Abstract: A magnetic bearing system for controlling magnetic coupling between a mobile carriage and a guideway and a method for controlling the magnetic bearing system. The magnetic bearing system includes at least one engine, which includes at least two poles, at least one permanent magnet and at least one coil. The engine is configured to be magnetically coupled to the guideway through at least one air gap.

Abstract: A linear conveyor includes a plurality of modules constituting a conveyance path and a slider that travels along the conveyance path. The linear conveyor includes at least one relay unit disposed across adjacent modules. The modules are configured such that each of the modules has first and second module-side connection sections provided at both ends in a direction along the conveyance path, the modules being connected in a row along the conveyance path. The relay unit includes a first unit-side connection section that is connected to the second module-side connection section of one of a set of the adjacent modules, a second unit-side connection section that is connected to the first module-side connection section of the other of the set of the adjacent modules, and a first circuit that electrically connects the first and second unit-side connection sections to each other.

Abstract: According to a first aspect of the present invention, there is provided a method of slowing down a moving projectile, the projectile moving within an electromagnetic railgun, the method comprising: using an electromagnetic field generated by the railgun to slow down the projectile, wherein the projectile is a munitions projectile, and/or a carrier for catching the munitions projectile.

Abstract: An apparatus for transportation of a substrate carrier in a vacuum chamber is provided. The apparatus includes a first track providing a first transportation path for the substrate carrier, and a transfer device configured for contactlessly moving the substrate carrier from a first position on the first track to one or more second positions away from the first track. The one or more second positions include at least one of a position on a second track and a process position for processing of a substrate. The transfer device includes at least one first magnet device configured to provide a magnetic force acting on the substrate carrier to contactlessly move the substrate carrier from the first position to the one or more second positions.

Abstract: An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

Abstract: Non-contact bearing system, such as a magnetic levitation system, having a geometry. The geometry includes a plurality of track elements arranged to nest together in a length direction. The plurality of track elements are shaped to define at least an upper and a lower null flux crossing and the plurality of nested track elements form a conductive metamaterial. Method for constructing a metamaterial null flux magnetic levitation track with tessellating elements of stamped conductors.

Abstract: The invention relates to a cable bearing element, to an arrangement of cable bearing elements and to a method of manufacturing a cable bearing element. The cable bearing element is adapted to position and/or to hold at least one line section of an electric line, wherein the cable bearing element provides at least one guiding channel for the section of the electric line, wherein a base of a first section of the guiding channel is arranged within a first plane and a base of another section of the guiding channel is arranged within a second plane, wherein the second plane is parallel to the first plane and spaced apart from the first plane with a first predetermined distance, wherein the guiding channel comprises a base part and side walls, wherein a geometry or size of the guiding channel is adapted to the diameter of the electric line or cable which is to be arranged within the guiding channel.

Abstract: The present disclosure provides a magnetic field communication ground power system of an electric vehicle, the system includes a reflux rail and multi-segment conductive rail mounted on a ground. The electric vehicle runs through the reflux rail, and receives electric power from the conductive rail through conductive boots so as to drive the electric vehicle to move. The system further includes: a plurality of driving positive electrodes configured to connected to the conductive rail; at least one electromagnetic controlling system configured to turn on or turn off the driving positive electrodes; a plurality of magnetic controlling systems configured to collect a position of the electric vehicle on the reflux rail, wherein the magnetic controlling systems transmit the sampled position of the electric vehicle to the electromagnetic controlling system, and the electromagnetic controlling system turns on or turns off voltage of the driving positive electrodes.

Abstract: An apparatus including a first device configured to support at least one substrate thereon; and a first transport having the device connected thereto. The transport is configured to carry the device. The transport includes a plurality of supports which are movable relative to one another along a linear path; at least one magnetic bearing which at least partially couples the supports to one another. A first one of the magnetic bearings includes a first permanent magnet and a second magnet. The first permanent magnet is connected to a first one of the supports. A magnetic field adjuster is connected to the first support which is configured to move the first permanent magnet and/or vary influence of a magnetic field of the first permanent magnet relative to the second magnet.

