Patents Issued in March 17, 2020
  • Patent number: 10591784
    Abstract: A liquid crystal display device includes a first substrate; a thin film transistor on the first substrate; a first passivation layer on the thin film transistor; a first electrode on the first passivation layer; a second passivation layer on the first electrode; a second electrode of an oxide semiconductor on the second passivation layer; and an alignment layer on the second electrode. The second electrode includes first portions and second conductive portions alternating with the first portions. A surface of the first portions is flush with the second conductive portions.
    Type: Grant
    Filed: January 13, 2017
    Date of Patent: March 17, 2020
    Assignee: LG Display Co., Ltd.
    Inventors: Jong-Hoon Lim, Do-Yeon Kim, Tae-Rim Lee, Sung-Won Lee, Sun-Yoon Kim
  • Patent number: 10591785
    Abstract: A blue phase liquid crystal display panel and a liquid crystal display device are disclosed, including a first and a second substrates disposed at an interval and parallel. Blue phase liquid crystal is disposed between the first and second substrates. The first substrate includes a first base. The second substrate includes a second base. The blue phase liquid crystal display panel includes a transmissive display region having multiple first base platforms, multiple first electrodes, each of which is disposed on each of the first base platform, and second electrodes disposed on the first base and the second base. A reflective display region has fourth electrodes only disposed on the second base. The first substrate is provided with a reflective layer corresponding to the reflective display region. When light passes through the transmissive display region and the reflective display region, phase delays of the light in the two regions are identical.
    Type: Grant
    Filed: May 15, 2018
    Date of Patent: March 17, 2020
    Assignee: Wuhan China Star Optoelectronics Technology Co., Ltd
    Inventor: Yuejun Tang
  • Patent number: 10591786
    Abstract: A mask structure is provided. The mask structure includes a plurality of mask units arranged in an array. The mask units includes a first mask configured to form a first transparent electrode in a corresponding area of a surface of the array substrate, and a second mask connected with the first mask, and configured to form a second transparent electrode in a corresponding area of the surface of the array substrate. The first mask and the second mask have different light transmittances, and light transmittance of the second mask is less than light transmittance of the first mask, to allow in different amounts of light.
    Type: Grant
    Filed: November 6, 2017
    Date of Patent: March 17, 2020
    Assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventor: Hongyuan Xu
  • Patent number: 10591787
    Abstract: A display device including an auxiliary electrode in order to prevent the luminance unevenness is provided. In the display device, an under-cut region may be formed by a first penetrating hole of a lower passivation layer and a second penetrating hole of an over-coat layer in order to connect an upper electrode to the auxiliary electrode. The second penetrating hole of the over-coat layer may be disposed to be offset from the first penetrating hole of the lower passivation layer, so that the under-cut region may be partially broken in an edge of the auxiliary electrode. Thus, the display device may improve the reliability of the electrical connection between the auxiliary electrode and the upper electrode.
    Type: Grant
    Filed: October 23, 2017
    Date of Patent: March 17, 2020
    Assignee: LG Display Co., Ltd.
    Inventors: Sung-Bin Shim, Moon-Bae Gee
  • Patent number: 10591788
    Abstract: The present invention provides an array substrate, which comprises a peripheral region and a plurality of conductive terminals disposed in the peripheral region. The peripheral region comprises a base substrate and a buffer layer, an insulating layer, and an interlayer dielectric layer orderly-overlapping disposed on the substrate. The array substrate further comprises grooves extending from the interlayer dielectric layer to the base substrate. Each of the conductive terminals comprises a first terminal, a crimping terminal which comprises a crimping layer and a second terminal disposed on the crimping layer, and a plurality of conductive particles. The first terminal comprises a connection section and an extension section, which is connected with the connection section. The second terminal is inserted into the groove. The conductive particles are uniformly sealed in a gap, so as to achieve the conduction between the first terminal and the second terminal.
    Type: Grant
    Filed: November 17, 2017
    Date of Patent: March 17, 2020
    Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventor: Cui Huang
  • Patent number: 10591789
    Abstract: A connector, a display screen and a method for manufacturing the display screen are provided. The connector includes a substrate, and a conductor structure arranged on the substrate. One end of the conductor structure is connected to a data signal line on a display panel, and the other end of the conductor structure is connected to a driver integrated circuit IC arranged on a non-display side of the display panel. A target surface, away from the substrate, of the conductor structure is uneven. The connector reduces the probability of the conductor structure breaking under the stress of the substrate, thereby guaranteeing the good display effect of the display screen.
    Type: Grant
    Filed: August 22, 2018
    Date of Patent: March 17, 2020
    Assignees: BOE Technology Group Co., Ltd, Chengdu BOE Optoelectronics Technology Co., Ltd.
