Abstract: A display panel including a substrate, a display device, a dielectric layer, and an optical resonance structure is provided. The substrate has a layout area and a light transmitting area located outside the layout area. The display device is disposed on the layout area of the substrate. The display device includes a first display electrode, a second display electrode, and a display media layer deposited between the first display electrode and the second display electrode. The dielectric layer is disposed on the substrate and covers the display device. The optical resonance structure is disposed on the dielectric layer and distributed correspondingly to the display device. The optical resonance structure includes a first transflective layer and a second transflective layer stacked on the display device and separated from each other.

Abstract: Provided are an optical modulation device and a method of operating the same. The optical modulation device may include a nano-antenna, a conductor, and an active layer located between the nano-antenna and the conductor. The optical modulation device may further include a first dielectric layer located between the active layer and the conductor and a second dielectric layer located between the active layer and the nano-antenna. The optical modulation device may further include a signal applying unit configured to independently apply an electrical signal to at least two of the nano-antenna, the active layer, and the conductor.

Abstract: The invention relates to an optical device (100) comprising: a waveguide (200) comprising a core (210) extending along an axis of symmetry XX?, and encapsulated in a cladding layer (220), an actuator (400) with width La, overlapping the core (210) and extending along an axis of symmetry YY? parallel to the axis of symmetry XX?, said actuator (400) is designed so that when a voltage is applied to it, it imposes a mechanical stress at the core (210) to modify its refraction index the device being characterised in that the second axis of symmetry YY? is offset by a lateral offset D from a plane of symmetry of the waveguide (200) including the first axis of symmetry and perpendicular to the cladding layer (220), the lateral offset is between 15% and 50% of the width La.

Abstract: A camera module includes an optics assembly, an actuator module, and detection circuitry for preventing the optics assembly from colliding with a mechanical stop due to physical impacts and disturbances. The actuator module includes a magnet and a coil. The detection circuitry detects an induced current caused by movement of the coil with respect to the magnet. The direction of the detected induced current indicates movement of the optics assembly in a particular direction along an optical axis. The detection circuitry provides a current to the coil to cause the optics assembly to move toward a particular position or direction. In some cases, the provided current may cause the optics assembly to move in a direction opposite of the movement that caused the induced current.

Abstract: A lighting device that is capable of retracting a reflective member inside a lighting device and of deciding size of the reflective member irrespective of the size of the lighting device. The lighting device includes a light emitting section and a reflective member. The reflective member is drawably retracted in the light emitting section and is provided with reflectors that are developed by a drawing operation to reflect a part of light irradiated from the light emitting section. Area of the reflectors in a developed state is more than area of the reflectors in a retracted state.

Abstract: A camera system with six faces and a front housing is configured to capture images and audio content from external the camera body. The camera system includes an interior audio assembly protected from external environments by a waterproof membrane. The camera system includes drainage ports on the bottom face and the left face of the camera system to encourage moisture to drain from the system. A first drainage channel couples the internal audio assembly to the first drainage port on left face of the camera system and a second drainage channel couples the drainage port on the left face of the camera system to the drainage port on the bottom face of the camera system. A third drainage channel exists between the front face of the camera system and the front housing, the third drainage channel coupling the first and second drainage channels.

Abstract: An array imaging module includes at least two optical lenses and a molded photosensitive assembly, wherein the molded photosensitive assembly includes at least two photosensitive units, a circuit board that electrically couples to the photosensitive units, and a molded base having at least two optical windows. The molded base is integrally coupled at the circuit board at a peripheral portion thereof, wherein the photosensitive units are aligned with the optical windows respectively. The optical lenses are located along two photosensitive paths of the photosensitive units respectively, such that each of the optical windows forms a light channel through the corresponding photosensitive unit and the corresponding optical lens.

Abstract: An image projection apparatus includes an image signal inputter configured to input an image signal, a first light modulation element configured to modulate light from a light source, a second light modulation element configured to modulate light from the first light modulation element, an optical system configured to guide a projection image in which an image formed by the light modulated by the first light modulation element and an image formed by the light modulated by the second light modulation element are superimposed on each other to a projection optical system, a first driver configured to drive one of the first and second light modulation elements based on the image signal, and a second driver configured to drive the other of the first and second light modulation elements based on a luminance correction data irrelevant to the image signal.

