Specified Orientation, Shape, Crystallography, Or Size Of Seed Or Substrate Patents (Class 117/902)
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Patent number: 11946155Abstract: A crucible for growing a single-crystal in which a raw material melt for growing the single-crystal is solidified while being accommodated includes a side wall part configured to surround the raw material melt and a bottom part configured to support the raw material melt while being continuous with the side wall part, in which the side wall part has circumferential length redundancy inside the side wall part in a cross-sectional view. The side wall part has a portion where the circumference length is redundant inside any portion in the cross-sectional view, and when the crucible for growing a single-crystal is cooled in a cooling process after the single-crystal growth, the portion where the circumference length is redundant inside in the cross-sectional view is expanded to an outside of the crucible for growing a single-crystal.Type: GrantFiled: December 3, 2019Date of Patent: April 2, 2024Assignee: TDK CORPORATIONInventors: Katsumi Kawasaki, Jun Hirabayashi, Minoru Fujita, Daisuke Inokuchi, Jun Arima, Makio Kondo
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Patent number: 10950462Abstract: A diamond substrate producing method includes a belt-shaped separation layer forming step of applying a laser beam to a diamond ingot as relatively moving the ingot and a focal point of the laser beam in a [110]-direction perpendicular to a (110)-plane, thereby forming a belt-shaped separation layer extending in the [110]-direction inside the ingot, an indexing step of relatively moving the ingot and the focal point in an indexing direction parallel to a (001)-plane and perpendicular to the [110]-direction, a planar separation layer forming step of repeating the belt-shaped separation layer forming step and the indexing step to thereby form a planar separation layer parallel to the (001)-plane inside the ingot, the planar separation layer being composed of a plurality of belt-shaped separation layers arranged side by side in the indexing direction, and a separating step of separating a substrate from the diamond ingot along the planar separation layer.Type: GrantFiled: September 26, 2019Date of Patent: March 16, 2021Assignee: DISCO CORPORATIONInventors: Asahi Nomoto, Kazuya Hirata
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Patent number: 10732674Abstract: A flexible display device and a method of manufacturing the same are provided. The flexible display device comprises a first flexible substrate including a display area including an organic light emitting layer, and a peripheral circuit area, and a second flexible substrate coming in contact with the first flexible substrate and including a pattern for facilitating bending thereof, wherein the second flexible substrate has a certain shape according to the pattern, and the first flexible substrate has a shape corresponding to the certain shape. Various embodiments of the present invention provide a flexible display device capable of realizing a narrow bezel-type or bezel-free display device and simultaneously realizing improved types of design, facilitating bending of a bezel area so as to realize a narrow bezel-type or bezel-free display device, and minimizing damage to an area to be bent.Type: GrantFiled: November 16, 2016Date of Patent: August 4, 2020Assignee: LG Display Co., Ltd.Inventors: Chanwoo Lee, JongHyun Park, TaeWoo Kim, Jaekyung Choi, Sangcheon Youn, SungJoon Min, SeYeoul Kwon, KwonHyung Lee
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Patent number: 10246796Abstract: A RAMO4 substrate containing an RAMO4 base material part containing a single crystal represented by the general formula RAMO4 (wherein R represents one or a plurality of trivalent elements selected from a group of elements including: Sc, In, Y, and a lanthanoid element, A represents one or a plurality of trivalent elements selected from a group of elements including: Fe(III), Ga, and Al, and M represents one or a plurality of divalent elements selected from a group of elements including: Mg, Mn, Fe(II), Co, Cu, Zn, and Cd), the RAMO4 base material part having a beveled portion at an edge portion thereof.Type: GrantFiled: February 10, 2017Date of Patent: April 2, 2019Assignee: Panasonic Intellectual Property Management Co., Ltd.Inventors: Isao Tashiro, Hidenao Kataoka, Yoshio Okayama, Nobuyuki Yokoyama, Yoshifumi Takasu
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Patent number: 9631269Abstract: A method for manufacturing a solid-state battery device. The method can include providing a substrate within a process region of an apparatus. A cathode source and an anode source can be subjected to one or more energy sources to transfer thermal energy into a portion of the source materials to evaporate into a vapor phase. An ionic species from an ion source can be introduced and a thickness of solid-state battery materials can be formed overlying the surface region by interacting the gaseous species derived from the plurality of electrons and the ionic species. During formation of the thickness of the solid-state battery materials, the surface region can be maintained in a vacuum environment from about 10?6 to 10?4 Torr. Active materials comprising cathode, electrolyte, and anode with non-reactive species can be deposited for the formation of modified modulus layers, such a void or voided porous like materials.Type: GrantFiled: August 6, 2015Date of Patent: April 25, 2017Assignee: Sakti3, Inc.Inventors: Myoungdo Chung, Hyoncheol Kim, Ann Marie Sastry, Marc Langlois