    Inventors: Yu Zhang, Jian He, Chuan Peng, Yan Cui, Chunhui Zhu
  • Patent number: 10591790
    Abstract: An array substrate and a display device are provided, which relate to the field of display and are for alleviating or mitigating the problem of bad contact between the pixel electrode and the drain pad caused by deep via holes. The array substrate includes a plurality of pixel units, each including a drain pad, a pixel electrode and an insulating layer above the drain pad. The drain pad has a first via hole, and the insulating layer has a second via hole that exposes at least a portion of the first via hole and a portion of the drain pad around the first via hole. The pixel electrode extends along an inner wall of the second via hole and contacts the exposed portion of the drain pad.
    Type: Grant
    Filed: November 8, 2017
    Date of Patent: March 17, 2020
    Assignee: BOE TECHNOLOGY GROUP CO., LTD.
    Inventors: Chunping Long, Yongda Ma, Pan Li
  • Patent number: 10591791
    Abstract: A semiconductor device with an improved aperture ratio is provided. Furthermore, a semiconductor device having lower power consumption is provided. The semiconductor device includes a first wiring, a second wiring, a third wiring, a first driver circuit, a second driver circuit, and a cell array, and the cell array includes a plurality of cells each including a transistor and a storage capacitor. The first wiring is electrically connected to the first driver circuit, the second wiring is electrically connected to the second driver circuit, the transistor is positioned above the second wiring, the second wiring includes a region serving as a first gate electrode of the transistor in a region overlapping with the transistor, the third wiring is positioned above the transistor and includes a region overlapping with the second wiring, and the second wiring is electrically connected to the third wiring in a region outside the cell array.
    Type: Grant
    Filed: April 11, 2016
    Date of Patent: March 17, 2020
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Takahiro Fukutome
  • Patent number: 10591792
    Abstract: A liquid crystal display panel and device is provided. In the panel, a gate electrode of a first thin-film transistor of a pixel at (n)th row and (2k+1)th column connects to a second scan line of pixels in (n?1)th row, a source electrode of the first thin-film transistor of the pixel at (n)th row and (2k+1)th column connects to a corresponding common line, and a drain electrode of the first thin-film transistor of the pixel at (n)th row and (2k+1)th column connects to a pixel at (n)th row and (2k+1)th column.
    Type: Grant
    Filed: October 18, 2017
    Date of Patent: March 17, 2020
    Assignee: SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventor: Sikun Hao
  • Patent number: 10591793
    Abstract: According to an aspect, a liquid crystal display panel includes an extending portion. The extending portion is metal wiring provided on the same plane as a plane parallel to a surface of a TFT substrate on which a scan line extends in the X-direction, and is electrically conductive metal extending from the scan line. The extending portion partially overlaps a space, but does not overlap an opening area, in the Z-direction.
    Type: Grant
    Filed: September 5, 2018
    Date of Patent: March 17, 2020
    Assignee: Japan Display Inc.
    Inventor: Gen Koide
  • Patent number: 10591794
    Abstract: A liquid crystal display device having an outer shape of a display region formed other than a rectangle. A driver for supplying a video signal is disposed outside the display region. A selector with selector TFT is disposed between the display region and the driver. A video signal line is disposed between the driver and the selector, and a drain line is disposed between the selector and the display region. A scanning circuit for supplying a scanning signal to the scanning line is disposed outside the display region. The selector is disposed between the scanning line and the display region, and covered with ITO as the common electrode. The common bus wiring is disposed outside the selector.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: March 17, 2020
    Assignee: Japan Display Inc.
    Inventors: Takayuki Suzuki, Hiroyuki Abe
  • Patent number: 10591795
    Abstract: The embodiments herein relate to electrochromic stacks, electrochromic devices, and methods and apparatus for making such stacks and devices. In various embodiments, an anodically coloring layer in an electrochromic stack or device is fabricated to include a heterogeneous structure, for example a heterogeneous composition and/or morphology. Such heterogeneous anodically coloring layers can be used to better tune the properties of a device.
    Type: Grant
    Filed: July 7, 2016
    Date of Patent: March 17, 2020
    Assignee: View, Inc.
    Inventors: Dane Gillaspie, Sridhar K. Kailasam, Robert T. Rozbicki
  • Patent number: 10591796
    Abstract: An electrochromic multi-layer stack is provided. The electrochromic multi-layer stack includes a thin film that includes lithium tungsten oxide with lithium included in the fully bleached state. The electrochromic multi-layer stack also includes an electrically conductive layer, and an outer substrate. An electrochromic device is also provided.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: March 17, 2020
    Assignee: KINESTRAL TECHNOLOGIES, INC.
