Abstract: In the internal milling machine according to the invention for milling a work piece that rotates during machining with an annular internal milling cutter (5) on the one hand side the Z slide (4a, b) of each tool support (3a, b) includes a pass through opening and on the other hand side the transversal slide (7) supporting the internal milling cutter (5) is move able in the X-direction, the running direction of the mounting surface (1a) of the bed (1) wherein the mounting surface slopes downward in a forward direction. Based on this general configuration and in particular the arrangement of the Z-slides (6a, b) for the at least one tool support (3a, b) outside of the Z-supports (16a, b) for the opposite spindle stock (2?) yields advantageous centers of gravity in particular of the move able components and a high level of stability of the machine and therefore high level of machining precision of the machine.

Abstract: A form cutting method includes a first cutting step of moving a semi-finishing tool having a first cutting edge in a tool feeding direction Dt orthogonal to a first axis while rotating the semi-finishing tool in a first direction about the axis to form a blade groove 120 having a contour shape of the semi-finishing tool and being continuous in the tool feeding direction Dt on a workpiece 100, and a second cutting step of moving a final finishing tool 20 having a second cutting edge 24s opposite to the semi-finishing tool in the tool feeding direction Dt while rotating the final finishing tool in a second direction R2 about a second axis O2 to finish groove inner peripheral surfaces 120x and 120y of the blade groove 120.

Abstract: A mobile machine tool (10), namely a manually-operated machine tool (10) or semi-stationary machine tool (10), for machining a workpiece (W), wherein the machine tool (10) has a plate-like guide element (30) with a guide surface (32) for guiding the machine tool (10) on the workpiece (W) or the workpiece (W) on the machine tool (10), wherein the machine tool (10) has a drive unit (11) with a drive motor (13) for driving a tool holder (14) arranged on the drive unit (11) in order to hold a work tool (15), wherein the machine tool (10) has a tool sensor (61, 62), the detection range of which (EB1, EB2) is directed at at least a partial region of the machine tool (10), and wherein the machine tool (10) has an evaluation device (80) for evaluating a tool sensor signal generated by the tool sensor (61, 62).

Abstract: Apparatus and methods for automatically training (i.e., straightening) saw blades along a saw mandrel are disclosed.

Abstract: The invention relates to a solder ball feeding device, comprising a solder ball reservoir for receiving an amount of solder balls and a metering device for dispensing a metered feeding amount of solder balls to a discharge device, wherein the metering device comprises an ultrasound device and a dispensing nozzle with a dispensing cannula, the ultrasound device serving to apply vibrations to the dispensing nozzle, and the solder ball reservoir or the dispensing nozzle of the solder ball reservoir being provided with a pressure connection which serves to introduce a pressurized gas into the solder ball feeding device.

Abstract: Provided are a soldering apparatus that allows a gasket to be easily attached to and detached from the soldering apparatus, and a method of fixing the gasket to the soldering apparatus. The soldering apparatus includes: a furnace body; a gasket that is provided to at least a part of the furnace body, and that seals the furnace body; and a push rivet that fixes the gasket in an attachable/detachable manner to the furnace body.

Abstract: Embodiments of systems, methods, and apparatus for interacting with a computer during a welding operation are provided. In one embodiment, a welding tool is provided. The welding tool includes a handle, a neck, and an air mouse device having a selection interface. The welding tool is configured to be operatively connected to a welding machine and used by an operator to perform a welding operation on a workpiece. Also, the air mouse device is configured to wirelessly communicate with a computer operatively connected to the welding machine. The air mouse device allows the operator to position a computer cursor over an option icon, as displayed on a display monitor by the computer, by moving the welding tool in the air. Furthermore, the air mouse device allows the operator to select the option icon by engaging the selection interface of the air mouse device.

Abstract: A welding system includes a welding power source having a user interface disposed thereon and a weld controller disposed therein and being adapted to generate a welding power output for use in a welding operation. The welding system also includes a personal computer having control circuitry disposed therein and being removably interfaced with the welding power source via a docking mechanism. When the personal computer is docked within the docking mechanism, the personal computer is enabled for receiving operator input, and the control circuitry communicates with the weld controller to coordinate control of a welding operation in accordance with the operator input.

