Patents Issued in March 5, 2024
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Patent number: 11923260Abstract: A semiconductor device has an electronic component assembly with a substrate and a plurality of electrical components disposed over the substrate. A conductive post is formed over the substrate. A molding compound sheet is disposed over the electrical component assembly. A carrier including a first electrical circuit pattern is disposed over the molding compound sheet. The carrier is pressed against the molding compound sheet to dispose a first encapsulant over and around the electrical component assembly and embed the first electrical circuit pattern in the first encapsulant. A shielding layer can be formed over the electrical components assembly. The carrier is removed to expose the first electrical circuit pattern. A second encapsulant is deposited over the first encapsulant and the first electrical circuit pattern. A second electrical circuit pattern is formed over the second encapsulant. A semiconductor package is disposed over the first electrical circuit pattern.Type: GrantFiled: January 16, 2023Date of Patent: March 5, 2024Assignee: STATS ChipPAC Pte. Ltd.Inventors: JinHee Jung, ChangOh Kim
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Patent number: 11923261Abstract: A semiconductor chip is provided on a semiconductor circuit base on one surface of an insulating substrate. A reinforcement and balance base is provided on the one surface of the insulating substrate spaced to the semiconductor circuit base. The insulating substrate 4, the semiconductor circuit base, the semiconductor chip, and the reinforcement and balance base are sealed into a resin-molded sealing body. The sealing body has resin non-adhering portions.Type: GrantFiled: September 28, 2021Date of Patent: March 5, 2024Assignee: Sansha Electric Manufacturing Co., Ltd.Inventor: Koutarou Maeda
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Patent number: 11923262Abstract: An electrical apparatus includes a semiconductor element, conductors and a covering resin. The conductors are connected to the semiconductor element. At least one of the conductors extends in a first direction. The covering resin covers the semiconductor element and a portion of each of the conductors. The conductors respectively include covering portions and exposing portions. Each of the covering portions is covered by the covering resin. Each of the exposing portions is exposed from the covering resin. The conductors are aligned in a second direction. Two of the exposing portions closest to each other are spaced apart in each of the second direction and a third direction. The third direction is perpendicular to the first direction and the second direction. A shortest separation distance between two closest covering portions is shorter than a shortest separation distance between two closest exposing portions.Type: GrantFiled: October 29, 2021Date of Patent: March 5, 2024Assignee: DENSO CORPORATIONInventor: Yasushi Furukawa
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Patent number: 11923263Abstract: A semiconductor device includes a substrate, a chip underlying the substrate, a chip overlying the substrate, and a dummy die overlying the substrate. A pattern of the dummy die includes a first interior sidewall and a second interior sidewall, and a stress relief material between the first interior sidewall and the second interior sidewall to form a dummy die stress balance pattern.Type: GrantFiled: June 29, 2021Date of Patent: March 5, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITEDInventor: Jen-Yuan Chang
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Patent number: 11923264Abstract: A semiconductor apparatus includes: a system substrate; a semiconductor package mounted on the system substrate and having a first length in a first horizontal direction; a conductive label flexible and arranged on the semiconductor package, the conductive label including: a first adhesive layer contacting the semiconductor package; a thermally-conductive layer attached to the semiconductor package by the first adhesive layer and having a second length in the first horizontal direction greater than the first length; and a second adhesive layer contacting a portion of a surface of the conductive layer, the portion not vertically overlapping the semiconductor package; a thermal interface material (TIM) arranged on the conductive layer to vertically overlap the semiconductor package; and a cover including: a first cover portion vertically overlapping the semiconductor package and contacting the TIM; and a second cover portion to which the thermally-conductive layer is attached by the second adhesive layer.Type: GrantFiled: August 25, 2020Date of Patent: March 5, 2024Assignee: Samsung Electronics Co., Ltd.Inventor: Yongha Kim
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Patent number: 11923265Abstract: A power module, including: a first conductor, disposed at a first reference plane; a second conductor, disposed at a second reference plane, wherein projections of the first and second conductors on the first reference plane have a first overlap area; a third conductor, disposed at a third reference plane; a plurality of first switches and a plurality of second switches, wherein at least one of the first switches and at least one of the second switches that are located on a left side are alternatively disposed, at least one of the first switches and at least one of the second switches that are located on a right side are alternately disposed, and the left side and the right side of the first overlap area are oppositely disposed. Heat sources of the power module are evenly distributed and its parasitic inductance is low.Type: GrantFiled: April 25, 2022Date of Patent: March 5, 2024Assignee: Delta Electronics (Shanghai) CO., LTDInventors: Wei Cheng, Shouyu Hong, Dongfang Lian, Tao Wang, Zhenqing Zhao
