Patents Issued in May 18, 2021
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Patent number: 11009753Abstract: A display device includes a substrate, a first wiring and a second wiring positioned on the substrate, a thin film transistor (“TFT”) connected to the first wiring and the second wiring, and a pixel electrode connected to the TFT and including a transverse branch part, a longitudinal branch part, minute branches extending from the transverse branch part and the longitudinal branch part, and an outer branch part connecting end parts of the minute branches and adjacent to the storage electrode line, where a shortest distance from a center part of at least one side of the outer branch part to at least one side of the first wiring is different from a shortest distance from an edge part of at least one side of the outer branch part to at least one side of the first wiring.Type: GrantFiled: December 5, 2019Date of Patent: May 18, 2021Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Cheol Shin, Hak Sun Chang, Se Hyun Lee, Seung Min Lee
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Patent number: 11009754Abstract: An object of the present invention is to provide a decorative sheet exhibiting high lustrousness even when observed from a direction deviated from a specular reflection of illumination light, and a liquid crystal display device and an automobile interior material each using the decorative sheet. The object is achieved by a decorative sheet including a cholesteric liquid crystal layer having wavelength-selective reflectivity and satisfying Expression (1), R[?45,20](?1)/R[?45,20](?2)?5??Expression (1).Type: GrantFiled: February 28, 2019Date of Patent: May 18, 2021Assignee: FUJIFILM CorporationInventors: Nobuhiko Ichihara, Yujiro Yanai, Rikio Inoue, Michio Nagai, Jun Takeda
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Patent number: 11009755Abstract: A display device includes: a semiconductor layer including source (SR), drain (DR), and channel (CR) regions; a first insulating layer (FIL) on the semiconductor layer; a gate line on the FIL and overlapping the CR; a second insulating layer (SIL) on the gate line; a first contact hole (FCH) in the FIL and the SIL, and exposing the SR; a data line on the SIL and contacting the SR; a third insulating layer (TIL) on the data line; a second contact hole (SCH) in the first to third insulating layers and exposing the DR; a drain electrode on the TIL and contacting the DR; a color filter on the TIL and not overlapping the SCH; a pixel electrode (PE) on the color filter and contacting the drain electrode; and an organic layer on the TIL and the PE. Upper surfaces of the organic layer and the PE are substantially coplanar.Type: GrantFiled: March 25, 2019Date of Patent: May 18, 2021Assignee: Samsung Display Co., Ltd.Inventors: Hyung Il Jeon, Sang Hee Jang, Byung Seok Choi
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Patent number: 11009756Abstract: A display device includes a reflective electrode, a driving circuit section, a wiring, and a wiring expansion section. The reflective electrode is divided into split electrodes arranged with spaces, which transmit light, respectively provided thereamong and reflects light. The driving circuit section drives the reflective electrode. The wiring is connected to at least the split electrodes and the driving circuit section and composed of a conductive material having a light transmission property. The wiring expansion section is formed to expand in the wiring to overlap the space.Type: GrantFiled: October 25, 2019Date of Patent: May 18, 2021Assignee: SHARP KABUSHIKI KAISHAInventors: Keiichi Ina, Shuji Nishi, Takashi Satoh
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Patent number: 11009757Abstract: A liquid crystal display includes: an active matrix substrate; an opposite substrate facing the active matrix substrate; and a liquid crystal layer provided between the active matrix substrate and the opposite substrate. The liquid crystal display includes a plurality of pixels. The active matrix substrate includes: a first substrate; a base coat layer; a plurality of TFTs; a plurality of scanning wirings; and a plurality of signal wirings. The active matrix substrate further includes a plurality of second light-shielding layers provided between the first substrate and the base coat layer. The base coat layer includes a silicon nitride layer.Type: GrantFiled: March 11, 2020Date of Patent: May 18, 2021Assignee: SHARP KABUSHIKI KAISHAInventor: Hiroshi Aichi
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Patent number: 11009758Abstract: A display panel displaying an image includes a first substrate, a second substrate disposed opposite the first substrate, electric optical substance sealed between the first substrate and the second substrate, a transistor disposed on the first substrate and supplying an electric signal to the electric optical substance and including an oxide semiconductor film as an activating layer, and a light blocking film disposed on the second substrate and blocking visible light from transmitting therethrough, the light blocking film having a hole in a position overlapping the transistor in a plan view.Type: GrantFiled: June 4, 2019Date of Patent: May 18, 2021Assignee: SHARP KABUSHIKI KAISHAInventors: Yoshimasa Chikama, Jun Nishimura, Yoshiharu Hirata