Abstract: An active laser vision robust weld tracking system, a weld position detection method, and a robust weld tracking algorithm are disclosed in the present invention. The active laser vision robust weld tracking system comprises a laser source, a laser vision sensor, an image processing system, an industrial robot, and an electrical control system. A laser stripe associated with weld profile information is recognized by the laser vision sensor through projecting structured light onto the surface of a weld, the weld feature information is extracted using an image processing method, the position of the weld is detected from the central line of the laser stripe, and then the intelligent tracking of the weld is achieved with a variety of control methods.

Abstract: Art for spot welding able to suppress penetration of hydrogen, one of the factors behind delayed fracture, at the time of spot welding, that is, a spot welding method in which at one or both of the surfaces of the steel sheets becoming the facing surfaces of the overlaid steel sheets, a location where the steel sheets contact each other to form a contact part at the time of initial squeezing of the spot welding is worked in advance to form a plurality of lines running through the contact part and connected to the outside of the contact part and the spot welding is performed at the location of the contact part and also a steel sheet in which the plurality of lines are formed in advance at the location becoming a contact part when steel sheets contact each other at the time of initial squeezing in the spot welding.

Abstract: Main current passage and subsequent current passage are performed, with a cooling time of 0.01 s or more being provided between the main current passage and the subsequent current passage. Ip/I which is a ratio of a current value of the subsequent current passage to a current value of the main current passage is controlled to satisfy a predetermined relationship depending on a constant A defined by Mn content and P content of a steel sheet as a part to be welded, in relation to a welding time Tp of the subsequent current passage, a cooling time T, and the constant A.

Abstract: Provided is an evaluation system including: an analog-to-digital converting section comprised of a programmable circuit and configured to convert an analog signal, the analog signal being acquired by a physical quantity acquiring section and indicative of a time-series change of at least one of (i) welding current, welding voltage, or load applied to pieces to be welded and (ii) a displacement, during welding, of a welding head; and an evaluating section configured to determine, based on a digital signal, whether or not the time-series change satisfies a predetermined condition, wherein configuration data for configuring the programmable circuit is arranged to be changeable by a user.

Abstract: An apparatus includes a housing, a pin, a mechanism and a sensor. The housing is configured to receive a weld head. The pin is configured to move linearly relative to said housing. The mechanism is configured to convert a position of said pin into a displacement. The sensor is configured to generate a value representative of said position of said pin based on said displacement.

Abstract: An additive manufacturing device performs manufacturing of an additively manufactured article by supplying a powder material to an irradiation region of an electron beam, laying and leveling the powder material, irradiating the powder material with the electron beam, and melting the powder material. The additive manufacturing device determines whether or not the powder material has scattered during manufacturing of the article. When it is determined that the powder material has scattered, an irradiation region R is heated by a heater before a new powder material is supplied to the irradiation region R. Manufacturing of the article is restarted after the new powder material has been supplied to the heated irradiation region.

Abstract: The invention relates to a method for manufacturing a solid metal based component. The method comprising the steps of providing a plurality of metal based sheets; arranging the plurality of metal based sheets in a stack, 5 wherein the stack comprises a first metal based sheet, a last metal based sheet and at least one intermediate metal based sheet; perimetrically sealing at least a portion of the stack forming at least one cavity inside of the stack; removing gas from said at least one cavity, and subjecting the stack to a hot isostatic pressing process for a predetermined time at a predetermined 10 pressure and a predetermined temperature so that the plurality of metal based sheets of the stack bond metallurgically to each other to form a solid metal based component. The invention further relates to a single-piece metal based component.

Abstract: The invention relates to a method for positioning weldments (20) in an ultrasonic welding device (34) and to an ultrasonic welding device comprising a sonotrode (14), to which ultrasonic vibrations are applied and which emits longitudinal vibrations, and an anvil (16), a weldment accommodation (19) being formed between a work surface (17) of the sonotrode (14) and an opposing surface (18) of the anvil (16), a change in position ?x of a positioning device (21) defining weld position P of the weldment (20) being captured in the longitudinal direction (22) of the sonotrode (14) by means of a position sensor, the application of vibrations to the sonotrode (14) being changed such depending on the change in position ?x that a change in amplitude ?y is performed according to an amplitude characteristic curve of the sonotrode (14).

Abstract: A linear friction welding machine comprising a compression unit and an oscillator unit, each having a clamping holder for a workpiece. Both clamping holders are configured such that workpieces are held with the surfaces thereof to be welded, aligned and facing each other. The clamping holder of the compression unit is linearly movable relative to the clamping holder of the oscillator unit, and the latter is movable in an oscillating manner at right angles transversely with respect to the direction of travel of the compression unit and fixed to ends of vertical and horizontal supports which can be deflected laterally in a sprung manner in the oscillation direction, the other ends of which are anchored rigidly on supporting bodies. The supports are flexible under deflection in the oscillation direction but are designed to resist buckling when the clamping holders are loaded in the direction of travel of the compression unit.