    Inventors: Daniel Giaquinta, Brian Wiers, John David Bass, Scott Gamble, Gregory Daniloff, Hugues Duncan
  • Patent number: 10591797
    Abstract: Conventional electrochromic devices frequently suffer from poor reliability and poor performance. Improvements are made using entirely solid and inorganic materials. Electrochromic devices are fabricated by forming an ion conducting electronically insulating interfacial region that serves as an IC layer. In some methods, the interfacial region is formed after formation of an electrochromic and a counter electrode layer, which are in direct contact with one another. The interfacial region contains an ion conducting electronically insulating material along with components of the electrochromic and/or the counter electrode layer. Materials and microstructure of the electrochromic devices provide improvements in performance and reliability over conventional devices. In addition to the improved electrochromic devices and methods for fabrication, integrated deposition systems for forming such improved devices are also disclosed.
    Type: Grant
    Filed: October 27, 2017
    Date of Patent: March 17, 2020
    Assignee: View, Inc.
    Inventors: Zhongchun Wang, Anshu Pradhan, Robert Rozbicki
  • Patent number: 10591798
    Abstract: A method of controlling smart windows with dynamic tenancy, performed by a control system is provided. The method includes coupling a control system having a plurality of smart windows each having one or more electrochromic devices, to a plurality of remote devices, and managing, in the control system, configurable smart window groups each having in membership one or more of the plurality of smart windows. The method includes managing, in the control system, configurable user groups each having in membership one or more of a plurality of users in association with the smart window groups, and controlling transmissivity of the electrochromic devices of the plurality of smart windows in accordance with the configurable smart window groups, the configurable user groups and the plurality of remote devices.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: March 17, 2020
    Assignee: KINESTRAL TECHNOLOGIES, INC.
    Inventors: Paul Nagel, Wally Barnum, Jason Litzinger, William O'Dell
  • Patent number: 10591799
    Abstract: This disclosure provides connectors for smart windows. A smart window may incorporate an optically switchable pane. In one aspect, a window unit includes an insulated glass unit including an optically switchable pane. A wire assembly may be attached to the edge of the insulated glass unit and may include wires in electrical communication with electrodes of the optically switchable pane. A floating connector may be attached to a distal end of the wire assembly. The floating connector may include a flange and a nose, with two holes in the flange for affixing the floating connector to a first frame. The nose may include a terminal face that present two exposed contacts of opposite polarity.
    Type: Grant
    Filed: October 17, 2018
    Date of Patent: March 17, 2020
    Assignee: View, Inc.
    Inventor: Stephen Clark Brown
  • Patent number: 10591800
    Abstract: An electrophoretic display and a driving method thereof are provided. The electrophoretic display includes a display panel and a driving circuit. The display panel includes an electrophoretic unit and a driving substrate. The driving method includes: providing a resetting signal to the driving substrate to reset at least one of a first electrophoretic particle and a second electrophoretic particle in the electrophoretic unit; and providing a driving signal to the driving substrate to drive a third electrophoretic particle in the electrophoretic unit, wherein the driving signal includes a first driving period and a second driving period, and the first driving period occurs before the second driving period. In the first driving period, the driving signal includes a plurality of first driving pulses and a plurality of second driving pulses. In the second driving period, the driving signal includes a plurality of third driving pulses.
    Type: Grant
    Filed: December 5, 2018
    Date of Patent: March 17, 2020
    Assignee: E Ink Holdings Inc.
    Inventors: Chen-Kai Chiu, Feng-Shou Lin, Chih-Yu Cheng
  • Patent number: 10591801
    Abstract: A single drive type optical modulator has good high-frequency characteristics and reduced wavelength chirp of the modulated light. An optical modulator is provided with a Mach-Zehnder optical waveguide including first and second optical waveguides, a buffer layer covering the first and second optical waveguides, and an electrode layer including first and second ground electrodes and a signal electrode positioned between the first and second ground electrodes in a plan view. The signal electrode has a first lower surface covering the first optical waveguide through the buffer layer, the first ground electrode has a first lower surface covering the second optical waveguide through the buffer layer and a second lower surface positioned above the first lower surface, and a gap between the signal electrode and the second ground electrode that is larger than a gap between the signal electrode and the first ground electrode.
    Type: Grant
    Filed: April 7, 2017
    Date of Patent: March 17, 2020
    Assignee: TDK CORPORATION
    Inventors: Shinji Iwatsuka, Kenji Sasaki
  • Patent number: 10591802
    Abstract: An on-chip optical phased array includes an array of photonic antenna units connected in series by photonic waveguides and arranged in a two-dimensional array to produce complex still and scanning optical patterns through optical interference effect. Each antenna unit includes an output photonic antenna (e.g. grating antenna), and a waveguide phase shifter for adjusting the optical phase of the optical beam output by the antenna unit. The grating antenna and the waveguide phase shifter are formed in the same optical wave guiding layer which includes a core layer between two cladding layers. The grating antennas may be a shallow-etched structure or a deep-etched edge-modulated grating. The optical phased array, including the array of photonic antenna units and the electrodes that connect and provide electrical power to them, can be made on a single chip of silicon using complementary metal-oxide-semiconductor (CMOS) or compatible fabrication processes.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: March 17, 2020
    Assignee: Litexel Inc.