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Patent number: 9631297Abstract: Provided is a method of producing an epitaxial silicon wafer which has high flatness at the peripheral portion and an epitaxial silicon wafer obtained by the method. In the method of producing an epitaxial silicon wafer, an epitaxial layer is formed on the top surface of a silicon wafer with a chamfered end having a width of 200 ?m or less, which surface has a surface orientation of the (100) plane or the (110) plane.Type: GrantFiled: July 24, 2013Date of Patent: April 25, 2017Assignee: SUMCO CORPORATIONInventors: Kazuhiro Narahara, Sumihisa Masuda
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Patent number: 8980003Abstract: In a method of manufacturing a silicon carbide single crystal, a silicon carbide substrate having a surface of one of a (11-2n) plane and a (1-10n) plane, where n is any integer number greater than or equal to 0, is prepared. An epitaxial layer having a predetermined impurity concentration is grown on the one of the (11-2n) plane and the (1-10n) plane of the silicon carbide substrate by a chemical vapor deposition method so that a threading dislocation is discharged from a side surface of the epitaxial layer. A silicon carbide single crystal is grown into a bulk shape by a sublimation method on the one of the (11-2n) plane and the (1-10n) plane of the epitaxial layer from which the threading dislocation is discharged.Type: GrantFiled: February 9, 2010Date of Patent: March 17, 2015Assignee: DENSO CORPORATIONInventors: Hiroki Watanabe, Yasuo Kitou, Masami Naito
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Patent number: 8945304Abstract: A system and method A method of growing an elongate nanoelement from a growth surface includes: a) cleaning a growth surface on a base element; b) providing an ultrahigh vacuum reaction environment over the cleaned growth surface; c) generating a reactive gas of an atomic material to be used in forming the nanoelement; d) projecting a stream of the reactive gas at the growth surface within the reactive environment while maintaining a vacuum of at most 1×10?4 Pascal; e) growing the elongate nanoelement from the growth surface within the environment while maintaining the pressure of step c); f) after a desired length of nanoelement is attained within the environment, stopping direction of reactive gas into the environment; and g) returning the environment to an ultrahigh vacuum condition.Type: GrantFiled: August 13, 2008Date of Patent: February 3, 2015Assignee: The Board of Regents of the Nevada System of Higher Education on behalf of the University of Nevada, Las Vegas University of NevadaInventors: Biswajit Das, Myung B. Lee
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Patent number: 8888914Abstract: The object is to provide a photoelectric surface member which allows higher quantum efficiency. In order to achieve this object, a photoelectric surface member 1a is a crystalline layer formed by a nitride type semiconductor material, and comprises a nitride semiconductor crystal layer 10 where the direction from the first surface 101 to the second surface 102 is the negative c polar direction of the crystal, an adhesive layer 12 formed along the first surface 101 of the nitride semiconductor crystal layer 10, and a glass substrate 14 which is adhesively fixed to the adhesive layer 12 such that the adhesive layer 12 is located between the glass substrate 14 and the nitride semiconductor crystal layer 10.Type: GrantFiled: April 16, 2010Date of Patent: November 18, 2014Assignee: Hamamatsu Photonics K.K.Inventors: Tokuaki Nihashi, Masatomo Sumiya, Minoru Hagino, Shunro Fuke
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Patent number: 8653722Abstract: The present disclosure provides a manufacturing method of a quartz-crystal device, in which its lid and base is manufactured with smaller thermal expansion coefficient between AT-cut quartz-crystal wafer.Type: GrantFiled: August 1, 2011Date of Patent: February 18, 2014Assignee: Nihon Dempa Kogyo Co., Ltd.Inventor: Shuichi Mizusawa
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Patent number: 8197598Abstract: A method for making iron silicide nano-wires comprises the following steps. Firstly, providing a growing substrate and a growing device, the growing device comprising a heating apparatus and a reacting room. Secondly, placing the growing substrate and a quantity of iron powder into the reacting room. Thirdly, introducing a silicon-containing gas into the reacting room. Finally, heating the reacting room to a temperature of 600˜1200° C.Type: GrantFiled: November 6, 2008Date of Patent: June 12, 2012Assignees: Tsinghua University, Hon Hai Precision Industry Co., Ltd.Inventors: Hai-Lin Sun, Kai-Li Jiang, Qun-Qing Li, Shou-Shan Fan
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Patent number: 8152919Abstract: An epitaxial silicon wafer is provided in which an epitaxial layer is grown on a silicon wafer having a plane inclined from a {110} plane of a silicon single crystal as a main surface. In the silicon wafer for growing the epitaxial layer thereon, an inclination angle azimuth of the {110} plane is in the range of 0 to 45 degrees as measured from a <100> orientation parallel to the {110} plane toward a <100> direction. With such an arrangement, LPDs of 100 nm or less can be measured from a {110} wafer that has a carrier mobility (including the hole and electron mobilities) higher than that of a {100} wafer. Also, surface roughness degradation in the {110} wafer can be suppressed. Also, the surface state of the {110} wafer can be measured. Further, a quality evaluation can be performed on the {110} wafer.Type: GrantFiled: June 20, 2011Date of Patent: April 10, 2012Assignee: Sumco CorporationInventors: Takayuki Dohi, Shinji Nakahara, Masaya Sakurai, Masato Sakai