Abstract: A laser machine includes a scanner configured to irradiate a workpiece with a laser beam, a robot configured to move the scanner, a robot controller configured to control the robot, and a scanner controller configured to control the scanner so as to control an irradiation position of the laser beam. The scanner controller includes a learned model obtained through supervised learning based on training data including, as input data, drive information relating to the robot at times when the scanner is moved in advance in a plurality of directions and speeds, and as correct data, actual position data and actual posture data of the attached scanner at the times. The actual position data and the actual posture data are calculated on the basis of the drive information relating to the robot in the learned model, and a robot movement consideration/calculation unit compensates the irradiation position of the laser beam.

Abstract: Disclosed is a nozzle unit for laser processing, which can implement one-touch coupling and separation, thereby enabling easy nozzle replacement and uniform maintenance of a nozzle in a mounted state at an accurate position while preventing damage to a nozzle joint. The nozzle unit for laser processing includes: a nozzle body including a nozzle hole and a coupling protrusion formed at an outer periphery of the nozzle hole; and a nozzle adapter allowing the nozzle body to be inserted into and coupled to a lower portion thereof and including a nozzle coupling portion allowing the coupling protrusion at a first position to be inserted thereinto or separated therefrom and allowing the coupling protrusion at a second position to be seated thereon, the second position being spaced apart from the first position in a circumferential direction of the nozzle hole.

Abstract: An application of the laser welding process in the joining of shaped and machined components for the production of a front suspension lower swing arm of automotive vehicles. This arm is composed of two shaped parts (4, 5), a tube with a larger circular section (9) for implantation of a cylindrical rubber bushing (2) coupled to a flanged region (6), a cylindrical pin (8) fixed to a cylindrical tube with a smaller circular section (7) to ensure connection of the pin with the shaped parts (4, 5), a bushing with fixing flanges (1), and one socket joint (3). Alternatively, a rubber bushing fixed in the vertical form (15), fixed by pressure in the housing in the already laser welded plates (4, 5) may be used instead of the cylindrical pin (8) fixed in a tube with smaller circular section (7) and a bushing with fixing flanges (1).

Abstract: Methods and systems for generative manufacturing of a three-dimensional component from a powder, wherein a layer structure model of the component to be manufactured is divided into a core region and a shell region adjacent to the core region, and wherein the shell region forms at least a portion of the surface of the three-dimensional component. Then, a layer-based irradiation process is performed in which a density of irradiated powder layers is lower in the shell region than in the core region.

Abstract: Methods and systems for fabricating a component by consolidating a particulate include a build platform configured to receive the particulate, a particulate dispenser configured to deposit the particulate onto the build platform, and a consolidation device configured to consolidate at least a portion of the particulate to form a component. The methods and systems also include a first actuator assembly configured to induce rotation of the build platform about a rotation axis at a first speed. The rotation axis extends through a center of the build platform. The methods and systems further include a second actuator assembly including an actuator and a shaft extending along the rotation axis. The actuator is configured to cause rotation of the shaft about the rotation axis at a second speed different from the first speed. The shaft is coupled to the build platform and configured to induce linear movement of the build platform along the rotation axis upon rotation of the shaft.

Abstract: Method for manufacturing a welding wire, the welding wire (10) comprising a welding wire base body (11), comprising manufacturing at least one part of the welding wire base body (11), particularly the complete welding wire base body (11), via at least one additive manufacturing process.

Abstract: The invention disclose a picosecond-nanosecond laser composite asynchronous ceramics polishing method. First, a picosecond laser is used to scan and irradiate the ceramic surface along the scanning path. At the same time, ceramic surface is initially flattened and the electronic state of materials is removed by picosecond laser to produce micro-nanoparticles. Micro-nanoparticles exist as ionized state in the adjacent space region of irradiated ceramics surface. Then, low energy density nanosecond laser is used according to a preset time to irradiate and melt these micro-nanoparticles which can easily form a dense and smooth fine crystal melting layer to achieve the polishing effect. The present disclosure fixes the generation of micro-cracks and pores in traditional laser polishing process. It overcomes the shortcomings of traditional laser polishing such as large thermal influence zone, easy to generate micro-cracks and pores on the surface, etc.