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Patent number: 11923266Abstract: A semiconductor module circuit structure, including an insulating circuit substrate having an insulating plate, and a circuit pattern formed on a top face of the insulating plate, and a semiconductor element disposed on a top face of the circuit pattern. The circuit pattern includes a first straight part extending in a first direction, a second straight part extending in a second direction different from the first direction, and a corner part connecting the first and second straight parts. A wiring member is formed on a top surface of the first straight part along the first direction, the wiring member being formed off-center at the first straight part to be closer to an outer periphery of the circuit pattern.Type: GrantFiled: June 30, 2021Date of Patent: March 5, 2024Assignee: FUJI ELECTRIC CO., LTD.Inventors: Makoto Isozaki, Seiichi Takahashi
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Patent number: 11923267Abstract: Thermal heat spreaders and/or an IC die with solderable thermal structures may be assembled together with a solder array thermal interconnects. A thermal heat spreader may include a non-metallic material and one or more metallized surfaces suitable for bonding to a solder alloy employed as thermal interface material between the heat spreader and an IC die. An IC die may include a metallized back-side surface similarly suitable for bonding to a thermal interconnect comprising a solder alloy. Metallization on the IC die and/or heat spreader may comprise a plurality of solderable structures. A multi-chip package may include multiple IC die having different die thickness that are accommodated by a z-height thickness variation in the thermal interconnects and/or the solderable structures of the IC die or heat spreader.Type: GrantFiled: March 26, 2020Date of Patent: March 5, 2024Assignee: Intel CorporationInventors: Debendra Mallik, Je-Young Chang, Ram Viswanath, Elah Bozorg-Grayeli, Ahmad Al Mohammad
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Patent number: 11923268Abstract: Techniques and mechanisms for promoting heat conduction in a packaged device using a heat spreader that is fabricated by a build-up process. In an embodiment, 3D printing of a heat spreader successively deposit layers of a thermal conductor material, where said layers variously extend each over a respective one or more IC dies. The heat spreader forms a flat top side, wherein a bottom side of the heat spreader extends over, and conforms at least partially to, different respective heights of various IC dies. In another embodiment, fabrication of a portion of the heat spreader comprises printing pore structures that contribute to a relatively low thermal conductivity of said portion. An average orientation of the oblong pores contributes to different respective thermal conduction properties for various directions of heat flow.Type: GrantFiled: February 4, 2020Date of Patent: March 5, 2024Assignee: Intel CorporationInventors: Jesus Gerardo Reyes Schuldes, Shankar Devasenathipathy, Pramod Malatkar, Aravindha Antoniswamy, Kyle Arrington
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Patent number: 11923269Abstract: An optical module includes an optoelectronic assembly and a heat spreader. The optoelectronic assembly includes a flat, rigid substrate, an array of electrical contacts positioned on a first portion of the substrate, and an optoelectronics assemblage that is electrically connected to the array of contacts and is positioned apart from the array of electrical contacts. The heat spreader is comprised of a thermally conductive material and comprises a second portion that is structurally connected to the first portion and a third portion that is thermally connected to the optoelectronics assemblage.Type: GrantFiled: April 7, 2021Date of Patent: March 5, 2024Assignee: International Business Machines CorporationInventors: Mark D. Schultz, Fuad Elias Doany, Benjamin Giles Lee, Daniel M. Kuchta, Christian Wilhelmus Baks
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Patent number: 11923270Abstract: According to one embodiment, a semiconductor device includes a semiconductor chip having a first electrode on a first surface, a metal plate, and a first conductive bonding sheet that is disposed between the first surface of the semiconductor chip and the metal plate and bonds the first electrode to the metal plate.Type: GrantFiled: September 2, 2021Date of Patent: March 5, 2024Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage CorporationInventors: Tatsuya Kobayashi, Fumiyoshi Kawashiro, Hisashi Tomita
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Patent number: 11923271Abstract: A three dimensional Integrated Circuit (IC) Power Grid (PG) may be provided. The three dimensional IC PG may comprise a first IC die, a second IC die, an interface, and a power distribution structure. The interface may be disposed between the first IC die and the second IC die. The power distribution structure may be connected to the interface. The power distribution structure may comprise at least one Through-Silicon Vias (TSV) and a ladder structure connected to at least one TSV.Type: GrantFiled: July 20, 2021Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Noor E. V. Mohamed, Fong-Yuan Chang, Po-Hsiang Huang, Chin-Chou Liu
