Abstract: Methods and techniques to increase the reliability of detecting virus infections, particularly lymphotropism, to eliminate false negative reactions in testing blood for the presence of lymphotropic viruses during enzyme immunoassay (EIA) and polymerase chain reaction (PCR) testing, and to better detect viruses with lymphotropism in biological materials having a concentration of virus particles lower than the sensitivity threshold of existing EIA and PCR methods, thereby making the techniques of the present invention more reliable.

Abstract: The present disclosure provides genetically engineered microorganisms for tagatose production comprising one or more heterologous polynucleotides encoding polypeptides selected from cellodextrin transporter (Cdt-1), intracellular ?-glucosidase (Gh1-1), xylose reductase (XR), galactitol 2-dehydrogenase (Gdh) and an AraA polypeptide, wherein any biological activity of endogenous Gal1 is attenuated or eliminated. Also provided are genetically engineered microorganism for psicose production comprising one or more heterologous polynucleotides encoding polypeptides selected from alpha-glucoside permease (Agt1) and psicose epimerase (Dpe), wherein any biological activity of endogenous sucrose invertase (Suc2), hexose kinase 1 (Hxk1), hexose kinase 2 (Hxk2), or combinations thereof are attenuated or eliminated. Methods of converting lactose to tagatose and sucrose to psicose is also provided.

Abstract: Pharmaceutical compositions comprising spray-dried oxalate decarboxylase crystals are disclosed. Methods to treat a disorder associated with elevated oxalate concentration using compositions comprising spray-dried oxalate decarboxylase crystals are also disclosed.

Abstract: A method of processing a workpiece to inhibit precipitation of intermetallic compounds includes at least one of thermomechanically processing and cooling a workpiece including an austenitic alloy. During the at least one of thermomechanically working and cooling the workpiece, the austenitic alloy is at temperatures in a temperature range spanning a temperature just less than a calculated sigma solvus temperature of the austenitic alloy down to a cooling temperature for a time no greater than a critical cooling time.

Abstract: A steel sheet for hot stamping includes a predetermined chemical composition containing: C: 0.08% or more and less than 0.20%; Si: 0.003% to 0.2%; Mn: 1.6% to 3.5%, and others, and further includes a steel structure expressed by, in an area ratio: bainite: 1% to 95%; ferrite: 5% to 94%; and balance: one or more selected from the group consisting of pearlite, martensite and retained austenite. When an Mn content is represented by [Mn], a C content is represented by [C], an expression of “[Mn]+6.67×[C]?2.73?0” is satisfied.

Abstract: An equipment line for manufacturing a seamless steel tube includes a steel heating device, a piercing device that pierces the steel into a hollow steel tube, a rolling mill that forms the hollow steel tube into a seamless steel tube having a predetermined shape, and a cooling system arranged between the heating device and the piercing device or between the piercing device and the rolling mill.

Abstract: A method of annealing of steel sheets is provided which includes a first step consisting in fully oxidizing the surface of such steel sheet thus creating a fully oxided surface layer, a second step consisting in selectively oxidizing elements other than iron of such steel, in an area extending under said fully oxided layer, thus creating a selectively oxided internal layer and a third step consisting in fully reducing said fully oxided surface layer.

Abstract: Provided is a high-strength cold-rolled steel sheet having excellent ductility and stretch-flangeability as well as weldability in a range in which a tensile strength is 980 MPa or higher and a 0.2% yield strength is less than 700 MPa (preferably 500 MPa or higher). In the high-strength cold-rolled steel sheet of the present invention, the chemical composition is adjusted as appropriate, and the area ratio of below-mentioned metal structures at a position of ¼ sheet thickness in the steel sheet satisfies following requirements: tempered martensite: 10 area % to less than 30 area %, bainite: more than 70 area %, total of tempered martensite and bainite: 90 area % or more, ferrite: 0 area % to 5 area %, and retained austenite: 0 area % to 4 area %. The high-strength cold-rolled steel sheet has excellent ductility, stretch-flangeability, and weldability, and has a tensile strength of 980 MPa or higher and a 0.2% yield strength of less than 700 MPa.

