Abstract: A semiconductor manufacturing apparatus according to the present embodiment comprises a chamber. A chemical-agent supply part is configured to supply a water-repellent agent or an organic solvent to a surface of a semiconductor substrate having been cleaned with a cleaning liquid in the chamber. A spray part is configured to spray a water-capture agent capturing water into an atmosphere in the chamber.

Abstract: A substrate processing apparatus includes a substrate holding unit configured to hold a substrate; a first processing liquid nozzle configured to supply a first processing liquid to a peripheral portion of the substrate; a second processing liquid nozzle configured to supply a second processing liquid, the temperature of which is lower than that of the first processing liquid, to the peripheral portion of the substrate; a first gas supply port configured to supply a first gas at a first temperature to a first gas supplied place on the peripheral portion of the substrate; and a second gas supply port configured to supply a second gas at a second temperature lower than the first temperature to a place closer to the center in the radial direction as compared to the first gas supplied place with respect to the substrate.

Abstract: To provide an apparatus for reclaiming foundry sand and a method for reclaiming foundry sand that can effectively remove binders and so on that attach to returned foundry sand that has been used. Foundry sand that has been used is supplied from a chute for feeding sand 14A to a rotor 16. The rotor 16 is rotated by a driver 20 so that frictional force is generated on the sand in the rotor 16. Then, the sand in the rotor 16 is dropped into the container for washing with water 30 that is located below the rotor 16. In the container for washing with water 30, an agitator 34 is rotated by the driver 20 so that the sand in the container for washing with water 30 is agitated and washed with water.

Abstract: Embodiments of the invention generally relate to apparatus and methods for cleaning chamber components using a cleaning plate. The cleaning plate is adapted to be positioned on a substrate support during a cleaning process, and includes a plurality of turbulence-inducing structures. The turbulence-inducing structures induce a turbulent flow of cleaning gas while the cleaning plate is rotated during a cleaning process. The cleaning plate increases the retention time of the cleaning gas near the showerhead during cleaning. Additionally, the cleaning plate reduces concentration gradients within the cleaning plate to provide a more effective clean. The method includes positioning a cleaning plate adjacent to a showerhead, and introducing cleaning gas to the space between the showerhead and the cleaning plate. A material deposited on the surface of the showerhead is then heated and vaporized in the presence of the cleaning gas, and then exhausted from the processing chamber.

Abstract: Provided is a film washout device includes a housing defining a rinsing chamber and a drain in fluid communication with the rinsing chamber. A drum is rotatably coupled to the housing and is configured to be engageable with the photosensitive material for washout thereof. A booster pump is operatively coupled to the housing and includes a pump inlet and a pump outlet, the pump inlet being fluidly connectable to the pressurized fluid source to receive fluid therefrom at an inlet pressure, the pump being configured to elevate the pressure of the fluid exiting the pump via the pump outlet. A plurality of nozzles are coupled to the housing and in fluid communication with the pump to receive fluid therefrom. The plurality of nozzles are configured to direct fluid into the rinsing chamber for washout of the photosensitive material.

Abstract: A washing/drying machine according to the present invention is capable of efficiently performing a drying operation to reduce a drying period. The washing/drying machine includes a tank (11) for storing used water, and the water is circulated from the tank (11) for dehumidification of air circulated through a drying air duct (20). Since the water is circulated from the tank (11), a great amount of water can be supplied as dehumidification water for higher dehumidification efficiency. The amount of the circulated water (the amount of cooling water (dehumidification water)) is reduced in a first half of a drying process, and increased in a second half of the drying process. As a result, the drying efficiency is improved during the drying operation, thereby reducing the drying period.

Abstract: A wafer spin chuck and an etcher using the same are provided. According to an aspect of the present invention, there is provide a wafer spin chuck device comprising: a spin body which spins a wafer; and a stationary body which holds the spin body and is under the spin body with a space between the spin body and the stationary body, wherein the stationary body includes a blocking unit which blocks the space with a fluid.