Abstract: A suspension system of a biaxial optical actuator is provided, including a circuit-carrying base and an oscillation member, which is provided, in a center thereof, with an optical lens. An elastic suspension plate is coupled to the oscillation member and has four corners each forming an elastic unit that projects outside the oscillation member. The elastic units collaborate with support posts to support the elastic suspension plate and the oscillation member at a location above the base. The oscillation member is provided, on each of four sides thereof, with a magnetic device. The four magnetic devices is sequentially activated to apply a magnetic force such that the oscillation member together with the optical lens carried thereon to rotate about two imaginary axes of the elastic suspension plate respectively defined between each pair of two opposite magnetic devices to thereby serve as a rotation axes of the oscillation member.

Abstract: A projector includes a light source apparatus, an image formation apparatus that includes a light modulator and forms an image, the light modulator modulating light outputted from the light source apparatus, a projection optical apparatus that projects the image formed by the image formation apparatus, and an attitude adjustment apparatus that causes the light modulator to pivot around a pivotal axis perpendicular to the optical axis of the projection optical apparatus to adjust the attitude of the light modulator.

Abstract: A transparent rotating device comprising a shaft, a transparent rotating assembly and a motor is provided. The transparent rotating assembly includes at least one first transparent sheet and at least one second transparent sheet that are annularly and alternatively arranged around a shaft. A motor is connected to the shaft, wherein the first transparent sheet and the second transparent sheet sequentially enter the transmission path of the image beam. The angle at which the first transparent sheet is inclined with respect to the shaft is different from the angle at which the second transparent sheet is inclined with respect to the shaft. The image beam penetrates the first transparent sheet to be deflected and transmitted to a first position, and the image beam penetrates the second transparent sheet to be deflected and transmitted to a second position.

Abstract: Disclosed are a wavelength conversion device, a light-emitting device and a projection system, comprising a wavelength conversion layer having a first surface and a second surface opposite each other. The first surface receives an excitation light. The wavelength conversion layer absorbs the excitation to produce a converted light and emits the converted light or the mixture of the converted light and the excitation light from the first surface and the second surface. A scattering reflective substrate is stacked with the wavelength conversion layer and includes a white porous ceramic or a white scattering material for scattering the incident light. The scattering reflective substrate includes a third surface facing the second surface and scatters at least a part of the incident light on the third surface and then emits all the light from the third surface to the second surface.

Abstract: A wavelength converter to which the invention is applied includes a phosphor that converts the wavelength of blue light to emit fluorescence, a rotating mechanism that rotates the phosphor around an axis of rotation that extends in a light incident direction in which the blue light is incident, and a heat insulating member that is provided between the phosphor and the rotating mechanism in the light incident direction. The phosphor has a coinciding section that coincides with the rotating mechanism when viewed in the light incident direction.

Abstract: A light source device is provided with a blue laser emitting element, a red laser emitting element, a phosphor, a polarization split element having a polarization split function with respect to blue light and red light, and a diffusion element. The blue light emitted from the blue laser emitting element enters the polarization split element to be split into a first blue polarization component and a second blue polarization component. The first blue polarization component enters the diffusion element to turn to blue diffused light. The phosphor is excited by the second blue polarization component to emit fluorescence, and the red light emitted from the red laser emitting element enters the diffusion element to be diffusely transmitted to turn to red diffused light. The blue diffused light, the red diffused light and a part of the fluorescence are combined with each other, and then emitted from the polarization split element.

Abstract: A projector including an illumination system, a light valve and a projection lens is provided. The illumination system is configured to provide an illumination beam, and includes a light source and a diffusion element. The light source is configured to provide an exciting beam. The diffusion element is located on a transmission path of the exciting beam, and configured to receive the exciting beam for outputting at least part of the illumination beam. The diffusion element includes at least one first diffusion region and at least one second diffusion region surrounding the first diffusion region. A haze of the first diffusion region is greater than a haze of the second diffusion region. The light valve is located on a transmission path of the illumination beam, and configured to convert the illumination beam into an image beam. The projection lens is located on a transmission path of the image beam.

