Gas Or Vapor State Precursor Or Overpressure Patents (Class 117/77)
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Patent number: 10252363Abstract: Forming a solder joint between metal layers by preparing a structure having solder material placed between two metal layers and heating the structure to grow an intermetallic compound in a space between the two metal layers. Growing the intermetallic compound includes setting a first surface, in contact with the solder material between the two metal layers, to a first temperature, thereby enabling growth of the intermetallic compound; setting a second surface, in contact with the solder material between the two metal layers, to a second temperature, wherein the second temperature is higher than the first temperature; and maintaining a temperature gradient (temperature/unit thickness) between the two metal layers at a predetermined value or higher until the intermetallic compound substantially fills the space between the two metal layers.Type: GrantFiled: January 10, 2017Date of Patent: April 9, 2019Assignee: International Business Machines CorporationInventors: Toyohiro Aoki, Akihiro Horibe, Hiroyuki Mori, Yasumitsu Orii, Kazushige Toriyama, Ting-Li Yang
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Patent number: 10008620Abstract: The method of making a gallium antimonide near infrared photodetector is a physical vapor deposition-based method of forming a thin film of gallium antimonide (GaSb) on a mica substrate for use as a photodetector for light in the near infrared range. Following physical vapor deposition (PVD) of the thin film of GaSb on the mica substrate, a pair of spaced apart electrodes is attached to the thin film of GaSb, thus forming the gallium antimonide near infrared photodetector.Type: GrantFiled: March 16, 2017Date of Patent: June 26, 2018Assignee: UNITED ARAB EMIRATES UNIVERSITYInventors: Adel Najar, Muhammad Shafa
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Method of growing GaN whiskers from a gallium-containing solvent at low pressure and low temperature
Patent number: 8999060Abstract: Millimeter-scale GaN single crystals in filamentary form, also known as GaN whiskers, grown from solution and a process for preparing the same at moderate temperatures and near atmospheric pressures are provided. GaN whiskers can be grown from a GaN source in a reaction vessel subjected to a temperature gradient at nitrogen pressure. The GaN source can be formed in situ as part of an exchange reaction or can be preexisting GaN material. The GaN source is dissolved in a solvent and precipitates out of the solution as millimeter-scale single crystal filaments as a result of the applied temperature gradient.Type: GrantFiled: March 12, 2013Date of Patent: April 7, 2015Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Boris N. Feigelson, Jennifer K. Hite, Francis J. Kub, Charles R. Eddy, Jr. -
Patent number: 8858908Abstract: A method of producing an n-type group III nitride single crystal includes putting raw materials that include at least a substance including a group III element, an alkali metal, and boron oxide into a reaction vessel; melting the boron oxide by heating the reaction vessel to a melting point of the boron oxide; forming a mixed melt which includes the group III element, the alkali metal, and the boron oxide, in the reaction vessel by heating the reaction vessel to a crystal growth temperature of a group III nitride; dissolving nitrogen into the mixed melt by bringing a nitrogen-containing gas into contact with the mixed melt; and growing an n-type group III nitride single crystal, which is doped with oxygen as a donor, from the group III element, the nitrogen, and oxygen in the boron oxide that are dissolved in the mixed melt.Type: GrantFiled: August 30, 2011Date of Patent: October 14, 2014Assignee: Ricoh Company, Ltd.Inventor: Hirokazu Iwata
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Publication number: 20140271439Abstract: A group 13 nitride crystal of hexagonal crystal including at least one or more metal atom selected from the group consisting of B, Al, Ga, In, and Tl, and a nitrogen atom, the group 13 nitride crystal comprises: a first region provided on the inner side of a cross section crossing a c-axis; a third region provided on an outermost side of the cross section; a second region provided between the first region and the third region at the cross section and having characteristics different from characteristics of the first region and the third region, wherein a shape formed by a boundary between the first region and the second region at the cross section is non-hexagonal.Type: ApplicationFiled: March 13, 2014Publication date: September 18, 2014Applicant: RICOH COMPANY, LTD.Inventors: JUNICHI WADA, MASAHIRO HAYASHI, SHINSUKE MIYAKE, NAOYA MIYOSHI, SEIJI SARAYAMA