Abstract: A washing apparatus is provided with a washing tub 2 whose rotating axis is in a horizontal direction or in a horizontally inclined direction, and has a concave and convex curve surface 22 installed on an inside wall surface of the washing tub 2 as well as has a baffle 25 protruding in the direction of the rotating axis installed. Then, by rotating the washing tub with a level of a cleaning liquid to be supplied to the washing tub 2 set to be higher than the rotating axis, a spurious non-gravity wash method is adopted in which damage to a washing article is small. In addition, by rotating the washing tub 2 with the level of the cleaning liquid to be supplied to the washing tub 2 set to be lower than the rotating axis, a beat wash method in which water saving effect is high is adopted.

Abstract: A system and method for a surgical scrub automated cleaning station are disclosed. The surgical scrub cylinder automated cleaning station includes a rotatable, extendable, and retractable wash cylinder that is operable to accommodate any variety of arm length. More specifically, the surgical scrub automated cleaning station may include an accordion, telescoping, or otherwise adjustable cylinder to accommodate a variety of arm lengths. The surgical scrub cylinder automated cleaning station may be used to provide a surgeon or other health care personnel with a hand and forearm washing. The surgical scrub cylinder automated cleaning station may also be monitored to ensure compliance with one or more hygiene protocols.

Abstract: The invention relates to an apparatus (1) for washing and drying leaf products and more generically vegetables, comprising a frame (2), a centrifugation basket (3), a container (tank) (4) within which said centrifugation basket (3) is provided, a basin (6), communicating with said container (4) for inlet and discharge of washing water, said centrifugation basket (3) being pivoted on said frame (2) so as to rotate of about 180° from a working position to a discharge position, and vice versa, and means (7) for collection and removal of washed and dried product, said means being provided raised with respect to said centrifugation basket (3), in a position corresponding to the discharge position of the same centrifugation basket (3), being further provided driving means for said centrifugation basket permitting driving said basket (3) at at least two rotation speeds, respectively a washing speed and a drying speed.

Abstract: The present invention provides a method, apparatus, and system for efficient, high throughput, consistent cleaning of soil from the root system of a plant. In one embodiment, the method generally comprises positioning a plant adjacent a sprayer assembly having at least one nozzle angled so as to impact the root system at a predetermined position, providing a stream of water from a reservoir through the nozzle of the sprayer assembly, and rotating at least one of the root system and the nozzle relative to the other to remove the soil from the root system. The present invention further describes a recycling system adapted to recycle water expended during the cleaning process to minimize losses and to capture and return dislodged soil to the field from which the plant is extracted.

Abstract: The surface treatment apparatus includes: a supply device for supplying an introduced workpiece to the inside of a treatment cell of a subsequent surface treatment device; a surface treatment device for supplying a surface treatment liquid to the inside of the treatment cell while rotating the treatment cell, thereby performing a surface treatment on the workpiece; a workpiece collection device for inverting the treatment cell, and squirting the inside of the treatment cell with water from below to flow out the workpiece, thereby collecting the workpiece into a collection vessel; a drying device for receiving the collection vessel from the workpiece collection device, and exposing the workpiece within the collection vessel to air, thereby drying the workpiece; and a carrying device for carrying the treatment cell between the surface treatment devices, and between the surface treatment device and the workpiece device, wherein the surface treatment apparatus includes the one or more surface treatment devices.

Abstract: A wafer spin chuck and an etcher using the same are provided. According to an aspect of the present invention, there is provide a wafer spin chuck device comprising: a spin body which spins a wafer; and a stationary body which holds the spin body and is under the spin body with a space between the spin body and the stationary body, wherein the stationary body includes a blocking unit which blocks the space with a fluid.

Abstract: A liquid processing apparatus includes a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; a rotary cup configured to surround the substrate and to rotate along with the substrate; a liquid supply mechanism configured to supply a process liquid onto at least a front surface of the substrate; and an exhaust/drain section configured to perform gas-exhausting and liquid-draining out of the rotary cup; and a guide member disposed to surround the substrate, having an upper surface to be substantially continued to the front surface of the substrate, and configured to rotate along with the substrate holding member and the rotary cup, such that a process liquid supplied onto the front surface of the substrate and thrown off from the substrate is guided by the upper surface of the guide member from the rotary cup to the exhaust/drain section.