Abstract: A method of correcting a critical dimension (CD) variation in extreme ultraviolet (EUV) photolithography includes mapping the CD variation of a wafer exposure field formed by a photolithography system that includes an EUV photolithography photomask. Parameters of a treatment to produce a change in reflectance at a working wavelength of EUV radiation in a region of a reflective multilayer of the photomask are determined, the change in reflectance being calculated to correct the mapped CD variation. A treatment beam is directed to the region. The region is treated with the beam in accordance with the determined parameters.

Abstract: Some embodiments pertain to a photomask for mask patterning. The photomask includes a phase shift layer overlying a transparent layer, a first shielding layer overlying the phase shift layer, and a second shielding layer overlying the first shielding layer. The first shielding layer has a first optical density, and the second shielding layer has a second optical density. The second optical density is less than the first optical density.

Abstract: During reactive sputtering using a silicon-containing target, an inert gas, and a nitrogen-containing reactive gas, a hysteresis curve is drawn by sweeping the flow rate of the reactive gas, and plotting the sputtering voltage or current during the sweep versus the flow rate of the reactive gas. In the step of sputtering in a region corresponding to a range from more than the lower limit of reactive gas flow rate providing the hysteresis to less than the upper limit, the target power, the inert gas flow rate and/or the reactive gas flow rate is increased or decreased continuously or stepwise. The halftone phase shift film including a layer containing transition metal, silicon and nitrogen is improved in in-plane uniformity of optical properties.

Abstract: A method of forming a layout pattern is disclosed. First, an array comprising a plurality of main features is provided wherein the main features are arranged into a plurality of rows along a first direction and are parallel and staggered along a second direction. Assistant features are inserted into each row of the main features. A shortest distance d1 between the main features in row n to the main features in row n+1 and a shortest distance d2 between the main feature in row n?1 to the main feature in row n+1 are obtained. The assistance features inserted in row n of the main features are then adjusted according to the difference between the distances d1 and d2. After that, the main features and the assistant features are output to a photo mask.

Abstract: A pellicle includes a frame. The frame includes a check valve, wherein the check valve is configured to permit gas flow from an interior of the pellicle to an exterior of the pellicle. The frame further includes a recess in a bottom surface of the frame. The pellicle further includes a membrane extending across the frame. The pellicle further includes a gasket configured to fit within the recess.

Abstract: A method of processing a trench, via, hole, recess, void, or other feature that extends a depth into a substrate to a base or bottom and has an opening with high aspect ratio (into depth from opening to base or bottom divided by minimum space of the trench therebetween) by irradiation with an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials at the base or bottom of the opening.

Abstract: An imprint apparatus forms a pattern of an imprint material on a substrate by using a mold, while effecting alignment control of a mold and a substrate with respect to an in-plane direction of the substrate. A mold holding portion holds the mold. A substrate holding portion holds the substrate. A control portion effects control so that the mold and the substrate are brought near to each other while effecting the alignment control, based on a driving profile, after the alignment control is started, to bring the mold and the imprint material into contact with each other. The imprint material is then cured. The control portion changes the driving profile for the alignment control after the alignment control is started and at least one of before and after the mold contacts the imprint material.

Abstract: A photosensitive composition, a quantum dot polymer composite pattern prepared therefrom, and a layered structure and an electronic device including the same. The photosensitive composition includes a quantum dot; a carboxylic acid group-containing binder; a multi-thiol compound including a thiol group at each terminal end of the multi-thiol compound; a photopolymerizable monomer including a carbon-carbon double bond; a metal oxide fine particle; a polymeric stabilizer; a photoinitiator; and a solvent, wherein the polymeric stabilizer includes a polymer including —RO—, —R1COO—, —R1OCO—, —CR1R2—CAR—, —OCONH—R—NHCOO—R?—, or a combination thereof, as a repeating unit.