Abstract: A method for manufacturing a high-strength galvanized steel sheet. The method includes a first heating step of holding the steel sheet in a temperature range of 750° C. to 880° C. for 20 s to 600 s in an atmosphere having an H2 concentration of 0.05% to 25.0% by volume and a dew point of ?45° C. to ?10° C., a cooling step, a rolling step of rolling the steel sheet with a rolling reduction of 0.3% to 2.0%, a pickling step of pickling the steel sheet with a pickling weight loss of 0.02 gram/m2 to 5 gram/m2 in terms of Fe, a second heating step of holding the steel sheet in a temperature range of 720° C. to 860° C. for 20 sec. to 300 sec. in an atmosphere having an H2 concentration of 0.05% to 25.0% by volume and a dew point of ?10° C. or lower, and a galvanizing step.

Abstract: Disclosed is a high-strength steel sheet having a predetermined chemical composition, satisfying the condition that Mn content divided by B content equals 2100 or less, and a steel microstructure that contains, by area, 25-80% of ferrite and bainitic ferrite in total, 3-20% of martensite, and that contains, by volume, 10% or more of retained austenite, in which the retained austenite has a mean grain size of 2 ?m or less, a mean Mn content in the retained austenite in mass % is at least 1.2 times the Mn content in the steel sheet in mass %, and an aggregate of retained austenite formed by seven or more identically-oriented retained austenite grains accounts for 60% or more by area of the entire retained austenite.

Abstract: A high-strength steel sheet having excellent punchability and a tensile strength of at least 780 MPa has a steel structure containing, by area ratio, 70%-90% ferrite phase and 10%-30% martensite phase. The non-recrystallized ferrite content in the ferrite phase is 30%-50% and the ratio of crystal grains having an aspect ratio of 1.0-1.5 in the martensite phase is 40%-100%, by area ratio.

Abstract: High-strength steel having a specified chemical composition, wherein X (%) calculated by using equation (1): X=0.35Cr+0.9Mo+12.5Nb+8V??(1) is 0.75% or more, wherein the symbols of chemical elements in equation (1) respectively denote the contents (mass %) of the corresponding chemical elements and wherein the symbol of a chemical element which is not included is assigned a value of 0, a microstructure having a bainite phase fraction of 50% or more, a dislocation density of 1.0×1015/m2 or more after aging has been performed under the condition of a Larson-Miller parameter (LMP) of 15000, and a yield strength of 550 MPa or more before and after the aging is performed, as well as methods of manufacturing such high-strength steel, is disclosed. The high-strength steel can be used as a raw material for manufacturing large diameter steel pipe having the strength properties required for its use in steam transportation.

Abstract: Provided is a steel for a mechanical structure for cold working, which contains C, Si, Mn, P, S, Al and N and in which the metal structure includes pearlite and ferrite, the total areal proportion of pearlite and ferrite relative to the overall structure is 90% or higher, the average circle-equivalent diameter of bcc-Fe crystal grains surrounded by large angle grain boundaries is 5-15 ?m, the average aspect ratio of pro-eutectoid ferrite crystal grains is 3.0 or lower, and the average spacing at the narrowest pearlite lamellar spacing is 0.20 ?m or less.

Abstract: An elongated steel element having a non-round cross-section and being in a work-hardened state, said elongated steel element having as steel composition: a carbon content ranging from 0.20 weight percent to 1.00 weight percent, a silicon content ranging from 0.05 weight percent to 2.0 weight percent, a manganese content ranging from 0.40 weight percent to 1.0 weight percent, a chromium content ranging from 0.0 weight percent to 1.0 weight percent, a sulfur and phosphor content being individually limited to 0.025 weight percent, contents of nickel, vanadium, aluminium, molybdenum or cobalt all being individually limited to 0.5 weight percent, the remainder being iron and unavoidable impurities, said steel having martensitic structure that comprises martensitic grains, wherein a fraction of at least 10 volume percent of martensitic grains is oriented.