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Patent number: 7993453Abstract: A method for the production of an SiC single crystal includes the steps of growing a first SiC single crystal in a first direction of growth on a first seed crystal formed of an SiC single crystal, disposing the first SiC single crystal grown on the first seed crystal in a direction parallel or oblique to the first direction of growth and cutting the disposed first SiC single crystal in a direction of a major axis in a cross section perpendicular to the first direction of growth to obtain a second seed crystal, using the second seed crystal to grow thereon in a second direction of growth a second SiC single crystal to a thickness greater than a length of the major axis in the cross section, disposing the second SiC single crystal grown on the second seed crystal in a direction parallel or oblique to the second direction of growth and cutting the disposed second SiC single crystal in a direction of a major axis in a cross section perpendicular to the second direction of growth to obtain a third seed crystal, uType: GrantFiled: May 10, 2007Date of Patent: August 9, 2011Assignee: Showa Denko K.K.Inventors: Naoki Oyanagi, Tomohiro Syounai, Yasuyuki Sakaguchi
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Patent number: 7879161Abstract: A warm-rolled, annealed, polycrystalline, cube-textured, {100}<100>, FCC-based alloy substrate is characterized by a yield strength greater than 200 MPa and a biaxial texture characterized by a FWHM of less than 15° in all directions.Type: GrantFiled: August 8, 2007Date of Patent: February 1, 2011Assignee: UT-Battelle, LLCInventor: Amit Goyal
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Patent number: 7825409Abstract: A GaN crystal substrate has a crystal growth surface on which a crystal is grown, and a rear surface opposite to the crystal growth surface. The crystal growth surface has a roughness Ra(C)of at most 10 nm, and the rear surface has a roughness Ra(R) of at least 0.5 ?m and at most 10 ?m. A ratio Ra(R)/Ra(C) of the surface roughness Ra(R) to the surface roughness Ra(C) is at least 50. Thus, a GaN crystal substrate of which front and rear surfaces are distinguishable from each other is provided, without impairing the morphology of a semiconductor layer grown on the GaN crystal substrate.Type: GrantFiled: April 3, 2007Date of Patent: November 2, 2010Assignee: Sumitomo Electric Industries, Ltd.Inventors: Shunsuke Fujita, Hitoshi Kasai
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Patent number: 7815736Abstract: An apparatus for supporting a single crystal during Czochralski crystal pulling below a thickened crystal neck has lower bearing surface(s) with a central opening inscribable with a horizontal circle of diameter D1, centered on a vertical axis, the bearing surface(s) connected by connecting element(s) to minimally one securing element for securing to a crystal pulling lifting device, the connecting elements arranged to provide a clear-space in the region above the bearing surface(s) in which a circle of diameter D2 centered on the vertical axis (D2>D1) is inscribable over a length of the vertical axis. The unitary apparatus is useful for crystal ingot growth by immersion into the semiconductor melt prior to growth of a Dash neck and a thickening of the Dash neck. The apparatus is then raised to support the crystal by bearing against the bottom of the thickening.Type: GrantFiled: August 24, 2006Date of Patent: October 19, 2010Assignee: Siltronic AGInventor: Dieter Knerer
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Patent number: 7799158Abstract: A method for producing a crystallographically-oriented ceramic includes the steps of forming a first sheet with a thickness of 10 ?m or less containing a first inorganic material in which grain growth occurs at a first temperature or higher and a second sheet containing a second inorganic material in which grain growth occurs at a second temperature higher than the first temperature, laminating one or more each of the first and second sheets to form a laminated body, firing the laminated body at a temperature equal to or higher than the first temperature and lower than the second temperature to cause grain growth in the first inorganic material, and then firing the laminated body at a temperature equal to or higher than the second temperature to cause grain growth in the second inorganic material in the direction of a crystal plane of the first inorganic material.Type: GrantFiled: January 14, 2008Date of Patent: September 21, 2010Assignee: NGK Insulators, Ltd.Inventors: Shohei Yokoyama, Nobuyuki Kobayashi, Tsutomu Nanataki
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Patent number: 7736435Abstract: A method for producing a single crystals by preferential epitaxial growth of {100} face, comprising the steps of (1) growing the crystal on a single crystal {100} substrate; (2) forming on the side of the grown crystal a surface parallel to a {100} face different from the {100}face in the growth direction, and (3) growing the crystal on the formed {100} surface; and the steps (2) and (3) being performed once or more than once. A method for producing a single-crystal diamond using a metallic holder for the single-crystal diamond having a crystal holding portion which is raised above an outer peripheral portion of the holder, is part from the outer peripheral portion of the holder, and has a recessed shape. The methods enable the production of a large single-crystal diamond in a comparatively short time at low cost.Type: GrantFiled: November 16, 2005Date of Patent: June 15, 2010Assignee: National Institute of Advanced Industrial Science and TechnologyInventors: Yoshiaki Mokuno, Akiyoshi Chayahara, Yuji Horino, Naoji Fujimori