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Patent number: 11009759Abstract: A transparent display panel, a method for fabricating the same, and a display device are disclosed, where the transparent display panel includes a light source, an optical waveguide, a first liquid crystal layer, a first group of electrode layers, and a color rendering component, wherein the optical waveguide is on a side of the first liquid crystal layer and has its first surface comes into contact with the first liquid crystal layer; the color rendering component is on another side of the first liquid crystal layer, and configured to render a color upon being excited by light emitted by the light source; the light source is on the side surface of the optical waveguide; and the first group of electrode layers is configured to provide the first liquid crystal layer with an electric field.Type: GrantFiled: November 22, 2019Date of Patent: May 18, 2021Assignee: BOE Technology Group Co., Ltd.Inventor: Wei Wei
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Patent number: 11009760Abstract: A product includes a substrate, at least one of a conductive layer or a coating layer, and an ablated surface on the substrate. The substrate is at least partially transparent to visible light. The at least one of the conductive layer or the coating layer are disposed over at least a portion of the substrate. The ablated surface includes an interleaved surface profile having a plurality of non-overlapped laser spots and a plurality of overlapped laser spots formed by subjecting the substrate to an interleaving laser ablation process.Type: GrantFiled: March 29, 2018Date of Patent: May 18, 2021Assignee: GENTEX CORPORATIONInventor: Kurtis L. Geerlings
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Patent number: 11009761Abstract: A grayscale color electronic paper have a plurality of pixel structural units, each of them has a base color layer and a grayscale adjusting layer. The base color layer is able to display two or more colors. Colors displayed by the grayscale adjusting layer corresponds one-to-one to the colors displayed by the base color layer. The base color layer and the grayscale adjusting layer have respective driving structures. The base color layer can display colors such as black, white, red, green, blue, cyan, magenta and yellow; and the grayscale adjusting layer has multi-level grayscales, and each level of the gray scale has a steady state at a zero electric field.Type: GrantFiled: December 8, 2016Date of Patent: May 18, 2021Assignee: DALIAN DKE LCD CO., LTD.Inventors: Jinggang Zhao, Lina Zhang, Zhiling He
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Patent number: 11009762Abstract: An electronic device with a flexible display subassembly is provided. The display stack may use two layers of adhesives having different elastic properties to improve mechanical impact resistance, with a first adhesive layer made of a viscoelastic material and a second adhesive layer having a low modulus of elasticity. The display stack may also include a hot melt protective sheet (HMPS) covering the display subassembly. The HMPS may be wrapped around the two side edges of a rigid substrate to attach directly to the substrate, thereby aiding in the adhesion of the display stack to the substrate. The display stack may also includes a patterned back protective sheet in which the protective backing layer is removed along the curved portions of the display stack.Type: GrantFiled: March 29, 2019Date of Patent: May 18, 2021Assignee: AMAZON TECHNOLOGIES, INC.Inventors: Weihsin Hou, Robert Arthur Sprague, Chin Siong Khor, Siddharth Gupta
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Patent number: 11009763Abstract: An optical transceiver including a submount, a Mach-Zehnder Modulator (MZM), bonding wires, and a low pass filter type matching network is provided. The MZM includes an input port and an output port and disposed on the submount. The bonding wires are coupled to the submount and the MZM. The low pass filter type matching network is coupled to the bonding wires and is configured to absorb inductance of the bonding wires at a high frequency.Type: GrantFiled: August 28, 2019Date of Patent: May 18, 2021Assignees: OE Solutions Co., Ltd., OE Solutions America, Inc.Inventors: Moon Soo Park, Tae Young Jeon
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Patent number: 11009764Abstract: Technology for improving performance of a personal display device by variably controlling the emission divergence and/or the emission direction of light from the pixels of the display as a function of the location of the pixel within a display.Type: GrantFiled: January 2, 2018Date of Patent: May 18, 2021Assignee: Intel CorporationInventors: Jun Jiang, Zhiming Zhuang, Ginni Grover, Basel Salahieh, Oscar Nestares, David W. Browning
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Patent number: 11009765Abstract: A varifocal block includes, in optical series, a switchable half waveplate (SHWP) and a plurality of liquid crystal (LC) lenses. The SHWP outputs circularly polarized light, and a handedness of the circularly polarized light is controlled by the SHWP being in an active state or a non-active state. Each LC lens of the plurality of LC lenses has a plurality of optical states, the plurality of optical states including an additive state that adds optical power to the LC lens and a subtractive state that removes optical power from the LC lens. The plurality of optical states of each of the plurality of the LC lenses compounded in optical series provides a range of adjustment of optical power for the varifocal block.Type: GrantFiled: June 25, 2019Date of Patent: May 18, 2021Assignee: Facebook Technologies, LLCInventors: Lu Lu, Scott Charles McEldowney, Pasi Saarikko
