Patents Issued in April 18, 2023
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Patent number: 11630348Abstract: A backlight module and a display device are disclosed. The backlight module includes: a back plate (1); a middle frame (3) disposed on the back plate (1); a light-emitting substrate (2) disposed on the back plate (1) and in the middle frame (3), the light-emitting substrate (2) including a first light-emitting area (203) and a second light-emitting area (204) surrounding the first light-emitting area (203), and the second light-emitting area (204) being close to an edge of the light-emitting substrate (2); a light compensation structure (100) close to the edge of the light-emitting substrate (2), the light compensation structure (100) including one or more light conversion materials. The backlight module and the display device can improve the display effect.Type: GrantFiled: June 10, 2022Date of Patent: April 18, 2023Assignees: BOE MLED Technology Co., Ltd., BOE Technology Group Co., Ltd.Inventors: Pei Qin, Yutao Hao, Donglei Li, Hui Liu, Shuo Wang, Jiaxin Li, Ying Chen, Jie Gao, Honghao Yu
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Patent number: 11630349Abstract: A backlight module and a display having the same are provided. The backlight module includes a front bezel, a back cover, and a light source. The back cover is disposed opposite to the front bezel. The back cover includes a body and one or more heat dissipation elements. The body has one or more openings corresponding to one or more heat sources. The one or more heat dissipation elements are disposed in the one or more openings, respectively. The light source is disposed between the front bezel and the back cover.Type: GrantFiled: April 25, 2022Date of Patent: April 18, 2023Assignee: Qisda CorporationInventor: Chun-Ting Chen
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Patent number: 11630350Abstract: The present invention relates to a liquid crystal alignment composition for the preparation of a liquid crystal alignment film having enhanced alignment property and stability and exhibiting a high voltage holding ratio, a method for preparing a liquid crystal alignment film using the same, and a liquid crystal alignment film and a liquid crystal display device using the same.Type: GrantFiled: June 20, 2017Date of Patent: April 18, 2023Assignee: LG CHEM, LTD.Inventors: Jung Ho Jo, Hee Han, Hang Ah Park, Soon Ho Kwon, Jun Young Yoon, Hyeong Seuk Yun
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Patent number: 11630351Abstract: A liquid crystal panel according to one embodiment includes a first substrate, a second substrate opposed to the first substrate, a sealing member bonding the first substrate and the second substrate, and a liquid crystal layer sealed between the first substrate and the second substrate by the sealing member. The sealing member includes a ten-hour half-life temperature of 95° C. or lower and an acrylic resin. The liquid crystal layer includes a macromolecular compound.Type: GrantFiled: December 17, 2020Date of Patent: April 18, 2023Assignee: Japan Display Inc.Inventors: Yasushi Iwakabe, Nobuko Fukuoka, Kentaro Okuyama
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Patent number: 11630352Abstract: A wavelength-tunable etalon includes a pair of substrates, each comprising a reflection layer, an electrode, and an alignment layer on opposing surfaces of the pair of substrates; a first seal line configured to seal liquid crystal between the pair of substrates; and a second seal line configured to divide a space in which the liquid crystal is sealed into a main liquid crystal accommodating space configured to pass laser and a sub-liquid crystal accommodating space provided external of the main liquid crystal accommodating space. The first seal line comprises a sub inlet configured to fluidly communicate the main liquid crystal accommodating space with the sub-liquid crystal accommodating space.Type: GrantFiled: October 12, 2021Date of Patent: April 18, 2023Inventor: Jang Kun Song
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Patent number: 11630353Abstract: According to one embodiment, a display device includes a substrate, a switching element provided on the substrate and including a relay electrode, a first electrode provided further away from the substrate than the switching element, a first insulating film provided on the first electrode and having a first thickness, a second electrode provided on the first insulating film, a second insulating film provided on the second electrode and having a second thickness and a third electrode provided on the second insulating film and supplied with a same potential as that of the first electrode. The second thickness is greater than the first thickness.Type: GrantFiled: August 30, 2021Date of Patent: April 18, 2023Assignee: Japan Display Inc.Inventors: Yoshitaka Ozeki, Seiji Uejima, Nobutaka Ozaki
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Patent number: 11630354Abstract: An optical device is provided in the present application. The present application provides an optical device that may prevent defects such as short circuits even when an external power source has been connected in an encapsulated structure.Type: GrantFiled: January 14, 2020Date of Patent: April 18, 2023Inventors: Ji Hoon Park, Young Shin Lee, Byoung Kun Jeon