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Publication number: 20140261157Abstract: A method for producing a group 13 nitride crystal, comprises a crystal growth step of reacting nitrogen and a mixed melt containing at least a group 13 metal and at least one of an alkali metal and an alkaline earth metal, in the mixed melt, to grow a nitride crystal on a seed crystal, wherein at least one of the mixed melt and the seed crystal is rotated in the crystal growth step, a relative speed between the mixed melt and the seed crystal in the crystal growth step is repeatedly fluctuated in accordance with one or a plurality of types of predetermined patterns, and a maximum value of the relative speed indicated by the pattern is 0.01 m/s or more.Type: ApplicationFiled: March 4, 2014Publication date: September 18, 2014Applicant: RICOH COMPANY, LTD.Inventors: Takashi Satoh, Seiji Sarayama, Masahiro Hayashi, Naoya Miyoshi
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Patent number: 8784560Abstract: A method for producing a crystallized compound semiconductor material comprises synthesizing said material by fusion and inter-reaction of its constituents placed in elementary form constituting a charge into a sealed ampoule, and then crystallizing the resulting material in liquid form by cooling.Type: GrantFiled: February 16, 2011Date of Patent: July 22, 2014Assignee: Societe Francaise de Detecteurs Infrarouges-SofradirInventors: Sylvain Paltrier, Thierry Miguet
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Publication number: 20140144373Abstract: A method for synthesizing I-III-VI2 compounds, including: melting a Group III element; adding a Group I element to the melted Group III element at a rate that allows the Group I and Group III elements to react thereby providing a single phase I-III compound; and adding a Group VI element to the single phase I-III compound under heat, with mixing, and/or via vapor transport. The Group III element is melted at a temperature of between about 200 degrees C. and about 700 degrees C. Preferably, the Group I element consists of a neutron absorber and the group III element consists of In or Ga. The Group VI element and the single phase I-III compound are heated to a temperature of between about 700 degrees C. and about 1000 degrees C. Preferably, the Group VI element consists of S, Se, or Te. Optionally, the method also includes doping with a Group IV element activator.Type: ApplicationFiled: October 23, 2012Publication date: May 29, 2014Applicants: Fisk University, Babcock & Wilcox Technical Services Y-12, L.L.C., Attn: Mike RennerInventors: Bacock & Wilcox Technical Services Y-12, L.L.C., Fisk University
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Publication number: 20140147953Abstract: A film 3 of a nitride of a group 13 element is grown on a seed crystal substrate 11 by flux process from a melt containing a flux and the group 13 element under nitrogen containing atmosphere. The film 3 of the nitride of the group 13 element includes an inclusion distributed layer 3a in a region distant from an interface 11a of the film 3 of the nitride of the group 13 element on the side of the seed crystal substrate 11 and containing inclusions derived from components of the melt, and an inclusion depleted layer 3b, with the inclusion depleted. provided on the layer 3a. Laser light A is irradiated from the side of the back face 1b of the seed crystal substrate 11 to peel the single crystal 3 of the nitride of the group 13 element from the seed crystal substrate 11 by laser lift-off method.Type: ApplicationFiled: January 29, 2014Publication date: May 29, 2014Applicant: NGK INSULATORS, LTD.Inventors: Makoto Iwai, Takayuki Hirao, Takashi Yoshino
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Patent number: 8735905Abstract: Provided is a method for producing inexpensive and high-quality aluminum nitride crystals. Gas containing N atoms is introduced into a melt of a Ga—Al alloy, whereby aluminum nitride crystals are made to epitaxially grow on a seed crystal substrate in the melt of the Ga—Al alloy. A growth temperature of aluminum nitride crystals is set at not less than 1000 degrees C. and not more than 1500 degrees C., thereby allowing GaN to be decomposed into Ga metal and nitrogen gas.Type: GrantFiled: July 14, 2011Date of Patent: May 27, 2014Assignees: Sumitomo Metal Mining Co., Ltd., Tohoku UniversityInventors: Hiroyuki Fukuyama, Masayoshi Adachi, Akikazu Tanaka, Kazuo Maeda
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Patent number: 8679248Abstract: Millimeter-scale GaN single crystals in filamentary form, also known as GaN whiskers, grown from solution and a process for preparing the same at moderate temperatures and near atmospheric pressures are provided. GaN whiskers can be grown from a GaN source in a reaction vessel subjected to a temperature gradient at nitrogen pressure. The GaN source can be formed in situ as part of an exchange reaction or can be preexisting GaN material. The GaN source is dissolved in a solvent and precipitates out of the solution as millimeter-scale single crystal filaments as a result of the applied temperature gradient.Type: GrantFiled: November 23, 2010Date of Patent: March 25, 2014Assignee: The United States of America, as represented by the Secretary of the NavyInventors: Boris N. Feigelson, Jennifer K. Hite, Francis J. Kub, Charles R. Eddy, Jr.