Abstract: A wash cylinder or chamber for an automated cleaning station to clean an object or a person's body part includes nozzles on the interior of the cylinder, the nozzles of one embodiment comprising an increasing roll angle providing a novel spray pattern. Additionally, embodiments of the invention include fluid guidance and conveyance structures, angled nozzles, sealing structures, finger guards, wash chamber seating mechanisms and drains, and nozzle ribs that prevent the nozzle from being dislodged during the operation of the cleaning station Also disclosed are methods of washing an object or body part using a wash cylinder or chamber and methods of assembling a wash cylinder or chamber.

Abstract: A wash cylinder or chamber for an automated cleaning station to clean an object or a person's body part includes nozzles on the interior of the cylinder, the nozzles of one embodiment comprising an increasing roll angle providing a novel spray pattern. Additionally, embodiments of the invention include fluid guidance and conveyance structures, angled nozzles, sealing structures, finger guards, nozzle ribs, wash chamber seating mechanisms and drains, and nozzle inlays having a plurality of nozzles. Also disclosed are methods of washing an object or body part using a wash cylinder or chamber and methods of assembling a wash cylinder or chamber.

Abstract: A wash cylinder or chamber for an automated cleaning station to clean an object or a person's body part includes nozzles on the interior of the cylinder, the nozzles of one embodiment comprising an increasing roll angle providing a novel spray pattern. Additionally, embodiments of the invention include fluid guidance and conveyance structures, angled nozzles, sealing structures, finger guards, nozzle ribs, wash chamber seating mechanisms and drains, and nozzle inlays having a plurality of nozzles. Also disclosed are methods of washing an object or body part using a wash cylinder or chamber and methods of assembling a wash cylinder or chamber.

Abstract: On the top surface of a substrate, an atmosphere blocker plate, of which plan size is equal or larger than the substrate size, is disposed opposing to the top surface of the substrate. In the rim portion of the atmosphere blocker plate, a vertical through hole is formed so that a nozzle can be inserted into the hole. Nozzle move mechanism moves the nozzle to insert the nozzle to the through hole and position it to the opposing position that is opposed to the top rim portion of the substrate and to the retract position that is away from the atmosphere blocker plate. Processing liquid is supplied from the nozzle, which is positioned to the opposing position, to the top rim portion of the substrate.

Abstract: The present invention provides a nozzle device comprising a substantially cylindrical nozzle body and a cup member which is arranged within the cylinder of the nozzle body and jets out fluid droplets from the tip thereof while being driven to turn, wherein two or more fluids including a detergent and a gas are mixed and jetted out of the tip of the nozzle in order to achieve sufficient cleaning of a single wafer without a re-adhesion of contamination or destruction of the pattern of the wafer. Therefore, the fluid droplets can be controlled to a smaller size than the conventional double-fluid cleaning system or high pressure jet system.

Abstract: A wash cylinder or chamber for an automated cleaning station to clean an object or a person's body part includes nozzles on the interior of the cylinder, the nozzles of one embodiment comprising an increasing roll angle providing a novel spray pattern. Additionally, embodiments of the invention include fluid guidance and conveyance structures, angled nozzles, sealing structures, finger guards, nozzle ribs, wash chamber seating mechanisms and drains, and nozzle inlays having a plurality of nozzles. Also disclosed are methods of washing an object or body part using a wash cylinder or chamber and methods of assembling a wash cylinder or chamber.

Abstract: A wash cylinder or chamber for an automated cleaning station to clean an object or a person's body part includes nozzles on the interior of the cylinder, the nozzles of one embodiment comprising an increasing roll angle providing a novel spray pattern. Additionally, embodiments of the invention include fluid guidance and conveyance structures, angled nozzles, sealing structures, finger guards, nozzle ribs, wash chamber seating mechanisms and drains, and nozzle inlays having a plurality of nozzles. Also disclosed are methods of washing an object or body part using a wash cylinder or chamber and methods of assembling a wash cylinder or chamber.

