sink. Construction sink stabilizers are connected to the support legs and support the construction sink. A construction sink tool support screen covers the top of the construction sink. An elevated pump section is inside the construction sink and is at a higher level than the bottom of the construction sink. A water pump is positioned inside the elevated pump section. A filter screen and filter are positioned on top of the elevated pump section and surround the water pump. A flexible hose is connected to the water pump and a nozzle is connected to the flexible hose.

Abstract: Systems and methods for rinsing one or more pellicles during fabrication, including immersing and soaking the one or more pellicles in a rinse bath solution for a particular time period, forming a top layer above the rinse bath solution, the top layer having a lower surface tension than the rinse bath, and withdrawing the one or more pellicles through the top layer for drying.

Abstract: An apparatus for the wet attrition of particulate material comprising an attrition scrubber; a dewatering screen comprising a deck and a sump beneath the deck, the dewatering screen being mounted upstream of the attrition scrubber whereby oversize material from a downstream end of the deck of the dewatering screen passes into the attrition scrubber; and a hydrocyclone wherein an underflow, containing a coarser fraction of the feed slurry, passes out of a lower outlet of the hydrocylone while an overflow, containing a finer fraction of the feed slurry and most of the water, passes out of an outlet at the upper end of the hydrocyclone, a pump being provided for pumping material from the sump of the dewatering screen to the inlet of the hydrocyclone, wherein the underflow from the hydrocyclone is passed into the attrition scrubber.

Abstract: A cleaning system and method uses a tank holding a fluid detergent and an equipment assembly formed from a plurality of discrete components joined together. One or more ultrasound transducers remove one or more deposits on the equipment assembly by generating and propagating high frequency ultrasound waves into the fluid detergent while the equipment assembly is in contact with the fluid detergent.

Abstract: A method is for cleaning a substrate transfer mechanism for loading a substrate into a heat treatment chamber for sublimating by-products by heat. The substrate transfer mechanism includes a holding unit for holding the substrate. The method includes repeatedly moving the holding unit into and out of the heat treatment chamber.