    Inventors: Xiaochen Sun, Lingxuan Zhang, Ningning Feng
  • Patent number: 10591803
    Abstract: Beam adaptation devices are disclosed for variable-astigmatic adjustment of electromagnetic radiation propagating along a beam axis of the beam adaptation device. The devices include a first astigmatism lens unit, which provides at least one first lens tiltable with respect to the beam axis for astigmatism adjustment, a divergence matching lens unit with a second lens for adjusting the divergence, wherein the distance between the second lens and the first lens along the beam axis is adjustable, and a second astigmatism lens unit with at least one third lens tiltable with respect to the beam axis for astigmatism adjustment. To adjust the magnitude of the electromagnetic radiation on the third lens, the distance between the second lens and the third lens along the beam axis is adjustable. The beam adaptation device can be used, for example, for astigmatic pre-compensation in frequency conversion.
    Type: Grant
    Filed: December 18, 2018
    Date of Patent: March 17, 2020
    Assignee: TRUMPF LASER GMBH
    Inventors: Ivo Zawischa, Markus Graf, Carolin Wagner
  • Patent number: 10591804
    Abstract: A plug-and-play fiber-coupled nonlinear optical quantum wave-converter, optimized for quantum communications, comprises a commercial periodically-poled, waveguide-based, nonlinear optical chip, coupled with a pair of substrate-guided holographic (SGH) wavelength division multiplexers (WDM) and a pair of SGH filters; it offers bidirectional difference frequency conversion (DFG) and sum frequency conversion (SFG) simultaneously in a single packaged device.
    Type: Grant
    Filed: March 30, 2016
    Date of Patent: March 17, 2020
    Assignee: Luminit LLC
    Inventors: Jun Ai, Fedor Dimov, Xiaowei Xia, Selim Shahriar, Russell Kurtz, Chris Griffo
  • Patent number: 10591805
    Abstract: A digital camera is provided with a vertically long camera body having an approximately rectangular solid shape. An LCD panel provided in a rear surface of the camera body is arranged such that longitudinal directions of the display screen and the camera body correspond to each other. The digital camera is operated through a touch panel provided in a lower portion of the display screen. In a taking mode, an image is displayed in a small size on an upper portion of the display screen. In reproducing, the camera body is rotated sideways by 90 degree. In a reproducing mode, display posture of the image is also rotated by 90 degree, and the image is displayed in a large size on the entire display screen.
    Type: Grant
    Filed: February 6, 2019
    Date of Patent: March 17, 2020
    Assignee: FUJIFILM Corporation
    Inventor: Atsushi Misawa
  • Patent number: 10591806
    Abstract: A tripod head for supporting a camera includes an electronic leveling and display system to produce a continuously visible display of the leveling of the tripod head and the camera mounted thereon. That is, the tripod head may be rotated (a full 360 degrees) so the display system is visible regardless of the position of the camera. The display system attached to, or made part of, the tripod head includes light indicating elements (e.g., LEDs or LCDs) which may be easily seen, day or night and under physical constraints limiting access to the camera, regardless of the orientation of the camera.
    Type: Grant
    Filed: July 10, 2018
    Date of Patent: March 17, 2020
    Inventor: Larry J Tiefenbrunn
  • Patent number: 10591807
    Abstract: An image capturing apparatus on which, and from which, an accessory is mountable and dismountable includes a plurality of terminals disposed in a circumferential direction of a mount, and a terminal holder. The terminal holder has a height level difference for holding the terminals at different positions in a center-axis direction of the mount. The terminals include a first terminal configured to be used to supply power for driving an internal component of the accessory, and a second terminal configured to indicate a ground level corresponding to the first terminal. The second terminal is disposed nearer in a mount direction of the accessory than the other terminals on a predetermined stage of the terminal holder, and is connected to a corresponding one of a plurality of terminals of the accessory first among the terminals when the accessory is mounted on the image capturing apparatus.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: March 17, 2020
    Assignee: Canon Kabushiki Kaisha
    Inventors: Jun Kamiya, Yasuyuki Watazawa, Naoto Fujihashi
  • Patent number: 10591808
    Abstract: An imaging apparatus includes a second mount configured to bayonet-couple with a first mount. The second mount has multiple contact points disposed in a circumferential direction that are to be electrically connected to multiple contact faces on the first mount when coupled. The number of the contact points is an even number of four or larger. When viewing the imaging apparatus in a normal position from the second mount side, a line extending from a center axis of the second mount in the gravitational direction and an opposite direction is a first mount center line, and a line orthogonal thereto is a second mount center line. The contact pins include a first contact pin that overlaps the first mount center line, and second and third contact pins at both ends in the circumferential direction of the second mount, with generally the same distance to the second mount center line.