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Patent number: 11009766Abstract: Disclosed herein is display stacks for virtual reality (VR) displays arranged to present an image where a focal point of the image is presented in higher resolution than a periphery around the focal point. The disclosure provides systems and methods for presenting an image comprising a high resolution having a smaller field of view than that with which a lower resolution image is presented around a periphery of the high resolution image.Type: GrantFiled: June 28, 2019Date of Patent: May 18, 2021Assignee: Intel CorporationInventors: Ginni Grover, Ronald Azuma, Oscar Nestares
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Patent number: 11009767Abstract: A light transmissive optical component comprising an electroactive material layer structure having a controlled deformation. When actuating the component, different relative thickness changes are implemented at different regions of the electroactive material layer thereby providing a non-uniform change in an optical function between those different regions.Type: GrantFiled: November 21, 2017Date of Patent: May 18, 2021Assignee: KONINKLIJKE PHILIPS N.V.Inventors: Mark Thomas Johnson, Franciscus Johannes Gerardus Hakkens, Achim Hilgers
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Patent number: 11009768Abstract: A liquid lens includes a cavity in which a conductive liquid and a non-conductive liquid are disposed and at least one first through-hole in which at least one of a conductive material or an adhesive material is disposed, a first electrode disposed on the first plate, a second electrode disposed under the first plate, the second electrode including a plurality of electrode sectors, a second plate disposed on the first electrode, and a third plate disposed under the second electrode.Type: GrantFiled: March 30, 2018Date of Patent: May 18, 2021Assignee: LG INNOTEK CO., LTD.Inventors: Jun Phill Eom, Ui Jun Kim
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Patent number: 11009769Abstract: Provided are an optical modulation device and an apparatus including the same. The optical modulation device may include a plurality of reflectors located on a driving circuit substrate, a plurality of nano-antennas located on the plurality of reflectors, and an active layer located between the plurality of reflectors and the plurality of nano-antennas and patterned to have a plurality of openings. The optical modulation device may further include a plurality of first connection members configured to electrically connect the driving circuit substrate to the plurality of reflectors and a plurality of second connection members configured to electrically connect the driving circuit substrate to the plurality of nano-antennas. The plurality of second connection members may be connected to the plurality of nano-antennas through the plurality of openings.Type: GrantFiled: November 16, 2018Date of Patent: May 18, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Junghyun Park, Byounglyong Choi
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Patent number: 11009770Abstract: A light field generation system includes a two dimensional emitter array for projecting light and a directionally-sensitive optical element in front of the emitter array but before a directional diffuser. Certain classes of emitters are intended to project information principally along one axis (e.g. amplitude modulated in the horizontal plane, i.e. so that each eye sees a potentially different image) and are the basis of horizontal-parallax-only (HPO) displays. Examples include surface acoustic wave (SAW) modulators, such as edge-emitting or surface-emitting modulators. They often project undesired or stray light along directions along a different axis (e.g. vertically) and the diffuser will also spread the visibility of the stray light field components. Thus, the directionally-sensitive optical element will improve contrast in this scenario.Type: GrantFiled: August 14, 2019Date of Patent: May 18, 2021Assignee: The Charles Stark Draper Laboratory, Inc.Inventor: Gregg E. Favalora
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Patent number: 11009771Abstract: A photon source includes a bus waveguide, a photon source pump laser coupled to the bus waveguide and a plurality of optical resonators coupled to the bus waveguide. Each optical resonator of the plurality of optical resonators has a respective resonance line width and a respective resonance frequency, wherein a bandwidth of the resonant center frequencies of the plurality of optical resonators is greater than a bandwidth of the photon source pump laser. The bus waveguide produces photons in response to receiving laser pulses from the pump laser.Type: GrantFiled: November 27, 2020Date of Patent: May 18, 2021Assignee: PSIQUANTUM, CORP.Inventors: Mihai Dorian Vidrighin, Dylan Saunders
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Patent number: 11009772Abstract: An imaging system comprises a light source generating a pump beam, and an optical coupling system for receiving an input beam of infrared light from a scene and combining the input beam with the pump beam, wherein an intensity of the pump beam is higher than an intensity of the input beam. The imaging system further comprises a crystal configured for adiabatically mixing the beams and providing an output beam having a frequency which is a sum of frequencies of the input and pump beams, and a visible, near-infrared or ultraviolet light imager configured for collecting and to spectrally resolving the output beam.Type: GrantFiled: April 24, 2018Date of Patent: May 18, 2021Assignee: Ramot at Tel-Aviv University Ltd.Inventors: Haim Suchowski, Michael Mrejen, Assaf Levanon