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Patent number: 7686886Abstract: A method for forming a structure of a desired cross-section on a substrate is provided. The method provides a seed structure comprising at least one support layer on the substrate. The support layer has a geometric shape related to the desired cross-section of the structure and is diffusive to a precursor constituent. The method further includes growing the structure by supplying at least one precursor constituent on the substrate. The desired cross-section of the structure is defined by the geometric shape of at least one support layer.Type: GrantFiled: September 26, 2006Date of Patent: March 30, 2010Assignee: International Business Machines CorporationInventors: Walter H Riess, Heike E Riel, Siegfried F Karg, Heinz Schmid
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Patent number: 7674737Abstract: An optical medium having a high refractive index without anisotropy and a wide transmission wavelength is obtained. The cubic crystal material is ??O3, where ? is at least one of K, Ba, Sr, Ca, and ? is at least one of Ta, Ti. Optimally, the cubic crystal material is KTa1-xNbxO3, where composition x is 0?x?0.35. This composition enables to raise refractive index while its phase transition temperature is below a room temperature.Type: GrantFiled: June 22, 2005Date of Patent: March 9, 2010Assignee: Nippon Telegraph and Telephone CorporationInventors: Kazuo Fujiura, Tadayuki Imai, Masahiro Sasaura, Kouichirou Nakamura
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Patent number: 7670933Abstract: A method for growing high quality, nonpolar Group III nitrides using lateral growth from Group III nitride nanowires. The method of nanowire-templated lateral epitaxial growth (NTLEG) employs crystallographically aligned, substantially vertical Group III nitride nanowire arrays grown by metal-catalyzed metal-organic chemical vapor deposition (MOCVD) as templates for the lateral growth and coalescence of virtually crack-free Group III nitride films. This method requires no patterning or separate nitride growth step.Type: GrantFiled: October 3, 2007Date of Patent: March 2, 2010Assignee: Sandia CorporationInventors: George T. Wang, Qiming Li, J. Randall Creighton
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Patent number: 7594967Abstract: A semiconductor structure including a cap layer formed over a semiconductor substrate having a rough edge, which discourages formation of dislocation pile-up defects.Type: GrantFiled: October 10, 2002Date of Patent: September 29, 2009Assignee: AmberWave Systems CorporationInventors: Christopher J. Vineis, Richard Westhoff, Mayank Bulsara
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Patent number: 7489441Abstract: An optical component has a substrate, on which at least one curved substrate surface is formed that defines an optical axis of the optical component, wherein the substrate surface is coated with a multilayer coating that is active in the ultraviolet region at a design wavelength ?0 and includes a first layer, applied to the substrate surface, made from a first dielectric material and at least one second layer, applied to the first layer, made from a second dielectric material. The substrate consists essentially of a crystal material that has an axially parallel crystal direction, running parallel to the optical axis, and edge crystal directions perpendicular to edge regions of the curved substrate surface. An angle between the axially parallel crystal direction and the edge crystal directions is at least 17°, and the first layer has an essentially untextured layer structure. An anisotropy, caused by the substrate structure, in the optical properties of the multilayer coating can thereby be avoided.Type: GrantFiled: May 17, 2005Date of Patent: February 10, 2009Assignee: Carl Zeiss SMT AGInventors: Guenter Scheible, legal representative, Sigrid Scheible, legal representative, Harald Schink, Alexander Hirnet, Patrick Scheible
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Patent number: 7449134Abstract: Noble crystal of 4-dimethylamino-4-stilbazolium tosylate (DAST) useful as an electro-optical element. A DAST crystal having a size effective for use as an electro-optical element is provided by a twin crystal of DAST. The twin crystal of DAST can be obtained according to a seed crystallization method or a slope crystal growing method.Type: GrantFiled: July 21, 2006Date of Patent: November 11, 2008Assignees: Daiichi Pure Chemicals Co., Ltd., Daiichi Pharmaceutical Co., Ltd.Inventors: Atsushi Izumi, Yuta Ochiai, Shinsuke Umegaki, Tomo Iwamura, Makoto Suzuki, Hidetaka Sakurai, Shinji Yamaguchi
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Patent number: 7396404Abstract: The present disclosure provides methods for forging cylindrical alkali halide melt-grown single-crystal-type ingots into rectangular blocks. The resulting rectangular blocks are devoid of peripheral cracks and fissures, and possess uniform properties and reduced levels of impurities.Type: GrantFiled: November 17, 2006Date of Patent: July 8, 2008Assignee: Siemens Medical Solutions USA, Inc.Inventors: Olexy V. Radkevich, Efim Toutchinskii, Yuriy Yakovlev, Robert S. Zwolinski