Abstract: There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers. A four-axis robot arm is disclosed, capable of linear translation, rotation and articulation, and z-motion.

Abstract: A linear motor control apparatus has: a plurality of coil units; a plurality of position detecting units for detecting positions of a plurality of trucks which move over the plurality of coil units; a plurality of deviation calculating units for operating deviation information as differences between the detected truck positions and a target position of the detected truck; a plurality of position control units for operating current control signals based on the deviation information; a plurality of current control units for supplying driving currents to the coil units based on the current control signals; and a switching unit for switching the position control units to which the deviation information is transmitted or switching the current control units to which the current control signals are transmitted.

Abstract: Apparatus for electromagnetic launching system for the linear acceleration of macro particles. The apparatus disclosed is autonomously-powered, compact, and lightweight. The apparatus disclosed has low recoil force, low acoustic report, and low visible and infra-red signature. The apparatus disclosed is capable of automatic operation and the maximum particle velocity can be adjusted. The apparatus disclosed includes a trigger, controller, component power source, particle container, particle loader, propellant container, propellant loader, igniter, combustion chamber, sound suppressor, linear electrical generator, linear electrical motor, and thermal barrier.

Abstract: A system for processing a substrate is provided including a first planar motor, a substrate carrier, a first processing chamber, and a first lift. The first planar motor includes a first arrangement of coils disposed along a first horizontal direction, a top surface parallel to the first horizontal direction, a first side, a second side. The substrate carrier has a substrate supporting surface parallel to the first horizontal direction. The first processing chamber has an opening to receive a substrate disposed on the substrate carrier. The first lift includes a second planar motor having a second arrangement of coils disposed along the first horizontal direction. A top surface top surface of the second planar motor is parallel to the first horizontal direction. The first lift is configured to move the top surface of the second planar motor between a first vertical location and a second vertical location.

Abstract: A device for moving aircraft along the ground includes at least one runway and at least one aircraft. The aircraft is secured to a tractor element having a magnetic mass formed mainly of type II superconductor material and the runway includes stator coils arranged in the runway with at least one line of coils parallel to an axis of the runway. A command/control system supplies power to the stator coils to generate a magnetic field that levitates the tractor element, magnetized beforehand into a phase II superconducting state, above the runway.

Abstract: A transport system is a vacuum processing system that includes a transport device that is provided in a vacuum, and a lubricating agent supply device that supplies lubricating agent to the transport device and provided in the ambient atmosphere. The transport device has a lubricating agent flow channel that is a channel for grease injected to a site subject to lubrication. The lubricating agent supply device has a grease server that stores a lubricating agent in the ambient atmosphere, a lubricating agent supply pipe which is a channel that guides the grease stored in the grease server to the lubricating agent flow channel and that connects the grease server and the lubricating agent flow channel, and an exhaust pump that exhausts the inside of the lubricating agent supply pipe.

Abstract: An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

Abstract: A device for loading and unloading the utility surface (3?) of a drying chamber (2) of a freeze drying system. The device includes a carriage (8) which forms a movable guiding edge for the drying vessels (5), and is moveable on guides (7) disposed on both sides of the utility surface (3) and which extend in parallel with the movement direction and form fixed guiding edges for the drying vessels (5). At least one linear motor is provided to produce a drive for the carriage. All of the components of the device can be located inside the drying chamber (1), and the device of the present invention is suitable for upgrading existing freeze drying systems.

Abstract: A transport device and a transport method for transporting a fragile object, in particular a semiconductor wafer, a glass panel, a solar module, etc., are provided. The transport device comprises at least two coils configured to drive the object along a predetermined movement path, and a control unit configured to control a movement of the object along the predetermined movement path. The control unit is further configured to base the control of the movement of the object on at least a third order setpoint profile. The control unit is also configured to generate the third order setpoint profile for at least two coils in a synchronized manner.