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Patent number: 11009773Abstract: The present invention belongs to the technical field of lasers and provides a dual-chirped spectral optical parametric amplifier and an amplification method. A femtosecond laser assembly is configured to generate simultaneous pump and signal waves which successively pass through an input grating and an input collimator respectively. The various spectrum components of both the pump and the signal waves linearly disperse and focus on respective focal points, and present spatial chirps with opposite frequency gradients in the respective focal planes. A full-spectrum optical parametric amplification of the signal wave with the pump wave is performed via a fan-out periodically poled crystal, resulting an ultrabroad idler wave. The ultrabroad idler wave is separated from the hybrid waves via an optical splitter, and then passes successively through an output collimator and an output grating, and is Fourier transformed from frequency domain to temporal domain.Type: GrantFiled: August 11, 2017Date of Patent: May 18, 2021Assignee: SHENZHEN UNIVERSITYInventors: Haizhe Zhong, Yuhai Liang, Dahua Dai, Ying Li, Dianyuan Fan
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Patent number: 11009774Abstract: A focus adjustment device, comprising a focus detection section that, if, at the time of correction of an evaluation value by a correction section, it is determined that the corrected evaluation value is smaller than a specified threshold value, makes a determination threshold value for detection of a focus position at which the evaluation value exhibits an extreme value, stricter than for a case when it is determined that the corrected evaluation value is greater than the specified threshold value.Type: GrantFiled: June 16, 2020Date of Patent: May 18, 2021Assignee: Olympus CorporationInventor: Satoru Ito
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Patent number: 11009775Abstract: An oral photography system and method can include: a chassis, the chassis including a chassis base and a vertical chassis extension, the vertical chassis extension extending upward from the chassis base, and the vertical chassis extension including: a magnetic clamp having a first clamping element for securing an imaging device to the vertical chassis extension, the imaging device including a second clamping element, a diffusion panel attachment coupled to the vertical chassis extension, and a light panel attachment coupled to the vertical chassis extension; a diffusion panel releasably affixed to the diffusion panel attachment; and a light panel releasably affixed to the light panel attachment.Type: GrantFiled: April 20, 2020Date of Patent: May 18, 2021Inventor: Vu Quang Le
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Patent number: 11009776Abstract: The present invention relates to a camera system, comprising: a camera operative to capture an image, said camera comprising a power input port for coupling to a power supply assembly; a housing for supporting said camera, said housing comprising an opening, wherein said opening is arranged to provide access to said power input port; a removable panel engageable to said housing to cover said opening by a security fastener to secure said removable panel to said housing in a cover configuration, said removable panel comprising a formation for engaging with at least one portion of said power supply assembly in said cover configuration to restrain movement of said power supply assembly to maintain a coupled arrangement of said power supply assembly and said power input port in said cover configuration.Type: GrantFiled: January 17, 2019Date of Patent: May 18, 2021Inventors: Robert George Grant, Graham Keith Lambert
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Patent number: 11009777Abstract: A digital camera is provided with a vertically long camera body having an approximately rectangular solid shape. An LCD panel provided in a rear surface of the camera body is arranged such that longitudinal directions of the display screen and the camera body correspond to each other. The digital camera is operated through a touch panel provided in a lower portion of the display screen. In a taking mode, an image is displayed in a small size on an upper portion of the display screen. In reproducing, the camera body is rotated sideways by 90 degree. In a reproducing mode, display posture of the image is also rotated by 90 degree, and the image is displayed in a large size on the entire display screen.Type: GrantFiled: August 19, 2020Date of Patent: May 18, 2021Assignee: FUJIFILM CorporationInventor: Atsushi Misawa
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Patent number: 11009778Abstract: An embodiment of a camera module comprises: a lens portion; a front body on which the lens portion is mounted; a substrate portion arranged to be spaced from the lens portion in a first direction and coupled to the front body; an image sensor arranged on the substrate portion and provided to face the lens portion; a first fastener, one side of which is inserted into the front body such that at least a part of the substrate portion is coupled to the front body; and a first attachment portion arranged between the front body and the substrate portion, wherein the first attachment portion may comprise at least one through-hole formed between the front body and the substrate portion so as to couple the front body and the substrate portion.Type: GrantFiled: November 20, 2017Date of Patent: May 18, 2021Assignee: LG INNOTEK CO., LTD.Inventors: Dong Wook Park, Myoung Jin An