Abstract: A wash cylinder or chamber for an automated cleaning station to clean an object or a person's body part includes nozzles on the interior of the cylinder, the nozzles of one embodiment comprising an increasing roll angle providing a novel spray pattern. Additionally, embodiments of the invention include fluid guidance and conveyance structures, angled nozzles, sealing structures, finger guards, nozzle ribs, wash chamber seating mechanisms and drains, and nozzle inlays having a plurality of nozzles. Also disclosed are methods of washing an object or body part using a wash cylinder or chamber and methods of assembling a wash cylinder or chamber.

Abstract: A wash cylinder or chamber for an automated cleaning station to clean an object or a person's body part includes nozzles on the interior of the cylinder, the nozzles of one embodiment comprising an increasing roll angle providing a novel spray pattern. Additionally, embodiments of the invention include fluid guidance and conveyance structures, angled nozzles, sealing structures, finger guards, nozzle ribs, wash chamber seating mechanisms and drains, and nozzle inlays having a plurality of nozzles. Also disclosed are methods of washing an object or body part using a wash cylinder or chamber and methods of assembling a wash cylinder or chamber.

Abstract: A vacuum drum washer is designed to enable the use of an end-draining drum for drum lengths exceeding 20 feet. The drum washer includes a cylindrical drum having a mesh screen defining an exterior wall. A plurality of outer filtrate channels are disposed radially inward from the mesh screen. A plurality of inner filtrate channels are disposed radially inward from the outer filtrate channels and extend along generally less than an entire length of the drum. A transfer channel connects the outer filtrate channels and the inner filtrate channels. A plurality of radial drainage chutes are disposed adjacent a head end of the outer and inner filtrate channels, which direct the filtrate to a drain valve.

Abstract: A spa filter cartridge cleaning apparatus configured to substantially remove contaminants from a spa filter cartridge. The cleaning apparatus further includes a container that has a plurality of walls configured to define an interior volume of sufficient size to receive a spa filter cartridge therein. A cleaning cylinder is disposed within the container and functions to be mateably connected with the hollow core of a spa filter cartridge. The cleaning cylinder further includes a plurality of apertures that function to discharge cleaning liquid disposed within the cleaning cylinder. An attachment mechanism operably connects the cleaning cylinder to a water source. A pinion gear is operably connected to one end of the cleaning cylinder and functions to rotate the cleaning cylinder for increased cleaning effectiveness of the spa filter cartridge secured thereto.

Abstract: An aqueous washing system and method of operation for washing of articles such as engineering components, including curing of resin impregnated porous metal components, comprising placing the articles into a process chamber (10) and supplying from a supply tank (11) an aqueous washing fluid at a temperature at or above 100° C. A head of pressure is established above the fluid in tank (11) whereby the fluid may be transferred by a pump (P1) to the process chamber (10). After a washing cycle the articles are rinsed by clean water and then vacuum dried before removal from the process chamber (10).

Abstract: A vending machine and a hose controller system for vending machines wherein the dispenser hose is axially and torsionally controlled to facilitate slight twisting, thereby minimizing applicator tool resistance, and making it easier for users to operate the remote vending tool on the hose distal end. The elongated reinforced applicator hose terminates at the controller, which bridges the hose between the outdoors and the cabinet interior. The controller has an angulated bracket mounted within the vending machine cabinet. A collar assembly secured on the bracket top above a hose feed-through orifice has a terminator, a bushing, and a cooperating yoke that are coaxially secured. The terminator anchors the hose end and is seated within the yoke. A rigid lug projects radially from the yoke. A rigid restrictor surmounts the collar assembly and limits rotation by contact with the lug.

Abstract: A vacuum drum washer is designed to enable the use of an end-draining drum for drum lengths exceeding 20 feet. The drum washer includes a cylindrical drum having a mesh screen defining an exterior wall. A plurality of outer filtrate channels are disposed radially inward from the mesh screen. A plurality of inner filtrate channels are disposed radially inward from the outer filtrate channels and extend along generally less than an entire length of the drum. A transfer channel connects the outer filtrate channels and the inner filtrate channels. A plurality of radial drainage chutes are disposed adjacent a head end of the outer and inner filtrate channels, which direct the filtrate to a drain valve.