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Patent number: 11923272Abstract: Some embodiments include a method of forming an integrated assembly. Semiconductor material is patterned into a configuration which includes a set of first upwardly-projecting structures spaced from one another by first gaps, and a second upwardly-projecting structure spaced from the set by a second gap. The second gap is larger than the first gaps. Conductive material is formed along the first and second upwardly-projecting structures and within the first and second gaps. First and second segments of protective material are formed over regions of the conductive material within the second gap, and then an etch is utilized to pattern the conductive material into first conductive structures within the first gaps and into second conductive structures within the second gap. Some embodiments include integrated assemblies.Type: GrantFiled: April 15, 2022Date of Patent: March 5, 2024Assignee: Micron Technology, Inc.Inventors: Zhuo Chen, Irina V. Vasilyeva, Darwin Franseda Fan, Kamal Kumar Muthukrishnan
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Patent number: 11923273Abstract: A method of manufacturing a semiconductor device, including: forming a plurality of first metal strips extending in a first direction on a first plane; and forming a plurality of second metal strips extending in the first direction on a second plane over the first plane by executing a photolithography operation with a single mask, wherein a first second metal strip (FIG. 1, 131) is disposed over a first first metal strip; wherein the first first metal strip and the first second metal strip are directed to a first voltage source; wherein a distance between the first second metal strip and a second second metal strip immediate adjacent to the first second metal strip is greater than a distance between the second second metal strip and a third second metal strip immediate adjacent to the second second metal strip.Type: GrantFiled: July 29, 2022Date of Patent: March 5, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Shih-Wei Peng, Chia-Tien Wu, Jiann-Tyng Tzeng
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Patent number: 11923274Abstract: The subject application discloses a substrate. The substrate includes a first conductive layer, a first bonding layer, a first dielectric layer, and a conductive via. The first bonding layer is disposed on the first conductive layer. The first dielectric layer is disposed on the first bonding layer. The conductive via penetrates the first dielectric layer and is electrically connected with the first conductive layer.Type: GrantFiled: November 29, 2022Date of Patent: March 5, 2024Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventor: Wen Hung Huang
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Patent number: 11923275Abstract: A lead-frame assembly is disclosed, for a semiconductor die and comprising a die attach pad and a plurality of elongate leads spaced apart therefrom; wherein each elongate lead has a first proximal end portion, a second distal end portion and a middle portion therebetween; wherein the die attach pad and each of the plurality of elongate leads each comprise a coating-free portion, and a coated portion having a coating material thereon; wherein a part of a perimeter of the die attach pad proximal each lead is comprised in the coating-free portion, and wherein the proximal end portion of each elongate lead is comprised in the coating-free portion. Associated package assemblies and methods are also disclosed.Type: GrantFiled: August 27, 2021Date of Patent: March 5, 2024Assignee: NXP USA, Inc.Inventors: Allen Marfil Descartin, Mariano Layson Ching, Jr., Jun Li
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Patent number: 11923276Abstract: A semiconductor includes a carrier; a semiconductor element arranged on the carrier; a first row of terminals arranged along a first side face of the carrier; a second row of terminals arranged along a second side face of the carrier opposite the first side face; and an encapsulation body encapsulating the semiconductor element, wherein the semiconductor element comprises a first transistor structure and a second transistor structure, wherein the first row of terminals comprises a first gate terminal, a first sensing terminal coupled, and a first power terminal, wherein the second row of terminals, a second sensing terminal, and a second power terminal.Type: GrantFiled: February 15, 2023Date of Patent: March 5, 2024Assignee: Infineon Technologies Austria AGInventors: Ralf Otremba, Klaus Schiess, Michael Treu
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Patent number: 11923277Abstract: A semiconductor device includes a conductive support member, a first semiconductor element, and a second semiconductor element. The conductive support member includes a first die pad and a second die pad separated from each other in a first direction. The first die pad and the second die pad overlap each other when viewed along the first direction. The first die pad has a first main surface mounting the first semiconductor element, and a first back surface opposing the first main surface. The second die pad has a second main surface mounting the second semiconductor element, and a second back surface opposing the second main surface. When viewed along a second direction, a distance in the first direction between the first back surface and the second back surface is larger than a distance in the first direction between the first main surface and the second main surface.Type: GrantFiled: September 3, 2021Date of Patent: March 5, 2024Assignee: ROHM CO., LTD.Inventors: Yoshizo Osumi, Hiroaki Matsubara, Tomohira Kikuchi