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Patent number: 7390359Abstract: A nitride semiconductor substrate having properties preferable for the manufacture of various nitride semiconductor devices is made available, by specifying or controlling the local variation in the off-axis angle of the principal surface of the nitride semiconductor substrate. In a nitride semiconductor single-crystal wafer having a flat principal surface, the crystallographic plane orientation of the principal surface of the nitride semiconductor single-crystal wafer varies locally within a predetermined angular range.Type: GrantFiled: December 19, 2006Date of Patent: June 24, 2008Assignee: Sumitomo Electric Industries, Ltd.Inventors: Michimasa Miyanaga, Koji Uematsu, Takuji Okahisa
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Patent number: 7357837Abstract: The method of making a GaN single crystal substrate comprises a mask layer forming step of forming on a GaAs substrate 2 a mask layer 8 having a plurality of opening windows 10 disposed separate from each other; and an epitaxial layer growing step of growing on the mask layer 8 an epitaxial layer 12 made of GaN.Type: GrantFiled: October 24, 2003Date of Patent: April 15, 2008Assignee: Sumitomo Electric Industries, Ltd.Inventors: Kensaku Motoki, Takuji Okahisa, Naoki Matsumoto
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Patent number: 7342225Abstract: A system (70) for crystallography including a sample holder (74), an electron source (76) for generating an electron beam, and a scanning actuator (80) for controlling the relative movement between the electron beam and the crystalline sample, the scanning actuator being controllable for directing the electron beam at a series of spaced apart points within the sample area. The system also includes an image processor (84) for generating crystallographic data based upon electron diffraction from the crystalline sample and for determining whether sufficient data have been acquired to characterize the sample area. The system further includes a controller (86) for controlling the scanning actuator to space the points apart such that acquired data is representative of a different grains within the crystalline sample. IN other embodiments, the invention includes one or more ion beams (178, 188) for crystallography and a combination ion beam/electron beam (218, 228).Type: GrantFiled: February 24, 2003Date of Patent: March 11, 2008Assignee: Agere Systems, Inc.Inventors: Erik C. Houge, Brian Kempshall, Stephen M. Schwarz, Fred A. Stevie
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Patent number: 7323053Abstract: It is an object of the present invention to provide a pulling-down apparatus that can breed a crystal having good characteristics of scintillation. The apparatus retains in a container that can control an atmosphere a melting pot having a narrow hole at the bottom side thereof, an induction heating device, and a seed-holding device that holds a seed and is pulled down so that a crystal formed successively to the seed is pulled down. Concurrently, imaging devices are arranged that can pick up images of a solid-liquid interface between the crystal and a melt material, from different directions, and the seed-holding device can be travel along directions perpendicular to respective image pickup directions in a horizontal plane.Type: GrantFiled: January 23, 2006Date of Patent: January 29, 2008Assignee: TDK CorporationInventors: Kazushige Tohta, Kou Onodera, Takeshi Ito, Tsuguo Fukuda, Akira Yoshikawa
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Patent number: 7306675Abstract: A method for manufacturing a semiconductor substrate of the present invention includes the steps of: (a) providing a support substrate; (b) epitaxially growing a first semiconductor layer on the support substrate; (c) epitaxially growing a second semiconductor layer on the first semiconductor layer; and (d) forming a semiconductor substrate including the first semiconductor layer and the second semiconductor layer by removing the support substrate, wherein an interatomic distance of atoms of the support substrate to which atoms of the first semiconductor layer attach and an interatomic distance of atoms of the second semiconductor layer have the same magnitude relationship with respect to an interatomic distance of the atoms of the first semiconductor layer in an epitaxial growth plane.Type: GrantFiled: May 15, 2002Date of Patent: December 11, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventor: Masaaki Yuri
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Patent number: 7285168Abstract: For the measurement, orientation and fixation of at least one single crystal, it is the object of the invention to ensure increased accuracy in the determination of crystallographic orientation and oriented fixation regardless of the outer geometry of the single crystals, and the fixation should guarantee a highly accurate cutting also with very hard materials such as sapphire or silicon carbide. The single crystal is adjustably positioned on a revolving table for determining the crystal lattice orientation, wherein the crystal lattice orientation is determined during at least one revolution of the revolving table based on a plurality of x-ray reflections. The orientation of the crystal lattice is carried out with reference to the determined angles of the normal of the lattice plane relative to the axis (X-X) of the revolving table as reference direction before carrying out the fixation of the single crystal and the fastening on a support oriented in reference direction.Type: GrantFiled: December 3, 2004Date of Patent: October 23, 2007Assignee: EFG Elektrotechnische Fabrikations-und Grosshandelsgesellschaft mnBInventors: Hans Bradaczek, Hans Berger, Hartmut Schwabe