Abstract: The invention provides a method for recovering scandium from an acidic solution containing scandium. The method having [a] a precipitation step wherein sodium sulfate is added into the acidic solution containing scandium to obtain a precipitate of a scandium double sulfate; [b] a neutralization step wherein pure water is added to the precipitate of a scandium double sulfate to dissolve the precipitate of a scandium double sulfate therein, and scandium hydroxide is obtained by adding a neutralizing agent into the dissolution liquid; and [c] a re-dissolution step wherein an acid is added to the scandium hydroxide obtained in the neutralization step, so that a scandium dissolution after purification, in which the scandium hydroxide is dissolved, is obtained.

Abstract: Disclosed in the present application is a copper rotation-suspension smelting process comprising: mixing a flux and/or fume with dried copper-containing mineral powders to form a mixed material, which enters into a smelting furnace through a material channel; allowing a reaction gas to form a swirling flow under an action of a swirler, which enters into the smelting furnace through a Venturi channel under a guidance of a swirling gas channel; replenishing the reaction gas and/or a fuel to the smelting furnace through an auxiliary oxygen channel and an auxiliary fuel channel; subjecting the swirling flow which has been subjected to high-speed expansion through the Venturi channel and enters into the smelting furnace to a contact reaction with the mixed material; separating a melt generated by the reaction which falls into a settling tank into a residue layer and a copper-containing product layer.

Abstract: A method for recovering scandium is provided, which is capable of recovering highly-pure scandium from nickel oxide ore in a simple and efficient manner. The method for recovering scandium according to the present invention includes a scandium elution step S2 of passing a solution containing scandium through an ion exchange resin to obtain an eluted liquid containing scandium from the ion exchange resin, a neutralization step S3 of adding for neutralization a neutralizing agent to the eluted liquid, a solvent extraction step S4 of solvent-extracting the neutralized eluted liquid using an amine-based extracting agent, and a scandium recovering step S5 of obtaining a scandium precipitate from residual liquid separated by the solvent extraction, and then roasting the precipitate to obtain scandium oxide.

Abstract: A copper-based alloy casting includes 69 to 88% of Cu, 2 to 5% of Si, 0.0005 to 0.04% of Zr, 0.01 to 0.25% of P by mass, and a remainder including Zn and inevitable impurities, and satisfies 60?Cu?3.5×Si?3×P?71. Further, mean grain size after melt-solidification is 100 ?m or less, and ?, ? and ?-phases occupy more than 80% of phase structure. Furthermore, the copper-based alloy casting according to the invention can further include at least one element selected from a group consisting of 0.001 to 0.2% of Mg, 0.003 to 0.1% of B, 0.0002 to 0.01% of C, 0.001 to 0.2% of Ti and 0.01 to 0.3% of rare earth element.

Abstract: The present disclosure relates to a high-tensile brass alloy containing 55-65 wt-% copper; 1-2.5 wt-% manganese; 0.7-2 wt % tin; 0.2-1.5 wt % iron; 2-4 wt % nitrogen; 2-5 wt % aluminum; 0.2-2 wt % silicon; 2.0 wt % cobalt maximum; and the remainder zinc together with unavoidable impurities, wherein the sum of the elements manganese and tin is at least 1.7 wt % and at most 4.5 wt.

Abstract: New 2xxx aluminum alloys containing vanadium are disclosed. In one embodiment, the aluminum alloy includes 3.3-4.1 wt. % Cu, 0.7-1.3 wt. % Mg, 0.01-0.16 wt. % V, 0.05-0.6 wt. % Mn, 0.01 to 0.4 wt. % of at least one grain structure control element, the balance being aluminum, incidental elements and impurities. The new alloys may realize an improved combination of properties, such as in the T39 or T89 tempers.