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Patent number: 11923278Abstract: A semiconductor module includes a semiconductor device and bus bar. The device includes an insulating substrate, conductive member, switching elements, and first/second input terminals. The substrate has main/back surfaces opposite in a thickness direction, with the conductive member disposed on the main surface. The switching elements are connected to the conductive member. The first input terminal, including a first terminal portion, is connected to the conductive member. The second input terminal, including a second terminal portion overlapping with the first terminal portion in the thickness direction, is connected to the switching elements. The second input terminal is separate from the first input terminal and conductive member in the thickness direction. The bus bar includes first/second terminals. The second terminal, separate from the first terminal in the thickness direction, partially overlaps with the first terminal in the thickness direction.Type: GrantFiled: April 18, 2023Date of Patent: March 5, 2024Assignee: ROHM CO., LTD.Inventors: Masashi Hayashiguchi, Takumi Kanda
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Patent number: 11923279Abstract: A first semiconductor device includes: a first wiring layer including a first interlayer insulating film, a first electrode pad, and a first dummy electrode, the first electrode pad being embedded in the first interlayer insulating film and having one surface located on same plane as one surface of the first interlayer insulating film, and the first dummy electrode being embedded in the first interlayer insulating film, having one surface located on same plane as the one surface of the first interlayer insulating film, and being disposed around the first electrode pad; and a second wiring layer including a second interlayer insulating film, a second electrode pad, and a second dummy electrode, the second electrode pad being embedded in the second interlayer insulating film, having one surface located on same surface as one surface of the second interlayer insulating film, and being bonded to the first electrode pad, and the second dummy electrode having one surface located on same plane as the surface locatedType: GrantFiled: December 7, 2022Date of Patent: March 5, 2024Assignee: SONY GROUP CORPORATIONInventors: Nobutoshi Fujii, Yoshihisa Kagawa
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Patent number: 11923280Abstract: A thin semiconductor device with enhanced edge protection, and a method of manufacturing thereof. For example and without limitation, various aspects of this disclosure provide a thin semiconductor device comprising a substrate with an edge-protection region, and a method of manufacturing thereof.Type: GrantFiled: September 2, 2021Date of Patent: March 5, 2024Assignee: AMKOR TECHNOLOGY SINGAPORE HOLDING PTE. LTD.Inventors: Won Bae Bang, Kwang Seok Oh
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Patent number: 11923281Abstract: A semiconductor package includes a metallic pad and leads, a semiconductor die attached to the metallic pad, the semiconductor die including an active side with bond pads opposite the metallic pad, a wire bond extending from a respective bond pad of the semiconductor die to a respective lead of the leads, a heat spreader over the active side of the semiconductor die with a gap separating the active side of the semiconductor die from the heat spreader, an electrically insulating material within the gap and in contact with the active side of the semiconductor die and the heat spreader; and mold compound covering the semiconductor die and the wire bond, and partially covering the metallic pad and the heat spreader, with the metallic pad exposed on a first outer surface of the semiconductor package and with the heat spreader exposed on a second outer surface of the semiconductor package.Type: GrantFiled: April 12, 2022Date of Patent: March 5, 2024Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Anindya Poddar, Woochan Kim, Vivek Kishorechand Arora
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Patent number: 11923282Abstract: A wiring substrate includes an insulation layer, a first wiring layer, and a second wiring layer. The first wiring layer is embedded in the insulation layer with an upper surface of the first wiring layer exposed from the insulation layer. The second wiring layer includes a terminal portion located at a lower position than a lower surface of the insulation layer and an embedded portion embedded in the insulation layer. The wiring substrate further includes a connection via connecting the first wiring layer and the embedded portion. The insulation layer includes an extension between the embedded portion and a lower surface of the first wiring layer. The extension includes a through hole. The connection via is located in the through hole of the extension.Type: GrantFiled: January 29, 2021Date of Patent: March 5, 2024Assignee: SHINKO ELECTRIC INDUSTRIES CO., LTD.Inventor: Tetsuichiro Kasahara
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Patent number: 11923283Abstract: A semiconductor package including a first package substrate, a first semiconductor chip on a top surface of the first package substrate, an interposer electrically connected to the first package substrate on a top surface of the first semiconductor chip, and a molding layer configured to cover the first package substrate and the first semiconductor chip may be provided. The interposer may include an interposer trench recessed from a bottom surface of the interposer that faces both the top surface of the first semiconductor chip and the top surface of the first package substrate, and an interposer hole penetrating the interposer. The molding layer may include a filling portion filling a region between the first package substrate and the interposer, a through portion filling the interposer hole, and a cover portion covering at least a part of a top surface of the interposer.Type: GrantFiled: July 22, 2021Date of Patent: March 5, 2024Assignee: Samsung Electronics Co., Ltd.Inventor: Min Keun Kwak