Abstract: A salt represented by the formula (I). wherein Z+, Q1, Q2, R1, R2, R3, R4, R5, Z, X1, X2, Xa, Xb, L1, L2, L3 and L4 are defined in the specification.

Abstract: Disclosed herein are solder mask formulations that include a liquid photo imageable solution and a solution of functionalized diamondoids. Also disclosed are semiconductor fabrication methods that include applying a described solder mask formulation to a semiconductor device.

Abstract: New polymers are provided comprising (i) one or more covalently linked photoacid generator moieties and (ii) one or more photoacid-labile groups, wherein the one or more photoacid generator moieties are a component of one or more of the photoacid-labile groups. Preferred polymers of the invention are suitable for use in photoresists imaged at short wavelengths such as sub-200 nm, particularly 193 nm.

Abstract: An apparatus includes: a coating module for applying a coating liquid to each wafer and discharging a removing liquid from a nozzle toward a beveled portion of the wafer under rotation; an imaging module; and a controller for controlling: the imaging module to image outer end and rear surfaces of the wafer; obtaining a height dimension of an outer edge of a coating film with respect to an inner edge of the beveled portion based on the imaging result; determining whether or not the obtained dimension is an allowable value; if the result is negative, resetting the number of revolutions of the wafer based on the obtained dimension and a first reference data; controlling the coating module to again perform the application and removal operations; performing the determination process; and if the result is positive, storing the reset number of revolutions in a storage part.

Abstract: A resist patterning method according to the present invention includes: a resist layer forming step S101 of forming a resist layer (12) on a substrate (11); an activating step S103 of activating the resist layer by irradiation with an activating energy beam; a decay inhibiting step S105 of inhibiting decay of the activity of the resist layer; a latent pattern image forming step S107 of forming a latent pattern image in the activated resist layer by irradiation with a latent image forming energy beam; and a developing step S110 of developing the resist layer.

Abstract: A maskless exposure method includes spatially modulating a light output from a light source into a pattern beam having a mask pattern, condensing the modulated pattern beam into a first group of spot beams having a first focal position on a Z-axis substantially perpendicular to an exposure surface of an object layer, and into a second group of spot beams having a second focal position different from the first focal position, and scanning the object layer with the first and second groups of spot beams. The object layer has a first height and a second height different from the first height.

Abstract: [Problem] To provide a composition, which is a reverse pattern formation composition comprising an aqueous solvent having little influence on a resist pattern, and which is excellent in flatness and filling properties after coating and has excellent etching resistance. Furthermore, a method for forming a pattern using the same is provided. [Means for Solution] A reverse pattern formation composition comprising a polysiloxane compound comprising a repeating unit having a nitrogen-containing group and a solvent comprising water, and a method for forming a fine pattern using the same.

Abstract: A method includes providing a plurality of fuel droplets into an EUV source vessel by a fuel droplet generator, in which the fuel droplet generator has a first portion inside the EUV source vessel and a second portion outside the EUV source vessel; generating a plurality of output signals respectively from a plurality of oscillation sensors on the fuel droplet generator; determining whether the output signals are acceptable; and determining whether an unwanted oscillation originates from the first portion of the fuel droplet generator or the second portion of the fuel droplet generator when the output signals is determined as unacceptable.

Abstract: An imprint lithography method of configuring an optical layer includes selecting one or more parameters of a nanolayer to be applied to a substrate for changing an effective refractive index of the substrate and imprinting the nanolayer on the substrate to change the effective refractive index of the substrate such that a relative amount of light transmittable through the substrate is changed by a selected amount.

Abstract: A method for exposing a structure on a substrate includes positioning of an invariable reticle and a programmable reticle in a light path between a light source and a layer on a substrate to be exposed to light and exposing the layer on the substrate by light from the light source passing the invariable reticle and the programmable reticle.