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Patent number: 8574361Abstract: A method for producing a high-quality group-III element nitride crystal at a high crystal growth rate, and a group-III element nitride crystal are provided. The method includes the steps of placing a group-III element, an alkali metal, and a seed crystal of group-III element nitride in a crystal growth vessel, pressurizing and heating the crystal growth vessel in an atmosphere of nitrogen-containing gas, and causing the group-III element and nitrogen to react with each other in a melt of the group-III element, the alkali metal and the nitrogen so that a group-III element nitride crystal is grown using the seed crystal as a nucleus. A hydrocarbon having a boiling point higher than the melting point of the alkali metal is added before the pressurization and heating of the crystal growth vessel.Type: GrantFiled: March 5, 2008Date of Patent: November 5, 2013Assignee: Ricoh Company, Ltd.Inventors: Osamu Yamada, Hisashi Minemoto, Kouichi Hiranaka, Takeshi Hatakeyama, Takatomo Sasaki, Yusuke Mori, Fumio Kawamura, Yasuo Kitaoka
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Patent number: 8568532Abstract: Materials of a nitride single crystal of a metal belonging to III group and a flux are contained in a crucible, which is contained in a reaction container, the reaction container is contained in an outer container, the outer container is contained in a pressure container, and nitrogen-containing atmosphere is supplied into the outer container and melt is generated in the crucible to grow a nitride single crystal of a metal belonging to III group. The reaction container includes a main body containing the crucible and a lid. The main body includes a side wall having a fitting face and a groove opening at the fitting face and a bottom wall. The lid has an upper plate part including a contact face for the fitting face of the main body and a flange part extending from the upper plate part and surrounding an outer side of said side wall.Type: GrantFiled: December 9, 2011Date of Patent: October 29, 2013Assignees: NGK Insulators, Ltd.Inventors: Makoto Iwai, Shuhei Higashihara, Yusuke Mori, Yasuo Kitaoka, Naoya Miyoshi
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Patent number: 8512470Abstract: A method for growing high-resistivity single crystals includes placing a raw material in a vacuum-sealable ampoule, heating the raw material in the vacuum-sealable ampoule to vaporize the moisture in the raw material, exhausting the vaporized moisture from the vacuum-sealable ampoule, vacuum-sealing the vacuum-sealable ampoule, heating the raw material in the vacuum-sealable ampoule to vaporize the oxide compounds in the raw material, cooling a bulb in a cap on the vacuum-sealable ampoule to produce condensed oxide compounds on an inner surface of the bulb, removing the bulb and the condensed oxide compounds from the vacuum-sealable ampoule, wherein the raw material in the vacuum-sealable ampoule comprises carbon as an impurity, and placing the vacuum-sealable ampoule comprising the raw material in a crystal growth apparatus to grow a high-resistivity crystal from the raw material.Type: GrantFiled: April 8, 2011Date of Patent: August 20, 2013Assignee: China Crystal Technologies Co. LtdInventor: Meng Zhu
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Publication number: 20130206056Abstract: A method of producing a crystalline semiconductor material includes feeding particles of the semiconductor material and/or a precursor compound of the semiconductor material into a gas flow, wherein the gas flow has a sufficiently high temperature to convert the particles of the semiconductor material from a solid into a liquid and/or gaseous state and/or to thermally decompose the precursor compound, condensing out and/or separating the liquid semiconductor material from the gas flow, and converting the liquid semiconductor material to a solid state with formation of mono- or polycrystalline crystal properties.Type: ApplicationFiled: April 11, 2011Publication date: August 15, 2013Applicant: SCHMID SILICON TECHNOLOGY GMBHInventors: Uwe Kerat, Christian Schmid, Jochem Hahn
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Patent number: 8486190Abstract: A raw material mixture containing an easily oxidizable material is weighed. The raw material mixture is melted and then solidified within a reaction vessel 1 set in a non-oxidizing atmosphere to thereby produce a solidified matter 19. The reaction vessel 1 and the solidified matter 19 are heated in a non-oxidizing atmosphere within a crystal growth apparatus to melt the solidified matter to thereby produce a solution. A single crystal is grown from the solution.Type: GrantFiled: September 22, 2008Date of Patent: July 16, 2013Assignees: NGK Insulators, Ltd., Osaka UniversityInventors: Katsuhiro Imai, Makoto Iwai, Takatomo Sasaki, Yusuke Mori, Fumio Kawamura
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Patent number: 8449672Abstract: This disclosure pertains to a process for making single crystal Group III nitride, particularly gallium nitride, at low pressure and temperature, in the region of the phase diagram of Group III nitride where Group III nitride is thermodynamically stable comprises a charge in the reaction vessel of (a) Group III nitride material as a source, (b) a barrier of solvent interposed between said source of Group III nitride and the deposition site, the solvent being prepared from the lithium nitride (Li3N) combined with barium fluoride (BaF2), or lithium nitride combined with barium fluoride and lithium fluoride (LiF) composition, heating the solvent to render it molten, dissolution of the source of GaN material in the molten solvent and following precipitation of GaN single crystals either self seeded or on the seed, maintaining conditions and then precipitating out.Type: GrantFiled: April 25, 2008Date of Patent: May 28, 2013Assignee: The United States of America as represented by the Secretary of the NavyInventors: Boris N. Feigelson, Richard L. Henry