Abstract: Method for producing an external horological element (100) which is a heterogeneous component, according to which a primary cavity (10) is produced in a structure (1), only the periphery of this said primary cavity (10) is re-machined or laser machined, which primary cavity (10) is filled with a second material that is different in appearance from the first material in order to produce a primary insert (2), where the bottom of this said primary cavity (10) is left rough before being filled with said second material, and, in the thickness of this primary insert (2), a secondary cavity (20) is produced, which is filled with a third material that is different in appearance from the first material and/or from the second material in order to produce a secondary insert (3).

Abstract: To reduce a width of a modified layer and suppress positional variation of the modified layer, a crystal orientation of a workpiece is measured, a vertical direction with respect to an A-plane of the measured crystal orientation of the workpiece is specified, and a polarization direction of laser light is adjusted so that scanning of laser light is performed along the specified vertical direction with respect to the A-plane of the crystal orientation of the workpiece.

Abstract: A peening method which can sufficiently improve fatigue properties of a lap fillet welded joint having a thin steel sheet as a base sheet, in which a knocking pin having a predetermined shape is continuously knocked as a series of knocking toward a direction inclined relative to the welding direction, the series of knocking is repeatedly performed in the welding direction, at that time, a knocking mark group made of a plurality of knocking marks formed by the series of knocking is superimposed on at least a part of an adjacent knocking mark group while an end part in the direction orthogonal to the welding direction of the knocking mark group is separated from an end part in the direction orthogonal to the welding direction of the adjacent knocking mark group.

Abstract: To allow compensation of position error of a laser beam from a target position in a laser machine in response to temperature change while the compensation is to be affected intricately by a plurality of optical parts and constituting members. A machine learning device performs machine learning on a laser machine comprising a plurality of galvanometer mirrors for reflection of a laser beam and a plurality of galvanometer motors for driving corresponding ones of the galvanometer mirrors to rotate, and scanning the laser beam over a workpiece.

Abstract: High reliability leadfree solder alloys for harsh service conditions are disclosed. In some embodiments, a solder alloy comprises 2.5-4.0 wt % Ag; 0.4-0.8 wt % Cu; 5.0-9.0 wt % Sb; 1.5-3.5 wt % Bi; 0.05-0.35 wt % Ni; and a remainder of Sn. In some embodiments, an apparatus comprises: a component comprising: a main ceramic body, and a side surface having disposed thereon an electrode and a thermal pad; a copper substrate; and a solder alloy electrically coupling the component and the copper substrate, wherein the solder alloy comprises: 2.5-4.0 wt % Ag; 0.4-0.8 wt % Cu; 5.0-9.0 wt % Sb; 1.5-3.5 wt % Bi; 0.05-0.35 wt % Ni; and a remainder of Sn. In some embodiments, an apparatus comprises: a light-emitting diode (LED) component; a Metal Core Printed Circuit Board (MCPCB); and a solder alloy electrically coupling the LED component and the MCPCB, wherein the solder alloy comprises: 2.5-4.0 wt % Ag; 0.4-0.8 wt % Cu; 5.0-9.0 wt % Sb; 1.5-3.5 wt % Bi; 0.05-0.35 wt % Ni; and a remainder of Sn.

Abstract: A Ni-based alloy core wire for a covered electrode according to an aspect of the invention includes, as a chemical composition, by mass %: C: 0.0100% to 0.0800%; Si: 0.010% to 0.800%; Mn: 0.010% to 1.800%; Mo: 15.0% to 28.0%; W: 2.5% to 8.0%; Cu: 0.10% to 1.20%; Ta: 0.002% to 0.120%; Ni: 65.0% to 82.3%; and a remainder: impurities with other optional selective elements; in which a value X is 0.010% to 0.160%.

Abstract: It is an object of the present invention to provide flux and a solder material of which the activity hardly decreases even at a high temperature and which can also suppress the occurrence of migration. Flux containing an isocyanuric acid derivative containing two or more carboxyl groups and the like are provided.

Abstract: The present invention provides improved systems for supporting and translating a robotic welder around a structural column to perform automatic welding of joints. The improved system permits a robotic welder to perform the required welds in at least half the time it would take a human welder, thereby significantly reducing construction costs, improving safety of construction, and improving accuracy of welding, and requiring less testing of the welds.