    Type: Grant
    Filed: May 30, 2018
    Date of Patent: March 17, 2020
    Assignee: Canon Kabushiki Kaisha
    Inventor: Takanori Honda
  • Patent number: 10591810
    Abstract: The multiple function LED project light is a hand-held and powered by DC power, and the project light has front lens has project magnify lens fit-into or install-on or built-in on center position. The project lens has below position outer-tube set assembled together so outer-tube can envelope or surrounded the lower position separated inner-tube which has image-forming unit within. While the project head move away from the project light neck by screw-thread or other extend construction to make distance between the magnify lens and image forming-unit changed to get focus adjustment functions. The said Project light may has self-prong, or project light fit within the hold-base which has prong-set both get AC current through the AC-to-DC circuit to get desired DC power for LED or SMD-LEDs or Dip-LEDs or COB-LED or other DC operated electric components to use.
    Type: Grant
    Filed: August 24, 2017
    Date of Patent: March 17, 2020
    Inventor: Tseng-Lu Chien
  • Patent number: 10591811
    Abstract: A projector includes light source, plurality of light modulation devices, light combining device integrated with the plurality of light modulation devices, projection optical device, posture adjustment device that adjusts posture of the light combining device, and control device that controls operation of the posture adjustment device, the posture adjustment device includes lead screw that changes posture of the light combining device, driver that rotates lead screw, shaft member to which rotation of lead screw is transmitted, potentiometer that detects amount of rotation of the shaft member, and photosensor that may be shielded by light shielding portion provided in the shaft member, and the control device includes abnormality determination unit that determines whether or not abnormality has occurred based on detection result by the potentiometer, and return operation unit that, if occurrence of abnormality is determined, returns the light combining device to original position based on detection result by th
    Type: Grant
    Filed: September 28, 2018
    Date of Patent: March 17, 2020
    Assignee: SEIKO EPSON CORPORATION
    Inventors: Tetsuya Tamura, Kazunori Maeta
  • Patent number: 10591812
    Abstract: A projector assembly includes a light emitting diode (LED) array, wherein the LED array has an array axis, wherein the LED array includes a plurality of LEDs arranged along the array axis, and wherein the plurality of LEDs are individually addressable. The projector assembly includes a rotatable actuator supporting the LED array, wherein the rotatable actuator has a rotation axis, and wherein the rotation axis and the array axis are parallel. The projector assembly includes a collimator positioned in optical communication with the LED array for collimating light emitted from the plurality of LEDs and a set of imaging optics positioned in optical communication with the collimator for focusing collimated light and forming a first image of the LED array at a distance, wherein the first image includes a first axis corresponding to the array axis and a second axis orthogonal to the rotation axis.
    Type: Grant
    Filed: November 28, 2018
    Date of Patent: March 17, 2020
    Assignee: MAGIC LEAP, INC.
    Inventor: Fahri Yaras
  • Patent number: 10591813
    Abstract: An illumination apparatus includes a light source, a polarization conversion element configured to convert light from the light source into polarized light having a specific polarization direction and to emit the polarized light to an illumination surface, and a photosensor configured to receive light emitted from a surface different from an incident surface and an exit surface of the polarization conversion element.
    Type: Grant
    Filed: January 23, 2019
    Date of Patent: March 17, 2020
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Tomohiro Nakamura
  • Patent number: 10591814
    Abstract: A synthetic image display device includes: a beam projector configured to project a first image; a screen on which the first image projected from the beam projector is formed; and a transparent display panel disposed so as to face the screen and configured to display a second image to be combined and viewed with the first image formed on the screen, the transparent display panel being formed with a pinhole for penetration of light in each pixel so that the first image penetrates and is viewed through the transparent display panel.
    Type: Grant
    Filed: May 11, 2017
    Date of Patent: March 17, 2020
    Assignee: TOVIS CO., LTD.
    Inventor: Yong Beom Kim
  • Patent number: 10591815
    Abstract: Embodiments described herein provide a method shifting mask pattern data during a digital lithography process to reduce line waviness of an exposed pattern. The method includes providing a mask pattern data having a plurality of exposure polygons to a processing unit of a digital lithography system. The processing unit has a plurality of image projection systems that receive the mask pattern data. Each image projection system corresponds to a portion of a plurality of portions of a substrate and receives an exposure polygon corresponding to the portion. The substrate is scanned under the plurality of image projection systems and pluralities of shots are projected to the plurality of portions while shifting the mask pattern data. Each shot of the pluralities of shots is inside the exposure polygon corresponding to the portion.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: March 17, 2020
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Joseph R. Johnson, Christopher Dennis Bencher, Thomas L. Laidig
  • Patent number: 10591816
    Abstract: The invention provides a photosensitive resin composition, a color filter, and a liquid crystal display element thereof. The photosensitive resin composition includes an alkali-soluble resin (A), a compound (B) having an ethylenically unsaturated group, a photoinitiator (C), a solvent (D), and a black pigment (E). The compound (B) having an ethylenically unsaturated group contains a compound (B-1) having an acidic group and at least three ethylenically unsaturated groups. The photoinitiator (C) includes a photoinitiator (C-1) represented by formula (1).