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Patent number: 7258743Abstract: This invention relates to a process for controlling the orientation of secondary structures (A1, A2) with at least a crystalline part during the transfer of secondary structures from a primary structure (A) on which the secondary structures have an initial crystalline orientation identical to the orientation of the primary structure, onto at least one support structure (B), the process comprising: a) the formation of at least one orientation mark (Va, Va1, Va2) when the secondary structures are fixed to the primary structure (A), the mark having an arbitrary orientation with respect to the said initial crystalline orientation, but identical for each secondary structure, and b) when a set of secondary structures is transferred onto at least one support structure (B), an arrangement of the secondary structures so that their orientation marks can be oriented in a controlled manner.Type: GrantFiled: June 20, 2002Date of Patent: August 21, 2007Assignee: Commissariat A L'Energie AtomiqueInventors: Franck Fournel, Bernard Aspar, Hubert Moriceau
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Patent number: 7226506Abstract: A method for eliminating slip dislocations in producing single crystal silicon, a seed crystal capable of eliminating the slip dislocations, a single crystal silicon ingot from which the slip dislocations have been eliminated and a single crystal silicon wafer, are disclosed. Single crystal silicon is produced by dipping a seed crystal in a melt and pulling the seed crystal up along the axis of the seed crystal, using a single crystal (1) in which the <110> crystal orientation (10) is inclined at a predetermined angle ? with respect to the axial direction (9) so that the edge direction (8) of the {111} crystal plane is inclined with respect to the axial direction (9). When single crystal silicon is grown while pulling up a seed crystal by the CZ method, a single crystal silicon ingot of a large diameter and a heavy weight can be pulled up by eliminating slip dislocations from the thick crystal.Type: GrantFiled: April 17, 2003Date of Patent: June 5, 2007Assignee: Sumco Techxiv CorporationInventors: Tetsuhiro Iida, Yutaka Shiraishi, Ryota Suewaka, Junsuke Tomioka
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Patent number: 7221037Abstract: The present invention provides a method of manufacturing a Group III nitride substrate that has less variations in in-plane carrier concentration and includes crystals grown at a high growth rate.Type: GrantFiled: January 15, 2004Date of Patent: May 22, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Yasuo Kitaoka, Hisashi Minemoto, Isao Kidoguchi, Akihiko Ishibashi
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Patent number: 7198670Abstract: A polarization inverting region is formed by using a board comprising a single crystal of lithium tatalate of a stoichiometric composition or near to the stoichiometric composition and applying a direct current electric field having an electric field intensity equal to or lower than 5 [kV/mm] for 1 [second] or longer. A periodically poled region can be formed without needing a complicated constitution for applying a pulse voltage or a complicated constitution for applying a strong electric field.Type: GrantFiled: January 20, 2005Date of Patent: April 3, 2007Assignee: Shimadzu CorporationInventors: Katuhiko Tokuda, Kazutomo Kadokura
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Patent number: 7194801Abstract: A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists in controlling the growth and stoichiometry of the film. The method allows for the fabrication of ultrathin films such as electrolyte films and dielectric films.Type: GrantFiled: March 23, 2001Date of Patent: March 27, 2007Assignee: Cymbet CorporationInventors: Mark Lynn Jenson, Victor Henry Weiss
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Patent number: 7135074Abstract: A method for manufacturing a silicon carbide single crystal includes the steps of: preparing a seed crystal with a screw dislocation generation region; and growing the single crystal on a growth surface of the seed crystal. The generation region occupies equal to or smaller than 50% of the growth surface, which has an offset angle equal to or smaller than 60 degrees. The screw dislocation density in the single crystal generated from the generation region is higher than that in the other region. The single crystal includes a flat C-surface facet disposed on a growing surface of the single crystal. The C-surface facet overlaps at least one of parts of the growing surface provided by projecting the generation region in a direction perpendicular to the growth surface and in a direction parallel to a <0001> axis, respectively.Type: GrantFiled: August 5, 2004Date of Patent: November 14, 2006Assignees: Kabushiki Kaisha Toyota Chuo Kenkyusho, Denso CorporationInventors: Itaru Gunjishima, Daisuke Nakamura, Naohiro Sugiyama, Fusao Hirose