Abstract: A method of repairing a compressor outlet housing includes the steps of obtaining a damaged compressor outlet housing having a radially outer volute, a radially inwardly extending finger extending to an axially extending ledge, a radially inwardly extending web extending radially inwardly from the ledge, and a radially inner bearing support defining a bore. The method identifies a damaged section within at least one of the bearing support, the web, and the ledge, and removes at least the bearing support and the web to leave a remaining part. The method then inserts an insert having at least a replacement bearing support and a replacement web into the remaining part after the removal step. The method then welds the insert to the remaining part to provide a repaired compressor housing. A method of replacing a compressor outlet housing and a replacement compressor outlet housing are also disclosed.

Abstract: A method machines or tests a blade for a turbomachine. The method includes: clamping the blade in a clamp such that a point contact or a line contact forms between the blade and the clamp as clamping partners. One of the clamping partners has a lower strength than the other clamping partner and plasticizes in the region of the point contact or the line contact.

Abstract: A controller performs a first process of scanning a cylindrical irradiation region including a focused spot of laser light emitted from a laser light emitter to machine a flank face side of a workpiece to manufacture a cutting tool having a plurality of cutting edges arranged in line. In the first process, the controller scans the cylindrical irradiation region along a scanning path that has periodicity and changes a machining depth to form the plurality of cutting edges. The controller further performs a second process of scanning the cylindrical irradiation region including the focused spot of the laser light emitted in a direction different from an irradiation direction of the laser light in the first process to machine a rake face side of the workpiece.

Abstract: An apparatus and a method for assembling optical module. The apparatus includes: a working bench, a controller and a plurality of mechanical components for active alignment of optical modules; a conveying means is provided on the working bench, and a plurality of fixtures are provided on the conveying means with even space therebetween and are movable with the conveying means; the plurality of mechanical components are configured to perform corresponding operations on the fixtures moved to respective operating positions under control of the controller.

Abstract: In order to improve a tool carrier of a machine tool, including a tool holder carrier with a receptacle that extends into the tool holder carrier and into which a fixing body of a tool holder is configured to be inserted, by moving it in an insertion direction, and immobilised in an inserted condition by fixing it in the receptacle by a positively locking element such that fixing of the fixing body is configured to be performed as simply and rapidly as possible, it is proposed that the positively locking element should be a fixing wedge-shaped body that is movable within the tool holder carrier, in a direction of movement transverse to the insertion direction, between a release position and a fixing position, and that, in the fixing position, the fixing wedge-shaped body should cooperate with a wedge receptacle of the fixing body.

Abstract: A tool mounting track embedded in the surface of a work table is formed. The track includes an elongated metal bar with a cross-section including an upwardly opening channel defined between inwardly directed flanges and outwardly extending side grooves immediately below the flanges forming an elongated inverted T shaped track, all of the upwardly opening channel, the inwardly directed flanges, and the side grooves extending substantially the length of the elongated metal bar. At least one open area of the elongated metal bar where a portion of the inwardly directed flanges is omitted to provide an entry for a downwardly extending rectangular tool foot. The elongated metal bar is positioned between edges of the work table and spaced therefrom.

Abstract: An automatic tool exchange coupler and an automatic tool exchange device are provided that achieve further improvement in the user-friendliness of the automatic tool exchange device. The coupler includes a coupler body, a first direction switching valve and a second direction switching valve that are provided to a first side surface of the coupler body. The coupler body has: in a first side surface, an uncoupling input port being connected to a pipe for introducing a gas for uncoupling; and in the second side surface opposite to the first side surface, an uncoupling output port being configured to connected to the uncoupling port. The uncoupling input port is located at a position where a center of the uncoupling input port is radially offset with respect to the uncoupling output port by at least an amount corresponding to a length of a diameter of the uncoupling input port.

Abstract: A tool magazine receives a plurality of tools which are provided for arrangement on a tool spindle of a machine tool, and a method for changing tools using a tool magazine. The tool magazine exhibits a guide rail arranged in a fixed position on a machine base, a magazine carriage displaceably mounted on the guide rail, a rotary drive arranged on the magazine carriage and having a magazine shaft which can be rotated around a shaft axis of rotation, at least two magazine wheels arranged non-rotatably on the magazine shaft and having a plurality of tool holders, and a transfer device linearly displaceable along a transfer axis transverse to the guide rail and which picks up a tool arranged on one of the tool holders of the magazine wheels and transports the tool to the tool spindle and back.