Abstract: A cermet (1) includes a bonding phase (2) and a hard phase (4). The hard phase (4) includes: a first hard phase (5) composed of TiCN; and a second hard phase (6) composed of a composite carbonitride of Ti, which is greater than the average particle diameter of the first hard phase (5). The cermet (1) further includes an aggregate part (10) formed by interlinking parts of the second hard phase (6). The second hard phase (6) forming the aggregate part (10) includes a 2a-th hard phase (7) having a maximum W content of an inner part thereof that is more than 1.1 times as great as an average W content of an outer circumferential part thereof, in terms of mass ratio. The aggregate part (10) composes a proportion of from 20% to 60% of the cermet (1) in terms of surface area.

Abstract: A rolled steel material for fracture splitting connecting rods consists of, C: 0.30 to 0.40%, Si: 0.60 to 1.00%, Mn: 0.50 to 1.00%, P: 0.04 to 0.07%, S: 0.04 to 0.13%, Cr: 0.10 to 0.30%, V: 0.05 to 0.14%, Ti: more than 0.15% to 0.20% or less, N: 0.002 to 0.020%, and optionally may contain Cu, Ni, Mo, Pb, Te, Ca, and Bi, with the balance being Fe and impurities. fn1, defined by Formula (1), ranges from 0.65 to 0.80. Relative to the V content in the steel material, a V content in coarse precipitates having a particle size of 200 nm or more is 70% or less, and relative to the Ti content in the steel material, a Ti content in the coarse precipitates is 50% or more.

Abstract: A first method is disclosed for forming a tubular reinforcement that comprises the steps of: providing a 7xxx aluminum tube, heating tube to at least 450° C. and water quenching the tube in less than or equal to 20 seconds after heating. All of the forming processes on the tube are then completed from within 1 to 8 hours of quenching. A second method for forming a tubular reinforcement is disclosed that comprises the steps of providing a 7xxx-O temper aluminum tube and forming the tube into a predetermined shape. The tube in then heated the tube to at least 450° C. and quenched the tube with water or air in a hydroforming die just prior to or while hydroforming the tube.

Abstract: A method of strengthening a dilute magnesium alloy sheet includes providing a dilute magnesium alloy sheet, which includes a magnesium alloy consisting essentially of (wt %): >0 to 3.0 of Zn; >0 to 1.5 of Ca; 0 to 1.0 of Zr; 0 to 1.3 of a rare earth element or mixture of the same; 0 to 0.3 of Sr; 0 to 0.7 of Al, the balance of Mg and other unavoidable impurities, wherein the total weight % of alloying elements is less than 3%; subjecting the dilute magnesium alloy sheet to plastic deformation, in which the tensile plastic strain should exceed 0.5%, but be less than 8% to form a pre-deformed magnesium alloy sheets; and subjecting the pre-deformed magnesium alloy sheets to an ageing treatment in a temperature range of 80 to 250° C. for at least 1 minute, thereby forming a strengthened magnesium alloy sheet.

Abstract: A metallic alloy, more particularly, a high-entropy alloy with a composite structure exhibits high strength and good ductility, and is used as a component material in electromagnetic, chemical, shipbuilding, machinery, and other applications, and in extreme environments, and the like.

Abstract: Provided is a titanium cast product for hot rolling made of commercial pure titanium or a titanium alloy, the titanium cast product including, in a surface serving as a rolling surface, a fine structure layer that is formed of an acicular structure formed in the outermost surface by melting and re-solidification treatment and that has a thickness of more than or equal to 5 mm and less than 9 mm in depth. In the titanium cast product for hot rolling according to the present invention, the surface is flat, the number of minute voids in the interior immediately below the surface is small, and the outermost surface has a significantly fine structure. When the titanium cast product is subjected to hot rolling, the occurrence of concavities on the surface in the early stage of hot rolling and the occurrence of surface defects on the hot rolled sheet can be stably prevented at a practical level.