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Patent number: 11923284Abstract: A wiring substrate that is provided enables stray capacitance between a first electrode and a second electrode to be prevented from varying when an undulation occurs in the wiring substrate. Insulating layers are stacked. A first electrode and a second electrode are formed between the same layers at an interval. The thickness of the first electrode is more than the thickness of the second electrode. The lower main surface of the first electrode is located at a position lower than the lower main surface of the second electrode, and the upper main surface of the first electrode is located at a position higher than the upper main surface of the second electrode when seen through in a direction perpendicular to a stacking direction of the insulating layers.Type: GrantFiled: September 27, 2019Date of Patent: March 5, 2024Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Ryota Asai, Issei Yamamoto
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Patent number: 11923285Abstract: An electronic device package and a method for manufacturing the same are provided. The electronic device package includes a circuit layer and an electronic component. The circuit layer includes a dielectric layer having an opening, and an electrical contact. A width of an aperture of the opening increases from a first surface toward a second surface. The electrical contact is at least partially disposed in the opening and exposed through the opening. The electronic component is disposed on the second surface and electrically connected to the circuit layer.Type: GrantFiled: January 5, 2021Date of Patent: March 5, 2024Assignee: ADVANCED SEMICONDUCTOR ENGINEERING, INC.Inventors: Po-Jen Cheng, Chien-Fan Chen
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Patent number: 11923286Abstract: A package substrate includes an insulating layer having a mounting surface; a wiring pattern extending in the insulating layer; and a chip bonding pad provided on the mounting surface of the insulating layer and connected to the wiring pattern, the chip bonding pad having a tapered shape in which a horizontal cross-sectional area thereof gradually decreases away from the mounting surface of the insulating layer in a vertical direction. A portion of the chip bonding pad closest to the mounting surface of the insulating layer has a horizontal length of about 20 micrometers (?m) to about 30 ?m.Type: GrantFiled: August 30, 2021Date of Patent: March 5, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Wonjung Jang, Chulyong Jang
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Patent number: 11923287Abstract: A semiconductor device includes an insulating layer, a conductive member provided inside the insulating layer, a chip disposed on a first surface of the insulating layer and connected to the conductive member, and an electrode connected to the conductive member via a barrier layer. A resistivity of the barrier layer is higher than a resistivity of the conductive member. At least a portion of the electrode protrudes from a second surface of the insulating layer.Type: GrantFiled: December 8, 2021Date of Patent: March 5, 2024Assignees: KABUSHIKI KAISHA TOSHIBA, Kioxia CorporationInventors: Takayuki Tajima, Kazuo Shimokawa
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Patent number: 11923288Abstract: To provide a wiring substrate, an electronic device, and an electronic module the size of which can be easily reduced and the strength of which can be maintained. A wiring substrate includes an insulation substrate and an electrical wiring structure. The insulation substrate includes a recess section in one surface. A frame portion of the insulation substrate that forms a side surface which connects an opened surface and a bottom surface of the recess section to each other includes a first conductive portion having a plate shape in the frame portion.Type: GrantFiled: October 31, 2022Date of Patent: March 5, 2024Assignee: KYOCERA CorporationInventors: Takuo Kisaki, Takahiro Sasaki
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Patent number: 11923289Abstract: A method of forming circuitry components includes forming a stack of horizontally extending and vertically overlapping features. The features extend horizontally though a primary portion of the stack with at least some of the features extending farther in the horizontal direction in an end portion. Operative structures are formed vertically through the features in the primary portion and dummy structures are formed vertically through the features in the end portion. Openings are formed through the features to form horizontally elongated and vertically overlapping lines from material of the features. The lines individually extend laterally about sides of vertically extending portions of both the operative structures and the dummy structures. Sacrificial material that is elevationally between the lines is at least partially removed in the primary and end portions laterally between the openings. Other aspects and implementations are disclosed.Type: GrantFiled: June 10, 2022Date of Patent: March 5, 2024Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, Roger W. Lindsay, Krishna K. Parat