Abstract: A transport system comprising linear motor modules utilized both straight and curved track modules, with movers displaced on the track modules by control of power applied to coils of the modules. Curved track modules have modified spline geometries to provide desired acceleration and jerk characteristics. The modified spline geometries may be defined by more than one generators, such as an equation generator and a spline fit between the equation-generated segment and one or more constrained points or locations. The curved track modules may be divided into 180 degree modules, or may be reduced to 90 degree, 45 degree or other fractional arcs to provide for modular assembly, mirror-image geometries and motion profiles, and the like. The system may be adapted to provide improved motion characteristics based on modification of a conventional spline geometry.

Abstract: An electromagnetic tube gun is a device for launching a projectile through kinetic energy. The device features a first conductive rail with a first electrical current, a second conductive rail with a second electrical current, an at least one conductive sheet with a cross current, and a magnetic field induction coil with a third electrical current. The at least one conductive sheet connects the first conductive rail and the second conductive rail. The magnetic field induction coil is positioned within a projectile case and placed between the first conductive rail and the second conductive rail. A rail power supply is connected to the first conductive rail and the second conductive rail while a coil power supply is connected to the magnetic field induction coil. Magnetic induction generated by the magnetic field induction coil interacts with the cross current in order to generate a Lorentz force that launches the projectile case.

Abstract: Disclosed is an apparatus for transferring substrates capable of stably transferring substrates by using magnetic levitation. The apparatus includes a substrate stage including a substrate loading unit, a first guide block disposed at a first end of the substrate stage and including a first magnet generator, a second guide block disposed at a second end of the substrate stage and including a second magnet generator, a first guide rail accommodating the first magnet generator and including a third magnet generator, and a second guide rail accommodating the second magnet generator and including a fourth magnet generator. The first magnet generator and the third magnet generator exert repulsive force on each other, and the second magnet generator and the fourth magnet generator exert repulsive force on each other.

Abstract: A High Temperature Superconductor Maglev (HTSM) for Evacuated Tube Transport (ETT) with a magnetic levitation structure for ETT capsule vehicles traveling in an evacuated tube. At least one ETT capsule travels within an evacuated tube, an upper and a lower cryostat respectively mount at the top and bottom of said ETT capsule along the length thereof, at least a plurality of superconductor levitation force elements divided between said upper and lower cryostats. The levitation force being spread over the length of capsule, however substantially concentrated in a compact cross-sectional area. At least a pair of permanent magnetic elements mounted at the top and bottom of the evacuated tube to levitate the capsule. At least a pair of capsule based switchable diverge force elements cooperate with at least a pair of tube based diverge force elements to steer the capsule while in an interchange.

Abstract: A banked curve detection system determines the presence of a vehicle on a banked curve by sensing a vertical acceleration and a lateral acceleration of a vehicle. A banked curve is determined when the vertical acceleration and lateral acceleration are each greater than previously sensed vertical and lateral accelerations, the lateral acceleration is less than an expected reference lateral acceleration value, and the vertical acceleration is greater than gravity. The reference lateral acceleration value is based on yaw rate, steering angle, and wheel speed. When the acceleration conditions are met, the electronic stability control adjusts the parameters due to the vehicle being driven on a banked curve. Once the acceleration condition is no longer valid, the electronic stability control returns to normal operation.

Abstract: The invention provides in some aspects a transport system comprising a guideway having a plurality of regions in which one or more vehicles are propelled, where each such vehicle includes a magnet. Disposed along each region are a plurality of propulsion coils, each comprising one or more turns that are disposed about a common axis, such that the respective common axes of the plurality of coils in that region are (i) substantially aligned with one another, and (ii) orthogonal to a direction in which the vehicles are to be propelled in that region. The plurality of coils of at least one such region are disposed on opposing sides of the magnets of vehicles being propelled along that region so as to exert a propulsive force of substance on those magnets.