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Publication number: 20130104799Abstract: A shroud is provided. The shroud may include: a body defining a hollow space within the body, wherein the body is open at a bottom portion of the body to permit fluid communication between the hollow space and the outside of the body; an inlet and an outlet providing fluid communication through the body to the hollow space; a top portion of the body configured to provide a barrier between the hollow space and the outside of the body; and a baffle plate attached to the bottom portion of the body. A method for adding silicon to a silicon melt may be provided.Type: ApplicationFiled: December 16, 2011Publication date: May 2, 2013Applicant: SPX CorporationInventors: Richard H. BERG, Richard D. HECKERT
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Publication number: 20130069078Abstract: A crystal producing apparatus includes a crystal forming unit and a crystal growing unit. The crystal forming unit forms a first gallium nitride (GaN) crystal by supplying nitride gas into melt mixture containing metal sodium (Na) and metal gallium (Ga). The first GaN crystal is sliced and polished to form GaN wafers. The crystal growing unit grows a second GaN crystal on a substrate formed by using a GaN wafer, by the hydride vapor phase epitaxy method, thus producing a bulked GaN crystal.Type: ApplicationFiled: November 16, 2012Publication date: March 21, 2013Inventors: Seiji Sarayama, Hirokazu Iwata
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Patent number: 8398767Abstract: Bulk mono-crystalline gallium-containing nitride, grown on the seed at least in the direction essentially perpendicular to the direction of the seed growth, essentially without propagation of crystalline defects as present in the seed, having the dislocation density not exceeding 104/cm2 and considerably lower compared to the dislocation density of the seed, and having a large curvature radius of the crystalline lattice, preferably longer than 15 m, more preferably longer than 30 m, and most preferably of about 70 m, considerably longer than the curvature radius of the crystalline lattice of the seed.Type: GrantFiled: June 10, 2005Date of Patent: March 19, 2013Assignees: Ammono S.A., Nichia CorporationInventors: Robert Dwilinski, Roman Doradzinski, Jerzy Garczynski, Leszek Sierzputowski, Yasuo Kanbara, Robert Kucharski
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Patent number: 8337617Abstract: A method for manufacturing a group III nitride crystal on a seed crystal in a holding vessel holding therein a melt containing a group III metal, an alkali metal and nitrogen. The manufacturing method comprises the steps of causing the seed crystal to make a contact with the melt, setting an environment of the seed crystal to a first state offset from a crystal growth condition while in a state in which said seed crystal is in contact with the melt, increasing a nitrogen concentration in the melt, and setting the environment of the seed crystal to a second state suitable for crystal growth when the nitrogen concentration of the melt has reached a concentration suitable for growing the seed crystal.Type: GrantFiled: March 13, 2006Date of Patent: December 25, 2012Assignee: Ricoh Company, Ltd.Inventors: Hirokazu Iwata, Seiji Sarayama, Minoru Fukuda, Tetsuya Takahashi, Akira Takahashi
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Patent number: 8323405Abstract: An apparatus and associated method for large-scale manufacturing of gallium nitride is provided. The apparatus comprises a large diameter autoclave and a raw material basket. Methods include metered addition of dopants in the raw material and control of the atmosphere during crystal growth. The apparatus and methods are scalable up to very large volumes and are cost effective.Type: GrantFiled: August 3, 2009Date of Patent: December 4, 2012Assignee: Soraa, Inc.Inventor: Mark P. D'Evelyn
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Publication number: 20120260848Abstract: The invention discloses a single crystal growth method for a vertical high temperature and high pressure group III-V compound. A vertical high temperature and high pressure stove is capable of providing a group III element fusion zone with a temperature equal to or greater than that of a composition melting point and providing a group V element provision zone below the group III element fusion zone. The stove provides steam to the group III element fusion zone and the group V element provision zone at a temperature greater than evaporation temperature. The compound synthesis of a group III element and a group V element is completed in the group III element fusion zone, and an in-situ growth of single crystal is completed in the group III element fusion zone, thereby preventing the growth of the rich group III element and increasing the single crystal process efficiency.Type: ApplicationFiled: April 11, 2012Publication date: October 18, 2012Applicants: Zhi He, DingTen Industrial Inc. (Taiwan company)Inventors: Zhi He, Xiao-Yu Hu
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Publication number: 20120137961Abstract: Materials of a nitride single crystal of a metal belonging to III group and a flux are contained in a crucible, which is contained in a reaction container, the reaction container is contained in an outer container, the outer container is contained in a pressure container, and nitrogen-containing atmosphere is supplied into the outer container and melt is generated in the crucible to grow a nitride single crystal of a metal belonging to III group. The reaction container includes a main body containing the crucible and a lid. The main body includes a side wall having a fitting face and a groove opening at the fitting face and a bottom wall. The lid has an upper plate part including a contact face for the fitting face of the main body and a flange part extending from the upper plate part and surrounding an outer side of said side wall.Type: ApplicationFiled: December 9, 2011Publication date: June 7, 2012Inventors: Makoto Iwai, Shuhei Higashihara, Yusuke Mori, Yasuo Kitaoka, Naoya Miyoshi