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Patent number: 11009779Abstract: A camera with a rotating optical lens assembly is provided. The camera includes a housing, a main lens coupled to the housing, a ground glass coupled to the housing in the internal cavity and designed to capture an image of the subject from the main lens, a pair of optical assemblies rotatably mounted to the housing and each having a plurality of telescoping tubular lens assemblies, a magazine coupled to the housing and storing a film, and a motor coupled to the housing and operably connected to the pair of optical assemblies by a plurality of linkage members. The motor is designed to simultaneously rotate the optical assemblies in opposite directions to permit each telescoping tubular lens assembly that moves in temporary alignment with the ground glass to transfer the captured image of the subject to an exposed portion of the film.Type: GrantFiled: May 18, 2020Date of Patent: May 18, 2021Inventor: Titus Gadwin Watts
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Patent number: 11009780Abstract: A selfie device, including a clamping mechanism configured to clamp a mobile phone, a telescopic rod, a handle sleeved on an outside of the telescopic rod, and a wireless remote. The clamping mechanism includes an upper clamping part, a lower clamping part and an elasticity stretching part providing a restoring force for the upper clamping part. The elasticity stretching part are respectively connected with the upper clamping part and the lower clamping part. The lower clamping part is arranged on a top end of the telescopic rod. An accommodating cavity for accommodating the wireless remote is arranged inside the handle.Type: GrantFiled: December 17, 2019Date of Patent: May 18, 2021Assignee: WINNERS' SUN PLASTIC & ELECTRONIC (SHENZHEN) CO., LTD.Inventors: Jinghua Shan, Yi Bing Peng
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Patent number: 11009781Abstract: A display system includes an image producing unit, a projection unit and an adjustment unit. The image producing unit has a display surface, and is configured to produce an image on the display surface. The projection unit is configured to project a virtual image to a target space with an output light of the image producing unit. The virtual image corresponds to the image produced by the image producing unit. The display system is configured to change a visual distance between an eye-box and the virtual image. The adjustment unit is configured to adjust brightness of the virtual image according to the visual distance.Type: GrantFiled: March 25, 2019Date of Patent: May 18, 2021Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.Inventors: Koji Taniguchi, Hiroaki Okayama, Satoshi Kuzuhara, Yusuke Nihei
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Patent number: 11009782Abstract: A projection-type display device includes: a light source; a dust-proof case; heat-dissipating fins; a heat-dissipation fan that causes cooling air to flow into the heat-dissipating fins; a prism unit that is provided inside the dust-proof case and that separates light from the light source into a multiplicity of illumination light beams; an internal circulation fan; heat-receiving fins; and heat pipes that connect the heat-dissipating fins and the heat-receiving fins. The heat-receiving fins and the heat-dissipating fins are both formed in a substantially rectangular parallelepiped shape, each having, as cooling air inflow surfaces that are effective in heat dissipation or heat reception, a first surface and a second surface whose area is greater than the first surface. The cooling airflow inside the dust-proof case that is supplied by the internal circulation fan flows from the first and second surfaces of the heat-receiving fins.Type: GrantFiled: August 25, 2016Date of Patent: May 18, 2021Assignee: SHARP NEC DISPLAY SOLUTIONS, LTD.Inventor: Eisuke Yamashita
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Patent number: 11009783Abstract: A liquid cooled heat dissipation module includes a housing and at least one flow channel. The housing includes a chamber, and the at least one flow channel is located in the chamber. The housing includes an upper plate, a lower plate, and a plurality of annular wall portions. Two ends of each of the annular wall portions are respectively connected to the upper plate and the lower plate. The annular wall portions respectively form a plurality of through-holes between the upper plate and the lower plate, and the through-holes penetrate through the upper plate and the lower plate. The at least one flow channel is located between two adjacent annular wall portions. In addition, a projection device is also provided.Type: GrantFiled: July 18, 2019Date of Patent: May 18, 2021Assignee: Coretronic CorporationInventors: Tsung-Ching Lin, Wei-Chi Liu