Abstract: A method includes obtaining a sub-layout having an area that is a performance limiting spot, adjusting colors of patterns in the area, and determining whether the area is still a performance limiting spot. Another method includes decomposing patterns in a design layout into multiple sub-layouts; determining for at least one area in one of the sub-layouts, the likelihood of that a figure of merit is beyond its allowed range; and if the likelihood is above a threshold, that one sub-layout has a performance limiting spot. Another method includes: obtaining a design layout having a first group of patterns and a second group of patterns, wherein colors of the first group of patterns are not allowed to change and colors of the second group of patterns are allowed to change; and co-optimizing at least the first group of patterns, the second group of patterns and an illumination of a lithographic apparatus.

Abstract: A metrology apparatus for determining a characteristic of interest of a structure on a substrate, the structure having diffractive properties, the apparatus comprising: focusing optics configured to focus illumination radiation comprising a plurality of wavelengths onto the structure; a first detector configured to detect at least part of the illumination radiation which has been diffracted from the structure; and additional optics configured to produce, on at least a portion of the first detector, a wavelength-dependent spatial distribution of different wavelengths of the illumination radiation which has been diffracted from the structure, wherein the first detector is arranged to detect at least a non-zero diffraction order of the illumination radiation which has been diffracted from the structure.

Abstract: A method of adjusting a metrology apparatus, the method including: spatially dividing an intensity distribution of a pupil plane of the metrology apparatus into a plurality of pixels; and reducing an effect of a structural asymmetry in a target on a measurement by the metrology apparatus on the target, by adjusting intensities of the plurality of pixels.

Abstract: An EUV reticle pod is provided. The pod includes an inner and an outer box assembly. The inner box assembly contained in the outer box assembly includes a base and a cover. The base has an upper surface and a surrounding wall. The upper surface includes a carry surface, at least one trench, and a first contacting surface. The EUV reticle is carried above the carry surface. The trench has a circular loop structure and its bottom is lower than the carry surface. The carry surface, the trench, and the first contacting surface are sequentially distributed from the center of the upper surface towards the surrounding wall. The cover has a concave for accommodating the EUV reticle and a second contacting surface for cooperating with the first contacting surface to form an air-tight seal. The trench captures and traps particles to reduce the particle contamination on the reticle.

Abstract: A movable body apparatus that moves a substrate equipped with: a substrate holder which can move in the X-axis and the Y-axis directions; a Y coarse movement stage can move in the Y-axis direction, a first measurement system acquiring position information on the substrate holder with heads provided at the substrate holder and a scale provided at the Y coarse movement stage; a second measurement system acquiring position information on the Y coarse movement stage with heads at the Y coarse movement stage and a scale; and a control system controlling the position of the substrate holder based on position information acquired by the first and the second measurement systems, and the first measurement system irradiates a measurement beam on the scale while moving the heads in the X-axis direction, and the second measurement system irradiates a measurement beam on the scale while moving the heads in the Y-axis direction.

Abstract: A spectrally broadened radiation apparatus, including a laser configured to emit, through an output of the laser, radiation substantially only in the visible region of the electromagnetic spectrum, the radiation having a nominal wavelength, and an optical fiber optically coupled to the output of the laser, the optical fiber having an input to receive the radiation from the laser and having an output to provide spectrally broadened output radiation, the optical fiber configured to spectrally broaden the radiation from the laser to a spectral width of at least 0.5 nm around the nominal wavelength.

Abstract: An electrophotographic photosensitive member has a surface layer that contains a polymer of a hole transport material having at least one monovalent polymerizable functional group.

Abstract: Provided is a toner including a crystalline polyester resin including a constitutional unit derived from saturated aliphatic dicarboxylic acid and a constitutional unit derived from saturated aliphatic diol, an amorphous hybrid resin, an amorphous polyester resin, a release agent, and a colorant, wherein the crystalline polyester resin includes a constitutional unit derived from sebacic acid as the constitutional unit derived from the saturated aliphatic dicarboxylic acid, and the amorphous hybrid resin is a composite resin including a polyester-based resin unit and a styrene-based resin unit.

Abstract: To provide a toner for electrophotography and a binder resin, exhibiting an excellent fog suppression capability. A toner for electrophotography and a binder resin each containing a resin A having at least a polyester moiety obtained through polycondensation of an alcohol component, a carboxylic acid component, and a polyhydroxyamine compound represented by the formula (1) in an amount of 0.01% by mass or more and 5.0% by mass or less based on the total amount of all the monomer components of the resin A.