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Patent number: 11630355Abstract: A display device is disclosed. The display device includes a display panel configured to display an image, and a printed circuit board electrically connected to the display panel and disposed at a back surface of the display panel. The printed circuit board includes an insulating layer, a first metal layer disposed at one surface of the insulating layer, pads including a first pad disposed on the first metal layer while being disposed inside a mounting area where an integrated circuit is mounted, and second pads disposed around the first pad, and a groove provided to extend from an inside of the mounting area to an outside of the mounting area.Type: GrantFiled: December 3, 2020Date of Patent: April 18, 2023Assignee: LG Display Co., Ltd.Inventors: Jeong-Kyu Lee, Dong-Won Park, Min-Gyu Park, Nam-Kon Ko
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Patent number: 11630356Abstract: According to one embodiment, a display device includes a first display panel, a second display panel and an adhesive layer which adheres the first and second display panels. The first display panel includes a first scanning line, a first signal line, a first pixel electrically connected to the first scanning line and the first signal line, and the first pixel includes a first pixel electrode including first line portions extending parallel to the first signal line. The second display panel includes a second scanning line, a second signal line, and a second pixel electrically connected to the second scanning line and the second signal line, and the second pixel includes a second pixel electrode including second line portions intersecting the second signal line in plan view.Type: GrantFiled: May 24, 2022Date of Patent: April 18, 2023Assignee: Japan Display Inc.Inventors: Yosuke Hyodo, Shinichiro Oka, Hirofumi Ohira
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Patent number: 11630357Abstract: A display device is provided. The display device includes a first substrate, a second substrate, a patterned electrode, a switch unit, and a liquid-crystal layer doped with a chiral dopant. The second substrate is disposed corresponding to the first substrate, and the patterned electrode is disposed on the first substrate or the second substrate. The switch unit is disposed adjacent to the patterned electrode. The liquid-crystal layer doped with the chiral dopant is disposed between the first substrate and the second substrate. In addition, an edge of the patterned electrode that is closest to the switch unit has an open area and a closed area, wherein the open area is adjacent to the closed area, and the patterned electrode extends a connecting portion out from the closed area and the connecting portion is connected to the switch unit.Type: GrantFiled: September 13, 2021Date of Patent: April 18, 2023Assignee: INNOLUX CORPORATIONInventors: Yi-Hsin Chen, Ying-Jen Chen
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Patent number: 11630358Abstract: According to one embodiment, a display device includes a first substrate having a first surface, a second surface, and a first side surface, a second substrate having a second side surface and being opposed to the first surface, a light source provided along the second side surface, a wiring substrate opposed to the second surface, a first adhesive layer bonding the second surface to the wiring substrate, and a flexible wiring substrate electrically connecting the first substrate with the wiring substrate. The first substrate includes an extending portion that includes the first side surface and extends further than the second side surface, the flexible wiring substrate is mount on the extending portion.Type: GrantFiled: June 1, 2022Date of Patent: April 18, 2023Assignee: Japan Display Inc.Inventors: Kazuki Ichihara, Naoyuki Asano
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Patent number: 11630359Abstract: The present disclosure provides a display substrate and a display device. The display substrate includes a common electrode. The common electrode includes an electrode unit array. The electrode unit array includes a plurality of electrode units. Each of the electrode units corresponds to two adjacent sub-pixels. Each of the electrode units includes a boundary electrode line and an inner region defined by the boundary electrode line. The inner region includes a first region and a second region. The first region includes a plurality of first strip electrode lines having a same longitudinal direction. Two adjacent first strip electrode lines are not connected inside the first region. The second region includes a plurality of second strip electrode lines having a same longitudinal direction. Two adjacent second strip electrode lines are not connected inside the second region.Type: GrantFiled: December 27, 2018Date of Patent: April 18, 2023Assignees: Hefei Xinsheng Optoelectronics Technology Co., Ltd., BOE Technology Group Co., Ltd.Inventors: Ruifang Du, Fengzhen Lyu, Hui Li, Xiaoye Ma
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Patent number: 11630360Abstract: A liquid crystal display device includes a transistor, a pixel electrode, and a common electrode. The transistor includes a first gate electrode on a first substrate, a second gate electrode having a region overlapping the first gate electrode, an oxide semiconductor layer between the first gate electrode and the second gate electrode, a first insulating layer between the first gate electrode and the oxide semiconductor layer, a second insulating layer between the oxide semiconductor layer and the second gate electrode, and a first oxide conductive layer and a second oxide conductive layer disposed between the first insulating layer and the oxide semiconductor layer and disposed with the first gate electrode and the second gate electrode sandwiched from both sides. The pixel electrode is disposed between the first and the second insulating layer; the common electrode is disposed a region overlapping with the pixel electrode and on the second insulating layer.Type: GrantFiled: February 1, 2021Date of Patent: April 18, 2023Assignee: MIKUNI ELECTRON CORPORATIONInventor: Sakae Tanaka