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Patent number: 11009784Abstract: A projector includes a light source, a light modulator, a projection optical apparatus, a cooler configured to cool a cooling target based on transformation of a refrigerant into a gas, and a controller configured to control the cooler. The cooler includes a refrigerant generator configured to generate the refrigerant, a refrigerant sender configured to send the generated refrigerant toward the cooling target, and a cooling blower configured to deliver air to the cooling target. The controller drives at least part of the cooler for a predetermined period in the state in which the projector is not in operation.Type: GrantFiled: March 13, 2020Date of Patent: May 18, 2021Assignee: SEIKO EPSON CORPORATIONInventor: Nobuo Sugiyama
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Patent number: 11009785Abstract: A projector includes first through fourth light emitters defining a placement region for fifth light emitters. The placement region is rectangular defined by first through fourth sides. The light intensity of a sixth light emitter closest to the middle of the first side is smaller than the light intensities of the first and second light emitters. Fifth light emitters arranged in a first direction from the center of the first light emitter toward the middle of the first side have light intensities that decrease toward the positive side in the first direction between the first light emitter and the sixth light emitter, and fifth light emitters arranged in a second direction from the center of the second light emitter toward the middle of the first side have light intensities that decrease toward the positive side in the second direction between the second light emitter and the sixth light emitter.Type: GrantFiled: April 16, 2019Date of Patent: May 18, 2021Inventor: Yoshitaka Itoh
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Patent number: 11009786Abstract: Various embodiments described herein provide multi-projector (i.e., two or more) imaging apparatuses utilizing integrated illumination-aimer optics. Embodiments of the present disclosure minimize irreparable component offset to improve overall accuracy associated with the functioning of the apparatuses. Additionally, the integrated illumination-aimer optics enables embodiments disclosed herein to be provided in a significantly smaller form factor than conventional multi-projector imaging apparatuses.Type: GrantFiled: November 14, 2019Date of Patent: May 18, 2021Assignee: Hand Held Products, Inc.Inventors: Chen Feng, Tao Xian, Gregory Mark Rueblinger
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Patent number: 11009787Abstract: A mask blank in which a phase shift film provided on a transparent substrate includes at least a nitrogen-containing layer and an oxygen-containing layer, the nitrogen-containing layer contains silicon and nitrogen and the oxygen-containing layer contains silicon and oxygen, wherein, when the nitrogen-containing layer is subjected to X-ray photoelectron spectroscopy to obtain a maximum peak PSi_f of photoelectron intensity of a Si2p narrow spectrum and the transparent substrate is subjected to X-ray photoelectron spectroscopy to obtain a maximum peak PSi_s of photoelectron intensity of a Si2p narrow spectrum, the numerical value (PSi_f)/(PSi_s), which is produced by dividing the maximum peak PSi_f in the nitrogen-containing layer by the maximum peak PSi_s in the transparent substrate, is 1.09 or less.Type: GrantFiled: January 8, 2019Date of Patent: May 18, 2021Assignee: HOYA CORPORATIONInventors: Hitoshi Maeda, Ryo Ohkubo, Yasutaka Horigome
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Patent number: 11009788Abstract: A method for manufacturing an optical electrical module includes steps as follow. Forming first patterns on a first substrate by a first mask, wherein an angle between a primary flat of the first substrate and an arrangement direction having a maximum number of first pattern units of the first mask is (?+90°*n), wherein ? is between 22° to 39°, and n is an integer. Subjecting the first substrate to a first patterning process using the first patterns as a mask to form accommodating grooves and a reflective groove connected with the accommodating grooves in the first substrate, wherein an extension direction of each of the accommodating grooves is perpendicular to an extension direction of the reflective groove.Type: GrantFiled: January 6, 2017Date of Patent: May 18, 2021Assignee: Centera Photonics Inc.Inventors: Shang-Jen Yu, Chun-Chiang Yen
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Patent number: 11009789Abstract: Provided are a pattern formation method and a method for manufacturing a polarizing plate using the pattern formation method, the pattern formation method having: a step for forming, on a substrate, a linear guide pattern which is arranged at a predetermined pitch and is compatible with a portion of block chains of a block copolymer, and a neutral pattern embedded in the pattern of the guide pattern; a step for forming a layer including a block copolymer on the guide pattern and the neutral pattern; a step for heat-treating the layer including the block copolymer and forming a lamellar structure in which lamellar boundaries are arranged perpendicular to the substrate by microphase separation of the block copolymer; and a step for selectively removing a portion of the block chains of the block copolymer and thereby forming a line-and-space-shaped fine pattern having a smaller pitch than the guide pattern.Type: GrantFiled: January 11, 2019Date of Patent: May 18, 2021Assignee: Dexerials CorporationInventors: Kazuyuki Shibuya, Shigeshi Sakakibara, Toshiaki Sugawara, Yusuke Matsuno, Akio Takada