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Patent number: 11923290Abstract: Embodiments disclosed herein include semiconductor devices with source/drain interconnects that include a barrier layer. In an embodiment the semiconductor device comprises a source region and a drain region. In an embodiment, a semiconductor channel is between the source region and the drain region, and a gate electrode is over the semiconductor channel. In an embodiment, the semiconductor device further comprises interconnects to the source region and the drain region. In an embodiment, the interconnects comprise a barrier layer, a metal layer, and a fill metal.Type: GrantFiled: June 26, 2020Date of Patent: March 5, 2024Assignee: Intel CorporationInventors: Siddharth Chouksey, Gilbert Dewey, Nazila Haratipour, Mengcheng Lu, Jitendra Kumar Jha, Jack T. Kavalieros, Matthew V. Metz, Scott B Clendenning, Eric Charles Mattson
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Patent number: 11923291Abstract: A semiconductor device includes a first substrate, a logical circuit, a first insulating film, a wiring, a plug, and a first layer containing a metal oxide or a metal nitride. The logical circuit is disposed on the first substrate. The first insulating film is disposed above the logical circuit. The wiring includes a first film disposed in the first insulating film, the first film extending in a first direction along an upper surface of the first substrate, and the first film containing a metal, and a first metal layer disposed in the first insulating film via the first film. The plug is disposed under the wiring, extends in a second direction that intersects the first direction, and is electrically connected to the wiring. The first layer is provided between an upper end of the plug and a bottom end of the wiring.Type: GrantFiled: August 31, 2020Date of Patent: March 5, 2024Assignee: KIOXIA CORPORATIONInventor: Atsushi Kato
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Patent number: 11923292Abstract: A semiconductor device includes a semiconductor substrate, a conductive pad disposed on the semiconductor substrate, and a pillar pattern disposed on the conductive pad. The semiconductor device further includes a solder seed pattern disposed on the pillar pattern, and a solder portion disposed on the pillar pattern and the solder seed pattern. A first width of the solder seed pattern is less than a second width of a top surface of the pillar pattern.Type: GrantFiled: May 4, 2021Date of Patent: March 5, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jinkuk Bae, Hyunsoo Chung, Inyoung Lee, Donghyeon Jang
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Patent number: 11923293Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a first interconnect dielectric layer arranged over a substrate. An interconnect wire extends through the first interconnect dielectric layer, and a barrier structure is arranged directly over the interconnect wire. The integrated chip further includes an etch stop layer arranged over the barrier structure and surrounds outer sidewalls of the barrier structure. A second interconnect dielectric layer is arranged over the etch stop layer, and an interconnect via extends through the second interconnect dielectric layer, the etch stop layer, and the barrier structure to contact the interconnect wire.Type: GrantFiled: July 8, 2021Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsin-Chieh Yao, Chung-Ju Lee, Chih Wei Lu, Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai
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Patent number: 11923294Abstract: An interconnect structure includes an etching stop layer, a dielectric layer and an insert layer and a conductive line. The insert layer is located between the etching stop layer and the dielectric layer. The conductive line extends through the dielectric layer, the insert layer, and the etching stop layer. A material of the insert layer is different from the dielectric layer and the etching stop layer.Type: GrantFiled: April 29, 2022Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chia-Cheng Chou, Chung-Chi Ko, Tze-Liang Lee
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Patent number: 11923295Abstract: A semiconductor structure includes a first dielectric layer over a first conductive line and a second conductive line, a high resistance layer over a portion of the first dielectric layer, a second dielectric layer on the high resistance layer, a low-k dielectric layer over the second dielectric layer, a first conductive via extending through the low-k dielectric layer and the second dielectric layer, and a second conductive via extending through the low-k dielectric layer and the first dielectric layer to the first conductive line. The first conductive via extends into the high resistance layer.Type: GrantFiled: June 19, 2020Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Hong-Wei Chan, Yung-Shih Cheng, Wen-Sheh Huang, Yu-Hsiang Chen
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Patent number: 11923296Abstract: An interlayer dielectric layer covers an electric fuse element. A resistance layer made of silicon metal is arranged on the interlayer dielectric layer and directly above the electric fuse element.Type: GrantFiled: June 15, 2022Date of Patent: March 5, 2024Assignee: RENESAS ELECTRONICS CORPORATIONInventors: Naohito Suzumura, Kenichiro Sonoda, Hideaki Tsuchiya
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Patent number: 11923297Abstract: Apparatus and methods for generating a physical layout for a high density routing circuit are disclosed. An exemplary semiconductor structure includes: a gate structure; a plurality of first metal lines formed in a first dielectric layer below the gate structure; at least one first via formed in a second dielectric layer between the gate structure and the first dielectric layer; a plurality of second metal lines formed in a third dielectric layer over the gate structure; and at least one second via formed in a fourth dielectric layer between the gate structure and the third dielectric layer. Each of the at least one first via is electrically connected to the gate structure and a corresponding one of the plurality of first metal lines. Each of the at least one second via is electrically connected to the gate structure and a corresponding one of the plurality of second metal lines.Type: GrantFiled: April 27, 2021Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Wei-An Lai, Shih-Wei Peng, Wei-Cheng Lin, Jiann-Tyng Tzeng