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Patent number: 11630361Abstract: A display device including: a substrate; a first thin film transistor of polysilicon semiconductor, a second thin film transistor of oxide semiconductor; a first light shading film opposing to the polysilicon semiconductor, and a second light shading film opposing to the oxide semiconductor; a first insulating film, a second insulating film which is constituted from plural insulating films, and a third insulating film superposed in this order; a first through hole penetrating the second insulating film and not penetrating the first insulating film and the third insulating film; a second through hole penetrating the first insulating film and the third insulating film; the first light shading film connects with a first conductive component, a part of the first conductive component exists on the third insulating film, through the second through hole.Type: GrantFiled: September 10, 2021Date of Patent: April 18, 2023Assignee: Japan Display Inc.Inventors: Akihiro Hanada, Toshihide Jinnai, Isao Suzumura, Hajime Watakabe, Ryo Onodera
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Patent number: 11630362Abstract: A one-way glass with switching modes includes an absorbing layer located on a weak light side, a reflecting layer located on an intense light side, and a converting layer stacked between the absorbing layer and the reflecting layer. The absorbing layer absorbs first polarized light and allows second polarized light to pass through. The reflecting layer reflects the first polarized light and allows the second polarized light to pass through. Unpolarized light incident from the weak light side or from the intense light side is respectively converted into the polarized light. During the process of gradually adjusting the converting layer from a twisted state to a vertical state, rotated angles of polarization directions of the first polarized light and the second polarized light gradually decrease.Type: GrantFiled: June 17, 2022Date of Patent: April 18, 2023Assignee: NATIONAL SUN YAT-SEN UNIVERSITYInventors: Tsung-Hsien Lin, Chun-Ta Wang, Heng-Yi Tseng, Cheng-Chang Li, Li-Min Chang, Kuan-Wu Lin, Hung-Chang Jau
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Patent number: 11630363Abstract: A window assembly includes an electro-optic element which has a first substantially transparent substrate defining first and second surfaces. The second surface includes a first electrically conductive layer. A second substantially transparent substrate defines third and fourth surfaces. The third surface includes a second electrically conductive layer. A primary seal is disposed between the first and second substrates. The seal and the first and second substrates define a cavity therebetween. An electro-optic medium is disposed in the cavity. The electro-optic medium is switchable such that the electro-optic element is operable between substantially clear and darkened states. An absorptive layer is positioned on the fourth surface of the electro-optic element and a reflective layer is positioned on the absorptive layer.Type: GrantFiled: September 3, 2021Date of Patent: April 18, 2023Assignee: GENTEX CORPORATIONInventor: William L. Tonar
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Patent number: 11630364Abstract: An EC element whose coloring unevenness due to concentration unevenness is reduced by bringing the ratio of red and green wavelength ranges of a colored form of an anodic EC compound close to the ratio of red and green wavelength ranges of a colored form of a cathodic EC compound.Type: GrantFiled: July 8, 2020Date of Patent: April 18, 2023Assignee: Canon Kabushiki KaishaInventor: Wataru Kubo
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Patent number: 11630365Abstract: An electrochromic element including: a laminated body including a support formed of a resin, a first electrode layer, an electrochromic layer, and a second electrode layer, the support, the first electrode layer, the electrochromic layer, and the second electrode layer being disposed in the laminated body in this order; and a gel electrolyte disposed between the first electrode layer and the second electrode layer, wherein a phase separation temperature of the gel electrolyte is higher than a softening point of the support.Type: GrantFiled: November 27, 2020Date of Patent: April 18, 2023Assignee: RICOH COMPANY, LTD.Inventors: Keiichiroh Yutani, Fuminari Kaneko, Yuto Matsuoka, Kayato Ohya, Tohru Yashiro, Tomoo Fukuda, Takashi Tsutsui
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Patent number: 11630366Abstract: In one aspect, an apparatus is described that includes a transparent pane having a first surface and a second surface. An electrochromic device is arranged over the second surface that includes a first conductive layer adjacent the second surface, a second conductive layer, and an electrochromic layer between the first and the second conductive layers. The apparatus further includes at least one conductive antenna structure arranged over the second surface.Type: GrantFiled: August 19, 2021Date of Patent: April 18, 2023Assignee: View, Inc.Inventors: Dhairya Shrivastava, Stephen Clark Brown