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Publication number: 20120049137Abstract: A method of producing an n-type group III nitride single crystal includes putting raw materials that include at least a substance including a group III element, an alkali metal, and boron oxide into a reaction vessel; melting the boron oxide by heating the reaction vessel to a melting point of the boron oxide; forming a mixed melt which includes the group III element, the alkali metal, and the boron oxide, in the reaction vessel by heating the reaction vessel to a crystal growth temperature of a group III nitride; dissolving nitrogen into the mixed melt by bringing a nitrogen-containing gas into contact with the mixed melt; and growing an n-type group III nitride single crystal, which is doped with oxygen as a donor, from the group III element, the nitrogen, and oxygen in the boron oxide that are dissolved in the mixed melt.Type: ApplicationFiled: August 30, 2011Publication date: March 1, 2012Applicant: RICOH COMPANY, LTD.Inventor: Hirokazu Iwata
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Patent number: 8123856Abstract: In the flux method, a source nitrogen gas is sufficiently heated before feeding to an Na—Ga mixture. The apparatus of the invention is provided for producing a group III nitride based compound semiconductor. The apparatus includes a reactor which maintains a group III metal and a metal differing from the group III metal in a molten state, a heating apparatus for heating the reactor, an outer vessel for accommodating the reactor and the heating apparatus, and a feed pipe for feeding a gas containing at least nitrogen from the outside of the outer vessel into the reactor. The feed pipe has a zone for being heated together with the reactor by means of the heating apparatus, wherein the zone is heated inside the outer vessel and outside the reactor.Type: GrantFiled: April 5, 2007Date of Patent: February 28, 2012Assignees: Toyoda Gosei Co., Ltd., NGK Insulators, Ltd., Osaka UniversityInventors: Shiro Yamazaki, Makoto Iwai, Takanao Shimodaira, Takatomo Sasaki, Yusuke Mori, Fumio Kawamura
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Patent number: 8088220Abstract: In accordance with various embodiments, crystalline structures are formed by providing, at a growth temperature, a liquid comprising AlN and having a quality factor greater than approximately 0.14 and forming solid AlN from the liquid, the growth temperature being lower than the melting point of AlN.Type: GrantFiled: May 23, 2008Date of Patent: January 3, 2012Assignee: Crystal IS, Inc.Inventors: Glen A. Slack, Sandra B. Schujman
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Publication number: 20110259261Abstract: It is provided a method of growing a single crystal by flux process from a melt containing sodium, in that a flux is contained in a reaction vessel made of yttrium-aluminum garnet. Compared with the case that an alumina or yttria vessel is used, it can be successfully obtained a single crystal whose incorporation amounts of oxygen and silicon can be considerably reduced, residual carrier density can be lowered, and electron mobility and specific resistance can be improved.Type: ApplicationFiled: July 6, 2011Publication date: October 27, 2011Applicants: NGK Insulators, Ltd., Osaka University, Toyoda Gosei Co., Ltd.Inventors: Makoto IWAI, Shuhei Higashihara, Yasuo Kitaoka, Yusuke Mori, Takayuki Sato, Seiji Nagai
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Patent number: 8021481Abstract: A method for large-scale manufacturing of gallium nitride includes a process for reducing and/or minimizing contamination in the crystals, for solvent addition to an autoclave, for improving or optimizing the solvent atmosphere composition, for removal of the solvent from the autoclave, and for recycling of the solvent. The method is scalable up to large volumes and is cost effective.Type: GrantFiled: August 4, 2009Date of Patent: September 20, 2011Assignee: Soraa, Inc.Inventor: Mark P. D'Evelyn
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Patent number: 7955582Abstract: A method for producing crystallized silicon according to the EFG process by using a shaping part, between which part and a silicon melt, crystallized silicon grows in a growth zone. Inert gas and at least water vapor are fed into the silicon melt and/or growth zone, by means of which the oxygen content of the crystallized silicon is increased. From 50 to 250 ppm of vapor water is added to the inert gas, and the inert gas has an oxygen, CO and/or CO2 content of less than 20 ppm total.Type: GrantFiled: December 14, 2007Date of Patent: June 7, 2011Assignee: Schott Solar GmbHInventors: Albrecht Seidl, Ingo Schwirtlich
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Patent number: 7883645Abstract: The present invention relates to a method for increasing the conversion of group III metal to group III nitride in a fused metal containing group III elements, with the introduction of nitrogen into the fused metal containing group III, at temperatures?1100° C. and at pressures of below 1×108 Pa, wherein a solvent adjunct is added to the fused metal containing group III elements, which is at least one element of the following elements C, Si, Ge, Fe, and/or at least one element of the rare earths, or an alloy or a compound of these elements, in particular their nitrides.Type: GrantFiled: October 4, 2005Date of Patent: February 8, 2011Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.Inventors: Jochen Friedrich, Georg Muller, Elke Meissner, Bernhard Birkmann, Stephan Hussy