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Patent number: 11009790Abstract: A photoacid generator (PAG) and a photoresist composition, the PAG being represented by the following Chemical Formula (I): wherein, in Chemical Formula (I), L is sulfur (S) or iodine (I), R3 being omitted when L is I; R1, R2, and R3 are each independently a C1 to C10 alkyl, alkenyl, alkynyl, or alkoxy group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and L, or a C6 to C18 aryl, arylalkyl, or alkylaryl group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and L; AL is an acid-labile group; m is 1 to 4; and M is a C1 to C30 hydrocarbon group that is unsubstituted or substituted with a heteroatom such that the heteroatom is pendant or is between the group and a sulfur atom.Type: GrantFiled: July 28, 2017Date of Patent: May 18, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Suk-koo Hong, Kyoung-yong Cho, Hyo-sung Lee, Gum-hye Jeon, Mi-yeong Kang, Gun-woo Park
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Patent number: 11009791Abstract: An actinic ray-sensitive or radiation-sensitive resin composition contains a resin (A) having a glass transition temperature of 155° C. or higher, a compound (B) having a glass transition temperature of 150° C. or lower, and a solvent (C). A solid content in the actinic ray-sensitive or radiation-sensitive resin composition is 20% by mass or more. A softening point of the resist pattern formed using the actinic ray-sensitive or radiation-sensitive resin composition is from 130° C. to 170° C.Type: GrantFiled: June 22, 2018Date of Patent: May 18, 2021Assignee: FUJIFILM CorporationInventors: Takamitsu Tomiga, Kenichi Harada, Shinichi Sugiyama, Fumihiro Yoshino, Shuji Hirano
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Patent number: 11009792Abstract: The present application provides novel methods for the fabrication of nanostructures. More specifically, the invention relates to direct electron beam lithography with the use of silk fibroin as “green” resists.Type: GrantFiled: March 14, 2014Date of Patent: May 18, 2021Assignee: Tufts UniversityInventors: Fiorenzo G. Omenetto, David L. Kaplan, Sunghwan Kim, Benedetto Marelli
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Patent number: 11009793Abstract: A monomer and polymer having a substituent group capable of polarity switch under the action of acid are provided. A resist composition comprising the polymer forms at a high resolution a negative pattern insoluble in alkaline developer and having high etch resistance.Type: GrantFiled: August 22, 2018Date of Patent: May 18, 2021Assignee: SHIN-ETSU CHEMICAL CO., LTD.Inventors: Masahiro Fukushima, Masayoshi Sagehashi, Koji Hasegawa, Teppei Adachi, Kazuhiro Katayama
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Patent number: 11009794Abstract: A substrate provided with an anti-reflective coating where the anti-reflective coating is made up of a layer of nanostructures. The nanostructures may be formed by depositing a material such as SiO2 and then using a process such as reactive ion etching in conjunction with an inductively coupled plasma source. Other aspects of the fabrication process are also disclosed.Type: GrantFiled: March 5, 2019Date of Patent: May 18, 2021Assignee: ASML Holding N.V.Inventor: Parag Vinayak Kelkar
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Patent number: 11009795Abstract: A novel aqueous solution for resist pattern coating. An aqueous solution for resist pattern coating, including: a copolymer as component A, the copolymer having an ethylene oxide unit and a C3 alkylene oxide unit in a main chain and having a hydroxy group at a terminal; a water-soluble polymer, a water-soluble monomer, or a water-soluble oligomer as component B, the water-soluble polymer being other than the copolymer as the component A; and a solvent as component C, the solvent containing water as a main component. The copolymer as the component A is for example a block copolymer of formula (1) below: HOR1OxR2OyR3OzH??(1) wherein R1, R2, and R3 are each independently an ethylene group, a propylene group, or a trimethylene group, and x, y, and z are each independently an integer of 5 to 100.Type: GrantFiled: March 21, 2017Date of Patent: May 18, 2021Assignee: NISSAN CHEMICAL CORPORATIONInventors: Tokio Nishita, Rikimaru Sakamoto
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Patent number: 11009796Abstract: A method for forming a semiconductor device structure is provided. The method includes forming a material layer over a substrate and forming a resist layer over the material layer. The resist layer includes an inorganic material and an auxiliary. The inorganic material includes a plurality of metallic cores and a plurality of first linkers bonded to the metallic cores. The method includes exposing a portion of the resist layer. The resist layer includes an exposed region and an unexposed region. In the exposed region, the auxiliary reacts with the first linkers. The method also includes removing the unexposed region of the resist layer by using a developer to form a patterned resist layer. The developer includes a ketone-based solvent having a formula (a) or the ester-based solvent having a formula (b).Type: GrantFiled: September 16, 2019Date of Patent: May 18, 2021Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ming-Hui Weng, An-Ren Zi, Ching-Yu Chang, Chin-Hsiang Lin, Chen-Yu Liu