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Patent number: 11630367Abstract: Controllers and control methods apply a drive voltage to bus bars of a thin film optically switchable device. The applied drive voltage is provided at a level that drives a transition over the entire surface of the optically switchable device but does not damage or degrade the device. This applied voltage produces an effective voltage at all locations on the face of the device that is within a bracketed range. The upper bound of this range is associated with a voltage safely below the level at which the device may experience damage or degradation impacting its performance in the short term or the long term. At the lower boundary of this range is an effective voltage at which the transition between optical states of the device occurs relatively rapidly. The level of voltage applied between the bus bars is significantly greater than the maximum value of the effective voltage within the bracketed range.Type: GrantFiled: December 23, 2020Date of Patent: April 18, 2023Assignee: View, Inc.Inventors: Anshu A. Pradhan, Disha Mehtani, Gordon Jack
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Patent number: 11630368Abstract: Devices, methods and systems for generating wideband, high-fidelity arbitrary radio frequency (RF) passband signals are described. A voltage tunable optical filter for arbitrary RF passband signal generation includes a first input configured to receive a broadband optical pulse train, a second input configured to receive a first control voltage representative of an amplitude signal, an electrooptic modulator to receive the broadband optical pulse train and the first control voltage, to modulate the broadband optical pulse train in accordance with the amplitude signal, and to produce two complementary optical outputs that form two arms of an interferometer, an optical delay component to impart an optical path difference into one of the complementary outputs of the electrooptic modulator, and a combiner or a splitter to receive two complementary optical outputs of the electrooptic modulator after impartation of the optical path difference and to produce an output interference pattern of fringes.Type: GrantFiled: December 10, 2021Date of Patent: April 18, 2023Assignee: LAWRENCE LIVERMORE NATIONAL SECURITY, LLCInventors: Apurva Shantharaj Gowda, Jacky Chak-Kee Chan, Peter Thomas Setsuda DeVore, David Simon Perlmutter, Jason Thomas Chou
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Patent number: 11630369Abstract: Embodiments are disclosed for generating an optical Pulse Amplitude Modulation 4-level (PAM-4) signal from bandwidth-limited duobinary electrical signals in a Mach-Zehnder modulator. An example system includes an MZM structure that comprises a first waveguide interferometer arm structure associated with a first semiconductor device and a second waveguide interferometer arm structure associated with a second semiconductor device. A polybinary electrical signal is applied to or between the first semiconductor device and the second semiconductor device to convert an input optical signal provided to the MZM structure into an optical PAM-4 signal.Type: GrantFiled: August 18, 2021Date of Patent: April 18, 2023Assignee: Mellanox Technologies, Ltd.Inventors: Paraskevas Bakopoulos, Nikolaos (Nikos) Argyris, Boaz Atias, Elad Mentovich
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Patent number: 11630370Abstract: An optical transmitter comprises a directly coupled MZ interferometer and driver circuit. The MZ interferometer comprises a pair of differentially driven MZ electrodes configured to impart RF signals to light travelling through respective arms of the interferometer, and to receive DC bias as a positive voltage via lower n-type cladding of the MZ interferometer. The lower n-type cladding is at a different positive DC potential to an upper plane RF ground of the MZ interferometer, but the lower n-type cladding and the upper plane RF ground have similar AC potential. The MZ interferometer also comprises a pair of resistors in series configured to provide differential RF termination of the MZ electrodes; and a capacitive coupling between a virtual ground formed at a centre point between the pair of resistors and an RF ground configured to provide common-mode RF termination. The DC supply for the driver circuit is applied to the centre point of the RF termination.Type: GrantFiled: May 3, 2021Date of Patent: April 18, 2023Assignee: Lumentum Technology UK LimitedInventors: Samuel Davies, Andrew John Ward
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Patent number: 11630371Abstract: An optical filter includes a substrate; a first mirror on the substrate; a cavity layer on the first mirror; and a second mirror on the cavity layer. Each of the first and second mirrors provide high reflection, low transmission and low absorption over a targeted stopband. The cavity layer defines a resonant transmission band within the targeted stopband with the resonant band wavelength depending on the optical thickness of the cavity layer. The cavity layer includes a material having a non-linear response to incident irradiance such that cavity absorption changes with irradiance and suppresses cavity resonance at high irradiance. The material having the non-linear response to the incident irradiance includes a two-dimensional (2D) material.Type: GrantFiled: December 29, 2021Date of Patent: April 18, 2023Assignee: HAMR Industries LLCInventors: Michael P. Schmitt, Douglas E. Wolfe