Abstract: The present invention relates to: a steel sheet for hot press forming that is used for vehicle parts and the like and, more particularly, to a steel sheet for hot press forming with excellent corrosion resistance and weldability; a forming member; and a manufacturing method therefor.

Abstract: A soft magnetic material comprises a plurality of iron-containing particles and an insulating layer on the iron-containing particles, the insulating layer comprising an oxide. The soft magnetic material is an aggregate of permeable micro-domains separated by insulation boundaries.

Abstract: A number of variations may include a method that may include laser shock peening a friction work surface of a working part and applying a ferritic nitrocarburizing process to the friction work surface such that diffusion of carbon and nitrogen atoms into the friction work surface is accelerated.

Abstract: A nitrided part and soft nitrided part with excellent wear resistance and pitting resistance and a nitriding method and soft nitriding method are provided, specifically, a nitrided part or soft nitrided part made by a steel material comprising, by mass %, C: 0.05 to 0.3%, Si: 0.05 to 1.5%, Mn: 0.2 to 1.5%, P: 0.025% or less, S: 0.003 to 0.05%, Cr: 0.5 to 2.0%, Al: 0.01 to 0.05%, and N: 0.003 to 0.025% and having a balance of Fe and impurities, wherein, the surface layer comprises a compound layer containing iron, nitrogen, and carbon and a nitrogen diffusion layer positioned below the compound layer, the compound layer comprises an ? single phase, the ? single phase has a thickness of 8 to 30 ?m and a Vicker's hardness of 680 HV or more, and the ? single phase has a volume ratio of pores of less than 10%.

Abstract: There is provided a surface treatment method in which a processing gas is brought in contact with a heated processing object made of steel, an element in the processing gas is solid-solutionized, and thus a surface treatment is performed on the processing object. The processing object is heated to a heating temperature in a vicinity of a processing temperature at which the surface treatment is performed by heating an atmosphere in which the processing object is disposed. The surface treatment is performed by bringing the processing gas in contact with a surface of the processing object while the processing object which is heated is directly heated to the processing temperature.

Abstract: The present invention provides a metal sheet, on a first surface of which a resist pattern having a narrow width can be stably provided. This manufacturing method for a metal sheet includes a preparation step of preparing a sheet material comprising an iron alloy that contains nickel. When a composition analysis of the first surface of the metal sheet obtained from the sheet material is performed using X-ray photoelectron spectroscopy, the ratio A1/A2 obtained by the result of the X-ray photoelectron spectroscopy does not exceed 0.4, where A1 is the sum of the peak area value of nickel oxide and the peak area value of nickel hydroxide, and A2 is the sum of the peak area value of iron oxide and the peak area value of iron hydroxide.

Abstract: Disclosed are a mask frame, for mask frame manufacturing method and mask. The mask frame includes a main frame and shielding bars, an evaporation-deposition area penetrating the main frame in a thickness direction being formed on the main frame, the main frame being provided with pairs of first receiving slots, the two first receiving slots in each pair being located on both sides of the evaporation-deposition area in a first direction, respectively, each shielding bar corresponding to a pair of first receiving slot, two ends of shielding bars being disposed within corresponding two first receiving slots, respectively. The mask frame comprises at least one pair of first positioning holes, each pair of which corresponds to one pair of first receiving slots, and the two first positioning holes in each pair correspond to positions of the two first receiving slots in a corresponding pair, respectively.

Abstract: The present invention provides a stacked body including a germanium layer, an organic material layer, a zinc compound layer, and the like, thereby exhibiting a specific color and glossiness, transmitting electromagnetic waves, and having excellent water resistance, and more particularly, a stacked body including a substrate and a deposition layer formed on the substrate, wherein the deposition layer includes the organic material layer made of an organic material, the zinc compound layer made of zinc sulfide (ZnS) or zinc selenium (ZnSe), and the germanium layer made of germanium (Ge) or a germanium alloy.