    Type: Grant
    Filed: October 15, 2015
    Date of Patent: March 17, 2020
    Assignee: Chi Mei Corporation
    Inventors: Hao-Wei Liao, Yu-Jie Tsai, Hung-Chia Chou
  • Patent number: 10591817
    Abstract: The present invention provides a method for producing a composition for forming a coating film for a lithography used in manufacture of a semiconductor device by using a producing apparatus provided with a metal adsorbent and a filter, comprising the steps of: (1) introducing a solvent used in the composition into the producing apparatus, (2) circulating the solvent in the producing apparatus to adsorb a metal impurity by the metal adsorbent, (3) adding a raw material of the composition into the circulated solvent and homogenizing them to prepare the composition, and (4) circulating the prepared composition in the producing apparatus to remove a microscopic foreign matter by the filter. This method enables to produce a composition for forming a coating film for a lithography with its metal impurities, which cause an etching defect, extremely reduced.
    Type: Grant
    Filed: March 24, 2016
    Date of Patent: March 17, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Tsutomu Ogihara, Motoaki Iwabuchi
  • Patent number: 10591818
    Abstract: Various vinyl addition polymers of nadic anhydride are disclosed. Examples of such polymers include copolymers and terpolymers of nadic anhydride with a wide variety of norbornene-type monomers. The nadic anhydride polymers are found to be useful in forming a wide variety of photosensitive compositions, both positive and negative, which are capable of forming high resolution imagable films exhibiting excellent dielectric properties (low-k) and thermal properties, and thus are useful in the fabrication of a variety of microelectronic and optoelectronic devices, among others.
    Type: Grant
    Filed: July 28, 2017
    Date of Patent: March 17, 2020
    Assignee: PROMERUS, LLC
    Inventors: Brian Knapp, Cheryl Burns
  • Patent number: 10591819
    Abstract: A monomer of formula (1a) or (1b) is provided wherein A is a polymerizable group, R1-R6 are monovalent hydrocarbon groups, X1 is a divalent hydrocarbon, group, Z1 is an aliphatic group, Z2 forms an alicyclic group, k=0 or 1, m=1 or 2, n=1 to 4. A useful polymer is obtained by polymerizing the monomer. A resist composition comprising the polymer has improved development properties and is processed to form a negative pattern having high contrast, high resolution and etch resistance which is insoluble in alkaline developer.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: March 17, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Masahiro Fukushima, Masayoshi Sagehashi, Koji Hasegawa, Jun Hatakeyama, Kazuhiro Katayama
  • Patent number: 10591820
    Abstract: A resist film including a metallic component and a photosensitive material is formed on a surface of a substrate, and then a peripheral portion of the resist film on the substrate is irradiated with light by an edge exposer. Subsequently, development processing is performed with a development liquid from a nozzle on the exposed portion of the resist film. Thus, the part of the resist film formed on the peripheral portion of the substrate is removed. Thereafter, exposure processing is performed on the substrate in an exposure device, so that an exposure pattern is formed on the resist film. Then, a development liquid is supplied to the exposed substrate in a development processing unit, so that development processing is performed on the resist film.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: March 17, 2020
    Assignee: SCREEN Holdings Co., Ltd.
    Inventors: Masahiko Harumoto, Masaya Asai, Yuji Tanaka, Koji Kaneyama
  • Patent number: 10591821
    Abstract: A flexographic printing precursor includes a support and a photopolymerisable layer including a monomer, an initiator and having a thickness between 0.5 mm and 7.0 mm, characterized in that the photopolymerisable layer contains magnetic or magnetisable particles. A method of developing the flexographic printing precursor to obtain a printing element with a relief image using a magnetic field is provided.
    Type: Grant
    Filed: June 9, 2016
    Date of Patent: March 17, 2020
    Assignee: AGFA NV
    Inventors: Johan Loccufier, Thomas Billiet
  • Patent number: 10591822
    Abstract: An imaging device for projecting individually controllable laser beams onto an imaging surface movable in an X-direction. The device includes a plurality of semiconductor chips each comprising a plurality of laser beam emitting elements arranged in a main array of M·N. The chips are mounted such that each pair of adjacent chips in the Y-direction are offset from one another in the X-direction and, if activated continuously, the emitted laser beams of the two chips of said pair trace on the imaging surface a set of parallel lines that are substantially uniformly spaced in the Y-direction. In addition to the M·N elements of the main array, each chip comprises at least one additional column on one or each side, each additional column containing at least one selectively operable element capable of compensating for any misalignment in the Y-direction in the relative positioning of the adjacent chips on the support.