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Patent number: 11630372Abstract: An optical resonator frequency comb comprising a main optical resonator being made of a resonator material, which has a third order nonlinearity and an anomalous resonator dispersion; a continuous wave (cw) laser configured for supplying continuous laser light into an optical waveguide, which is coupled with the main optical resonator. The cw laser, the optical waveguide and the main optical resonator are arranged for resonantly coupling the cw laser light into the main optical resonator for forming a single dissipative soliton circulating in the main optical resonator corresponding to the generation of a frequency comb. Furthermore, the optical resonator frequency comb further comprises an auxiliary optical element configured to induce a phase shift to a frequency comb component at the cw laser frequency to enhance the conversion efficiency of a generated frequency comb. The disclosure also relates to an associated method.Type: GrantFiled: June 30, 2022Date of Patent: April 18, 2023Inventors: Oskar Bjarki Helgason, Victor Torres Company
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Patent number: 11630373Abstract: It discloses a system and a method for generating heralded single photons, wherein the system comprises a high-quality optical ring cavity, a PPKTP nonlinear crystal, a polarization beam splitter, a dichroic mirror, a light filtering device, a reflector module, an atomic vapor cell and a single photon detector, wherein: the high-quality optical ring cavity is formed by a first plano-concave reflector, a second plano-concave reflector, a third plano-concave reflector and a fourth plano-concave reflector; the PPKTP nonlinear crystal and the polarization beam splitter are positioned in an optical path between the first plano-concave reflector and the second plano-concave reflector; the dichroic mirror is positioned in an optical path behind a reflecting end of the polarization beam splitter.Type: GrantFiled: August 19, 2020Date of Patent: April 18, 2023Assignee: NANJING UNIVERSITYInventors: Keyu Xia, Yang Wu, Han Zhang
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Patent number: 11630374Abstract: An equipment mounting system and assembly for rapid mounting and supporting of a fixture mount and a fixture or other equipment, such as motion picture production fixtures and other similar equipment, to a mount support base without fasteners. The equipment mounting assembly can comprise one or more fixture mounts having a base plate and a fixture coupling extending from the base plate, the one or more fixture mounts being operable with an equipment mounting system comprising a mount support base having an upper surface, and a retention system operable to selectively and releasably and interchangeably capture and secure one or more fixture mounts to the mount support base. The retention system can comprise a position keep system capable of applying a biasing force to a captured fixture mount. The equipment mounting assembly and the retention system can be configured to accommodate fixture mounts of different sizes or types.Type: GrantFiled: January 9, 2019Date of Patent: April 18, 2023Assignee: Light-Path, LLCInventor: Russell D. Richins
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Patent number: 11630375Abstract: A flash housing for photographic purposes can include a flash forming element arranged to generate a flash light, a lens element arranged to let at least part of the generated flash out of the flash housing so as to obtain a flash light, and a fastening element for attachment of a flash light shaping tool on top of the lens element. The fastening element can be arranged at least partly along a border of the lens element for magnetic engagement with a corresponding fastening element at the flash light shaping tool.Type: GrantFiled: September 17, 2018Date of Patent: April 18, 2023Assignee: PROFOTO AKTIEBOLAGInventors: Philip Fahlborg, Peter Pinzke
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Patent number: 11630376Abstract: An image capture device is described that includes a body; a mounting structure that is connected to the body; an integrated sensor-lens assembly (ISLA) that defines an optical axis and extends through the body and the mounting structure; and an accessory that is releasably connectable to the mounting structure via rotation through a range of motion less than approximately 90 degrees. The mounting structure and the accessory include corresponding angled bearing surfaces that are configured for engagement such that rotation of the accessory relative to the mounting structure creates a bearing effect that displaces the accessory along the optical axis to thereby reduce any axial force required during connection and disconnection of the accessory.Type: GrantFiled: August 28, 2020Date of Patent: April 18, 2023Assignee: GoPro, Inc.Inventors: Matthew David Thomas, Jordan Zook Todd, Jesse Patterson, Nicholas Vitale, Joseph Tucker, Ian Griggs
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Patent number: 11630377Abstract: A lens assembly includes a lens having an inner surface and an outer surface. A lens barrel supports the lens and has outer and inner lens barrel ends separated by a longitudinal axis. The lens is arranged along the longitudinal axis to span the outer lens barrel end such that the inner surface of the lens is within the lens barrel and the outer surface of the lens is outside the lens barrel. A heater element is located within the lens barrel. The heater element has a heater element electrical lead extending radially and longitudinally therefrom to provide power to the heater element. A carrier ring extends circumferentially around at least a portion of an outside lens barrel surface adjacent the inner lens barrel end. The carrier ring includes at least one lead station radially aligned with the heater element electrical lead.Type: GrantFiled: August 11, 2020Date of Patent: April 18, 2023Assignee: ZF FRIEDRICHSHAFEN AGInventors: Anthony Louis Rivas, Thomas E. Blake, III, Michael A. Hart