Abstract: In one aspect, coatings are described herein employing composite architectures providing high aluminum content and high hardness for various cutting applications. For example, a coated cutting tool comprises a substrate and a coating comprising a refractory layer deposited by physical vapor deposition adhered to the substrate, the refractory layer comprising a plurality of sublayer groups, a sublayer group comprising a titanium aluminum nitride sublayer and an adjacent composite sublayer comprising alternating nanolayers of titanium silicon nitride and titanium aluminum nitride.

Abstract: In one embodiment, a method for forming an alkali resistant coating includes forming a first oxide material above a substrate and forming a second oxide material above the first oxide material to form a multilayer dielectric coating, wherein the second oxide material is on a side of the multilayer dielectric coating for contacting an alkali. In another embodiment, a method for forming an alkali resistant coating includes forming two or more alternating layers of high and low refractive index oxide materials above a substrate, wherein an innermost layer of the two or more alternating layers is on an alkali-contacting side of the alkali resistant coating, and wherein the innermost layer of the two or more alternating layers comprises at least one of: alumina, zirconia, and hafnia.

Abstract: A physical vapor deposition (PVD) target that includes a body composed of material that is reactive with an oxygen containing atmosphere; and a non-reactive cap layer encapsulating at least a sputter surface of the body. The non-reactive cap layer is a barrier obstructing the diffusion of oxygen containing species to the body of the PVD target.

Abstract: Provided is a tantalum sputtering target, which includes an area ratio of crystal grains of which a {111} plane is oriented in a direction normal to a rolling surface (ND) is 35% or more when the ND, which is a cross section orthogonal to a sputtering surface of a target, is observed via Electron Backscatter Diffraction Pattern method. The object of the present invention is to provide a tantalum sputtering target in which a sputtered material can be uniformly deposited on a wafer surface under high-power sputtering conditions by increasing the straightness of the sputtered material. By using this kind of tantalum target for sputter-deposition, it is possible to improve the film thickness uniformity and the throughput of deposition even for fine wiring.

Abstract: Embodiments of the present disclosure generally describe methods for depositing an amorphous carbon layer onto a substrate, including over previously formed layers on the substrate, using a high power impulse magnetron sputtering (HiPIMS) process, and in particular, biasing of the substrate during the deposition process and flowing a nitrogen source gas and/or a hydrogen source gas into the processing chamber in addition to an inert gas to improve the morphology and film stress of the deposited amorphous carbon layer.

Abstract: An apparatus for controlling an operation of a machine includes an optical recognition system, a control unit, and a remote control interface. The optical recognition system is configured to monitor and obtain actual operation information displayed on a panel of a processing machine in accordance with an operation time. The control unit is configured to receive the actual operation information and check the actual operation information with expected operation information. The expected operation information is obtained based on an operation model which is already built up corresponding to a current fabrication process. Deviation information between the actual operation information and the expected operation information is determined and converted into a parameter set. The remote control interface receives the parameter set and converts the parameter set into a control signal set to control the operation of the processing machine.

Abstract: There is provided a film forming apparatus for performing a film forming process on substrates by heating the substrates while the substrates are held in a shelf shape by a substrate holder in a vertical reaction container. The film forming apparatus includes: an exhaust part configured to evacuate the reaction container; a gas supply part configured to supply a film forming gas into the reaction container; a heat insulating member provided above or below an arrangement region of the substrates to overlap with the arrangement region and configured to thermally insulate the arrangement region from an upper region above the arrangement region or a lower region below the arrangement region; and a through-hole provided in the heat insulating member at a position overlapping with central portions of the substrates to adjust a temperature distribution in a plane of each substrate held near the heat insulating member.

Abstract: A coated cutting tool for chip forming machining of metals includes a substrate having a surface coated with a chemical vapour deposition (CVD) coating. The coated cutting tool has a substrate coated with a coating including a layer of ?-Al2O3, wherein the ?-Al2O3 layer exhibits a dielectric loss of 10?6?tan ??0.0025, as measured with AC at 10 kHz, 100 mV at room temperature of 20° C.