Abstract: A drive system for a transport apparatus includes a plurality of permanent magnets connected to the transport apparatus, a plurality of stationary windings exposed to a field of at least one of the plurality of permanent magnets, a control system for energizing the stationary windings to provide magnetic force on the transport apparatus, and an arrangement of ferromagnetic components proximate at least one side of the transport apparatus for providing passive stabilization of lift, pitch, and roll of the transport apparatus.

Abstract: A transport system comprising linear motor modules utilized both straight and curved track modules, with movers displaced on the track modules by control of power applied to coils of the modules. Curved track modules have modified spline geometries to provide desired acceleration and jerk characteristics. The modified spline geometries may be defined by more than one generators, such as an equation generator and a spline fit between the equation-generated segment and one or more constrained points or locations. The curved track modules may be divided into 180 degree modules, or may be reduced to 90 degree, 45 degree or other fractional arcs to provide for modular assembly, mirror-image geometries and motion profiles, and the like. The system may be adapted to provide improved motion characteristics based on modification of a conventional spline geometry.

Abstract: The automobile described herein employs an aerodynamic chassis control system to limit and/or control the affect of yaw and roll created by environmental and operating conditions on an automobile with minimal penalty to improve ride comfort and performance of the automobile. The aerodynamic chassis control system employs various movable stabilization elements to control yaw and roll. Moreover, aerodynamic chassis control system constantly monitors environmental and operating conditions of the automobile and adjusts the stabilization elements to provide ride comfort and automobile performance.

Abstract: Transportation infrastructure comprises linear induction drives wherein a roadway surface is induced to simultaneously exert forward, lateral, levitation and three axis angular alignment forces on a vehicle and wherein a vehicle is capable of inducing roadway surface currents that produce said forces in said roadway surface. Comprehensive system sustains continuous traffic flow from the point of entering the infrastructure to the moment of disembarking in a parking facility. Transportation infrastructure comprises integration of air and space travel with substantially reduced cost and transit time.

Abstract: A dynamic magnetic suspension propeller includes an separate body electromotor and an external force to reversely rotate the separate body electromotor. The separate body electromotor includes a stator and a rotor mounted separately, wherein the stator includes a single layer plane magnetic path having magnetism, the rotor includes a cantilever electromagnet having a first pole provided at an end portion of the cantilever and a second pole provided at a rotating shaft close to the cantilever, wherein the electromagnet is reversely rotated by the external force around the rotating shaft with respect to the stator, so as to produce a countertorque with respect to an magnetic force of the stator, wherein the countertorque includes a magnetic suspension force and a magnetic propelling force.

Abstract: Transportation infrastructure comprises linear induction drives wherein a roadway surface is induced to simultaneously exert forward, lateral, levitation and three axis angular alignment forces on a vehicle and wherein a vehicle is capable of inducing roadway surface currents that produce said forces in said roadway surface. Comprehensive system sustains continuous traffic flow from the point of entering the infrastructure to the moment of disembarking in a parking facility. Transportation infrastructure comprises integration of air and space travel with substantially reduced cost and transit time.

Abstract: A method and system for magnetically levitating a load is disclosed. One embodiment of the invention is a system for magnetically levitating a load, the system comprising at least two lift generators, each comprising a source of magnetic flux configured to induce a magnetic flux in a rail via a leg on either side of the rail, at least one magnetically permeable beam connecting the lift generators, and control circuitry configured to generate and modulate a magnetic current flux through the crossbeam so as to maintain gaps between the legs and rail, wherein the gaps defined by the legs on either side of the rail are of unequal size.

Abstract: The invention relates to a magnetic levitation vehicle (11) and to a method for lifting said magnetic levitation vehicle (11) and to lowering said magnetic levitation vehicle onto a roadway. According to the invention, the carrier magnetic units (38) of the magnetic levitation vehicle (11) are not all activated or deactivated at the same time but at different times in order to keep the current energy requirement from an external energy supply or main power supply to a minimum.