Abstract: An oscillating machine for washing trays. The machine includes a housing, a frame, a water system, and an air system. The frame is oscillatingly mounted in the housing and holds the trays to be washed. The water system is contained in the housing and supplies water to wash the trays. The air system is contained in the housing and supplies air to dry the trays.

Abstract: A device for wet processing of a semiconductor-containing substrate that addresses contamination in the wet process by removing undesired sources of gas contamination, the method involving pumping a processing liquid through a degasifier, exposing the semiconductor wafer, in a vessel, to the degasified processing liquid; and optionally recirculating the processing liquid through the degasifier and back into the vessel.

Abstract: The apparatus of the invention comprises a plurality of vessels, each vessel having a soil intake opening, a soil discharge opening, and a soil motivator associated therewith. The apparatus also has a liquid delivery system configured to deliver a liquid into at least one of the vessels, and a drainage system configured to collect the liquid and the contaminants. The vessels are arranged in sequence so that soil discharged from the discharge opening of one vessel is directly deposited into the intake opening of the next vessel. The method of the invention comprises the steps of: introducing the contaminated soil into a first vessel; washing the soil with a first liquid cleaning agent; passing the soil through a plurality of vessels in sequence wherein said first liquid cleaning agent is removed by a second liquid cleaning agent and water; draining said second liquid cleaning agent and water from the soil; and, rinsing the soil with water.

Abstract: A method and apparatus for dispensing a fluid of mixed disinfectant and water in a spray to footwear of a worker is disclosed. The apparatus includes a housing including a base section, a platform installed within the base section, a fluid dispensing assembly coupled to the housing, and a fluid dispensing system of mixed disinfectant and water including a first valve assembly configured to dispense fluid to the fluid dispensing assembly when a force is applied to the platform so that the spray of the fluid is dispensed onto the footwear. A method of sanitizing the footwear of a worker with a fluid may include the steps of detecting when the worker has stepped onto a platform and dispensing the fluid onto the footwear for at least a predetermined period.

Abstract: A washer and method for cleaning poultry pads or similar items includes a tub which rotates around a horizontal axis. The tub is mounted on a wheeled frame for towing by a car, tractor or other vehicle. Dirty, soiled pads are placed in the tub on-site and the door is then secured. As the tub rotates during its washing cycle the pads are sprayed by water jets positioned along the interior central water conduit. Water collected in a drain is discharged at each revolution through an open gate valve located on the bottom of the drain. Baffles inside the tub agitate the pads and water, thus improving the cleaning ability of the washer.

Abstract: An oxide and coating removal system includes a mobile gantry or transport system supporting an end effector and high energy waterjet rotating nozzles judiciously located relative to the surface of the vehicle and includes positioning mechanism for locating the nozzle discretely relative to the vehicle. An environmentally safe system serves to re-claim the effluent by removing the contaminated particles and returning the re-claimed water to the pumping system.

Abstract: A machine for treating bulk material of industrial volume parts, having a treatment drum which is arranged with a horizontal axis and can be driven in both directions of rotation around said axis, the treatment drum comprises a permanently open co-axial inlet aperture and a permanently open co-axial discharge aperture, the treatment drum comprises a set of worm-like inner blades which extend at least as far as the discharge aperture and which, in the first direction of rotation of the treatment drum, reposition the bulk material in the drum and, in the second direction of rotation of the treatment drum, convey the bulk material through the discharge aperture.

Abstract: A machine for carrying out a process of treating small parts with a liquid treatment medium, especially for coating the small parts or for chemically deburring the small parts, has a closable container which includes a drum to receive the parts. The drum is rotatingly drivable and adjustable between an inclined axis position and a vertical axis position. The process includes filling the drum with small parts and evacuating the closed container. Filling the container with a treatment medium, with the internal pressure set to a value in excess of the steam pressure of the most liquid component of the treatment medium. Inclining the drum to its inclined axis position and rotatingly driving the drum at a low speed. Ventilating the container and setting the drum to its vertical position.