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Patent number: 7063742Abstract: A substrate is polished and made an inclined substrate, which is exposed to a hydrogen plasma and is thereby smoothened. The substrate is then heated controlledly until it surface temperature reaches 830° C. Meanwhile, a gas mixture of 1% methane, 50 ppm hydrogen sulfide and hydrogen is introduced in a tubular reaction vessel to flow therethrough at 200 ml/min, where microwave plasma is excited to cause n-type semiconductor diamond to epitaxially grow on the substrate. An ion doped n-type semiconductor is thus formed that has a single donor level of an activation energy at 0.38 eV and is high in mobility and of high quality.Type: GrantFiled: March 27, 2000Date of Patent: June 20, 2006Assignee: Japan Science and Technology AgencyInventors: Toshihiro Ando, Yoichiro Sato, Eiji Yasu, Mika Gamo, Isao Sakaguchi
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Patent number: 6994747Abstract: An optical member manufacturing method of the present invention has a growth step of growing an ingot of a fluoride crystal, a plane orientation measurement step of measuring two or more crystal plane orientations of the ingot, a cutout step of cutting out an optical material from the ingot along any one of the crystal plane orientations obtained in the plane orientation measurement step, and a machining step of performing predetermined machining processing on the optical material to obtain an optical member.Type: GrantFiled: July 17, 2002Date of Patent: February 7, 2006Assignee: Nikon CorporationInventors: Hiroyuki Hiraiwa, Shigeru Sakuma, Minako Azumi, Masaaki Mochida
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Patent number: 6979938Abstract: A thin film device comprises: a substrate and a thin film having a thickness formed on the substrate, wherein the thickness of the thin film is at least 1 micrometer, a crystal structure having crystals with a grain size formed within the thin film, wherein the grain size of a majority of the crystals includes a height to width ratio greater than three to two.Type: GrantFiled: June 18, 2003Date of Patent: December 27, 2005Assignee: Xerox CorporationInventor: Scott E. Solberg
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Patent number: 6962613Abstract: A method and system for fabricating solid-state energy-storage devices including fabrication films for devices without an anneal step, especially a cathode anneal of thin-film batteries. A film of an energy-storage device is fabricated by depositing a first material layer to a location on a substrate. Energy is supplied directly to the material forming the film. The energy can be in the form of energized ions of a second material. Supplying energy directly to the material and/or the film being deposited assists the growth of the crystalline structure of film. For lithium-ion energy-storage devices, the first material is an intercalation material, which releasably stores lithium ions therein. Supercapacitors and energy-conversion devices are also fabricated according the methods.Type: GrantFiled: March 23, 2001Date of Patent: November 8, 2005Assignee: Cymbet CorporationInventor: Mark L. Jenson
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Patent number: 6929693Abstract: The invention relates to a tetragonal single crystal (1, 11) of composition: Z(H,D)2MO4 where Z is an element or a group of elements, or a mixture of elements and/or of groups of elements chosen from the group K, N(H,D)4, Rb, Ce where M is an element chosen from the group P, As and where (H,D) is hydrogen and/or deuterium comprising an approximately parallelepipedal region of large dimensions, especially one in which the length of each of the edges of the faces, AC1, AC2, AC3, is greater than or equal to 200 mm, in particular greater than or equal to 500 mm, which crystal is obtained by crystal growth from solution, from an approximately parallelepipedal single-crystal seed (2, 22) whose edges of the faces have lengths of AG1, AG2, AG3.Type: GrantFiled: November 7, 2001Date of Patent: August 16, 2005Assignee: Saint-Gobain Cristaux & DetecteursInventor: Vitali Tatartchenko
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Patent number: 6924921Abstract: A three dimensional photonic crystal and layer-by-layer processes of fabricating the photonic crystal. A substrate is exposed to a plurality of first microspheres made of a first material, the first material being of a type that will bond to the templated substrate and form a self-passivated layer of first microspheres to produce a first layer. The first layer is exposed to a plurality of second microspheres made of a second material, the second material being of a type that will bond to the first layer and form a self-passivated layer of second microspheres. This layering of alternating first and second microspheres can be repeated as desired to build a three dimensional photonic crystal of desired geometry. Charged polymers such as polyelectrolyte coatings can be used to create the bonds.Type: GrantFiled: December 22, 2003Date of Patent: August 2, 2005Assignee: MCNC Research & Development InstituteInventors: John South Lewis, lll, Scott Halden Goodwin-Johansson, Brian Rhys Stoner, Sonia Grego, David Edward Dausch
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Patent number: 6924509Abstract: Monoatomic and monocrystalline layer of large size, in diamond type carbon, and method for the manufacture of this layer. According to the invention, a monocrystalline substrate (2) is formed in SiC terminated by an atomic plane of carbon according to a reconstruction c(2×2) and at least one annealing is carried out, capable of transforming this atomic plane, which is a plane of dimers C?C (4) of sp configuration, into a plane of dimers C—C (8) of sp3 configuration. Application to microelectronics, optics, optoelectronics, micromechanics and biomaterials.Type: GrantFiled: September 23, 2004Date of Patent: August 2, 2005Assignees: Commissariat a l'Energie Atomique, Centre National de la Recherche ScientifiqueInventors: Vincent Derycke, Gérald Dujardin, Andrew Mayne, Patrick Soukiassian