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Patent number: 11630378Abstract: A laser projection apparatus includes a laser source, an optical engine and a projection lens. The optical engine includes a light pipe, a lens assembly, a reflector, a prism assembly and a digital micromirror device. An optical axis of the illumination beam transmitted by the light pipe and the lens assembly is a first optical axis. An optical axis of an illumination beam reflected by the reflector to the prism assembly is a second optical axis. The first optical axis is perpendicular to the second optical axis, and both the first optical axis and the second optical axis are parallel to the beam receiving face of the digital micromirror device.Type: GrantFiled: July 29, 2020Date of Patent: April 18, 2023Assignee: HISENSE LASER DISPLAY CO., LTD.Inventors: Mingchen Ma, Liang Yin
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Patent number: 11630379Abstract: A scanning laser projection system includes a virtual protective housing circuit to automatically reduce accessible emissions of visible laser light by decimating areas of a projected image to reduce optical power exposure levels for safety, comfort, aesthetic, or system classification purposes. IR laser light pulses are scanned in a field of view, and a percentage of visible laser light pulses are blanked based on attributes of reflections of the IR laser light pulses.Type: GrantFiled: March 3, 2020Date of Patent: April 18, 2023Assignee: Microvision, Inc.Inventor: Henry J. Baron
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Patent number: 11630380Abstract: A polarization control member includes a first dichroic mirror having a first incident face, a second dichroic mirror joined to the first dichroic mirror, the second dichroic mirror having a second incident face, and a waveplate joined to the first incident face of the first dichroic mirror.Type: GrantFiled: December 23, 2021Date of Patent: April 18, 2023Assignee: NICHIA CORPORATIONInventor: Soichiro Miura
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Patent number: 11630381Abstract: An excitation light intensity control system, including a lighting part, an imaging part and a control part. The lighting part includes a light source; the imaging part includes a light modulator and a color conversion element; the excitation light emitted from the light source is imported to the light modulator for modulation; the modulated excitation light excites the color conversion element to produce multicolor excited light; the lighting part further includes a light recycling system used for recoupling part of the excitation light emitted from the light modulator to be incident to the light modulator; the control part includes a controller used for receiving original image data and controlling the intensity of the excitation light emitted from the light modulator and/or the light source.Type: GrantFiled: July 28, 2017Date of Patent: April 18, 2023Assignee: APPOTRONICS CORPORATION LIMITEDInventors: Zuqiang Guo, Fei Hu, Yi Li
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Patent number: 11630382Abstract: An optical element includes a first multi-lens surface and a second multi-lens surface. The first multi-lens surface has m areas arranged in an array, the m areas including a plurality of first cells. The second multi-lens surface has m second cells arranged in an array, the m second cells corresponding to the m areas. Light enters the first multi-lens surface. The light is emitted from the second multi-lens surface. The m areas of the first multi-lens surface each have n first cells. A focal plane of the m second cells is located at an emission side of the n first cells. The number m is a natural number no smaller than 2, and the number n is a natural number no smaller than 2.Type: GrantFiled: August 18, 2021Date of Patent: April 18, 2023Assignee: SEIKO EPSON CORPORATIONInventor: Katsuyuki Uehara
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Patent number: 11630383Abstract: A light source apparatus according to an aspect of the present disclosure includes a first light source section, a second light source section, a first polarization separator, a second polarization separator that reflects part of second light and transmits the other part of the second light, a first phase retarder which is disposed between the first polarization separator and the second polarization separator and on which the part of the second light reflected off the second polarization separator is incident, a wavelength conversion layer that converts the first light and the part of the second light into third light having a second wavelength band and outputs the third light toward the first polarization separator, and a first light focusing optical system disposed between the wavelength conversion layer and the first polarization separator. The wavelength conversion layer has a first surface via which the third light exits and a second surface that intersects with the first surface.Type: GrantFiled: December 22, 2021Date of Patent: April 18, 2023Assignee: SEIKO EPSON CORPORATIONInventor: Koichi Akiyama