Abstract: The invention relates to a maglev railway comprising a support and drive system of the long stator-linear motor type, magnetic support poles that are situated in the vehicle being additionally provided with linear generator windings (10) that generate electric energy in the vehicle. The aim of the invention is to prevent unwanted, periodic vibrations (ripples) from being generated at low speeds. To achieve this, according to the invention, the teeth (5) and grooves (6) of the long stator (3) are arranged in high-speed sections (2a) parallel to the cores and the linear generator windings (10) of the support magnets provided in said cores and in low-speed sections (2b) obliquely to said cores (7) and linear generator windings.

Abstract: A magnetic levitation device includes at least two superconductor molded bodies with stored magnetic field configurations above a magnetic guide track. The at least two superconductor molded bodies have at least one of a stored magnetic field configuration with different vertical spacing from the guide track and a stored magnetic field configuration with different horizontal position with respect to the guide track. The at least two superconductor molded bodies are mechanically held in a position deviating from their stored position above the guide track and connected to one another. This abstract is not intended to define the invention disclosed in the specification, nor intended to limit the scope of the invention in any way.

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract: A maglev vehicle is provided including a nose and/or tail section (1, 1b) containing a plurality of guidance magnets (FM1 to FM6) which are formed of cores (15) and windings (24) wound onto said cores and connected to control circuits (17). The guidance magnets (e.g. FM1 to FM3) are provided with an at least partially higher number of windings (24) in a front zone of the nose section (1) in relation to the direction of travel (v) or in the rear zone of the tail section (1b) in relation to the direction of travel (v).

Abstract: A method provides for the traction control of a maglev car on a maglev track. A levitation magnetic field is produced by supplying a levitation magnetic flux on the car side to at least two levitation magnets to produce a defined air gap between the maglev car and a reaction rail on the track side. A stator current is supplied to the stator to produce a propulsion force on the maglev track, the propulsion force acts upon the maglev car being determined by the magnetic coupling between the magnetic stator field and the magnetic levitation field. An oscillating movement of the maglev car in relation to the magnetic stator field is dampened by changing the magnetic coupling between the magnetic stator field and the magnetic levitation field on the car side. The levitation magnets are operated on the car side with at least two different individual levitation magnetic fluxes.

Abstract: A method for operation of a magnetic levitation railway which contains vehicles with a plurality of supporting magnets (20a . . . 20j) and supporting runners (26) associated with them. In the event of a malfunction, the braking of the vehicle with the drive and braking systems switched off is brought about or assisted until a preselected destination stopping point is reached solely in that, even before the destination stopping point is reached, at least one of the supporting magnets (for example 20f, 20g) is switched off, and the magnetic levitation vehicle is placed on the track path (3) by means of the associated supporting runner (26), and is brought to rest at the destination stopping point by making use of the friction forces that occur as a result. A magnetic levitation vehicle is provided and operated in this way.

Abstract: A magnetic levitation railway having an eddy-current brake (20) cooperates with a reaction rail (8) of the driveway (2). The eddy-current brake (20) has at least one brake magnet (21) which is movably mounted to the vehicle (1) and transversely to the reaction rail (8) and which is made to abut the reaction rail (8) if a normal force, for example, fixed by means of springs (27) is exceeded.

Abstract: A system for controlling movements of a vehicle along a guideway includes an array of targets that are mounted on the vehicle, and a series of wayside sensors that are mounted on the guideway. A signal processor monitors the passage of targets past appropriate sensors and uses resultant signals to derive parametric values that are characteristic of the vehicle's movements. The parametric values are then coordinated with a controller for the operation of a linear synchronous motor that propels the vehicle.

Abstract: A magnetic levitation vehicle has at least one magnetic arrangement (27). The magnetic arrangement (27) contains a plurality of magnetic poles (27a . . . 27n) which are arranged one behind the other in the direction of travel and comprise windings (33) associated therewith. The magnetic levitation vehicle is also provided with a circuit for supplying the windings (33) with a direct current, said circuit containing switches for selectively switching the magnetic arrangement between a guiding function and/or a braking function.