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Patent number: 6916373Abstract: A method for manufacturing a semiconductor using a wafer carrier, wherein the temperature of a wafer can be made uniform with few differences in surface composition distribution. A plurality of grooves are formed at the bottom of a wafer pocket of a wafer carrier, to make uniform the temperature of the wafer surface by diffusing heat. The grooves are deeper at the peripheral part of the wafer than at the central part, and groove density is higher at the peripheral part than at the central part. The groove patterns may include a plurality of wedge-shaped grooves widening from the central part toward the peripheral part, a plurality of circular grooves with narrowing interval therebetween from the central part toward the peripheral part, circular grooves with the diameter shortened from the central part toward the peripheral part, and square grooves with shortened sides from the central part toward the peripheral part.Type: GrantFiled: June 2, 2003Date of Patent: July 12, 2005Assignee: Oki Electric Industry Co., Ltd.Inventor: Koji Nakamura
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Patent number: 6866713Abstract: The present invention provides for a process for preparing a single crystal silicon ingot by the Czochralski method. The process comprises selecting a seed crystal for Czochralski growth wherein the seed crystal comprises vacancy dominated single crystal silicon.Type: GrantFiled: October 28, 2002Date of Patent: March 15, 2005Assignee: MEMC Electronic Materials, Inc.Inventors: Hariprasad Sreedharamurthy, Mohsen Banan
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Patent number: 6863728Abstract: A low defect (e.g., dislocation and micropipe) density silicon carbide (SiC) is provided as well as an apparatus and method for growing the same. The SiC crystal, grown using sublimation techniques, is preferably divided into two stages of growth. During the first stage of growth, the crystal grows in a normal direction while simultaneously expanding laterally. Although dislocations and other material defects may propagate within the axially grown material, defect propagation and generation in the laterally grown material are substantially reduced, if not altogether eliminated. After the crystal has expanded to the desired diameter, the second stage of growth begins in which lateral growth is suppressed and normal growth is enhanced. A substantially reduced defect density is maintained within the axially grown material that is based on the laterally grown first stage material.Type: GrantFiled: May 31, 2002Date of Patent: March 8, 2005Assignee: The Fox Group, Inc.Inventors: Yury Alexandrovich Vodakov, Mark Grigorievich Ramm, Evgeny Nikolaevich Mokhov, Alexandr Dmitrievich Roenkov, Yury Nikolaevich Makarov, Sergei Yurievich Karpov, Mark Spiridonovich Ramm, Heikki I. Helava
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Patent number: 6861144Abstract: Foamed polycrystalline silicon having bubbles therein and an apparent density of 2.20 g/cm3 or less. This silicon generates an extremely small amount of fine grains by crushing and can be easily crushed. There is also provided a method of producing foamed polycrystalline silicon. There is further provided a polycrystalline silicon production apparatus in which the deposition and melting of silicon are carried out on the inner surface of a cylindrical vessel, a chlorosilane feed pipe is inserted into the cylindrical vessel to a silicon molten liquid, and seal gas is supplied into a space between the cylindrical vessel and the chlorosilane feed pipe.Type: GrantFiled: May 9, 2001Date of Patent: March 1, 2005Assignee: Tokuyama CorporationInventors: Satoru Wakamatsu, Hiroyuki Oda
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Patent number: 6824611Abstract: A method and apparatus for controlled, extended and repeatable growth of high quality silicon carbide boules of a desired polytype is disclosed which utilizes graphite crucibles coated with a thin coating of a metal carbide and in particular carbides selected from the group consisting of tantalum carbide, hafnium carbide, niobium carbide, titanium carbide, zirconium carbide, tungsten carbide and vanadium carbide.Type: GrantFiled: October 8, 1999Date of Patent: November 30, 2004Assignee: Cree, Inc.Inventors: Olle Claes Erik Kordina, Michael James Paisley
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Publication number: 20040194689Abstract: An improved method for controlling nucleation sites during superabrasive particle synthesis can provide high quality industrial superabrasive particles with high yield and a narrow size distribution. The synthesis method can include forming a raw material layer, forming a particulate catalyst layer adjacent the raw material layer, and placing crystalline seeds in a predetermined pattern at least partially in the catalyst layer or raw material layer to form a growth precursor. Alternatively, the raw material and catalyst material can be mixed to form a particulate crystal growth layer and then placing the crystalline seeds in a predetermined pattern in the growth layer. Preferably, seeds can be substantially surrounded by catalyst material. The growth precursor can be maintained at a temperature and pressure at which the superabrasive crystal is thermodynamically stable for a time sufficient for a desired degree of growth.Type: ApplicationFiled: March 1, 2004Publication date: October 7, 2004Inventor: Chien-Min Sung