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Patent number: 11630384Abstract: A light source module includes a light source, a wavelength conversion unit, a diffuser, and a reflector. The light source is configured to emit excitation light. The wavelength conversion unit is configured to reflect the excitation light. The diffuser has a first side and a second side opposite to each other, and is configured to allow the excitation light reflected by the wavelength conversion unit to enter the diffuser from the first side and reach the second side. The reflector is configured to reflect the excitation light entering the diffuser, so that the excitation light propagates from the second side to the first side and leaves the diffuser.Type: GrantFiled: April 13, 2022Date of Patent: April 18, 2023Assignee: DELTA ELECTRONICS, INC.Inventor: Kuo-Tung Wu
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Patent number: 11630385Abstract: Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate; a multilayer stack of reflective layers on the substrate; a capping layer on the multilayer stack of reflecting layers; and an absorber layer on the capping layer, the absorber layer made from tantalum and ruthenium.Type: GrantFiled: January 19, 2021Date of Patent: April 18, 2023Assignee: Applied Materials, Inc.Inventors: Shuwei Liu, Wen Xiao, Vibhu Jindal, Azeddine Zerrade
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Patent number: 11630386Abstract: The prevent disclosure provides a reflective mask. In some embodiments, the reflective mask includes a substrate, a sp2-hybrid carbon layer, a reflective multilayer, and an absorption pattern. The sp2-hybrid carbon layer is over the substrate. The reflective multilayer is over the sp2-hybrid carbon layer. The absorption pattern is over the reflective multilayer.Type: GrantFiled: January 19, 2022Date of Patent: April 18, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Tsiao-Chen Wu, Pei-Cheng Hsu
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Patent number: 11630388Abstract: Provided is a mask blank (100) for manufacturing a phase shift mask, the mask blank enabling formation of a high-precision and fine pattern on a light shielding film.Type: GrantFiled: December 21, 2020Date of Patent: April 18, 2023Assignee: HOYA CORPORATIONInventors: Osamu Nozawa, Ryo Ohkubo, Hiroaki Shishido
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Patent number: 11630389Abstract: To provide a curable composition for imprinting whereby a cured product layer for a replica mold, which is excellent in the adhesion to a mold substrate and the release property from a cured product of a transfer object material when used in an imprinting method is formed; a replica mold for imprinting, using the curable composition for imprinting; its production process and a process for producing an article having a fine pattern on its surface by using the replica mold. A curable composition for imprinting, which comprises a fluorinated polymer comprising structural units (a) based on CH2?C(R1)C(O)OR2Rf (R1: a hydrogen atom, a methyl group or the like, R2: a bivalent linking group having no fluorine atom and Rf: a C2-6 fluoroalkyl group or the like) and structural units (b) having a cationic polymerizable reactive group having an oxygen atom, and a photo-acid generator, wherein the proportion of the fluorinated polymer is from 11 to 89 mass % in 100 mass % of the curable composition for imprinting.Type: GrantFiled: July 17, 2019Date of Patent: April 18, 2023Assignee: AGC Inc.Inventors: Keisuke Takagi, Tomoaki Sakurada
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Patent number: 11630390Abstract: To provide a negative type photosensitive composition curable at a low temperature and capable of forming a cured film excellent in transparency, in chemical resistance and in environmental durability, and also to provide a pattern-formation method employing the composition. [Means] The present invention provides a negative type photosensitive composition comprising: an alkali-soluble resin, a compound having two or more (meth)acryloyloxy groups, a polysiloxane, a polymerization initiator, and a solvent. The alkali-soluble resin is a polymer comprising a carboxyl-containing polymerization unit and an alkoxysilyl-containing polymerization unit.Type: GrantFiled: January 20, 2017Date of Patent: April 18, 2023Assignee: MERCK PATENT GMBHInventors: Motoki Misumi, Daishi Yokoyama, Katsuto Taniguchi, Masahiro Kuzawa
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Patent number: 11630392Abstract: In a chemical liquid container replacement device D2 configured to replace a chemical liquid container 50, multiple chemical liquid containers 50 respectively connected to base end sides of chemical liquid supply paths configured to supply chemical liquids, and a nozzle attachment/detachment device 61 is configured to attach/detach the base end side of the chemical liquid supply path with respect to the chemical liquid container 50 of a container arrangement section 60. A loading/unloading port 62 loads a new chemical liquid container 50 for performing a liquid process on a substrate W and unloads a completely used chemical liquid container 50. A container transfer device 7 unloads the completely used chemical liquid container 50 from the container arrangement section 60 toward the loading/unloading port 62 and loads the new chemical liquid containers 50 from the loading/unloading port 62 toward the container arrangement section 60.Type: GrantFiled: October 29, 2019Date of Patent: April 18, 2023Assignee: TOKYO ELECTRON LIMITEDInventor: Tsunenaga Nakashima