Abstract: An arrangement of two shutters radially outward from an injector block and a susceptor onto which a wafer carrier is removably mounted are configured to provide a flowpath through a reactor chamber that does not exhibit a vortex, thereby reducing or eliminating buildup on the inside of the reactor chamber and facilitating large temperature gradient between the injector block and the wafer carrier. This can be accomplished by introduction of a purge gas flow at a radially inner wall of an upper shutter, and in some embodiments the purge gas can have a different chemical composition than the precursor gas used to grow desired epitaxial structures on the wafer carrier.

Abstract: Apparatus and methods for spatial atomic layer deposition including at least one first exhaust system and at least one second exhaust system. Each exhaust system including a throttle valve and a pressure gauge to control the pressure in the processing region associated with the individual exhaust system.

Abstract: A substrate processing apparatus of the present disclosure includes a placing table provided to be rotatable around an axis; a gas supplying section that supplies gas to regions through which a substrate sequentially passes while being moved in a circumferential direction with respect to the axis as the placing table is rotated; and a plasma generating section that generates plasma using the supplied gas. The plasma generating section includes an antenna that radiates microwaves, and a coaxial waveguide that supplies the microwaves to the antenna. Line segments constituting a plane shape of the antenna when viewed in a direction along the axis include two line segments which are spaced to be distant from each other as being spaced away from the axis. The coaxial waveguide supplies the microwaves to the antenna from a gravity center of the antenna.

Abstract: Disclosed are organosilane precursors, methods of synthesizing the same, and methods of using the same to deposit silicon-containing films using vapor deposition processes. The disclosed organosilane precursors have the following formula: SiHx(RN—(CR)n—NR)y(NRR)z wherein R may each independently be H, a C1 to C6 alkyl group, or a C3-C20 aryl or heterocycle group, x+y+z=4 and n, x, y and z are integers, provided that x?3 when y=1. Preferably, n=1 to 3, x=0 to 2, y=1 to 2, and z=1 to 3.

Abstract: The present invention is in the field of processes for the generation of thin inorganic films on substrates, in particular atomic layer deposition processes. It relates to a process for preparing metal films comprising (a) depositing a metal-containing compound from the gaseous state onto a solid substrate and (b) bringing the solid substrate with the deposited metal-containing compound in contact with a reducing agent in the gaseous state, wherein the reducing agent is or at least partially forms at the surface of the solid substrate a carbene, a silylene or a phosphor radical.

Abstract: An assembly used in a process chamber for depositing a film on a wafer including a pedestal assembly having a pedestal movably mounted to a main frame. A lift pad rests upon the pedestal and moves with the pedestal. A raising mechanism separates the pad from the pedestal, and includes a hard stop fixed to the main frame, a roller attached to the pedestal assembly, a slide moveably attached to the pedestal assembly, a lift pad bracket interconnected to the slide and a pad shaft extending from the lift pad, a lever rotatably attached to lift pad bracket, a ferroseal assembly surrounding the pad shaft, and a yoke assembly offsetting a moment to the ferroseal assembly when the lever rotates. When the pedestal assembly moves upwards, the lever rotates when engaging with the upper hard stop and roller, and separates the pad from the pedestal by a process rotation displacement.

Abstract: A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.

Abstract: Embodiments of the present invention provide apparatus and methods for performing UV treatment and chemical treatment and/or deposition in the same chamber. One embodiment of the present invention provides a processing chamber including a UV transparent gas distribution showerhead disposed above a substrate support located in an inner volume of the processing chamber, a UV transparent window disposed above the UV transparent gas distribution showerhead, and a UV unit disposed outside the inner volume. The UV unit is configured to direct UV lights towards the substrate support through the UV transparent window and the UV transparent gas distribution showerhead.