Abstract: The networked guideway transit system uses materials and methods of constructing guideway elements. The materials and methods are designed to reduce the static weight, cost and physical size of the guideway structure. Installation cost is also significantly reduced by the modular nature of the guideway components, which can be manufactured in a controlled factory environment using mass production methods. As a result, the supporting structure of the guideway can be quickly erected and the modular blocks inserted with simple equipment. In addition, complex alignment procedures are not required. In particular, the guideway component includes motor coils having the shapes and configurations that facilitate the easy insertion of the guideway component without the need for interleaving coils in adjacent guideway components and without creating dead spots in the magnetic fields between guideway components.

Abstract: The invention relates to a linear permanent magnet driving system and a permanent magnet driving maglev train rail system, the linear permanent magnet driving system comprises spiral rotors and stators, wherein at least one of the spiral rotor and the stator adopts the structure having a permanent magnet while the other one adopts the structure having the permanent magnet or a magnetizer; when the spiral rotors are driven by an engine to rotate, linear motion of the spiral rotors is achieved by means of the magnetic force between both, and speed of the linear motion of the spiral rotors can reach supersonic speed at most. By applying the linear permanent magnet driving system to the permanent magnet driving maglev train rail system, the entire rail can avoid the use of both permanent magnet and driving coil, and the construction cost of maglev train rail is equivalent to that of the current high-speed wheel/rail.

Abstract: A self-regulating magneto-dynamic system, utilizing steel core rails and permanent magnets as sources of magnetic field, provided for magnetic levitation, stabilization and propulsion in a high speed ground transportation vehicle moving with high speed without friction along a track having a predetermined trajectory, comprising of a self-regulating magneto-dynamic levitation and stabilizing system (MDLSS) provided for magnetic levitation and stabilization of the vehicle, and a permanent magnet linear synchronous motor (PMLSM) provided for stable propulsion of the vehicle. Both systems are situated on the same vehicle, interacting with each other only through electro-magnetic process, working synchronously, supporting each other's stability and self-regulation, where the stability of the MDLSS affects the functionality of the PMLSM, and the precise work of the PMLSM allows for more optimum design of the MDLSS.

Abstract: Providing an accelerating device capable of safely and efficiently accelerating an aircraft even if the aircraft is a high-speed and heavyweight one. The accelerating device has a support base for supporting an aircraft so that it does not go backward or levitate and does not pitch; a guide way placed along a predetermined route; guide means for guiding the support base along the guide way; and drive means for driving the support base along the guide way.

Abstract: A method and system for magnetically levitating a load is disclosed. One embodiment of the invention is a system for magnetically levitating a load, the system comprising at least two lift generators, each comprising a source of magnetic flux configured to induce a magnetic flux in a rail via a leg on either side of the rail, at least one magnetically permeable beam connecting the lift generators, and control circuitry configured to generate and modulate a magnetic current flux through the crossbeam so as to maintain gaps between the legs and rail, wherein the gaps defined by the legs on either side of the rail are of unequal size.

Abstract: An apparatus and method of generating motion including a track having at least one incline portion and at least one decline portion, a cart movably coupled to the track, and one or more magnets arranged along the track such that cart moves along the track by a combination of gravitational and magnetic forces. The motion generator may be used as a power source for a motor or electric generator.

Abstract: The invention relates to a magnetic levitation vehicle (1) with a plurality of driving- and braking magnets. According to the invention, provided in the vehicle (1) there is at least one chain of magnet units (15, 16, 19, 26, 25) having in a first plane exclusively driving magnet coils (20 to 22, 27, 28) and in a second plain exclusively braking magnets (30), wherein at least the driving magnet coils (20 to 22, 27, 28) form a band of magnetic flux extending across the entire length of the vehicle. However, a magnet unit (15) located at the front end (2) of the magnetic levitation vehicle (1) forms an exception to this.

Abstract: A magnetic levitation railways has at least one vehicle, a compressed air supply unit provided in the vehicle and at least one consumer connection line, the compressed air supply unit has at least two compressed air lines laid in the vehicle and connected to at least one compressed air source each, and the consumer connection line can be connected to one another of the compressed air lines.

Abstract: The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.