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Patent number: 11630393Abstract: An apparatus for generating extreme ultraviolet (EUV) radiation includes a droplet generator configured to generate target droplets. An excitation laser is configured to heat the target droplets using excitation pulses to convert the target droplets to plasma. An energy detector is configured to measure a variation in EUV energy generated when the target droplets are converted to plasma. A feedback controller is configured to adjust parameters of the droplet generator and/or the excitation laser based on the variation in EUV energy.Type: GrantFiled: March 7, 2022Date of Patent: April 18, 2023Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng
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Patent number: 11630394Abstract: Disclosed is a method for lithographically producing a target structure on a non-planar initial structure by exposing a photoresist by means of a lithography beam. In the inventive method, the topography of a surface of the non-planar initial structure is detected. A test parameter for the lithography beam is used and an interaction of the lithography beam with the initial structure and the resultant change in the lithography beam and/or the target structure to be produced are determined. A correction parameter for the lithography beam is determined such that the change in the lithography beam and/or the target structure to be produced that is caused by the interaction of the lithography beam with the initial structure is reduced. The desired target structure on the initial structure is produced by exposing the photoresist by means of the lithography beam using the correction parameter.Type: GrantFiled: September 10, 2021Date of Patent: April 18, 2023Assignee: Karlsruhe Institute of TechnologyInventors: Christian Koos, Tobias Hoose, Philipp Dietrich, Matthias Blaicher, Maria Laura Gödecke, Nicole Lindenmann
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Patent number: 11630395Abstract: A control system, for example for an optical system, includes: an actuating element; a measuring element for acquiring actuating element measurement data of the actuating element; a regulating unit for generating a regulating signal for regulating the actuating element depending on the acquired actuating element meas-urement data; and a state monitoring unit for monitoring a state of the control system depending on the acquired actuating element measurement data. The state monitoring unit includes: a first processing unit for generating preprocessed state data depending on (i) the acquired actuating element measurement data and a physical model and/or a mathematical model of the actuating element, or (ii) the acquired actuating element measurement data, a physical model and/or a mathematical model of the actuating element and the generated regulating signal; and a second processing unit for determining the state of the control system depending on the preprocessed state data.Type: GrantFiled: August 6, 2021Date of Patent: April 18, 2023Assignee: Carl Zeiss SMT GmbHInventors: Malte Hoffmann, Gunther Schulz
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Patent number: 11630396Abstract: A method for calibrating a process model of a patterning process. The method includes identifying a portion of the substrate that has values within a tolerance band of one or more parameters (e.g., CD, EPE, etc.) of the patterning process, obtaining, via a metrology tool, metrology data corresponding to the portion of the substrate, processing the metrology data, and calibrating a process model based on the processed metrology data.Type: GrantFiled: July 24, 2019Date of Patent: April 18, 2023Assignee: ASML NETHERLANDS B.V.Inventor: Jun Chen
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Patent number: 11630397Abstract: A method of processing a wafer is provided. The method includes providing a reference plate below the wafer. The reference plate includes a reference pattern. The reference plate is imaged to capture an image of the reference pattern by directing light through the wafer. A first pattern is aligned using the image of the reference pattern. The first pattern is applied to a working surface of the wafer based on the aligning.Type: GrantFiled: August 17, 2021Date of Patent: April 18, 2023Assignee: Tokyo Electron LimitedInventor: Anton J. Devilliers
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Patent number: 11630398Abstract: The present invention provides a control apparatus for performing synchronous control to synchronize driving of a second moving member so as to follow driving of a first moving member, including a feedforward control system that includes a calculator configured to obtain an input/output response of the second moving member and position deviations of the first moving member and the second moving member while driving the first moving member and the second moving member in synchronism with each other, and calculate a feedforward manipulated variable based on the input/output response of the second moving member and the synchronous error between the first moving member and the second moving member obtained from the position deviations of the first moving member and the second moving member.Type: GrantFiled: March 5, 2021Date of Patent: April 18, 2023Assignee: CANON KABUSHIKI KAISHAInventor: Takashi Kurihara
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Patent number: 11630399Abstract: A lithographic apparatus is disclosed that includes a substrate table configured to support a substrate on a substrate supporting area and a heater and/or temperature sensor on a surface adjacent the substrate supporting area.Type: GrantFiled: March 18, 2022Date of Patent: April 18, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Nicolaas Ten Kate, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Francisco Nino, Marinus Jan Remie, Johannes Henricus Wilhelmus Jacobs, Thibault Simon Mathieu Laurent, Johan Gertrudis Cornelis Kunnen