Abstract: A machine tool for machine processing workpieces by using a tool having a pull stud at a proximal end portion thereof. The machine tool includes a tool magazine having a number of tool holders each of which is capable of attaching and detaching the tool, a spindle which holds the tool at the time of machine processing the workpieces, and a controller which determines whether or not the pull stud is appropriate on the basis of detected data of a visual sensor which is provided inside or outside the machine tool, and which captures images of the pull stud of a tool holder of the tool, or detected data of a sensor which is provided inside the tool magazine, and which measures length, electric resistance, or electric capacity of the pull stud.

Abstract: An additive manufacturing apparatus includes a housing which provides a manufacturing space for additive manufacturing, a linear drive arranged in the manufacturing space and having a base body, which is movable along a movement axis of the linear drive in the manufacturing space, and a tool holder for taking up a tool unit. The tool holder is attached to the base body so as to be rotatable about a rotation axis and is moved with the base body along the movement axis of the linear drive. The tool holder further comprises a clamping device having an unclamped operating state for taking up and taking out the tool unit and a clamped operating state for fixing the received tool unit. Furthermore, the additive manufacturing apparatus has a tool store, which is arranged in the manufacturing space and provides a plurality of tool places for tool units.

Abstract: An apparatus and method are provided for three dimensional planing of a workpiece. The apparatus includes a base, a displaceable machine table supported on that base, a displaceable spindle supported on the base adjacent the machine table, a cutting tool held in a chuck carried on the spindle and a control module. The control module includes a controller and a plurality of actuators to provide precise displacement of the machine table, spindle, cutting tool and the workpiece for planing surface features into the workpiece.

Abstract: A wood splitting turntable assembly includes a base that has an end plate slot therein for positioning around an end plate of a log splitter when the log splitter is positioned in a vertical orientation. The end plate slot has a width of at least 8.0 inches and a depth of at least 9.0 inches. A bearing is coupled to the base and a turntable is coupled to the bearing. A log can be positioned on the turntable when the base is positioned around the base of the log splitter. Moreover, the turntable is rotatable on the base to rotate the log for splitting the log around an entire circumference of the log without requiring a user to lift and reposition the log. An elastomeric band is positionable around the log to inhibit the log from falling apart from the log is split.

Abstract: To provide an improved technique for improving operability in an operation using a power tool with a dust collector attached thereto, a hammer drill to which a dust collector is attached has a body and a handle. The dust collector has a dust collecting part and a male plug. The dust collector is attached to the hammer drill by connecting the male plug to the handle of the hammer drill.

Abstract: A device is provided for machining rod-shaped workpieces such as window profiles or door profiles. The workpieces can be moved in a horizontal plane in a Z direction by a transport device. A machining device with tools is provided in a plane arranged substantially vertically to the direction of movement of the workpieces, which machining device is spatially oriented in the vertical plane in relation to the workpiece. The machining device includes an open arc arranged in the vertical plane to the workpiece, the arc being mounted to rotate about the workpiece in the Z axis as an open flat ring.

Abstract: Disclosed is an apparatus and method for processing eyeglass lens which determines the completion of the eyeglass lens processing by using a hall sensor.

Abstract: A cylindrical workpiece with a helical axial groove allowing for centerless grinding which has an angular overlap around the outer circumference on the body of the workpiece. The angular overlap ensures continuous tangential contact with the grinding wheels as the workpiece is rotated.

Abstract: A first and a second substrate polishing apparatus and are provided with a film thickness sensor for measuring a film thickness of layer to be polished and polish the layer by pressing the substrate against a polishing pad. The first substrate polishing apparatus outputs difference between output value of the film thickness sensor when an underlayer is exposed and output value of the film thickness sensor when the substrate is not present, as a first offset value. The second substrate polishing apparatus has a storage unit that stores information of the first offset value, an output correction unit that corrects the output value from the film thickness sensor based on the first offset value, and an end point detection unit that outputs control signal indicating end point of substrate polishing when measured value of the film thickness of the layer calculated based on the corrected output value reaches target value.

Abstract: In a scheme in which a top ring is held to an end portion of a swing arm, the present invention improves accuracy of polishing end point detection. A polishing apparatus for polishing between a polishing pad 10 and a semiconductor wafer 16 disposed opposed to the polishing pad 10 includes a polishing table 30A for holding the polishing pad 10 and a top ring 31A for holding the semiconductor wafer 16. A swing shaft motor 14 swings a swing arm 110 for holding the top ring 31A. The arm torque detection section 26 detects arm torque applied to the swing arm 110. An end point detection section 28 detects a polishing end point indicating an end of polishing based on the detected arm torque.