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Patent number: 11923298Abstract: A semiconductor device includes a first active pattern on a substrate; a first gate electrode crossing the first active pattern; source/drain patterns in an upper portion of the first active pattern and at opposite sides, respectively, of the first gate electrode; a first gate capping pattern on the first gate electrode; an interlayer insulating layer on the source/drain patterns; first and second active contacts penetrating the interlayer insulating layer and being respectively connected to the pair of source/drain patterns; and a first interconnection layer on the first and second active contacts. The first interconnection layer may include a first insulating structure covering a top surface of the second active contact; and a first interconnection line covering a top surface of the first active contact and extending on the first insulating structure, and covering a top surface of the first gate capping pattern between the first and second active contacts.Type: GrantFiled: June 2, 2022Date of Patent: March 5, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun-Seung Song, Kwang-Young Lee, Jonghyun Lee
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Patent number: 11923299Abstract: A semiconductor device according to the present embodiment comprises a first metallic line. The first metallic line is provided above a substrate and extends in a first direction with a first width. At least one second metallic line is connected to the first metallic line and extends in a second direction from the first metallic line with a second width that is smaller than the first width. A dummy metallic line is arranged adjacently to the at least one second metallic line, connected to the first metallic line, and extends in the second direction from the first metallic line. The dummy metallic line is not electrically connected to lines other than the first metallic line.Type: GrantFiled: August 23, 2022Date of Patent: March 5, 2024Assignee: Kioxia CorporationInventors: Takao Sueyama, Yosuke Komori
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Patent number: 11923300Abstract: A semiconductor structure includes: a first gate structure and a second gate structure extending in a first direction; a first base level metal interconnect (M0) pattern extending in a second direction perpendicular to the first direction; a second M0 pattern extending in the second direction; a third M0 pattern located between the first and second gate structures and extending in the first direction, two ends of the third M0 pattern connected to the first M0 pattern and the second M0 pattern, respectively; a fourth M0 pattern and a fifth M0 pattern located between the first and second M0 patterns and extending in the second direction. A distance between the fourth M0 pattern and the first M0 pattern in the first direction is equal to a minimum M0 pattern pitch, and a distance between the fourth M0 pattern and the second M0 pattern is equal to the minimum M0 pattern pitch.Type: GrantFiled: July 9, 2021Date of Patent: March 5, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Shih-Wei Peng, Jiann-Tyng Tzeng, Ken-Hsien Hsieh
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Patent number: 11923301Abstract: A method of manufacturing a semiconductor device, including: forming a plurality of gate strips, each gate strip is a gate terminal of a transistor; forming a plurality of first contact vias connected to a part of the gate strips; forming a plurality of first metal strips above the plurality of gate strips; connecting one of the first metal strips to one of the first contact vias; forming a plurality of second metal strips above the plurality of first metal strips, wherein the plurality of second metal strips are co-planar, each second metal strip and one of the first metal strips are crisscrossed from top view; a length between two adjacent gate strips is twice as a length between two adjacent second metal strips, and a length of said one of the first metal strips is smaller than two and a half times as the length between two adjacent gate strips.Type: GrantFiled: December 15, 2022Date of Patent: March 5, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: Shih-Wei Peng, Hui-Ting Yang, Wei-Cheng Lin, Jiann-Tyng Tzeng
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Patent number: 11923302Abstract: Semiconductor devices and methods of manufacture are provided wherein a metallization layer is located over a substrate, and a power grid line is located within the metallization layer. A signal pad is located within the metallization layer and the signal pad is surrounded by the power grid line. A signal external connection is electrically connected to the signal pad.Type: GrantFiled: June 30, 2022Date of Patent: March 5, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Fong-Yuan Chang, Noor Mohamed Ettuveettil, Po-Hsiang Huang, Sen-Bor Jan, Ming-Fa Chen, Chin-Chou Liu, Yi-Kan Cheng