    Type: Grant
    Filed: July 26, 2018
    Date of Patent: March 17, 2020
    Assignee: LANDA LABS (2012) LTD.
    Inventors: Nir Rubin Ben Haim, Michael Nagler, Benzion Landa, Tamar Kashti, Ofer Aknin, Ronen Yogev, Itai Tzur
  • Patent number: 10591823
    Abstract: A substrate processing apparatus includes a hot plate which supports and heats a substrate, a light source which emits etching energy beam such that the etching energy beam etches the substrate held by the hot plate, a window device which is positioned between the light source and the hot plate and transmits the etching energy beam emitted by the light source toward the substrate, and an adjusting device which adjusts emission amounts of the etching energy beam from portions of the window device toward the substrate such that the adjusting device reduces difference in etching amounts of portions of the substrate.
    Type: Grant
    Filed: December 18, 2015
    Date of Patent: March 17, 2020
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Keisuke Yoshida, Yuzo Ohishi, Keisuke Sasaki, Shoichi Terada
  • Patent number: 10591824
    Abstract: According to one embodiment, an illumination optical apparatus comprises: a light splitting device which splits the beam into a plurality of beams with respective polarization states different from each other; a spatial light modulation device which is arranged on at least one of a first optical path in which a first beam out of the plurality of beams travels and a second optical path in which a second beam out of the plurality of beams travels, and which has a plurality of optical elements arranged two-dimensionally and driven individually; and a control device which controls the spatial modulation device to combine the first beam and the second beam at least in part.
    Type: Grant
    Filed: March 28, 2016
    Date of Patent: March 17, 2020
    Assignee: NIKON CORPORATION
    Inventor: Toru Fujii
  • Patent number: 10591825
    Abstract: A projection lens is disclosed for imaging a pattern arranged in an object plane of the projection lens into an image plane of the projection lens via electromagnetic radiation having an operating wavelength ? from the extreme ultraviolet range. The projection lens includes a multiplicity of mirrors having mirror surfaces arranged in a projection beam path between the object plane and the image plane so that a pattern of a mask in the object plane is imagable into the image plane via the mirrors. A first imaging scale in a first direction running parallel to a scan direction is smaller in terms of absolute value than a second imaging scale in a second direction perpendicular to the first direction. The projection lens also includes a dynamic wavefront manipulation system for correcting astigmatic wavefront aberration portions caused by reticle displacement.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: March 17, 2020
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Stephan Andre, Daniel Golde, Toralf Gruner, Johannes Ruoff, Norbert Wabra, Ricarda Schoemer, Sonja Schneider
  • Patent number: 10591826
    Abstract: An encoder head configured for use with a lithographic exposure tool. The head is devoid of the multiplicity of optical corner-cubes and includes, instead, a single, geometrically substantially perfect cuboid of optically-isotropic material complemented, in operation, with a birefringent lens to form a contraption that, as a unit, splits a single beam of light delivered to the contraption into four measurement (sub-)beams of light (two in xz-plane, two in yz-plane) and causes each of measurement sub-beams to interact with the wafer-stage diffraction grating at the same location twice: upon the first pass by the grating and upon the second pass by the grating.
    Type: Grant
    Filed: February 6, 2018
    Date of Patent: March 17, 2020
    Assignee: NIKON CORPORATION
    Inventor: Eric Peter Goodwin
  • Patent number: 10591827
    Abstract: A pattern exposure apparatus comprising: a rotary drum that supports a flexible substrate, which is exposed with a mask pattern formed on an outer circumferential surface of a cylindrical mask that rotates about a first center axis; a rotary drum-side scale portion that is arranged for measuring a movement of the substrate which is fed in a circumferential direction by a rotation of the rotary drum, that includes a scale; a first projection optical system that projects an exposure light; a second projection optical system that projects an exposure light; a first reading device that is arranged to oppose with the rotary drum-side scale portion and that reads the scale; and a second reading device that is arranged to oppose with the rotary drum-side scale portion and that reads the scale.
    Type: Grant
    Filed: September 24, 2018
    Date of Patent: March 17, 2020
    Assignee: Nikon Corporation
    Inventors: Masaki Kato, Tohru Kiuchi
  • Patent number: 10591828
    Abstract: A substrate table to support a substrate on a substrate supporting area, the substrate table having a heat transfer fluid channel at least under the substrate supporting area, and a plurality of heaters and/or coolers to thermally control the heat transfer fluid in the channel at a location under the substrate supporting area.
    Type: Grant
    Filed: February 8, 2019
    Date of Patent: March 17, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Thibault Simon Mathieu Laurent, Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko, Robbert Jan Voogd, Gregory Martin Mason Corcoran, Ruud Hendrikus Martinus Johannes Bloks, Johan Gertrudis Cornelis Kunnen, Ramin Badie
  • Patent number: 10591829
    Abstract: A toner according to an embodiment includes a colorant, a binder resin, and an ester wax. The colorant, the binder resin and the ester wax form a toner particle. The ester wax contains two or more ester compounds represented by the general formula R1COOR2, where R1 and R2 each independently is an alkyl group. The total number of carbon atoms of R1 and R2 is in a range from 31 to 53. The two or more ester compounds have different number of carbon atoms from each other.