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Patent number: 7871590Abstract: A solidified mass for a high-purity multicrystal silicon material that is preferably applicable to producing crystal type silicon ingots for photo voltaics, and a process for producing the solidified mass are provided. The mass of silicon solidified from molten state is a solidified mass produced by dropping molten silicon into a receiving vessel and allowing the vessel to receive the molten silicon, said solidified mass containing bubbles and having (i) an apparent density of not less than 1.5 g/cm3 and not more than 2.2 g/cm3 and (ii) a compressive strength of not less than 5 MPa and not more than 50 MPa. The process for producing a mass of silicon solidified from molten state includes the steps of dropping molten silicon into a receiving vessel and allowing the vessel to receive the molten silicon, wherein the surface temperature of the vessel for receiving the molten silicon is not lower than 0° C. and not higher than 1000° C.Type: GrantFiled: May 23, 2005Date of Patent: January 18, 2011Assignee: Tokuyama CorporationInventors: Satoru Wakamatsu, Junichirou Nakashima, Shigeki Sugimura
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Publication number: 20100329959Abstract: A method for purifying silicon wherein silicon is crystallized from a solvent metal. The method comprises the steps of providing a molten liquid containing silicon, a solvent metal and impurities, cooling the molten liquid to form first silicon crystals and a first mother liquor, separating the first silicon crystals from the first mother liquor, contacting the first silicon crystals with compound which will dissolve the first mother liquor and separating the washed crystals from the wash solution.Type: ApplicationFiled: July 23, 2008Publication date: December 30, 2010Applicant: 6N Silicon Inc.Inventors: Scott Nichol, Jian J. Chen
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Publication number: 20100260656Abstract: When a group III nitride crystal is grown in a pressurized atmosphere of a nitrogen-containing gas from a melt 50 including at least a group III element, nitrogen and an alkali metal or an alkali earth metal, a melt-holding vessel 160 that holds the above-described melt 50 is swung about two axes different in direction from each other such as an x-axis and a Y-axis.Type: ApplicationFiled: November 27, 2008Publication date: October 14, 2010Applicant: PANASONIC CORPORATIONInventors: Hisashi Minemoto, Osamu Yamada, Takeshi Hatakeyama, Hiroaki Hoshikawa, Yasunori Tokunou
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Patent number: 7811380Abstract: A process for obtaining bulk mono-crystalline gallium-containing nitride, liminating impurities from the obtained crystal and manufacturing substrates made of bulk mono-crystalline gallium-containing nitride has been now proposed.Type: GrantFiled: December 11, 2003Date of Patent: October 12, 2010Assignees: Ammono Sp. z o.o., Nichia CorporationInventors: Robert Dwilinski, Roman Doradzinski, Jerzy Garczynski, Leszek Sierzputowski, Yasuo Kanbara
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Publication number: 20100229787Abstract: A crystal manufacturing apparatus for manufacturing a group III nitride crystal includes a crucible that holds a mixed molten liquid including an alkali metal and a group III metal; a reaction vessel accommodating the crucible in the reaction vessel; a heating device that heats the crucible with the reaction vessel; a holding vessel having a lid that is capable of opening and closing, accommodating the reaction vessel and the heating device in the holding vessel; a sealed vessel accommodating the holding vessel in the sealed vessel, having an operating device that enables opening the lid of the holding vessel for supplying source materials into the crucible and taking out a manufactured GaN crystal under a sealed condition, and closing the lid of the holding vessel that is sealed in the sealed vessel, the sealed vessel including an inert gas atmosphere or a nitrogen atmosphere; and a gas supplying device for supplying a nitrogen gas to the mixed molten liquid through each of the vessels.Type: ApplicationFiled: March 29, 2010Publication date: September 16, 2010Inventors: Seiji Sarayama, Hirokazu Iwata
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Patent number: 7794539Abstract: A method for producing Group-III-element nitride crystals by which an improved growth rate is obtained and large high-quality crystals can be grown in a short time, a producing apparatus used therein, and a semiconductor element obtained using the method and the apparatus are provided. The method is a method for producing Group-III-element nitride crystals that includes a crystal growth process of subjecting a material solution containing a Group III element, nitrogen, and at least one of alkali metal and alkaline-earth metal to pressurizing and heating under an atmosphere of a nitrogen-containing gas so that the nitrogen and the Group III element in the material solution react with each other to grow crystals.Type: GrantFiled: March 31, 2005Date of Patent: September 14, 2010Assignees: Panasonic CorporationInventors: Hisashi Minemoto, Yasuo Kitaoka, Isao Kidoguchi, Yusuke Mori, Fumio Kawamura, Takatomo Sasaki, Yasuhito Takahashi