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Patent number: 11923303Abstract: A carrier comprises: a main body made of a material comprising a thermal conductivity of at least 380 W/(m K), wherein the main body comprises a mounting surface for mechanical and thermal connection with a component, wherein the main body comprises a recess which penetrates the main body along a first direction perpendicular to the main extension plane of the main body, an electrically insulating filler is arranged in the recess, which comprises a further recess penetrating the filler along the first direction, an inner wall of the filler surrounding the further recess is provided with an electrically conductive coating to form a via through the main body.Type: GrantFiled: December 5, 2019Date of Patent: March 5, 2024Assignee: OSRAM OPTO SEMICONDUCTORS GMBHInventors: Konrad Wagner, Michael Förster
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Patent number: 11923304Abstract: The present disclosure relates to an integrated circuit. The integrated circuit includes a conductive interconnect disposed on a dielectric over a substrate. An interfacial layer is arranged along an upper surface of the conductive interconnect. A liner is arranged along a lower surface of the conductive interconnect. The liner and the interfacial layer surround the conductive interconnect. A middle layer is located over the interfacial layer and has a bottommost surface over the dielectric. A bottommost surface of the interfacial layer and the bottommost surface of the middle layer are both above a top of the conductive interconnect.Type: GrantFiled: November 28, 2022Date of Patent: March 5, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Su-Jen Sung, Chih-Chiang Chang, Chia-Ho Chen
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Patent number: 11923305Abstract: Some embodiments include an apparatus having a structure with a surface which comprises tungsten. The apparatus has titanium-nitride-containing protective material along and directly against the surface. The structure may be a digit line of a memory array. Some embodiments include a method in which an assembly is formed to have a tungsten-containing layer with an exposed tungsten-containing upper surface. Titanium-nitride-containing protective material is formed over and directly against the tungsten-containing upper surface. Additional material is formed over the protective material, and is spaced from the tungsten-containing upper surface by the protective material. The additional material may comprise silicon nitride and/or silicon dioxide.Type: GrantFiled: October 21, 2020Date of Patent: March 5, 2024Assignee: Micron Technology, Inc.Inventors: Luca Fumagalli, Davide Colombo
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Patent number: 11923306Abstract: A method for manufacturing a semiconductor structure includes forming a plurality of dummy structures spaced apart from each other, forming a plurality of dielectric spacers laterally covering the dummy structures to form a plurality of trenches defined by the dielectric spacers, filling a conductive material into the trenches to form electrically conductive features, selectively depositing a capping material on the electrically conductive features to form a capping layer, removing the dummy structures to form a plurality of recesses defined by the dielectric spacers, filling a sacrificial material into the recesses so as to form sacrificial features, depositing a sustaining layer on the sacrificial features, and removing the sacrificial features to form air gaps confined by the sustaining layer and the dielectric spacers.Type: GrantFiled: August 30, 2021Date of Patent: March 5, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Chia-Wei Su, Chia-Tien Wu, Hsin-Ping Chen, Shau-Lin Shue
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Patent number: 11923307Abstract: Disclosed herein are microelectronic structures including bridges, as well as related assemblies and methods. In some embodiments, a microelectronic structure may include a substrate and a bridge.Type: GrantFiled: June 16, 2020Date of Patent: March 5, 2024Assignee: Intel CorporationInventors: Bai Nie, Gang Duan, Omkar G. Karhade, Nitin A. Deshpande, Yikang Deng, Wei-Lun Jen, Tarek A. Ibrahim, Sri Ranga Sai Boyapati, Robert Alan May, Yosuke Kanaoka, Robin Shea McRee, Rahul N. Manepalli
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Patent number: 11923308Abstract: Generally discussed herein are systems, devices, and methods to reduce crosstalk interference. An interconnect structure can include a first metal layer, a second metal layer, a third metal layer, the first metal layer closer to the first and second dies than the second and third metal layers, the first metal layer including a ground plane within a footprint of a bump field of the interconnect structure and signal traces outside the footprint of the bump field.Type: GrantFiled: December 8, 2020Date of Patent: March 5, 2024Assignee: Intel CorporationInventors: Zhiguo Qian, Kemal Aygun
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Patent number: 11923309Abstract: Disclosed are semiconductor packages and methods of fabricating the same. The semiconductor package includes a redistribution substrate including redistribution line patterns in a dielectric layer, and a semiconductor chip on the redistribution substrate. The semiconductor chip includes chip pads electrically connected to the redistribution line patterns. Each of the redistribution line patterns has a substantially planar top surface and a nonplanar bottom surface. Each of the redistribution line patterns includes a central portion and edge portions on opposite sides of the central portion. Each of the redistribution line patterns has a first thickness as a minimum thickness at the central portion and a second thickness as a maximum thickness at the edge portions.Type: GrantFiled: March 23, 2021Date of Patent: March 5, 2024Assignee: Samsung Electronics Co., Ltd.Inventors: Hyunsu Hwang, Junyun Kweon, Jumyong Park, Jin Ho An, Dongjoon Oh, Chungsun Lee, Ju-Il Choi