Abstract: An electrostatic-image developing toner contains toner particles containing a polyester resin having an acid value of from 10 mg KOH/g to less than 15 mg KOH/g. The toner particles have a surface with an acid value in a range from 0.3% to 1.7% of the acid value of the polyester resin. The toner particles have a melt viscosity of from 1,800 Pa·s to 3,800 Pa·s at 100° C.

Abstract: A toner set includes a white toner that includes white toner particles containing white colored particles, and at least one selected from a color toner that includes color toner particles containing colored particles and a transparent toner that includes transparent toner particles, wherein an average circularity of the white toner particles is smaller than an average circularity of either the color toner particles or the transparent toner particles and a small-diameter-side number particle diameter distribution index of the white toner particles is greater than a small-diameter-side number particle diameter distribution index of either the color toner particles or the transparent toner particles.

Abstract: For the purpose of providing a light guiding member with a simple structure which is capable of suppressing risk that unnecessary light could be mixed in a primary optical path, a light guiding member according to the present invention includes an incident surface, a reflection surface which reflects a light flux from the incident surface, and a side surface disposed at a distance of 1.2 R or more from a center of the reflection surface, where R is a distance from the center to an edge portion of the reflection surface, in a direction perpendicular to a first cross-section including an incident light toward the reflection surface on an optical axis and a reflected light from the reflection surface on the optical axis.

Abstract: An image forming apparatus includes a photosensitive member, a light source, a deflecting unit, a storing unit, a correcting unit, and a light source driving portion. Magnification correction data is determined using a quadratic function of a variable representing a scanning position with respect to a scanning direction. Coefficients of two quadratic functions corresponding to adjacent two regions included in a plurality of scanning regions are set so that a differential value calculated at the variable corresponding to a boundary of the two regions by a differential of the quadratic function for one region and a differential value calculated at the variable corresponding to the boundary of the two regions by a differential of the quadratic function for the other region are equal to each other.

Abstract: At ends of a frame in an axial direction of a developing roller, a first end portion member and a second end portion member are provided so as to be rotatable around a rotation axis parallel to the axial direction, and at least one of them has one side in a direction orthogonal to the rotation axis on which a force receiving portion is provided, and another side in the direction orthogonal to the rotation axis on which a regulating portion is provided. The force receiving portion receives a biasing force in a mounting direction of the developing apparatus to the apparatus main body from a biasing member. The regulating portion is brought into contact with the apparatus main body to regulate movement of the other side relative to the apparatus main body in a direction opposite to the mounting direction, with a fulcrum being the rotation axis.

Abstract: According to one embodiment, an image forming apparatus includes a printer unit and a control unit. The printer unit forms an image on a sheet using a developer, and includes a predetermined driving member related to supply of the developer. The control unit acquires driving information regarding continuous driving of the driving member, acquires correction information regarding on correction of an amount of the developer used in accordance with the driving information, and estimates a remaining amount of the developer on the basis of the driving information and the correction information.

Abstract: A developer container includes: a body in which a plurality of developer chambers that store developer are arranged, each developer chamber having an opening; and a plurality of covers that seal the openings of the plurality of developer chambers, the plurality of covers being separately provided to correspond to the openings of the plurality of developer chambers.

Abstract: The present application provides a developer replenishment cartridge including a housing, a first rotating shaft connected to a first end portion of the housing via a sealing bearing, a wiper blade connected to a bracket beside the first rotating shaft via at least one bolt. The present application further provides a method for replenishing developer, including pressing a button inward to move the push rod forward in such a way that a front end of the push rod firstly contacts a baffle provided at an inlet of the toner cartridge for the developer in the equipment, aligning the sealing gear with the discharge port communicating with the middle of the outlet, opening the developer container, driving the wiper blade to rotate by the driving wheel of the driving unit, mixing up the developer inside the container, and feeding the developer toward the region of the second rotating shaft.