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Publication number: 20100192839Abstract: A group III element nitride single crystal is grown on a template immersed in a raw material liquid retained in a crucible and containing a group III material and one of an alkali metal and an alkali earth metal. The raw material liquid remaining after the growth of the single crystal is cooled and solidified, and by feeding a hydroxyl group-containing solution into the crucible, the solidified raw material is removed from around the template, and thus the group III element nitride single crystal is taken out from inside the solidified raw material. The template is disposed at a position away from the bottom of the crucible.Type: ApplicationFiled: September 26, 2008Publication date: August 5, 2010Applicant: PANASONIC CORPORATIONInventors: Takeshi Hatakeyama, Hisashi Minemoto, Kouichi Hiranaka, Osamu Yamada
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Publication number: 20100189624Abstract: Affords group III nitride crystal growth methods enabling crystal to be grown in bulk by a liquid-phase technique. One such method of growing group III nitride crystal from solution is provided with: a step of preparing a substrate having a principal face and including at least on its principal-face side a group III nitride seed crystal having the same chemical composition as the group III nitride crystal, and whose average density of threading dislocations along the principal face being 5×106 cm?2 or less; and a step of bringing into contact with the principal face of the substrate a solution in which a nitrogen-containing gas is dissolved into a group III metal-containing solvent, to grow group III nitride crystal onto the principal face.Type: ApplicationFiled: January 26, 2009Publication date: July 29, 2010Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.Inventors: Shinsuke Fujiwara, Hiroaki Yoshida, Ryu Hirota, Koji Uematsu, Haruko Tanaka
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Patent number: 7713352Abstract: A process is provided to produce bulk quantities of nanowires in a variety of semiconductor materials. Thin films and droplets of low-melting metals such as gallium, indium, bismuth, and aluminum are used to dissolve and to produce nanowires. The dissolution of solutes can be achieved by using a solid source of solute and low-melting metal, or using a vapor phase source of solute and low-melting metal. The resulting nanowires range in size from 1 nanometer up to 1 micron in diameter and lengths ranging from 1 nanometer to several hundred nanometers or microns. This process does not require the use of metals such as gold and iron in the form of clusters whose size determines the resulting nanowire size. In addition, the process allows for a lower growth temperature, better control over size and size distribution, and better control over the composition and purity of the nanowire produced therefrom.Type: GrantFiled: September 14, 2006Date of Patent: May 11, 2010Assignee: University of Louisville Research Foundation, Inc.Inventors: Mahendra Kumar Sunkara, Shashank Sharma, Hari Chandrasekaran, Hongwei Li, Sreeram Vaddiraju
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Publication number: 20100078606Abstract: A method for producing a high-quality group-III element nitride crystal at a high crystal growth rate, and a group-III element nitride crystal are provided. The method includes the steps of placing a group-III element, an alkali metal, and a seed crystal of group-III element nitride in a crystal growth vessel, pressurizing and heating the crystal growth vessel in an atmosphere of nitrogen-containing gas, and causing the group-III element and nitrogen to react with each other in a melt of the group-III element, the alkali metal and the nitrogen so that a group-III element nitride crystal is grown using the seed crystal as a nucleus. A hydrocarbon having a boiling point higher than the melting point of the alkali metal is added before the pressurization and heating of the crystal growth vessel.Type: ApplicationFiled: March 5, 2008Publication date: April 1, 2010Inventors: Osamu Yamada, Hisashi Minemoto, Kouichi Hiranaka, Takeshi Hatakeyama, Takatomo Sasaki, Yusuke Mori, Fumio Kawamura, Yasuo Kitaoka
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Patent number: 7670430Abstract: It is provided a method for gently and safely recovering only sodium metal from a flux containing sodium metal in a short time and in a reusable form. Flux 23 is heated in a medium 19 unreactive with sodium metal 22 at a temperature equal to or higher than the melting point of sodium metal to separate and recover the sodium metal 22 from the flux 23. The medium is a hydrocarbon, for example.Type: GrantFiled: August 5, 2008Date of Patent: March 2, 2010Assignee: NGK Insulators, Ltd.Inventors: Mikiya Ichimura, Katsuhiro Imai
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Patent number: 7615203Abstract: A single crystal diamond grown by vapor phase synthesis, wherein when one main surface is irradiated with a linearly polarized light considered to be the synthesis of two mutually perpendicular linearly polarized light beams, the phase difference between the two mutually perpendicular linearly polarized light beams exiting another main surface on the opposite side is, at a maximum, not more than 50 nm per 100 ?m of crystal thickness over the entire crystal. This single crystal diamond is of a large size and high quality unattainable up to now, and has characteristics that are extremely desirable in semiconductor device substrates and are applied to optical components of which low strain is required.Type: GrantFiled: May 26, 2005Date of Patent: November 10, 2009Assignee: Sumitomo Electric Industries, Ltd.Inventors: Yoshiyuki Yamamoto, Kiichi Meguro, Takahiro Imai
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Publication number: 20090261345Abstract: A compliant substrate having a reduced stress, a method for manufacturing the same having a reduced manufacturing time, a gallium nitride based compound semiconductor device including the compliant substrate and a method for manufacturing the same are disclosed. The compliant substrate is manufactured by heating a substrate and a group III metal including at least one of an aluminum, a gallium and an indium, and a chloride based compound generated by introducing a HCl gas to the melted group III metal reacts with a NH3 gas to form a nitride based thin film on the wafer.Type: ApplicationFiled: July 21, 2006Publication date: October 22, 2009Inventors: Yong Sung Jin, Jae Hak Lee