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Patent number: 11009797Abstract: According to one embodiment, in a defect inspection apparatus, a controller acquires an image of a second actual pattern in a first shot region which corresponds to a design pattern identical to a design pattern corresponding to a first actual pattern, which is consistent in a first comparison process, and which is consistent in a second comparison process. The controller replaces the image of one actual pattern of the first actual pattern and the second actual pattern in the first shot region with the image of the other actual pattern so as to generate a reference image of the first shot region. The controller compares the reference image and the image of the second shot region so as to perform a defect inspection of the second shot region.Type: GrantFiled: March 6, 2019Date of Patent: May 18, 2021Assignee: TOSHIBA MEMORY CORPORATIONInventor: Kouta Kameishi
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Patent number: 11009798Abstract: A method of aligning a wafer for semiconductor fabrication processes may include applying a magnetic field to a wafer, detecting one or more residual magnetic fields from one or more alignment markers within the wafer, responsive to the detected one or more residual magnetic fields, determining locations of the one or more alignment markers. The marker locations may be determined relative to an ideal grid, followed by determining a geometrical transformation model for aligning the wafer, and aligning the wafer responsive to the geometrical transformation model. Related methods and systems are also disclosed.Type: GrantFiled: September 5, 2018Date of Patent: May 18, 2021Assignee: Micron Technology, Inc.Inventors: Nikolay A. Mirin, Robert Dembi, Richard T. Housley, Xiaosong Zhang, Jonathan D. Harms, Stephen J. Kramer
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Patent number: 11009799Abstract: A liquid crystal exposure apparatus is equipped with: a substrate holder that is disposed below a projection optical system and holds a substrate; a first drive section that moves the substrate holder along an XY plane; heads that measures the position information of the substrate holder; head stages that support the heads and are movable within the XY plane; and a second drive section that moves the head stages in the X-axis direction and the Y-axis direction, and the second drive section moves the head stages in the X-axis direction or the Y-axis direction when the substrate holder is moved in the X-axis direction or the Y-axis direction by the first drive section.Type: GrantFiled: October 24, 2019Date of Patent: May 18, 2021Assignee: NIKON CORPORATIONInventor: Atsushi Hara
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Patent number: 11009800Abstract: A measurement system to determine a deformation of an object having a front surface, a back surface and a pattern. The measurement system includes a processor system and an interferometer system. The interferometer system has a radiation source and a detector system. The source is configured to emit, to each of a plurality of locations on the object, measurement beams in order to generate, at each of the respective plurality of locations, reflected measurement beams off the front and back surfaces of the object respectively. The detector system is configured to receive the respective reflected measurement beams and output signals representative of the received reflected measurement beams to the processor system. The processor system is configured to receive the signals; determine, based on the signals as received, a characteristic of the object; and determine a deformation of the pattern based on the characteristic.Type: GrantFiled: January 26, 2017Date of Patent: May 18, 2021Assignee: ASML Netherlands B.V.Inventors: Han-Kwang Nienhuys, Güneş Nakiboğlu, Rita Marguerite Albin Lambertine Petit, Hermen Folken Pen, Remco Yuri Van De Moesdijk, Frank Johannes Jacobus Van Boxtel, Borgert Kruizinga
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Patent number: 11009801Abstract: Embodiments described herein provide a system, a software application, and methods of a lithography process that provide at least one of the ability to decrease the stabilization time and write an exposure pattern into a photoresist on a substrate compensating for the change in the total pitch over a stabilization time. One embodiment of the system includes a slab, a stage disposed over the slab, a pair of supports disposed on the slab, a processing apparatus, and a chiller system. The pair of supports support a pair of tracks and the stage is configured to move along the pair of tracks. The processing apparatus has an apparatus support coupled to the slab and a processing unit supported by the apparatus support. The processing unit has a plurality of image projection systems. The chiller system has at least one fluid channel disposed in each track of the pair of tracks.Type: GrantFiled: September 28, 2020Date of Patent: May 18, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Benjamin M. Johnston, David Michael Corriveau, Cheuk Ming Lee, Jae Myung Yoo, WeiMin Tao, Antoine P. Manens
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Patent number: 11009802Abstract: A pellicle for a lithographic device and a method for its manufacture. The pellicle comprises a carbon-based film having a thickness of between 0.1 nm and 10 nm and at least one layer of cross-linked aromatic molecules, heteroaromatic molecules, or polyyne-based or polyene-based amphiphilic molecules. The carbon-based film has a periphery and a center portion and the center portion is transparent to the radiation beam. A support structure is coupled at least to the periphery of the carbon-based film.Type: GrantFiled: January 13, 2016Date of Patent: May 18, 2021Assignee: CNM TECHNOLOGIES GMBHInventor: Albert Schnieders