    Type: Grant
    Filed: March 19, 2018
    Date of Patent: March 17, 2020
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOSHIBA TEC KABUSHIKI KAISHA
    Inventor: Tsutomu Katsumata
  • Patent number: 10591830
    Abstract: In an image forming method, a black toner and a color toner other than the black toner are used. The black toner and the color toner each include a binder resin including a polyester resin as a main component and a vinyl resin, a releasing agent, and an external additive. A content Vk % by mass of the vinyl resin relative to total mass of the binder resin included in the black toner, a content Vc % by mass of the vinyl resin relative to total mass of the binder resin included in the color toner, a content Wk % by mass of the releasing agent relative to the total mass of the binder resin included in the black toner, and a content Wc % by mass of the releasing agent relative to the total mass of the binder resin included in the color toner satisfy a specific relationship.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: March 17, 2020
    Assignee: KONICA MINOLTA, INC.
    Inventors: Kaori Matsushima, Tomoko Mine, Hitomi Motani
  • Patent number: 10591831
    Abstract: The present disclosure relates generally to a method to make a chemically prepared toner that employs a crash cooling process. In the crash cooling process, hot toner slurry is added to an external reactor containing a coolant comprised of previously cooled toner slurry in combination with cooled de-ionized water. The previously cooled toner slurry found in the coolant has the same toner composition as the incoming hot toner slurry. Also, the amount of the coolant in the external reactor is equivalent to the amount of incoming hot toner slurry. Polyester toners and polyester core shell toners having a borax coupling agent between the toner core and toner shell made from this crash cooling process results in an improvement to the toner performance especially a decrease in the overall toner usage.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: March 17, 2020
    Assignee: LEXMARK INTERNATIONAL, INC.
    Inventors: Kasturi Rangan Srinivasan, Anna Sara McLeland, Rahel Bekru Bogale
  • Patent number: 10591832
    Abstract: The present disclosure relates generally to a method to make a chemically prepared toner that employs a crash cooling process. In the crash cooling process, hot toner slurry is added to an external reactor containing a coolant comprised of previously cooled toner slurry in combination with cooled de-ionized water. The previously cooled toner slurry found in the coolant has the same toner composition as the incoming hot toner slurry. Also, the amount of the coolant in the external reactor is equivalent to the amount of incoming hot toner slurry. Polyester toners and polyester core shell toners having a borax coupling agent between the toner core and toner shell made from this crash cooling process results in an improvement to the toner performance especially a decrease in the overall toner usage.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: March 17, 2020
    Assignee: LEXMARK INTERNATIONAL, INC.
    Inventors: Kasturi Rangan Srinivasan, Anna Sara McLeland, Rahel Bekru Bogale
  • Patent number: 10591833
    Abstract: The present disclosure relates generally to a method to make a chemically prepared toner that employs a crash cooling process. In the crash cooling process, an amount of hot toner slurry is added to an external reactor holding an amount of chilled cooling water, wherein the temperature of the chilled cooling water in the external reactor is from about 8° C. to about 25° C. The amount of the chilled cooling water in the external reactor is about 10% to about 40% lower compared to the amount of the added hot toner slurry. Toner prepared using this crash cooling method is cooled at a rate of less than 0.8° C./min. Polyester toners and polyester core shell toners having a borax coupling agent between the toner core and toner shell made from this crash cooling processes using less water results in an improvement to the toner's print density and usage efficiency.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: March 17, 2020
    Assignee: LEXMARK INTERNATIONAL, INC.
    Inventors: Kasturi Rangan Srinivasan, Anna Sara McLeland, Rahel Bekru Bogale, Trent Duane Peter
  • Patent number: 10591834
    Abstract: The present disclosure relates generally to a method to make a chemically prepared toner that employs a crash cooling process. In the crash cooling process, an amount of hot toner slurry is added to an external reactor holding an amount of chilled cooling water, wherein the temperature of the chilled cooling water in the external reactor is from about 8° C. to about 25° C. The amount of the chilled cooling water in the external reactor is about 10% to about 40% lower compared to the amount of the added hot toner slurry. Toner prepared using this crash cooling method is cooled at a rate of less than 0.8° C./min. Polyester toners and polyester core shell toners having a borax coupling agent between the toner core and toner shell made from this crash cooling processes using less water results in an improvement to the toner's print density and usage efficiency.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: March 17, 2020
    Assignee: LEXMARK INTERNATIONAL, INC.
    Inventors: Kasturi Rangan Srinivasan, Anna Sara McLeland, Rahel Bekru Bogale, Trent Duane Peter