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Publication number: 20090145350Abstract: According to an dopant-injection method for injecting volatilized dopant gas into semiconductor melt in a crucible (31), the crucible (31) is rotated alternately clockwise and counterclockwise around a support shaft (36) extending in a flowing direction of the dopant gas, so that the dopant gas is blown against the semiconductor melt white the crucible is rotated. Rotating the crucible (31) causes convection currents in the semiconductor melt therein, thereby facilitating diffusion of the blown dopant in the semiconductor melt.Type: ApplicationFiled: September 27, 2007Publication date: June 11, 2009Applicant: SUMCO TECHXIV CORPORATIONInventors: Yasuhito Narushima, Fukuo Ogawa, Shinichi Kawazoe, Toshimichi Kubota
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Publication number: 20090139446Abstract: Provided is a process in which a polycrystalline silicon ingot improved in life time characteristics, which are correlated with the conversion efficiency of solar wafers, is inexpensively produced by the ordinary-pressure hydrogen-atmosphere melting method. In the process, the generation of oxygen and impurities in the silicon melt is inhibited and light-element impurities are removed through reaction or crystallization. Fine crystal grains can be grown at a high rate, and a high-purity polycrystalline silicon ingot having a crystal structure reduced in crystal defect can be grown. A silicon raw material is melted in an atmosphere of 100% hydrogen at ordinary pressure or an elevated pressure to prepare a silicon melt and simultaneously dissolve hydrogen in the silicon melt. The silicon melt containing hydrogen dissolved therein is solidified.Type: ApplicationFiled: November 30, 2005Publication date: June 4, 2009Applicants: Space Energy Corporation, Noritake TCF Co., Ltd.Inventors: Yoshimichi Kimura, Yuichi Sakai
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Publication number: 20090126623Abstract: The present invention provides an apparatus for producing a Group III nitride semiconductor, which enables production of a uniform Si-doped GaN crystal. In one embodiment of the invention, an apparatus for producing a Group III nitride semiconductor includes a supply tube for supplying nitrogen and silane, a Ga-supplying apparatus for supplying Ga melt to a crucible, and an Na-supplying apparatus for supplying Na melt to the crucible. Nitrogen and a dopant is mixed together, and the gas mixture is supplied through one single supply tube without provision of a conventionally employed supply tube for only supplying a dopant. Thus, dead space in a reaction vessel is reduced, and vaporization of Na is suppressed, whereby a high-quality, Si-doped GaN crystal can be produced.Type: ApplicationFiled: November 3, 2008Publication date: May 21, 2009Applicant: TOYODA GOSEI CO., LTD.Inventor: Shiro Yamazaki
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Patent number: 7531038Abstract: A group-III nitride crystal growth method comprises the steps of: a) preparing a mixed molten liquid of an alkaline material and a substance at least containing a group-III metal; b) causing growth of a group-III nitride crystal from the mixed molten liquid prepared in the step a) and a substance at least containing nitrogen; and c) creating a state in which nitrogen can be introduced into the molten liquid prepared by the step a).Type: GrantFiled: December 14, 2005Date of Patent: May 12, 2009Assignee: Ricoh Company, Ltd.Inventors: Seiji Sarayama, Hisanori Yamane, Masahiko Shimada, Masafumi Kumano, Hirokazu Iwata, Takashi Araki
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Patent number: RE40662Abstract: A method of preparing a compound semiconductor crystal is able to dope the crystal with carbon with high reproducibility. The method includes the steps of sealing a carbon oxide gas of a predetermined partial pressure and a compound semiconductor material in a gas-impermeable airtight vessel, increasing the temperature of the vessel to melt the compound semiconductor material sealed in the vessel, and then decreasing the temperature of the vessel to solidify the melted compound semiconductor material to grow a compound semiconductor crystal containing a predetermined amount of carbon. With this method, a compound semiconductor crystal with a carbon concentration of 0.1×1015cm?3 to 20×1015cm?3 is prepared with high reproducibility.Type: GrantFiled: August 13, 2003Date of Patent: March 17, 2009Assignee: Sumitomo Electric Industries, Ltd.Inventors: Tomohiro Kawase, Shinichi Sawada, Masami Tatsumi
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Patent number: RE42279Abstract: A method of preparing a compound semiconductor crystal is able to dope the crystal with carbon with high reproducibility. The method includes the steps of sealing a carbon oxide gas of a predetermined partial pressure and a compound semiconductor material in a gas-impermeable airtight vessel, increasing the temperature of the vessel to melt the compound semiconductor material sealed in the vessel, and then decreasing the temperature of the vessel to solidify the melted compound semiconductor material to grow a compound semiconductor crystal containing a predetermined amount of carbon. With this method, a compound semiconductor crystal with a carbon concentration of 0.1×1015cm?3 to 20×1015cm?3 is prepared with high reproducibility.Type: GrantFiled: December 22, 2008Date of Patent: April 12, 2011Assignee: Sumitomo Electric Industries, Ltd.Inventors: Tomohiro Kawase, Shinichi Sawada, Masami Tatsumi