Abstract: A portable ground soil remediation apparatus and method utilizing a water and biodegradeable soap mixture to result in an safe solution to effectively remove crude or refined oil from the soil, as well as the toxins associated with this type of contamination. The present invention includes at least one elongated, rotatable chamber filled with the soap mixture and having internal lifting means to pick up soil and provide cleansing with the soap mixture. Additionally, a means for injecting fluid is placed within the chamber to provide additional cleansing capability and to replenish the soap mixture. The present invention is adapted to allow effective soil movement through at least one soil cleaning chambers, which minimizes wear due to the lack of internal blades and other moving components.

Abstract: There are disclosed an apparatus and method for cleaning a precision substrate through use of high-frequency- or ultrasonic-applied cleaning liquid. An object substrate is horizontally held and rotated. High-frequency- or ultrasonic-applied cleaning liquid is jetted toward the surface of the object substrate from first cleaning liquid jetting unit disposed above the object substrate, and the nozzle of the first cleaning liquid jetting unit is moved in parallel with the surface of the object substrate. Cleaning liquid is also fed toward the central portion of the surface of the object substrate from cleaning liquid feed-to-center unit during cleaning. In the cleaning apparatus and method, a sufficiently high cleaning speed is attained.

Abstract: A process of, and apparatus for, washing fragments, such as plastic fragments, in a continuous fashion as part of a recycling operation. The plastic fragments are fed into an axially rotating perforated tube, wherein a stationary washing and rinsing spray header are mounted therethrough for spraying the plastic fragments revolving with the tube. Wash and rinse water pass through the perforations, carrying with the water residue and unwanted particles. The wash water, rinse water and unwanted particles pass into a trough arranged below the revolving tube which collects the water and residue and transports same to either a screen separator in the case of the wash water, or a holding tank in the case of the rinse water. Auxiliary systems are disclosed for using recycled wash water and recycled rinse water for the process. A drying system which receives the plastic fragments from the washing apparatus is also disclosed.

Abstract: A process of, and apparatus for, washing fragments, such as plastic fragments, in a continuous fashion as part of a recycling operation. The plastic fragments are fed into an axially rotating perforated tube, wherein a stationary washing and rinsing spray header are mounted therethrough for spraying the plastic fragments revolving with the tube. Wash and rinse water pass through the perforations, carrying with the water residue and unwanted particles. The wash water, rinse water and unwanted particles pass into a trough arranged below the revolving tube which collects the water and residue and transports same to either a screen separator in the case of the wash water, or a holding tank in the case of the rinse water. Auxiliary systems are disclosed for using recycled wash water and recycled rinse water for the process. A drying system which receives the plastic fragments from the washing apparatus is also disclosed.

Abstract: The device disclosed is for treating an article, i.e., polishing an article, of the type with a rotating vessel where the article to be treated is fastened in relation to the vessel. To enable the article to be treated to be placed in position without the need to remove the particles from the vessel, the article is moved between a loading and unloading position, where the article is outside the mass of particles, and a working position, where it is subjected to the action of the particles to polish and strip pieces of furniture.

Abstract: The invention relates to an apparatus and method for the uniform treatment of the surfaces of a plurality of individual parts when such parts are processed as a single heap by introducing a mass of parts into a vessel where they form a heap; introducing a treatment medium into the vessel; repeatedly separating and dispersing the parts from the heap and then returning the parts back into the heap in during controlled cycles so that all surfaces of the parts to be treated are exposed to and contacted by the treatment medium. While the parts are separated and dispersed from the heap, the treatment medium is forced around, through and out from the parts so that, after a number of cycles, all surfaces of the parts are uniformly treated by said treatment medium.

Abstract: Centrifuge for degreasing and washing objects, particularly industrially manufactured pieces having blind holes, comprises a housing provided with a tilting device for tilting the centrifuge into an inclined position and returning it into an upright position. A rotary centrifuge drum is located within the housing and is equipped with a drive ring connected to an additional drive arrangement having a friction wheel adapted to be pressed against the drive ring to reduce the rotational speed of the centrifuge drum.